Online detection and thickness control device based on vacuum coating

Abstract

The present invention provides a vacuum coating-based online detection motor thickness control device, comprising a drive plate located inside a housing and a plurality of thickness control components arranged side by side, wherein the thickness control components include a linear motor, a connecting rod, a connecting block, and a correction plate connected in sequence, wherein the drive plate controls the correction plate to approach or move away from the ion membrane emission column through the linear motor, and the connecting rod passes through the front panel of the housing, and a position locking mechanism is provided at the connecting rod. An external PC terminal sends instructions to the drive plate, outputs a signal to control the linear motor, and then drives the connecting rod, the connecting block, and the correction plate to perform linear motion, which can accurately control the gap between the front end of the correction plate and the ion membrane emission column, thereby controlling the concentration of the ion membrane magnetic sputtering and controlling the thickness of the coating layer. The present invention can realize online control of vacuum coating thickness, and can also realize thickness-variable coating, is easy to promote and apply, and has great practical value.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical automation, and in particular to an online thickness control device based on vacuum coating. Background Art

[0002] In a magnetic sputtering vacuum coating machine, a correction plate plays a crucial role in regulating sputtering uniformity and controlling key process parameters such as workpiece coating thickness. However, the position of each correction plate requires manual adjustment, significantly reducing the efficiency of the coating machine. Each furnace start-up and shutdown results in waste during the coating process. By adjusting the gap between the correction plate and the magnetic sputtering ion membrane emitter, the ion concentration passing through the membrane is altered, controlling the coating thickness. Traditionally, the correction plate is connected to the vacuum coating equipment via screws and a U-shaped groove. This process requires removing the vacuum environment, removing the coating material, and manually adjusting the correction plate displacement at each point based on the coating thickness measurement to control the coating thickness consistency. Existing technologies require manual control of the correction plate displacement, resulting in lost work time and frequent repetition due to manual adjustment errors. Furthermore, each repetition requires creating and removing the vacuum environment, resulting in low reliability, a long time consumption, and high costs. Summary of the Invention

[0003] The present application provides an online thickness control device for vacuum coating, which can realize online control of vacuum coating thickness and also realize thickness-variable coating. In view of the above problems, the present application provides an online thickness control device for vacuum coating.

[0004] A thickness control device based on online detection of vacuum coating includes a drive plate located inside an outer shell and multiple thickness control components arranged side by side. The thickness control components include a linear motor, a connecting rod, a connecting block and a correction plate connected in sequence. The drive plate controls the correction plate to approach or move away from the ion membrane emission column through the linear motor. The connecting rod passes through the front panel of the outer shell and is provided with a position locking mechanism.

[0005] The linear motor is fixed in the housing via a motor base.

[0006] The position locking mechanism includes a fixed seat, a cam, a pressure plate, a support rod and a spring. A linear motor is arranged in the fixed seat, and the front end of the linear motor is fixedly connected to the cam. The upper side of the pressure plate is provided with a slide that cooperates with the cam. A plurality of semicircular grooves that cooperate with the connecting rod are provided below the pressure plate. Openings that pass through the support rod are provided on both sides of the pressure plate. The other end of the support rod is fixed inside the shell. A spring is provided on the support rod. The distance between the pressure plate and the connecting rod is controlled by the spring and the cam.

[0007] Soft silica gel is arranged in the groove of the pressing plate.

[0008] The connecting rod is also provided with a limiting device, which includes a limiting strip fixed on the front panel. The cylindrical surface of the connecting rod is provided with a planar groove, and the limiting strip is located at the notch of the planar groove. The length of the notch is the safe displacement distance of the motor.

[0009] The front end of the connecting rod is fixedly connected to the connecting block through a bolt, and the front end of the connecting block is fixedly connected to the correction plate through a double thread.

[0010] The portion of the connecting rod located outside the shell is additionally provided with a high-temperature resistant rubber telescopic protective cover.

[0011] A cooling box is arranged outside the linear motor, and the surface of the shell is covered with heat-insulating aluminum foil paper to prevent heat radiation.

[0012] The number of the thickness control components arranged side by side is 6 to 10.

[0013] Among the multiple thickness control components arranged side by side, the linear motor of the thickness control component can be controlled as a whole by the driving plate to adjust the gap width between the correction plate and the ion membrane emission column; the linear motor of a single thickness control component can also be adjusted individually, and the linear motors of multiple thickness control components can be controlled to achieve different positions of multiple correction plates.

[0014] The online detection and thickness control device based on vacuum coating provided in this application has a simple structure, is easy to operate, saves labor and time, has high reliability, and has low cost. In addition, the micro motor has strong adaptability and is less affected by environmental factors. It can not only realize online control of vacuum coating thickness, but also realize thickness-variable coating. It is easy to promote and apply and has great practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a diagram of an application scenario of the vacuum coating online thickness control device provided by an embodiment of the present invention;

[0016] Figure 2 A three-dimensional diagram of an online thickness control device for vacuum coating provided by an embodiment of the present invention;

[0017] Figure 3 A top view of an online thickness control device for vacuum coating provided by an embodiment of the present invention;

[0018] Figure 4 A schematic diagram of the working of the device for online detection and thickness control of vacuum coating provided by an embodiment of the present invention;

[0019] Figure 5 This is a schematic diagram of the location of the cooling box;

[0020] Figure 6 is a side schematic diagram of the position locking mechanism;

[0021] Description of reference numerals:

[0022] 1-Drive board; 2-Communication line; 3-Motor; 4-Connecting rod; 5-Connecting block; 6-Correction plate; 7-Support frame; 8-Ion membrane emission column; 9-Cooling box; 10-Coated workpiece; 11-Vacuum chamber; 12-Coated workpiece rack; 13-Position locking mechanism; 14-Fixed seat; 15-Cam; 16-Pressing plate; 17-Front panel; 18-Protective cover; 19-Spring; 20-Notch DETAILED DESCRIPTION

[0023] like Figure 1 As shown, a coating workpiece rack 12 and an ion membrane emitter column 8 are installed inside the vacuum chamber 11. The coating workpiece rack 12 is used to fix and support the coating workpiece 10. The ion membrane emitter column 8 performs magnetic sputtering on the coating workpiece 10. An online detection and thickness control device based on vacuum coating is installed between the two. The online detection and thickness control device based on vacuum coating is fixed inside the vacuum chamber 11 via a support frame 7.

[0024] The device for online detection and thickness control based on vacuum coating comprises a shell and a Figure 2 and Figure 3 The drive plate 1 and thickness control assembly shown. The shell is composed of a module shell, a front panel 17 and a rear panel. The front and rear sides of the module shell are sealed by the front panel 17 and the rear panel respectively. The shell is made of aviation-grade aluminum alloy, which has the characteristics of high strength and light weight, and has the function of electromagnetic shielding. It can not only be used independently, but also multiple thickness control devices can be spliced ​​together by installing connectors inside. The thickness control assembly includes a motor 3, a connecting rod 4, a connecting block 5 and a correction plate 6 connected in sequence. The connecting rod 4 passes through the front panel 17. The drive plate 1 is used to drive multiple groups of thickness control assemblies through the communication line 2. In this embodiment, the thickness control assembly is provided with eight groups. The drive plate 1 adopts an eight-axis drive plate, which is located above the eight groups of thickness control assemblies. The communication line 2 is connected to the motor 3.

[0025] The motor 3 is a linear motor and is fixed on the motor base. The linear motor has excellent characteristics such as small size, light weight, large thrust, and rapid response. It can still work stably in a vacuum environment; the motor base adopts an integrated overall processing and can be directly integrated and installed with the internal components of the motor, saving the manufacturing cost of the linear motor and also reducing the customer's procurement cost.

[0026] like Figure 4 and Figure 5 As shown, multiple thickness control components are arranged side by side, and a position locking mechanism 13 is provided at the connecting rod 4. The function of the position locking mechanism 13 is to lock and limit the set correction plate 6 so that it no longer moves. Figure 6 As shown, the position locking mechanism 13 comprises a fixed base 14, a cam 15, and a pressure plate 16. A linear motor is housed within the fixed base 14, with the cam 15 located at its front end. A ramp is positioned above the pressure plate 16, and a plurality of semicircular grooves are positioned below the pressure plate 16 to mate with the connecting rod 4. The cam 15 and the ramp on the upper side of the pressure plate 16 interact with each other. The linear motor propels the cam 15 in the direction of the ramp. As the cam 15 moves, the ramp moves downward, in turn driving the pressure plate 16 downward. Through the transmission process of the cam 15 contacting the ramp, the position locking mechanism 13 causes the pressure plate 16 with the semicircular groove to move downward, firmly pressing against the connecting rod 4 connected to the correction plate 6. The grooves of the pressure plate 16 are filled with soft silicone, significantly enhancing the frictional force of the clamping force. This mechanism is compact and reliable in operation. The degree of clamping force can be adjusted according to the travel of the cam 15 and can be integrated into the drive plate 1 for control. Furthermore, openings are provided on both sides of the pressure plate 16, and a support rod is passed through the openings. The other end of the support rod is fixed inside the shell. A spring 19 is provided on the support rod to provide an upward force for the pressure plate 16. When the cam 15 moves, the elastic force of the spring is overcome, causing the pressure plate 16 to move downward. When the linear motor extends and retracts, driving the cam 15 away from the landslide direction, the pressure plate 16 moves upward under the action of the spring.

[0027] The displacement of the motor 3 cannot exceed its maximum displacement distance, so a safe displacement distance must be determined for the motor 3. The limiting device includes a limiting strip 21 fixed on the front panel 17. The cylindrical surface of the connecting rod 4 is provided with a plane groove 20. The length of the groove is the maximum safe displacement distance of the motor 3. The limiting strip 21 is placed in this plane groove 20 to play a limiting role. Since the connecting rod 4 and the limiting strip 21 are in plane contact, the rotational movement of the connecting rod 4 is also limited and can only move in a straight line. The limiting device prevents the motor 3 from exceeding the safe range of movement and serves the purpose of protecting the motor. The front end of the connecting rod 4 is fixedly connected to the connecting block 5 by a bolt, and the front end of the connecting block 5 is fixedly connected to the correction plate 6 by a double thread.

[0028] Because the correcting plate 6 operates within the vacuum, high-temperature environment of the coating machine, protective measures are essential. The outer shell of the vacuum coating online thickness detection and control device is covered with heat-insulating aluminum foil to effectively isolate the external high temperature and ensure normal operation of the internal components. Furthermore, to prevent corrosion and contamination of the connecting rod 4 exposed to the vacuum magnetic sputtering environment, a high-temperature-resistant rubber telescopic protective cover 18 is installed on the exposed portion of the connecting rod 4 outside the front panel 17, effectively protecting the connecting rod 4 and extending the service life of the unit module.

[0029] In a certain embodiment, the eight-axis drive board 1 is connected to the communication line 2, and the communication line 2 is used to connect the linear motor 3. The front end of the linear motor 3 is provided with a hole, and the correction plate 6 is connected to the front end of the linear motor 3 through the connecting block 5 and the connecting rod 4. The external PC end of the vacuum chamber 11 sends instructions to the drive board 1, and the output signal of the drive board 1 reaches the control linear motor 3. The linear motor 3 drives the connecting rod 4, the connecting block 5, and the correction plate 6 to achieve linear motion, and accurately controls the gap between the front end of the correction plate 6 and the ion membrane emission column 8, thereby controlling the concentration of the ion membrane magnetic sputtering and controlling the thickness of the coating layer. The present invention realizes motor control in a vacuum environment through an electronic control system, causes the correction plate to be displaced, and controls the gap width between the correction plate 6 and the ion membrane emission column 8 to control the concentration of the ion membrane magnetic sputtering and control the thickness of the coating layer.

[0030] Furthermore, because this embodiment operates in a high-temperature environment, where the temperature of the high-temperature coating environment can reach 300°C, a cooling box 9 can be installed inside the housing. The cooling box 9 can be directly connected to the cooling system of the vacuum coating equipment, wrapping the linear motor 3 to protect the motor from failure in a high-temperature environment. In addition, the drive plate 1 is placed on the rear side of the cooling box 9, effectively achieving physical cooling and avoiding sputtering contamination of the ion membrane. The connecting rod 4 is provided at the top of the motor 3 and the connecting block 5 by means of a threaded connection. The connecting block 5 and the correction plate 6 are connected by a double threaded connection. All connections are well-secured, and force transmission between the motor 3 and the correction plate 6 can be effectively achieved.

[0031] This embodiment adopts the integrated control application of linear motors, which are small in size and large in number, and can adapt to the online control operation of the special environment of vacuum coating. It can not only control the linear motor as a whole and adjust the gap width between the correction plate 6 and the ion membrane emission column 8, but also can adjust the corresponding point single motor online according to the coating thickness feedback from each point of the coating layer, control the concentration of the ion membrane magnetic sputtering passing through here, correct the coating thickness here, and make the coating thickness uniform; it can also control multiple motors 3 to achieve different positions of multiple correction plates 6, so that the gap width between the correction plate 6 and the ion membrane emission column 8 can achieve a changing effect, thereby realizing a change in the thickness of the coating layer.

[0032] The present invention provides an online detection and thickness control device based on vacuum coating. As a control unit module of the correction plate, it adopts an integrated modular design of micro linear motors and can be composed of several (6-10) micro motors. Each motor can be freely spliced ​​and seamlessly connected according to the actual space of the coating machine. It can locate and lock the adjustment position of the correction plate in real time, and has thermal insulation protection and magnetic sputtering corrosion pollution protection. The motor adopts multi-axis control drive, and the displacement and speed of the motor can be programmably controlled. It can realize remote control and intelligent adjustment of the position of the correction plate through external communication. This module greatly liberates the manual labor, improves the working efficiency of the correction plate, and plays a key role in energy saving and efficiency improvement in the vacuum coating industry.

[0033] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A device for online detection and thickness control of vacuum coating, characterized by: The cam is fixed to the front of the housing and a position locking mechanism is arranged at the connecting rod; the position locking mechanism comprises a fixed seat, a cam, a pressure plate, a support rod and a spring; a linear motor is arranged in the fixed seat, a cam is fixedly connected to the front end of the linear motor, a slide matched with the cam is arranged on the upper side of the pressure plate, and a plurality of semicircular grooves matched with the connecting rod are arranged below the pressure plate; openings passing through the support rod are arranged on both sides of the pressure plate, and the other end of the support rod is fixed to the inside of the housing; a spring is arranged on the support rod, and the distance between the pressure plate and the connecting rod is controlled by the spring and the cam.

2. The device for online detection and thickness control of vacuum coating according to claim 1, characterized in that: The linear motor is fixed in the housing via a motor base.

3. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: Soft silica gel is arranged in the groove of the pressing plate.

4. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: The connecting rod is also provided with a limiting device, which includes a limiting strip fixed on the front panel. The cylindrical surface of the connecting rod is provided with a planar groove, and the limiting strip is located at the notch of the planar groove. The length of the notch is the safe displacement distance of the motor.

5. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: The front end of the connecting rod is fixedly connected to the connecting block through a bolt, and the front end of the connecting block is fixedly connected to the correction plate through a double thread.

6. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: The portion of the connecting rod located outside the shell is additionally provided with a high-temperature resistant rubber telescopic protective cover.

7. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: A cooling box is arranged outside the linear motor, and the surface of the shell is covered with heat-insulating aluminum foil paper to prevent heat radiation.

8. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: The number of the thickness control components arranged side by side is 6 to 10.

9. The device for online thickness control based on vacuum coating according to claim 1, characterized in that: Among the multiple thickness control components arranged side by side, the linear motor of the thickness control component can be controlled as a whole by the driving plate to adjust the gap width between the correction plate and the ion membrane emission column; the linear motor of a single thickness control component can also be adjusted individually, and the linear motors of multiple thickness control components can be controlled to achieve different positions of multiple correction plates.

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