An apparatus for analyzing a fluorine-containing gas

Abstract

The scheme belongs to the technical field of gas analysis and particularly relates to an analysis device for fluorine-containing gas. The device comprises a first passage, a second passage, a third passage and a fourth passage. A normal nitrogen gas inlet pipeline, a first pressure reducing valve, a first pressure gauge, a first valve, a check valve and a Venturi tube are sequentially arranged on the first passage. The inlet of the normal nitrogen gas inlet pipeline, the first pressure reducing valve, the first pressure gauge, the first valve, the check valve and the Venturi tube are connected through pipelines. The second passage comprises a fluorine gas inlet pipeline, a sixth valve, a fourth valve, a second pressure reducing valve, a second pressure gauge, a seventh valve and an analyzer which are sequentially arranged. The scheme is simple and convenient to operate, has high controllability and safety, air in the pipeline is sucked into the injection port of the Venturi tube, and then the air is discharged from the outlet of the Venturi tube, so that the air in the pipeline is efficiently and completely replaced, and the analysis result is more accurate and real.

Description

Technical Field

[0001] This solution belongs to the field of gas analysis technology, specifically involving an analytical device for fluorine-containing gases. Background Technology

[0002] Fluorinated electronic gases are primarily used as cleaning agents and plasma etching agents in chemical vapor deposition (CVD) processes in the electronics, semiconductor, and photovoltaic industries. With the rapid development of related fields such as the TFT-LCD panel industry, semiconductor industry, and solar panel industry in recent years, the usage of fluorinated electronic gases is also continuously increasing.

[0003] Fluorine-containing gas mixtures are widely used in ophthalmic excimer laser surgery, LED, and electronic chip industries. To strictly control the operation and production process, the accuracy of the fluorine concentration in the gas mixture is extremely important. Because fluorine is a strong oxidizing agent and the hydrofluoric acid produced by its reaction with water is highly corrosive, both of these substances will react with all organic or inorganic carriers packed in the chromatographic column, damaging the chromatographic column and the tubing of the analytical instrument. Quantitative analysis of the concentration of fluorine in fluorine-containing gas mixtures has always been one of the most difficult challenges to overcome by the gas industry and analytical instrument manufacturers.

[0004] Patent CN108287157A discloses a fluorine gas analysis and conversion device, including a reaction vessel, an indicator, an inlet manifold, an exhaust manifold, a standard gas tank, a purge gas tank, a test gas tank, a vacuum pump, and a GC-TCD device. The reaction vessel has an inlet at the bottom and an exhaust port at the top. A fixed bed is provided inside the reaction vessel, and fine particulate active metal oxides are filled above the fixed bed. The fixed bed has vent holes. The indicator contains a metal bromide solution. The upper end of the indicator is connected to the upper part of the reaction vessel through a pipe, and the lower end of the indicator is connected to the position of the active metal oxides in the reaction vessel through a pipe. A one-way valve is provided on the pipe at the lower end of the indicator. The inlet manifold is connected to the inlet of the reaction vessel, and the exhaust manifold is connected to the exhaust port of the reaction vessel.

[0005] This method involves purging the pipeline with a purge gas cylinder before analysis to remove moisture and oxygen. Then, a standard gas cylinder is activated, and the content of the purged gas is measured using a GC-TCD. This process checks the entire apparatus for adsorption or oxygen generation to avoid affecting the results and improve accuracy. However, this method is cumbersome, time-consuming, and inefficient. Furthermore, it only removes moisture and oxygen from the pipeline, while air contains various gases. Removing only the oxygen from the air can affect the analytical results, leading to inaccurate readings. Summary of the Invention

[0006] This solution provides an analytical device for fluorine-containing gases that produces accurate and reliable analytical results.

[0007] To achieve the above objectives, this solution provides an analytical device for fluorine-containing gases, including a first passage, a second passage, a third passage, and a fourth passage.

[0008] The first passage is sequentially equipped with a standard nitrogen inlet pipe, a first pressure reducing valve, a first pressure gauge, a first valve, a check valve, and a venturi tube. The inlets of the standard nitrogen inlet pipe, the first pressure reducing valve, the first pressure gauge, the first valve, the check valve, and the venturi tube are all connected by pipes.

[0009] The second access path includes a fluorine gas inlet pipe, a sixth valve, a fourth valve, a second pressure reducing valve, a second pressure gauge, a seventh valve, and an analyzer, arranged sequentially. The fluorine gas inlet pipe, the sixth valve, the fourth valve, the second pressure reducing valve, the second pressure gauge, the seventh valve, and the analyzer are all connected by pipes. The fourth valve is also connected to a third pressure gauge via a pipe. The sixth valve and the injector of the venturi tube are connected by a second valve via a pipe. The exhaust end of the analyzer is connected to a fifth valve via a pipe. The fifth valve is connected to both the injector of the venturi tube and the second valve.

[0010] The third passage includes a third pressure-reducing valve, a fourth pressure gauge, and a third valve arranged sequentially. The third pressure-reducing valve, the fourth pressure gauge, and the third valve are all connected by pipes. The two ends of the third valve are connected to the second valve and the fourth valve by pipes, respectively.

[0011] The fourth passage includes a fluorine-containing mixed gas cylinder and an eighth valve. The fluorine-containing mixed gas cylinder and the eighth valve are connected by a pipeline, and the eighth valve is connected by a pipeline to the second valve and the sixth valve respectively.

[0012] The principle behind this solution:

[0013] Before performing gas analysis, there may be air in the pipeline of the new analyzer. The air in the pipeline needs to be replaced. With all valves closed, adjust the first pressure reducing valve to 5-8 barg, and open the first, fifth, and seventh valves. The second pressure gauge will drop to negative pressure. When the pointer on the second pressure gauge does not change for 1-2 minutes, close the fifth and seventh valves. Adjust the third pressure reducing valve to 2-5 barg, and then open the third, fourth, and seventh valves in sequence. Adjust the second pressure reducing valve to 1-5 psig to allow high-purity nitrogen gas to enter the analyzer to the specified pressure. Then proceed with the following steps:

[0014] Step S1: Close the third valve, open the fifth valve, and the second pressure gauge drops to negative pressure;

[0015] Step S2: Open the second valve. When the pointer of the second pressure gauge does not change after 1-2 minutes, close the fifth valve and the second valve.

[0016] Step S3: Open the third valve and adjust the second pressure gauge to the specified pressure.

[0017] Repeat steps S1-S3 a total of 60 times to complete the replacement. After replacement, bring the analyzer to the specified pressure and inject the sample to check if the replacement is complete. If not, repeat all the above steps to continue replacement until it meets the requirements.

[0018] When pure fluorine gas analysis is required, close valves 1, 2, 3, 4, 5, and 8. Open valves 1, 2, and 3. Then slowly open valves 6 and 2 in sequence. After venting for 10 minutes, close valves 6 and 2. Then open valves 1, 5, and 7 in sequence until the second pressure gauge drops to negative pressure. Open valves 2 and 4. If the second pressure gauge pointer does not change for 1-2 minutes, close valves 5, 2, 4, and 1 in sequence. Then slowly open valves 6 and 4 in sequence until the second pressure gauge reaches the specified pressure. Close the sixth valve, then open the first and fifth valves in sequence. The second pressure gauge will drop to negative pressure. Open the second valve. If the pointer of the second pressure gauge does not change for 1-2 minutes, close the fifth, second, fourth, and first valves in sequence. Slowly open the sixth and fourth valves in sequence. When the second pressure gauge reaches the specified pressure, close the fourth and sixth valves. The analyzer will analyze the pure fluorine gas. After the analysis is completed, open the first, fifth, second, and fourth valves in sequence. The second pressure gauge will drop to negative pressure. If the pointer of the second pressure gauge does not change for 1-2 minutes, close the fifth, second, fourth, and first valves in sequence.

[0019] When analysis of fluorine-containing gas mixtures is required:

[0020] Close valves 5, 2, 8, 6, 3, 4, and 1. Open valves 1, 2, 3, and 7. Open valves 3 and 8 sequentially. Close valve 3 until the gas flow weakens. Open valve 3 again. Repeat this opening and closing process at least 30 times. Adjust valve 8 until the gas flow decreases. Connect the fluorinated mixed gas cylinder valve connector with the gas and tighten it. Open valve 8 and confirm there are no leaks at the cylinder connector. Close valve 3. Open valves 1 and 2 until there is no gas flow sound. Close valves 2, 8, and 1. Slowly open the fluorinated mixed gas cylinder valve. After closing the gas cylinder valve, open the eighth and fourth valves in sequence. The third pressure gauge should show pressure; ensure there are no leaks at the valve connections. Then slowly open the fluorine-containing mixed gas cylinder valve. The second pressure gauge should reach the specified pressure; close the fourth and eighth valves. Open the first, fifth, second, and fourth valves in sequence. The second pressure gauge should drop to negative pressure. If the second pressure gauge pointer does not change for 1-2 minutes, close the fifth, second, and first valves in sequence. Open the eighth valve. The second pressure gauge should reach the specified pressure; close the fourth, eighth, and fluorine-containing mixed gas cylinder valves. The analyzer will then analyze the fluorine-containing mixed gas. The analysis is complete. Alternatively, open the first, fifth, second, eighth, and fourth valves in sequence. The second pressure gauge should drop to negative pressure. If the second pressure gauge pointer does not change for 1-2 minutes, close the fifth, second, eighth, fourth, and first valves in sequence. If the analyzer will not be used for an extended period, the third, fourth, and fifth valves can be opened in sequence for flow purging.

[0021] The beneficial effects of this scheme are: the device has a reasonable structure, is simple and convenient to operate, and has high controllability and safety performance. It draws in air from the pipeline through the injection port of the Venturi tube and then discharges the air from the outlet of the Venturi tube, achieving efficient and thorough replacement of the air in the pipeline. This enables efficient, accurate, stable and safe analysis of the content of impurity components in fluorine-containing mixed gases in subsequent analysis work, which is of great significance in practical applications. In addition, it can also analyze the concentration in pure fluorine gas, and the analysis results are more accurate and true.

[0022] Furthermore, it also includes an operation panel, in which the first pressure reducing valve, first pressure gauge, first valve, check valve, sixth valve, fourth valve, second pressure reducing valve, second pressure gauge, seventh valve, analyzer, third pressure reducing valve, fourth pressure gauge, third valve, and eighth valve are all communicatively or electrically connected to the operation panel. Operators can directly perform analysis work on the operation panel, which is simple, convenient, and highly efficient.

[0023] Furthermore, the first, second, and third pressure reducing valves are used to convert high-pressure gas into low-pressure gas. The pressure reducing valve is composed of a valve body, a diaphragm, a valve seat, a valve stem, a valve cap, and a handle. The valve body is made of 316L stainless steel.

[0024] Furthermore, the first, second, third, and fourth pressure gauges use elastic elements as sensing elements to measure and indicate pressures higher than ambient pressure. Each of the first, second, third, and fourth pressure gauges consists of an overflow orifice, a pointer, and a glass panel.

[0025] Furthermore, the one-way valve consists of a valve body, a valve core, a spring, and a sealing ring, and the valve body is made of 316L stainless steel.

[0026] Furthermore, the material of the venturi tube is 316L.

[0027] The first step is that the valve bodies of the first to the eighth valves are all composed of a valve body, a diaphragm, a valve seat, a valve stem, a valve cap, and a handle, and the valve body material is 316L.

[0028] Furthermore, the pipe is a hollow, long, round steel bar made of 316L stainless steel. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention.

[0030] Figure 2 This is a schematic diagram of the structure of Embodiment 2 of the present invention.

[0031] Figure 3 This is a schematic diagram of the structure of the tube plug located inside the vent pipe in Embodiment 2 of the present invention.

[0032] Figure 4 This is a schematic diagram of the structure of the tube plug located in the limiting groove in Embodiment 2 of the present invention.

[0033] Figure 5 This is a schematic diagram of the right side structure of the air outlet of the plug in Embodiment 2 of the present invention. Detailed Implementation

[0034] The following detailed description illustrates the specific implementation method:

[0035] The markings in the accompanying drawings include: 101, First valve; 102, Second valve; 103, Third valve; 104, Fourth valve; 105, Fifth valve; 106, Sixth valve; 107, Seventh valve; 108, Eighth valve; 109, First pressure reducing valve; 110, Second pressure reducing valve; 111, Third pressure reducing valve; 112, First pressure gauge; 113, Second pressure gauge; 114, Third pressure gauge; 115, Fourth pressure gauge; 1, Bottle body; 2, Gas valve; 3, Bottle mouth; 4, Vent pipe; 5, Permanent magnet; 6, Base; 7, Electromagnet; 8, Coil; 9, Support plate; 10, Support rod; 11, Push rod; 12, Pipe plug; 13, Limiting groove; 14, Fan blade.

[0036] Example 1 is basically as shown in the appendix. Figure 1 As shown:

[0037] An analytical device for fluorine-containing gases includes a first passage, a second passage, a third passage, and a fourth passage;

[0038] The first passage is sequentially equipped with a common nitrogen inlet pipe, a first pressure reducing valve 109, a first pressure gauge 112, a first valve 101, a check valve, and a venturi tube. The inlets of the common nitrogen inlet pipe, the first pressure reducing valve 109, the first pressure gauge 112, the first valve 101, the check valve, and the venturi tube are all connected by pipes. The check valve consists of a valve body, a valve core, a spring, and a sealing ring. The valve body is made of 316L stainless steel.

[0039] The second access path includes a fluorine gas inlet pipe, a sixth valve 106, a fourth valve 104, a second pressure reducing valve 110, a second pressure gauge 113, a seventh valve 107, and an analyzer, arranged sequentially. The fluorine gas inlet pipe, the sixth valve 106, the fourth valve 104, the second pressure reducing valve 110, the second pressure gauge 113, the seventh valve 107, and the analyzer are all connected by pipes. The fourth valve 104 is also connected to a third pressure gauge 114 via a pipe. The sixth valve 106 and the injector of the venturi tube are connected by a second valve 102 via a pipe. The exhaust end of the analyzer is connected to a fifth valve 105 via a pipe. The fifth valve 105 is connected to both the injector of the venturi tube and the second valve 102.

[0040] The third passage includes a third pressure reducing valve 111, a fourth pressure gauge 115, and a third valve 103 arranged sequentially. The third pressure reducing valve 111, the fourth pressure gauge 115, and the third valve 103 are all connected by pipes. The two ends of the third valve 103 are connected to the second valve 102 and the fourth valve 104 by pipes, respectively.

[0041] The fourth passage includes a fluorine-containing mixed gas cylinder and an eighth valve 108. The fluorine-containing mixed gas cylinder and the eighth valve 108 are connected by a pipeline. The eighth valve 108 is connected by a pipeline to the second valve 102 and the sixth valve 106, respectively.

[0042] The first pressure reducing valve 109, the second pressure reducing valve 110, and the third pressure reducing valve 111 are used to convert high-pressure gas into low-pressure gas. Each pressure reducing valve consists of a valve body, diaphragm, valve seat, valve stem, valve cap, and handle. The valve body is made of 316L stainless steel. The first pressure gauge 112, the second pressure gauge 113, the third pressure gauge 114, and the fourth pressure gauge 115 use elastic elements as sensing elements to measure and indicate pressures higher than ambient pressure. Each pressure gauge consists of an overflow orifice, a pointer, and a glass panel.

[0043] The valve bodies of valves 101 through 108 are all composed of a valve body, diaphragm, valve seat, valve stem, valve cap, and handle. The valve body material is 316L stainless steel. The pipe is a hollow, long, round steel strip, also made of 316L stainless steel.

[0044] Specific operations:

[0045] Before performing gas analysis, there may be air in the pipeline of the new analyzer. The air in the pipeline needs to be replaced. All valves are closed. Adjust the first pressure reducing valve 109 to 5-8 barg. Open the first valve 101, the fifth valve 105 and the seventh valve 107. The second pressure gauge 113 drops to negative pressure. When the pointer of the second pressure gauge 113 does not change for 1-2 minutes, close the fifth valve 105 and the seventh valve 107. Adjust the third pressure reducing valve 111 to 2-5 barg. Open the third valve 103, the fourth valve 104 and the seventh valve 107 in sequence. Adjust the second pressure reducing valve 110 to 1-5 psig to allow high-purity nitrogen to enter the analyzer to the specified pressure.

[0046] Repeat the following steps a total of 60 times: Close the third valve 103, open the fifth valve 105, and the second pressure gauge 113 drops to negative pressure; open the second valve 102, and when the pointer of the second pressure gauge 113 does not change for 1-2 minutes, close the fifth valve 105 and the second valve 102; open the third valve, and the second pressure gauge 113 reaches the specified pressure.

[0047] After replacement, bring the analyzer to the specified pressure and inject the sample to check if the replacement is complete. If not, repeat the above steps to continue replacement until it meets the requirements.

[0048] When pure fluorine gas analysis is required, close valves 101, 102, 103, 104, 105, and 108. Open valves 109, 110, and 111. Then, slowly open valves 106 and 102 sequentially. After venting for 10 minutes, close valves 106 and 104. Then, open valves 101, 105, and 107 sequentially, causing pressure gauge 113 to drop to negative pressure. Open valves 102 and 104. If pressure gauge 113 does not change after 1-2 minutes, close valves 105, 102, 104, and 101 sequentially. Then, slowly open valves 106 and 104 sequentially. When pressure gauge 113 reaches the specified value... When the pressure is reached, close the sixth valve 106, and open the first valve 101 and the fifth valve 105 in sequence. The second pressure gauge 113 will decrease to negative pressure. Open the second valve 102. If the pointer of the second pressure gauge 113 does not change for 1-2 minutes, close the fifth valve 105, the second valve 102, the fourth valve 104, and the first valve 101 in sequence. Slowly open the sixth valve 106 and the fourth valve 104 in sequence. When the second pressure gauge 113 reaches the specified pressure, close the fourth valve 104 and the sixth valve 106. The analyzer analyzes the pure fluorine gas. After the analysis is completed, open the first valve 101, the fifth valve 105, the second valve 102, and the fourth valve 104 in sequence. The second pressure gauge 113 will decrease to negative pressure. If the pointer of the second pressure gauge 113 does not change for 1-2 minutes, close the fifth valve 105, the second valve 102, the fourth valve 104, and the first valve 101 in sequence.

[0049] When analysis of fluorine-containing gas mixtures is required:

[0050] Close valves 105, 102, 108, 106, 103, 104, and 101. Open valves 109, 110, 111, and 107. Open valves 103 and 108 sequentially. Close valve 103 until the gas flow weakens. Open valve 103 again. Repeat this process at least 30 times. Adjust valve 108 until the gas flow decreases. Connect the gas cylinder to the fluorine-containing mixed gas cylinder valve connector and tighten it. Open valve 108 and confirm there are no leaks at the gas cylinder connector. Close valve 103. Open valves 101 and 102 until there is no gas flow sound. Close valves 102, 108, and 101. Slowly open and close the valve of the fluorine-containing mixed gas cylinder. Then, open the eighth valve 108 and the fourth valve 104 in sequence. The third pressure gauge 114 should show pressure. Ensure there are no leaks at the valve connections. Then, slowly open the fluorine-containing mixed gas cylinder valve again. The second pressure gauge 113 should reach the specified pressure. Close the fourth valve 104 and the eighth valve 108. Open the first valve 101, the fifth valve 105, the second valve 102, and the fourth valve 104 in sequence. The second pressure gauge 113 should drop to negative pressure. If the pointer of the second pressure gauge 113 does not change for 1-2 minutes, close the fifth valve 105, the second valve 102, and the first valve 101 in sequence. Open the eighth valve 108. The second pressure gauge 113 should reach the specified pressure. Close the fourth valve 104, the eighth valve 108, and the fluorine-containing mixed gas cylinder valve. The analyzer will then analyze the fluorine-containing mixed gas. The analysis is now complete. Open valves 101, 105, 102, 104, 104, 105, 102, 108, 104, 104, 105, 102, 104, 104, 104, 105, 102, 104, 104, 104, 105, 106, 107, 108, 109, 100, 101, 100, 101, 102, 104, 105, 106, 107, 108, 109, 100, 101, 102 ...

[0051] Example 2,

[0052] The difference between this embodiment and Embodiment 1 is as follows: (See attached...) Figure 2-5 As shown:

[0053] A fluorine-containing mixed gas cylinder includes a cylinder body 1, which is a hollow cylinder. A valve 2 is located at the top of the cylinder body 1, and a bottle opening 3 is also located at the top of the cylinder body 1. The valve 2 is used to close the bottle opening 3. The valve 2 is detachably connected to the cylinder body 1. A vent pipe 4 is installed inside the cylinder body 1, communicating with the bottle opening 3. The vent pipe 4 is a spring and is hollow. A permanent magnet 5 is mounted on the vent pipe 4. A base 6 is located at the bottom of the cylinder body 1, and an electromagnet 7 corresponding to the permanent magnet 5 is mounted on the base 6. The permanent magnet 5 and the electromagnet 7 repel each other due to their similar poles. A coil 8 is wound around the cylinder body 1, and an input wire and an output wire are connected to the coil 8. The wires form a closed loop, and the electromagnet 7 is located on the closed loop. The bottom end of the vent pipe 4 is provided with a sealing mechanism, which includes a support plate 9, a support rod 10, a suction cup, and a pipe plug 12. The pipe plug 12 is used to block the vent pipe 4. The support plate 9 is fixedly connected to the upper end of the vent pipe 4. The upper end of the support rod 10 is hinged to the support plate 9, and the lower end of the support rod 10 is fixedly connected to the pipe plug 12. The support plate 9 is provided with a sliding groove for the support rod 10 to rotate. The support plate 9 is provided with a limiting groove 13 that matches the support rod 10. The limiting groove 13 is used to prevent the support rod 10 from moving downward. The top of the bottle body 1 is provided with a push rod 11 for pushing the bottle stopper downward.

[0054] Because the different gases in the fluorinated gas mixture have significant density differences, the mixed gas that has just been filled from valve 2 into cylinder 1 needs at least one hour of shaking before the components can mix in a short time. If it is not shaken, it will take at least a week to mix naturally. This results in a waste of manpower, resources and time when filling the mixed gas cylinder with fluorinated gas, and the utilization efficiency of the mixed gas cylinder is low.

[0055] When it is necessary to fill the bottle 1 with a fluorine-containing mixed gas, the gas valve 2 is opened, and the fluorine-containing mixed gas is injected into the vent pipe 4 through the bottle mouth 3. The continuous gas injection causes the vent pipe 4 to stretch from its initial state. After the vent pipe 4 is stretched, the outlet of the vent pipe 4 is nearly perpendicular to the ground. The continuously injected fluorine-containing mixed gas pushes open the pipe plug 12, causing the airflow in the vent pipe 4 to rush out. The vent pipe 4 then moves upward due to the reaction force of the airflow. Because the vent pipe 4 is a spring, it moves up and down repeatedly due to the reaction force of the airflow, which in turn drives the permanent magnet 5 to move up and down. The permanent magnet 5 cuts the magnetic field lines, generating an electric current. The electromagnet 7 then becomes charged and repels the permanent magnet 5, causing the permanent magnet 5 to move upward due to the repulsive force. Meanwhile, the continuous input of gas from the outside causes the bottom of the vent pipe 4 to move downward, and the vent pipe 4 continues to move up and down repeatedly. The vent pipe 4 stirs the gas injected into the bottle 1, making the mixed gas more uniform and the mixing effect better.

[0056] In addition, a fan blade 14 is provided on the side of the vent pipe 4 away from the bottle stopper. During the up and down movement of the vent pipe 4, the fan blade 14 plays a stirring and mixing role on the gas in the bottle, which improves the gas mixing efficiency of the fluorine-containing mixed gas bottle.

[0057] When the gas in the vent tube 4 pushes open the bottle stopper, the bottle stopper rotates clockwise and then is located in the limiting groove 13 with the support rod 10, so as to prevent the bottle stopper from rotating back and blocking the air outlet of the vent tube 4.

[0058] Then, when it is necessary to remove the gas from the fluorine-containing mixed gas cylinder for use, open the gas valve 2 and discharge the mixed gas from the cylinder through the vent pipe 4. As the gas in the cylinder slowly disappears, the vent pipe 4 contracts and moves upward. Then, the support rod at the top of the cylinder body 1 pushes the tube plug 12 out of the limiting groove 13. Then, the tube plug 12 moves downward due to its own weight and is subjected to the force given by the support rod. Then, the tube plug 12 moves counterclockwise into the vent pipe 4, thereby blocking the gas outlet of the vent pipe 4 for the next use.

[0059] The above descriptions are merely embodiments of the present invention, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of the present invention, and these should also be considered within the scope of protection of the present invention. These modifications and improvements will not affect the effectiveness of the present invention or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. An analytical apparatus for fluorine-containing gases, characterized in that: It includes a first passage, a second passage, a third passage, and a fourth passage; the first passage is sequentially equipped with a common nitrogen inlet pipe, a first pressure reducing valve (109), a first pressure gauge (112), a first valve (101), a one-way valve, and a venturi tube. The inlets of the common nitrogen inlet pipe, the first pressure reducing valve (109), the first pressure gauge (112), the first valve (101), the one-way valve, and the venturi tube are all connected by pipes. The second passage includes a fluorine gas inlet pipe, a sixth valve (106), a fourth valve (104), a second pressure reducing valve (110), a second pressure gauge (113), a seventh valve (107), and an analyzer, arranged sequentially. The fluorine gas inlet pipe, the sixth valve (106), the fourth valve (104), the second pressure reducing valve (110), the second pressure gauge (113), the seventh valve (107), and the analyzer are all connected by pipes. The fourth valve (104) is also connected to a third pressure gauge (114) via a pipe. The sixth valve (106) and the injection port of the venturi tube are connected by a second valve (102) via a pipe. The exhaust end of the analyzer is connected to a fifth valve (105) via a pipe. The fifth valve (105) is connected to both the injection port of the venturi tube and the second valve (102). The third passage includes a third pressure reducing valve (111), a fourth pressure gauge (115), and a third valve (103) arranged sequentially. The third pressure reducing valve (111), the fourth pressure gauge (115), and the third valve (103) are all connected by pipes. The two ends of the third valve (103) are connected to the second valve (102) and the fourth valve (104) by pipes, respectively. The fourth passage includes a fluorine-containing mixed gas cylinder (1) and an eighth valve (108). The fluorine-containing mixed gas cylinder (1) and the eighth valve (108) are connected by a pipeline. The eighth valve (108) is connected by a pipeline to the second valve (102) and the sixth valve (106) respectively. The bottle body (1) is a hollow cylinder. An air valve (2) is provided at the top of the bottle body (1). A bottle mouth (3) is provided at the top of the bottle body (1). The air valve (2) is used to close the bottle mouth (3). The air valve (2) is detachably connected to the bottle body (1). A vent pipe (4) is provided inside the bottle body (1). The vent pipe (4) is connected to the bottle mouth (3). The vent pipe (4) is a spring. The vent pipe (4) is hollow. A permanent magnet (5) is provided on the vent pipe (4). A base (6) is provided at the bottom of the bottle body (1). An electromagnet (7) corresponding to the permanent magnet (5) is provided on the base (6). The permanent magnet (5) and the electromagnet (7) are like poles and repel each other. A coil (8) is wound around the bottle body (1). An input wire and an output wire are connected to the coil (8). The output wire and the input wire The two sides form a closed loop. The electromagnet (7) is located on the closed loop. The bottom end of the vent pipe (4) is provided with a sealing mechanism. The sealing mechanism includes a support plate (9), a support rod (10), a suction cup and a tube plug (12). The tube plug (12) is used to block the vent pipe (4). The support plate (9) is fixedly connected to the upper end of the vent pipe (4). The upper end of the support rod (10) is hinged to the support plate (9). The lower end of the support rod (10) is fixedly connected to the tube plug (12). The support plate (9) is provided with a sliding groove for the support rod (10) to rotate. The support plate (9) is provided with a limiting groove (13) that matches the support rod (10). The limiting groove (13) is used to prevent the support rod (10) from moving downward. The top of the bottle body (1) is provided with a push rod (11) for pushing the bottle stopper downward.

2. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: It also includes an operation panel, and the first pressure reducing valve (109), the first pressure gauge (112), the first valve (101), the check valve, the sixth valve (106), the fourth valve (104), the second pressure reducing valve (110), the second pressure gauge (113), the seventh valve (107), the analyzer, the third pressure reducing valve (111), the fourth pressure gauge (115), the third valve (103), and the eighth valve (108) are all connected to the operation panel for communication or electrical connection.

3. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The first pressure reducing valve (109), the second pressure reducing valve (110) and the third pressure reducing valve (111) are used to convert high pressure gas into low pressure. The pressure reducing valve is composed of a valve body, a diaphragm, a valve seat, a valve stem, a valve cap and a handle. The valve body is made of 316L.

4. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The first pressure gauge (112), the second pressure gauge (113), the third pressure gauge (114) and the fourth pressure gauge (115) use elastic elements as sensitive elements to measure and indicate pressures higher than the ambient pressure. The first pressure gauge (112), the second pressure gauge (113), the third pressure gauge (114) and the fourth pressure gauge (115) are all composed of an overflow hole, a pointer and a glass panel.

5. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The one-way valve consists of a valve body, a valve core, a spring, and a sealing ring. The valve body is made of 316L stainless steel.

6. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The venturi tube is made of 316L stainless steel.

7. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The valve bodies of the first valve (101) to the eighth valve (108) are all composed of a valve body, a diaphragm, a valve seat, a valve stem, a valve cap, and a handle. The valve body material is 316L.

8. The analytical apparatus for fluorine-containing gases according to claim 1, characterized in that: The pipe is a hollow, long, round steel bar made of 316L stainless steel.

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