A fully coupled MEMS tuning fork gyroscope

Abstract

The application relates to a full-coupling MEMS tuning fork gyroscope, comprising: an anchor point structure, a suspension structure being suspended on the anchor point structure; wherein the suspension structure comprises two symmetrically arranged suspension units, each suspension unit comprising a driving mass, a Coriolis mass and a sensitive mass, the two sensitive masses being connected through a sensitive coupling structure between opposite surfaces of the two sensitive masses, and the free ends of the two driving masses being connected through a driving coupling structure. The MEMS tuning fork gyroscope designed by the application adopts a full-coupling structure, so that the response amplitudes of the driving mode and the sensitive mode of the gyroscope are closer, the frequency difference between the two modes is effectively reduced, and the sensitivity of the gyroscope is effectively enhanced.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS), and more specifically to a fully coupled MEMS tuning fork gyroscope. Background Technology

[0002] MEMS gyroscopes are inertial sensors based on the Coriolis effect, utilizing microelectromechanical systems (MEMS) fabrication technology combined with gyroscope technology requirements. External angular velocity couples energy in the driving direction to the detection direction, causing the detection mass to move, thus achieving angular velocity measurement. MEMS tuning fork gyroscopes, as a typical gyroscope structure, possess advantages such as simple and flat geometry, suitability for mass production, ease of common-mode rejection, and low power consumption, making them promising for applications and therefore of significant research importance.

[0003] Traditional MEMS molded tuning fork gyroscopes mainly consist of an elastic beam, two mass blocks, and drive / detection electrodes. The elastic beam supports the two mass blocks, allowing them to vibrate freely within a certain range. The vibration of the mass blocks changes due to angular velocity, thereby altering the resonant frequency of the tuning fork gyroscope. The drive / detection electrodes are responsible for applying the drive voltage and detecting the resonant frequency, converting it into usable angular velocity information.

[0004] However, existing MEMS tuning fork gyroscopes use two independent mass blocks to form their sensing units, which then form a differential structure. Although this can improve the gyroscope's ability to suppress external interference signals, the manufacturing process usually results in differences in the mass, stiffness, and damping of the two sensing units. This causes the two independent sensing structures to have inconsistent resonant frequencies during operation, resulting in a large difference in the amplitude of the resonator and thus reducing the mechanical sensitivity of the gyroscope.

[0005] Therefore, a fully coupled MEMS tuning fork gyroscope is needed to solve the above problems. Summary of the Invention

[0006] This invention provides a fully coupled MEMS tuning fork gyroscope. Through a sensitive coupling structure and a drive coupling structure, the mass blocks of the MEMS tuning fork gyroscope are arranged in a fully coupled manner. This solves the problem that the manufacturing process of existing MEMS tuning fork gyroscopes usually causes differences in the mass, stiffness, and damping of the two sensitive units. It reduces the amplitude difference between the two sets of differential structures of the drive mass block and the sensitive mass block, thereby reducing the difference in resonant frequency between the drive and sensitive modes and thus improving the mechanical sensitivity of the gyroscope.

[0007] The fully coupled MEMS tuning fork gyroscope of the present invention adopts the following technical solution: including:

[0008] Anchor point structure, with a suspended structure suspended on the anchor point structure;

[0009] The suspension structure includes two suspension units symmetrically arranged along the X-axis. Each suspension unit includes a driving mass block, a Coriolis mass block, and a sensitive mass block. Both the driving mass block and the Coriolis mass block have a "C"-shaped notch on the same side. Through mass ratio balancing calculations, the Coriolis mass block is matched and positioned within the "C"-shaped notch of the driving mass block, and the sidewalls of the "C"-shaped notches of the driving mass block and the Coriolis mass block are connected by an elastic beam. The sensitive mass block is positioned within the "C"-shaped notch of the Coriolis mass block, and the sidewalls of the "C"-shaped notches of the Coriolis mass block and the sensitive mass block are connected by an elastic beam. A driving electrode is located on the side of the driving mass block opposite to the "C"-shaped notch, and multiple sensitive electrodes are located on the sensitive mass block.

[0010] The two suspension units are symmetrically arranged about the end faces of the sensitive mass blocks that are away from the driving mass blocks, and the opposite faces of the two sensitive mass blocks are connected by a sensitive coupling structure, and the free ends of the two driving mass blocks are connected by a driving coupling structure.

[0011] Among them, the driving mass block, the driving coupling structure, and the Coriolis mass block are all connected to the anchor point structure through elastic beams, and the sensitive mass block is connected to the anchor point structure through elastic beams in the direction of the center of symmetry.

[0012] Preferably, the anchor point structure includes: a base;

[0013] Two T-shaped anchor points are symmetrically arranged about the center of the base. The T-shaped anchor points are connected by a horizontal plate and a vertical plate, and the two T-shaped anchor points are set opposite to each other.

[0014] Four raised anchor points are evenly distributed around the center of the base;

[0015] It also has two connection anchor points, which are set at the center of the driving mass block and connected to the driving mass block through elastic beams.

[0016] Preferably, the end faces of the notches of the driving mass block and the Coriolis mass block are connected together by the same elastic beam to the short side of the horizontal plate of the T-shaped anchor point, and the end face of the sensitive mass block perpendicular to the center line of symmetry of the two suspension units is connected to the long side of the horizontal plate of the T-shaped anchor point by the elastic beam.

[0017] Preferably, the sensitive coupling structure includes a connecting rod, the two ends of which are connected to the corresponding sensitive mass blocks via support beams, and the connecting rod is connected to the vertical plate of the T-shaped anchor point via a folded elastic beam.

[0018] Preferably, the horizontal plate of the driving coupling structure and the T-shaped anchor point opposite to the vertical plate is connected by an elastic beam, and the two ends of the driving coupling structure are connected to the corresponding protruding anchor points by elastic beams.

[0019] Preferably, the sensitive coupling structure is connected at the center of the opposite faces of the two sensitive mass blocks.

[0020] Preferably, the side of the driving mass block opposite to the notch is provided with multiple driving electrodes.

[0021] Preferably, the side of the driving mass block opposite to the notch is provided with a comb-tooth structure.

[0022] Preferably, the elastic beam is a folded elastic beam with a U-shaped folding structure.

[0023] Preferably, the two first free ends of the two driving mass blocks in the same direction are connected by a first driving coupling structure, and the two second free ends of the two driving mass blocks in the same direction are connected by a second driving coupling structure.

[0024] The beneficial effects of this invention are:

[0025] 1. By setting a sensitive coupling structure, two sensitive units are coupled together, and the driving mass blocks are coupled together through a driving coupling structure, thus achieving full coupling. The fully coupled MEMS tuning fork gyroscope ensures that the response displacement and resonant frequency of the sensitive units of the two suspended units are approximately consistent in the sensitive mode. The driving mass block and the Coriolis mass block are coupled in the Y-axis direction through a folded elastic structure. At this time, the driving mass block and the Coriolis mass block have high motion consistency, improving the effective mass in the driving state. The sensitive mass block and the Coriolis mass block are coupled in the X-axis direction through a folded elastic structure. At this time, the sensitive mass block and the Coriolis mass block have high motion consistency, improving the effective mass in the sensitive state. Compared with the existing MEMS tuning fork gyroscope structure, the sensitive mass blocks of the two sets of suspended units in this invention have added a sensitive coupling structure. Regardless of whether the stiffness of the two sets of sensitive mass blocks is equal, under the action of full coupling, the response displacement and resonant frequency of the two suspended units will be approximately consistent in the driving and sensitive modes, thereby effectively enhancing the sensitivity of the gyroscope.

[0026] 2. Due to the presence of the rigidly connected support beam in the sensitive coupling structure, the response displacement amplitudes of the two sets of sensitive mass blocks will be closer under the action of the driving signal, thereby achieving the effect of signal amplification and improving the signal-to-noise ratio of the output signal. Furthermore, due to the presence of the support beam, the response amplitudes of the two sets of sensitive mass blocks will also be infinitely close under the influence of interference signals caused by uneven processing and complex environmental factors, which can better suppress interference signals and thus improve the robustness of the gyroscope. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the overall structure of an embodiment of a fully coupled MEMS tuning fork gyroscope according to the present invention;

[0029] Figure 2 This is a front view of an embodiment of a fully coupled MEMS tuning fork gyroscope according to the present invention;

[0030] Figure 3 This is a schematic diagram of the fully coupled MEMS tuning fork gyroscope driving mode;

[0031] Figure 4 This is a schematic diagram of the sensitive mode of a fully coupled MEMS tuning fork gyroscope;

[0032] Figure 5 The simulation results are for the driving mode frequencies of the fully coupled MEMS tuning fork gyroscope of the present invention.

[0033] Figure 6 The simulation results are for the sensitive mode frequencies of the fully coupled MEMS tuning fork gyroscope of this invention.

[0034] Figure 7 The simulation results are for the driving modal frequencies of existing incompletely coupled MEMS tuning fork gyroscopes.

[0035] Figure 8 The results are simulation results of the sensitive mode frequencies of existing incompletely coupled MEMS tuning fork gyroscopes;

[0036] In the diagram: 1. Suspension structure; 3. Driving mass block; 4. Driving electrode; 5. Driving coupling structure; 6. Sensitive mass block; 7. Sensitive electrode; 8. Sensitive coupling structure; 9. Coriolis mass block; 10. Support beam; 11. Rebound elastic beam; A. Protruding anchor point; B. T-shaped anchor point; C. Connecting anchor point. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] An embodiment of the fully coupled MEMS tuning fork gyroscope of the present invention, such as... Figure 1 As shown, it includes: an anchor point structure, on which a suspension structure 1 is suspended; wherein, as Figure 2 As shown, the suspension structure 1 includes two suspension units symmetrically arranged in the X-axis direction. Each suspension unit includes a driving mass block 3, a Coriolis mass block 9, and a sensitive mass block 6. Both the driving mass block 3 and the Coriolis mass block 9 have notches on the same side. The Coriolis mass block 9 is matched and positioned within the notch of the driving mass block 3, and the sidewalls of the notches of the Coriolis mass block 9 and the driving mass block 3 are connected by elastic beams. The sensitive mass block 6 is positioned within the notch of the Coriolis mass block 9, and the sidewalls of the notches of the Coriolis mass block 9 and the sensitive mass block 6 are connected by elastic beams. A driving electrode 4 is provided on the side of the mass block 3 away from the notch, and multiple sensitive electrodes 7 are provided on the sensitive mass block 6. The two suspension units are symmetrically arranged about the end face of the sensitive mass block 6 away from the driving mass block 3, and the opposite faces of the two sensitive mass blocks 6 are connected by a sensitive coupling structure 8. The free ends of the two driving mass blocks 3 are connected by a driving coupling structure 5. The driving mass block 3, the driving coupling structure 5, and the Coriolis mass block 9 are all connected to the anchor point structure by elastic beams. The sensitive mass block 6 is connected to the anchor point structure by elastic beams in the direction of the center of symmetry.

[0039] Specifically, the anchor point structure includes: a base, on which two T-shaped anchor points B are symmetrically arranged about the center of the base. The T-shaped anchor points B are connected by a horizontal plate and a vertical plate, and the two T-shaped anchor points B are arranged opposite to each other. For example, ... Figure 1 As shown, the symmetrical center lines of the two T-shaped anchor points B are perpendicular to the symmetrical center lines of the two suspension units. Four raised anchor points A are also evenly distributed around the center of the base, and a connecting anchor point C is set at the center of each driving mass block 3. The connecting anchor point C is connected to the driving mass block 3 through an elastic beam, that is, it is connected to the connecting anchor point C through a folded elastic beam in the X-axis direction. Therefore, the driving mass block 3 has a large stiffness in the Y-axis direction.

[0040] Among them, such as Figure 2 As shown, the end faces of the notches of the driving mass block 3 and the Coriolis mass block 9 are connected together by the same elastic beam to the short side of the horizontal plate of the T-shaped anchor point B. The end face of the sensitive mass block 6, which is perpendicular to the center line of symmetry of the two suspension units, is connected to the long side of the horizontal plate of the T-shaped anchor point B by the elastic beam.

[0041] Among them, such as Figure 2 As shown, the sensitive coupling structure 8 includes a connecting rod 12. The two ends of the connecting rod 12 are connected to the corresponding sensitive mass block 6 through the support beam 10. The connecting rod 12 is connected to the vertical plate of the T-shaped anchor point B through a folded elastic beam 11.

[0042] Among them, such as Figure 2 As shown, the horizontal plate of the driving coupling structure 5 and the T-shaped anchor point B are connected to the side of the vertical plate away from the vertical plate by an elastic beam, and the two ends of the driving coupling structure 5 are connected to the corresponding protruding anchor point A by an elastic beam.

[0043] Specifically, the sensitive coupling structure 8 is connected at the center of the opposite faces of the two sensitive mass blocks 6.

[0044] Specifically, multiple driving electrodes 4 are provided on the side of the driving mass block 3 that is away from the notch.

[0045] Specifically, a comb structure is provided on the side of the driving mass block 3 away from the notch. The comb structure is a prior art structure and will not be described in detail in this embodiment.

[0046] Specifically, in this embodiment, the elastic beam is a folded elastic beam with a U-shaped folding structure, and the support beams 10 are all straight. Since there are many places in the structural plane where straight support beams and folded elastic beams are used, they will not be described one by one below.

[0047] Specifically, the two first free ends of the two driving mass blocks 3 in the same direction are connected by a first driving coupling structure, and the two second free ends of the two driving mass blocks 3 in the same direction are connected by a second driving coupling structure.

[0048] It should be noted that the MEMS tuning fork gyroscope in this embodiment is symmetrical about the Y-axis in the plane, that is, the two suspension units are symmetrical about the Y-axis. The device thickness is 50μm in the design. The two driving mass blocks 3 of the two sets of suspension units are arranged symmetrically about the Y-axis. The total mass of the driving mass blocks 3 is 0.547mg. The two driving mass blocks 3 are coupled in the X-axis direction through two driving coupling structures 5. The driving coupling structures 5 span the two sets of suspension units. The driving mass blocks 3 are connected to the protruding anchor point A in the X-axis direction through a folded elastic beam, thereby realizing the driving mode. The coupling in the driving direction enables energy transfer. The two sensitive mass blocks 6 of the two sets of suspended units are connected to the T-shaped anchor point B via a folded elastic beam in the Y-axis direction and rigidly connected to the T-shaped anchor point B via a straight support beam in the X-axis direction. Therefore, the sensitive mass blocks 6 have high stiffness in the X-axis direction. Through reasonable arrangement and structural optimization, the total mass of the sensitive mass blocks is 0.682 mg, which is relatively balanced compared to the total mass of the driving mass block 3 in this embodiment. The two sensitive mass blocks 6 are coupled through a sensitive coupling structure 8, such as... Figure 2As shown, the sensitive coupling structure 8 is located at the centroid of two symmetrically distributed sensitive mass blocks 6, at the very center of the MEMS tuning fork gyroscope. Since it is rigidly connected to the two sensitive mass blocks 6 in the X-axis direction through the support beam 10, and connected to the T-shaped anchor point B in the Y-axis direction through the folded elastic beam, it achieves coupling in the sensitive direction (Y-axis direction) under the sensitive mode, thereby realizing energy transfer. The connecting rod of the sensitive coupling structure 8 here is rectangular, but in practical applications, it can be modified and optimized according to different structural forms to achieve the best performance.

[0049] In this configuration, the two Coriolis mass blocks 9 of the two suspension units are respectively placed on one side of the two driving mass blocks 3. The total mass of the Coriolis mass blocks 9 is 0.31 mg. They are connected to the driving mass blocks 3 in the Y-axis direction through two upper and lower folded elastic beams. Each driving mass block 3 has a "C"-shaped semi-enclosed structure, which gives the connection between the driving mass block 3 and the Coriolis mass block 9 in the X-axis direction a large stiffness, so as to achieve better cooperation with the Coriolis mass block 9. At the same time, each group of Coriolis mass blocks 9 also has a "C"-shaped semi-enclosed structure, with its "C"-shaped open end facing the sensitive mass block 6, and is connected to the sensitive mass block 6 in the X-axis direction through folded elastic beams. Therefore, the connection between the sensitive mass block 6 and the Coriolis mass block 9 in the Y-axis direction has a large stiffness.

[0050] Under the motion in the X-direction of the driving mode, the Coriolis mass 9 and the sensitive mass 6 are decoupled through a folded elastic beam in the X-axis direction; similarly, under the motion in the Y-direction of the sensitive mode, the Coriolis mass and the driving mass are decoupled through a folded elastic beam in the Y-axis direction. In the two sets of suspension units, the two sensitive masses 6 are coupled in the X-axis direction through the sensitive coupling structure 8, the two driving masses 3 are coupled in the X-axis direction through the driving coupling structure 5, the sensitive mass 6 and the Coriolis mass 9 are coupled in the X-axis direction through a folded elastic structure, and the driving mass 3 and the Coriolis mass 9 are coupled in the Y-axis direction through a folded elastic structure. Furthermore, the two sets of suspension units are symmetrical about the X and Y axes, thus forming a symmetrical fully coupled structure.

[0051] Working principle

[0052] Under the action of the driving electrode 4 placed in the X-axis direction, the MEMS tuning fork gyroscope is in the driving mode. Since the driving mass block 3 and the Coriolis mass block 9 are rigidly connected in the X-axis direction, the two driving mass blocks 3 drive the Coriolis mass block 9 to vibrate in the X-axis direction. Since the sensitive mass block 6 has a large stiffness in the X-direction, the sensitive mass block 6 remains stationary. Figure 3 A schematic diagram of the driving mode, such as Figure 3As shown, in the driving mode, the driving electrode 4 excites the driving mass block 3 and the Coriolis mass block 9 to periodically alternate towards or opposite directions along the X-axis. Since the two symmetrical driving mass blocks 3 on the left and right sides are connected by the driving coupling structure 5, the motion of the coupling mechanism formed by the combination of the two driving mass blocks 3 and the Coriolis mass block 9 is consistent. At the same time, due to the presence of the folded elastic beam in the X-axis direction, the Coriolis mass block 9 and the sensitive mass block 6 are decoupled, and the sensitive mass block 6 is at rest. Under the action of the angular velocity in the Z-axis direction, the MEMS tuning fork gyroscope is in the sensitive mode. The driving mass block 3 and the Coriolis mass block 9 are simultaneously subjected to the Coriolis force along the Y-axis direction. However, due to the presence of the folded elastic beam in the Y-axis direction, the Coriolis mass block and the driving mass block 3 are decoupled, and the driving mass block 3 is at rest. The sensitive mass block 6 and the Coriolis mass block 9 are rigidly connected in the Y-axis direction to form a coupling mechanism. Therefore, the Coriolis mass block 9 drives the sensitive mass block 6 to vibrate in the Y-direction. The magnitude of the input angular velocity Ω can be derived from the capacitance change of the sensitive electrode 7.

[0053] A schematic diagram of the sensitive modes is shown below. Figure 4 As shown, when the system has an angular velocity input, under the action of the Coriolis force, the Coriolis mass block 9 drives the sensitive mass block 6 to periodically alternate in opposite directions or in the same direction along the Y-axis. Since the sensitive mass blocks 6 are connected by the sensitive coupling structure 8, the motion of the two sensitive mass blocks 6 is highly consistent.

[0054] Figure 5 These are simulation results of the modal frequencies of a fully coupled MEMS tuning fork gyroscope drive, such as... Figure 5 As shown, the characteristic frequency value fd of the driving mode is 11268Hz; Figure 6 These are simulation results of the sensitive modal frequencies of a fully coupled MEMS tuning fork gyroscope, such as... Figure 6 As shown, the characteristic frequency value fs of the sensitive mode is 11558Hz, and the frequency difference Δf between the two modes is:

[0055] Δf=|fd-fs|=|11268-11558|=290Hz

[0056] Furthermore, COMSOL Multiphysics was used to simulate the displacement response at the characteristic frequency. In the driving mode (fd = 11268 Hz), the displacement response of the driving mass block 3 of the left suspension unit was 7.91 μm, and the displacement response of the driving mass block 3 of the right suspension unit was 7.91 μm. In the sensitive mode (fs = 11558 Hz), the displacement response of the sensitive mass block 6 of the left suspension unit was 4.20 nm, and the displacement response of the sensitive mass block 6 of the right suspension unit was 4.20 nm. At this time, the displacement response of the driving mass block 3 of both suspension units was basically the same as that of the sensitive mass block 6.

[0057] Figure 7 These are simulation results of the driving modal frequencies of an incompletely coupled MEMS tuning fork gyroscope. Figure 8 The results are from the simulation of the sensitive mode frequency of the incompletely coupled MEMS tuning fork gyroscope. It can be seen that the frequency difference Δf between the two modes is 491Hz.

[0058] Furthermore, the displacement response at the characteristic frequency was simulated using COMSOL Multiphysics 6.0 simulation software. In the driving mode (fd = 11259 Hz), the displacement response of the driving mass 3 of the left suspension unit was 7.73 μm, and the displacement response of the driving mass 3 of the right suspension unit was 7.73 μm. In the sensitive mode (fd = 10768 Hz), the displacement response of the sensitive mass 6 of the left suspension unit was 5.68 nm, and the displacement response of the sensitive mass 6 of the right suspension unit was 6.41 nm. At this time, the displacement responses of the driving mass 3 of the two suspension units were basically the same, but the displacement responses of the sensitive mass 6 were significantly different.

[0059] Comparing the simulation results using COMSOL Multiphysics 6.0 and COMSOL Multiphysics simulation, when a fully coupled structure is used, regardless of whether the stiffness of the two resonators is the same, the amplitudes of the two resonators are similar due to the effect of the coupling stiffness. Therefore, the MEMS tuning fork gyroscope in this embodiment has a certain anti-interference capability and increases the output signal of the system. According to the calculated frequency difference results of 290Hz and 491Hz, it can be seen that the sensitive mass block 6 of the fully coupled MEMS tuning fork gyroscope in this invention is coupled through a sensitive coupling structure. Compared with the conventional scheme with an incomplete coupling structure, the frequency difference is smaller, so that the two resonant frequencies of the tuning fork gyroscope are kept consistent. In this embodiment, the frequency difference is reduced by 70%.

[0060] In summary, the fully coupled MEMS tuning fork gyroscope provided by this invention achieves full coupling by setting a sensitive coupling structure to couple two sensitive units together and by coupling the driving mass blocks together through a driving coupling structure. This fully coupled MEMS tuning fork gyroscope ensures that the natural frequencies of the sensitive units of the two levitation units remain consistent in the same mode, and reduces the frequency difference between the driving mode and the sensitive mode. Consequently, the displacement response values ​​of the two sets of levitation structures become closer, resulting in better suppression of interference signals and avoiding a decrease in gyroscope sensitivity caused by manufacturing errors. Therefore, this structure has a certain robustness to manufacturing errors.

[0061] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A fully coupled MEMS tuning fork gyroscope, characterized in that, include: Anchor point structure, on which a suspension structure is suspended (1); The suspension structure (1) includes two suspension units symmetrically arranged in the X-axis direction. Each suspension unit includes a driving mass block (3), a Coriolis mass block (9), and a sensitive mass block (6). The driving mass block (3) and the Coriolis mass block (9) are provided with notches on the same side. The Coriolis mass block (9) is matched and disposed in the notch of the driving mass block (3), and the side wall of the notch of the driving mass block (3) and the Coriolis mass block (9) are connected by an elastic beam. The sensitive mass block (6) is disposed in the notch of the Coriolis mass block (9), and the side wall of the notch of the Coriolis mass block (9) and the sensitive mass block (6) are connected by an elastic beam. The driving mass block (3) is provided with a driving electrode (4) on the side away from the notch, and the sensitive mass block (6) is provided with a plurality of sensitive electrodes (7). Among them, the two suspension units are symmetrically arranged about the end faces of the sensitive mass block (6) away from the driving mass block (3), and the opposite faces of the two sensitive mass blocks (6) are connected by a sensitive coupling structure (8), and the free ends of the two driving mass blocks (3) are connected by a driving coupling structure (5). Among them, the driving mass block (3), the driving coupling structure (5), and the Coriolis mass block (9) are all connected to the anchor point structure through elastic beams, and the sensitive mass block (6) is connected to the anchor point structure through elastic beams in the direction of the center of symmetry.

2. The fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The anchor point structure includes: Base; Two T-shaped anchor points (B) are symmetrically arranged about the center of the base. The T-shaped anchor points (B) are connected by a horizontal plate and a vertical plate, and the two T-shaped anchor points (B) are arranged opposite to each other. Four raised anchor points (A) are evenly distributed around the center of the base; And two connecting anchor points (C), which are set at the center of the driving mass block (3) and connected to the driving mass block (3) through elastic beams.

3. The fully coupled MEMS tuning fork gyroscope according to claim 2, characterized in that, The end faces of the notches of the driving mass block (3) and the Coriolis mass block (9) are connected together by the same elastic beam to the short side of the horizontal plate of the T-shaped anchor point (B). The end face of the sensitive mass block (6) perpendicular to the center line of symmetry of the two suspension units is connected to the long side of the horizontal plate of the T-shaped anchor point (B) by the elastic beam.

4. A fully coupled MEMS tuning fork gyroscope according to claim 2, characterized in that, The sensitive coupling structure (8) includes a connecting rod (12), the two ends of which are connected to the corresponding sensitive mass block (6) through a support beam (10), and the connecting rod is connected to the vertical plate of the T-shaped anchor point (B) through a folded elastic beam (11).

5. A fully coupled MEMS tuning fork gyroscope according to claim 2, characterized in that, The driving coupling structure (5) and the side of the horizontal plate of the T-shaped anchor point (B) away from the vertical plate are connected by an elastic beam, and the two ends of the driving coupling structure (5) are connected to the corresponding protruding anchor point (A) by an elastic beam.

6. The fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The sensitive coupling structure (8) is connected at the center of the opposite surfaces of the two sensitive mass blocks (6).

7. A fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The driving mass block (3) has multiple driving electrodes (4) on the side facing away from the notch.

8. A fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The driving mass block (3) has a comb-tooth structure on the side opposite to the notch.

9. A fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The elastic beam is a folded elastic beam with a U-shaped folding structure.

10. A fully coupled MEMS tuning fork gyroscope according to claim 1, characterized in that, The two first free ends of the two driving mass blocks (3) in the same direction are connected by a first driving coupling structure, and the two second free ends of the two driving mass blocks (3) in the same direction are connected by a second driving coupling structure.

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