Coolant recovery structure, testing device, and temperature control system

Abstract

The application relates to the technical field of semiconductor detection, and provides a secondary refrigerant recovery structure, a test device and a temperature control system. The secondary refrigerant recovery structure comprises a gas inlet pipeline, a pressure relief pipeline and a first regulating valve; the gas inlet pipeline is connected to a first mounting position, and the pressure relief pipeline is connected to a second mounting position; the gas inlet pipeline and the pressure relief pipeline both have a refrigeration connection end and a test connection end which are arranged at intervals; the refrigeration connection end is used for connecting a heat exchange pipeline; the test connection end is used for connecting a heat exchange module; the first regulating valve is connected to the refrigeration connection end of the gas inlet pipeline; and the first regulating valve is used for adjusting the gas flow direction between the gas inlet pipeline and the heat exchange pipeline. In the secondary refrigerant recovery of the heat exchange module by using gas, the gas flow direction is controlled, so that the secondary refrigerant can be fully recovered, and the loss amount of the refrigerant can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor detection, in particular to a secondary refrigerant recovery structure, a test device and a temperature control system. BACKGROUND

[0002] In the process of testing semiconductor elements, a suitable temperature environment needs to be created. In the related art, an external refrigeration system is needed to use the secondary refrigerant to exchange heat with the heat exchange module to meet the test temperature; and after heat exchange, the secondary refrigerant remaining in the flow channel of the heat exchange module and the refrigeration system or the external pipeline needs to be recovered to prevent the structure of the heat exchange module from being damaged due to the volume expansion of the gasified secondary refrigerant and to affect the flatness of the heat exchange module. However, at present, when recovering the secondary refrigerant, the recovery is not complete and some secondary refrigerant remains; and in the recovery process, some secondary refrigerant may be lost. SUMMARY

[0003] Therefore, it is necessary to provide a secondary refrigerant recovery structure to fully recover the secondary refrigerant in the heat exchange module and to reduce the loss of refrigerant.

[0004] A secondary refrigerant recovery structure is used to connect between a heat exchange pipeline and a heat exchange module, the heat exchange pipeline being used to exchange heat with the heat exchange module; wherein the connection between the liquid inlet port of the heat exchange module and the heat exchange pipeline is a first installation position, and the connection between the liquid outlet port of the heat exchange module and the heat exchange pipeline is a second installation position; the secondary refrigerant recovery structure comprises an air inlet pipeline, a pressure relief pipeline and a first regulating valve; one of the air inlet pipeline and the pressure relief pipeline is connected to the first installation position, and the other is connected to the second installation position; the air inlet pipeline and the pressure relief pipeline each have a refrigeration connection end and a test connection end arranged at intervals, each refrigeration connection end being used to connect the heat exchange pipeline, and each test connection end being used to connect the heat exchange module; the first regulating valve is connected to the refrigeration connection end of the air inlet pipeline, and is used to adjust the gas flow direction between the air inlet pipeline and the heat exchange pipeline.

[0005] That is, by the setting of the gas inlet pipeline to facilitate the gas into the heat exchange module, the gas is used to blow the residual coolant in the heat exchange module, so that it can flow into the heat exchange pipeline to realize the recovery of the coolant; after the recovery is completed, the gas inlet is discharged through the pressure relief pipeline. In this process, due to the setting of the first regulating valve, the gas flow between the gas inlet pipeline and the heat exchange pipeline can be adjusted, so as to ensure that the gas can flow as much as possible along the recovery direction during the recovery process, so as to facilitate the full recovery of the coolant and reduce the residual amount of the coolant in the heat exchange module. At the same time, due to the setting of the pressure relief pipeline, the pressure relief can be ensured when the pressure in the whole flow pipeline reaches a certain value, so as to avoid the loss of the coolant as much as possible.

[0006] In some embodiments, the gas inlet pipeline and / or the pressure relief pipeline comprises a three-way pipeline, a first end of the three-way pipeline is connected as a gas source interface or a gas outlet, a second end of the three-way pipeline is connected as a refrigeration connection end, and a third end of the three-way pipeline is connected as a test connection end; the three-way pipeline has a junction point, and the first regulating valve is connected to the part of the three-way pipeline between the second end and the junction point; or the first regulating valve is connected to the second end of the three-way pipeline.

[0007] It can be understood that the three-way pipeline is provided to facilitate connection with the first regulating valve, the heat exchange pipeline and the heat exchange flow channel, and the sealing is good, which is convenient for gas delivery.

[0008] In some embodiments, the coolant recovery structure further comprises an integrated base, a first fastener and a second fastener; the integrated base is configured with a first mounting hole and a second mounting hole, which are spaced apart along a first direction; the gas inlet pipeline is arranged in the first mounting hole and is locked relative to the integrated base by the first fastener; and the pressure relief pipeline is arranged in the second mounting hole and is locked relative to the integrated base by the second fastener.

[0009] That is, by the setting of the integrated base, the gas inlet pipeline and the pressure relief pipeline are integrated and assembled to form an overall structure, which is convenient for connection with the heat exchange module or the heat exchange pipeline.

[0010] In some embodiments, the integrated base comprises a fixed base and a cover arranged on the fixed base, the fixed base and the cover jointly define an assembly space, and the first mounting hole and the second mounting hole are in communication with the assembly space; and the part of the gas inlet pipeline and the part of the pressure relief pipeline are located in the assembly space.

[0011] It can be understood that the integrated base is assembled by the fixing base and the cover, which facilitates the disassembly and replacement of the air inlet pipeline and the pressure relief pipeline; and the assembly space is formed to protect part of the structure on the air inlet pipeline and the pressure relief pipeline.

[0012] In some embodiments, a quick plug pipe is connected to each corresponding test connection end on the air inlet pipeline and the pressure relief pipeline, and the quick plug pipe is used for detachable connection with the heat exchange module; the integrated base is provided with a third mounting hole in communication with the assembly space; and the two quick plug pipes are respectively arranged in the corresponding third mounting hole.

[0013] That is, the quick plug pipe is arranged to facilitate the quick disassembly and replacement of the cold carrier recovery structure relative to the heat exchange module, thereby improving the operation convenience.

[0014] In some embodiments, the integrated base is provided with a fourth mounting hole in communication with the assembly space; and the cold carrier recovery structure further comprises a straight-through joint arranged in the fourth mounting hole and connected to the integrated base, and the straight-through joint is used for introducing dry gas into the assembly space.

[0015] Such an arrangement facilitates the introduction of dry gas into the assembly space to reduce the possibility of frost formation in the cold carrier recovery structure.

[0016] In some embodiments, the first regulating valve is a check valve connected to the air inlet pipeline to block the gas from flowing from the refrigeration connection end to the heat exchange pipeline; or the first regulating valve is an on-off valve connected to the air inlet pipeline to adjust the on-off of the gas between the refrigeration connection end and the heat exchange pipeline on the air inlet pipeline; and / or the air inlet pipeline comprises a second regulating valve and a pressure reducing valve, and the pressure reducing valve is connected to the second regulating valve upstream along the gas flow direction; and / or the pressure relief pipeline comprises a third regulating valve and a pressure relief valve, and the pressure relief valve is connected to the third regulating valve downstream along the gas flow direction; and / or the cold carrier recovery structure further comprises a gas source connected to the air inlet pipeline.

[0017] That is, the check valve or the on-off valve is arranged to ensure that the gas introduced through the air inlet pipeline can only flow to the heat exchange module through the test connection end, and cannot flow to the heat exchange pipeline through the refrigeration connection end, thereby facilitating the control of the gas flow direction. The second regulating valve and the third regulating valve are arranged to control the gas flow direction in the air inlet pipeline and the pressure relief pipeline; the pressure reducing valve can reduce the pressure of the gas introduced through the gas source to protect the heat exchange module; the pressure relief valve is arranged to automatically relieve pressure when the pressure of the gas in the pressure relief pipeline reaches a certain value, thereby reducing the loss of the cold carrier; and the gas source is arranged to provide gas to the cold carrier recovery structure, thereby facilitating the recovery of the cold carrier.

[0018] The application further provides a testing device, comprising a heat exchange module, an air inlet pipeline, a pressure relief pipeline and a first regulating valve; the heat exchange module has a heat exchange flow channel for communicating with a heat exchange pipeline, the air inlet pipeline is connected to one end of the heat exchange flow channel, and the pressure relief pipeline is connected to the other end of the heat exchange flow channel; the air inlet pipeline and the pressure relief pipeline both have a refrigeration connecting end and a testing connecting end arranged at intervals, the testing connecting end is connected to the heat exchange flow channel of the heat exchange module, and the refrigeration connecting end is used for connecting the heat exchange pipeline; the first regulating valve is connected to the refrigeration connecting end of the air inlet pipeline, and is used for adjusting the gas flow direction between the air inlet pipeline and the heat exchange pipeline.

[0019] It can be understood that the air inlet pipeline and the pressure relief pipeline are installed on the heat exchange module, and are connected to the heat exchange flow channel through the air inlet pipeline and the pressure relief pipeline to form a recovery pipeline. In this way, the temperature control of the heat exchange module is met, and the recovery of the cold carrier in the heat exchange flow channel is facilitated; and the gas flow direction during recovery is controlled through the first regulating valve to meet the full recovery of the cold carrier and reduce the residual amount of the cold carrier in the heat exchange module. In addition, the pressure relief pipeline is arranged to ensure that the pressure in the entire flow pipeline reaches a certain value to perform pressure relief, thereby avoiding the loss of the cold carrier as much as possible.

[0020] The application further provides a temperature control system for being connected to a heat exchange module; the temperature control system comprises a heat exchange pipeline, an air inlet pipeline, a pressure relief pipeline and a first regulating valve; the heat exchange pipeline is used for connecting the heat exchange flow channel of the heat exchange module; the air inlet pipeline is connected to one end of the heat exchange pipeline, and the pressure relief pipeline is connected to the other end of the heat exchange pipeline; the air inlet pipeline and the pressure relief pipeline both have a refrigeration connecting end and a testing connecting end arranged at intervals, the refrigeration connecting end is connected to the heat exchange pipeline, and the testing connecting end is used for connecting the heat exchange flow channel of the heat exchange module; the first regulating valve is connected to the refrigeration connecting end of the air inlet pipeline, and is used for adjusting the gas flow direction between the air inlet pipeline and the heat exchange pipeline.

[0021] That is, the temperature control system meets the temperature control of the heat exchange module through the arrangement of the heat exchange pipeline, and realizes the recovery of the cold carrier in the heat exchange module and reduces the loss of the cold carrier in cooperation with the air inlet pipeline and the pressure relief pipeline. Meanwhile, the first regulating valve is arranged to meet the full recovery of the cold carrier and reduce the residual amount of the cold carrier in the heat exchange module during the recovery process.

[0022] In some embodiments, the heat exchange pipeline comprises a main pipeline and a bypass pipeline; the main pipeline has a liquid sending end and a liquid returning end, the liquid sending end is used for connecting the liquid inlet of the heat exchange flow channel, and the liquid returning end is used for connecting the liquid outlet of the heat exchange flow channel; the bypass pipeline is connected between the liquid sending end and the liquid returning end, and the fourth adjusting valve is arranged on the bypass pipeline.

[0023] It can be understood that the fourth adjusting valve is arranged to adjust the opening and closing of the bypass pipeline, and the bypass pipeline is arranged to divide the flow of the cold carrier in the main pipeline, so as to reduce the amount of the cold carrier flowing to the heat exchange module, and realize the low-temperature regulation of the heat exchange module. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0025] Figure 1 The first schematic diagram of the cold carrier recovery structure provided by an embodiment of the present application;

[0026] Figure 2 The second schematic diagram of the cold carrier recovery structure provided by an embodiment of the present application;

[0027] Figure 3 The third schematic diagram of the cold carrier recovery structure provided by an embodiment of the present application;

[0028] Figure 4 The fourth schematic diagram of the cold carrier recovery structure provided by an embodiment of the present application;

[0029] Figure 5 The schematic diagram of the temperature control system provided by an embodiment of the present application.

[0030] 10, air inlet pipeline; 11, second regulating valve; 12, pressure reducing valve; 13, first elbow; 14, air source interface; 20, pressure relief pipeline; 21, third regulating valve; 22, pressure relief valve; 23, second elbow; 30, first regulating valve; 40, integrated base; 41, fixed base; 42, cover; 51, first fastener; 52, second fastener; 53, quick plug; 54, straight joint; 60, air source; 100, refrigerant recovery structure; 101, refrigeration connection end; 101a, first refrigeration connection end; 101b, second refrigeration connection end; 102, test connection end; 102a, first test connection end; 102b, second test connection end; 200, heat exchange pipeline; 210, heat exchanger; 220, circulating pump; 230, liquid storage tank; 240, bypass pipeline; 241, fourth regulating valve; 300, heat exchange module; 401, first mounting hole; 402, second mounting hole; 403, assembly space; 404, third mounting hole; 405, fourth mounting hole; 410, first mounting position; 420, second mounting position. DETAILED DESCRIPTION

[0031] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the spirit of the present application, and it is intended that the present application cover all such modifications and changes within its scope.

[0032] It should be noted that when a component is referred to as being "fixed to" or "set to" another component, it can be directly on the other component or there can be a middle component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there can be a middle component. The terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar expressions used in the description of the present application are for illustrative purposes only and do not indicate the only implementation.

[0033] In addition, the terms "first", "second", etc. are used only for descriptive purposes and should not be construed as indicating or implying relative importance or an indicated number of technical features. Thus, features defined with "first", "second", etc. can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In the present application, unless otherwise explicitly specified and limited, the first feature is "on", "under" the second feature, which can be that the first feature is in direct contact with the second feature, or the first feature is indirectly in contact with the second feature through an intermediate medium. Moreover, the first feature is "above", "over" and "on" the second feature, which can be that the first feature is directly above or obliquely above the second feature, or only means that the first feature is higher than the second feature in horizontal height. The first feature is "below", "under" and "under" the second feature, which can be that the first feature is directly below or obliquely below the second feature, or only means that the first feature is lower than the second feature in horizontal height.

[0035] Unless otherwise defined, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification of the present application includes any and all combinations of one or more related listed items.

[0036] The present application provides a refrigerant recovery device, which is used in the refrigerant recovery of the heat exchange module using gas. By controlling the flow direction of the gas, the refrigerant can be fully recovered, and the loss of refrigerant can be reduced. In this way, the influence of the volume expansion of the refrigerant remaining in the heat exchange module when it is vaporized can be minimized, the structure of the heat exchange module can be protected, and the flatness of the heat exchange module can be guaranteed. The refrigerant recovery device is described in detail below.

[0037] As shown in Figures 1 to 5 In some embodiments, the refrigerant recovery structure 100 is used to connect between the heat exchange pipeline 200 and the heat exchange module 300. The heat exchange pipeline 200 is used to exchange heat with the heat exchange module 300. In some specific embodiments, the heat exchange module 300 can be a test disc in semiconductor testing, which has a heat exchange flow channel inside for circulating refrigerant; or the heat exchange module 300 is used to exchange heat with a test device or a device. The heat exchange pipeline 200 has a liquid sending end in communication with the liquid inlet port of the heat exchange module 300, and a liquid returning end in communication with the liquid outlet port of the heat exchange module 300. Such a setting can form a refrigerant circulation loop for the heat exchange of the heat exchange module 300. Specifically, the refrigerant in the heat exchange pipeline 200 flows to the liquid inlet port of the heat exchange module 300 through the liquid sending end, flows along the heat exchange flow channel in the heat exchange module 300, and then flows from the liquid outlet port of the heat exchange module 300 to the liquid returning end of the heat exchange pipeline 200, and flows along the heat exchange pipeline 200; Such a cycle.

[0038] The connection position of the liquid inlet of the heat exchange module 300 and the heat exchange pipeline 200 (specifically, the liquid inlet end of the heat exchange pipeline 200) is the first installation position 410, and the connection position of the liquid outlet of the heat exchange module 300 and the heat exchange pipeline 200 (specifically, the liquid return end of the heat exchange pipeline 200) is the second installation position 420.

[0039] As shown in Figure 3 and Figure 4 illustrated, the exemplary refrigerant recovery structure 100 includes an air inlet pipeline 10, a pressure relief pipeline 20, and a first regulating valve 30; the air inlet pipeline 10 is connected to the first installation position 410, and the pressure relief pipeline 20 is connected to the second installation position 420; the air inlet pipeline 10 and the pressure relief pipeline 20 each have spaced refrigeration connection ends 101 and test connection ends 102, each refrigeration connection end 101 is used to connect the heat exchange pipeline 200, and each test connection end 102 is used to connect the heat exchange module 300. Among them, the first refrigeration connection end 101a and the first test connection end 102a on the air inlet pipeline 10, respectively, and the second refrigeration connection end 101b and the second test connection end 102b on the pressure relief pipeline 20. The first regulating valve 30 is connected to the first refrigeration connection end 101a, and the first regulating valve 30 is used to adjust the gas flow direction between the air inlet pipeline 10 and the heat exchange pipeline 200.

[0040] It can be understood that the air inlet pipeline 10 is provided to facilitate the air into the heat exchange module 300, and the air is used to blow the refrigerant remaining in the heat exchange flow channel of the heat exchange module 300, so that it can flow into the heat exchange pipeline 200 to realize the recovery of the refrigerant; after the recovery is completed, the air inlet pipeline 20 is used to discharge the air. In this process, due to the provision of the first regulating valve 30, the gas flow direction between the air inlet pipeline 10 and the heat exchange pipeline 200 can be adjusted, specifically, as much as possible to avoid the gas flowing into the air inlet pipeline 10 directly flowing to the heat exchange pipeline 200 through the first refrigeration connection end 101a, and to promote more gas to flow to the heat exchange flow channel through the first test connection end 102a to flow in the recovery direction, thereby facilitating the full recovery of the refrigerant and reducing the residual amount of the refrigerant in the heat exchange module 300. At the same time, due to the provision of the pressure relief pipeline 20, the pressure in the entire flow pipeline can be relieved when it reaches a certain value, thereby avoiding the loss of refrigerant as much as possible.

[0041] It should be noted that the first regulating valve 30 is connected to the first refrigeration connection end 101a of the air inlet pipeline 10, which can be connected upstream of the first refrigeration connection end 101a in the air inlet direction, or downstream, as long as it is connected to the first refrigeration connection end 101a of the air inlet pipeline 10.

[0042] It is worth noting that in the above example where the gas inlet pipeline 10 is connected to the first installation position 410, because the gas flow direction in the recovery condition and the coolant flow direction are consistent with the coolant flow direction in the normal test condition, for example Figure 5 The clockwise direction of the coolant circuit in the recovery condition is consistent with the medium flow direction in the coolant circuit in the normal test condition, which is conducive to improving the recovery efficiency of the coolant. In another alternative embodiment, the gas inlet pipeline 10 can be connected to the second connection position, and the pressure relief pipeline 20 can be connected to the first connection position. At this time, the first regulating valve 30 is still connected to the gas inlet pipeline 10 for controlling the gas flow direction, so as to avoid as much as possible that part of the gas sent from the gas inlet pipeline 10 directly flows to the heat exchange pipeline 200, so as to facilitate the full recovery of the coolant in the heat exchange flow channel.

[0043] Hereinafter, the gas inlet pipeline 10 is connected to the first connection position, and the pressure relief pipeline 20 is connected to the second connection position as an example.

[0044] Since the first regulating valve 30 is connected to the gas inlet pipeline 10, the structure of the gas inlet pipeline 10 is described first.

[0045] As shown in Figure 3 and Figure 4 In some embodiments, the gas inlet pipeline 10 includes a three-way pipeline, the first end of the three-way pipeline is the gas source interface 14, the second end of the three-way pipeline is the first refrigeration connection end 101a of the gas inlet pipeline 10, the third end of the three-way pipeline is the first test connection end 102a of the gas inlet pipeline 10, and the first regulating valve 30 is connected to the second end of the three-way pipeline. That is, at this time, in the gas inlet direction, the first regulating valve 30 is connected downstream of the first refrigeration connection end 101a.

[0046] Such a setting, the gas source interface 14 is connected to the gas source 60, and the gas is input into the three-way pipeline in the gas inlet pipeline 10; the third end of the three-way pipeline is used to connect the liquid return port of the heat exchange module 300, so as to facilitate the gas to be sent into the heat exchange flow channel of the heat exchange module 300; the second end of the three-way pipeline is used to connect the liquid inlet end of the heat exchange pipeline 200. At this time, the first regulating valve 30 is connected to the downstream position of the first refrigeration connection end 101a in the gas inlet direction, so as to be located between the second end of the three-way pipeline and the liquid inlet end of the heat exchange pipeline 200, that is, it can be ensured that the gas sent through the gas source interface 14 can only flow to the liquid return port of the heat exchange module 300.

[0047] In an alternative embodiment, the three-way pipe has a junction, and the first regulating valve 30 is connected to the portion of the three-way pipe between the second end and the junction, i.e., the first regulating valve 30 is located between the first refrigeration connection end 101a and the first test connection end 102a. That is, in the direction of the gas inlet, the first regulating valve 30 is connected upstream of the first refrigeration connection end 101a. In actual use, the second end of the three-way pipe is directly connected to the liquid inlet end of the heat exchange pipe 200, which is convenient for assembly and reduces the interference of the assembly operation on the first regulating valve 30. The three-way pipe has a first pipe section connected to the first end, a second pipe section connected to the second end, and a third pipe section connected to the third end; one end of the first pipe section, away from the first end, is connected to one end of the second pipe section, away from the second end, and the first pipe section and the second pipe section are coaxially arranged; one end of the third pipe section, away from the third end, is connected to the junction of the first pipe section and the second pipe section, and the third pipe section is arranged at an angle with respect to the first pipe section and the second pipe section. At this time, the junction of the first pipe section, the second pipe section, and the third pipe section is the junction of the three-way pipe.

[0048] In the embodiment, the three-way pipe of the gas inlet pipe 10 is the first three-way pipe.

[0049] As shown in Figure 4 and Figure 5 , for example, the first regulating valve 30 is a check valve connected to the gas inlet pipe 10, which is used to block the gas from the first refrigeration connection end 101a of the gas inlet pipe 10 to the heat exchange pipe 200. That is, when the gas flows into the first three-way pipe through the gas source interface 14, the check valve can prevent the gas from flowing to the heat exchange pipe 200 through the second end of the first three-way pipe. In an alternative embodiment, the first regulating valve 30 is a switch valve connected to the gas inlet pipe 10, which is used to adjust the on-off between the first refrigeration connection end 101a of the gas inlet pipe 10 and the heat exchange pipe 200. That is, by adjusting the opening and closing state of the switch valve, the first three-way pipe and the heat exchange pipe 200 are switched between communication and interruption, thereby satisfying the control of the gas flow. Wherein, the on-off is communication and interruption.

[0050] As shown in Figure 4 and Figure 5 , in an alternative embodiment, the gas inlet pipe 10 further comprises a second regulating valve 11 and a pressure reducing valve 12, and the pressure reducing valve 12 is connected upstream of the second regulating valve 11 in the direction of the gas flow. Specifically, the second regulating valve 11 and the pressure reducing valve 12 are both connected to the first three-way pipe and form an integral structure with the first three-way pipe, so that the gas inlet pipe 10 can be assembled as a whole with respect to the heat exchange pipe 200 and the heat exchange module 300. The second regulating valve 11 is provided to control the on-off of the first three-way pipe; and the pressure reducing valve 12 is provided to reduce the pressure of the gas sent through the gas source interface 14, so as to ensure that the gas maintains a low pressure state after entering the heat exchange flow channel of the heat exchange module 300, and will not cause damage to the heat exchange flow channel.

[0051] In actual use, the refrigerant recovery structure 100 further comprises a gas source 60 connected to the gas inlet pipeline 10. Specifically, the gas source 60 is communicated with the gas source interface 14 on the first three-way pipeline through a gas pipeline to realize gas delivery. In some embodiments, the part of the pipeline where the gas source interface 14 is arranged can be arranged in a bent manner to reduce the installation interference between the gas source interface 14 and the pressure reducing valve 12 and the second regulating valve 11. Such an arrangement can reduce the space occupied by the first three-way pipeline along its axial direction and improve the space utilization.

[0052] As shown in Figure 4 and Figure 5 , in some embodiments, the pressure relief pipeline 20 also comprises a three-way pipeline, which is referred to as a second three-way pipeline for ease of description. At this time, the first end of the second three-way pipeline along its axial direction serves as a gas outlet, and the rest of the second three-way pipeline is arranged similarly to the first three-way pipeline, and thus will not be described again. The second refrigeration connection end 101b on the second three-way pipeline is communicated with the liquid return end of the heat exchange pipeline 200, and the second test connection end 102b on the second three-way pipeline is communicated with the liquid inlet port of the heat exchange module 300. In this way, the gas source 60 is started to input gas to the first three-way pipeline, which flows to the heat exchange flow channel of the heat exchange module 300 through the first three-way pipeline; after flowing through the heat exchange flow channel, it flows to the second test connection end 102b of the second three-way pipeline and flows to the heat exchange pipeline 200 from the second refrigeration connection end 101b of the second three-way pipeline to blow the refrigerant remaining in the heat exchange flow channel to the heat exchange pipeline 200 to achieve the recovery purpose; after the entire refrigerant recovery structure 100 works for a period of time, the gas source 60 is closed. In this process, as the gas is input, if the pressure in the heat exchange pipeline 200, the refrigerant recovery structure 100 and the heat exchange flow channel is relatively high, it can flow from the gas outlet of the second three-way pipeline to maintain pressure balance and reduce refrigerant loss.

[0053] As shown in Figure 4 and Figure 5 , for example, the pressure relief pipeline 20 comprises a third regulating valve 21 and a pressure relief valve 22 connected downstream of the third regulating valve 21 along the gas flow direction. Specifically, the pressure relief valve 22 is connected to the first end of the second three-way pipeline (i.e. the gas outlet) to discharge gas for pressure relief, the second end of the second three-way pipeline serves as the second refrigeration connection end 101a, and the third end of the second three-way pipeline serves as the second test connection end 102b. At the same time, the second three-way pipeline also has a junction point, which is formed in the same way as the first three-way pipeline, and thus will not be described again. Therefore, the third regulating valve 21 is connected between the first end and the junction point to regulate the on-off state between the third end of the second three-way pipeline and the pressure relief valve 22.

[0054] In some specific embodiments, both the second regulating valve 11 and the third regulating valve 21 are solenoid valves for easy control. Furthermore, both the second regulating valve 11 and the third regulating valve 21 can be normally closed solenoid valves. When refrigerant recovery is required, both normally closed solenoid valves open. Since there is no pressure in the pipeline when the system is shut down, liquid spraying will not occur. After the gas enters the inlet pipeline 10, it is first used for refrigerant recovery in the heat exchange channel. As the recovery operation progresses, the pressure reaches a threshold and is then depressurized, reducing the loss of the circulating medium.

[0055] like Figure 4 As shown, for example, the second end of the first tee pipe is connected to a first bend 13, and the second end of the second tee pipe is connected to a second bend 23. Both the first bend 13 and the second bend 23 are part of the heat exchange pipeline 200, for example, they are the corrugated pipes corresponding to the liquid supply end and liquid return end of the heat exchange pipeline 200, respectively. In this case, quick-connect fittings 53 are used between the first tee pipe and the first bend 13, and between the second tee pipe and the second bend 23. The quick-connect fitting 53 includes a male and a female connector, one of which is connected to the tee pipe, and the other is connected to the heat exchange module 300, thus satisfying the quick-connect fitting requirement. The above-mentioned fitting with the heat exchange pipeline 200 is similar and will not be described in detail again.

[0056] In an alternative embodiment, the first bend 13 is part of the intake pipe 10, and the second bend 23 is part of the pressure relief pipe 20; in this case, the end of the first bend 13 away from the first tee pipe is the first cooling connection end 101a of the intake pipe 10, and the end of the second bend 23 away from the second tee pipe is the second cooling connection end 101b of the pressure relief pipe 20; wherein, the first regulating valve 30 is connected between the first bend 13 and the second end of the first tee pipe.

[0057] In other embodiments, such as Figure 5 As shown, in some embodiments, the refrigerant recovery structure 100 further includes an integrated base 40, a first fastener 51, and a second fastener 52. The integrated base 40 is configured with a first mounting hole 401 and a second mounting hole 402, which are spaced apart along a first direction. An intake pipe 10 passes through the first mounting hole 401 and is locked relative to the integrated base 40 by the first fastener 51. A pressure relief pipe 20 passes through the second mounting hole 402 and is locked relative to the integrated base 40 by the second fastener 52.

[0058] It can be understood that, by the arrangement of the integrated base 40, the air inlet pipeline 10 and the pressure relief pipeline 20 can be integrated and assembled to form an overall structure. In this way, not only is the cold carrier recovery structure 100 convenient to disassemble relative to the heat exchange module 300 and the heat exchange pipeline 200, but also the entire cold carrier recovery structure 100 is convenient to store. The first mounting hole 401 and the second mounting hole 402 are arranged to position the assembly of the air inlet pipeline 10 and the pressure relief pipeline 20 relative to the integrated base 40; and due to the spacing distance between the two mounting holes, installation interference and use interference between the air inlet pipeline 10 and the pressure relief pipeline 20 can be avoided as much as possible. In addition, two fasteners can be used to satisfy the assembly of the air inlet pipeline 10 and the pressure relief pipeline 20 relative to the integrated base 40, respectively.

[0059] As shown in Figures 1-4 and Figures 1-4 in some specific embodiments, the first three-way pipeline is arranged in the first mounting hole 401 towards the second end of the first three-way pipeline, and the second three-way pipeline is arranged in the second mounting hole 402 towards the second end of the second three-way pipeline. Then, the first three-way pipeline and the second three-way pipeline are fixed relative to the integrated base 40 by using the first locking member and the second locking member, respectively. The first locking member and the second locking member can be structures with threaded holes, and the first three-way pipeline and the second three-way pipeline are arranged in the corresponding threaded holes, respectively. The two locking members further have bosses along the radial direction of the locking members, which are arranged to be pressed against the integrated base 40, and screws or bolts are arranged to pass through the bosses and the integrated base 40 to connect the bosses and the integrated base 40, thereby achieving locking.

[0060] In alternative embodiments, the first three-way pipeline is connected to the first elbow 13 through a quick plug connector 53. Taking the first locking member as an example, the first locking member includes a connecting seat and a fixing seat. The connecting seat is configured with a mounting hole, the second end of the first three-way pipeline is arranged in the mounting hole, and a female head of the quick plug connector 53 is arranged in the mounting hole. The connecting seat is arranged in the first mounting hole 401, and one end of the connecting seat is provided with a boss along the radial direction of the connecting seat. The fixing seat is arranged between the boss and the integrated base 40. Then, screws are arranged to pass through the boss, the fixing seat and the integrated base 40 to connect the boss, the fixing seat and the integrated base 40, thereby achieving locking. A male head of the quick plug connector 53 is connected to the first elbow 13 to facilitate the plug connection with the female head. The first regulating valve 30 is connected to the first elbow 13, and is connected to the refrigeration connection end 101 of the air inlet pipeline 10 through the quick plug connector 53 and is located at a position downstream in the air inlet direction.

[0061] It should be noted that the cooperation between the second locking member and the second three-way pipeline is the same as described above, and therefore will not be described again.

[0062] It should be noted that the first locking member and the second locking member are used to lock the pipelines, and the implementation manner can be a commonly used manner, which is not limited here as long as it can satisfy the assembly of the first three-way pipeline and the second three-way pipeline relative to the integrated base 40, respectively.

[0063] As shown in Figure 3 exemplarily, the integrated base 40 comprises a fixed base 41 and a cover 42 buckled to the fixed base 41, the fixed base 41 and the cover 42 jointly define an assembly space 403, the first mounting hole 401 and the second mounting hole 402 are both in communication with the assembly space 403; the part of the air inlet pipeline 10 and the part of the pressure relief pipeline 20 are both located in the assembly space 403.

[0064] It can be understood that the fixed base 41 and the cover 42 are jointly assembled into the integrated base 40, which facilitates the disassembly, replacement of the air inlet pipeline 10 and the pressure relief pipeline 20; and the formation of the assembly space 403 plays a protective role on the part of the air inlet pipeline 10 and the pressure relief pipeline 20. Specifically, the pressure relief valve 12, the second regulating valve 11, and the gas source interface 14 on the air inlet pipeline 10 are all located in the assembly space 403, and the pressure relief valve 22 and the third regulating valve 21 on the pressure relief pipeline 20 are also located in the assembly space 403. Among them, there is a small gap between the fixed base 41 and the cover 42, so that the gas flowing out through the pressure relief valve 22 flows out into the assembly space 403, ensuring that the assembly space 403 is in a constant pressure state. In some specific embodiments, the fixed base 41 is arranged in an L shape, and the cover 42 is buckled to the L-shaped fixed base 41 to jointly form a cuboid-shaped integrated base 40.

[0065] Due to the arrangement of the assembly space 403, the first test connection end 102a and the second test connection end 102b on the first three-way pipeline and the second three-way pipeline need to be able to extend out for connection. Therefore, as shown in Figure 4 in some embodiments, the integrated base 40 is configured with a third mounting hole 404 in communication with the assembly space 403, and the first test connection end 102a and the second test connection end 102b correspondingly pass through the respective third mounting holes 404, specifically, the female head on the quick plug connection pipe 53 passes through the third mounting hole 404 to facilitate the quick plug cooperation with the male head on the heat exchange module 300. Among them, the third mounting hole 404 is arranged in a waist shape to provide a larger quick plug operation space.

[0066] As one of the embodiments, the integrated base 40 is configured with a fourth mounting hole 405 which is in communication with the assembly space 403; the refrigerant recovery structure 100 further comprises a through joint 54 which is penetrated through the fourth mounting hole 405 and connected to the integrated base 40, and the through joint 54 is used to introduce dry gas into the assembly space 403, so as to prevent the refrigerant recovery structure 100 from frosting and condensing as much as possible when the whole machine is normally operated. In some embodiments, the fourth mounting hole 405 is arranged on the cover 42, and the through joint 54 is mounted on the cover 42 through the fourth mounting hole 405 to form an integral structure with the cover 42; therefore, when the cover 42 is assembled with respect to the fixed base 41 to form the assembly space 403, the through joint 54 is automatically in communication with the assembly space 403.

[0067] As shown in Figures 1-4 The application further provides a testing device, which comprises the heat exchange module 300, the gas inlet pipeline 10, the pressure relief pipeline 20 and the first regulating valve 30; the heat exchange module 300 has the heat exchange pipeline 200 which is used to communicate with the heat exchange pipeline 200, the gas inlet pipeline 10 is connected to one end of the heat exchange pipeline 200, and the pressure relief pipeline 20 is connected to the other end of the heat exchange pipeline 200; the gas inlet pipeline 10 and the pressure relief pipeline 20 both have the refrigeration connection end 101 and the testing connection end 102 which are arranged at intervals, the testing connection end 102 is connected to the heat exchange pipeline 200 of the heat exchange module 300, and the refrigeration connection end 101 is used to connect the heat exchange pipeline 200; the first regulating valve 30 is connected to the refrigeration connection end 101 of the gas inlet pipeline 10, and the first regulating valve 30 is used to adjust the gas flow direction between the gas inlet pipeline 10 and the heat exchange pipeline 200.

[0068] It can be understood that by installing the gas inlet pipeline 10 and the pressure relief pipeline 20 on the heat exchange module 300 and connecting the gas inlet pipeline 10 and the pressure relief pipeline 20 with the heat exchange pipeline 200, not only a closed coolant circulation loop for heat exchange of the heat exchange module 300 is formed, but also the residual coolant in the heat exchange module 300 can be conveniently recovered. In other words, when the coolant recovery structure 100 of the present application is installed between the heat exchange pipeline 200 and the heat exchange module 300, the closed coolant circulation loop formed by the connection can not only be operated in a normal test condition, but also can be selected to be ventilated to the gas inlet pipeline 10 to be operated in a coolant recovery condition. The conversion between the two conditions does not require disassembly of the coolant recovery structure 100, thereby improving the test efficiency and recovery efficiency. Of course, in other embodiments, the coolant recovery structure 100 can be selected to be removed after the coolant recovery is completed, and the heat exchange pipeline 200 and the heat exchange module 300 are reconnected to form a closed coolant circulation loop for test condition operation. In this way, not only the temperature control of the heat exchange module 300 is satisfied, but also the recovery of the coolant in the heat exchange module 300 is facilitated. At the same time, by providing the first regulating valve 30, the gas flow direction during recovery can be controlled to satisfy sufficient recovery of the coolant and reduce the residual amount of the coolant in the heat exchange module 300. In addition, due to the provision of the pressure relief pipeline 20, pressure relief can be ensured when the pressure in the entire circulation pipeline reaches a certain value, thereby avoiding loss of the coolant as much as possible.

[0069] It should be noted that the specific structure of the gas inlet pipeline 10 and the pressure relief pipeline 20 in the present embodiment is basically similar to the above, and thus will not be described again.

[0070] As shown in Figures 1-5 The present application further provides a temperature control system for connecting to the heat exchange module 300; the temperature control system comprises a heat exchange pipeline 200, a gas inlet pipeline 10, a pressure relief pipeline 20 and a first regulating valve 30; the heat exchange pipeline 200 is used to connect the heat exchange flow channel of the heat exchange module 300; the gas inlet pipeline 10 is connected to one end of the heat exchange pipeline 200, and the pressure relief pipeline 20 is connected to the other end of the heat exchange pipeline 200; the gas inlet pipeline 10 and the pressure relief pipeline 20 both have spaced refrigeration connection ends 101 and test connection ends 102, the refrigeration connection ends 101 are connected to the heat exchange pipeline 200, and the test connection ends 102 are used to connect the heat exchange flow channel of the heat exchange module 300; the first regulating valve 30 is connected to the refrigeration connection end 101 of the gas inlet pipeline 10, and the first regulating valve 30 is used to adjust the gas flow direction between the gas inlet pipeline 10 and the heat exchange pipeline 200.

[0071] That is, the temperature control system meets the temperature control regulation of the heat exchange module 300 through the setting of the heat exchange pipeline 200, and cooperates with the air inlet pipeline 10 and the pressure relief pipeline 20 to realize the recovery of the load carrier in the heat exchange module 300, and reduce the load carrier loss. At the same time, in the recovery process, the setting of the first regulating valve 30 is used to adjust the flow direction of the gas sent through the air inlet pipeline 10, so that as much gas as possible flows to the heat exchange flow channel, so as to meet the full recovery of the load carrier and reduce the residual amount of the load carrier in the heat exchange module 300.

[0072] It should be noted that the specific structure of the air inlet pipeline 10 and the pressure relief pipeline 20 in the embodiment is basically similar to the above, and therefore will not be described again.

[0073] As shown in Figures 1-5 Figures 1-5 Figure 5 In some embodiments, the heat exchange pipeline 200 includes a main pipeline and a bypass pipeline 240; the main pipeline has a liquid sending end and a liquid returning end, the liquid sending end is used to connect the liquid inlet port of the heat exchange flow channel, and the liquid returning end is used to connect the liquid outlet port of the heat exchange flow channel; the bypass pipeline 240 is connected between the liquid sending end and the liquid returning end, and the fourth regulating valve 241 is arranged on the bypass pipeline 240. At this time, the air inlet pipeline 10 and the pressure relief pipeline 20 are connected to the main pipeline, for example, the air inlet pipeline 10 is connected to the liquid sending end of the main pipeline, and the pressure relief pipeline 20 is connected to the liquid returning end of the main pipeline, so as to meet the recovery of the load carrier in the heat exchange flow channel. At the same time, the fourth regulating valve 241 is used to adjust the on-off of the bypass pipeline 240. Specifically, when the bypass pipeline 240 is connected, the bypass pipeline 240 and the heat exchange flow channel form a shunt, so that part of the load carrier flows to the bypass pipeline 240, thereby reducing the amount of load carrier flowing to the heat exchange module 300, and realizing the low temperature regulation of the heat exchange module 300; when the bypass pipeline 240 is interrupted, the load carrier will flow to the heat exchange flow channel for full heat exchange.

[0074] In actual use, the main pipeline is sequentially connected with a circulating pump 220, a heat exchanger 210, a liquid storage tank 230 and the like, wherein the heat exchanger 210 is thermally coupled to a refrigeration system, and the load carrier in the heat exchange pipeline 200 is temperature controlled by the refrigeration system, and at the same time, a pressure sensor and a flow sensor are arranged to detect the pipeline pressure and flow size.

[0075] The technical features of the above-mentioned embodiments can be combined arbitrarily, in order to make the description simple, not all possible combinations of the technical features in the above-mentioned embodiments are described, however, as long as the combinations of the technical features do not exist contradictory, it should be considered that it is within the scope of the present application.

[0076] The above-described embodiments are merely illustrative of several embodiments of the present application, which are described in more detail and in a specific manner, but should not be construed as limiting the scope of the patent application. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A refrigerant recovery structure characterized by comprising: The application relates to a heat exchange pipe line (200) for heat exchange with a heat exchange module (300); wherein a first installation position (410) is formed at a connection between an inlet of the heat exchange module (300) and the heat exchange pipe line (200), and a second installation position (420) is formed at a connection between an outlet of the heat exchange module (300) and the heat exchange pipe line (200). The refrigerant recovery structure comprises an air inlet pipe (10), a pressure relief pipe (20) and a first regulating valve (30). One of the air inlet pipe (10) and the pressure relief pipe (20) is connected to the first installation position (410), and the other is connected to the second installation position (420). The air inlet pipe (10) and the pressure relief pipe (20) each have refrigeration connection ends (101) and test connection ends (102) arranged at intervals, each refrigeration connection end (101) is used for connecting the heat exchange pipe line (200), and each test connection end (102) is used for connecting the heat exchange module (300). The first regulating valve (30) is connected to the refrigeration connection end (101) of the air inlet pipe (10), and is used for adjusting the gas flow direction between the air inlet pipe (10) and the heat exchange pipe line (200).

2. The coolant recovery structure according to claim 1, characterized by The air inlet pipe (10) and / or the pressure relief pipe (20) comprises a three-way pipe, a first end of the three-way pipe is used as a gas source interface (14) or a gas outlet, a second end of the three-way pipe is used as a refrigeration connection end (101), and a third end of the three-way pipe is used as a test connection end (102). The three-way pipe has a meeting point, and the first regulating valve (30) is connected to the three-way pipe between the second end and the meeting point; or the first regulating valve (30) is connected to the second end of the three-way pipe.

3. The coolant recovery structure according to claim 1 or 2, characterized in that, The refrigerant recovery structure further comprises an integrated base (40), a first fastener (51) and a second fastener (52). The integrated base (40) is provided with a first mounting hole (401) and a second mounting hole (402) arranged at intervals along a first direction. The air inlet pipe (10) is arranged in the first mounting hole (401) and is locked relative to the integrated base (40) by the first fastener (51), and the pressure relief pipe (20) is arranged in the second mounting hole (402) and is locked relative to the integrated base (40) by the second fastener (52).

4. The coolant recovery structure according to claim 3, characterized by The integrated base (40) comprises a fixed base (41) and a cover (42) buckled to the fixed base (41), the fixed base (41) and the cover (42) jointly define an assembly space (403), the first mounting hole (401) and the second mounting hole (402) are in communication with the assembly space (403), and parts of the air inlet pipe (10) and the pressure relief pipe (20) are located in the assembly space (403).

5. The coolant recovery structure according to claim 4, wherein A quick connector pipe (53) is connected to each of the test connection end (102) of the gas inlet pipeline (10) and the pressure relief pipeline (20), and is used for detachable connection with the heat exchange module (300); The integrated base (40) is provided with a third mounting hole (404) in communication with the assembly space (403); and two quick connector pipes (53) are respectively arranged in the corresponding third mounting holes (404).

6. The coolant recovery structure according to claim 4, wherein The integrated base (40) is provided with a fourth mounting hole (405) in communication with the assembly space (403); and the refrigerant recovery structure further comprises a straight-through joint (54) arranged in the fourth mounting hole (405) and connected to the integrated base (40), and the straight-through joint (54) is used for introducing dry gas into the assembly space (403).

7. The coolant recovery structure according to claim 1, wherein The first regulating valve (30) is a one-way valve connected to the gas inlet pipeline (10) to block the gas inlet pipeline (10) from the refrigeration connection end (101) to the heat exchange pipeline (200); or the first regulating valve (30) is a switch valve connected to the gas inlet pipeline (10) to adjust the on-off between the refrigeration connection end (101) and the heat exchange pipeline (200); and / or The gas inlet pipeline (10) comprises a second regulating valve (11) and a pressure reducing valve (12), and the pressure reducing valve (12) is connected to the upstream of the second regulating valve (11) along the gas flow direction; and / or The pressure relief pipeline (20) comprises a third regulating valve (21) and a pressure relief valve (22), and the pressure relief valve (22) is connected to the downstream of the third regulating valve (21) along the gas flow direction; and / or The refrigerant recovery structure further comprises a gas source (60) connected to the gas inlet pipeline (10).

8. A test device, characterized by The test device comprises a heat exchange module (300), a gas inlet pipeline (10), a pressure relief pipeline (20) and a first regulating valve (30); The heat exchange module (300) has a heat exchange flow channel for communication with the heat exchange pipeline (200), the gas inlet pipeline (10) is connected to one end of the heat exchange flow channel, and the pressure relief pipeline (20) is connected to the other end of the heat exchange flow channel; The gas inlet pipeline (10) and the pressure relief pipeline (20) each have a refrigeration connection end (101) and a test connection end (102) arranged at intervals, the test connection end (102) is connected to the heat exchange flow channel of the heat exchange module (300), and the refrigeration connection end (101) is used for connecting the heat exchange pipeline (200); The first regulating valve (30) is connected to the refrigeration connection end (101) of the gas inlet pipeline (10), and the first regulating valve (30) is used for adjusting the gas flow direction between the gas inlet pipeline (10) and the heat exchange pipeline (200).

9. A temperature control system, characterized by, The temperature control system is connected to a heat exchange module (300), and comprises a heat exchange pipeline (200), an air inlet pipeline (10), a pressure relief pipeline (20) and a first regulating valve (30); The heat exchange pipeline (200) is connected to a heat exchange flow channel of the heat exchange module (300); the air inlet pipeline (10) is connected to one end of the heat exchange pipeline (200), and the pressure relief pipeline (20) is connected to the other end of the heat exchange pipeline (200); The air inlet pipeline (10) and the pressure relief pipeline (20) each have a refrigeration connection end (101) and a test connection end (102) arranged at intervals; the refrigeration connection end (101) is connected to the heat exchange pipeline (200), and the test connection end (102) is used for connecting the heat exchange flow channel of the heat exchange module (300); The first regulating valve (30) is connected to the refrigeration connection end (101) of the air inlet pipeline (10), and is used for adjusting the gas flow direction between the air inlet pipeline (10) and the heat exchange pipeline (200).

10. The temperature control system of claim 9, wherein, The heat exchange pipeline (200) comprises a main pipeline and a bypass pipeline (240); The main pipeline has a liquid sending end and a liquid returning end; the liquid sending end is used for connecting a liquid inlet port of the heat exchange flow channel, and the liquid returning end is used for connecting a liquid outlet port of the heat exchange flow channel; The bypass pipeline (240) is connected between the liquid sending end and the liquid returning end, and a fourth regulating valve (241) is arranged on the bypass pipeline (240).

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