Antioxidant testing apparatus and antioxidant testing method

Abstract

This invention discloses an anti-oxidation testing device and method. The anti-oxidation testing device includes a base and a test stand. The base holds a workpiece under test, which has multiple test rows arranged along a second direction. Each test row has multiple test units arranged along a first direction. The test stand is equipped with a probe and a nozzle. The probe contacts the test unit, and the nozzle sprays a protective liquid. The nozzle and probe move synchronously with the test stand. The test stand can move relative to the base along the first direction to switch the test units corresponding to the probe and nozzle. The test stand can also move relative to the base along the second direction to switch the test rows corresponding to the probe and nozzle. The nozzle is positioned upstream of the probe so that each test unit moves to the probe after passing through the nozzle for testing. This device allows for timely testing of individual test units after spraying, reducing the probability of oxidation due to evaporation of the protective liquid.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing, and more particularly to an anti-oxidation testing device and an anti-oxidation testing method. Background Technology

[0002] Semiconductor testing requires placing the device under test (wafer, IC, or PCBA, etc.) on a stage, contacting the solder joints or electrodes of the device under test with a probe, and then conducting an electrical test. When the test current is large or the probe tip is thin, contact discharge can easily occur, causing oxidation of the probe tip and the contacting electrode. This discharge leads to oxidation of the probe tip or blackening of the electrode surface. Increased resistance after probe tip oxidation can cause data distortion in subsequent tests; and oxide film formed after electrode oxidation can lead to poor soldering in subsequent processes.

[0003] In existing technologies, the following three protection methods are commonly used to reduce the probability of contact discharge between the probe and the electrode:

[0004] The first method involves placing the stage and the test piece in a sealed nitrogen environment for testing. This method requires a well-sealed nitrogen environment, and its drawback is the need for a large amount of nitrogen.

[0005] The second method involves nitrogen gas spraying protection for the test piece before and during testing. The disadvantage of this method is that the gas spraying can easily cause air disturbance, and it is difficult to obtain a high concentration of nitrogen protection in the area of ​​the test piece. It also places strict requirements on the concentration and flow rate of nitrogen gas as well as the movement of the stage.

[0006] The third method involves applying a volatile insulating liquid. A layer of insulating liquid is applied to the surface of the test piece before testing. After testing, the insulating liquid evaporates, leaving no residue on the electrodes that could affect subsequent processes. However, for products like wafers containing tens of thousands of chips, the testing process often lasts several hours. If an insulating liquid is applied before testing, it may evaporate by the time the test reaches the later-positioned chips. For products with long testing times, it's difficult to guarantee that the liquid won't evaporate before the entire product is tested, thus failing to protect the later-positioned chips. Summary of the Invention

[0007] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes an anti-oxidation testing device. By placing the nozzle upstream of the probe and moving the nozzle and probe synchronously, the unit under test can be covered with a protective liquid and then come into contact with the probe, thereby achieving testing in an oxygen-free environment. Furthermore, this device can perform testing promptly after spraying a single unit under test, reducing the probability of spark oxidation caused by the evaporation of the protective liquid.

[0008] The present invention also proposes an oxidation testing method applicable to the above-mentioned oxidation testing device.

[0009] An anti-oxidation testing apparatus according to a first aspect of the present invention includes a base and a test stand. The base is used to place a test piece, the test piece having a plurality of test rows arranged along a second direction, the test rows having a plurality of test units arranged along a first direction. The test stand is provided with a probe and a nozzle. The probe is used to contact the test unit, the nozzle is used to spray a protective liquid, the nozzle and the probe move synchronously with the test stand, and the test stand is movable relative to the base along the first direction to switch the test unit corresponding to the probe and the nozzle. The test stand is also movable relative to the base along the second direction to switch the test row corresponding to the probe and the nozzle. The nozzle is disposed upstream of the probe so that each test unit moves to the probe after passing through the nozzle for testing.

[0010] The anti-oxidation testing device according to embodiments of the present invention has at least the following beneficial effects:

[0011] The anti-oxidation testing device in this embodiment of the application enables testing in an oxygen-free environment by placing the nozzle upstream of the probe and moving the nozzle and probe synchronously, allowing the tested unit to come into contact with the probe after being covered by the protective liquid. Compared to the prior art where all tested units are coated with the protective liquid before being tested sequentially, this embodiment of the application achieves synchronous spraying during the testing process by setting the nozzle and probe on the test bench. This avoids the situation where the protective liquid evaporates too quickly, leaving some tested units without a protective liquid coating. Furthermore, spraying the subsequent tested units is performed simultaneously with the previous tested units, eliminating the need for separate spraying and testing operations and improving production efficiency. Moreover, since the tested units can be tested immediately after being sprayed with the protective liquid, the amount of protective liquid used can be reduced.

[0012] According to some embodiments of the present invention, the probe and the nozzle are sequentially disposed on the test seat along the first direction.

[0013] According to some embodiments of the present invention, the spacing between adjacent test units in the same test row is the same, and the distance L between the nozzle and the probe has the following relationship with the spacing H between adjacent test units: L=A H and A are positive integers greater than or equal to 1.

[0014] According to some embodiments of the present invention, the nozzle includes a first nozzle and a second nozzle, the second nozzle, the probe and the first nozzle are sequentially disposed on the test seat along the first direction, and the test seat is capable of moving relative to the base along the first direction and in the opposite direction of the first direction to perform testing;

[0015] Specifically, when the test seat moves along the first direction to perform the test, the first nozzle operates; when the test seat moves in the opposite direction to perform the test, the second nozzle operates.

[0016] According to some embodiments of the present invention, the spacing between adjacent test units in the same test row is the same, and the distance l1 between the first nozzle and the probe has the following relationship with the spacing H between adjacent test units: l1=A H, and / or, the distance l2 between the second nozzle and the probe has the following relationship with the spacing H between adjacent units under test: l2 = A H and A are positive integers greater than or equal to 1.

[0017] According to some embodiments of the present invention, the probe and the nozzle are arranged sequentially along the second direction, and the row spacing of each adjacent test row is the same. The distance L between the nozzle and the probe has the following relationship with the row spacing K of the test row: L=B K and B are positive integers greater than or equal to 1.

[0018] An oxidation protection test method according to a second aspect of the present invention includes the following steps:

[0019] S100. Fix the test piece to the base;

[0020] S200, Drive the test seat to move relative to the base so that the nozzle moves above the unit under test in advance of the probe, and control the nozzle to spray the protective liquid to cover the unit under test;

[0021] S300, drive the test seat to continue moving relative to the base, so that the probe moves above the unit under test, control the probe to test the unit under test, and the nozzle moves to the rear of the unit under test to spray;

[0022] S400, repeat steps S200 and S300 until it is detected that all the tested units have completed the test.

[0023] An oxidation protection test method according to a third aspect of the present invention includes the following steps:

[0024] S100. Fix the test piece to the base;

[0025] S200, Drive the test seat to move relative to the base along the first direction, so that the nozzle moves above the unit under test in advance relative to the probe, and control the nozzle to spray the protective liquid to cover the unit under test;

[0026] S300, drive the test seat to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the nozzle moves to the rear of the unit under test to spray;

[0027] S400, Repeat steps S200 and S300 to complete the testing of all units under test in a single test row;

[0028] S500, Drive the test base to move in the opposite direction relative to the base along the first direction to return to the starting end;

[0029] S600, Drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row;

[0030] S700, Repeat steps S400 to S600 to drive the test socket to complete the tests of different test rows until it is detected that all the units under test in all test rows have completed the tests.

[0031] An oxidation protection test method according to a fourth aspect of the present invention includes the following steps:

[0032] S100. Fix the test piece to the base;

[0033] S200, Drive the test seat to move relative to the base along the first direction, so that the first nozzle moves to the top of the unit under test in advance of the probe, and control the first nozzle to spray the protective liquid to cover the unit under test;

[0034] S300, drive the test seat to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the first nozzle moves to the rear of the unit under test to spray;

[0035] S400, repeat steps S200 and S300, the test stand moves relative to the base along the first direction to complete the testing of all the units under test in a single test row;

[0036] S500, drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row;

[0037] S600, drive the test seat to move in the opposite direction to the base along the first direction, so that the second nozzle moves to the top of the unit under test in advance of the probe, and control the second nozzle to spray the protective liquid to cover the unit under test;

[0038] S700, drive the test seat to continue moving in the opposite direction relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the second nozzle moves to the rear of the unit under test to spray;

[0039] S800, repeat steps S600 and S700, the test stand moves in the opposite direction relative to the base along the first direction to complete the testing of all the units under test in a single test row;

[0040] S900, drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row;

[0041] S1000, Repeat steps S200 to S900 until all test rows have been tested.

[0042] An oxidation prevention test method according to a fifth aspect embodiment of the present invention includes the following steps:

[0043] S100. Fix the test piece to the base;

[0044] S200, drive the test seat to move relative to the base so that the nozzle moves to the test unit above it B test rows ahead of the probe, control the probe to perform the test in the Nth test row, and control the nozzle to spray in the N+Bth test row;

[0045] S300, drive the test seat to continue moving relative to the base and perform testing and spraying synchronously until the probe moves above the N+Bth test row, control the probe to test the unit under test in the N+Bth test row, and the nozzle synchronously moves above the unit under test in the N+2Bth test row to perform spraying.

[0046] S400, repeat steps S200 and S300 until it is detected that all the tested units have completed the test.

[0047] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0048] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0049] Figure 1 This is a schematic diagram of the first working path of the test stand relative to the base according to an embodiment of the present invention;

[0050] Figure 2 This is a schematic diagram of a second working path of the test stand relative to the base according to an embodiment of the present invention;

[0051] Figure 3 This is a schematic diagram of the structure of a first embodiment of the anti-oxidation testing device according to an embodiment of the present invention;

[0052] Figure 4 This is a schematic diagram of the test stand moving relative to the base along a first direction according to an embodiment of the present invention;

[0053] Figure 5 This is a schematic diagram of the test stand moving in the opposite direction relative to the base in a first direction according to an embodiment of the present invention.

[0054] Figure 6 This is a schematic diagram of a second embodiment of the anti-oxidation testing device according to an embodiment of the present invention;

[0055] Figure 7 This is a schematic flowchart of the anti-oxidation test method according to the second aspect of the present invention.

[0056] Figure label:

[0057] Base 100;

[0058] Test holder 200; probe 210; nozzle 220; first nozzle 221; second nozzle 222; air inlet channel 223; liquid inlet channel 224; first speed control valve 225; second speed control valve 226; needle holder 230; first through hole 231; second through hole 232;

[0059] Test device 300; Test row 310; Unit under test 311. Detailed Implementation

[0060] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0061] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0062] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0063] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0064] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0065] An embodiment of the first aspect of this application provides an anti-oxidation testing device, which includes a base 100 and a test stand 200. The base 100 is used to place a device under test (DUT) 300. It is understood that the DUT 300 can be a wafer, IC, or PCBA, etc., and has multiple test units 311. The test units 311 can be solder joints, electrodes, etc., and need to be electrically tested to detect whether their electrical parameters are normal.

[0066] like Figures 1 to 3 In the illustrated embodiment, a plurality of test units 311 are disposed on the test piece 300. The test units 311 are arranged in a rectangular array, and the plurality of test units 311 arranged along a first direction form test rows 310. The plurality of test rows 310 are arranged along a second direction on the top surface of the test piece 300. It is understood that the number of test units 311 in each test row 310 may be the same or different. Figure 1 and Figure 2In the embodiment shown, the test units 311 are evenly distributed on the circular test piece 300, so that the number of test units 311 in each test row 310 is inconsistent.

[0067] The base 100 is provided with a device for fixing the test piece 300, such as... Figure 3 In the illustrated embodiment, a plurality of negative pressure holes are provided on the top surface of the base 100. These holes connect to a negative pressure channel within the base 100, which in turn connects to an external negative pressure source. Therefore, when the test piece 300 is placed on the base 100, the suction force of the negative pressure holes can attract and attach the test piece 300 to the base 100, preventing movement of the test piece 300 during testing. It is understood that the base 100 may also be provided with threaded connection structures, snap-fit ​​structures, etc., for detachable connection between the base 100 and the test piece 300. These will not be described in detail here.

[0068] A probe 210 is provided on the test socket 200, and the probe 210 is used to contact the unit under test 311. (Reference) Figure 4 As shown, probe 210 is divided into a positive probe 210 and a negative probe 210, which are connected to the positive and negative terminals of the unit under test 311, respectively, or connected through the unit under test 311 to form a circuit for high-current testing of the unit under test 311. Since sparking and oxidation are prone to occur when probe 210 and the unit under test 311 are tested, a nozzle 220 is also provided on the test holder 200 to spray a protective liquid on the surface of the unit under test 311 before the probe 210 contacts the unit under test 311, thereby isolating oxygen and preventing oxidation of probe 210 or the unit under test 311.

[0069] It is understood that the protective fluid needs to be insulating to prevent it from directly conducting through probe 210 and causing a short circuit; the protective fluid also needs to be volatile so that it can evaporate after testing, without affecting subsequent processes or requiring cleaning. In this embodiment, the protective fluid is fluorinated oil, which has insulating, non-flammable, and volatile properties, making it suitable for the application scenarios of this application.

[0070] It should be noted that at least one of the test base 200 or the base 100 is connected to a horizontal drive mechanism (not shown in the figure), so that the test base 200 can move horizontally relative to the base 100. For example, the base 100 is connected to a first horizontal drive mechanism to drive the base 100 to move horizontally relative to the test base 200; or, the test base 200 is connected to a second horizontal drive mechanism to drive the test base 200 to move horizontally relative to the base 100; or, both the test base 200 and the base 100 are connected to horizontal drive mechanisms, which cooperate to generate relative movement so that the probe 210 moves above the unit under test 311.

[0071] Additionally, at least one of the test base 200 or the base 100 is connected to a vertical drive mechanism, so that the test base 200 can move vertically relative to the base 100, thereby enabling the probe 210 to move closer to the unit under test 311 until it contacts the unit under test 311, or the probe 210 to move away from the unit under test 311 until it separates from the unit under test 311.

[0072] It is understandable that the probe 210 and nozzle 220 are mounted on the test holder 200 and can move synchronously with the test holder 200. For example... Figure 1 and Figure 2 As shown, the test stand 200 has a first direction and a second direction in the horizontal direction. It can move relative to the base 100 along the first direction to switch the test unit 311 corresponding to the probe 210 and nozzle 220; that is, it drives the probe 210 and nozzle 220 to move above different test units 311. The test stand 200 can also move relative to the base 100 along the second direction to switch the test row 310 corresponding to the probe 210 and nozzle 220; that is, it drives the probe 210 and nozzle 220 to move above different test rows 310. It can be understood that the test unit 311 corresponding to the probe 210 and nozzle 220 can be a test unit 311 in the same test row 310 or a test unit 311 in different test rows 310.

[0073] The working path of the test stand 200 relative to the base 100 is designed according to actual needs, and the working path can be as follows: Figure 1 The S-shaped path shown involves testing all units 311 under test (DUTs) in the Nth test row 310 along the first direction, then moving along the second direction to the (N+1)th test row 310. The DUTs in the (N+1)th test row 310 are then tested in the reverse direction of the first direction. After testing, the path moves along the second direction to the (N+2)th test row 310, and the DUTs in the (N+2)th test row 310 are tested along the first direction. This cycle is repeated to complete the testing of all DUTs 311 on the entire device under test (DUT) 300. This working path has a short travel distance and high efficiency.

[0074] The working path can also be like this Figure 2 The zigzag path shown, after testing the Nth test row 310 along the first direction, moves back to the starting point in the opposite direction of the first direction, then moves along the second direction to switch to the (N+1)th test row 310, and then tests the (N+1)th test row 310 again along the first direction. This cycle is repeated to complete the testing of the entire unit 311 under test on the entire test piece 300. This working path is relatively simple, and the requirements for the nozzle and probe 210 are also relatively simple.

[0075] Understandably, regardless of any of the above work paths, refer to Figure 3 and Figure 6 As shown, the nozzles 220 are all positioned upstream of the probe 210, so that each unit under test 311 passes through the nozzles 220 first and then through the probe 210. Specifically, for ease of understanding, this is illustrated by taking the movement of the unit under test 311 relative to the test base 200 as an example, that is, each unit under test 311 moves relative to the nozzles 220 and the probe 210.

[0076] For any unit under test 311, the nozzle 220 is located upstream of its movement path, and the probe 210 is located downstream of its movement path. When the unit under test 311 passes the nozzle 220, it is covered by the protective liquid sprayed by the nozzle 220, thereby isolating oxygen. Then it moves to the probe 210, and the probe 210 passes through the protective liquid and contacts the unit under test 311, thereby realizing the power-on test in an oxygen-free environment and reducing the probability of arcing and oxidation.

[0077] For the test unit 311 on the working path, it can be divided into relatively front and relatively rear test units 311 according to the order of testing and spraying. The relatively front test unit 311 is tested and sprayed earlier than the relatively rear test unit 311. After being sprayed by the nozzle 220, the relatively front test unit 311 moves to the probe 210 for testing. At this time, the relatively rear test unit 311 moves to the nozzle 220 for spraying. This cycle continues, and the spraying operation and testing operation are performed synchronously, which is highly efficient.

[0078] Based on the above, the anti-oxidation testing device in this embodiment of the application, by placing the nozzle 220 upstream of the probe 210 and moving the nozzle 220 and probe 210 synchronously, enables the tested unit 311 to be covered with protective liquid and then contact the probe 210, thereby achieving testing in an oxygen-free environment. Compared to the prior art where all tested units 311 are coated with protective liquid before being tested sequentially, this embodiment of the application, by setting the nozzle 220 and probe 210 on the test bench, achieves synchronous spraying during the testing process. On the one hand, it avoids the situation where the protective liquid evaporates too quickly, resulting in some tested units 311 not being covered with protective liquid. On the other hand, it sprays the tested units 311 behind while the front tested units 311 are being tested, eliminating the need for separate spraying and testing operations, thus improving production efficiency. Furthermore, since the tested units 311 can be tested promptly after being sprayed with protective liquid, the amount of protective liquid used can be reduced.

[0079] In some embodiments, such as Figure 2In the illustrated working path, the test stand 200 moves relative to the base 100 along a first direction to perform the test. It should be noted that in this embodiment, the reverse movement of the test stand 200 relative to the base 100 along the first direction is for repositioning, not for performing the test. (Reference) Figure 3 As shown, it should be explained that in this embodiment, only one nozzle 220 needs to be provided, and its position is the same as... Figure 3 The first nozzle 221 is positioned in the same location. The probe 210 and the nozzle 220 are sequentially arranged on the test base 200 along the first direction, that is, the nozzle 220 is located at the front end of the probe 210 along the first direction. Thus, when testing any test row 310, the test base 200 moves relative to the base 100 along the first direction, and the nozzle 220 sprays the tested unit 311 before the probe 210.

[0080] It is understood that in some embodiments, the nozzle 220 is in a normally open state during the movement of the probe 210, thereby enabling spraying of the test unit 311 on the movement path. In this case, the distance between the nozzle 220 and the probe 210 is not strongly correlated with the distance between adjacent test units 311. In other embodiments, the distance between each adjacent test unit 311 in the same test row 310 is the same, and the nozzle 220 is in a partially open state during the movement of the probe 210. That is, the nozzle 220 will only open to spray the protective liquid after the probe 210 moves from one test unit 311 to another. Therefore, the distance L between the nozzle 220 and the probe 210 and the distance H between adjacent test units 311 need to satisfy the following relationship: L=A H, where A is a positive integer greater than or equal to 1.

[0081] The value of A determines the distance between the nozzle 220 and the probe 210. The value of A can be determined based on the evaporation time of the protective liquid and the influence of the sprayed protective liquid on the test of the probe 210. For example, when the evaporation time of the protective liquid is long, the distance between the nozzle 220 and the probe 210 can be appropriately increased to reduce the airflow disturbance or liquid splashing caused by the nozzle 220 spraying the protective liquid onto the rear test unit 311, so as to reduce the influence of the probe 210 on the test of the front test unit 311.

[0082] For example, when A equals 2, the distance L between the nozzle 220 and the probe 210 is twice the distance H between adjacent test units 311. That is, when the probe 210 is located at the Mth test unit 311 for testing, the nozzle 220 is located at the M+2th test unit 311 for spraying. After the Mth test unit 311 is tested, the test seat 200 moves relative to the base 100 so that the probe 210 moves to the M+1th test unit 311 for testing (when the probe 210 is located at the M-1th test unit 311 for testing, the nozzle 220 sprays the M+1th test unit 311). The nozzle 220 moves to the M+2th test unit 311 for spraying.

[0083] Understandably, this spot application method allows for more precise spraying of protective liquid onto each tested unit 311, improving the utilization rate of the protective liquid and further reducing the amount of protective liquid used.

[0084] In some embodiments, such as Figures 3 to 5 As shown, nozzle 220 includes a first nozzle 221 and a second nozzle 222. The second nozzle 222, probe 210, and first nozzle 221 are sequentially arranged on test base 200 along a first direction. This structure is suitable for an S-shaped working path, meaning that test base 200 can move relative to base 100 along the first direction for testing, and can also move in the opposite direction for testing. It is understood that when test base 200 moves along the first direction for testing, the first nozzle 221 operates. When test base 200 moves in the opposite direction for testing, the second nozzle 222 operates.

[0085] Furthermore, similar to the implementation with only one nozzle 220, assuming the spacing between adjacent test units 311 in the same test row 310 is the same, the distance l1 between the first nozzle 221 and the probe 210 and the spacing H between adjacent test units 311 have the following relationship: l1 = A H, and / or, the distance l2 between the second nozzle 222 and the probe 210 and the spacing H of the adjacent measured unit 311 have the following relationship: l2 = A H.

[0086] In the above embodiments, the probe 210 and nozzle 220 are both positioned above the same test row 310 during both testing and spraying. Unlike the above embodiments, in other embodiments, the test row 310 corresponding to the probe 210 test and the test row 310 corresponding to the spraying are different. Specifically, for example... Figure 6As shown, probe 210 and nozzle 220 are arranged sequentially along the second direction. It can be understood that at this time, nozzle 220 is still upstream of probe 210, but the measured unit 311 corresponding to nozzle 220 is adjacent to or separated from the measured unit 311 corresponding to probe 210 by at least one row.

[0087] For example, when nozzle 220 is spraying the Nth test row 310, probe 210 is testing the (N-1)th test row 310, and nozzle 220 moves synchronously with probe 210. After probe 210 completes the test of one unit 311 in the (N-1)th test row 310, it moves along the first direction or in the opposite direction by the distance of one unit 311, and nozzle 220 similarly moves along the first direction or in the opposite direction by the distance of one unit 311. When probe 210 completes the test of the (N-1)th test row 310, probe 210 moves along the second direction to the Nth test row 310 for testing, and nozzle 220 similarly moves along the second direction to the (N+1)th test row 310 for spraying.

[0088] It is understandable that the row spacing of each adjacent test row 310 is the same, so the distance L between the nozzle 220 and the probe 210 has the following relationship with the row spacing K of the test row 310: L=B K and B are positive integers greater than or equal to 1. The value of B determines the distance between the nozzle 220 and the probe 210. The value of B can be determined according to the evaporation time of the protective liquid and the influence of the sprayed protective liquid on the test of the probe 210. For example, when the evaporation time of the protective liquid is long, the distance between the nozzle 220 and the probe 210 can be appropriately increased to reduce the airflow disturbance or liquid splashing caused by the nozzle 220 spraying protective liquid onto the rear test unit 311, so as to reduce the influence of the probe 210 on the test of the front test unit 311.

[0089] In some embodiments, such as Figure 3 As shown, the nozzle 220 includes an air inlet channel 223 and a liquid inlet channel 224. The air inlet channel 223 is connected to an external high-pressure air source for airflow, and the liquid inlet channel 224 is for the flow of protective liquid. The air inlet channel 223 and the liquid inlet channel 224 are connected, allowing the high-speed airflow to drive the protective liquid outwards. Furthermore, a first speed regulating valve 225 is provided within the air inlet channel 223 to regulate the airflow velocity. And / or, a second speed regulating valve 226 is provided within the liquid inlet channel 224 to regulate the flow velocity of the protective liquid. By adjusting the first speed regulating valve 225 and / or the second speed regulating valve 226, the spray volume of the nozzle can be adjusted.

[0090] In some embodiments, the anti-oxidation testing device further includes a needle holder 230 and a CCD camera (not shown in the figure). The needle holder 230 is used to adjust the power parameters of the probe 210, and the CCD camera is used to assist the probe 210 in aligning and contacting the unit under test 311. The needle holder 230 is arranged parallel above the base 100. The needle holder 230 has a first through hole 231 for the nozzle 220 to pass through and a second through hole 232 for exposing the probe 210. The probe 210 is disposed on the wall of the second through hole 232. The CCD camera is positioned above the needle holder 230, corresponding to the position of the second through hole 232, so as to acquire image signals of the probe 210 and the unit under test 311 located below the probe 210, thereby assisting the probe 210 in accurately contacting the unit under test 311.

[0091] The second aspect of this application also provides an anti-oxidation testing method, which can be applied to the aforementioned anti-oxidation testing device, specifically, as follows: Figure 7 As shown, the antioxidant test method includes the following steps:

[0092] S100. Fix the test piece to the base.

[0093] Understandably, this fixed connection is generally a fixed and detachable connection, which can be achieved through negative pressure adsorption, snap-fit, threaded connection, etc.

[0094] S200: Drive the test stand to move relative to the base so that the nozzle moves ahead of the probe to the front of the unit under test and controls the nozzle to spray out protective liquid to cover the unit under test.

[0095] It is understood that the drive test stand 200 described herein moves relative to the base 100, and the drive mechanism can be connected to the test stand 200 or the base 100.

[0096] S300: Drive the test stand to continue moving relative to the base so that the probe moves to the front of the test unit and controls the probe to test the test unit. The nozzle moves to the rear of the test unit to spray.

[0097] Specifically, the process of controlling probe 210 to test unit 311 also includes the following steps:

[0098] Image data of probe 210 and unit under test 311 are acquired by a CCD camera;

[0099] The probe 210 is aligned with the unit under test 311 based on the image data.

[0100] The test stand 200 is driven to move closer to the base 100 so that the probe 210 and the unit under test 311 come into contact.

[0101] S400, repeat steps S200 and S300 until it is detected that all tested units have completed the test.

[0102] The test stand 200 moves relative to the base 100 along the working path until all test units 311 have been detected. The detection method can be to acquire image information at the probe 210 by taking a picture with a CCD camera to determine whether there are still test units 311 at the next moving position. Alternatively, it can be to obtain the position information of the last test unit 311 by comparing it with the distribution data of the test units 311 on the test piece 300 imported into the controller beforehand.

[0103] Furthermore, based on the zigzag working path, only one nozzle is needed in the anti-oxidation testing device. The test stand 200 has three states: testing state, return state, and row-changing state. In the testing state, the test stand 200 moves relative to the base 100 along a first direction. In this state, the probe 210 and nozzle 220 are active, and the drive mechanism drives the test stand 200 to move in steps, with the spacing of the tested units 311 as the unit. In the return state, the test stand 200 moves relative to the base 100 in the opposite direction along the first direction until it returns to the starting end. In this state, the probe 210 and nozzle 220 are not active, and the drive mechanism drives the test stand 200 to quickly return to its original position. In the row-changing state, the test stand 200 moves relative to the base 100 along a second direction to move to the lower test row 310 for testing. Therefore, combined with... Figure 2 and Figure 3 The oxidation prevention test method of the third aspect of this application includes the following steps:

[0104] S100. Fix the test piece to the base.

[0105] S200, drive the test stand to move relative to the base along the first direction so that the nozzle moves above the unit under test in advance compared to the probe, and control the nozzle to spray out protective liquid to cover the unit under test;

[0106] S300, drive the test stand to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the nozzle moves to the rear of the unit under test to spray;

[0107] S400, repeat steps S200 and S300 to complete the testing of all units under test in a single test row;

[0108] During this step, test socket 200 is in test mode.

[0109] S500, drive the test base to move in the opposite direction relative to the base in the first direction to return to the starting end;

[0110] During this step, the test socket 200 is in the returned position.

[0111] S600, drive the test stand to move relative to the base in the second direction so that the probe moves to the next test row;

[0112] During this step, test socket 200 is in a newline state.

[0113] S700, Repeat steps S400 to S600 to drive the test socket to complete the tests of different test rows until it is detected that all the units under test in all test rows have completed the tests.

[0114] Unlike the previous embodiment where only one nozzle 220 was provided, a first nozzle 221 and a second nozzle 222 are respectively provided on both sides of the probe 210, thus making it suitable for an S-shaped working path. Compared to the previous embodiment, the test holder 200 does not need to return to its original position, and its travel distance is shorter. Specifically, refer to... Figure 1 and Figure 3 As shown, the oxidation resistance test method applicable to this type of structure according to the fourth aspect embodiment of this application includes the following steps:

[0115] S100. Fix the test piece to the base.

[0116] S200, drive the test stand to move relative to the base along the first direction, so that the first nozzle moves to the top of the unit under test in advance of the probe, and control the first nozzle to spray out protective liquid to cover the unit under test;

[0117] S300, drive the test stand to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the first nozzle moves to the rear of the unit under test to spray;

[0118] S400, repeat steps S200 and S300, the test stand moves relative to the base along the first direction to complete the testing of all the units under test in a single test row;

[0119] S500, drive the test stand to move relative to the base in the second direction so that the probe moves to the next test row;

[0120] S600, drive the test stand to move in the opposite direction to the base in the first direction, so that the second nozzle moves to the top of the unit under test in advance of the probe, and control the second nozzle to spray out protective liquid to cover the unit under test;

[0121] S700, drive the test stand to continue moving in the opposite direction relative to the base in the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the second nozzle moves to the rear of the unit under test to spray.

[0122] S800, repeat steps S600 and S700, the test stand moves in the opposite direction relative to the base in the first direction to complete the testing of all the units under test in a single test row;

[0123] S900, drive the test stand to move relative to the base along the second direction so that the probe moves to the next test row;

[0124] S1000, Repeat steps S200 to S900 until all test rows have been tested.

[0125] In other embodiments, only one nozzle 220 may be provided, with the nozzle 220 and probe 210 arranged in different rows. This structure is suitable for zigzag working paths and also for S-shaped working paths. (Refer to...) Figure 6 Based on this structure, the oxidation prevention test method of the fourth aspect of this application includes the following steps:

[0126] S100. Fix the test piece to the base.

[0127] S200: Drive the test stand to move relative to the base so that the nozzle moves above the unit under test B test rows ahead of the probe, and controls the probe to perform the test in the Nth test row, and the nozzle to spray in the N+Bth test row.

[0128] S300, drive the test stand to continue moving relative to the base and perform testing and spraying synchronously until the probe moves above the N+Bth test row, control the probe to test the unit under test in the N+Bth test row, and the nozzle moves synchronously to the unit under test in the N+2Bth test row to spray.

[0129] S400, repeat steps S200 and S300 until it is detected that all tested units have completed the test.

[0130] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. An anti-oxidation testing device, characterized in that, include: A base for placing a test piece, the test piece having multiple test rows arranged along a second direction, the test rows having multiple test units arranged along a first direction; The top surface of the base is provided with a plurality of negative pressure holes, which are connected to a negative pressure channel inside the base, and the negative pressure channel is connected to an external negative pressure source. The test stand is provided with a probe and a nozzle. The probe is used to contact the unit under test, and the nozzle is used to spray a protective liquid. The nozzle and the probe move synchronously with the test stand. The test stand can move relative to the base along a first direction to switch the unit under test corresponding to the probe and the nozzle. The test stand can also move relative to the base along a second direction to switch the test row corresponding to the probe and the nozzle. The nozzle is positioned upstream of the probe so that each unit under test moves to the probe after passing through the nozzle for testing.

2. The anti-oxidation testing device according to claim 1, characterized in that, The probe and the nozzle are sequentially arranged on the test seat along the first direction.

3. The anti-oxidation testing device according to claim 2, characterized in that, The spacing between adjacent test units in the same test row is the same, and the distance L between the nozzle and the probe has the following relationship with the spacing H between adjacent test units: L=A H and A are positive integers greater than or equal to 1.

4. The anti-oxidation testing device according to claim 1, characterized in that, The nozzle includes a first nozzle and a second nozzle. The second nozzle, the probe, and the first nozzle are sequentially arranged on the test base along the first direction. The test base can move relative to the base along the first direction and in the opposite direction of the first direction to perform the test. Specifically, when the test seat moves along the first direction to perform the test, the first nozzle operates; when the test seat moves in the opposite direction to perform the test, the second nozzle operates.

5. The anti-oxidation testing device according to claim 4, characterized in that, The spacing between adjacent test units in the same test row is the same, and the distance l1 between the first nozzle and the probe has the following relationship with the spacing H between adjacent test units: l1 = A H, and / or, the distance l2 between the second nozzle and the probe has the following relationship with the spacing H between adjacent units under test: l2 = A H and A are positive integers greater than or equal to 1.

6. The anti-oxidation testing device according to claim 1, characterized in that, The probe and the nozzle are arranged sequentially along the second direction, and the row spacing of each adjacent test row is the same. The distance L between the nozzle and the probe has the following relationship with the row spacing K of the test row: L=B K and B are positive integers greater than or equal to 1.

7. An oxidation prevention test method, characterized in that, The method applied to the anti-oxidation testing device according to claim 1 includes the following steps: S100. Fix the test piece to the base; S200, Drive the test seat to move relative to the base so that the nozzle moves above the unit under test in advance of the probe, and control the nozzle to spray the protective liquid to cover the unit under test; S300, drive the test seat to continue moving relative to the base, so that the probe moves above the unit under test, control the probe to test the unit under test, and the nozzle moves to the rear of the unit under test to spray; S400, repeat steps S200 and S300 until it is detected that all the tested units have completed the test.

8. An oxidation prevention test method, characterized in that, The method applied to the anti-oxidation testing device according to claim 2 or 3 includes the following steps: S100. Fix the test piece to the base; S200, Drive the test seat to move relative to the base along the first direction, so that the nozzle moves above the unit under test in advance relative to the probe, and control the nozzle to spray the protective liquid to cover the unit under test; S300, drive the test seat to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the nozzle moves to the rear of the unit under test to spray; S400, Repeat steps S200 and S300 to complete the testing of all units under test in a single test row; S500, Drive the test base to move in the opposite direction relative to the base along the first direction to return to the starting end; S600, Drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row; S700, Repeat steps S400 to S600 to drive the test socket to complete the tests of different test rows until it is detected that all the units under test in all test rows have completed the tests.

9. An oxidation resistance test method, characterized in that, The method applied to the anti-oxidation testing apparatus according to claim 4 or 5 includes the following steps: S100. Fix the test piece to the base; S200, Drive the test seat to move relative to the base along the first direction, so that the first nozzle moves to the top of the unit under test in advance of the probe, and control the first nozzle to spray the protective liquid to cover the unit under test; S300, drive the test seat to continue moving relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the first nozzle moves to the rear of the unit under test to spray; S400, repeat steps S200 and S300, the test stand moves relative to the base along the first direction to complete the testing of all the units under test in a single test row; S500, drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row; S600, drive the test seat to move in the opposite direction to the base along the first direction, so that the second nozzle moves to the top of the unit under test in advance of the probe, and control the second nozzle to spray the protective liquid to cover the unit under test; S700, drive the test seat to continue moving in the opposite direction relative to the base along the first direction, so that the probe moves above the unit under test, control the probe to test the unit under test, and the second nozzle moves to the rear of the unit under test to spray; S800, repeat steps S600 and S700, the test stand moves in the opposite direction relative to the base along the first direction to complete the testing of all the units under test in a single test row; S900, drive the test socket to move relative to the base along the second direction, so that the probe moves to the next test row; S1000, Repeat steps S200 to S900 until all test rows have been tested.

10. An oxidation resistance test method, characterized in that, The method applied to the anti-oxidation testing device according to claim 6 includes the following steps: S100. Fix the test piece to the base; S200, drive the test seat to move relative to the base so that the nozzle moves to the test unit above it B test rows ahead of the probe, control the probe to perform the test in the Nth test row, and control the nozzle to spray in the N+Bth test row; S300, drive the test seat to continue moving relative to the base and perform testing and spraying synchronously until the probe moves above the N+Bth test row, control the probe to test the unit under test in the N+Bth test row, and the nozzle synchronously moves above the unit under test in the N+2Bth test row to perform spraying. S400, repeat steps S200 and S300 until it is detected that all the tested units have completed the test.

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