A thin film deposition machine based on spin coating and inkjet printing

Abstract

The present application relates to a kind of film based on spin coating method and inkjet printing film forming machine.Combined with the respective advantages of spin coating method and inkjet printing film forming, mainly include center cylinder support, the cylinder support is connected with external motor and can drive machine rotation;The cylinder support can install detachable inkjet print head and material storage;The cylinder support is covered with rotatable turntable, and the radius of turntable can be changed according to production requirements, and connected with material disc by buckle;The material disc is detachable disc, and the structure in the interior can be changed according to production requirements, to reduce cost;The turntable is further provided with a protective shell.Utilize the centrifugal principle of spin coating method to make film uniform, and utilize inkjet printing to reduce the loss of material.This equipment structure is simple, and it is convenient for large-scale quantum dot light emitting diode device film preparation.

Description

Technical Field

[0001] This invention belongs to the field of thin film preparation technology for optoelectronic devices, and relates to a thin film preparation machine based on spin coating and inkjet printing. Background Technology

[0002] The performance of quantum dot light-emitting diode (QLED) devices is greatly affected by the quality of the thin film, which includes roughness and material uniformity.

[0003] Solution spin coating is one of the most commonly used film formation techniques in laboratory research on QLED devices. Due to its relatively simple preparation process, fewer required equipment, low equipment cost, and more uniform film formation, it has been widely used in the preparation of various optoelectronic devices. Figure 4 This demonstration showcases the main process of spin coating, which consists of three main steps: solution drop coating, spin coating, and annealing. Spin coating primarily utilizes the fluidity of liquids. A solution is dropped onto an ITO substrate using a syringe, and after a certain period of high-speed rotation, the centrifugal force generated by the high-speed rotation forms a uniform thin film. The spin-coated ITO substrate is then annealed at high temperature to evaporate the solvent, resulting in a complete and dense film. During this process, the film thickness and quality can be controlled by adjusting the spin coater's speed and changing parameters such as solution concentration, boiling point, and solvent. However, thin films produced using spin coating still face significant challenges. For example, the production of large-area light-emitting devices, especially the fabrication of large-area thin films, differs greatly from the fabrication of experimental devices in the laboratory. In other words, many technical difficulties remain to be resolved in transitioning laboratory-prepared devices to commercial applications.

[0004] To address the shortcomings of spin coating, a series of thin-film processing technologies, including inkjet printing, transfer printing, and photolithography, have been proposed in recent years. Figure 5 As shown, inkjet printing is considered one of the most ideal methods for manufacturing large-area thin films. The entire inkjet printing process mainly includes three steps: First, a fixed volume of ink droplets is stably ejected from a nozzle controlled by an electrical signal; second, the droplets slowly fall and are atomized before reaching a designated position on the substrate below the nozzle; finally, the droplets diffuse and the solvent dries on the substrate to form a uniform and dense thin film. As a non-contact and mask-free film formation process, inkjet printing has advantages such as the ability to fabricate large-area patterns and high ink utilization, but the quality of the films it produces is relatively poor and not uniform enough.

[0005] In conclusion, current technologies make it difficult to simultaneously achieve both high membrane quality and large-area membrane fabrication. Summary of the Invention

[0006] The purpose of this invention is to provide a thin film forming machine based on spin coating and inkjet printing, which combines the advantages of spin coating and inkjet printing technologies in thin film preparation. QLED devices made with this technology have a relatively stable structure, are easy to operate, have good film quality, can achieve large-scale production, and have a high material utilization rate.

[0007] To achieve the above objectives, the technical solution of the present invention is: a film forming machine based on spin coating and inkjet printing, comprising a central cylindrical support column (1), wherein the central cylindrical support column (1) is connected to an external motor and can drive the film forming machine to rotate; the central cylindrical support column (1) can be fitted with a detachable inkjet print head and a material storage device; a rotatable turntable (3) is fitted on the central cylindrical support column (1), and the turntable (3) is connected to a material tray (4) by a snap fastener; the material tray (4) is a detachable tray; the film forming machine utilizes the centrifugal principle of spin coating to make the film uniform, while the inkjet printing method can reduce material loss.

[0008] In one embodiment of the present invention, the radius of the turntable is changed according to production requirements.

[0009] In one embodiment of the present invention, the turntable (3) is further protected by a protective shell (2) to protect the film forming machine.

[0010] In one embodiment of the present invention, the central cylindrical support (1) is connected to the external environment to fix the machine.

[0011] In one embodiment of the present invention, the inkjet printhead is based on inkjet printing technology.

[0012] In one embodiment of the present invention, the turntable (3) is made using the principle of a centrifuge, and the turntable (3) has an interface that can be connected to external devices.

[0013] In one embodiment of the present invention, the material tray (4) is used to place the device substrate, and the material tray (4) has a device for fixing the substrate.

[0014] In one embodiment of the present invention, the outer protective shell (2) is not rotatable and can be directly connected to the ground.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The centrifugal principle of spin coating ensures uniform film formation, while inkjet printing reduces material loss. A film-forming machine based on spin coating and inkjet printing combines the advantages of both techniques. QLED devices produced using this technology exhibit stable structures, are easy to operate, produce high-quality films, can be mass-produced with high material utilization, and have a simple structure, making them suitable for large-scale QLED device film fabrication. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this invention or related technologies, the accompanying drawings used in this document will be briefly introduced below. Obviously, the drawings described below are merely embodiments disclosed in this invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without any creative effort.

[0018] Figure 1 This is an external outline view of the novel film-forming machine of the present invention;

[0019] Figure 2 A top view of the material tray of the new molding machine;

[0020] Figure 3 Circuit diagram for the printhead used in inkjet printing;

[0021] Figure 4 This is a flow chart of the spin coating process;

[0022] Figure 5 This is a flowchart of the inkjet printing process. Detailed Implementation

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0025] This invention provides a film forming machine based on spin coating and inkjet printing, including a central cylindrical support column (1), which is connected to an external motor to drive the film forming machine to rotate; the central cylindrical support column (1) can be equipped with a detachable inkjet printhead and a material storage device; a rotatable turntable (3) is fitted on the central cylindrical support column (1), and the turntable (3) is connected to a material tray (4) by a snap fastener; the material tray (4) is a detachable tray; the film forming machine uses the centrifugal principle of spin coating to make the film uniform, while the inkjet printing method can reduce material loss.

[0026] The following are specific implementation examples of the present invention. Example

[0027] A film-making machine includes a central cylindrical support column 1, which is connected to an external motor to drive the machine to rotate; the cylindrical support column 1 can be fitted with a detachable inkjet printhead. Figure 3 The cylindrical support column has a rotating turntable 3, the radius of which can be changed according to production requirements. It is connected to the material tray by a buckle. The material tray 4 is a detachable tray, and its internal structure can be changed according to production requirements in order to reduce costs. The turntable 3 is also covered by a protective shell 2 to prevent safety accidents. Example

[0028] A film-making machine includes a central cylindrical support column 1, which is connected to an external motor to drive the machine to rotate; the cylindrical support column 1 can be fitted with a detachable inkjet printhead. Figure 3The cylindrical support has a rotating turntable 3, the radius of which can be changed according to production requirements. The material tray is not removable. This is intended to carry out specialized film production and avoid interference between different processes and materials or reduce the quality of the film. At this time, the substrate, such as the ITO substrate, can be directly disassembled for further material processing. There is also a protective shell 2 outside the turntable 3 to prevent safety accidents.

[0029] The above are preferred embodiments of the present invention. Any changes made to the technical solution of the present invention that do not exceed the scope of the technical solution of the present invention shall fall within the protection scope of the present invention.

Claims

1. A thin film forming machine based on spin coating and inkjet printing, characterized in that, The machine includes a central cylindrical support column (1), which is connected to an external motor to drive the film-making machine to rotate; the central cylindrical support column (1) can be fitted with a detachable inkjet printhead and a material storage device; a rotatable turntable (3) is fitted on the central cylindrical support column (1), and the turntable (3) is connected to a material tray (4) by a snap-fit; the material tray (4) is a detachable tray; the film-making machine uses the centrifugal principle of spin coating to make the film uniform, while the inkjet printing method can reduce material loss; the radius of the turntable can be changed according to production requirements; there is also a protective shell (2) outside the turntable (3) to protect the film-making machine; the central cylindrical support column (1) is connected to the external environment to fix the machine; the material tray (4) is used to place the device substrate, and there is a device for fixing the substrate on the material tray (4).

2. A thin film forming machine based on spin coating and inkjet printing according to claim 1, characterized in that, The turntable (3) is made using the principle of a centrifuge, and the turntable (3) has an interface that can be connected to external devices.

3. A thin film forming machine based on spin coating and inkjet printing according to claim 1, characterized in that, The outer protective shell (2) cannot rotate and can be directly connected to the ground.

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