Dynamic random access memory and forming method and working method thereof

CN117062437BActive Publication Date: 2026-08-28ICLEAGUE TECH CO LTD
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Patent Information

Application Number
CN202311029458.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-15
Publication Date
2026-08-28
Estimated Expiration
2043-08-15

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Benefits of technology

[0031]本发明的技术方案的动态随机存取存储器中,相邻所述第一沟道柱区和所述第二沟道柱区的若干所述第一沟道柱和若干所述第二沟道柱沿所述第二方向交替排布,每个所述第一沟道柱区的若干所述第一沟道柱具有平行于第二方向的第一中轴线,每个所述第二沟道柱区的若干所述第二沟道柱具有平行于第二方向的第二中轴线,且所述第一中轴线与所述第二中轴线不重合。由于在相邻的所述第一沟道柱之间增加了一个所述第二沟道柱,能够有效提升动态随机存取存储器的集成度。每个所述第一沟道柱区的若干所述第一沟道柱具有平行于第二方向的第一中轴线,每个所述第二沟道柱区的若干所述第二沟道柱具有平行于第二方向的第二中轴线,且所述第一中轴线与所述第二中轴线不重合,能够保证相邻的所述第一沟道柱区和所述第二沟道柱区的所述第一沟道柱和所述第二沟道柱之间相互错开使其具有充足的隔离间隙,进而减少相邻晶体管之间发生短接的问题。

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Abstract

A dynamic random access memory and a forming method and a working method thereof, wherein the memory comprises: a plurality of first channel columns and a plurality of second channel columns arranged alternately along a second direction, the plurality of first channel columns in a first channel column region have first central axes parallel to the second direction, the plurality of second channel columns in a second channel column region have second central axes parallel to the second direction, and the first central axes are not coincident with the second central axes. The integration of the device structure is effectively improved due to the increase of the second channel column between adjacent first channel columns. The first central axes are not coincident with the second central axes of the plurality of second channel columns, which can ensure that the first channel columns and the second channel columns are staggered with each other and have sufficient isolation gap, thereby reducing the problem of short circuit between adjacent transistors. In addition, two independent memory arrays are formed, and a fixed voltage can be applied to the bit line of one of the memory arrays to prevent crosstalk in the other memory array.
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Citation Information

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