A vacuum-wound organic vapor deposition protective device

By setting up air curtains and low-temperature cold traps at the edge of the deposition roller area, the problem of gaseous organic matter contaminating the vacuum chamber is solved, enabling continuous long-distance deposition of organic matter through winding, thus improving production efficiency and the applicability of coating equipment.

CN117051361BActive Publication Date: 2025-10-28LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Patent Information

Application Number
CN202311016768.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-14
Publication Date
2025-10-28
Estimated Expiration
2043-08-14

AI Technical Summary

Technical Problem

Existing technologies cannot effectively protect vacuum chambers from contamination by gaseous organic matter, affecting the continuity and production efficiency of roll-to-roll coating.

Method used

An air curtain and a low-temperature cold trap are installed at the edge of the deposition roller area. The air curtain is composed of gases that do not react with organic matter, and the low-temperature cold trap is connected to a refrigeration unit to restrict and condense organic gases and prevent them from escaping.

Benefits of technology

It effectively reduces the contamination of the vacuum chamber by organic matter, enables continuous long-distance deposition of organic matter, and improves production efficiency and the applicability of coating equipment.

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Abstract

This application relates to the field of coating protection technology, specifically to a vacuum-wound organic matter evaporation protection device, comprising a base film, a deposition roller, an evaporation slit, an air curtain, and a low-temperature cold trap, wherein: the base film is tightly attached to and covers the deposition roller; the evaporation slit is located on the outside of the deposition roller and communicates with a heating chamber; organic matter is ejected from the evaporation slit in gaseous molecular form through the heating chamber and contacts the base film on the deposition roller; the air curtain is located on both sides of the evaporation slit, one end connected to the evaporation slit and the other end forming a first gap with the base film; the low-temperature cold trap is located on the outside of the air curtain, one end connected to the air curtain and the other end forming a second gap with the base film. This application, by setting the air curtain and the low-temperature cold trap at the edge of the deposition roller area, confines the high-temperature evaporated organic matter within the deposition area, reducing contamination of the vacuum chamber and the deposition roller, and solving the problem of contamination of the chamber by organic matter evaporation.
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Description

Technical Field

[0001] This application relates to the field of coating protection technology, and more specifically, to a vacuum-wound organic vapor deposition protection device. Background Technology

[0002] Roll-up vacuum coating technology has been widely used in the industrial-scale preparation of oxide high-barrier films due to its low cost and high production efficiency.

[0003] During the coating process, organic matter will be deposited on the surface of the deposition roller. In order to meet the requirement of continuous long-distance deposition of film on the deposition roller surface and to prevent organic liquid from contaminating the chamber, a protective device needs to be installed in the width direction.

[0004] In the prior art, although protective devices are disclosed for setting up the end of the roll coating, they are generally used to protect powder and film materials, but cannot protect organic molecules. For example, although a protective sleeve for the roller shaft of thermal spraying is disclosed in patent publication number CN 202322970U, which can prevent ceramic powder from adhering to the roller shaft, it cannot effectively protect against gaseous organic matter and is prone to contaminating the inside of the chamber. Summary of the Invention

[0005] This application provides a vacuum-wound organic vapor deposition protection device, which reduces contamination of the vacuum chamber and the deposition roller by setting an air curtain and a low-temperature cold trap at the edge of the deposition roller area.

[0006] To achieve the above objectives, this application provides a vacuum-wound organic vapor deposition protective device, comprising a base film, a deposition roller, an evaporation slit, an air curtain, and a low-temperature cold trap, wherein: the base film is tightly attached to and covers the deposition roller; the evaporation slit is disposed on the outside of the deposition roller and communicates with a heating chamber; organic matter is ejected from the evaporation slit in the form of gaseous molecules through the heating chamber and contacts the base film on the deposition roller; the air curtain is disposed on both sides of the evaporation slit, with one end connected to the evaporation slit and the other end forming a first gap with the base film; the low-temperature cold trap is disposed on the outside of the air curtain, with one end connected to the air curtain and the other end forming a second gap with the base film.

[0007] Furthermore, the air curtain is composed of gases that do not react with organic matter.

[0008] Furthermore, the cryogenic cold trap is connected to the freezer, and a collection tank is installed below the cryogenic cold trap.

[0009] Furthermore, the temperature range of the cryogenic cold trap is -30℃ to 10℃.

[0010] Furthermore, the width of the first gap is 1-3mm.

[0011] Furthermore, the width of the second gap is <1mm.

[0012] The vacuum-wound organic material vapor deposition protective device provided by this invention has the following beneficial effects:

[0013] This application, by setting an air curtain and a low-temperature cold trap at the edge of the deposition roller area, confines the organic matter evaporated at high temperature within the deposition area, reducing the contamination of the vacuum chamber and deposition roller, solving the problem of contamination of the chamber by organic matter evaporation, realizing continuous long-distance deposition of organic matter in a vacuum environment, improving production efficiency, and showing good industrialization prospects. Attached Figure Description

[0014] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application. In the drawings:

[0015] Figure 1 This is a front view of the vacuum-wound organic vapor deposition protective device provided according to an embodiment of this application;

[0016] Figure 2 This is a side view of a vacuum-wound organic vapor deposition protective device provided according to an embodiment of this application;

[0017] In the figure: 1-Deposition roller, 2-Evaporation slit, 3-Gas curtain, 4-Low temperature cold trap, 5-Organic gas molecules, 6-First slit, 7-Second slit, 8-Base film. Detailed Implementation

[0018] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0019] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0020] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0021] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0022] In addition, the term "multiple" should mean two or more.

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] like Figure 1-2 As shown, this application provides a vacuum-wound organic material evaporation protection device, including a base film 8, a deposition roller 1, an evaporation slit 2, an air curtain 3, and a low-temperature cold trap 4, wherein: the base film 8 is tightly attached to and covers the deposition roller 1; the evaporation slit 2 is located on the outside of the deposition roller 1 and is connected to the heating chamber; organic material is ejected from the evaporation slit 2 in the form of gaseous molecules through the heating chamber and comes into contact with the base film 8 on the deposition roller 1; the air curtain 3 is located on both sides of the evaporation slit 2, with one end connected to the evaporation slit 2 and the other end forming a first gap 6 between it and the base film 8; the low-temperature cold trap 4 is located on the outside of the air curtain 3, with one end connected to the air curtain 3 and the other end forming a second gap 7 between it and the base film 8.

[0025] Specifically, during the vacuum winding organic vapor deposition process, the organic matter is ejected from the evaporation slit 2 in the form of gaseous molecules through the heating chamber. Upon encountering the deposition roller 1 and the base film 8, it condenses to form a liquid film. However, due to the lack of a protective device, the organic gas molecules 5 may escape through the gap between the deposition roller 1 and the evaporation slit 2 and reach outside the deposition area, causing contamination to other areas and thus affecting the implementation of long-distance winding coating. The vacuum winding organic vapor deposition protective device provided in this application embodiment has two protective devices arranged along the width direction on the outside of the evaporation slit 2. The first protective device is an air curtain 3, which can block the organic gas and suppress the escape and diffusion of organic gas molecules 5. The second protective device is a low-temperature isolation device, preferably a low-temperature cold trap 4. By adjusting the temperature of the low-temperature cold trap 4, the organic gas molecules 5 are condensed, thereby effectively preventing the overflow of organic gas molecules 5 and preventing contamination to other areas.

[0026] Furthermore, the air curtain 3 is composed of gases that do not react with organic matter. The air curtain 3 is mainly composed of gases that do not react with organic matter, forming the first line of protection for organic molecules. The width of the air curtain 3 is slightly larger than that of the evaporation slit 2, preferably in the range of 10-80 cm. The organic matter is generally acrylate, and the gas in the air curtain is preferably nitrogen, argon, or other gases that do not affect the evaporation and polymerization of organic gases. The volumetric flow rate of the gas is generally 300-1000 sccm. The gas sprayed outside the evaporation slit 2 can form a high pressure, thereby inhibiting the diffusion of organic gas molecules 5.

[0027] Furthermore, the cryogenic cold trap 4 is connected to a freezer, and a collection tank is installed below the cryogenic cold trap 4. The cryogenic cold trap 4 mainly cools and condenses organic molecules, forming a second layer of protection for a small portion of organic molecules that pass through the air curtain 3. The cryogenic cold trap 4 is connected to an external freezer, which can regulate the temperature of the cryogenic cold trap 4, thereby causing the small portion of overflowing organic gas molecules 5 to condense. After condensation, they enter the collection tank below the cryogenic cold trap 4. After the vacuum winding coating is completed, the organic liquid inside the collection tank can be cleaned.

[0028] Furthermore, the temperature range of the low-temperature cold trap 4 is -30℃ to 10℃. During vacuum winding coating, the temperature of the low-temperature cold trap 4 can be adjusted by a refrigeration unit according to the different condensation temperatures of the organic gas molecules 5, so that the organic gas molecules 5 passing through the air curtain 3 condense and prevent them from overflowing and causing pollution.

[0029] Furthermore, the width of the first gap 6 is 1-3 mm. The smaller the distance of the first gap 6, the better. However, considering that the tension fluctuation of the plastic base film 8 during the winding process causes the plastic base film 8 to undulate, in order to prevent the slit from rubbing against the base film 8, in this embodiment of the application, the width of the first gap 6 is preferably 1-3 mm.

[0030] Furthermore, the width of the second slit 7 is <1mm. The slit width between the cryogenic cold trap 4 and the base film 8 is less than 1mm, allowing only the base film 8 to be wound through.

[0031] More specifically, the vacuum winding organic vapor deposition protection device provided in this application embodiment can be replaced according to the width of the film material. The corresponding position can be adjusted according to the different widths of the film material, so that the outermost edge of the base film 8 on the deposition roller 1 coincides with the outermost edge of the low-temperature cold trap 4. This allows base films 8 of different widths to be deposited on the same coating equipment, and all can suppress organic gas molecules 5. This application, by setting two protective devices—the air curtain 3 and the low-temperature cold trap 4—at the edge of the deposition roller 1 area, confines the high-temperature evaporated organic gas molecules 5 within the deposition area. This reduces the possibility of organic gas molecules 5 escaping through the gap between the evaporation slit 2 and the deposition roller 1 to other areas of the vacuum chamber, causing contamination of the vacuum chamber wall and winding components, and preventing long-distance coating. This helps improve the yield and production efficiency of vacuum coating, while also increasing the film material applicability of the coating equipment.

[0032] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A vacuum-wound organic material vapor deposition protective device, characterized in that, Includes a base film, deposition roller, evaporation slit, air curtain, and cryogenic cold trap, among which: The base film is tightly adhered to and covers the deposition roller; The evaporation slit is located on the outside of the deposition roller and communicates with the heating chamber; Organic matter is ejected from the evaporation slit in the form of gaseous molecules through the heating chamber and comes into contact with the base film on the deposition roller; The air curtain is disposed on both sides of the evaporation slit, with one end connected to the evaporation slit and the other end forming a first gap with the base film; The cryogenic cold trap is disposed on the outside of the air curtain, with one end connected to the air curtain and the other end forming a second gap between it and the base film; The width of the first gap is 1-3mm; The width of the second gap is less than 1 mm.

2. The vacuum-wound organic vapor deposition protective device according to claim 1, characterized in that, The air curtain is composed of gases that do not react with organic matter.

3. The vacuum-wound organic vapor deposition protective device according to claim 1, characterized in that, The low-temperature cold trap is connected to a freezer, and a collection tank is provided below the low-temperature cold trap.

4. The vacuum-wound organic vapor deposition protective device according to claim 1, characterized in that, The temperature range of the cryogenic cold trap is -30℃ to 10℃.

Citation Information

Patent Citations

  • Roll shaft head protecting cover for thermal spraying

    CN202322970U

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    KR100765389B1

  • Vacuum deposition apparatus

    US20120291708A1