The substrate container and its door assembly, support assembly and elastic buffer

Abstract

This invention proposes a substrate container and its door assembly, support assembly, and elastic buffer. The substrate container includes: a container body, a door, a limiter, a support, and at least two elastic buffers. The container body has a receiving space and an opening communicating with the receiving space. The door is disposed at the opening, the limiter is disposed on the door and faces the opening, and the support is disposed on one side of the receiving space. At least two elastic buffers are respectively tightly fitted between the door and the limiter, and between the support and the container body. The elastic buffers proposed in this invention can be applied between any two rigid elements in the substrate container to provide cushioning force and appropriate friction to mitigate collisions between rigid elements and reduce dust generation.

Description

Technical Field

[0001] This invention relates to a container, and more particularly to a substrate container and its door assembly, support assembly and elastic buffer. Background Technology

[0002] Currently, the semiconductor industry uses substrate containers to hold substrates. These substrates can be printed circuit boards, wafers, or sheet materials such as trays or glass. During transportation, substrate containers are prone to breakage due to excessive vertical vibration, loosening of components within the container, dust generation due to friction, and even serious impacts on the cleanliness of the container. Furthermore, dust issues may arise during the transfer and positioning operations using the substrate container in conjunction with equipment interfaces.

[0003] Therefore, how to solve many problems such as damage to the substrate by vibration, loosening of assembly components inside the substrate container, friction between the substrate container and assembly components, and dust generated by friction during the transmission and positioning process between the substrate container and the equipment interface are urgent challenges that need to be addressed. Summary of the Invention

[0004] Therefore, in order to solve the various problems of existing substrate containers, the present invention proposes a substrate container and its door assembly, support assembly and elastic buffer.

[0005] To achieve the above objectives, the present invention provides a substrate container, comprising: a container body having an accommodating space and an opening communicating with the accommodating space; a door body disposed at the opening; a limiter disposed on the door body facing the opening; a support member disposed on one side of the accommodating space; and at least two elastic buffer members respectively tightly fitted between the door body and the limiter, and between the support member and the container body.

[0006] In one embodiment of the present invention, each of the at least two elastic buffers includes a socket body, each socket body having two socket abutment surfaces connected to form a socket space and a socket interface communicating with the socket space.

[0007] In one embodiment of the present invention, the surface of the door facing the opening is provided with at least one protrusion, one of the at least two elastic buffer members is disposed on the protrusion, wherein the two engaging surfaces of the elastic buffer member disposed on the protrusion are used to tightly engage and abut against the door and the limiter.

[0008] In one embodiment of the present invention, the support has at least one protrusion facing an inner wall surface of the container body, and one of the at least two elastic buffers is disposed on the protrusion, wherein the two engaging abutting surfaces of the buffer disposed on the protrusion are used to tightly abut against the support and the inner wall surface.

[0009] In one embodiment of the present invention, at least one pressure regulator is further provided in at least one through hole of the door body, and the at least one pressure regulator is used to adjust the gas replacement rate inside the accommodating space.

[0010] In one embodiment of the present invention, at least two air pressure regulators are further included. The at least two air pressure regulators are an air intake regulating member, an air outlet regulating member, or a combination of at least one air intake regulating member and at least one air outlet regulating member. The air intake regulating member and the air outlet regulating member are respectively disposed in different through holes of the door body.

[0011] The present invention further proposes a door assembly for a substrate container, comprising: a door body disposed at an opening of the substrate container, the surface of the door body facing the opening having at least one protrusion; a limiter disposed on the door body, the limiter facing the opening; and at least one elastic buffer member disposed on the protrusion, the elastic buffer member comprising a sleeve body having two abutting surfaces, the two abutting surfaces being connected to form a fitting space and a fitting interface communicating with the fitting space, the protrusion being inserted into the fitting space from the fitting interface, and the two abutting surfaces being used to tightly abut against the door body and the limiter.

[0012] In one embodiment of the present invention, the socket has a closed end, and the top end of the protrusion abuts against the closed end.

[0013] The present invention further proposes a support assembly for a substrate container, comprising: a support disposed on one side of the receiving space of the substrate container, the support having at least one protrusion facing an inner wall surface of the substrate container; and at least one elastic buffer disposed on the protrusion, the elastic buffer including a sleeve having two abutting surfaces connected to form a fitting space and a fitting interface communicating with the fitting space, the protrusion being inserted into the fitting space from the fitting interface, and the two abutting surfaces being used to tightly abut against the support and the inner wall surface.

[0014] In one embodiment of the present invention, the socket body further has a through-outlet that communicates with the socket space, and the protrusion extends out of the through-outlet from the socket space.

[0015] In one embodiment of the present invention, the end of the protrusion further has a hook end, which extends out of the outlet and hooks onto the outer surface of the sleeve.

[0016] The present invention also proposes an elastic buffer for use in a substrate container, the substrate container having a first component and a second component, wherein the first component has a protrusion, and the elastic buffer includes: a sleeve body sleeved on the protrusion for tightly fitting and abutting between the first component and the second component.

[0017] In one embodiment of the present invention, the first component is a door body, the second component is a limiter, and the sleeve is fitted onto the protrusion of the door body to tightly fit and abut against the door body and the limiter.

[0018] In one embodiment of the present invention, the socket has a closed end, and the top end of the protrusion abuts against the closed end.

[0019] In one embodiment of the present invention, the first component is a support, the second component is an inner wall surface of the substrate container, and the sleeve is fitted onto the protrusion of the support to fit tightly against the support and the inner wall surface.

[0020] In one embodiment of the present invention, the socket body has a socket space, a socket interface and a through outlet, the socket interface and the through outlet are connected to the socket space, and the protrusion is inserted into the socket space from the socket interface and passes out of the socket space through the through outlet.

[0021] In summary, the substrate container and its door assembly, support assembly, and elastic buffer of the present invention provide cushioning force and appropriate friction through an elastic buffer that can be applied between any two rigid elements in the substrate container, thereby mitigating the impact of rigid elements and reducing dust generation. Furthermore, if the substrate container deforms due to thermal expansion and contraction, this deformation can be eliminated by the elastic buffer, thus preventing the elements from becoming loose. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the assembly of a substrate container according to an embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of the assembly of a door component according to an embodiment of the present invention.

[0024] Figure 3 This is a rear view of a door assembly according to an embodiment of the present invention.

[0025] Figure 4A for Figure 3 A cross-sectional view along line segment A-A'.

[0026] Figure 4B An assembly diagram showing the limiter and elastic buffer not yet engaged.

[0027] Figure 5AThis is a side view of a support assembly according to an embodiment of the present invention.

[0028] Figure 5B This is an enlarged view of the engagement end and the elastic buffer before engagement according to an embodiment of the present invention.

[0029] Figure 5C This is a partially enlarged schematic diagram of a variation of the support assembly according to an embodiment of the present invention.

[0030] Figure 6A This is a cross-sectional view of an elastic buffer member applied to a substrate container according to an embodiment of the present invention. Figure 1 .

[0031] Figure 6B This is a cross-sectional view of an elastic buffer member applied to a substrate container according to an embodiment of the present invention. Figure 2 .

[0032] Figure 7 This is a schematic diagram of the assembly of a pressure regulator according to an embodiment of the present invention.

[0033] Figure Labels

[0034] 100 substrate container

[0035] 1 Container body

[0036] 11 Opening

[0037] 12 Inner wall surface

[0038] 12a inner wall surface

[0039] 121 Card Slot

[0040] 121a card slot

[0041] 2. Door body

[0042] 21 convex part

[0043] 22. Air pressure regulator

[0044] 221 Intake regulating component

[0045] 222 Exhaust regulating component

[0046] 23 holes

[0047] 3 Limiters

[0048] 31 Connecting parts

[0049] 4 Support

[0050] 41 convex part

[0051] 41a convex part

[0052] 411 Connecting end

[0053] 51 Elastic buffer

[0054] 511 Socketed Support Surface

[0055] 512 socket space

[0056] 513 sockets

[0057] 514 Closed End

[0058] 52 Elastic buffer

[0059] 521 Socketed Support Surface

[0060] 522 socket space

[0061] 523 sockets

[0062] 524 Exit

[0063] S accommodating space Detailed Implementation

[0064] To fully understand the present invention, the following specific embodiments, in conjunction with the accompanying drawings, provide a detailed description. Those skilled in the art can understand the purpose, features, and effects of the present invention from the content disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the spirit of the present invention. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the patent application of the present invention. The following explanation is provided:

[0065] like Figure 1 As shown, the substrate container 100 of this embodiment of the invention includes: a container body 1, a door 2, a limiter 3, a support 4, and at least two elastic buffers 51 and 52.

[0066] The container body 1 has a receiving space S and an opening 11 communicating with the receiving space S. The receiving space S is used to receive, but is not limited to, multiple sheet-like objects, such as circuit boards, wafers, trays, glass, etc.

[0067] The door 2 is movably disposed at the opening 11 for closing or opening the accommodating space S.

[0068] like Figure 2 and Figure 3As shown, the surface of the door body 2 facing the opening 11 is provided with at least one protrusion 21, and the limiter 3 is provided on the protrusion 21 of the door body 2. The limiter 3 faces the opening 11 and is used to hold against multiple sheet-like objects in the accommodating space S to provide a more stable support effect.

[0069] A support 4 is disposed on one side of the accommodating space S to support and / or separate multiple sheet-like objects within the accommodating space S. Preferably, at least two sets of supports 4 are provided, respectively disposed on opposite sides of the accommodating space S. Figures 5A to 6A As shown, the support 4 has at least one protrusion 41, which faces an inner wall surface 12 of the container body 1. The inner wall surface 12 can be the left and right side walls, rear side wall, bottom wall, or top wall of the container body 1. This invention does not limit the actual position of the inner wall surface 12; any inner wall surface of the container body 1 that engages with the support 4 can be considered the inner wall surface 12 as defined in this invention. Figure 6A In one example, the inner wall surface 12 is the rear wall surface of the container body 1; while in another example, such as Figure 6B As shown, the inner wall surface 12a is the top wall surface of the container body 1.

[0070] like Figures 1 to 6B As shown, at least two elastic buffers 51 and 52 are respectively tightly fitted between the door 2 and the limiter 3, and between the support 4 and the container body 1. Elastic buffer 51 is tightly fitted between the door 2 and the limiter 3, and elastic buffer 52 is tightly fitted between the support 4 and the container body 1. The elastic buffers 51 and 52 are made of elastic, wear-resistant materials, such as silicone or fluorinated rubber. This solves the problem of mutual interference between the limiter and the door, which can easily lead to detachment due to vibration, thermal expansion and contraction, etc. It also solves the problem of interference friction between the support and the container body due to their rigidity, as well as the problem of gap collisions between them, which can generate dust.

[0071] Because the elastic buffers 51 and 52 possess elasticity and abrasion resistance, when the elastic buffer 51 is fitted onto the door 2, it undergoes elastic deformation due to the compression from the connecting portion 31 of the limiter 3, thereby achieving a tight fit and restraint effect. Specifically, when the elastic buffer 51 is compressed between a connecting portion 31 of the limiter 3 and a protrusion 21 of the door 2, the material properties of the elastic buffer 51 generate a high compressive force and provide cushioning and appropriate friction. Furthermore, if the substrate container 100 deforms due to thermal expansion and contraction, this deformation can be eliminated by the elastic buffer 51, thereby preventing the limiter 3 from falling off the door 2. On the other hand, when the elastic buffer 52 is fitted onto the support 4, and the slot 121 (see) assembles the support 4 onto the inner wall surface 12 of the container body 1... Figure 6AAt this time, the elastic buffer 52 can fill the gap between the protrusion 41 of the support 4 and the slot 121, thereby solving the problem of dust generated by friction.

[0072] Although this embodiment uses door 2 and limiter 3, and support 4 and container body 1 as examples, in practice, the elastic buffer proposed in this invention can be applied between any two rigid elements in the substrate container 100 to provide buffering force and appropriate friction to mitigate collisions between rigid elements and reduce dust generation. Therefore, the elastic buffer of this invention is not limited to being disposed between door 2 and limiter 3, or between support 4 and container body 1. Depending on the design requirements of container body 1, any two adjacent components can be considered as a first component and a second component, wherein the first component has a protrusion, and the elastic buffer abuts between the first component and the second component. The first component is, for example, the aforementioned door 2 or support 4, and the second component is, for example, the aforementioned limiter 3 or container body 1.

[0073] The elastic buffer of the present invention has the following structure: a sleeve body, which is sleeved on the protrusion of the first component to fit tightly against the first component and the second component.

[0074] See Figures 1 to 4B Taking the example of an elastic buffer 51 disposed between the door body 2 and the limiter 3, the sleeve body has two sleeve abutment surfaces 511. The two sleeve abutment surfaces 511 are connected to form a sleeve space 512 and a sleeve interface 513 communicating with the sleeve space 512. The sleeve interface 513 allows the protrusion 21 of the door body 2 (first component) to be inserted into the sleeve space 512 through the sleeve interface 513, so that the sleeve body is sleeved on the protrusion 21 of the door body 2. The two sleeve abutment surfaces 511 are used to tightly abut against the door body 2 and the limiter 3 (second component). In detail, the inner surface of the sleeve abutment surface 511 is in close contact with the side of the protrusion 21 and is in close contact with the door body 2; the outer surface of the sleeve abutment surface 511 is in close contact with the limiter 3 and is in close contact with the limiter 3. The socket has two abutment surfaces 511, each of which is tightly fitted and abuts against the protrusion 21 and the limiter 3. In this invention, the elastic deformation characteristics of the elastic buffer material 51 allow a high degree of compression between the door 2 and the limiter 3, providing cushioning force and appropriate friction, thereby preventing the limiter 3 from falling off the door 2. In this example, the socket further has a closed end 514, with the top of the protrusion 21 of the door 2 abutting against the closed end 514. That is, the socket completely covers the protrusion 21.

[0075] In another example, see Figure 1 and Figures 5A to 6ATaking the elastic buffer 52 disposed between the support 4 and the container body 1 as an example, its sleeve body has two sleeve abutment surfaces 521. The two sleeve abutment surfaces 521 are connected to form a sleeve space 522 and a sleeve interface 523 communicating with the sleeve space 522. The sleeve interface 523 allows the protrusion 41 of the support 4 (first component) to be inserted into the sleeve space 522 from the sleeve interface 523, so that the sleeve body is sleeved on the protrusion 41 of the support 4. The two sleeve abutment surfaces 521 are used to tightly abut against the support 4 and the inner wall surface 12 of the container body 1 (second component). In detail, the inner surface of the sleeve abutment surface 521 is in close contact with the side of the protrusion 41 and is in close contact with the support 4; the outer surface of the sleeve abutment surface 521 is in close contact with the inner wall surface 12 and is in close contact with the inner wall surface 12. The socket has two abutment surfaces 521, each of which is tightly fitted and abuts against the protrusion 41 and the inner wall surface 12. In this invention, by utilizing the elastic deformation characteristics of the elastic buffer material 52, a high degree of compression force can be generated between the inner wall surface 12 and the support 4, providing buffering force and appropriate friction, thereby preventing the support 4 from falling off the container body 1 and avoiding the problem of dust generation due to friction. In this example, the socket also has a through-hole 524, which connects to the socket space 522, and the protrusion 41 of the support 4 passes through the through-hole 524 from the socket space 522. Further, in this example, as... Figure 5A and Figure 5B As shown, the end of the protrusion 41 of the support 4 also has a hook end 411. The outlet 524 is the position that matches the hook end 411. The hook end 411 extends out of the outlet 524 and hooks onto the outer surface of the sleeve body, thereby hooking and fixing the elastic buffer 52. In other variations, such as Figure 5C As shown, the protrusion 41a of the support 4 may not have the aforementioned hook end 411, and the elastic buffer 52 is still sleeved on the protrusion 41a of the support 4, with the protrusion 41a extending through the outlet 524. For example, when the protrusion 41a of the support 4 faces the top wall surface of the container body 1, the elastic buffer 52 can naturally sleeve on the protrusion 41a by gravity, and the protrusion 41a does not need to have the hook end 411. However, the present invention is not limited to this.

[0076] As Figure 6A Corresponding change examples, Figure 6B The inner wall surface 12a is the top wall surface of the container body 1, relative to Figure 6AThe inner wall surface 12 is the rear wall surface of the container body 1. In this example, the elastic buffer 52 between the support 4 and the container body 1 allows the protrusion 41a at the top of the support 4 to be inserted, so that the sleeve is fitted onto the protrusion 41a of the support 4, and the elastic buffer 52 is tightly fitted and held between the support 4 and the groove 121a of the inner wall surface 12a. Utilizing the elastic deformation characteristics of the material of the elastic buffer 52, a high degree of pressure can be generated between the inner wall surface 12a and the support 4, providing cushioning force and appropriate friction, thereby preventing the support 4 from falling off the container body 1, while avoiding the problem of dust generation due to friction.

[0077] Furthermore, in this embodiment, please also refer to... Figure 1 and Figure 7 The substrate container 100 also includes at least one pressure regulator 22 and at least one through-hole 23 disposed in the door 2. The through-hole 23 is a hole that connects the accommodating space S to the outside, and its placement must avoid the installation range of the limiter 3. The pressure regulator 22 is used to adjust the gas replacement rate inside the accommodating space S. The pressure regulator 22 is, for example, a check valve, which can adjust the pressure value of the accommodating space S. For example, when the pressure value of the accommodating space S approaches a vacuum state, pressure is released to adjust the gas replacement of the accommodating space S, and at the same time, it can also effectively reduce the humidity of the accommodating space S.

[0078] Furthermore, the aforementioned pressure regulators 22 are at least two in number, and the at least two pressure regulators 22 are an inlet regulating member 221, an outlet regulating member 222, or a combination of at least one inlet regulating member 221 and at least one outlet regulating member 222. The inlet regulating member 221 and the outlet regulating member 222 are respectively disposed in different through holes 23 of the door body 2 to improve the gas replacement efficiency of the regulating accommodating space S. The inlet regulating member 221 and the outlet regulating member 222 are, for example, check valves that are opposite to each other.

[0079] The present invention has been disclosed above with reference to embodiments. Those skilled in the art should understand that these embodiments are merely illustrative and should not be construed as limiting the scope of the invention. It should be noted that any variations and substitutions equivalent to these embodiments should be considered within the scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope defined in the patent application.

Claims

1. A substrate container, comprising: A container body having a receiving space and an opening communicating with the receiving space; A door is positioned within the opening; A limiter is provided on the door body, and the limiter faces the opening; A support is provided on one side of the accommodating space; as well as At least two elastic buffers are respectively fitted between the door and the limiter, and between the support and the container body; each of the at least two elastic buffers includes a sleeve body, each sleeve body has two sleeve abutment surfaces, the two sleeve abutment surfaces are connected to form a sleeve space and a sleeve interface communicating with the sleeve space.

2. The substrate container according to claim 1, wherein the surface of the door facing the opening is provided with at least one protrusion, one of the at least two elastic buffers is disposed on the protrusion, wherein the two engaging abutting surfaces of the elastic buffer disposed on the protrusion are used to tightly abut against the door and the limiter.

3. The substrate container according to claim 1, wherein the support has at least one protrusion facing an inner wall surface of the container body, one of the at least two elastic buffers is disposed on the protrusion, wherein the two engaging abutting surfaces of the buffer disposed on the protrusion are used to tightly abut against the support and the inner wall surface.

4. The substrate container according to claim 1 further includes at least one pressure regulator disposed in at least one through hole of the door body, the at least one pressure regulator being used to adjust the gas replacement rate inside the accommodating space.

5. The substrate container according to claim 1 further includes at least two air pressure regulators, wherein the at least two air pressure regulators are an air inlet regulating member, an air outlet regulating member, or a combination of at least one air inlet regulating member and at least one air outlet regulating member, wherein the air inlet regulating member and the air outlet regulating member are respectively disposed in different through holes of the door body.

6. A door assembly for a substrate container, comprising: A door body is disposed at an opening of the substrate container, and the surface of the door body facing the opening is provided with at least one protrusion; A limiter is disposed on the door body, the limiter facing the opening; and At least one elastic buffer is disposed on the protrusion. The elastic buffer includes a sleeve body with two abutting surfaces. The two abutting surfaces are connected to form a sleeve space and an interface communicating with the sleeve space. The protrusion is inserted into the sleeve space from the interface. The two abutting surfaces are used to tightly abut against the door body and the limiter.

7. The door assembly according to claim 6, wherein the sleeve has a closed end, and the top end of the protrusion abuts against the closed end.

8. A support assembly for a substrate container, comprising: A support is disposed on one side of the receiving space of the substrate container, the support having at least one protrusion facing an inner wall surface of the substrate container; and At least one elastic buffer is disposed on the protrusion. The elastic buffer includes a sleeve body with two abutting surfaces. The two abutting surfaces are connected to form a sleeve space and an interface communicating with the sleeve space. The protrusion is inserted into the sleeve space from the interface. The two abutting surfaces are used to tightly abut against the support and the inner wall surface.

9. The support assembly of claim 8, wherein the socket body further has a through-outlet communicating with the socket space, and the protrusion extends out of the socket space through the through-outlet.

10. The support assembly of claim 9, wherein the end of the protrusion further has a hook end that extends out of the outlet and hooks onto the outer surface of the sleeve.

11. An elastic cushioning member for use in a substrate container, the substrate container being provided with a first component and a second component, wherein the first component has a protrusion, the elastic cushioning member comprising: A socket body is fitted onto the protrusion to be tightly fitted and held between the first component and the second component; the socket body has two abutting surfaces that are connected to form a socket space and an interface communicating with the socket space.

12. The elastic buffer according to claim 11, wherein the first component is a door body, the second component is a limiter, and the sleeve is fitted onto the protrusion of the door body for tight fitting and abutting between the door body and the limiter.

13. The elastic buffer according to claim 12, wherein the sleeve has a closed end, and the top end of the protrusion abuts against the closed end.

14. The elastic buffer according to claim 11, wherein the first component is a support, the second component is an inner wall surface of the substrate container, and the sleeve is fitted onto the protrusion of the support for a tight fit between the support and the inner wall surface.

15. The elastic buffer according to claim 14, wherein the socket body has a socket space, a socket interface and a through outlet, the socket interface and the through outlet communicating with the socket space, and the protrusion is inserted into the socket space from the socket interface and exits from the socket space through the through outlet.

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