Suction cup jig

Abstract

The application discloses a suction cup jig, which comprises a suction cup and an adapter plate, the center of the adapter plate is provided with a central air hole for communicating with a suction hole of a rotary table, the top wall of the adapter plate is provided with an air passage groove for communicating with the central air hole, the suction cup is fixed on the upper side of the adapter plate, the top wall of the suction cup is provided with a plurality of ring grooves coaxial with the suction cup, the bottom wall of the ring groove is provided with a plurality of negative pressure holes for communicating with the air passage groove, and the jig further comprises a blocking piece for detachably blocking the negative pressure holes; in an assembled state, the negative pressure holes in the ring groove of the silicon ring are communicated with the air passage groove, the negative pressure holes in the remaining ring grooves are blocked by the blocking pieces respectively, one ring groove corresponds to one diameter of the silicon ring, when the silicon ring needs to be adsorbed and fixed, the silicon ring can be placed on the applicable ring groove, and the suction cup does not need to be replaced, compared with the traditional suction cup which needs to be replaced, the jig provided by the application is undoubtedly more convenient and fast, and is beneficial to saving replacement time, thereby providing production efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular, to a suction cup fixture. Background Technology

[0002] In the machining process of semiconductor silicon rings, the silicon rings need to be fixed on the turntable by the principle of negative pressure adsorption.

[0003] Traditional jigs mainly consist of a suction cup and an adapter plate. The suction cup is transferred to the turntable via the adapter plate. During processing, the suction cup holds the silicon ring in place, and then the turntable rotates the entire suction cup jig and silicon ring to perform the processing steps. Existing suction cup jigs are usually dedicated jigs, meaning that one jig can only be used for silicon rings of one diameter, which has a narrow range of applications. Therefore, when changing jigs to accommodate different silicon rings, both the adapter plate and the suction cup need to be replaced, which is quite time-consuming.

[0004] The invention patent application with publication number CN115890525A discloses a rotary table suction cup fixture. In this design, the suction cup is annular, with an annular groove on the top wall and a negative pressure hole on the bottom wall. The adapter plate has a main air passage. The adapter plate is fixed on the rotary table, and then the negative pressure hole is connected to the main air passage. However, when it is necessary to use silicon rings of different diameters, the suction cup still needs to be replaced. In addition, the main air passage is located inside the adapter plate, which is inconvenient for processing. The above solution still needs to be improved.

[0005] Therefore, how to design a fixture suitable for processing silicon rings of different diameters has become a technical problem that urgently needs to be solved by those in the field. Summary of the Invention

[0006] In order to solve at least one of the technical problems mentioned in the background art, the present invention aims to provide a suction cup fixture that solves the problem of needing to change the corresponding suction cup when applying silicon rings of different diameters, which is time-consuming.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] A suction cup fixture includes a suction cup and an adapter plate. The adapter plate has a central air hole for communicating with the air suction hole of a turntable. The top wall of the adapter plate has a ventilation groove communicating with the central air hole. The suction cup is fixed to the upper side of the adapter plate. The top wall of the suction cup has several annular grooves coaxial with the suction cup. The bottom wall of the annular grooves has several negative pressure holes communicating with the ventilation grooves. The fixture also includes a sealing element for detachably sealing the negative pressure holes. In the assembled state, the negative pressure holes in the annular grooves where the silicon ring is placed communicate with the ventilation grooves, and the negative pressure holes in the other annular grooves are sealed by the sealing element.

[0009] Furthermore, the suction cup is provided with a drainage mechanism for draining water accumulated in the annular groove. The drainage mechanism includes a drainage channel and a sealing mechanism for controlling the opening or closing of the drainage channel. One end of the drainage channel is connected to the bottom wall of the annular groove, and the other end is lower than the bottom wall of the annular groove and connected to the side wall of the suction cup.

[0010] Furthermore, the sealing mechanism includes a flared mouth, a sealing plate, a guide rod, and a spring. The flared mouth is located on the side wall of the suction cup, the guide rod is located inside the drainage channel and is slidably connected to the drainage channel, the sealing plate is located inside the flared mouth and is fixedly connected to the guide rod, the spring is sleeved on the guide rod, one end of the spring is fixedly connected to the inner wall of the drainage channel, and the other end of the spring is fixedly connected to the guide rod. In the assembled state, the spring is in its original length state, and a gap is left between the side wall of the sealing plate and the side wall of the flared mouth for water to drain.

[0011] Furthermore, each set of annular grooves has four negative pressure holes arranged in a circumferential array along the suction cup, and the negative pressure holes in two adjacent sets of annular grooves are arranged radially along the suction cup. The cross-section of the ventilation groove is cross-shaped, and the negative pressure holes are all connected to the ventilation groove.

[0012] Furthermore, a second sealing gasket is installed between the suction cup and the adapter plate, and the second sealing gasket is located on the outside of the vent groove.

[0013] Furthermore, the suction cup and the adapter plate are fixedly connected by a first positioning bolt. The suction cup is provided with a second positioning hole that runs vertically through it, and the adapter plate is provided with a first positioning hole. In the assembled state, the first positioning hole and the second positioning hole are aligned.

[0014] Furthermore, the top wall of the adapter plate is provided with a downwardly recessed countersunk hole. The adapter plate and the turntable are fixed by a second positioning bolt. In the assembled state, the end of the second positioning bolt is located in the countersunk hole, and the second positioning bolt is threadedly connected to the turntable.

[0015] Furthermore, the turntable is provided with several sets of T-slots arranged radially along the turntable and having an inverted T-shaped longitudinal section. The T-slots are distributed around the circumference of the turntable. Locking blocks are slidably connected in the T-slots. In the assembled state, the second positioning bolt is threadedly connected to the locking block, and the top wall of the locking block abuts against the top wall of the T-slot.

[0016] Furthermore, the bottom wall of the turntable is provided with a sliding groove arranged radially along the turntable, the sliding groove is connected to the T-slot, and the bottom wall of the locking block is fixed with a sliding rod extending downward through the sliding groove.

[0017] Furthermore, the sealing component includes a vent plug, with the vent plugs on the same annular groove fixed to the same rubber ring. In the assembled state, the vent plug is used to seal the negative pressure hole in the annular groove where the silicon ring is not placed, and the rubber ring is fastened in the annular groove, with the sidewall of the rubber ring abutting against the sidewall of the annular groove.

[0018] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention has multiple coaxial annular grooves on the suction cup, and then the suction cup is fixed on the adapter plate. One annular groove corresponds to a silicon ring of a certain diameter. When it is necessary to adsorb and fix the silicon ring, the silicon ring can be placed on the appropriate annular groove. The negative pressure holes in the other annular grooves are sealed with sealing parts, thereby enabling the rapid adsorption of silicon rings. When changing to adsorb silicon rings of different diameters, it is not necessary to change the suction cup. Compared with the traditional method of needing to change the suction cup, the fixture provided by this solution is undoubtedly more convenient and faster, which helps to save replacement time and thus improve production efficiency.

[0019] In this design, the ventilation slot is located on the top wall of the adapter plate. Compared to placing the main ventilation channel inside the adapter plate, this makes it easier to process the ventilation slot and reduces the processing difficulty of the adapter plate. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 This is a cross-sectional view of the present invention;

[0022] Figure 3 This is a schematic diagram of the suction cup mounting structure of the present invention;

[0023] Figure 4 This is a schematic diagram of the unfolded state of the present invention;

[0024] Figure 5 This is a schematic diagram of the suction cup at the first angle.

[0025] Figure 6 This is a schematic diagram of the suction cup at the second angle.

[0026] Figure 7 This is a schematic diagram of the adapter plate.

[0027] Figure 8 This is a schematic diagram of the turntable structure;

[0028] Figure 9 Diagram showing the first state of adapter plate installation;

[0029] Figure 10 Diagram showing the second state of adapter plate installation;

[0030] Figure 11 This is a schematic diagram of the structure of Embodiment 1 of the present invention;

[0031] Figure 12 This is a schematic diagram of the structure of Embodiment 2 of the present invention.

[0032] In the diagram: 1. Turntable; 11. Suction port; 12. T-slot; 13. Sliding groove; 14. First sealing groove; 15. First sealing gasket; 2. Adapter plate; 21. Vent groove; 22. Second sealing groove; 23. First positioning hole; 24. Countersunk hole; 25. Central air hole; 3. Suction cup; 31. Ring groove; 311. Negative pressure hole; 312. Drainage channel; 313. Trumpet mouth; 314. Sealing plate; 315. Guide rod; 316. Spring; 32. Second positioning hole; 33. Bolt hole; 34. Third sealing groove; 35. First positioning bolt; 36. Positioning groove; 4. Air hole plug; 41. Rubber ring; 42. Positioning flange; 5. Second sealing gasket; 6. Locking block; 61. Threaded hole; 7. Slide rod; 8. Second positioning bolt; 9. Air pipe. Detailed Implementation

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] This embodiment provides a suction cup fixture suitable for fixing silicon rings of different diameters, saving time for changing suction cups and improving the processing efficiency of silicon rings.

[0035] like Figure 1 As shown, the device includes a turntable 1, an adapter plate 2 is fixedly installed on the upper wall of the turntable 1, and a suction cup 3 is fixedly installed on the top wall of the adapter plate 2. The suction cup 3 is disc-shaped. In the assembled state, the suction cup 3, the adapter plate 2, and the turntable 1 are coaxially arranged.

[0036] like Figure 1 and Figure 2 As shown, the top wall of the suction cup 3 is provided with several downwardly recessed annular grooves 31, wherein several annular grooves 31 are coaxially arranged with the suction cup 3. During operation, the negative pressure formed by the annular grooves 31 adsorbs the silicon ring onto the suction cup 3.

[0037] In this embodiment, as Figure 2 and Figure 3As shown, the top wall of the adapter plate 2 is provided with a downwardly recessed ventilation groove 21, and the bottom wall of the ventilation groove 21 is provided with a central air hole 25 that penetrates the adapter plate 2 downward. The center of the top of the turntable 1 is provided with an air suction hole 11, which is connected to the central air hole 25. Specifically, an air pipe 9 is fixedly connected inside the air suction hole 11, and the end of the air pipe 9 is connected to a vacuum pump. The bottom wall of several annular grooves 31 is provided with negative pressure holes 311 that extend downward and penetrate the suction cup 3. The negative pressure holes 311 in the annular grooves 31 are all connected to the ventilation grooves 21 on the adapter plate 2. Several air hole plugs 4 are also provided to seal the negative pressure holes 311.

[0038] With the above setup, the vacuum pump operates, and the ventilation groove 21 is evacuated through the air pipe 9, the suction hole 11 and the central air hole 25. Since the negative pressure hole 311 on the ring groove 31 is connected to the ventilation groove 21, a negative pressure is formed inside the ring groove 31, which then adsorbs the silicon ring placed on the suction cup 3.

[0039] This solution changes the annular suction cup 3 in the prior art to a disc shape, and opens multiple concentric annular grooves 31 on the suction cup 3. Each annular groove 31 has a different diameter and is used to adsorb silicon rings of different diameters.

[0040] It should be noted in this embodiment that the number of annular grooves 31 can be determined according to the type of silicon ring diameter. In this embodiment, for example... Figure 5 As shown, the suction cup 3 has three sets of annular grooves 31.

[0041] During the process of fixing the silicon ring, the silicon ring is placed on the suction cup 3 and aligned with the corresponding size of the ring groove 31. At this time, the air hole plug 4 in the negative pressure hole 311 in the corresponding ring groove 31 is pulled out, and the air hole plug 4 is inserted into the negative pressure hole 311 of the other sets of ring grooves 31, thereby sealing the remaining air holes of the ventilation groove 21 to prevent air leakage.

[0042] Therefore, when different silicon rings need to be replaced, there is no need to replace the suction cup 3. It is only necessary to place the silicon ring on the corresponding size ring groove 31 and seal the other negative pressure holes 311. Compared with the existing technology of disassembling and replacing the suction cup 3, the suction cup 3 provided by this solution is more efficient, thereby improving production efficiency.

[0043] In order to improve the adsorption effect of the annular groove 31 on the silicon ring, in this embodiment, each annular groove 31 has four negative pressure holes 311 inside, which are evenly distributed along the circumference of the suction cup 3. The ventilation groove 21 performs air extraction on the annular groove 31 through the four negative pressure holes 311, thereby improving the air extraction efficiency of the annular groove 31. The even distribution of the negative pressure holes 311 can improve the stability of the adsorption of the silicon ring.

[0044] Since each annular groove 31 is provided with four negative pressure holes 311, in order to ensure that all the negative pressure holes 311 on the suction cup 3 are connected to the ventilation groove 21 and to reduce the area of ​​the ventilation groove 21, therefore, in this embodiment, as Figure 2 , Figure 6 as well as Figure 7 As shown, the negative pressure holes 311 on different annular grooves 31 are arranged along the radial direction of the suction cup 3 on two straight lines passing through the center of the suction cup 3. The ventilation groove 21 is arranged on the adapter plate 2 in a cross shape, so that the negative pressure holes 311 on the suction cup 3 are all connected to the ventilation groove 21. This can reduce the area of ​​the ventilation groove 21 and minimize the damage to the adapter plate 2. At this time, the vacuum pump can quickly evacuate the ventilation groove 21, thereby accelerating the adsorption efficiency of the silicon ring.

[0045] In this embodiment, as Figure 7 As shown, the ventilation groove 21 is set on the top wall of the adapter plate 2, which facilitates the cutting of the tool on the adapter plate 2. Compared with the prior art which sets the ventilation groove 21 inside the adapter plate 2, it is more convenient to produce the adapter plate 2 and can reduce the processing cost of the adapter plate 2.

[0046] When the silicon ring is adsorbed onto the suction cup 3, the advantage of using the vent plug 4 to seal the negative pressure holes 311 of the remaining ring grooves 31 is that, in addition to preventing air leakage from the ventilation groove 21, it also prevents external water from entering the ventilation groove 21 through the negative pressure holes 311 during the silicon ring processing, thereby reducing the impact of external water on negative pressure adsorption.

[0047] To enhance the sealing effect between the negative pressure hole 311 and the vent groove 21, in this embodiment, as follows: Figure 3 and Figure 4 As shown, a second sealing gasket 5 is installed between the top wall of the adapter plate 2 and the bottom wall of the suction cup 3. Specifically, the second sealing gasket 5 surrounds the outside of the ventilation groove 21. After the suction cup 3 and the adapter plate 2 are assembled, the second sealing gasket 5 is squeezed and deformed to prevent outside air from entering the ventilation groove 21 through the gap between the suction cup 3 and the adapter plate 2.

[0048] To achieve the installation of the second sealing gasket 5, in this embodiment, as follows: Figure 3 and Figure 7 As shown, the top wall of the adapter plate 2 is provided with a second sealing groove 22 located outside the ventilation groove 21. In the assembled state, the second sealing gasket 5 is placed in the second sealing groove 22, the side wall of the second sealing gasket 5 abuts against the side wall of the second sealing groove 22, and the top wall of the second sealing gasket 5 extends beyond the top wall of the adapter plate 2.

[0049] Because the negative pressure holes 311 on the suction cup 3 are arranged in two rows and the ventilation groove 21 is arranged in a cross shape, in order to facilitate the quick alignment of the negative pressure holes 311 with the ventilation groove 21 during the assembly process, in this embodiment, as shown... Figure 3 and Figure 6 As shown, the bottom wall of the suction cup 3 is provided with a third sealing groove 34 that is consistent with the shape of the second sealing gasket 5. During the assembly process, the center of the suction cup 3 is coaxial with the center of the adapter plate 2. Then, the suction cup 3 is slowly rotated so that the third sealing groove 34 is aligned with the second sealing gasket 5, and the second sealing gasket 5 is inserted into the third sealing groove 34. At this time, the negative pressure hole 311 of the suction cup 3 is connected to the ventilation groove 21, which can realize the rapid positioning of the suction cup 3.

[0050] To prevent air leakage at the connection point between the suction port 11 and the central air port 25, in this embodiment, as follows: Figure 2 and Figure 4 As shown, a first sealing gasket 15 is installed between the turntable 1 and the adapter plate 2, wherein the first sealing gasket 15 is annularly sleeved on the outside of the air intake hole 11.

[0051] Specifically, such as Figure 8 As shown, the top wall of the turntable 1 is provided with a first sealing groove 14 concentric with the air intake 11, and a first sealing gasket 15 is installed in the first sealing groove 14 to prevent the first sealing gasket 15 from moving between the turntable 1 and the adapter plate 2.

[0052] In order to fix the adapter plate 2 to the turntable 1, in this embodiment, as follows: Figure 4 As shown, the adapter plate 2 is fixed to the turntable 1 by the second positioning bolt 8.

[0053] To prevent the end of the second positioning bolt 8 from extending beyond the adapter plate 2, in this embodiment, as follows: Figure 7 and Figure 10 As shown, the adapter plate 2 is provided with a downwardly recessed countersunk hole 24. There are four second positioning bolts 8 and four countersunk holes 24, which are evenly distributed along the circumference of the adapter plate 2. The second positioning bolts 8 pass through the countersunk holes 24 and are threadedly connected to the turntable 1. At this time, the end of the second positioning bolt 8 is located in the countersunk hole 24 to prevent the top wall of the second positioning bolt 8 from being higher than the top wall of the adapter plate 2, which would affect the installation of the suction cup 3.

[0054] Under normal circumstances, the adapter plate 2 is fixed to the turntable 1 using the second positioning bolt 8. A threaded hole that matches the second positioning bolt 8 needs to be made on the adapter plate 2. Once the threaded hole is made, its position cannot be changed. When the diameter of the silicon ring is large and a larger size adapter plate 2 needs to be replaced, it is necessary to ensure that the countersunk hole 24 on the adapter plate 2 after replacement is aligned with the threaded hole on the turntable 1. Otherwise, the adapter plate 2 cannot be installed. In this case, the compatibility between the adapter plate 2 and the turntable 1 is poor.

[0055] Therefore, in this embodiment, as Figure 4 and Figure 8As shown, the top wall of the turntable 1 is provided with at least three sets of sliding grooves arranged radially along the turntable 1. The longitudinal section of the sliding groove is an inverted T-shape, which is defined as T-groove 12. The T-groove 12 is provided with a locking block 6 that slides radially along the turntable 1. The locking block 6 is provided with a threaded hole 61 that is threadedly engaged with the second positioning bolt 8. When the position of the countersunk hole 24 on the adapter plate 2 changes, the position of the locking block 6 in the T-groove 12 is moved, and then the second positioning bolt 8 is threadedly engaged with the threaded hole 61 on the locking block 6, so that the top wall of the locking block 6 abuts against the inner wall of the T-groove 12, thereby fixing the adapter plate 2 and improving the compatibility of fixing the adapter plate 2 and the turntable 1.

[0056] To facilitate the movement of the locking block 6, in this embodiment, as follows: Figure 9 As shown, the bottom wall of the turntable 1 is provided with a sliding groove 13 arranged radially along the turntable 1, wherein the sliding groove 13 communicates with the T-shaped groove 12 on the turntable 1, and the bottom wall of the locking block 6 is fixed with a sliding rod 7 that passes through the sliding groove 13 and extends downward out of the turntable 1.

[0057] When it is necessary to move the locking block 6, the position of the locking block 6 can be changed by holding the slide bar 7, which facilitates the movement of the locking block 6.

[0058] In order to accurately connect the second positioning bolt 8 to the locking block 6 via thread, in this embodiment, as follows: Figure 9 and Figure 10 As shown, when the locking block 6 and the second positioning bolt 8 are not threadedly connected, the bottom wall of the locking block 6 abuts against the bottom wall of the T-slot 12, and the threaded hole 61 on the locking block 6 is misaligned with the countersunk hole 24. At this time, the second positioning bolt 8 is not installed in the countersunk hole 24. The position of the locking block 6 is changed by the sliding rod 7 so that the threaded hole 61 of the locking block 6 is aligned with the countersunk hole 24. Figure 9 As shown, the second positioning bolt 8 is then inserted downward through the countersunk hole 24, so that the end of the second positioning bolt 8 is threadedly connected to the threaded hole 61. As the second positioning bolt 8 rotates, the locking block 6 moves upward. When the top wall of the locking block 6 abuts against the top wall of the T-slot 12, the second positioning bolt 8 and the locking block 6 are fixed.

[0059] Specifically, in this embodiment, four sets of T-slots 12 and locking blocks 6 are provided and are evenly distributed along the circumference of the turntable 1 to fix the adapter plate 2 to the turntable 1.

[0060] After the adapter plate 2 is fixed to the turntable 1, the suction cup 3 can be quickly positioned on the adapter plate 2 in the following way: Figure 2 , Figure 5 as well as Figure 7As shown, the suction cup 3 is provided with a second positioning hole 32 that runs vertically through it, and the adapter plate 2 is provided with a first positioning hole 23. When assembling the suction cup 3, the first positioning hole 23 is aligned with the second positioning hole 32, and then a pin is used to pass through the second positioning hole 32 and extend into the first positioning hole 23 to perform preliminary positioning of the suction cup 3. Then, the first positioning bolt 35 is used to pass through the suction cup 3 and threadedly connect with the adapter plate 2 to fix the suction cup 3 and the adapter plate 2.

[0061] Specifically, such as Figure 5 and Figure 6 As shown, the suction cup 3 is provided with a bolt hole 33 for the first positioning bolt 35 to pass through.

[0062] The annular groove 31 where the silicon ring is placed is blocked by the silicon ring, which can prevent water from entering the annular groove 31 under the silicon ring during the processing. Although the negative pressure hole 311 in the annular groove 31 where the silicon ring is not placed is blocked by the air hole plug 4, water will still accumulate inside the annular groove 31. In order to prevent water in the annular groove 31 from entering the ventilation groove 21 after the air hole plug 4 is pulled out, the existing technology requires the turntable 1 to be flipped or the water accumulated inside the annular groove 31 to be blown out with an air gun before the air hole plug 4 can be pulled out. This operation process is relatively complicated.

[0063] Therefore, it is necessary to treat the water accumulated in the annular groove 31, and the improvement schemes are shown in Embodiment 1 and Embodiment 2 below;

[0064] Example 1:

[0065] Based on the above embodiments, a method is adopted to prevent water from entering the annular groove 31 during processing, thereby preventing water accumulation in the annular groove 31; such as Figure 11 As shown, the vent plug 4 in the same annular groove 31 is fixed on the rubber ring 41. When it is necessary to seal the annular groove 31 where no silicon ring is placed, the rubber ring 41 is snapped into the annular groove 31, and then the vent plug 4 is inserted into the negative pressure hole 311. At this time, the rubber ring 41 can prevent water from entering the annular groove 31 during the processing.

[0066] Because the vent plug 4 is fixed to the bottom of the rubber ring 41, when the vent plug 4 and the rubber ring 41 are installed, the rubber ring 41 will form an obstruction, making it impossible to accurately insert the vent plug 4 into the negative pressure hole 311. Therefore, in this embodiment, as... Figure 11 As shown, the side wall of the rubber ring 41 is provided with a positioning flange 42 extending radially outward, and the top wall of the suction cup 3 is provided with a positioning groove 36 that communicates with the ring groove 31 and is recessed downward. When installing the rubber ring 41, the positioning flange 42 is engaged in the positioning groove 36, and the air hole plug 4 can be accurately inserted into the negative pressure hole 311, thus realizing the rapid installation of the rubber ring 41 and the air hole plug 4.

[0067] When it is necessary to remove the rubber ring 41 from the ring groove 31, you can pinch the positioning flange 42 from the positioning groove 36 and pull it upward.

[0068] Example 2:

[0069] Based on the above embodiments, the accumulated water in the annular groove 31 is treated by timely drainage, such as... Figure 12 As shown, the suction cup 3 is provided with a drainage mechanism to discharge water accumulated in the annular groove 31. Specifically, the drainage mechanism includes a drainage channel 312, wherein one end of the drainage channel 312 is connected to the bottom wall of the annular groove 31, and the other end is connected to the side wall of the suction cup 3. The outlet of the drainage channel 312 connected to the side wall of the suction cup 3 is lower than the bottom wall of the annular groove 31. A sealing mechanism for opening or closing the drainage channel 312 is also provided inside the drainage channel 312.

[0070] With the above configuration, when the silicon ring is placed on one of the annular grooves 31 in the suction cup 3, the negative pressure hole 311 in the annular groove 31 where the silicon ring is placed is connected to the vent groove 21, and the drainage channel 312 connected to the annular groove 31 is closed by the sealing mechanism. The negative pressure hole 311 in the annular groove 31 where the silicon ring is not placed is blocked by the air hole plug 4, and the drainage channel 312 connected to the annular groove 31 is opened. After the silicon ring is placed, the opening of the annular groove 31 on the lower side of the silicon ring is blocked by the silicon ring, and water during the processing cannot enter the annular groove 31. At this time, the drainage channel 21 connected to the annular groove 31 is opened. The drainage channel 312 is closed by the sealing mechanism, which ensures the sealing of the annular groove 31, thereby creating a negative pressure environment in the annular groove 31 to adsorb the silicon ring. In the annular groove 31 without a silicon ring, the negative pressure hole 311 in the annular groove 31 is blocked by the air hole plug 4, and the water in the annular groove 31 cannot enter the ventilation groove 21 through the negative pressure hole 311. At this time, the sealing mechanism opens the drainage channel 312. As the turntable 1 and the suction cup 3 rotate, the water inside the annular groove 31 flows out along the drainage channel 312, thereby solving the problem of water accumulation in the annular groove 31.

[0071] In this embodiment, as Figure 12 As shown, the sealing mechanism is located away from the rotation center of the turntable 1. The sealing mechanism includes a flared mouth 313, a sealing plate 314, a guide rod 315, and a spring 316. The flared mouth 313 is located at the end of the drainage channel 312 and is connected to the drainage channel 312. The flared mouth 313 is set on the side wall of the suction cup 3. Specifically, the small diameter of the flared mouth 313 is connected to the drainage channel 312. The guide rod 315 is slidably installed in the drainage channel 312. The sealing plate 314 is fixed to the end of the guide rod 315 and located in the flared mouth 313. The spring 316 is sleeved on the guide rod 315. One end of the spring 316 is fixedly connected to the inner wall of the drainage channel 312, and the other end is fixedly connected to the guide rod 315.

[0072] When the turntable 1 stops rotating, the spring 316 is in its original length state, and the side wall of the sealing plate 314 and the side wall of the horn mouth 313 leave a gap for the water in the drainage channel 312 to flow out.

[0073] Specifically, in this embodiment, the sidewall of the sealing plate 314 is inclined and adapted to the sidewall of the horn-shaped opening 313. When the sealing plate 314 blocks the drainage channel 312, the sidewall of the sealing plate 314 abuts against the sidewall of the drainage channel 312.

[0074] With the above setup, when no silicon ring is placed on top of the annular groove 31, water from the processing enters the annular groove 31. At this time, the turntable 1 and the suction cup 3 rotate synchronously. Because the sealing mechanism is far from the rotation center of the turntable 1, under the action of centrifugal force, the sealing plate 314 and the guide rod 315 move away from the axis of the turntable 1, the spring 316 is stretched, increasing the gap between the sealing plate 314 and the flared mouth 313, and the water accumulated inside the annular groove 31 is thrown outward along the drainage channel 312; when a silicon ring is placed on top of the annular groove 31, at this time... The air inside the venting groove 21 is drawn out by the vacuum pump, creating a negative pressure in the venting groove 21. Since the silicon ring seals the top of the annular groove 31, a negative pressure is generated inside the annular groove 31 and draws in outside air through the drainage channel 312. Because the gap between the side wall of the sealing plate 314 and the flared mouth 313 is small, the outside air pushes the sealing plate 314 against the side wall of the flared mouth 313 and compresses the spring 316, thereby closing the drainage channel 312. This ensures the sealing of the annular groove 31 and prevents air leakage from the annular groove 31.

[0075] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within the present invention.

Claims

1. A suction cup fixture, comprising a suction cup (3) and an adapter plate (2), wherein the adapter plate (2) has a central air hole (25) for communicating with an air suction hole (11) of a turntable (1), characterized in that: The top wall of the adapter plate (2) is provided with a ventilation groove (21) communicating with the central air hole (25). The suction cup (3) is fixed on the upper side of the adapter plate (2). The top wall of the suction cup (3) is provided with several annular grooves (31) coaxial with the suction cup (3). The bottom wall of the annular groove (31) is provided with several negative pressure holes (311) communicating with the ventilation groove (21). It also includes a sealing component for removably sealing the negative pressure holes (311). In the assembled state, the negative pressure holes (311) in the annular groove (31) of the silicon ring are connected with the ventilation groove (21), and the negative pressure holes (311) in the other annular grooves (31) are sealed by the sealing component. The suction cup (3) is provided with a drainage mechanism for draining water accumulated in the annular groove (31). The drainage mechanism includes a drainage channel (312) and a sealing mechanism for controlling the opening or closing of the drainage channel (312). One end of the drainage channel (312) is connected to the bottom wall of the annular groove (31), and the other end is lower than the bottom wall of the annular groove (31) and connected to the side wall of the suction cup (3). The sealing mechanism includes a flared mouth (313), a sealing plate (314), a guide rod (315), and a spring (316). The flared mouth (313) is set on the side wall of the suction cup (3). The guide rod (315) is set in the drainage channel (312) and is slidably connected to the drainage channel (312). The sealing plate (314) is located in the flared mouth (313) and is fixedly connected to the guide rod (315). The spring (316) is sleeved on the guide rod (315). One end of the spring (316) is fixedly connected to the inner wall of the drainage channel (312), and the other end of the spring (316) is fixedly connected to the guide rod (315). In the assembled state, the spring (316) is in its original length state. The side wall of the sealing plate (314) and the side wall of the flared mouth (313) have a gap for the drainage of accumulated water. The air inside the ventilation channel (21) is drawn out by the vacuum pump, and the ventilation channel (21) forms a negative pressure. The outside air pushes the sealing plate (314) to adhere to the side wall of the horn mouth (313), thereby closing the drainage channel (312).

2. The suction cup fixture according to claim 1, characterized in that: Each set of annular grooves (31) has four negative pressure holes (311) arranged in a circumferential array along the suction cup (3). The negative pressure holes (311) in two adjacent sets of annular grooves (31) are arranged radially along the suction cup (3). The cross-section of the ventilation groove (21) is cross-shaped, and the negative pressure holes (311) are all connected to the ventilation groove (21).

3. The suction cup fixture according to claim 2, characterized in that: A second sealing gasket (5) is installed between the suction cup (3) and the adapter plate (2), and the second sealing gasket (5) is located on the outside of the ventilation groove (21).

4. The suction cup fixture according to claim 1, characterized in that: The suction cup (3) and the adapter plate (2) are fixedly connected by the first positioning bolt (35). The suction cup (3) is provided with a second positioning hole (32) that runs through the top and bottom. The adapter plate (2) is provided with a first positioning hole (23). In the assembled state, the first positioning hole (23) and the second positioning hole (32) are aligned.

5. A suction cup fixture according to claim 1, characterized in that: The top wall of the adapter plate (2) is provided with a downwardly recessed countersunk hole (24). The adapter plate (2) and the turntable (1) are fixed by a second positioning bolt (8). In the assembled state, the end of the second positioning bolt (8) is located in the countersunk hole (24), and the second positioning bolt (8) is threadedly connected to the turntable (1).

6. A suction cup fixture according to claim 5, characterized in that: The turntable (1) is provided with several sets of T-shaped grooves (12) arranged radially along the turntable (1) and having an inverted T-shaped longitudinal section. The T-shaped grooves (12) are distributed around the circumference of the turntable (1). Locking blocks (6) are slidably connected in the T-shaped grooves (12). In the assembled state, the second positioning bolt (8) is threadedly connected to the locking block (6), and the top wall of the locking block (6) abuts against the top wall of the T-shaped groove (12).

7. A suction cup fixture according to claim 6, characterized in that: The bottom wall of the turntable (1) is provided with a sliding groove (13) arranged radially along the turntable (1). The sliding groove (13) is connected to the T-slot (12). The bottom wall of the locking block (6) is fixed with a sliding rod (7) extending downward through the sliding groove (13).

8. A suction cup fixture according to claim 1, characterized in that: The sealing component includes a vent plug (4). The vent plug (4) on the same annular groove (31) is fixed on the same rubber ring (41). In the assembled state, the vent plug (4) is used to seal the negative pressure hole (311) in the annular groove (31) where the silicon ring is not placed. The rubber ring (41) is fastened in the annular groove (31), and the side wall of the rubber ring (41) abuts against the side wall of the annular groove (31).

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