Exhaust insert assisted ejection method

Abstract

The exhaust insert assisted ejection method comprises the following steps: 1) setting an assisted ejection tool, wherein the assisted ejection tool comprises an assisted pushing part; 2) inserting the assisted pushing part into a reference ring and connecting a tail gas insert; 3) the reference ring comprises a tail gas insert groove, and threaded holes are arranged on the upper and lower sides of the tail gas insert groove; 4) the assisted ejection tool comprises an assisted pushing plate corresponding to the threaded holes; 5) bolts corresponding to the threaded holes are arranged on the assisted pushing plate and used as assisted pushing bodies; and 6) the assisted pushing part is formed by screwing the assisted pushing plate on the assisted pushing bodies uniformly, so that the tail gas insert is pushed out quickly.

Description

Technical Field

[0001] This invention relates to semiconductor fabrication technology and equipment, specifically, a method for assisted removal of an exhaust insert. Background Technology

[0002] During the production process of the epitaxial machine, byproducts enter the exhaust gas treatment machine through the exhaust gas insert. These byproducts are highly adhesive. When passing through the exhaust gas insert, due to the gap between the exhaust gas seat block and the exhaust gas insert, they easily accumulate in the gap. After long-term use, a large amount of byproducts are generated between the exhaust gas insert and the base ring, sticking the two together. Conventional methods such as using alcohol corrosion and unconventional methods such as hammering will cause the exhaust gas insert to break due to uneven force, making it impossible to completely remove the exhaust gas insert.

[0003] Therefore, it is necessary to provide a method for assisted removal of the exhaust insert to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a method for assisted removal of an exhaust insert.

[0005] The technical solution is as follows:

[0006] A method for assisted removal of an exhaust insert, comprising the following steps:

[0007] 1) Set up a tooling to assist in launching the product, which includes a booster unit;

[0008] 2) Insert the booster into the reference ring and mate it with the exhaust gas insert;

[0009] 3) The reference ring includes an exhaust gas insertion slot, and threaded holes are provided on the upper and lower sides corresponding to the exhaust gas insertion slot.

[0010] 4) The tooling includes a pusher plate with corresponding threaded holes;

[0011] 5) Bolts with matching threaded holes are provided on the booster plate to serve as the booster body;

[0012] 6) A rapid exhaust insert ejection method that uses a booster section formed by uniformly pressing the booster plate into several booster bodies to push out the exhaust insert.

[0013] Furthermore, the booster part is shaped to resemble the end of the exhaust gas insert to ensure that, in step 3), after the booster part is inserted, the booster part and the exhaust gas insert are in uniform contact.

[0014] Furthermore, there are four threaded holes.

[0015] Furthermore, two threaded holes are provided on both the upper and lower sides of the exhaust gas insertion slot.

[0016] Furthermore, a double-diagonal booster plate screw-in method is adopted: the bolts on one diagonal are screwed in simultaneously with a margin A, and then the bolts on the other diagonal are screwed in simultaneously with the same margin, alternating until the exhaust gas insert is removed.

[0017] Compared with existing technologies, this invention can quickly remove the exhaust gas insert, ensuring efficient equipment operation and maintenance. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the combination of the base ring and the exhaust gas insert.

[0019] Figure 2 This is a schematic diagram of the exhaust gas insert.

[0020] Figure 3 A schematic diagram to facilitate the launch of the tooling.

[0021] Figure 4 This is a diagram to help you exit. Detailed Implementation

[0022] Example:

[0023] See Figure 1-4 This embodiment demonstrates a method for assisted removal of an exhaust insert, the steps of which include:

[0024] 1) Set up a booster tooling 100, which includes a booster unit 1;

[0025] 2) The booster 1 is inserted into the reference ring 200 and docked with the exhaust gas insert 300;

[0026] 3) The reference ring 200 includes an exhaust gas insertion slot 201, and threaded holes 202 are respectively provided on the upper and lower sides of the exhaust gas insertion slot 201.

[0027] 4) The tooling 100 is equipped with a pusher plate 2 corresponding to the threaded hole 202;

[0028] 5) Bolts with matching threaded holes 202 are provided on the booster plate 2 to serve as the booster body;

[0029] 6) A quick exhaust insert ejection method that uses a booster plate 2 to be evenly pressed into a number of booster bodies to form a booster 1 that pushes out the exhaust insert 300.

[0030] The booster part 1 is shaped to resemble the end of the exhaust gas insert 300, ensuring that after the booster part 1 is inserted in step 3), the booster part 1 and the exhaust gas insert 300 are in uniform contact.

[0031] There are four threaded holes 202.

[0032] Two threaded holes 202 are provided on both the upper and lower sides of the exhaust gas insertion slot 201.

[0033] The double diagonal booster plate is screwed in: the bolts on one diagonal are screwed in simultaneously with a margin A, and then the bolts on the other diagonal are screwed in simultaneously with the same margin, alternating until the exhaust gas insert is removed.

[0034] Compared with existing technologies, this invention can quickly remove the exhaust gas insert, ensuring efficient equipment operation and maintenance.

[0035] The above descriptions are merely some embodiments of the present invention. Those skilled in the art can make various modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. A method for assisted removal of an exhaust insert, characterized by: steps include: 1) Set up a tooling to assist in launching the product, which includes a booster unit; 2) Insert the booster into the reference ring and mate it with the exhaust gas insert; 3) The reference ring includes an exhaust gas insertion slot, and threaded holes are provided on the upper and lower sides corresponding to the exhaust gas insertion slot. 4) The tooling includes a pusher plate with corresponding threaded holes; 5) Bolts with matching threaded holes are provided on the booster plate to serve as the booster body; 6) A rapid exhaust insert ejection method that uses a booster section formed by uniformly pressing the booster plate into several booster bodies to push out the exhaust insert.

2. The exhaust insert assisted withdrawal method according to claim 1, characterized in that: The booster part is shaped to resemble the end of the exhaust gas insert to ensure that, in step 3), after the booster part is inserted, the booster part and the exhaust gas insert are in uniform contact.

3. The exhaust insert assisted withdrawal method according to claim 1, characterized in that: There are four threaded holes.

4. The exhaust insert assisted withdrawal method according to claim 1, characterized in that: Two threaded holes are provided on both the upper and lower sides of the exhaust gas insertion slot.

5. The exhaust insert assisted withdrawal method according to claim 4, characterized in that: The double diagonal booster plate is screwed in: the bolts on one diagonal are screwed in simultaneously with a margin A, and then the bolts on the other diagonal are screwed in simultaneously with the same margin, alternating until the exhaust gas insert is removed.

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