Four-channel RF power distributor

Abstract

The present invention discloses a four-channel RF power distributor, including four branches, each branch having a high-frequency confluence unit, a low-frequency filtering unit, a resonant combination unit and an output unit, the high-frequency confluence unit is connected to the low-frequency filtering unit and the output unit, one branch of the low-frequency filtering unit is connected to the low-frequency input board, and the other branch is connected to the resonant combination unit through a capacitor C1, and the resonant combination unit is also connected to the output unit. The high-frequency confluence unit includes a high-frequency input terminal and a first high-frequency confluence plate; the low-frequency filtering unit includes an L1 inductor, a low-frequency confluence plate and an L4 magnetic ring inductor; the resonant combination unit includes a second high-frequency confluence plate, a resonant filtering circuit and a resonant trap circuit; the output unit includes a relay and an L3 inductor. The distributor can evenly distribute one high-frequency RF power supply and one low-frequency RF power supply to four outputs, greatly saving production and manufacturing costs.

Description

Technical Field

[0001] The invention relates to the technical field of radio frequency power supply in plasma chemical vapor deposition, and in particular to a radio frequency power distributor with four channels. Background Art

[0002] In the semiconductor production process, plasma chemical vapor deposition equipment PECVD is a kind of equipment that uses radio frequency power to ionize gaseous substances of certain components to form plasma, promote chemical reactions, and deposit thin film materials. In this process, the power size and distribution uniformity of the radio frequency power determine the quality of the thin film material.

[0003] In existing plasma chemical vapor deposition equipment, the output of one high-frequency power supply and one low-frequency power supply can only be provided to one shower head. To meet the requirements of chemical deposition process for four wafers at the same time, four high-frequency power supplies and four low-frequency power supplies need to work at the same time. This design method increases the raw material cost of plasma chemical vapor deposition equipment PECVD, and also occupies a lot of space inside the equipment, making the appearance of the equipment huge. Summary of the invention

[0004] The purpose of the present invention is to provide a four-channel RF power distributor, which connects one high-frequency power supply and one low-frequency power supply to the distributor, and then acts on four shower heads through the output of the distributor, so that four wafers can be supplied with chemical vapor deposition process at the same time.

[0005] To achieve the above-mentioned purpose, the technical solution of the present application is: a four-channel RF power distributor, including four branches, each branch having a high-frequency confluence unit, a low-frequency filtering unit, a resonance combination unit and an output unit, the high-frequency confluence unit is connected to the low-frequency filtering unit and the output unit, one branch of the low-frequency filtering unit is connected to the low-frequency input board, and the other branch is connected to the resonance combination unit through capacitor C1, and the resonance combination unit is also connected to the output unit.

[0006] In a preferred embodiment, the high-frequency busbar unit includes a high-frequency input terminal and a first high-frequency busbar, and the high-frequency input terminal is connected to the first high-frequency busbar via a capacitor C1.

[0007] In a preferred manner, the low-frequency filtering unit includes an L1 inductor, a low-frequency busbar and an L4 magnetic ring inductor. One end of the L4 magnetic ring inductor is connected to the low-frequency input board, and the other end is connected to the low-frequency busbar. The low-frequency busbar is provided with an L1 inductor, and the L1 inductor is connected to the first high-frequency busbar after being connected in parallel with two capacitors C2.

[0008] Preferably, the resonant combination unit includes a second high-frequency busbar, a resonant filter circuit and a resonant trap circuit, wherein one end of the second high-frequency busbar is connected to the low-frequency busbar via capacitor C1, and the other end is connected to the resonant trap circuit via the resonant filter circuit.

[0009] In a preferred embodiment, the resonant filter circuit includes an inductor L2 and capacitors C2 and C3 connected in parallel with the inductor L2; the resonant trap circuit includes an inductor L2 and a plurality of capacitors C4 connected in parallel with the inductor L2.

[0010] In a preferred embodiment, the output unit includes a relay and an L3 inductor, the NC normally closed contact of the relay is the output point, and the output point is connected to the output terminal through the L3 inductor; the COM point of the relay is connected to the first high-frequency busbar, and the NO normally open contact of the relay is connected to multiple capacitors C4 arranged in parallel.

[0011] In a preferred manner, the high-frequency input terminal is located on one side of the anti-static bottom plate, and the first high-frequency busbar, capacitor C1, low-frequency filter unit, output unit and resonance combination unit are located on the other side of the anti-static bottom plate.

[0012] In a preferred manner, the low-frequency input board is connected to the first high-frequency busbar via threaded columns and insulating columns in sequence. The low-frequency input board and the first high-frequency busbar are located in the middle of the anti-static bottom plate and are common parts.

[0013] In a preferred manner, the second high-frequency busbar is distributed at the four corners of the anti-static base plate, one end of the L2 inductor is connected to the second high-frequency busbar, and the other end is connected to the busbar, which is also connected to the Z-shaped part. The Z-shaped part carries multiple capacitors C4 arranged in parallel and is connected to the relay, which is also connected to the conductive base plate, and the conductive base plate is respectively connected to the first high-frequency busbar and the low-frequency busbar.

[0014] In a preferred embodiment, an insulating base for fixing the L4 magnetic ring inductor is provided in the middle of the four sides of the antistatic bottom plate, and an insulating plate is provided on the insulating base, and the insulating plate is connected to the external shielding cover.

[0015] The present invention adopts the above technical solution, and can achieve the following technical effects:

[0016] 1) It has a four-channel RF power distributor, which can evenly distribute one high-frequency RF power and one low-frequency RF power to four outputs, ensuring balanced and stable power of the four outputs; greatly saving production costs.

[0017] 2) Through the filtering circuit in the distributor, it is ensured that only signals within a specific frequency range are distributed to the corresponding target sprinkler heads, thereby achieving frequency selective distribution.

[0018] 3) During the chemical deposition process of the wafer, the filter circuit can be used to suppress interference signals and ensure that the power distributed to the target shower head is clean, thereby improving the process cleanliness.

[0019] 4) The four-channel RF power distributor can be used to improve power quality, reduce interference, achieve frequency selective distribution, and protect target sprinkler heads, thereby ensuring the effective distribution and transmission of RF power. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A top view of a four-channel RF power distributor;

[0021] Figure 2 It is a schematic diagram of the structure of a four-channel RF power distributor;

[0022] Figure 3 It is a side view of a four-channel RF power distributor;

[0023] Figure 4 It is an end view of a four-channel RF power distributor;

[0024] Figure 5 This is a circuit connection schematic diagram of a four-channel RF power distributor.

[0025] Explanation of the serial numbers in the figure: 1. Anti-static base plate; 2. Insulating column; 3. Threaded column; 4. Low-frequency input board; 5. Second high-frequency busbar; 6. Insulating plate; 7. Insulating base; 8. Conductive base plate; 9. Busbar; 10. Shielding cover; 11. L1 inductor; 12. L2 inductor; 13. L3 inductor; 14. Relay; 15. High-frequency input terminal; 16. L4 magnetic ring inductor; 17. Capacitor C4; 18. Z-shaped piece; 19. Capacitor C1; 20. First high-frequency busbar. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] like Figure 1-5 As shown, this embodiment provides a four-channel RF power distributor, including four branches, each branch has a high-frequency confluence unit, a low-frequency filtering unit, a resonance combination unit and an output unit, and the above units are all installed on an anti-static bottom plate.

[0028] The high-frequency bus unit includes a high-frequency input terminal and a first high-frequency bus plate. The high-frequency input terminal is connected to the first high-frequency bus plate through multiple capacitors C1. The capacitor C1 can be set to 3 and the size can be 120pf; the first high-frequency bus plate is a common part; the high-frequency input terminal is located on one side of the anti-static base plate, and the first high-frequency bus plate and capacitor C1 are located on the other side of the anti-static base plate.

[0029] The low-frequency filter unit includes an L1 inductor, a low-frequency busbar and an L4 magnetic ring inductor. One end of the L4 magnetic ring inductor is connected to the low-frequency input board, and the other end is connected to the low-frequency busbar. The low-frequency busbar is provided with an L1 inductor, which is connected to the first high-frequency busbar after being connected in parallel with two capacitors C2. The low-frequency input board is a common part, and its four sides are connected to the first high-frequency busbar in sequence through threaded columns and insulating columns; the middle position of the four sides of the anti-static bottom plate is provided with an insulating base for fixing the L4 magnetic ring inductor, and an insulating plate is provided on the insulating base, and the insulating plate is connected to the external shielding cover. The L4 magnetic ring inductor connects the low-frequency power supply to the low-frequency busbar, and then connects to the first high-frequency busbar through a set of filtering circuits. This filtering circuit can be composed of two 68pf capacitors and a 1uh inductor.

[0030] The resonant combination unit includes a second high-frequency busbar, a resonant filter circuit and a resonant trap circuit. One end of the second high-frequency busbar is connected to the low-frequency busbar through a capacitor C1, and the other end is connected to the resonant trap circuit through a resonant filter circuit; the resonant filter circuit includes an L2 inductor and capacitors C2 and C3 connected in parallel with the L2 inductor; the resonant trap circuit includes an L2 inductor and multiple capacitors C4 connected in parallel with the L2 inductor, and the number of the capacitors C4 can be 5; the second high-frequency busbar is distributed at the four corners of the anti-static bottom plate, one end of the L2 inductor is connected to the second high-frequency busbar, and the other end is connected to the busbar copper bar, which is also connected to a Z-shaped piece, and the Z-shaped piece carries multiple capacitors C4 set in parallel, and the Z-shaped piece is connected to a relay, which is also connected to a conductive bottom plate, and the first high-frequency busbar is connected to the low-frequency busbar through this conductive bottom plate. When a certain route does not need to be output, the relay acts to disconnect the output of the route, and the remaining current returns through the resonant combination unit.

[0031] The output unit includes a relay and an L3 inductor, and the L3 inductor can be 1.1uh. The NC normally closed contact of the relay is the output point, and the output point is connected to the output terminal through the L3 inductor; the COM point of the relay is connected to the first high-frequency busbar, and the high-frequency current and the low-frequency current are combined on the first high-frequency busbar and output through the normally closed contact of the relay; when a certain output is not needed, the relay is activated to disconnect the output; the NO normally open contact of the relay is connected to a plurality of capacitors C4 arranged in parallel.

[0032] The inductance value, capacitance value and frequency in this application are obtained as follows:

[0033]

[0034]

[0035]

[0036] The above-mentioned L is the inductance value; C is the capacitance value; f is the frequency, unit Hz; the inductance values ​​and capacitance values ​​in the present invention can be: L1=1μH; L2=0.6μH; L3=1.1μH; L4=300μH; C1=120pF; C2=68pF; C3=100pF; C4=2200pF.

[0037] The above-mentioned four-channel RF power distributor can evenly distribute one high-frequency RF power supply and one low-frequency RF power supply to four outputs, thereby ensuring balanced and stable power of the four output power supplies.

[0038] It should be noted that, in this application, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0039] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A four-channel RF power distributor, characterized in that: It includes four branches, each branch has a high-frequency converging unit, a low-frequency filtering unit, a resonant combination unit and an output unit, the high-frequency converging unit is connected to the low-frequency filtering unit and the output unit, one branch of the low-frequency filtering unit is connected to the low-frequency input board, and the other branch is connected to the resonant combination unit through a capacitor C1, and the resonant combination unit is also connected to the output unit; The high-frequency busbar unit comprises a high-frequency input terminal and a first high-frequency busbar, wherein the high-frequency input terminal is connected to the first high-frequency busbar via a capacitor C1; The low-frequency filter unit includes an L1 inductor, a low-frequency busbar and an L4 magnetic ring inductor. One end of the L4 magnetic ring inductor is connected to the low-frequency input board, and the other end is connected to the low-frequency busbar. The low-frequency busbar is provided with an L1 inductor, which is connected to the first high-frequency busbar after being connected in parallel with two capacitors C2. The resonant combination unit includes a second high-frequency busbar, a resonant filter circuit and a resonant trap circuit, wherein one end of the second high-frequency busbar is connected to the low-frequency busbar via a capacitor C1, and the other end is connected to the resonant trap circuit via a resonant filter circuit; The output unit includes a relay and an L3 inductor, wherein the NC normally closed contact of the relay is an output point, which is connected to the output terminal through the L3 inductor; the COM point of the relay is connected to the first high-frequency busbar, and the NO normally open contact of the relay is connected to a plurality of capacitors C4 arranged in parallel.

2. The four-channel RF power distributor according to claim 1, characterized in that: The resonant filter circuit includes an inductor L2 and capacitors C2 and C3 connected in parallel with the inductor L2; the resonant trap circuit includes an inductor L2 and a plurality of capacitors C4 connected in parallel with the inductor L2.

3. The four-channel RF power distributor according to claim 1, characterized in that: The high-frequency input terminal is located on one side of the anti-static bottom plate, and the first high-frequency busbar, capacitor C1, low-frequency filter unit, output unit and resonance combination unit are located on the other side of the anti-static bottom plate.

4. The four-channel RF power distributor according to claim 3, characterized in that: The low-frequency input board is connected to the first high-frequency busbar through threaded columns and insulating columns in turn. The low-frequency input board and the first high-frequency busbar are located in the middle of the anti-static bottom plate and are common parts.

5. The four-channel RF power distributor according to claim 3, characterized in that: The second high-frequency busbar is distributed at the four corners of the anti-static base plate. One end of the L2 inductor is connected to the second high-frequency busbar, and the other end is connected to the busbar copper bar. The busbar copper bar is also connected to the Z-shaped part. The Z-shaped part carries multiple capacitors C4 arranged in parallel and is connected to the relay. The relay is also connected to the conductive base plate, and the conductive base plate is respectively connected to the first high-frequency busbar and the low-frequency busbar.

6. The four-channel RF power distributor according to claim 3, characterized in that: An insulating base for fixing the L4 magnetic ring inductor is provided at the middle of the four sides of the anti-static bottom plate, and an insulating plate is provided on the insulating base, and the insulating plate is connected to the external shielding cover.

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