Composite electrode layer, method for preparing the same, and perovskite cell

Abstract

This invention relates to the field of perovskite solar cell technology, specifically to a composite electrode layer, its preparation method, and a perovskite solar cell. The composite electrode layer of this invention includes a fluid-conducting layer and a transparent conductive layer. The fluid-conducting layer is located on one side surface of a glass substrate, and the transparent conductive layer covers both the fluid-conducting layer and the surface of the glass substrate. The fluid-conducting layer includes multiple arrayed metal wires. Along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for the P1 channel of the perovskite solar cell. In the direction perpendicular to the length of the metal wires, the metal wires are spaced apart and form multiple carrier concentration and conduction regions on the transparent conductive layer. The composite electrode layer of this invention can be firmly fixed to the surface of the glass substrate, reducing the thickness of the transparent conductive layer, increasing the transmittance of the film layer, reducing the sheet resistance of the cell, and further improving the conversion efficiency of the perovskite solar cell.

Description

Technical Field

[0001] This invention relates to the field of perovskite battery technology, and more specifically, to a composite electrode layer, its preparation method, and a perovskite battery. Background Technology

[0002] Perovskite solar cells are solar cells that utilize perovskite-type organometal halide semiconductors as light-absorbing materials. In recent years, the highest photoelectric conversion efficiency of perovskite solar cells has increased from 3.8% to 25.7%. This photoelectric conversion efficiency not only surpasses that of other earlier-developed thin-film solar cells, but has also approached or even exceeded that of industrialized solar cell technologies such as polycrystalline silicon solar cells, which have been developed for many years, demonstrating enormous potential for industrial development.

[0003] Perovskite solar cells generally consist of a front electrode, a first carrier transport layer, a perovskite light-absorbing layer, a second carrier transport layer, and a back electrode. For the fabrication of the front electrode, the traditional process involves depositing a thick FTO film on a glass substrate using energy-intensive vacuum deposition equipment such as CVD or PVD. The FTO film has a very high surface resistivity compared to metal electrodes, requiring a thicker film to reduce this, which in turn reduces transmittance. Currently, the transmittance of FTO films is only around 80%, and the surface resistivity is around 10Ω, significantly impacting the conversion efficiency of perovskite solar cells.

[0004] In view of this, the present invention is hereby proposed. Summary of the Invention

[0005] One objective of this invention is to provide a composite electrode layer that, through the combination of a fluid-conducting layer and a transparent conductive layer, can effectively reduce sheet resistance, increase the transmittance of the film layer, and improve the conversion efficiency of perovskite solar cells.

[0006] Another objective of this invention is to provide a method for preparing the composite electrode layer, which is highly efficient and safe, thereby improving the preparation accuracy and performance of the composite electrode layer.

[0007] Another object of the present invention is to provide a perovskite battery with excellent electrochemical performance.

[0008] In order to achieve the above-mentioned objectives of the present invention, the following technical solution is adopted:

[0009] A composite electrode layer includes a fluid-conducting layer and a transparent conductive layer; the fluid-conducting layer is located on one side surface of a glass substrate, and the transparent conductive layer covers the surfaces of the fluid-conducting layer and the glass substrate; the fluid-conducting layer includes multiple metal wires arranged in an array, and along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for a P1 channel of a perovskite solar cell; in the length direction perpendicular to the metal wires, the metal wires are spaced apart and form multiple carrier concentration and conduction regions on the transparent conductive layer.

[0010] In one embodiment, the shielding area of ​​the fluid guiding layer on the surface of the glass substrate accounts for 2% to 3% of the area of ​​the glass substrate.

[0011] In one embodiment, the thickness of the metal wire is 50 nm to 200 nm.

[0012] In one embodiment, the thickness of the transparent conductive layer is 300 nm to 500 nm.

[0013] In one embodiment, the distance between two adjacent metal wires along the width direction of the metal wire is 2 to 5 mm.

[0014] In one embodiment, the material of the metal wire includes a composite containing a conductive phase, a composite of metal and conductive inorganic matter, a metal element, or an alloy; by mass percentage, the composite containing a conductive phase includes 20% to 50% conductive phase and 50% to 80% binder phase.

[0015] In one embodiment, the metal wire is a composite material containing a conductive phase, the conductive phase including at least one of aluminum, aluminum alloy, silver-molybdenum alloy and silver-nickel alloy; the binder includes at least one of ceramic, glass, resin and cellulose.

[0016] In one embodiment, the transparent conductive layer has a P1 channel located within the accommodating region.

[0017] The method for preparing the composite electrode layer includes the following steps:

[0018] Metal wires are deposited on a glass substrate by vapor deposition or printing to form a fluid-conducting layer; then a transparent conductive material is deposited on the surface of the fluid-conducting layer and the surface of the glass substrate to form a transparent conductive layer.

[0019] In one embodiment, the fluid-conducting layer is prepared on a glass substrate by the vapor deposition method, specifically including: placing a glass substrate on a substrate holder loaded with a metal mask, the glass substrate being above the metal mask, and placing a magnetic plate above the glass substrate to obtain an assembly; the assembly is transferred to a vapor deposition process chamber, where a vapor deposition device evaporates metal wires, the metal wires are deposited on the lower surface of the glass substrate, and after solidification, a fluid-conducting layer is formed.

[0020] In one embodiment, before vapor deposition, the vacuum level of the vapor deposition chamber is controlled to be 10. -3 ~10 -5 mbar, the metal wire supply speed is 20-30 mm / s; the glass substrate is transported at a speed of 35-45 mm / s in the vapor deposition process chamber.

[0021] In one embodiment, the vapor deposition equipment used to prepare a fluid-conducting layer on a glass substrate by the vapor deposition method includes an evaporation system, a transmission system, a vacuum system, and an auxiliary automatic line system. The evaporation system includes a process chamber, in which an evaporation device is disposed for depositing metal wire raw material on the glass substrate to obtain a fluid-conducting layer. The vacuum system includes a first vacuum chamber and a second vacuum chamber to provide different vacuum levels to enhance the transmission of the substrate carrier. The first vacuum chamber is connected to the inlet of the process chamber, and the second vacuum chamber is connected to the outlet of the process chamber. The first vacuum chamber contains a plurality of secondary chambers with progressively increasing vacuum levels in the conveying direction, and the second vacuum chamber contains a plurality of secondary chambers with progressively decreasing vacuum levels in the conveying direction. The first and second vacuum chambers provide different vacuum levels for continuous transmission of the substrate carrier in a vacuum environment. The transmission system connects the first vacuum chamber and the second vacuum chamber to form a circulating transport loop for the substrate carrier.

[0022] In one embodiment, the evaporation device includes a support base, a metal wire reel, a feeding motor, an evaporation boat, a cooling system, a baffle, and a heating electrode; the support base supports the entire evaporation device, the metal wire reel stores metal wire, the feeding motor controls the feeding of metal wire to the evaporation boat, the evaporation boat receives the metal wire, the heating electrode heats the evaporation boat, the cooling system cools the evaporation device, and the baffle prevents the evaporated metal wire from contaminating the equipment.

[0023] In one embodiment, along the feed end direction of the process chamber, the first vacuum chamber sequentially includes a first transition chamber, a first transfer chamber, and a first buffer chamber; and along the discharge end direction of the process chamber, the second vacuum chamber sequentially includes a second buffer chamber, a second transfer chamber, and a second transition chamber.

[0024] In one embodiment, the transmission system includes a return system, a transfer system, and a substrate holder maintenance system. The return system is used for the return of the substrate holder and the metal mask, the transfer system is used for the connection of the magnetic plate and the substrate holder, and the substrate holder maintenance system is used for the loading and unloading of the substrate holder.

[0025] In one embodiment, the transmission system is connected to a loading platform, which is located near the inlet of the first vacuum chamber for providing a glass substrate; the transmission system is also connected to a unloading system for receiving the glass substrate after the composite electrode layer has been prepared.

[0026] In one embodiment, the auxiliary automated line system includes an electrical cabinet, a pre-pump assembly, and a dry pump assembly.

[0027] In one embodiment, a fluid-conducting layer is prepared on a glass substrate by printing. The specific method includes: spraying a coating onto the glass substrate using a printing device to form a coating layer, followed by curing to form the fluid-conducting layer; the distance between the inkjet head of the printing device and the glass substrate is 30–200 μm, the spray gap is 2–5 mm, and the moving speed of the inkjet head is 0.2–2 m / s; the curing temperature is 200–500 °C, and the curing time is 10–20 min.

[0028] In one embodiment, the printing equipment used in the printing method includes a feeding area, a process area, and an output area arranged sequentially. The process area is internally equipped with a positioning system, a liquid supply system, a spraying system, and a transmission system. The positioning system is used to position the glass substrate. The spraying system includes a spraying device, which includes a support column and multiple inkjet heads. The support column is internally equipped with a solution channel and a liquid injection port. The liquid supply system is used to provide spraying liquid to the spraying system.

[0029] In one embodiment, the liquid supply system includes a raw material storage device, a transfer storage device, a liquid injection pump, a filter, and an exhaust filtration module; the exhaust filtration module is disposed between the raw material storage device and the transfer storage device; the transfer storage device is connected to the spraying device through the liquid injection pump and the filter.

[0030] In one embodiment, the preparation conditions of the transparent conductive layer specifically include: the evaporation temperature of the transparent conductive layer material is 45-60°C, the evaporation time is 4.5-6.5h, the temperature of the glass substrate is 600-700°C, and the vacuum degree is 0.1-10mbar.

[0031] A perovskite solar cell includes the aforementioned composite front electrode, or a composite electrode layer prepared by the aforementioned method for preparing the composite electrode layer.

[0032] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0033] (1) The present invention combines a fluid-conducting layer and a transparent conductive layer to form a composite electrode layer, which can be firmly fixed on the surface of a glass substrate. It does not affect the subsequent preparation of the film layer and the laser line marking, and can effectively reduce the thickness of the transparent conductive layer and improve the transmittance of the film layer. At the same time, due to the excellent conductivity of the fluid-conducting layer, although the transparent conductive layer is thinned, the sheet resistance of the battery is reduced by the auxiliary conductivity of the fluid-conducting layer, which can further improve the conversion efficiency of the perovskite battery.

[0034] (2) The method for preparing the composite electrode layer of the present invention is highly efficient, safe, and produces a high-quality composite electrode layer, which is beneficial to improving the electrochemical performance of perovskite batteries.

[0035] (3) The perovskite solar cell of the present invention has improved light transmittance and overall gain. Attached Figure Description

[0036] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the composite electrode layer of the present invention;

[0038] Figure 2 This is a schematic diagram of the current movement direction of the composite electrode layer of the present invention;

[0039] Figure 3 This is a schematic diagram of the perovskite solar cell of the present invention;

[0040] Figure 4 This is a schematic diagram of the vapor deposition equipment of the present invention;

[0041] Figure 5 This is a schematic diagram of the evaporation system of the present invention;

[0042] Figure 6 This is a schematic diagram of the substrate holder structure of the present invention;

[0043] Figure 7 This is a schematic diagram of the structure of the metal mask plate of the present invention;

[0044] Figure 8 This is a schematic diagram of the magnetic plate of the present invention;

[0045] Figure 9This is a process flow diagram of vapor deposition using a photomask in this invention;

[0046] Figure 10 This is a schematic diagram of the printing equipment of the present invention;

[0047] Figure 11 This is a schematic diagram of the spraying device of the present invention.

[0048] Figure label:

[0049] 100-Glass substrate, 200-Fluorescent layer, 300-Transparent conductive layer, 400-Charge transport layer, 500-Perovskite power generation layer, 600-Electron transport layer, 700-Back electrode; 800-P1 channel, 900-P2 channel, 1000-P3 channel.

[0050] 1-Span ladder, 2-Return transmission system, 3-Substrate holder maintenance system, 4-Transfer system, 5-Feeding platform, 6-First transition chamber, 7-First transfer chamber, 8-First buffer chamber, 9-Process chamber, 10-Electrical cabinet, 11-Pre-pump unit, 12-Dry pump unit, 13-Second buffer chamber, 14-Second transfer chamber, 15-Second transition chamber; 16-Substrate holder, 17-Unloading system, 18-Positioning device, 19-Metal mask plate, 20-Magnetic plate; 21-Feeding area, 22-Process area, 23-Spraying device, 24-Positioning system, 25-Discharge area, 26-Equipment electrical cabinet, 27-Filter, 28-Injection pump, 29-Raw material storage device, 30-Transfer storage device, 31-Exhaust filter module, 32-Bearing column, 33-Linear motor, 34-Injection port;

[0051] 901-Metal wire reel, 902-Feeding motor, 903-Metal wire, 904-Evaporation boat, 905-Support base, 906-Cooling system, 907-Baffle, 908-Heating electrode. Detailed Implementation

[0052] The embodiments of the present invention will be described in detail below with reference to examples. However, those skilled in the art will understand that the following examples are for illustrative purposes only and should not be considered as limiting the scope of the invention. Unless otherwise specified in the examples, conventional conditions or conditions recommended by the manufacturer are followed. Reagents or instruments whose manufacturers are not specified are all commercially available conventional products.

[0053] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0054] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] According to one aspect of the present invention, the present invention relates to a composite electrode layer comprising a fluid-conducting layer and a transparent conductive layer; the fluid-conducting layer is located on one side surface of a glass substrate, and the transparent conductive layer covers the surfaces of the fluid-conducting layer and the glass substrate; the fluid-conducting layer comprises a plurality of metal wires arranged in an array, and along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for a P1 channel of a perovskite solar cell; in the length direction perpendicular to the metal wires, the plurality of metal wires are spaced apart and form a plurality of carrier concentration guiding regions on the transparent conductive layer, that is, each strip-shaped sub-cell cell contains a plurality of carrier concentration guiding regions spaced apart along the P1 length direction, and each carrier concentration guiding region is concentrated and guided by the metal wire segments in the region, and the carrier flow velocity in each region of each concentration guiding region is similar, avoiding the phenomenon of obvious regional intervals with different carrier flow velocities along the length direction of the cell cell.

[0056] This invention combines a fluid-conducting layer and a transparent conductive layer to form a composite electrode layer. This does not affect the subsequent film preparation and laser line marking, and can effectively reduce the thickness of the transparent conductive layer and improve the transmittance of the film. At the same time, due to the excellent conductivity of the fluid-conducting layer, although the transparent conductive layer is thinned, the sheet resistance of the battery is reduced by the auxiliary conductivity of the fluid-conducting layer, which can further improve the conversion efficiency of the perovskite battery.

[0057] In one embodiment, the shielding area of ​​the fluid-conducting layer on the surface of the glass substrate accounts for 2% to 3% of the area of ​​the glass substrate, such as 2%, 2.1%, 2.2%, 2.5%, 2.6%, 2.7%, 2.8%, 2.9%, or 3%. In one embodiment, the thickness of the metal wire is 50nm to 200nm, such as 50nm, 60nm, 70nm, 100nm, 120nm, 150nm, or 200nm. In one embodiment, the thickness of the transparent conductive layer is 300nm to 500nm, such as 300nm, 320nm, 350nm, 380nm, 400nm, 420nm, 450nm, 470nm, or 500nm.

[0058] In one embodiment, the distance between two adjacent metal wires along the width direction of the metal wire is 2 to 5 mm, such as 2 mm, 2.4 mm, 3 mm, 3.5 mm, 4 mm, 4.5 mm or 5 mm.

[0059] In one embodiment, the transparent conductive layer is provided with a P1 channel, which is located within the accommodating area.

[0060] In one embodiment, the material of the metal wire includes a composite containing a conductive phase, a composite of a metal and a conductive inorganic substance, a metal element, or an alloy; by mass percentage, the composite containing the conductive phase includes 20% to 50% conductive phase and 50% to 80% binder phase. In one embodiment, by mass percentage, the conductive phase is 20%, 25%, 30%, 35%, 40%, or 50%, etc., and the binder phase is 50%, 55%, 60%, 65%, 70%, 75%, or 80%, etc. The metallic element includes aluminum, silver, or molybdenum, and the alloy can be an alloy of at least two of aluminum, silver, and molybdenum; the conductive inorganic material includes graphene; in one embodiment, the metal wire is a composite containing a conductive phase, the conductive phase including at least one of aluminum, aluminum alloy, silver-molybdenum alloy, and silver-nickel alloy; in one embodiment, the aluminum powder includes flake aluminum powder and / or spherical aluminum powder, and in one embodiment, the aluminum powder is nano-aluminum powder; in one embodiment, the binder includes at least one of ceramics, glass, resin, oxide crystals, and cellulose, wherein the glass includes at least one of lead glass, borate, bismuthate, and zinc glass, and the resin includes at least one of polyurethane resin, polyester resin, vinyl chloride resin, epoxy resin, phenolic resin, and acrylic resin.

[0061] A schematic diagram of the current movement direction of the composite electrode layer of the present invention is shown below. Figure 2 As shown, electrons mainly converge and conduct through the fluidic layer; the reason why charges appear far away from the metal wire is that there is no metal wire at the connection position near the dead zone at the edge.

[0062] According to another aspect of the present invention, the present invention also relates to a method for preparing the aforementioned composite electrode layer, comprising the following steps:

[0063] Metal wires are deposited on a glass substrate by vapor deposition or printing to form a fluid-conducting layer; then a transparent conductive material is deposited on the surface of the fluid-conducting layer and the surface of the glass substrate to form a transparent conductive layer.

[0064] The method for preparing the composite electrode layer of this invention is highly efficient and yields a high-quality composite electrode layer, which is beneficial for improving the electrochemical performance of perovskite batteries.

[0065] In one embodiment, the fluid-conducting layer is prepared on the glass substrate by the aforementioned vapor deposition method, specifically including: before vapor deposition, controlling the vacuum degree of the vapor deposition chamber to be 10. -3 ~10 -5 The vapor deposition power supply has a power of 6-7 kW and a wire feed speed of 20-30 mm / s, such as 2 mm / s, 25 mm / s, 28 mm / s, etc. A glass substrate is placed on a substrate holder containing a metal mask, with the glass substrate positioned above the metal mask. A magnetic plate is placed above the glass substrate to form an assembly. The assembly is then transferred to the vapor deposition chamber, where the vapor deposition equipment evaporates the wire. The wire is deposited on the lower surface of the glass substrate and solidifies to form a conductive layer. The glass substrate is transported in the vapor deposition chamber at a speed of 35-45 mm / s, such as 35 mm / s, 40 mm / s, 42 mm / s, 45 mm / s, etc.

[0066] The process of preparing a fluid-conducting layer on a glass substrate by means of vapor deposition includes: placing a glass substrate on a substrate holder containing a metal mask, with the glass substrate positioned above the metal mask, and placing a magnetic plate above the glass substrate; evaporating metal wires, which are deposited on the lower surface of the glass substrate and cured to form a fluid-conducting layer.

[0067] In one embodiment, a positioning device is provided around the periphery of the substrate holder. A metal mask is mounted on the substrate holder. The metal mask material needs to be heat-resistant, corrosion-resistant, not easily deformed, and magnetically adsorbable, such as an alloy of Ni and Fe. The number, width, and spacing of the lines on the metal mask can be set according to process requirements. After multiple cycles, the metal mask needs to be cleaned, which can be done using alkaline cleaning. In one embodiment, the magnetic plate has multiple magnetic strips arranged parallel to the direction of the metal mask's grid lines to adsorb the metal mask and prevent it from falling during fabrication.

[0068] In one embodiment, a metal mask is loaded onto a substrate holder; a mechanical chuck is used to pick up the glass substrate from the back and place it on top of the metal mask, with the coated side of the glass substrate facing down; this ensures close contact between the metal mask and the glass substrate; then a magnetic plate descends and holds the metal mask; the grid line evaporation process is then performed; the substrate holder exits the evaporation chamber, and the magnetic plate rises; then it is conveyed to the workstation via an automated line; a mechanical tray unloads the evaporated glass. The process flow diagram for evaporation using a mask in this invention is shown below. Figure 9 As shown.

[0069] In one embodiment, the vapor deposition equipment used to prepare a fluid-conducting layer on a glass substrate by the vapor deposition method includes an evaporation system, a transmission system, a vacuum system, and an auxiliary automatic line system. The evaporation system includes a process chamber, in which an evaporation device is disposed for depositing metal wire raw material on the glass substrate to obtain a fluid-conducting layer. The vacuum system includes a first vacuum chamber and a second vacuum chamber to provide different vacuum levels to enhance the transmission of the substrate carrier. The first vacuum chamber is connected to the inlet of the process chamber, and the second vacuum chamber is connected to the outlet of the process chamber. The first vacuum chamber contains a plurality of secondary chambers with progressively increasing vacuum levels in the conveying direction, and the second vacuum chamber contains a plurality of secondary chambers with progressively decreasing vacuum levels in the conveying direction. The first and second vacuum chambers provide different vacuum levels for continuous transmission of the substrate carrier in a vacuum environment. The transmission system connects the first vacuum chamber and the second vacuum chamber to form a circulating transport loop for the substrate carrier.

[0070] The vapor deposition equipment of the present invention is more efficient and safer through the cooperation of various systems, and the resulting fluid-conducting layer has higher precision and performance.

[0071] In one embodiment, the evaporation device includes a support base, a metal wire reel, a feeding motor, an evaporation boat, a cooling system, a baffle, and a heating electrode. The support base supports the entire evaporation device. The metal wire reel stores metal wire, enabling continuous evaporation. The feeding motor controls the feeding of metal wire to the evaporation boat, which receives the metal wire. The heating electrode heats the evaporation boat, achieving continuous evaporation of the metal wire. The cooling system cools the evaporation device, and the baffle protects the evaporation system from contaminating the equipment with evaporated metal wire.

[0072] In one embodiment, along the feed end direction of the process chamber, the first vacuum chamber sequentially includes a first transition chamber, a first transfer chamber, and a first buffer chamber; along the discharge end direction of the process chamber, the second vacuum chamber sequentially includes a second buffer chamber, a second transfer chamber, and a second transition chamber. The first and second transition chambers function to switch between atmospheric and low vacuum, and can also provide rapid transmission, saving the residence time of the glass substrate in the chamber. The first and second transfer chambers function to switch between low and medium vacuum, and can also provide rapid transmission, saving the time the glass substrate spends in the chamber. The first and second buffer chambers function to switch between medium and high vacuum, and can also switch transmission speeds, allowing for high-speed transmission and saving the time the glass substrate spends in the chamber, with the process speed matching the transmission speed of the process chamber.

[0073] In one embodiment, the transmission system includes a return system, a transfer system, and a substrate holder maintenance system. The return system is used for the return of the substrate holder and the metal mask. The transfer system is used for the bonding of the magnetic plate and the substrate holder. The substrate holder maintenance system is used for loading and unloading the substrate holder. In another embodiment, the transmission system is connected to a loading platform located near the inlet of the first vacuum chamber to provide glass substrates. The loading platform connects to the upstream production line, carries upstream glass, and can also be manually loaded. The glass can be bonded to the substrate holder by mechanical flipping. The transmission system is also connected to an unloading system to receive the glass substrates after the composite electrode layer has been prepared. This system has the same structure as the loading system and is responsible for unloading. Unloading can be done manually or the glass can be separated from the substrate holder by mechanical flipping. The transmission system also includes a ladder for easy access for personnel.

[0074] In one embodiment, the auxiliary automated line system includes an electrical cabinet, a backing pump unit, and a dry pump unit. The electrical cabinet contains both high-voltage and low-voltage electrical systems, accommodating the power and control of the entire equipment; the backing pump unit is a molecular pump backing pump unit, working in conjunction with the molecular pump to achieve high vacuum in the chamber; the dry pump unit can be started under atmospheric conditions and can achieve low vacuum in the chamber.

[0075] In one embodiment, the preparation of a fluid-conducting layer on a glass substrate using the above-described vapor deposition equipment specifically includes the following steps:

[0076] Before vapor deposition, the vacuum level of the vapor deposition chamber is controlled to be 10. -3 ~10 -5The vapor deposition power supply has a power of 6-7KW and a wire feeding speed of 20-30mm / s. After observing through the observation hole and waiting for the aluminum wire evaporation rate to stabilize, the metal mask is loaded onto the substrate holder. The glass is flipped onto the metal mask via the loading platform. A magnetic plate is placed on the substrate holder, positioned above the glass substrate, to hold the metal mask, forming an assembly. The assembly is transported to the first vacuum chamber, passing through the first transition chamber, the first transfer chamber, and the first buffer chamber before reaching the process chamber. In the process chamber, a fluid-conducting layer is formed on the glass substrate through vapor deposition. The glass substrate with the fluid-conducting layer is transported with the substrate holder, passing through the second buffer chamber, the second transfer chamber, and the second transition chamber of the second vacuum chamber. After exiting the second vacuum chamber, the magnetic plate is retrieved by the transfer system. The glass substrate is then unloaded by the unloading system, separating it from the substrate holder. The substrate holder is returned via the return system, and the transfer system reassembles the magnetic plate with the returned substrate holder, returning it to the infeed end. This process is repeated. The return system also includes a substrate holder maintenance system for loading and unloading the substrate holder.

[0077] In one embodiment, a fluid-conducting layer is prepared on a glass substrate by printing. The specific method includes: spraying a coating onto the glass substrate using a printing device to form a coating layer, followed by curing to form the fluid-conducting layer; the distance between the inkjet head of the printing device and the glass substrate is 30–200 μm, for example, 30 μm, 50 μm, 80 μm, 100 μm, 150 μm, 180 μm, etc.; the spray gap is 2–5 mm, for example, 2 mm, 2.5 mm, 3 mm. The inkjet head has a travel diameter of 3.5mm, 4mm, 4.5mm, etc.; a travel speed of 0.2–2m / s, such as 0.5m / s, 1m / s, 1.5m / s, 1.8m / s, 2m / s, etc.; a curing temperature of 200–500℃, such as 200℃, 250℃, 300℃, 350℃, 400℃, 450℃, 500℃, etc.; and a curing time of 10–20min, such as 10min, 15min, 20min, etc. By coordinating the above printing process parameters, this invention can ensure the quality and performance of the fluid-conducting layer.

[0078] The coating material comprises a conductive phase, a binder phase, and a reinforcing phase, wherein the mass ratio of the conductive phase to the binder phase is (20-50):(50-80). The conductive phase includes at least one of aluminum, aluminum alloys, silver-molybdenum alloys (silver-coated molybdenum), and silver-nickel alloys (silver-coated nickel). In one embodiment, the aluminum powder includes flake aluminum powder and / or spherical aluminum powder; in another embodiment, the aluminum powder is nano-aluminum powder. In one embodiment, the binder serves to bond the conductive phase and fix it to the surface of the glass substrate, and includes at least one of ceramics, glass, resin, oxide crystals, and cellulose. The glass includes at least one of lead glass, borate, bismuthate, and zinc glass, and the resin includes at least one of polyurethane resin, polyester resin, vinyl chloride resin, epoxy resin, phenolic resin, and acrylic resin. The reinforcing phase includes an organic solvent, which may be at least one of the following: diester (DBE), diethylene glycol butyl ether acetate, ethylene glycol ethyl ether acetate, butyl acetate, diethyl carbonate, propylene glycol methyl ether acetate, and isophorone diisocyanate. Its function is to dissolve the resin, ensure sufficient dispersion of conductive particles, improve the surface condition of the substrate, determine the drying rate, and provide excellent adhesion between the slurry and the substrate. The reinforcing phase may also include other additives, such as co-solvents and dispersants.

[0079] In one embodiment, the printing equipment used in the printing method includes a feeding area, a process area, and an unloading area arranged sequentially. The process area is internally equipped with a positioning system, a liquid supply system, a spraying system, and a transmission system. The positioning system, composed of a precision motor, is used for positioning the glass substrate. It can position all four corners of the glass substrate, achieving precise positioning of the perovskite substrate, which is the basis for spraying. The spraying system includes a spraying device, which includes a support column and multiple inkjet heads to meet the needs of linear spraying. The support column has a solution channel inside, which can evenly distribute the solution to each inkjet head. The support column also has an injection port for injecting spraying liquid through the liquid supply system. The spraying device is also connected to a linear motor, which, in conjunction with a grating ruler, achieves precise motion control. The liquid supply system provides spraying liquid to the spraying system. The feeding area receives the feed from the previous process, acting as a buffer; the unloading area receives the feed from the next process, also acting as a buffer.

[0080] In one embodiment, the liquid supply system includes a raw material storage device, a transfer storage device, a liquid injection pump, a filter, and an exhaust filtration module. The exhaust filtration module is disposed between the raw material storage device and the transfer storage device. The transfer storage device is connected to the spraying device via the liquid injection pump and the filter. The raw material storage device stores raw materials, with the prepared raw materials placed in a raw material tank. The raw materials in the raw material storage device undergo exhaust filtration and preliminary filtration through the exhaust filtration module to ensure the liquid in the transfer tank is free of impurities and air bubbles. The liquid then enters the transfer storage device via the transfer pump. The raw materials in the transfer storage device then undergo final filtration through the liquid injection pump and the filter to ensure the solution is free of impurities before entering the spraying device.

[0081] In one embodiment, the preparation conditions of the transparent conductive layer specifically include: the evaporation temperature of the transparent conductive layer material is 45-60°C, for example 50°C, 55°C, etc.; the evaporation time is 4.5-6.5h, for example 5h, 6h, etc.; the temperature of the glass substrate is 600-700°C, for example 600°C, 650°C, 700°C, etc.; and the vacuum degree is 1-10mbar, for example 2mbar, 5mbar, 8mbar, etc.

[0082] According to another aspect of the present invention, the present invention also relates to a perovskite solar cell, comprising the aforementioned composite front electrode, or a composite electrode layer prepared by the aforementioned method for preparing the composite electrode layer.

[0083] In one embodiment, the perovskite solar cell includes a glass substrate, the aforementioned composite electrode layer, a charge transport layer, a perovskite power generation layer, an electron transport layer, a back electrode, a P1 channel, a P2 channel, and a P3 channel; one side surface of the glass substrate is connected to the composite electrode layer, the composite electrode layer has a P1 channel located within an accommodating region formed by adjacent metal wires; the charge transport layer includes a first substrate layer and a first extension, the first substrate layer covering the surface of the composite electrode layer, and the first extension located within the P1 channel; the perovskite power generation layer and the electron transport layer are sequentially stacked on the surface of the charge transport layer, and the P2 channel sequentially penetrates the charge transport layer, the perovskite power generation layer, and the electron transport layer; the back electrode includes a second substrate layer and a second extension, the second substrate layer covering the surface of the electron transport layer, and the second extension located within the P2 channel; the P3 channel sequentially penetrates the back electrode, the electron transport layer, the perovskite power generation layer, and the charge transport layer.

[0084] The following explanation, in conjunction with specific embodiments, comparative examples, and accompanying drawings, further clarifies the situation.

[0085] Example 1

[0086] A composite electrode layer, such as Figure 1 As shown, the battery includes a fluid-conducting layer 200 and a transparent conductive layer 300. The fluid-conducting layer 200 is located on one side surface of the glass substrate 100. The fluid-conducting layer 200 includes multiple metal wires arranged in an array. Along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for the P1 channel of the perovskite solar cell. The transparent conductive layer 300 covers the surface of the fluid-conducting layer 200 and the surface of the glass substrate 100. The shielding area of ​​the fluid-conducting layer 200 on the surface of the glass substrate 100 accounts for 2.5% of the area of ​​the glass substrate 100. The thickness of the metal wires is 100 nm, and the thickness of the transparent conductive layer 300 is 450 nm. The distance between two adjacent metal wires is 4 mm. The metal wires are aluminum wires, the transparent conductive layer 300 is FTO, the cell efficiency is 17.27%, and the current I is 1.76 A.

[0087] The method for preparing the composite electrode layer in this embodiment includes the following steps:

[0088] (1) Metal wires are deposited on a glass substrate 100 by means of a vapor deposition equipment to form a fluid-conducting layer 200;

[0089] Among them, vapor deposition equipment, such as Figure 4 As shown, the system includes an evaporation system, a transmission system, a vacuum system, and an auxiliary automatic line system. The evaporation system includes a process chamber 9, in which an evaporation device is installed to deposit metal wire raw materials on the glass substrate 100 to obtain a fluid-conducting layer 200. The vacuum system includes a first vacuum chamber and a second vacuum chamber to provide different vacuum levels to enhance the transmission of the substrate holder 16. The first vacuum chamber is connected to the inlet of the process chamber 9, and the second vacuum chamber is connected to the outlet of the process chamber 9. The transmission system connects the first vacuum chamber and the second vacuum chamber respectively, forming a circulating transport loop for the substrate holder 16.

[0090] Evaporation device such as Figure 5 As shown, the device includes a support base 905, a metal wire reel 901, a feeding motor 902, an evaporation boat 904, a cooling system 906, a baffle 907, and a heating electrode 908. The support base 905 supports the entire evaporation device. The metal wire reel 901 stores metal wire 903. The feeding motor 902 controls the feeding of metal wire 903 to the evaporation boat 904, which receives the metal wire 903. The heating electrode 908 heats the evaporation boat 904. The cooling system 906 cools the evaporation device. The baffle 907 prevents the evaporated metal wire from contaminating the equipment.

[0091] Along the feed end direction of the process chamber 9, the first vacuum chamber sequentially includes a first transition chamber 6, a first transfer chamber 7, and a first buffer chamber 8; along the discharge end direction of the process chamber 9, the second vacuum chamber sequentially includes a second buffer chamber 13, a second transfer chamber 14, and a second transition chamber 15.

[0092] The transmission system includes a return system 2, a transfer system 4, and a substrate holder maintenance system 3. The return system 2 is used for the return of the substrate holder 16 and the metal mask plate 19. The transfer system 4 is used for the connection between the magnetic plate 20 and the substrate holder 16. The substrate holder maintenance system 3 is used for the loading and unloading of the substrate holder 16. The transmission system is also equipped with a ladder 1 for easy access by personnel.

[0093] The transmission system is connected to a loading platform 5, which is located near the inlet of the first vacuum chamber and is used to provide the glass substrate 100; the transmission system is also connected to a unloading system 17, which is used to receive the glass substrate 100 after the composite electrode layer has been prepared.

[0094] The auxiliary automatic line system includes an electrical cabinet 10, a pre-pump unit 11, and a dry pump unit 12.

[0095] The specific preparation steps include:

[0096] Adjust the process atmosphere in process chamber 9 to 10. -3 mbar and 10 -5 Between mbar, the power supply of the evaporation boat is stabilized between 6 and 7 kW, and the feed speed of the aluminum wire is controlled between 20 and 30 mm / s. Observation is performed through the observation hole, and after the evaporation rate of the aluminum wire stabilizes, the metal mask is loaded onto the substrate holder 16. The glass substrate 100 is provided by the loading platform 5 and placed on the substrate holder 16 conveyed by the return system 2. The magnetic plate 20 is placed on the substrate holder 16, above the glass substrate, and holds the metal mask 19. The glass substrate 100 is transferred to the first vacuum chamber, passes through the first transition chamber 6, the first transfer chamber 7, and the first buffer chamber 8 in sequence, and arrives at the process chamber 9. In the process chamber 9, through... The vapor deposition process in the vapor deposition equipment forms a fluid-conducting layer 200 on the glass substrate 100. The glass substrate 100 with the fluid-conducting layer 200 is transported with the substrate holder 16, passing sequentially through the second buffer chamber 13, the second transfer chamber 14, and the second transition chamber 15 of the second vacuum chamber. After exiting the second vacuum chamber, the magnetic plate 20 is retrieved by the transfer system 4. The substrate 100 is then unloaded by the unloading system 17, separating it from the substrate holder 16. The substrate holder 16 is then returned via the return system 2. The transfer system 4 combines the magnetic plate 20 with the returned substrate holder 16, and the substrate holder 16 is returned to the feed end via the return system 2, repeating the above operation. A schematic diagram of the substrate holder 16 is shown below. Figure 6As shown, a positioning device 18 is provided on the substrate holder 16, and a schematic diagram of the structure of the metal mask plate 19 is shown below. Figure 7 As shown in the diagram, the structure of the magnetic plate 20 is as follows: Figure 8 As shown;

[0097] (2) A transparent conductive material is deposited on the surface of the fluid-conducting layer 200 and the surface of the glass substrate 100 to form a transparent conductive layer 300. Specifically, the composite electrode layer is obtained by using SnCl4·5H2O as the precursor tin source and SnF2 as the fluorine source through CVD. The precursor reaction temperature is 50°C, the reaction time is 5h, the substrate temperature is 650°C, and the vacuum degree is controlled at 5mbar.

[0098] Example 2

[0099] A composite electrode layer, such as Figure 1 As shown, the battery includes a fluid-conducting layer 200 and a transparent conductive layer 300. The fluid-conducting layer 200 is located on one side surface of the glass substrate 100. The fluid-conducting layer 200 includes multiple metal wires arranged in an array. Along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for the P1 channel of the perovskite solar cell. The transparent conductive layer 300 covers the surface of the fluid-conducting layer 200 and the surface of the glass substrate 100. The shielding area of ​​the fluid-conducting layer 200 on the surface of the glass substrate 100 accounts for 2.5% of the area of ​​the glass substrate 100. The thickness of the metal wires is 100 nm, and the thickness of the transparent conductive layer 300 is 450 nm. The distance between two adjacent metal wires is 4 mm. The metal wires are aluminum wires. The transparent conductive layer 300 is FTO. The cell efficiency is 17.27%, and the current I is 1.76 A.

[0100] The method for preparing the composite electrode layer in this embodiment includes the following steps:

[0101] (1) A fluid-conducting layer 200 is prepared on a glass substrate 100 by printing. The specific method includes: spraying on the glass substrate 100 using printing equipment to form a coating, and then curing it to form a fluid-conducting layer 200.

[0102] Among them, printing equipment such as Figure 10 As shown, the system includes a feeding area 21, a process area 22, and a discharging area 25 arranged sequentially. The process area 22 is internally equipped with a positioning system 24, a liquid supply system, a spraying system, and a transmission system. The positioning system 24 is used to position the glass substrate 100. The spraying system includes a spraying device 23, such as... Figure 11As shown, the spraying device 23 includes a support column 32 and multiple inkjet heads. The support column 32 has a solution channel inside and a liquid injection port 34. The spraying device is also connected to a linear motor 33, which, in conjunction with a grating ruler, achieves precise motion control. The liquid supply system provides spraying liquid to the spraying system. The liquid supply system includes a raw material storage device 29, a transfer storage device 30, a liquid injection pump 28, a filter 27, and an exhaust filter module 31. The exhaust filter module 31 is located between the raw material storage device 29 and the transfer storage device 30. The transfer storage device 30 is connected to the spraying device via the liquid injection pump 28 and the filter 27. It also includes an electrical cabinet 26, where the electrical control of the entire device is integrated, containing 380V power and 24V control power.

[0103] The distance between the inkjet head and the glass substrate 100 of the printing equipment is 30-200 μm, the inkjet gap is 2-5 mm, and the moving speed of the inkjet head is 0.2-2 m / s; the glass substrate 100 after passing through the spraying device 23 is transferred to the curing oven, the curing temperature is 200-500℃, and the curing time is 10-20 min.

[0104] (2) A transparent conductive material is deposited on the surface of the fluid-conducting layer 200 and the surface of the glass substrate 100 to form a transparent conductive layer 300. Specifically, the composite electrode layer is obtained by using SnCl4·5H2O as the precursor tin source and SnF2 as the fluorine source through CVD. The precursor reaction temperature is 50°C, the reaction time is 5h, the substrate temperature is 650°C, and the vacuum degree is controlled at 6mbar.

[0105] Example 1 and Example 2 differ only in their preparation methods; the fluid-conducting layer and the transparent conductive layer obtained are the same, and their performance parameters are identical.

[0106] Example 3

[0107] A method for preparing a composite electrode layer, except that the thickness of the metal wire is 50 nm, is the same as in Example 1.

[0108] Example 4

[0109] A method for preparing a composite electrode layer, except that the thickness of the metal wire is 200 nm, is the same as in Example 1.

[0110] Example 5

[0111] A method for preparing a composite electrode layer, except that the thickness of the metal wire is 250 nm, is the same as in Example 1.

[0112] The performance of the composite electrode layers in Examples 1 to 5 was tested, and the results are shown in Table 1.

[0113] Table 1. Test results of the composite electrode layers in Examples 1-5

[0114]

[0115]

[0116] As shown in Table 1, among Examples 1-5, the best gain in transmittance and overall conversion efficiency is achieved when the metal line thickness is 100nm, the metal line area accounts for 2.5%, and the FTO layer thickness is 450nm, as in Examples 1 and 2.

[0117] Example 6

[0118] A method for preparing a composite electrode layer, wherein the shielding area of ​​the fluid-conducting layer on the surface of the glass substrate accounts for 1% of the area of ​​the glass substrate, and other conditions are the same as in Example 1.

[0119] Example 7

[0120] A method for preparing a composite electrode layer, wherein the shielding area of ​​the fluid-conducting layer on the surface of the glass substrate accounts for 2% of the area of ​​the glass substrate, and other conditions are the same as in Example 1.

[0121] Example 8

[0122] A method for preparing a composite electrode layer, wherein the shielding area of ​​the fluid-conducting layer on the surface of the glass substrate accounts for 3% of the area of ​​the glass substrate, and other conditions are the same as in Example 1.

[0123] Example 9

[0124] A method for preparing a composite electrode layer, wherein the shielding area of ​​the fluid-conducting layer on the surface of the glass substrate accounts for 4% of the area of ​​the glass substrate, and other conditions are the same as in Example 1.

[0125] The performance of the composite electrode layers of Examples 6-9 and Comparative Example 1 was tested, and the results are shown in Table 2.

[0126] Table 2 Performance test results of the composite electrode layers in Examples 1, 6-9, and Comparative Example 1

[0127]

[0128] As shown in Table 2, when the area of ​​metal wire is between 2% and 3%, it has a better gain and the effect on transmittance is very small, but the gain in battery efficiency is very significant.

[0129] Example 10

[0130] A method for preparing a composite electrode layer, except that the thickness h of the fluid-conducting layer on the surface of the glass substrate is 300 nm, is the same as in Example 1.

[0131] Example 11

[0132] A method for preparing a composite electrode layer, except that the thickness of the transparent conductive layer is 350 nm, is the same as in Example 1.

[0133] Example 12

[0134] A method for preparing a composite electrode layer, except that the thickness of the transparent conductive layer is 400 nm, is the same as in Example 1.

[0135] The performance of the composite electrode layers in Examples 10-12 was tested, and the results are shown in Table 3.

[0136] Table 3 shows the performance test results of the composite electrode layers in Examples 10-12.

[0137]

[0138]

[0139] As shown in Table 3, given the area ratio and thickness of the metal wires, the thickness of the transparent conductive layer can be appropriately reduced to improve its transmittance.

[0140] Example 13

[0141] A perovskite battery, such as Figure 3As shown, the structure includes a glass substrate 100, a composite electrode layer, a charge transport layer 400, a perovskite power generation layer 500, an electron transport layer 600, a back electrode 700, a P1 channel 800, a P2 channel 900, and a P3 channel 1000. One side surface of the glass substrate 100 is connected to the composite electrode layer. The composite electrode layer has a P1 channel 800 located within an accommodating region formed by adjacent metal wires. The charge transport layer 400 includes a first substrate layer and a first extension. The first substrate layer covers the surface of the composite electrode layer, and the first extension is located within the P1 channel 800. The perovskite power generation layer 500 and the electron transport layer 600 are sequentially stacked on the surface of the charge transport layer 400. The P2 channel sequentially penetrates the charge transport layer 400, the perovskite power generation layer 500, and the electron transport layer 600. The back electrode 700 includes a second substrate layer and a second extension. The second substrate layer covers the surface of the electron transport layer 600, and the second extension is located within the P2 channel 900. The P3 channel sequentially penetrates the back electrode 700, the electron transport layer 600, the perovskite power generation layer 500, and the charge transport layer 400. The above-mentioned composite electrode layer is the composite electrode layer in Example 1.

[0142] The method for fabricating a perovskite solar cell includes: preparing a composite electrode layer according to the method in Example 1; preparing a P1 channel on a transparent conductive layer; preparing a charge transport layer 400, a perovskite power generation layer 500, and an electron transport layer 600 by sequential deposition; preparing a P2 channel on the charge transport layer 400, the perovskite power generation layer 500, and the electron transport layer 600; preparing a back electrode layer 700 on the electron transport layer 600 by deposition; and preparing a P3 channel 1000 on the back electrode 700, the electron transport layer 600, the perovskite power generation layer 500, and the charge transport layer 400.

[0143] Using the composite electrode layers of other embodiments described above, perovskite solar cells were prepared according to the methods described in this embodiment.

[0144] Comparative Example 1

[0145] A common front electrode, consisting only of a transparent conductive layer FTO, has a cell efficiency of 15.70% and a current I of 1.28A.

[0146] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A composite electrode layer, characterized in that, It includes a fluid-conducting layer and a transparent conductive layer; the fluid-conducting layer is located on one side surface of a glass substrate, and the transparent conductive layer covers the surface of the fluid-conducting layer and the surface of the glass substrate; the fluid-conducting layer includes multiple metal wires arranged in an array, and along the length direction of the metal wires, any two adjacent metal wires form a accommodating region for the P1 channel of the perovskite solar cell; in the length direction perpendicular to the metal wires, several metal wires are spaced apart and form multiple carrier concentration and conduction regions on the transparent conductive layer.

2. The composite electrode layer according to claim 1, characterized in that, It includes at least one of the following features (1) to (7): (1) The shielding area of ​​the fluid guiding layer on the surface of the glass substrate accounts for 2% to 3% of the area of ​​the glass substrate; (2) The thickness of the metal wire is 50nm~200nm; (3) The thickness of the transparent conductive layer is 300nm~500nm; (4) Along the width direction of the metal wire, the distance between two adjacent metal wires is 2~5mm; (5) The material of the metal wire includes a composite containing a conductive phase, a composite of metal and conductive inorganic matter, a metal element or alloy; by mass percentage, the composite containing a conductive phase includes 20%~50% conductive phase and 50%~80% binder phase; (6) The metal wire is made of a composite containing a conductive phase, the conductive phase including at least one of aluminum, aluminum alloy, silver-molybdenum alloy and silver-nickel alloy; the binder includes at least one of ceramic, glass, resin and cellulose; (7) The transparent conductive layer has a P1 channel, which is located within the accommodating area.

3. The method for preparing the composite electrode layer according to claim 1 or 2, characterized in that, Includes the following steps: Metal wires are deposited on a glass substrate by vapor deposition or printing to form a fluid-conducting layer; then a transparent conductive material is deposited on the surface of the fluid-conducting layer and the surface of the glass substrate to form a transparent conductive layer.

4. The method for preparing the composite electrode layer according to claim 3, characterized in that, It includes at least one of the following features (1) to (2): (1) The fluid-conducting layer is prepared on the glass substrate by the vapor deposition method, specifically including: placing the glass substrate on the substrate holder loaded with the metal mask, the glass substrate being above the metal mask, placing a magnetic plate above the glass substrate to obtain an assembly; the assembly is transferred to the vapor deposition process chamber, the vapor deposition equipment in the process chamber evaporates the metal wires, the metal wires are deposited on the lower surface of the glass substrate, and after solidification, a fluid-conducting layer is formed; (2) Before vapor deposition, control the vacuum level of the vapor deposition chamber to 10. -3 ~10 -5 mbar, the metal wire supply speed is 20~30mm / s; the glass substrate is transported at a speed of 35~45mm / s in the vapor deposition process chamber.

5. The method for preparing the composite electrode layer according to claim 3 or 4, characterized in that, The vapor deposition equipment used to prepare the fluid-conducting layer on the glass substrate by the vapor deposition method includes an evaporation system, a transmission system, a vacuum system, and an auxiliary automatic line system. The evaporation system includes a process chamber, in which an evaporation device is provided for depositing metal wire raw material on the glass substrate to obtain a fluid-conducting layer. The vacuum system includes a first vacuum chamber and a second vacuum chamber. The first vacuum chamber is connected to the feed port of the process chamber, and the second vacuum chamber is connected to the discharge port of the process chamber. The first vacuum chamber includes a plurality of secondary chambers with progressively increasing vacuum levels in the conveying direction, and the second vacuum chamber includes a plurality of secondary chambers with progressively decreasing vacuum levels in the conveying direction. The first and second vacuum chambers are used to provide different vacuum levels for continuous transmission of the substrate holder in a vacuum environment. The transmission system is connected to the first vacuum chamber and the second vacuum chamber respectively, forming a circulating transport loop for the substrate holder.

6. The method for preparing the composite electrode layer according to claim 5, characterized in that, It includes at least one of the following features (1) to (5): (1) The evaporation device includes a support base, a metal wire reel, a feeding motor, an evaporation boat, a cooling system, a baffle, and a heating electrode; the support base is used to support the entire evaporation device, the metal wire reel is used to store metal wire, the feeding motor is used to control the feeding of metal wire to the evaporation boat, the evaporation boat is used to receive metal wire, the heating electrode is used to heat the evaporation boat, the cooling system is used to cool the evaporation device, and the baffle is used to prevent the evaporated metal wire from contaminating the equipment; (2) Along the feed end direction of the process chamber, the first vacuum chamber sequentially includes a first transition chamber, a first transfer chamber and a first buffer chamber; along the discharge end direction of the process chamber, the second vacuum chamber sequentially includes a second buffer chamber, a second transfer chamber and a second transition chamber. (3) The transmission system includes a return system, a transfer system and a substrate holder maintenance system. The return system is used for the return of the substrate holder and the metal mask plate. The transfer system is used for the connection between the magnetic plate and the substrate holder. The substrate holder maintenance system is used for the loading and unloading of the substrate holder. (4) The transmission system is connected to a loading platform, which is close to the inlet of the first vacuum chamber and is used to provide the glass substrate; the transmission system is connected to a unloading system for receiving the glass substrate after the composite electrode layer has been prepared. (5) The auxiliary automatic line system includes an electrical cabinet, a front pump set and a dry pump set.

7. The method for preparing the composite electrode layer according to claim 3, characterized in that, A fluid-conducting layer is prepared on a glass substrate by printing. The specific method includes: spraying a coating onto the glass substrate using printing equipment to form a coating layer, and then curing it to form a fluid-conducting layer. The distance between the inkjet head and the glass substrate of the printing equipment is 30~200μm, the ink jet gap is 2~5mm, and the moving speed of the inkjet head is 0.2~2m / s; The curing temperature is 200~500℃, and the curing time is 10~20min.

8. The method for preparing the composite electrode layer according to claim 3 or 7, characterized in that, It includes at least one of the following features (1) to (2): (1) The printing equipment used in the printing method includes a feeding area, a process area and an output area arranged in sequence. The process area is equipped with a positioning system, a liquid supply system, a spraying system and a transmission system. The positioning system is used to position the glass substrate. The spraying system includes a spraying device, which includes a support column and multiple inkjet heads. The support column is equipped with a solution channel and a liquid injection port. The liquid supply system is used to provide spraying liquid to the spraying system. (2) The liquid supply system includes a raw material storage device, a transfer storage device, a liquid injection pump, a filter and an exhaust filtration module; the exhaust filtration module is disposed between the raw material storage device and the transfer storage device; the transfer storage device is connected to the spraying device through the liquid injection pump and the filter.

9. The method for preparing the composite electrode layer according to claim 3, characterized in that, The specific conditions for preparing the transparent conductive layer include: an evaporation temperature of 45~60℃ for the transparent conductive layer material, an evaporation time of 4.5~6.5h, a glass substrate temperature of 600~700℃, and a vacuum degree of 0.1~10mbar.

10. A perovskite solar cell, characterized in that, The composite electrode layer includes the composite electrode layer according to any one of claims 1 to 2, or the composite electrode layer prepared by the method of any one of claims 3 to 9.

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