A device and method for processing a base of a thin-walled quartz tube
By using a combination structure of a base and a retaining ring in the processing of thin-walled quartz tubes, and by applying and filling adhesive wax to increase the bonding area, the problem of the thin-walled quartz tubes detaching from the base during processing is solved, achieving low-cost and high-efficiency processing results.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LIANYUNGANG KERUI BAOSHIYING CERAMIC MATERIAL CO LTD
- Filing Date
- 2023-08-31
- Publication Date
- 2026-05-19
AI Technical Summary
In the existing technology, thin-walled quartz tubes have a high probability of detachment and breakage due to insufficient adhesion during processing, resulting in a high product scrap rate, long processing time, and high cost.
The system employs a combination structure of a chassis and a fixing ring. By applying and filling adhesive wax, the bonding area between the thin-walled quartz tube and the processing device is increased. The adhesive force of the adhesive wax is used to fix the quartz tube to the chassis, and the wax is melted and separated by heating after processing.
This effectively avoids the breakage of thin-walled quartz tubes during processing, reduces product scrap rate, simplifies operation procedures, and lowers costs.
Smart Images
Figure CN117300931B_ABST
Abstract
Description
Technical Field
[0001] The embodiments disclosed herein generally relate to the field of quartz tube processing, and more specifically, to an apparatus and method for processing thin-walled quartz tube chassis. Background Technology
[0002] With the rise of the semiconductor industry, the processing of quartz products has once again reached a peak. Currently, most precision-machined thin-walled quartz cylinders are processed using a base plate. Due to the thin wall thickness, the adhesion of the wax layer between the base plate and the quartz cylinder is insufficient, resulting in a very high probability of detachment and breakage during prolonged processing. The scrap rate is approximately 15%. The main reasons for detachment are the thin wall thickness (less than 5mm), the limited bonding surface on the base plate, the long processing time in the machining center, and the corrosion of the wax layer by the cutting oil, ultimately leading to the risk of detachment after processing. Summary of the Invention
[0003] To address the aforementioned technical problems, this invention provides a chassis processing device and method for thin-walled quartz tubes, which increases the bonding area and strength between the quartz tube to be processed and the processing device. It is simple, convenient, and low-cost, greatly reducing the product scrap rate and preventing damage from detachment from the chassis.
[0004] The first part of the present invention provides a chassis processing apparatus for thin-walled quartz tubes, comprising: a chassis serving as a base for fixing the thin-walled quartz tube to be processed; and a fixing ring mounted on the chassis to fix the thin-walled quartz tube to be processed on its inner circumference. The chassis and the fixing ring, as well as the chassis and the thin-walled quartz tube to be processed, can be bonded together by applying adhesive wax. The inner circumferential wall of the fixing ring and the outer circumferential wall of the thin-walled quartz tube to be processed can be bonded together by filling with adhesive wax.
[0005] Furthermore, there is a gap of 4 to 6 mm between the inner peripheral wall of the fixing ring and the outer peripheral wall of the thin-walled quartz tube to be processed.
[0006] Furthermore, the thickness of the retaining ring is 10–11 mm.
[0007] Furthermore, the wall thickness of the retaining ring is 10–11 mm.
[0008] The second part of the present invention provides a method for processing a chassis of a thin-walled quartz tube, which is processed using the above-mentioned processing device. The processing method includes: applying adhesive wax between the contact surfaces between the chassis and the fixing ring, and between the chassis and the thin-walled quartz tube to be processed; filling the space between the inner circumferential surface of the fixing ring and the outer circumferential surface of the thin-walled quartz tube to be processed with adhesive wax; and fixing the thin-walled quartz tube to be processed to the chassis.
[0009] Furthermore, a fixing ring with an inner diameter larger than the outer diameter of the quartz tube to be processed and an outer diameter smaller than the diameter of the base plate to be processed is selected. Adhesive wax is applied to the bottom of the fixing ring, which is then bonded to the base plate, with the center of the fixing ring coinciding with the center of the base plate. Adhesive wax is applied to the bottom of the thin-walled quartz tube to be processed and placed inside the fixing ring, which is then bonded to the base plate, with the centers of the thin-walled quartz tube, the fixing ring, and the base plate coinciding. Adhesive wax is then poured into the gap between the inner circumferential surface of the fixing ring and the outer circumferential surface of the thin-walled quartz tube to be processed until the wax is flush with the upper surface of the fixing ring, filling the gap between the inner circumferential surface of the fixing ring and the outer circumferential wall of the thin-walled quartz tube to be processed. After the adhesive wax solidifies, the thin-walled quartz tube to be processed is then processed.
[0010] Further, the processed thin-walled quartz tube, fixing ring and base are combined. The combined assembly is placed in an electric oven and heated. The adhesive wax melts until the fixing ring and base fall off the combined assembly, and the overall processing is completed.
[0011] The beneficial effects of this invention are as follows:
[0012] It increases the bonding area between the thin-walled quartz tube and the chassis processing device, resulting in low cost, simple operation, and avoidance of damage to the thin-walled quartz tube during processing.
[0013] It should be understood that the description in the Summary of the Invention is not intended to limit the key or essential features of the embodiments of this disclosure, nor is it intended to restrict the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description
[0014] The above and other features, advantages, and aspects of the embodiments of this disclosure will become more apparent from the accompanying drawings and the following detailed description. In the drawings, the same or similar reference numerals denote the same or similar elements, wherein:
[0015] Figure 1 A schematic diagram of the chassis processing device for thin-walled quartz tubes provided by the present invention is shown.
[0016] Figure 2 It shows Figure 1 A schematic diagram of the forces acting on the thin-walled quartz tube during processing in the embodiment;
[0017] in, Figure 1 The correspondence between the reference numerals and component names in the attached drawings is as follows:
[0018] 1. Chassis, 2. Fixing ring, 3. Thin-walled quartz tube. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0020] Furthermore, the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.
[0021] As a preferred embodiment of the present invention, the following is provided: Figure 1 The apparatus shown is a base for processing a thin-walled quartz tube, comprising: a base 1, which serves as a base for fixing the thin-walled quartz tube 3 to be processed; and a fixing ring 2, which is mounted on the base 1 and fixes the thin-walled quartz tube 3 to be processed on its inner circumference. Adhesive wax can be applied between the base 1 and the fixing ring 2, and between the base 1 and the thin-walled quartz tube 3 to be processed, for bonding and fixing. Adhesive wax can also be filled between the inner circumferential wall of the fixing ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed for bonding and fixing. The combination of the base 1 and the fixing ring 2 forms a base for processing a thin-walled quartz tube, increasing the bonding area between the thin-walled quartz tube 3 to be processed and the base processing apparatus, thus preventing the thin-walled quartz tube 3 from detaching and breaking during processing.
[0022] Specifically, there is a gap of 4 to 6 mm between the inner circumferential wall of the fixing ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed. If the gap is less than 4 mm, the volume of adhesive wax filling the gap between the inner circumferential wall of the fixing ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed is too small, and the corrosion redundancy of the cutting oil is insufficient, which may result in the tube detaching from the plate. If the gap is greater than 6 mm, the volume of adhesive wax filling the gap between the inner circumferential wall of the fixing ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed is too large, resulting in a waste of resources.
[0023] Specifically, the thickness of the retaining ring 2 is 10-11 mm. If the thickness is less than 10 mm, the height of the adhesive wax filling between the inner circumferential wall of the retaining ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed is too small, resulting in insufficient corrosion redundancy of the cutting oil and potential detachment from the plate. If the thickness is greater than 11 mm, the adhesive wax height is too high, which not only wastes resources but also affects the processing of the lower end of the quartz tube due to the excessive thickness of the retaining ring 2.
[0024] Specifically, the wall thickness of the retaining ring 2 is 10-11 mm. If the wall thickness is less than 10 mm, the bonding area between the retaining ring 2 and the base plate 1 is too small, the adhesive force of the adhesive wax is insufficient, and separation will occur between the base plate 1 and the retaining ring 2; if the wall thickness is greater than 11 mm, it will result in a waste of resources.
[0025] The chassis processing apparatus for thin-walled quartz tubes based on this embodiment processes thin-walled quartz tubes using the following method.
[0026] First, the chassis 1 and the fixing ring 2 are bonded together by applying adhesive wax, thus forming a state in which the chassis 1 serves as the base and the fixing ring 2 is protruding from the base.
[0027] Then, the thin-walled quartz tube 3 to be processed is placed inside the fixing ring 2, so that its end abuts against the base plate 1. In this state, adhesive wax is filled between the fixing ring 2 and the thin-walled quartz tube 3 to be processed, thereby indirectly fixing the thin-walled quartz tube 3 to be processed to the base plate 1.
[0028] In this state, the chassis 1 is clamped and fixed by a fixture, thereby enabling stable surface processing of the thin-walled quartz tube 3 to be processed.
[0029] After the surface processing of the thin-walled quartz tube 3 is completed, the adhesive wax applied between the base plate 1 and the fixing ring 2 and between the fixing ring 2 and the thin-walled quartz tube 3 is melted by means of heating, so that the processed thin-walled quartz tube 3 can be removed and then subjected to corresponding post-processing to obtain the finished thin-walled quartz tube.
[0030] Of course, there is no fixed order in which the thin-walled quartz tube 3 to be processed is indirectly fixed to the base plate 1 by means of the fixing ring 2 and adhesive wax. As long as the adhesive wax is filled between the base plate 1 and the fixing ring 2, and between the inner circumferential surface of the fixing ring 2 and the outer circumferential surface of the thin-walled quartz tube 3 to be processed, the thin-walled quartz tube 3 to be processed is fixed to the base plate 1. The applied adhesive wax will naturally enter between the contact surfaces of the base plate 1 and the thin-walled quartz tube 3 to be processed, thereby improving the fixing strength between the thin-walled quartz tube 3 and the base plate 1 to a certain extent.
[0031] The following detailed description is based on specific embodiments.
[0032] Select a fixing ring 2 with an inner diameter of 210mm, an outer diameter of 230mm, a wall thickness of 10mm, and a thickness of 10mm. Apply adhesive wax to the bottom of the fixing ring 2 and attach it to the base plate 1 with an outer diameter of 350mm and a thickness of 30mm. The center of the fixing ring 2 coincides with the center of the base plate 1.
[0033] Apply adhesive wax to the bottom of the thin-walled quartz tube 3 to be processed, which has an outer diameter of 199.5 mm, an inner diameter of 192.5 mm, a wall thickness of 3.5 mm, and a height of 309.4 mm, and place it inside the fixing ring 2 to bond it to the base plate 1. The centers of the thin-walled quartz tube 3 to be processed, the fixing ring 2, and the base plate 1 coincide.
[0034] In the gap between the inner circumferential surface of the fixing ring 2 and the outer circumferential surface of the thin-walled quartz tube 3 to be processed, fill the gap with adhesive wax until the wax is flush with the upper surface of the fixing ring 2, thus filling the gap between the inner circumferential surface of the fixing ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed.
[0035] After the adhesive wax solidifies, the thin-walled quartz tube 3 to be processed is then processed.
[0036] In this embodiment, a composite of the processed thin-walled quartz tube, the fixing ring 2, and the base plate 1 is obtained. The composite is placed in an electric oven and heated until the adhesive wax melts and the fixing ring 2 and the base plate 1 detach from the composite, thus completing the overall processing.
[0037] In this embodiment, the working principle of the processing method is as follows:
[0038] The original bonding area, which is the contact area between the thin-walled quartz tube 3 to be processed and the base plate 1, is 21.54 cm². 2 The current bonding area is the contact area between the thin-walled quartz tube 3 to be processed and the base plate 1, and the area of the outer peripheral wall from the bottom end of the thin-walled quartz tube 3 to the same height as the fixing ring 2, with a total bonding area of 84.34 cm². 2 The adhesive wax filling the gap between the inner circumferential surface of the retaining ring 2 and the outer circumferential wall of the thin-walled quartz tube 3 to be processed also allows for a margin against corrosion of the adhesive wax by the cutting oil during subsequent processing; in addition, the contact area between the retaining ring 2 and the chassis 1 is 69.08 cm². 2 It also plays a protective role in the processing of thin-walled quartz tubes.
[0039] In this embodiment, as Figure 2 As shown, the quartz tube to be processed is subjected to an external force F perpendicular to the tube wall. By filling adhesive wax between the base plate 1 and the fixing ring 2, and between the inner circumferential surface of the fixing ring 2 and the outer circumferential surface of the thin-walled quartz tube 3 to be processed, the maximum force that the thin-walled quartz tube 3 to be processed and the base plate 1 can withstand during processing to separate the two is increased from 50N in the case where the thin-walled quartz tube 3 to be processed is directly bonded to the base plate 1 to 100N.
[0040] The chassis processing apparatus and method for thin-walled quartz tubes provided by this invention achieve the following technical effects:
[0041] The thin-walled quartz tube to be processed is fixed by using a chassis with a fixing ring, which increases the bonding area between the thin-walled quartz tube and the processing device described in this application, and greatly reduces the possibility of the thin-walled quartz tube detaching from the chassis and breaking during the processing. In addition, the use of a wax layer as an adhesive allows for the combination and separation of the thin-walled quartz tube and the processing device without damaging the product, which is low-cost and simple to operate.
[0042] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0043] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0044] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A method for processing the base of a thin-walled quartz tube, characterized in that, The chassis processing device for thin-walled quartz tubes includes: The chassis serves as a base for fixing the thin-walled quartz tube to be processed; and A retaining ring, mounted on the chassis, secures the thin-walled quartz tube to be processed on its inner circumference. Adhesive wax can be applied to the base and the fixing ring, as well as between the base and the thin-walled quartz tube to be processed, for bonding and fixing. The inner peripheral wall of the fixing ring and the outer peripheral wall of the thin-walled quartz tube to be processed can be filled with adhesive wax for bonding and fixing. There is a gap of 4 to 6 mm between the inner peripheral wall of the fixing ring and the outer peripheral wall of the thin-walled quartz tube to be processed; The thickness of the fixing ring is 10~11 mm; The wall thickness of the fixing ring is 10~11mm; The processing method includes: Apply adhesive wax between the contact surfaces between the chassis and the fixing ring, and between the chassis and the thin-walled quartz tube to be processed. Fill the space between the inner circumferential surface of the fixing ring and the outer circumferential surface of the thin-walled quartz tube to be processed with adhesive wax to fix the thin-walled quartz tube to be processed to the chassis. And includes the following steps: Select a fixing ring with an inner diameter larger than the outer diameter of the quartz tube to be processed and an outer diameter smaller than the diameter of the base plate to be processed. Apply adhesive wax to the bottom of the fixing ring and attach it to the base plate. The center of the fixing ring coincides with the center of the base plate. Apply adhesive wax to the bottom of the thin-walled quartz tube to be processed and place it inside the fixing ring to bond it to the base. The centers of the thin-walled quartz tube to be processed, the fixing ring, and the base coincide. In the gap between the inner circumferential surface of the fixing ring and the outer circumferential surface of the thin-walled quartz tube to be processed, adhesive wax is poured in until the wax is flush with the upper surface of the fixing ring, thus filling the gap between the inner circumferential surface of the fixing ring and the outer circumferential wall of the thin-walled quartz tube to be processed. After the adhesive wax solidifies, the thin-walled quartz tube to be processed is then processed. The processed thin-walled quartz tube, the fixing ring, and the base are combined and heated in an electric oven. The adhesive wax melts until the fixing ring and the base detach from the combined assembly, and the overall processing is completed.