Automatic feeding device for horizontal tubular furnace

Abstract

The application discloses an automatic feeding device suitable for a horizontal tubular furnace, and aims to provide an automatic feeding device suitable for a horizontal tubular furnace which can automatically feed and discharge materials, and the technical scheme is as follows: the automatic feeding device comprises a machine body, a lifting device arranged on the machine body, a transmission device arranged on the lifting device, an extension device arranged on the transmission device, a main rod fixedly connected to the transmission device, connecting rods rotatably connected to two ends of the main rod and parallel to each other, an operating rod arranged at the top of the connecting rod, and clamping devices arranged at two ends of the operating rod, a driving device arranged on the connecting rod, and supporting devices arranged on the clamping devices.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of equipment suitable for horizontal tube furnace, in particular to an automatic feeding device suitable for horizontal tube furnace. BACKGROUND

[0002] LPCVD is a standard method commonly used in the preparation of polycrystalline silicon thin films in integrated circuits, which has the characteristics of fast growth speed, dense and uniform film formation, large wafer capacity, etc. Polycrystalline silicon thin films can be deposited on substrates by LPCVD method using silane gas, and the typical deposition parameters are: silane pressure of 13.3-26.6 Pa, deposition temperature Td=580-630℃, growth rate of 5-10 nm / min. Because of the high deposition temperature, such as the softening temperature of ordinary glass at 500-600℃, it cannot use cheap ordinary glass but must use expensive quartz as the substrate. The polycrystalline silicon thin film grown by LPCVD method has a preferred orientation of crystal grains, a "V" shape of the morphology, a high density of micro-twin defects, and a small crystal grain size, which limits its application in devices due to insufficient carrier mobility.

[0003] At present, a horizontal LPCVD equipment feeding and discharging system is disclosed in Chinese Patent No. CN216738526U, which includes a horizontal moving unit, a vertical lifting unit and a cantilever paddle unit. The cantilever paddle unit carries a quartz boat loaded with wafers. The horizontal moving unit and the vertical lifting unit control the cantilever paddle unit to transport the quartz boat loaded with wafers to the feeding process of the reaction chamber and output the quartz boat loaded with processed wafers from the reaction chamber.

[0004] This horizontal LPCVD equipment feeding and discharging system realizes feeding and discharging wafers to reaction chambers with different heights through the movement combination of a set of horizontal moving units 1 and a set of vertical lifting units 2, saves the internal space of the equipment, increases the space for reducing the temperature of the wafers after processing, improves the wafer cooling speed, reduces the wafer cooling time, and facilitates personnel operation and maintenance. However, it mainly drives the boat paddle to move together, and needs to be separated after handling for the next handling work in the equipment of the cantilever type horizontal tube furnace. SUMMARY

[0005] The present application aims to provide an automatic feeding device suitable for horizontal tube furnace, which has an effective wafer carrier that can ensure the safety of the whole transmission process and prevent the wafer from falling off, and has stable transmission and the advantage of improving production efficiency.

[0006] The above technical purpose of the present application is achieved by the following technical scheme:

[0007] The utility model provides an automatic feeding device suitable for horizontal tube furnace, including the body, be equipped with lifting device on the body, be equipped with transmission on the lifting device, be equipped with telescopic device on the transmission, the telescopic device includes the main rod fixedly connected on the transmission, the link rod rotatingly connected and parallel to each other at the both ends of main rod, the operating lever is equipped with on the top of link rod and is equipped with the clamping device on the both ends of operating lever, be equipped with driving device on the link rod, still be equipped with support device on the clamping device,

[0008] The clamping device includes a right-angle connecting block fixedly connected on the side of the operating lever away from the main rod and a push cylinder provided on the right-angle connecting block;

[0009] The support device includes a support block fixedly connected with the outlet of the push cylinder and located above the right-angle connecting block, a support rod provided on the support block, and a limiting block provided at the top of the support rod.

[0010] By adopting the above technical scheme, the height of the entire device is adjusted by the lifting device, and power is provided by the transmission. Under the action of the telescopic device and the clamping device, the boat holder can be effectively grabbed, thereby facilitating the user to quickly and safely load and unload, and ensuring that the automation degree of the entire equipment is high.

[0011] Further provided is that the lifting device includes an opening provided on the body, a first rotating motor provided at the bottom of the body, a first lead screw provided at the outlet of the rotating motor, slide rails fixedly connected with the bottom of the body provided on both sides of the rotating motor, and a slide block threadedly connected with the first lead screw and provided on the slide rails.

[0012] By adopting the above technical scheme, the lifting device is driven by the lead screw, the control effect is good, and the moving speed is convenient and effective, effectively reducing the occurrence of falling off, falling, and the like.

[0013] Further provided is that the transmission includes a second rotating motor provided on the slide block, a driving roller provided at the outlet of the second rotating motor, a support plate provided on the slide block, a moving seat provided on the support plate, a second lead screw penetrating through the moving seat and threadedly connected with the moving seat, a moving block provided on the second lead screw, a transmission roller matching with the driving roller provided at the top of the moving seat, and a transmission belt sleeved on the driving roller and the transmission roller, and a clamping groove is further provided below the support plate, and the bottom of the moving seat is clamped into the clamping groove.

[0014] By adopting the above technical scheme, the transmission can effectively drive the rotation of the second lead screw by the second rotating motor, so that the moving seat moves, and the transverse movement of the moving seat will drive the expansion of the entire telescopic device, thereby achieving transverse displacement.

[0015] Further arrangement: the driving device comprises a support seat arranged above the moving seat, a transmission rod hinged on the support seat, and a vertical rod arranged at the top end of the transmission rod and penetrating the main rod and fixedly connected with the connecting rod, wherein the vertical rod is rotationally connected with the main rod.

[0016] By adopting the above technical scheme, the driving device is mainly used to drive the expansion of the entire connecting rod after the transmission device transmits the power source.

[0017] Further arrangement: the moving seat is further provided with a reinforcing device below, the reinforcing device comprises reinforcing seats arranged at the bottom of the sliding block and the main rod, and a reinforcing rod arranged between the reinforcing seats and hinged at both ends with the reinforcing seats.

[0018] By adopting the above technical scheme, the reinforcing device can effectively ensure the strength of the entire equipment, reduce the breakage of the boat support due to the weight, and effectively ensure the stable operation of the entire equipment.

[0019] Further arrangement: the machine body is further provided with an auxiliary device on one side, the auxiliary device comprises a notch arranged at the bottom of the machine body and on one side of the first rotating motor, and a hinge arranged in the notch and connected at the top end with the sliding block.

[0020] By adopting the above technical scheme, the auxiliary device can effectively move up and down with the lifting device, and the hinge can cooperate with the up and down movement of the sliding block, and the hinge can be used to offset the distance of the up and down movement of the sliding block.

[0021] Further arrangement: the hinge is slidingly connected with the inner wall of the machine body and the sliding rail on both sides.

[0022] By adopting the above technical scheme, the hinge can be more stably operated, and winding and falling off can be avoided.

[0023] Further arrangement: a limit light sensor is further arranged on the sliding rail, and a shielding plate matched with the limit light sensor is arranged on the sliding block.

[0024] By adopting the above technical scheme, the limit light sensor is electrically connected with the first rotating motor, and when the shielding plate is shielded, the first rotating motor will stop rotating, thereby determining the position of the entire sliding block and ensuring the transmission accuracy.

[0025] Further arrangement: a supporting leg is further arranged at the bottom of the machine body.

[0026] By adopting the above technical scheme, the supporting leg can make the machine body have a certain height from the ground, facilitating the passing of the hinge.

[0027] Further arrangement: the vertical rod is further provided with a limiting device, the limiting device comprises a limiting rod connected with the vertical rod, a long rod provided at the top end of the limiting rod and a long block connected with the connecting rod at the top end of the long rod.

[0028] By adopting the above technical scheme, the limiting device can effectively ensure the stability of the whole device, improve the supporting strength, and ensure that the position does not change excessively.

[0029] In summary, the present application has the following advantages: stable feeding and discharging can be effectively realized, the automation degree of the whole device is high, the feeding and discharging process can be safely and stably operated, the damage of materials and the falling of boat supports are reduced, the production efficiency is effectively ensured, and the occurrence of scalding of the user and the like can be effectively prevented due to the automatic feeding and discharging. BRIEF DESCRIPTION OF DRAWINGS

[0030] The present application will be further described below in combination with the drawings.

[0031] Figure 1 is a schematic diagram of the overall structure of the automatic feeding device suitable for the horizontal tube furnace;

[0032] Figure 2 is an automatic feeding device suitable for the horizontal tube furnace Figure 1 is an enlarged schematic diagram of position A in the automatic feeding device.

[0033] In the figure, 1 is a machine body, 2 is a lifting device, 21 is an opening, 22 is a first rotating motor, 23 is a first lead screw, 24 is a sliding rail, 25 is a sliding block, 3 is a transmission device, 31 is a second rotating motor, 32 is a driving roller, 33 is a support plate, 34 is a moving seat, 35 is a second lead screw, 36 is a moving block, 37 is a transmission roller, 38 is a transmission belt, 39 is a clamping groove, 4 is an extension device, 41 is a main rod, 42 is a connecting rod, 43 is an operating rod, 44 is a clamping device, 441 is a right-angle connecting block, 442 is a pushing cylinder, 5 is a driving device, 51 is a support seat, 52 is a transmission rod, 53 is a vertical rod, 6 is a supporting device, 61 is a supporting block, 62 is a supporting rod, 63 is a limiting block, 7 is a reinforcing device, 71 is a reinforcing seat, 72 is a reinforcing rod, 8 is an auxiliary device, 81 is a notch, 82 is a hinge, 9 is a limiting light sensor, 10 is a shielding plate, 11 is a supporting leg, 12 is a limiting device, 121 is a limiting rod, 122 is a long rod, and 123 is a long block. EMBODIMENT

[0034] The specific embodiment of the present application will be further described below in combination with the drawings.

[0035] The technical scheme adopted by the present application is:

[0036] The utility model provides an automatic feeding device for horizontal tubular furnace, including body 1, and the bottom of body 1 is equipped with support foot 11, and the body 1 is equipped with lifting device 2, lifting device 2 includes the opening 21 in the body 1, the first rotation motor 22 in the bottom of body 1, the first screw rod 23 in the outlet of rotation motor, the slide rail 24 fixedly connected with the bottom of body 1 is equipped on the both sides of rotation motor, and the slide block 25 is screw connected with the first screw rod 23 and is equipped on the slide rail 24, and the transmission device 3 is further equipped on lifting device 2, and transmission device 3 includes the second rotation motor 31 in the slide block 25, the driving roller 32 in the outlet of second rotation motor 31, the support plate 33 in the slide block 25, the moving seat 34 in the support plate 33, the second screw rod 35 screw connected with the moving seat 34, the moving block 36 in the second screw rod 35, the transmission roller 37 matched with driving roller 32 is equipped on the top of moving seat 34, and driving roller 32 and transmission roller 37 are further equipped with transmission belt 38, and the second screw rod 35 is connected with transmission roller 37.

[0037] The support plate 33 is further equipped with the clamping groove 39 below, and the moving seat 34 bottom is clamped into the clamping groove 39, and the telescopic device 4 is further equipped on transmission device 3, and telescopic device 4 includes the main rod 41 fixedly connected on transmission device 3, the linkage rod 42 rotationally connected and parallel with each other is equipped on the both ends of main rod 41, the operating rod 43 is equipped on the top of linkage rod 42, the clamping device 44 is equipped on the both ends of operating rod 43, and the clamping device 44 includes the right-angle connecting block 441 fixedly connected on the side of operating rod 43 away from main rod 41 and the push air cylinder 442 equipped on the right-angle connecting block 441, the driving device 5 is further equipped on linkage rod 42, and the driving device 5 includes the support seat 51 equipped above moving seat 34, the transmission rod 52 is hingedly equipped on support seat 51, the vertical rod 53 is equipped on the top of transmission rod 52 and penetrates main rod 41 and is fixedly connected with linkage rod 42, and the vertical rod 53 is rotationally connected with main rod 41, and the limiting device 12 is further equipped on vertical rod 53, and the limiting device 12 includes the limiting rod 121 connected with vertical rod 53, the long rod 122 is equipped on the top of limiting rod 121, and the long block 123 is connected with linkage rod 42 and is equipped on the top of long rod 122.

[0038] The clamping device 44 is also provided with a supporting device 6, which comprises a supporting block 61 fixedly connected with the outlet of the push cylinder 442 and located above the right-angle connecting block 441, a supporting rod 62 located on the supporting block 61, and a limiting block 63 located on the top end of the supporting rod 62. A reinforcing device 7 is also located below the moving seat 34, which comprises reinforcing seats 71 located on the bottom of the sliding block 25 and the bottom of the main rod 41, and a reinforcing rod 72 located between the reinforcing seats 71 and hingedly connected with the reinforcing seats 71 at both ends. An auxiliary device 8 is also located on one side of the machine body 1, which comprises a notch 81 located on the bottom of the machine body 1 and on one side of the first rotating motor 22, and a hinge 82 located in the notch 81 and connected with the sliding block 25 at the top end. The hinge 82 is slidingly connected with the inner wall of the machine body 1 and the sliding rail 24 at both sides. A limiting light sensor 9 is also located on the sliding rail 24, and a shielding plate 10 matching the limiting light sensor 9 is located on the sliding block 25.

[0039] The main working principle is as follows: in the process of feeding, the main roller 32 is first driven to rotate by the second rotating motor 31, and the transmission roller 37 is driven to rotate by the transmission belt 38, and the transmission roller 37 drives the second lead screw 35 to rotate, so that the moving block 36 moves horizontally, and the movement of the moving block 36 drives the transmission rod 52 to rotate, thereby driving the vertical rod 53 to rotate, and the vertical rod 53 directly drives the expansion of the connecting rod 42. When the operating rod 43 approaches the boat support to a certain position, the second rotating motor 31 stops rotating, the push cylinder 442 drives the supporting device 6 to clamp the two sides of the boat support, at this time the second rotating motor 31 reverses, drives the connecting rod 42 to retract, so that the operating rod 43 is recovered to approach the main rod 41, when reaching the specified position, at this time the lifting device 2 is started, the first lead screw 23 is driven to rotate by the first rotating motor 22, so that the sliding block 25 moves up and down, and the first rotating motor 22 stops rotating when the limiting light sensor is shielded by the shielding plate 10, so that the sliding block 25 reaches the specified height. At this time, the second rotating motor 31 is started again to drive the expansion of the connecting rod, until the boat support stops at the specified position, the push cylinder 442 retracts, and the whole boat support is placed at the corresponding position. The hinge 82 is mainly used for discharging the line, reducing the entanglement of the line caused by up and down movement. The line is clamped in the hinge 82 and moves along the specified track of the hinge 82, thereby reducing the mutual entanglement. The whole device has high automation degree and is convenient for the boat support to enter and exit.

[0040] The above is the preferred embodiment of the present application, which is not intended to limit the present application in any form. Any simple modification, equivalent change and modification made on the basis of the technical essence of the present application to the above embodiment shall fall within the scope of the technical solution of the present application.

Claims

1. An automatic feeding device for horizontal tubular furnaces, comprising a body (1), characterized in that: The body (1) is provided with lifting device (2), the lifting device (2) is further provided with transmission device (3), the transmission device (3) is provided with telescopic device (4), the telescopic device (4) includes the main rod (41) fixedly connected on transmission device (3), the connecting rod (42) rotatably connected at both ends of main rod (41) and parallel to each other, the operating rod (43) provided on the top of connecting rod (42) and the clamping device (44) provided on both ends of operating rod (43), the connecting rod (42) is further provided with drive device (5), the clamping device (44) is further provided with support device (6), the clamping device (44) includes the right angle connecting block (441) fixedly connected on the side of operating rod (43) away from main rod (41) and the push cylinder (442) provided on the right angle connecting block (441), the support device (6) includes the support block (61) fixedly connected with the outlet of push cylinder (442) and located above the right angle connecting block (441), the support rod (62) provided on the support block (61) and the limiting block (63) provided on the top of support rod (62), the lifting device (2) includes sliding block (25), the transmission device (3) includes the second rotating motor (31) provided on sliding block (25), the driving roller (32) provided on the outlet of second rotating motor (31), the support plate (33) provided on sliding block (25), the moving seat (34) provided on support plate (33), the second lead screw (35) penetrating through moving seat (34) and threadedly connected with moving seat (34), the moving block (36) provided on second lead screw (35), the transmission roller (37) provided on the top of moving seat (34) and matched with driving roller (32) and the transmission belt (38) sleeved on driving roller (32) and transmission roller (37), the clamping groove (39) is further provided below support plate (33), and the moving seat (34) is clamped into clamping groove (39).

2. The automatic feeding device for horizontal tubular furnace according to claim 1, characterized in that: The lifting device (2) further includes the opening (21) provided on the body (1), the first rotating motor (22) provided on the bottom of body (1), the first lead screw (23) provided on the outlet of rotating motor, the slide rail (24) provided on both sides of rotating motor and fixedly connected with the bottom of body (1), and the sliding block (25) is located on the slide rail (24) and threadedly connected with the first lead screw (23).

3. The automatic feeding device for horizontal tubular furnace according to claim 2, characterized in that: The drive device (5) includes the support seat (51) provided above moving seat (34), the transmission rod (52) hinged on support seat (51) and the vertical rod (53) penetrating through main rod (41) and fixedly connected with connecting rod (42) provided on the top of transmission rod (52), and the vertical rod (53) is rotatably connected with main rod (41).

4. The automatic feeding device for horizontal tubular furnace according to claim 3, characterized in that: The mobile base (34) is further provided with a reinforcing device (7), which comprises reinforcing bases (71) arranged at the bottom of the sliding block (25) and the main rod (41), and a reinforcing rod (72) arranged between the reinforcing bases (71) and hinged at both ends to the reinforcing bases (71).

5. A device for automatic feeding of a horizontal tubular furnace according to claim 4, characterized in that: The machine body (1) is further provided with an auxiliary device (8) comprising a notch (81) arranged at the bottom of the machine body (1) and at the side of the first rotating motor (22), and a hinge (82) arranged in the notch (81) and connected at the top to the sliding block (25).

6. A device for automatic feeding of a horizontal tubular furnace according to claim 5, characterized in that: The hinge (82) is slidingly connected to the inner wall of the machine body (1) and the sliding rail (24) respectively.

7. A device for automatic feeding of a horizontal tubular furnace according to claim 6, characterized in that: The sliding rail (24) is further provided with a limiting light sensor (9), and the sliding block (25) is provided with a shielding plate (10) matched with the limiting light sensor (9).

8. The automatic feeding device for horizontal tubular furnace according to claim 7, characterized in that: The bottom of the machine body (1) is further provided with a supporting leg (11).

9. The automatic feeding device for horizontal tubular furnace according to claim 8, characterized in that: The vertical rod (53) is further provided with a limiting device (12), which comprises a limiting rod (121) connected to the vertical rod (53), an elongated rod (122) arranged at the top of the limiting rod (121), and an elongated block (123) arranged at the top of the elongated rod (122) and connected to the connecting rod (42).

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