Double-drive gantry beam adjustment method, structure and application

Abstract

The application discloses a gantry double-drive beam adjusting method, structure and application, and belongs to the technical field of gantry mechanisms. The gantry double-drive beam adjusting method comprises at least one reference surface, which is a reference for the adjustment of the gantry double-drive beam. The distance between the two ends of the gantry double-drive beam and the reference surface is detected and obtained in real time, and the difference between the two in the direction perpendicular to the beam is calculated as Δ. According to the distance information, the two ends of the gantry double-drive beam are adjusted up and down by the respective side drives until Δ is 0. Through the above setting, the gantry double-drive beam can be automatically and conveniently adjusted with high precision. The application uses the reference of at least one reference surface to measure the distance between the two ends of the beam in real time, calculates the difference between the two in the direction perpendicular to the beam, gradually adjusts the difference to 0, and conveniently and accurately adjusts the level. The application further compensates for the displacement of the two ends of the beam during the adjustment process, so that the leveling can be smoothly adjusted.

Description

Technical Field

[0001] This invention relates to the field of gantry mechanism technology, and in particular to the method, structure and application of crossbeam adjustment for dual-drive gantry systems. Background Technology

[0002] A gantry structure, simply put, is a frame-like structure consisting of a crossbeam connecting two legs and securing them to the ground. It is a common structure in motion platforms. This structure allows actuators (such as pick-and-place mechanisms, cameras, etc.) mounted on the upper axis to approach the workpiece from above.

[0003] Different architectures of gantry structures: Typically, gantry structures include single-drive single-feedback, dual-drive single-feedback, dual-drive dual-feedback, and the rarely used single-drive dual-feedback.

[0004] The selection of a gantry architecture typically requires comprehensive consideration of factors such as performance requirements, manufacturing costs, and technical difficulty. When low cost and moderate performance are prioritized, a single-drive, single-reflector gantry architecture can be chosen, as seen in some 3D printers. When high performance is required, a dual-drive, single-reflector or even dual-drive, dual-reflector architecture should be selected, as seen in equipment related to the semiconductor industry. Regarding linear dual-drive gantry systems: A linear dual-drive gantry system consists of an XY-axis linear module and a Z-axis linear module, with a marble platform as its base, offering high assembly precision and strong stability. It is commonly used in experimental research on precision machining, high-precision instruments, and the design and manufacturing of linear dual-drive gantry platforms. In semiconductor wafer inspection equipment, laser processing equipment, and SMT fields, the application of direct-drive gantry platforms and large-span gantry platforms is becoming increasingly widespread. Most of these gantry platforms use linear motors or rotary servos for drive and control.

[0005] Advantages of the linear dual-drive gantry system: 1. High repeatability. 2. The platform uses high-performance drives with high response frequency, fast reaction speed, powerful functions, and strong stability. 3. The platform combines zero-backlash direct drive technology, resulting in a simple mechanism and no mechanical transmission errors. 4. The linear motor dual-drive structure improves assembly accuracy, utilizing the high precision of linear motors to achieve excellent synchronization, combined with the high rigidity of the marble platform to ensure assembly accuracy.

[0006] Currently, the ease and accuracy of adjusting the parallelism of the crossbeam in the gantry dual-drive system are not ideal. In particular, the deformation of the crossbeam during vertical linear motion adjustment cannot be corrected, and when the deformation becomes large, it causes interference, making adjustment impossible. Summary of the Invention

[0007] To address the shortcomings of current gantry mechanisms in terms of the ease and accuracy of beam parallelism adjustment, this invention proposes a method, structure, and application for beam adjustment in a dual-drive gantry system.

[0008] The technical solution adopted in this invention is:

[0009] Methods for adjusting the crossbeam of a gantry dual-drive system, including:

[0010] At least one reference plane is provided, which serves as a reference for adjusting the crossbeam of the gantry dual-drive system, and the distance between the reference planes is predetermined.

[0011] The distances between the two ends of the crossbeam of the gantry dual drive and the reference plane are detected and obtained in real time, and the difference between the two in the direction perpendicular to the crossbeam is calculated as Δ.

[0012] Based on the above distance information, the two ends of the crossbeam of the gantry dual-drive system are adjusted up and down by their respective side drives until Δ is 0;

[0013] During this adjustment process, the displacement between the two fixed ends of the crossbeam is compensated, including rigid displacement and / or deformation displacement, so that the crossbeam of the gantry double drive is leveled.

[0014] During operation, the crossbeam of the gantry double-drive system, under the condition of a pre-determined reference surface,

[0015] Preferably, the error is controlled within ±5mm during the process of adjusting Δ to 0.

[0016] Preferably, when Δ is adjusted to 0, the middle part of the crossbeam is in a pre-arched state, which is convenient to counteract the deformation caused by the load installed on the crossbeam.

[0017] Preferably, one end of the crossbeam experiences angular and vertical displacement, while the other end experiences angular, vertical, and axial displacement. This axial displacement is used to compensate for the axial deformation displacement that occurs during the vertical movement of both ends of the crossbeam.

[0018] Preferably, the end of the crossbeam that experiences angular and vertical displacement is connected to one drive of the gantry dual-drive system via a fixed shaft;

[0019] The end of the beam that experiences angular, vertical, and axial displacement is connected to the other drive of the gantry dual-drive system via an eccentric shaft.

[0020] Preferably, the distance between the two ends of the crossbeam of the gantry dual drive and the reference plane is detected in real time by a number of laser ranging sensors, and the distance is the weighted average of the number of laser ranging sensors.

[0021] Preferably, a linear change is used during the adjustment of Δ to 0.

[0022] A gantry dual-drive beam adjustment structure includes two vertical drives, an eccentric shaft connector, a fixed shaft connector, a frame, several ranging units, and a control unit.

[0023] Two vertical drives are located on both sides of the frame and are set perpendicular to the frame; the two ends of the crossbeam are respectively connected to the two vertical drives one by one through eccentric shaft connectors and fixed shaft connectors;

[0024] Several ranging units are divided into two groups, with at least one ranging unit in each group; the two groups of ranging units are respectively set at both ends of the corresponding crossbeams on both sides of the frame, and the ranging starting point of several ranging units is located on a reference surface on the frame, and the ranging ending point of the ranging units is located on the consistent ranging surface at both ends of the crossbeams.

[0025] The control unit connects to the ranging unit and two vertical drives; it receives the distance information from the feedback, performs adjustment calculations, and controls the two vertical drives to adjust the crossbeam.

[0026] Preferably, the eccentric shaft connector includes an eccentric shaft and a U-shaped fixing seat; the eccentric shaft has an eccentric shaft section in the middle and fixed shaft ends at both ends; the axis of the fixed shaft end is not collinear with the axis of the eccentric shaft section, the fixed shaft end is hinged in a groove on one side of the U-shaped fixing seat, and a vertical drive is fixedly connected to the other side of the U-shaped fixing seat; one end of the crossbeam has an eccentric shaft hole adapted to the eccentric shaft section; the eccentric shaft section and the eccentric shaft hole of the crossbeam cooperate, so that one end of the crossbeam is connected to the vertical drive through the eccentric shaft connector; in some embodiments, a spacer ring is installed on the eccentric shaft section in the eccentric shaft hole of the crossbeam for smoothing and compensating for displacement; in some embodiments, a retaining ring is installed on the fixed shaft end between the U-shaped fixing seat and the crossbeam for further smoothing and compensating for displacement.

[0027] This invention also proposes a crossbeam adjustment structure based on a gantry dual-drive system, applicable to the crossbeam adjustment of a coating machine.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. This invention provides a method, structure and application for adjusting the crossbeam of a gantry dual-drive system; the adjustment method facilitates automated, convenient and high-precision leveling of the crossbeam of the gantry dual-drive system. This invention utilizes at least one reference plane to measure the distance between the two ends of the crossbeam in real time, calculates the difference between the two ends in the direction perpendicular to the crossbeam, and gradually adjusts the difference to 0, thus facilitating convenient and precise leveling.

[0030] 2. The present invention further compensates for the axial deformation displacement of the crossbeam during the adjustment process, so that the crossbeam can be elastically deformed while the vertical displacement (perpendicular to the direction of the crossbeam) at both ends of the crossbeam is adjusted. In this way, the leveling can be adjusted smoothly and interference that may be caused when the adjustment range is too large is avoided. Attached Figure Description

[0031] The present invention will now be described in detail with reference to the embodiments and accompanying drawings, wherein:

[0032] Figure 1 This is a flowchart of a method for adjusting the crossbeam of a gantry dual-drive system;

[0033] Figure 2 This is a schematic diagram of crossbeam adjustment for a gantry dual-drive system.

[0034] Figure 3 This is a schematic diagram of a crossbeam adjustment structure for a gantry dual-drive system. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0036] like Figure 1 As shown, a method for adjusting the crossbeam of a gantry dual-drive system includes the following steps:

[0037] S1. At least one reference plane, which serves as a reference for adjusting the crossbeam of the gantry dual drive, and the distance between the reference planes is predetermined;

[0038] S2. Real-time detection and acquisition of the distances from both ends of the crossbeam of the gantry dual drive to the reference plane, and calculation of the difference between the two in the direction perpendicular to the crossbeam (direction z) as Δ;

[0039] S3. Based on the above distance information, the two ends of the crossbeam of the gantry dual drive are adjusted up and down by their respective side drives until Δ is 0.

[0040] S4. During this adjustment process, the displacement between the two fixed ends of the crossbeam is compensated, so that the crossbeam of the gantry double drive is leveled.

[0041] In some embodiments, the displacement is a rigid displacement;

[0042] In some embodiments, the displacement is a deformation displacement;

[0043] In some embodiments, the displacement includes rigid displacement and deformation displacement;

[0044] In some embodiments, when Δ is adjusted to 0, the middle part of the crossbeam is in a pre-cambered state, which facilitates the offsetting of deformation caused by the load installed on the crossbeam; the height of the pre-camber is calculated based on the load size, crossbeam cross-sectional dimensions, length, and stiffness.

[0045] In some embodiments, Δ is adjusted to 0 using a linear change. Furthermore, in some embodiments, the error is controlled within ±5mm during the adjustment of Δ to 0. In some embodiments, angular displacement can occur at both ends of the crossbeam; in some embodiments, one end of the crossbeam experiences angular and vertical displacement, while the other end experiences angular, vertical, and axial displacement. This axial displacement is used to compensate for the axial deformation displacement that occurs during the vertical movement of both ends of the crossbeam. In some embodiments, the end of the crossbeam experiencing angular and vertical displacement is connected to one drive of the gantry dual-drive system via a fixed shaft; the other end of the crossbeam experiencing angular, vertical, and axial displacement is connected to the other drive of the gantry dual-drive system via an eccentric shaft.

[0046] In some embodiments, the distance between the two ends of the crossbeam of the gantry dual drive and the reference plane is detected in real time by a number of laser ranging sensors, and the distance is the weighted average of the number of laser ranging sensors.

[0047] like Figure 2-3 A gantry dual-drive beam adjustment structure includes two vertical drives 101, an eccentric shaft connector 102, a fixed shaft connector 103, a frame 200, several ranging units 300, and a control unit (not shown).

[0048] Two vertical drives 101 are located on both sides of the frame 200 and are arranged perpendicular to the base of the frame 200, i.e., arranged along the z direction; the two ends of the crossbeam 100 are respectively connected to the two vertical drives 101 one by one through the eccentric shaft connector 102 and the fixed shaft connector 103.

[0049] Several ranging units 300 are divided into even groups, with each group having at least one ranging unit 300; in some embodiments, the ranging unit is a laser ranging sensor.

[0050] Even-numbered ranging units are evenly distributed on both sides of the frame 200, corresponding to the two ends of the crossbeam 100. At least one reference plane RP is selected on the frame 200, and the ranging starting points of several ranging units 300 at both ends of the crossbeam are all located on a reference plane RP on the frame. The two ends of the crossbeam are respectively provided with a ranging endpoint surface region 104 and a ranging endpoint surface region 205, which are coplanar 105. The ranging endpoint of the ranging unit 300 is located on either the ranging endpoint surface region 104 or the ranging endpoint surface region 205.

[0051] In some embodiments, the reference plane RP is provided with reference planes RP1 and RP2. The distance between reference planes RP1 and RP2 is measured in advance. The ranging units 300 are distributed on reference planes RP1 and RP2. Four ranging units are provided at both ends of the crossbeam and are evenly distributed on reference planes RP1 and RP2. The ranging units are weighted and averaged to obtain D11, D12, D21 and D22, where Δ1 = D11 - D12 and Δ2 = D21 - D22. The weighted average of Δ1 and Δ2 is used to obtain Δ.

[0052] The control unit connects to the ranging unit and two vertical drives; it receives the distance information from the feedback, performs adjustment calculations, and controls the two vertical drives to adjust the crossbeam.

[0053] In some embodiments, the eccentric shaft connector 102 includes an eccentric shaft 1023 and a U-shaped fixing seat 1021; the eccentric shaft 1023 has an eccentric shaft section 1024 in the middle and fixed shaft ends 1025 at both ends; the axis of the fixed shaft end 1025 is not collinear with the axis of the eccentric shaft section 1024, the fixed shaft end 1025 is hinged in a groove 1022 on one side of the U-shaped fixing seat 1021, the other side of the U-shaped fixing seat 1021 is fixedly connected to a vertical drive 101, one end of the crossbeam 100 has an eccentric shaft hole 10 adapted to the eccentric shaft section 1024; the eccentric shaft section 1024 cooperates with the eccentric shaft hole 10 of the crossbeam 100, so that one end of the crossbeam 100 is connected to the vertical drive 101 through the eccentric shaft connector 102;

[0054] In some embodiments, a spacer ring 10241 is installed on the eccentric shaft section 1024 inside the eccentric shaft hole 10 of the crossbeam 100 for smoothing and compensating for displacement.

[0055] In some embodiments, a retaining ring 10251 is installed on the fixed shaft end 1025 between the U-shaped fixing seat 1021 and the crossbeam 100, which is further used to smooth and compensate for displacement.

[0056] In some embodiments, the fixed shaft connector 103 includes a fixed shaft 1031 and a U-shaped fixing seat; the end of the crossbeam has a fixed shaft hole 20, and the end of the crossbeam is hinged to the U-shaped fixing seat through the cooperation of the fixed shaft 1031 and the fixed shaft hole 20, and is connected to the vertical drive 101 through the U-shaped fixing seat.

[0057] In some embodiments, the end of the crossbeam is provided with a plurality of positioning pins 10311 corresponding to the fixed shaft 1031 for positioning and fixing the fixed shaft 1031 and the end of the crossbeam 100.

[0058] In some embodiments, the U-shaped mounting base has a flange (not shown in the figure) on its side, and is fixedly connected to the vertical drive by bolts passing through the flange;

[0059] In some embodiments, a coating head (not shown) is mounted on the crossbeam of the gantry dual-drive crossbeam adjustment structure for coating operations.

[0060] In the description of this specification, the use of terms such as "Embodiment 1," "this embodiment," or "in one embodiment" indicates that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example; moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in one or more embodiments or examples.

[0061] In the description of this specification, the terms "connection," "installation," "fixing," "setting," and "having" are interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0062] In the description of this specification, relational terms such as “first” and “second” are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0063] The above description of the embodiments is intended to enable those skilled in the art to understand and apply the technology of this invention. Those skilled in the art can easily make various modifications to these examples and apply the general principles described herein to other embodiments without creative effort. Therefore, this invention is not limited to the above embodiments. Modifications in the following situations should be within the scope of protection of this invention: ① New technical solutions implemented based on the technical solution of this invention and combined with existing common knowledge, where the technical effects of the new technical solution do not exceed the technical effects of this invention; ② Equivalent substitutions of some features of the technical solution of this invention using known technology, resulting in the same technical effects as those of this invention; ③ Extendable technical solutions based on the technical solution of this invention, where the substantive content of the extended technical solution does not exceed the technical solution of this invention; ④ Equivalent transformations made using the content of this specification and drawings, directly or indirectly applied to other related technical fields.

Claims

1. A method of adjusting the crossbeam of a gantry double drive, characterized in that, Comprising a reference surface, which is a reference for the adjustment of the cross beam of the double-drive gantry; the distance between the two ends of the cross beam of the double-drive gantry and the reference surface is detected and obtained in real time, and the difference between the two in the direction perpendicular to the cross beam is calculated as Δ; or at least two reference surfaces, which are references for the adjustment of the cross beam of the double-drive gantry; the distance between the reference surfaces is determined in advance; the distance between the two ends of the cross beam of the double-drive gantry and any reference surface is detected and obtained in real time, and the difference between the two in the direction perpendicular to the cross beam is calculated, and Δ is obtained by weighted average of the difference corresponding to each reference surface; According to the above distance information, the two ends of the cross beam of the double-drive gantry are adjusted up and down by the respective side drives until Δ is 0; during the adjustment process, the displacement between the two fixed ends of the cross beam is compensated, which includes rigid displacement and / or deformation displacement, so that the cross beam of the double-drive gantry is leveled; One end of the cross beam has angular displacement and vertical displacement, and the other end has angular displacement, vertical displacement and axial displacement, which is used to compensate the axial deformation displacement occurring during the up and down movement of the two ends of the cross beam; the end of the cross beam with angular displacement and vertical displacement is connected with one drive of the double-drive gantry by a fixed shaft connector; the end of the cross beam with angular displacement, vertical displacement and axial displacement is connected with the other drive of the double-drive gantry by an eccentric shaft connector.

2. The gantry dual-drive beam adjustment method of claim 1, wherein, During the process of adjusting Δ to 0, the error is controlled within ±5mm.

3. The gantry dual-drive beam adjustment method of claim 1, wherein, When Δ is adjusted to 0, the middle part of the cross beam is in a pre-arch state.

4. The gantry dual-drive beam adjustment method of claim 1, wherein, The distance between the two ends of the cross beam of the double-drive gantry and the reference surface is detected in real time by a plurality of laser ranging sensors, and the distance is the weighted average of the plurality of laser ranging sensors.

5. The gantry dual-drive beam adjustment method of claim 1, wherein, During the process of adjusting Δ to 0, linear change is adopted.

6. A gantry double-drive beam adjustment structure, characterized by, Comprising two vertical drives, eccentric shaft connectors, fixed shaft connectors, a rack, a plurality of ranging units and a control part; The two vertical drives are located on both sides of the rack and are perpendicular to the rack; the two ends of the cross beam are connected with the two vertical drives one by one through the eccentric shaft connectors and the fixed shaft connectors; the end of the cross beam with angular displacement and vertical displacement is connected with one vertical drive of the double-drive gantry by the fixed shaft connector; the end of the cross beam with angular displacement, vertical displacement and axial displacement is connected with the other vertical drive of the double-drive gantry by the eccentric shaft connector; The plurality of ranging units are divided into two groups, each group having at least one ranging unit; the two groups of ranging units are respectively arranged on both sides of the rack corresponding to the two ends of the cross beam, and the ranging start points of the plurality of ranging units are all on a reference surface on the rack, and the ranging end points of the ranging units are located on the consistent ranging surface of the two ends of the cross beam; The control part is connected with the ranging units and the two vertical drives; receives the feedback distance information, performs adjustment calculation, and controls the two vertical drives to adjust the cross beam.

7. The double-driven beam adjusting structure of the gantry type according to claim 6, characterized in that, The eccentric shaft connecting piece comprises an eccentric shaft and a U-shaped fixing seat; the eccentric shaft has an eccentric shaft section in the middle part and fixed shaft ends at both ends; the axis of the fixed shaft end is not collinear with the axis of the eccentric shaft section; the fixed shaft end is hinged in the groove on one side of the U-shaped fixing seat; the other side of the U-shaped fixing seat is fixedly connected with a vertical drive; one end of the cross beam has an eccentric shaft hole matched with the eccentric shaft section; the eccentric shaft section cooperates with the eccentric shaft hole of the cross beam, so that one end of the cross beam is connected with the vertical drive through the eccentric shaft connecting piece; a spacing ring is installed on the eccentric shaft section in the eccentric shaft hole; a clamping ring is installed on the fixed shaft end between the U-shaped fixing seat and the cross beam.

8. A double-drive gantry cross beam adjusting structure according to claim 6 or 7, applied to the cross beam adjustment of a coating machine.

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