A method, apparatus, device, and medium for grinding multiple types of products
By acquiring the preset grinding rate and batch coefficient, calculating the undetermined grinding rate and updating the batch coefficient, the grinding process for multiple types of products is optimized, solving the production efficiency and cost problems when switching product types in the existing technology, and achieving higher grinding accuracy and efficiency.
Patent Information
- Application Number
- CN202311482451.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-11-08
- Publication Date
- 2026-02-24
- Estimated Expiration
- 2043-11-08
AI Technical Summary
Existing technologies require trial grinding adjustments when grinding multiple types of products, which leads to decreased production efficiency and increased production costs. Furthermore, the technology often results in under-grinding or over-grinding.
By obtaining the preset grinding rate and batch coefficient of the modified grinding product type, the undetermined grinding rate is calculated, the first piece grinding plan is determined, and the batch coefficient is updated based on sample feedback information. Batch grinding is then carried out using APC feedback to optimize the grinding process.
It improved the accuracy of trial grinding when changing product types, reduced the number of trial grindings, lowered the probability of rework or defective parts, improved production efficiency, and reduced costs.
Smart Images

Figure CN117260527B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of grinding manufacturing, and in particular to a grinding method, apparatus, equipment and media for grinding various types of products. Background Technology
[0002] In the traditional industrial manufacturing field, grinding technology is a very important category. With the development of the semiconductor industry, grinding technology has become increasingly important in the face of various semiconductor wafer surface treatments.
[0003] In existing technologies, when processing large-scale grinding of a single product, APC (Automatic Process Control) is typically used to control the grinding time. Specifically, the equipment repeatedly measures the grinding results each time through a preset program, compares them with the expected results, and continuously adjusts the grinding program to gradually bring the ground product closer to the ideal state. However, when dealing with multiple product types, trial grinding is usually performed according to a preset fixed grinding time. But the problem is that due to the lifespan of grinding consumables (grinding pads, grinding pad dressers, grinding heads, etc.) and the influence of production batches of grinding consumables, the preset fixed grinding time is often inaccurate. It usually requires several trial grindings to adjust the relevant parameters to a reasonable range, which greatly slows down production efficiency. Furthermore, the wafers that are tested often need to be reworked due to insufficient grinding or become defective due to over-grinding, which further increases production costs.
[0004] Therefore, how to solve the problem of decreased production efficiency and increased production costs caused by trial grinding during the switching process of grinding product types in the existing technology is an urgent problem to be solved by those skilled in the art. Summary of the Invention
[0005] The purpose of this invention is to provide a grinding method, apparatus, equipment, and medium for multiple types of products, in order to solve the problem in the prior art that after changing the type of product to be ground, trial grinding is required, but the accuracy of trial grinding is low, often requiring rework or producing defective pieces, which reduces production efficiency and increases production costs.
[0006] To solve the above-mentioned technical problems, the present invention provides a grinding method for multiple types of products, comprising:
[0007] When the grinding product type is changed, the preset grinding rate and the corresponding batch coefficient corresponding to the changed grinding product type are obtained; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0008] The desired grinding rate is obtained based on the preset grinding rate and the batch coefficient;
[0009] The first piece grinding plan is determined based on the undetermined grinding rate;
[0010] The first piece grinding plan is sent to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan;
[0011] Receive sample grinding feedback information from the grinding equipment;
[0012] The correction coefficient is determined based on the grinding feedback information;
[0013] The batch coefficients are updated using the correction coefficients.
[0014] Batch grinding is performed using APC feedback based on the updated batch coefficient and the preset grinding rate.
[0015] Optionally, in the grinding method for the multiple types of products, obtaining the preset grinding rate includes:
[0016] Obtain the current lifespan information of the grinding consumable;
[0017] Based on the lifespan information and the type of grinding product, a corresponding preset grinding rate is determined.
[0018] Optionally, in the grinding method for multiple product types, determining the correction coefficient based on the grinding feedback information includes:
[0019] The actual grinding rate of the modified grinding product type is determined based on the grinding feedback information.
[0020] Find the ratio of the actual grinding rate of the modified grinding product type to the corresponding undetermined grinding rate, and use it as a correction factor.
[0021] Optionally, the grinding method for the multiple types of products further includes:
[0022] When the grinding product type is changed more than or equal to two times, determine whether the correction coefficient corresponding to the latest batch coefficient is closer to 1 than the correction coefficient corresponding to the previous batch coefficient.
[0023] An alarm is generated when the correction factor corresponding to the latest batch factor is not closer to 1 than the correction factor corresponding to the previous batch factor.
[0024] Optionally, in the grinding method for multiple types of products, after obtaining the batch coefficient, the method further includes:
[0025] Determine whether the absolute value of the difference between the batch coefficient and 1 is less than a first threshold;
[0026] When the absolute value of the difference between the batch coefficient and 1 is less than the first threshold, batch grinding is performed using APC feedback based on the batch coefficient and the preset grinding rate.
[0027] Optionally, in the grinding method for the multi-type products, the first threshold ranges from 0.01 to 0.03, including endpoint values.
[0028] A grinding apparatus for multiple types of products, comprising:
[0029] The acquisition module is used to acquire the preset grinding rate and the corresponding batch coefficient of the changed grinding product type when the grinding product type is changed; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0030] The undetermined rate module is used to obtain the undetermined grinding rate based on the preset grinding rate and the batch coefficient;
[0031] The planning module is used to determine the first piece grinding plan based on the undetermined grinding rate;
[0032] A grinding execution module is used to send the first piece grinding plan to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan;
[0033] A feedback receiving module is used to receive sample grinding feedback information from the grinding equipment;
[0034] The correction module is used to determine the correction coefficient based on the grinding feedback information;
[0035] The update module is used to update the batch coefficients using the correction coefficients;
[0036] The batch grinding module is used to perform batch grinding based on the updated batch coefficient and the preset grinding rate, using APC feedback.
[0037] Optionally, in the grinding apparatus for the multiple types of products, the correction module includes:
[0038] The actual rate unit is used to determine the actual grinding rate of the modified grinding product type based on the grinding feedback information.
[0039] The rate correction unit is used to calculate the ratio of the actual grinding rate of the modified grinding product type to the corresponding unknown grinding rate, which serves as a correction coefficient.
[0040] A grinding device for multiple types of products, comprising:
[0041] Memory, used to store computer programs;
[0042] A processor for executing the computer program to implement the steps of the grinding method for multiple types of products as described above.
[0043] A computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps of the grinding method for multiple types of products as described above.
[0044] The present invention provides a grinding method for multiple product types, which involves obtaining a preset grinding rate and a corresponding batch coefficient for the changed grinding product type when the grinding product type is changed; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable; obtaining a pending grinding rate based on the preset grinding rate and the batch coefficient; determining a first-piece grinding plan based on the pending grinding rate; sending the first-piece grinding plan to the grinding equipment, causing the grinding equipment to grind according to the first-piece grinding plan; receiving sample grinding feedback information from the grinding equipment; determining a correction coefficient based on the grinding feedback information; updating the batch coefficient using the correction coefficient; and performing batch grinding using APC feedback based on the updated batch coefficient and the preset grinding rate.
[0045] This invention, by setting a batch coefficient, records the ratio of the actual grinding rate under the current grinding consumable to the preset theoretical grinding rate. This significantly improves the accuracy of initial trial grinding when changing grinding product types, reduces the number of trial grindings, and the accuracy increases with each change in grinding product type, thereby improving grinding production efficiency. Simultaneously, it greatly reduces the probability of rework or defective wafers during trial grinding, thus lowering production costs. This invention also provides a grinding apparatus, equipment, and media for multiple types of products, possessing the aforementioned beneficial effects. Attached Figure Description
[0046] To more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0047] Figure 1 A flowchart illustrating a specific embodiment of the grinding method for multiple types of products provided by the present invention;
[0048] Figure 2 A flowchart illustrating another specific embodiment of the grinding method for multiple types of products provided by the present invention;
[0049] Figure 3 A flowchart illustrating another specific embodiment of the grinding method for multiple types of products provided by the present invention;
[0050] Figure 4 This is a schematic diagram of a specific embodiment of the grinding device for multiple types of products provided by the present invention.
[0051] The diagram includes: 100 - Acquisition module, 200 - Pending rate module, 300 - Planning module, 400 - Grinding execution module, 500 - Feedback receiving module, 600 - Correction module, 700 - Update module, and 800 - Batch grinding module. Detailed Implementation
[0052] To enable those skilled in the art to better understand the present invention, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0053] The core of this invention is to provide a grinding method for multiple types of products, and a flowchart of one specific embodiment is shown below. Figure 1 As shown, this is referred to as Specific Implementation Method One, which includes:
[0054] S101: When the grinding product type is changed, obtain the preset grinding rate and the corresponding batch coefficient corresponding to the changed grinding product type; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0055] The product type refers to products of different kinds, batches or requirements, such as wafers made of two different materials, or wafers made of the same material but with different grinding requirements.
[0056] The preset grinding coefficient is usually an ideal value recorded based on theoretical calculations. Obviously, due to differences in the actual working conditions of the grinding machine or grinding consumables, the batch coefficient will also change. The initial batch coefficient may be a preset value, or it may be a value calculated based on the ratio of the actual grinding rate of the grinding product to the corresponding preset grinding rate when a set of grinding consumables is used for the first time. Of course, if new grinding consumables are replaced, the original batch coefficient will no longer be accurate, and a new batch coefficient needs to be established.
[0057] S102: Based on the preset grinding rate and the batch coefficient, the grinding rate to be determined is obtained.
[0058] That is, the undetermined grinding rate is the product of the preset grinding rate and the batch coefficient. Theoretically, the batch coefficient reflects the actual grinding rate and the theoretical preset grinding rate. However, in actual use, the grinding consumables are constantly being worn, and the batch coefficient is also a coefficient that changes at any time. Therefore, the undetermined grinding rate obtained in this step is not the actual grinding rate.
[0059] S103: Determine the first piece grinding plan based on the undetermined grinding rate.
[0060] In this step, the first piece grinding plan is formulated based on the undetermined grinding rate. That is, the grinding plan for the first piece of the new type of grinding product after the grinding product type is changed. For example, if the new type needs to be ground down 30 mm and the corresponding undetermined grinding rate is 5 mm per minute, then a 6-minute grinding plan can be specified.
[0061] S104: The first piece grinding plan is sent to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan.
[0062] In this step, grinding is performed according to the plan in step S103.
[0063] S105: Receive sample grinding feedback information from the grinding equipment.
[0064] The sample grinding feedback information refers to the information obtained by the grinding equipment before and after the sample is ground, such as the actual thickness of the sample being ground. It is necessary to first record the thickness of the sample before grinding, the thickness of the sample after grinding, and the grinding time, etc.
[0065] S106: Determine the correction coefficient based on the grinding feedback information.
[0066] In a preferred embodiment of this step, determining the correction coefficient based on the grinding feedback information includes:
[0067] A1: Determine the actual grinding rate of the modified grinding product type based on the grinding feedback information.
[0068] Following the previous text, once the actual thickness of the sample being ground and the grinding time are known, the actual grinding rate can be calculated.
[0069] A2: Calculate the ratio of the actual grinding rate of the modified grinding product type to the corresponding undetermined grinding rate, and use it as a correction factor.
[0070] In this preferred embodiment, the ratio of the actual grinding rate to the corresponding desired grinding rate is used as a correction coefficient. This correction coefficient can also reflect the inadequacy of the batch coefficient. The correction coefficient is a correction to the batch coefficient, and the correction methods are different. Taking the correction coefficient of this preferred embodiment as an example, if the preset grinding rate is 5 mm per minute and the preset batch coefficient is 0.8, then the corresponding desired grinding rate is 4 mm per minute. If the actual grinding rate determined after actual grinding is 3, then the correction coefficient is 3 / 4 = 0.75.
[0071] S107: Update the batch coefficients using the correction coefficients.
[0072] As mentioned earlier, if the correction coefficient is the ratio of the actual grinding rate to the corresponding undetermined grinding rate, then updating the batch coefficient in this step is to multiply the correction coefficient by the batch coefficient. Following the previous example, the updated batch coefficient is 0.75 * 0.8 = 0.6.
[0073] Of course, there are other types of correction coefficients, and the corresponding update methods for the batch coefficients are also different. For example, if the batch coefficient is corrected in steps with a step size of 0.01, then in step S106, if the grinding feedback information indicates that the actual thickness removed is more than the first piece grinding plan, it means that the grinding is faster than expected and the batch coefficient needs to be adjusted upward. In this step S107, the batch coefficient is adjusted upward by 0.01 to complete the update of the batch coefficient, and vice versa. This will not be elaborated further here.
[0074] S108: Based on the updated batch coefficient and the preset grinding rate, perform batch grinding using APC feedback.
[0075] In APC feedback batch grinding, the grinding quality should have exceeded the acceptable lower limit, and then the grinding accuracy and quality can be improved by utilizing APC's self-feedback conditions.
[0076] As a preferred embodiment, it also includes:
[0077] B1: When the grinding product type is changed more than or equal to two times, determine whether the correction coefficient corresponding to the latest batch coefficient is closer to 1 than the correction coefficient corresponding to the previous batch coefficient.
[0078] B2: An alarm message is generated when the correction factor corresponding to the latest batch factor is not closer to 1 than the correction factor corresponding to the previous batch factor.
[0079] Since a correction coefficient is obtained each time the grinding product is changed, the batch parameters should become increasingly accurate without replacing the grinding machine or grinding consumables. In other words, the correction coefficient will make the batch coefficient smaller and smaller each time, that is, the correction coefficient will get closer and closer to 1. In this preferred embodiment, after two changes to the grinding product type (that is, obtaining two or more correction coefficients), the two most recently determined correction coefficients are compared. If the two correction coefficients get closer and closer to 1, it means that the program is running normally. Otherwise, it means that the program or grinding machine is abnormal and an alarm needs to be issued. The decision to stop is made based on the specific situation.
[0080] The alarm information may be a light alarm, an sound alarm, or a sound and light warning signal, or an alarm information sent to the staff's personal terminal.
[0081] The present invention provides a grinding method for multiple product types, which involves obtaining a preset grinding rate and a corresponding batch coefficient for the changed grinding product type when the grinding product type is changed; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable; obtaining a pending grinding rate based on the preset grinding rate and the batch coefficient; determining a first-piece grinding plan based on the pending grinding rate; sending the first-piece grinding plan to the grinding equipment, causing the grinding equipment to grind according to the first-piece grinding plan; receiving sample grinding feedback information from the grinding equipment; determining a correction coefficient based on the grinding feedback information; updating the batch coefficient using the correction coefficient; and performing batch grinding using APC feedback based on the updated batch coefficient and the preset grinding rate. This invention, by setting the batch coefficient, records the ratio of the actual grinding rate under the current grinding consumable to the preset theoretical grinding rate, which greatly improves the accuracy of the initial trial grinding when changing the type of grinding product, reduces the number of trial grindings, and the accuracy will become higher and higher as the batch coefficient is continuously updated and corrected after each change of grinding product type, thereby improving the grinding production efficiency and greatly reducing the probability of rework or defective pieces during trial grinding, which also reduces production costs.
[0082] Based on Specific Implementation Method 1, the acquisition of the preset grinding rate is further improved to obtain Specific Implementation Method 2, the corresponding flowchart of which is shown below. Figure 2 As shown, it includes:
[0083] S201: When changing the grinding product type, obtain the batch coefficient of the changed grinding product type and the lifespan information of the current grinding consumable; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0084] S202: Determine the corresponding preset grinding rate based on the lifespan information and the type of grinding product.
[0085] In this preferred embodiment, there are grinding rates for each type of grinding product corresponding to the lifespan information. Please see Table 1 below, which is a table of preset grinding rates and preset grinding times for grinding product type A.
[0086] Table 1
[0087] Abrasive consumable lifespan (pieces) Preset grinding rate (angtzes per second) Preset grinding time (seconds) 100-200 55 18.2 200-300 60 16.7 300-400 65 15.4 400-500 70 14.3 500-600 75 13.3
[0088] S203: Based on the preset grinding rate and the batch coefficient, the grinding rate to be determined is obtained.
[0089] S204: Determine the first piece grinding plan based on the undetermined grinding rate.
[0090] S205: The first piece grinding plan is sent to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan.
[0091] S206: Receive sample grinding feedback information from the grinding equipment.
[0092] S207: Determine the correction coefficient based on the grinding feedback information.
[0093] S208: Update the batch coefficients using the correction coefficients.
[0094] S209: Based on the updated batch coefficient and the preset grinding rate, perform batch grinding using APC feedback.
[0095] The difference between this preferred embodiment and the specific embodiment described above is that, in this preferred embodiment, a corresponding preset grinding rate is set for each of the different life stages of the grinding consumable. This eliminates the influence of the grinding rate of the grinding consumable on the batch coefficient under different life stages, ensuring that the batch coefficient does not change with the life of the grinding consumable. Instead, it more objectively reflects the difference between the preset grinding rate and the actual grinding rate, so that the batch coefficient maintains a good accuracy even after the grinding consumable is replaced, reducing the number of subsequent trial grindings and improving production efficiency.
[0096] Furthermore, after multiple changes to the grinding product types and multiple corrections to the batch coefficient, the batch coefficient has reached a relatively stable and accurate value. At this point, if grinding consumables are to be replaced, the preset grinding rate corresponding to all grinding product types can be updated based on the current batch coefficient. This will make the updated preset grinding rate closer to the actual grinding rate under the new grinding consumables, further reducing the number of subsequent trial grindings and improving production efficiency.
[0097] Based on Implementation Method 1, a further judgment step is added to obtain Implementation Method 3, the corresponding flowchart of which is shown below. Figure 3 As shown, it includes:
[0098] S301: When the grinding product type is changed, obtain the preset grinding rate and the corresponding batch coefficient corresponding to the changed grinding product type; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0099] S302: Determine whether the absolute value of the difference between the batch coefficient and 1 is less than the first threshold.
[0100] S303: When the absolute value of the difference between the batch coefficient and 1 is less than the first threshold, batch grinding is performed using APC feedback based on the batch coefficient and the preset grinding rate.
[0101] The difference between this specific implementation and the above specific implementation is that this specific implementation adds a method to skip updating the batch coefficient. The remaining steps are the same as those in the above specific implementation and will not be described in detail here.
[0102] In this preferred embodiment, after obtaining the batch coefficient, the difference between the batch coefficient and 1 is judged. As mentioned above, the batch coefficient is the ratio of the actual grinding rate to the corresponding preset grinding rate. Therefore, after several calibrations following changes in the grinding product type, the batch coefficient will reach a value that is relatively close to 1. At this point, the accuracy requirement for directly starting grinding has been met, and there is no need to generate a pending grinding rate and correction coefficient for correction. Batch grinding can be performed directly through APC feedback, thereby saving the time of determining the first piece grinding plan, i.e., conducting trial grinding, avoiding idle grinding machines, and greatly improving production efficiency.
[0103] Of course, in step S301 of this specific embodiment, after obtaining the preset grinding rate and the corresponding batch coefficient, it is determined whether the absolute value of the difference between the batch coefficient and 1 is less than the first threshold. In other specific embodiments, the corresponding batch coefficient can be obtained first, and then the determination can be made. After determining that the absolute value of the difference between the batch coefficient and 1 is equal to or greater than the first threshold, the preset grinding rate can be obtained again.
[0104] In a preferred embodiment, the first threshold ranges from 0.01 to 0.03, including endpoint values such as any one of 0.010, 0.023, or 0.030. The above range represents the optimal value after extensive theoretical calculations and practical testing. Within this range, the maximum value of the batch coefficient that allows direct entry into APC feedback batch grinding can be 1.030, and the minimum value can be 0.970. Of course, adjustments can be made according to actual conditions, and this invention does not limit this.
[0105] The grinding apparatus for multiple types of products provided in the embodiments of the present invention will be described below. The grinding apparatus for multiple types of products described below can be referred to in correspondence with the grinding method for multiple types of products described above.
[0106] Figure 4 This is a structural block diagram of a grinding apparatus for multiple types of products provided in an embodiment of the present invention, with reference to... Figure 4 Grinding devices for multiple product types may include:
[0107] The acquisition module is used to acquire the preset grinding rate and the corresponding batch coefficient of the changed grinding product type when the grinding product type is changed; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable.
[0108] The undetermined rate module is used to obtain the undetermined grinding rate based on the preset grinding rate and the batch coefficient;
[0109] The planning module is used to determine the first piece grinding plan based on the undetermined grinding rate;
[0110] A grinding execution module is used to send the first piece grinding plan to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan;
[0111] A feedback receiving module is used to receive sample grinding feedback information from the grinding equipment;
[0112] The correction module is used to determine the correction coefficient based on the grinding feedback information;
[0113] The update module is used to update the batch coefficients using the correction coefficients;
[0114] The batch grinding module is used to perform batch grinding based on the updated batch coefficient and the preset grinding rate, using APC feedback.
[0115] In a preferred embodiment, the acquisition module includes:
[0116] The lifespan acquisition unit is used to acquire the lifespan information of the current grinding consumable;
[0117] The lifespan matching unit is used to determine the corresponding preset grinding rate based on the lifespan information and the type of grinding product.
[0118] In a preferred embodiment, the correction module includes:
[0119] The actual rate unit is used to determine the actual grinding rate of the modified grinding product type based on the grinding feedback information.
[0120] The rate correction unit is used to calculate the ratio of the actual grinding rate of the modified grinding product type to the corresponding unknown grinding rate, which serves as a correction coefficient.
[0121] In a preferred embodiment, the acquisition module includes:
[0122] The correction judgment unit is used to determine whether the correction coefficient corresponding to the latest batch coefficient is closer to 1 than the correction coefficient corresponding to the previous batch coefficient when the number of times the grinding product type is changed is greater than or equal to two.
[0123] The alarm module generates an alarm message when the correction factor corresponding to the latest batch factor is not closer to 1 than the correction factor corresponding to the previous batch factor.
[0124] In a preferred embodiment, the acquisition module further includes:
[0125] A threshold judgment unit is used to determine whether the absolute value of the difference between the batch coefficient and 1 is less than a first threshold.
[0126] The skip unit is used to perform batch grinding based on the batch coefficient and the preset grinding rate when the absolute value of the difference between the batch coefficient and 1 is less than a first threshold.
[0127] The multi-type product grinding apparatus provided by this invention includes: an acquisition module for acquiring a preset grinding rate and a corresponding batch coefficient for a changed product type; the batch coefficient being the ratio of the actual grinding rate of the same product type to the corresponding preset grinding rate under the current grinding consumables; a pending rate module for obtaining a pending grinding rate based on the preset grinding rate and the batch coefficient; a planning module for determining a first-piece grinding plan based on the pending grinding rate; a grinding execution module for sending the first-piece grinding plan to the grinding equipment, causing the grinding equipment to grind according to the first-piece grinding plan; a feedback receiving module for receiving sample grinding feedback information from the grinding equipment; a correction module for determining a correction coefficient based on the grinding feedback information; an update module for updating the batch coefficient using the correction coefficient; and a batch grinding module for performing batch grinding using APC feedback based on the updated batch coefficient and the preset grinding rate. This invention, by setting the batch coefficient, records the ratio of the actual grinding rate under the current grinding consumable to the preset theoretical grinding rate, which greatly improves the accuracy of the initial trial grinding when changing the type of grinding product, reduces the number of trial grindings, and the accuracy will become higher and higher as the batch coefficient is continuously updated and corrected after each change of grinding product type, thereby improving the grinding production efficiency and greatly reducing the probability of rework or defective pieces during trial grinding, which also reduces production costs.
[0128] The grinding apparatus for multiple types of products in this embodiment is used to implement the aforementioned grinding method for multiple types of products. Therefore, the specific implementation of the grinding apparatus for multiple types of products can be found in the embodiment section of the grinding method for multiple types of products above. For example, the acquisition module 100, the undetermined rate module 200, the planning module 300, the grinding execution module 400, the feedback receiving module 500, the correction module 600, the update module 700, and the batch grinding module 800 are respectively used to implement steps S101, S102, S103, S104, S105, S106, S107, and S108 in the above-mentioned grinding method for multiple types of products. Therefore, the specific implementation can be referred to the description of the corresponding embodiments, which will not be repeated here.
[0129] This invention also provides a grinding device for multiple types of products, comprising:
[0130] Memory, used to store computer programs;
[0131] A processor is configured to execute the computer program to implement the steps of the grinding method for multiple product types as described above. The grinding method for multiple product types provided by this invention involves: when changing the grinding product type, obtaining a preset grinding rate and a corresponding batch coefficient corresponding to the changed grinding product type; the batch coefficient being the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable; obtaining a pending grinding rate based on the preset grinding rate and the batch coefficient; determining a first-piece grinding plan based on the pending grinding rate; sending the first-piece grinding plan to a grinding device, causing the grinding device to grind according to the first-piece grinding plan; receiving sample grinding feedback information from the grinding device; determining a correction coefficient based on the grinding feedback information; updating the batch coefficient using the correction coefficient; and performing batch grinding using APC feedback based on the updated batch coefficient and the preset grinding rate. This invention, by setting the batch coefficient, records the ratio of the actual grinding rate under the current grinding consumable to the preset theoretical grinding rate, which greatly improves the accuracy of the initial trial grinding when changing the type of grinding product, reduces the number of trial grindings, and the accuracy will become higher and higher as the batch coefficient is continuously updated and corrected after each change of grinding product type, thereby improving the grinding production efficiency and greatly reducing the probability of rework or defective pieces during trial grinding, which also reduces production costs.
[0132] This invention also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the multi-type product grinding method described above. The multi-type product grinding method provided by this invention involves obtaining a preset grinding rate and a corresponding batch coefficient corresponding to the changed grinding product type when the grinding product type is changed; the batch coefficient is the ratio of the actual grinding rate of the same grinding product type to the corresponding preset grinding rate under the current grinding consumable; obtaining a pending grinding rate based on the preset grinding rate and the batch coefficient; determining a first-piece grinding plan based on the pending grinding rate; sending the first-piece grinding plan to a grinding device, causing the grinding device to grind according to the first-piece grinding plan; receiving sample grinding feedback information from the grinding device; determining a correction coefficient based on the grinding feedback information; updating the batch coefficient using the correction coefficient; and performing batch grinding using APC feedback based on the updated batch coefficient and the preset grinding rate. This invention, by setting the batch coefficient, records the ratio of the actual grinding rate under the current grinding consumable to the preset theoretical grinding rate, which greatly improves the accuracy of the initial trial grinding when changing the type of grinding product, reduces the number of trial grindings, and the accuracy will become higher and higher as the batch coefficient is continuously updated and corrected after each change of grinding product type, thereby improving the grinding production efficiency and greatly reducing the probability of rework or defective pieces during trial grinding, which also reduces production costs.
[0133] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to in the method section.
[0134] It should be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0135] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.
[0136] The steps of the methods or algorithms described in conjunction with the embodiments disclosed herein can be implemented directly by hardware, a software module executed by a processor, or a combination of both. The software module can be located in random access memory (RAM), main memory, read-only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, removable disk, CD-ROM, or any other form of storage medium known in the art.
[0137] The grinding methods, apparatus, equipment, and media for various types of products provided by this invention have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are merely for the purpose of helping to understand the methods and core ideas of this invention. It should be noted that those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this invention.
Claims
1. A grinding method for multiple types of products, characterized in that, include: When the grinding product type is changed, obtain the preset grinding rate and corresponding batch coefficient for the changed grinding product type; The batch coefficient is the ratio of the actual grinding rate of the same type of grinding product to the corresponding preset grinding rate under the current grinding consumables. The desired grinding rate is obtained based on the preset grinding rate and the batch coefficient; The first piece grinding plan is determined based on the undetermined grinding rate; The first piece grinding plan is sent to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan; Receive sample grinding feedback information from the grinding equipment; The correction coefficient is determined based on the grinding feedback information; The batch coefficients are updated using the correction coefficients. Batch grinding is performed using APC feedback based on the updated batch coefficient and the preset grinding rate. Determining the correction coefficient based on the grinding feedback information includes: The actual grinding rate of the modified grinding product type is determined based on the grinding feedback information. Find the ratio of the actual grinding rate of the modified grinding product type to the corresponding undetermined grinding rate, and use it as a correction factor; Also includes: When the grinding product type is changed more than or equal to two times, determine whether the correction coefficient corresponding to the latest batch coefficient is closer to 1 than the correction coefficient corresponding to the previous batch coefficient. An alarm is generated when the correction factor corresponding to the latest batch factor is not closer to 1 than the correction factor corresponding to the previous batch factor.
2. The grinding method for multiple types of products as described in claim 1, characterized in that, The acquisition of the preset grinding rate includes: Obtain the current lifespan information of the grinding consumable; Based on the lifespan information and the type of grinding product, a corresponding preset grinding rate is determined.
3. The grinding method for multiple types of products as described in claim 1, characterized in that, After obtaining the batch coefficient, the process also includes: Determine whether the absolute value of the difference between the batch coefficient and 1 is less than a first threshold; When the absolute value of the difference between the batch coefficient and 1 is less than the first threshold, batch grinding is performed using APC feedback based on the batch coefficient and the preset grinding rate.
4. The grinding method for multiple types of products as described in claim 3, characterized in that, The first threshold ranges from 0.01 to 0.03, including the endpoint values.
5. A grinding device for multiple types of products, characterized in that, include: The acquisition module is used to acquire the preset grinding rate and corresponding batch coefficient corresponding to the changed grinding product type when the grinding product type is changed. The batch coefficient is the ratio of the actual grinding rate of the same type of grinding product to the corresponding preset grinding rate under the current grinding consumables. The undetermined rate module is used to obtain the undetermined grinding rate based on the preset grinding rate and the batch coefficient; The planning module is used to determine the first piece grinding plan based on the undetermined grinding rate; A grinding execution module is used to send the first piece grinding plan to the grinding equipment, so that the grinding equipment grinds according to the first piece grinding plan; A feedback receiving module is used to receive sample grinding feedback information from the grinding equipment; The correction module is used to determine the correction coefficient based on the grinding feedback information; The update module is used to update the batch coefficients using the correction coefficients; The batch grinding module is used to perform batch grinding based on the updated batch coefficient and the preset grinding rate using APC feedback; The correction module includes: The actual rate unit is used to determine the actual grinding rate of the modified grinding product type based on the grinding feedback information. The rate correction unit is used to calculate the ratio of the actual grinding rate of the modified grinding product type to the corresponding unknown grinding rate, which serves as a correction coefficient. The acquisition module includes: The correction judgment unit is used to determine whether the correction coefficient corresponding to the latest batch coefficient is closer to 1 than the correction coefficient corresponding to the previous batch coefficient when the number of times the grinding product type is changed is greater than or equal to two. The alarm module generates an alarm message when the correction factor corresponding to the latest batch factor is not closer to 1 than the correction factor corresponding to the previous batch factor.
6. A grinding device for multiple types of products, characterized in that, include: Memory, used to store computer programs; A processor for executing the computer program to implement the steps of the grinding method for multiple types of products as described in any one of claims 1 to 4.
7. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the steps of the grinding method for multiple types of products as described in any one of claims 1 to 4.
Citation Information
Patent Citations
Fabrication method of shallow groove isolation structure and chemical mechanical grinding method and system
CN110071041A
Polishing method using dynamic feedback recipe
US20020102917A1