A vacuum high-rate deposition rotating cylindrical arc coating source system

Abstract

The present invention provides a vacuum high-rate deposition rotating cylindrical arc coating source system, which includes a rotating cylindrical target device, an arc ignition device, a movable mask device, a main body, an electric control device and a gas homogenizing device; the rotating cylindrical target device includes a magnetic axis and a target in the middle; the magnetic axis includes a fixed shaft, a fixed pressing block, an adjusting nut seat, a fixed screw, a magnetic conductive plate, a magnetic rod, a connecting bushing, a support block, a rotating connection head one, a rotating connection head two and a magnetic conductive mask; the arc ignition device includes a tungsten electrode, a connecting block, an extension rod, a main shaft, an anti-plating mask, a pressing plate, a cylinder seat, an insulating pad, a guiding shaft, a spring pressing block, an insulating pressing block, a cylinder, a cylinder fixing seat and a wiring terminal; the movable mask device includes a fixed mask, a right-side movable mask, a left-side movable mask and an oil-free bushing; this design optimizes the structure of the coating source system, enables quick installation and disassembly, has more efficient arc ignition, has a reasonable magnetic field and magnetic conductive design, has stable discharge, improves the utilization rate of the target, and thus improves the film forming quality.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma surface vapor deposition, and particularly relates to a vacuum high-rate deposition rotating cylindrical arc coating source system. Background Art

[0002] In the prior art, magnetron sputtering, evaporation coating, multi-arc ion plating, etc. are all common physical coating source forms. However, each of them has its own advantages and disadvantages. The magnetron sputtering technology is mature, the film formation is stable and easy to control, and there are already a large number of application cases. Its disadvantages are the low sputtering film formation rate and the relatively high overall system cost; the evaporation coating technology is mature and has a high film formation rate, but it is not easy to control its stability and the quality of large-area products; the multi-arc ion plating rate and stability are between the two, and it has obvious advantages in some application scenarios. However, its market use scenario is a cylindrical planar arc, the target is a fixed planar arc discharge, the heat is concentrated, and the utilization rate is low. When applying large-area product coating, multiple units need to be combined for use.

[0003] In view of this, the inventor of the present invention has conducted in-depth research on the above problems, and thus this case has arisen. Summary of the Utility Model

[0004] In view of the above problems, the utility model provides an arc coating source system that improves the film formation efficiency of coating, improves the utilization rate of the target material, and improves the quality of sputtered particles.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] A vacuum high-rate deposition rotating cylindrical arc coating source system includes a rotating cylindrical target device, an arc ignition device, a movable mask device, a main body, an electric control device, and a gas distribution device;

[0007] The rotating cylindrical target device includes a magnetic axis and a target material in the middle, a driven end head assembly and a driving end head assembly located at both ends respectively, and a servo motor; a driving pulley is installed on the output shaft of the servo motor, and the driving pulley is connected to a driven pulley inside the driving end head assembly through a belt;

[0008] The magnetic axis includes a fixed shaft, a fixed pressing block, an adjusting nut seat, a fixed screw, a magnetic conductive plate, a magnetic rod, a connecting shaft sleeve, a support block, a rotating connection head one, a rotating connection head two, and a magnetic conductive mask, etc.; both ends of the fixed shaft are respectively connected to the rotating connection head one and the rotating connection head two; a support block is installed in the middle of the fixed shaft, and a screw is inserted and fixed with a nut. A fixed distance shaft sleeve and a rotating shaft sleeve are installed between the two support blocks, and a screw is inserted and fixed with a nut; a plurality of fixed screws are respectively fixed on the magnetic conductive plate, then pass through the fixed shaft and are fixed through the adjusting nut seat and the fixed pressing block; the magnetic rod is adsorbed on the magnetic conductive plate, and the magnetic rod is blocked by the magnetic conductive mask;

[0009] The arc starting device includes a tungsten electrode, a connecting block, an extension rod, a main shaft, an anti-plating mask, a pressing plate, a cylinder base, an insulating pad, a guiding shaft, a spring pressing block, an insulating pressing block, a cylinder, a cylinder fixing seat, a wiring terminal head, etc.; the guiding shaft is inserted into the cylinder base, a compression spring is placed in it, and is pressed by the spring pressing block; an insulating pressing block is fixed at the end of the guiding shaft, the insulating pressing block is installed on the guiding shaft, and the front end of the guiding shaft is connected with an extension rod, a connecting block and a tungsten electrode.

[0010] The movable mask device includes a fixed mask, a right movable mask, a left movable mask, an oil-free bushing, a fixed pin, an R-shaped pin, etc.; oil-free bushings are respectively installed in the ear holes of the fixed mask, the right movable mask and the left movable mask, and then fixedly connected through the fixed pin and the R-shaped pin.

[0011] Preferably, clamping blocks and hoops are provided at both ends of the target.

[0012] Preferably, the rotating cylindrical target device is also provided with a motor installation adjustment plate and a motor fixing seat on it.

[0013] Preferably, the rotating cylindrical target device is also provided with an adjustment bolt.

[0014] Preferably, the movable mask device further includes a connecting arc plate, and the connecting arc plate is between the right movable mask and the left movable mask.

[0015] Preferably, the movable mask device further includes a fixed rod, an inlet water hose and an outlet water hose.

[0016] As can be seen from the above description of the technical solution, the present invention has the following advantages:

[0017] Effectively improve the film forming efficiency of coating, improve the utilization rate of the target, realize mass production of large-area products, the coating parameters are controllable, the magnetic circuit and the magnetic conduction baffle are designed, effectively control the area of arc sputtering, and at the same time, the rotational movement of the cylindrical target increases the moving speed of the discharge arc spot, improves the quality of sputtered particles, and provides guarantee for the film forming quality; a coating source system with high film forming rate, high film forming quality, high material utilization rate and comprehensive cost advantage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention.

[0019] Figure 1 It is the front view of a vacuum high-rate deposition rotating cylindrical arc coating source system;

[0020] Figure 2It is a side view of a vacuum high-rate deposition rotating cylindrical arc coating source system;

[0021] Figure 3 It is a main sectional view of a rotating cylindrical target;

[0022] Figure 4 It is a sectional view of a rotating cylindrical target;

[0023] Figure 5 It is a front view of an arc starting device;

[0024] Figure 6 It is a front view of a movable mask device;

[0025] Figure 7 It is a side view of a movable mask device;

[0026] Explanation of reference numerals:

[0027] 1 - Rotating cylindrical target device 101 - Target material 102 - Clamping block 103 - Hoop 104 - Fixed shaft 105 - Fixed pressing block 106 - Adjusting nut seat 107 - Fixed screw 108 - Magnetic conductive plate 109 - Magnetic bar 110 - Connecting bushing 111 - Support block 112 - Rotating connection head one 113 - Rotating connection head two 114 - Driven end head assembly 115 - Driving end head assembly 116 - Motor fixing seat 117 - Motor installation adjusting plate 118 - Belt 119 - Driving pulley 120 - Servo motor 121 - Adjusting bolt;

[0028] 2 - Arc starting device 201 - Tungsten electrode 202 - Connecting block 203 - Extension rod 204 - Main shaft 205 - Anti-plating mask 206 - Pressure plate 207 - Cylinder base 208 - Insulating pad 209 - Guide shaft 210 - Spring pressing block 211 - Insulating pressing block 212 - Cylinder 213 - Cylinder fixing seat 214 - Wiring terminal;

[0029] 3 - Mask device 301 - Fixed mask 302 - Right movable mask 303 - Left movable mask 304 - Connecting arc plate 305 - Fixed rod 306 - Oil-free bushing 307 - Fixed pin 308 - Water inlet hose 309 - Water outlet hose 310 - R-shaped pin;

[0030] 4 - Main body and electric control device;

[0031] 5 - Gas homogenizing device. Detailed implementation manners

[0032] To make the objectives, technical solutions, and advantages of the embodiments of the invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0033] Combined with Figure 1-7 As shown, a vacuum high-rate deposition rotating cylindrical arc coating source system mainly consists of five parts, namely, a rotating cylindrical target device 1, an arc ignition device 2, a mask device 3, a main body and an electric control device 4, a gas homogenizing device 5, etc.

[0034] At both ends of the rotating cylindrical target device 1 are a driven end head assembly 114 and a driving end head assembly 115 respectively. A driving pulley 119 is installed on the output shaft of the servo motor 120 and fixed to the motor installation adjustment plate 117, and then the whole is fixed to the motor fixing seat 116; one end of the belt 118 is connected to the driving pulley 119, and the other end is connected to the driven pulley inside the driving end head assembly 115. The tension of the synchronous belt can be adjusted by the tensioning adjustment bolt 121 to ensure effective and stable transmission.

[0035] The middle part of the rotating cylindrical target device 1 is a magnetic axis and a target 101. The magnetic axis mainly includes a fixed shaft 104, a fixed pressing block 105, an adjusting nut seat 106, a fixed screw 107, a magnetic conduction plate 108, a magnetic rod 109, a connecting shaft sleeve 110, a support block 111, a rotating connection head one 112, and a rotating connection head two 113, etc. The two ends of the fixed shaft 104 are respectively inserted with a rotating connection head one 112 and a rotating connection head two 113, and then the support block 111 is installed and fixed with screws and nuts; the support block 111 is installed in the middle of the fixed shaft 104 and fixed with screws and nuts. A fixed-distance shaft sleeve 124 and a rotating shaft sleeve 110 are installed between the two support blocks 111 and fixed with screws and nuts. The rotating shaft sleeve 110 is designed to reduce the resistance when the target rotates at high speed and play a role in stable support. A plurality of fixed screws 107 are respectively fixed on the magnetic conduction plate 108, and then pass through the fixed shaft 104 and are fixed with the adjusting nut seat 106 and the fixed pressing block 105. When the fixed pressing block 105 is loosened, the adjusting nut seat 106 can be screwed to adjust the center height of the magnetic axis and the rotating shaft, and the magnetic flux parameter can be adjusted and measured by a gauss meter to achieve a better process effect. The magnetic rod 109 is adsorbed to the magnetic conduction plate 108, and the magnetic rod 109 is shielded by a magnetic conduction mask to enhance the magnetic conduction effect. The magnetic axis is designed with two magnetic rods 109, which can form an unbalanced magnetic field. The magnetic field can ensure that the arc spot moves rapidly along the target surface, reduce large particles, and make the target surface ablation uniform, effectively improving the target utilization rate.

[0036] When replacing the target 101, first loosen the clamping collars 103 at both ends and remove the clamping blocks 102. Then loosen the clamping collars in the driven end head assembly 114 and the driving end head assembly 115. Finally, remove the support base in the driven end head assembly 114 and take out the target for replacement. When installing, first insert the magnetic shaft through the middle of the target 101 and press the fluororubber O-rings at both ends. Then install the target 101 together with one end of the magnetic shaft into the driving end head assembly 115 first, and install the support base in the driven end head assembly 114 at the other end. Then tighten the clamping collars in the driven end head assembly 114 and the driving end head assembly 115 to fix the target 101, and install the clamping blocks 102 and the clamping collars 103 at both ends of the target 101 to shield the ends of the target 101 and prevent sputtering from affecting the fixing strength at both ends so that the target can rotate stably and at high speed.

[0037] When the rotating cylindrical target device 1 is working, the magnetic shaft remains fixed. The two ends of the target 101 are clamped by the clamping collars in the driven end head assembly 114 and the driving end head assembly 115. Driven by the servo motor 120, the target 101 rotates at high speed. The continuous rotation of the target 101 can make the ablation of the target 101 uniform and improve the utilization rate of the target 101.

[0038] The arc starting device mainly consists of a tungsten electrode 201, a connecting block 202, an extension rod 203, a main shaft 204, an anti-plating mask 205, a pressing plate 206, a cylinder base 207, an insulating pad 208, a guiding shaft 209, a spring pressing block 210, an insulating pressing block 211, a cylinder 212, a cylinder fixing seat 213, a wiring terminal 214, etc. The guiding shaft 209 is inserted into the cylinder base 207, a compression spring is placed in it, and is pressed by the spring pressing block 210. An insulating pressing block 211 is fixed at the end of the guiding shaft 209, and the guiding shaft 209 is installed on the insulating pressing block 211, so as to ensure that the guiding shaft 209 can only move but not rotate in the cylinder base 207. The front end of the guiding shaft 209 is connected with an extension rod 203, a connecting block 202, and a tungsten electrode 201. The tungsten electrode 201 is a consumable, and the connecting block 202 is designed to facilitate the replacement of the tungsten electrode. When the arc starting device works, the wiring terminal 214 is grounded. The initial state of the cylinder 212 is extended, and the end face of the cylinder 212 abuts against the insulating pressing block 211 to drive the guiding shaft 209 with the insulating pressing block 211 to extend out, and the tungsten electrode 201 is far away from the target 101 and has no contact with the target 101. At this time, the compression spring between the guiding shaft 209 and the cylinder base 207 is in a compressed state. When receiving the arc starting signal, the cylinder 212 acts to retract. At this time, the guiding shaft 209 also retracts under the drive of the spring compression force, driving the tungsten electrode 201 to touch the target. Driving the tungsten electrode 201 to touch the target 101 by the spring compression force can ensure the impact force on the target during arc starting. At the same time, the cylinder 212 retracts faster than the tungsten electrode 201 touches the target 101, and the cylinder 212 retracts faster than the spring deformation recovers, which can ensure that the cylinder 212 makes a forward ejection waiting in advance before the tungsten 201 electrode contacts the target 101, improving the response speed, avoiding the arc starting contact time being too long, reducing the over-erosion and the service life of the tungsten electrode 201, and being able to eject faster to make the tungsten electrode 201 instantaneously separate from the target 101. After the tungsten electrode 201 contacts the target 201 and then instantaneously separates, the relative position of the target 101 remains unchanged. The arc starting device 2 drives the end tungsten electrode 201 to move away from or contact the target 101, so as to achieve a better arc starting effect. When the arc light discharge is ignited, the arc starting device 2 automatically cuts off (if the arc light discharge is not ignited, the arc starting device repeats the action), and the arc power supply maintains the stable discharge between the cathode arc source and the coating chamber.

[0039] The movable mask device includes a fixed mask 301, a right movable mask 302, a left movable mask 303, a connecting arc plate 304, a fixed rod 305, an oil-free bushing 306, a fixed pin 307, a water inlet hose 308, a water outlet hose 309, an R-shaped pin 310, etc. Oil-free bushings 306 are respectively installed on the connecting ear holes of the fixed mask 301, the right movable mask 302, and the left movable mask 303, and then fixedly connected through the fixed pin 307 and the R-shaped pin 310. The masks are movable relative to each other. When disassembling and assembling the whole, the two side movable plates can be fixed through the fixed rod 305 first, and the whole mask is relatively fixed for easy disassembly, replacement. The connecting arc plate 304 is located between the right movable mask 302 and the left movable mask 303 and is movably connected, which is convenient for replacement and fixation; in practical applications, the right movable mask 302 and the left movable mask 303 can be replaced according to the size of the working coating surface, and the unobstructed part can be 180 degrees or 120 degrees or 90 degrees, improving the equipment compatibility. A water path communicating with each other is arranged between the masks. During coating, cooling water flows in through the water inlet hose 308 and flows out through the water outlet hose 309 to cool the masks and reduce the influence of temperature rise on the target 101.

[0040] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum high-rate deposition rotating cylindrical arc coating source system, characterized in that: It includes a rotating cylindrical target device, an arc ignition device, a movable mask device, a main body, an electric control device and a gas homogenizing device; The rotating cylindrical target device includes a magnetic axis and a target in the middle, a driven end component and a driving end component respectively located at both ends, and a servo motor; a driving pulley is installed on the output shaft of the servo motor, and the driving pulley is connected to a driven pulley inside the driving end component through a belt; The magnetic axis includes a fixed shaft, a fixed pressing block, an adjusting nut seat, a fixed screw, a magnetic conductive plate, a magnetic rod, a connecting bushing, a support block, a rotating connector I, a rotating connector II and a magnetic conductive mask; both ends of the fixed shaft are respectively connected to the rotating connector I and the rotating connector II; a support block is installed in the middle of the fixed shaft and fixed with a screw and a nut, and a fixed distance bushing and a rotating bushing are installed in the middle of the two support blocks and fixed with a screw and a nut; a plurality of fixed screws are respectively fixed on the magnetic conductive plate, then pass through the fixed shaft and are fixed through the adjusting nut seat and the fixed pressing block; the magnetic rod is adsorbed on the magnetic conductive plate and covered by the magnetic conductive mask; The arc ignition device includes a tungsten electrode, a connecting block, an extension rod, a main shaft, an anti-plating mask, a pressing plate, a cylinder seat, an insulating pad, a guide shaft, a spring pressing block, an insulating pressing block, a cylinder, a cylinder fixing seat and a wiring terminal; the guide shaft is installed in the cylinder seat, a compression spring is placed and pressed by the spring pressing block; an insulating pressing block is fixed at the end of the guide shaft, the insulating pressing block is installed on the guide shaft, and the front end of the guide shaft is connected with an extension rod, a connecting block and a tungsten electrode; The movable mask device includes a fixed mask, a right movable mask, a left movable mask, an oil-free bushing, a fixed bolt and an R-shaped pin; oil-free bushings are respectively installed on the connecting ear holes of the fixed mask, the right movable mask and the left movable mask, and then fixed and connected through the fixed bolt and the R-shaped pin.

2. The vacuum high-rate deposition rotating cylindrical arc coating source system according to claim 1, characterized in that: Both ends of the target are provided with clamping blocks and hoop.

3. The vacuum high-rate deposition rotating cylindrical arc coating source system according to claim 1, characterized in that: The rotating cylindrical target device is also provided with an upper motor installation adjustment plate and a motor fixing seat.

4. The vacuum high-rate deposition rotating cylindrical arc coating source system according to claim 1, characterized in that: The rotating cylindrical target device is also provided with an adjusting bolt.

5. The vacuum high-rate deposition rotating cylindrical arc coating source system according to claim 1, characterized in that: The movable mask device also includes a connecting arc plate, and the connecting arc plate is between the right movable mask and the left movable mask.

6. The vacuum high-rate deposition rotating cylindrical arc coating source system according to claim 1, characterized in that: The movable mask device also includes a fixed rod, a water inlet hose and a water outlet hose.

Images