A low temperature test flow channel refrigeration device

Abstract

The invention discloses a low-temperature test channel refrigeration device, and relates to the fields of semiconductor and industrial automation. In the low-temperature test channel refrigeration device, after the refrigerant enters the device through a refrigerator liquid supply input pipe, it is divided and enters the low-temperature test channel group A and the low-temperature test channel group B respectively, and then the two groups of divided refrigerant liquids are respectively collected through the test channel return pipe of the test channel group A and the test channel return pipe of the test channel group B, and then enter the low-temperature preheating channel device of the group A from the lower end, and then flow upward through the liquid supply input pipe from the group A to the group B to the bottom of the low-temperature preheating channel device of the group B, and then flow out from the refrigerator return liquid output pipe at the top of the low-temperature preheating channel device of the group B, and flow back to the refrigerator system, so as to realize the circulation of the cooling liquid, thereby solving the problems of high design and manufacturing cost, high storage and transportation management cost and poor safety of the low-temperature environment manufactured by the traditional production test using liquid nitrogen refrigeration.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor and industrial automation, in particular to a low-temperature test flow channel refrigeration device. Background Art

[0002] An existing low-temperature test channel refrigeration device and method is to use a refrigeration system to transport the heat transfer fluid to the horizontally placed pre-heating area and test area in parallel to achieve refrigeration of the area; the production robot puts the chip products into the low-temperature pre-heating area in turn, and after a period of pre-heating, the robot transfers the products to the low-temperature test area. The device and method have the following shortcomings:

[0003] The refrigeration system uses the parallel delivery method of thermal fluid, which results in large temperature differences in different areas.

[0004] The process of transferring and transporting chips in low-temperature areas requires a large space for the robot to move, resulting in larger equipment size and higher cost.

[0005] The chip transfer process is prone to damage and fracturing, causing secondary damage problems

[0006] Another main refrigeration method for low-temperature environments used in production testing is liquid nitrogen refrigeration. This device and method have the following shortcomings:

[0007] The design and manufacturing cost of the low-temperature test device refrigerated by liquid nitrogen is relatively high;

[0008] Liquid nitrogen required for refrigeration is a consumable item, and the storage, transportation and management costs are high;

[0009] Safety risks of using liquid nitrogen in production workshops;

[0010] In order to solve the above problems, the present invention provides a low-temperature test channel refrigeration device and method to solve the above problems. Summary of the invention

[0011] In view of the deficiencies in the prior art, the present invention provides a low-temperature test flow channel refrigeration device and method, which solves the problem that the main refrigeration method for low-temperature environments currently used in production tests is liquid nitrogen refrigeration, and the design and manufacturing costs of low-temperature test devices using liquid nitrogen refrigeration are high; the liquid nitrogen required for refrigeration is a consumable item, and the storage, transportation and management costs are high; and the safety risks of using liquid nitrogen in production workshops are high.

[0012] To achieve the above objectives, the present invention is implemented through the following technical solutions: a low-temperature test flow channel refrigeration method, which uses a refrigeration system to serially transport the thermal transfer liquid to two groups of pre-temperature zone flow channels and test zone flow channels placed vertically for refrigeration, and uses the heat pipe principle to fully transmit the temperature of the thermal transfer liquid to the two groups of pre-temperature zone flow channels and test zone flow channels, thereby achieving temperature consistency;

[0013] The refrigeration device is to arrange chip product directional tracks on the surface of the two groups of pre-heating zone flow channels and the test zone flow channels placed vertically. When the products enter the entrance of the directional track in turn, the products enter the directional track of the pre-heating zone one by one by using their own gravity for low-temperature pre-heating. After a period of low-temperature soaking and pre-heating;

[0014] According to the first-in-first-out principle, the temperature of each product is fully consistent with the ambient temperature. The separation mechanism at the end of the directional track in the pre-temperature area will release a product into the directional track in the test area, and the product will undergo low-temperature testing in the track in the low-temperature test area.

[0015] Preferably, a device liquid supply diverter block is installed at the end of the refrigerator liquid supply input pipe, and the outside of the device liquid supply diverter block is respectively connected to a group A low-temperature test channel and a group B low-temperature test channel, the output ends of the group A low-temperature test channel and the group B low-temperature test channel are connected to a group A low-temperature pre-heating channel device, the other end of the group A low-temperature pre-heating channel device is connected to a group B low-temperature pre-heating channel device, and a refrigerator return liquid output pipe is installed on the top of the group B low-temperature pre-heating channel device.

[0016] Preferably, the upper interface of the test channel of group A and the lower interface of the test channel of group A are respectively opened at the upper and lower ends of the low-temperature test channel of group A, the upper interface of the test channel of group B and the lower interface of the test channel of group B are respectively opened at the upper and lower ends of the low-temperature test channel of group B, and the bottom of the low-temperature pre-heating channel device of group A and the low-temperature pre-heating channel device of group B are respectively installed with the low-temperature test track device of group A and the low-temperature test track device of group B, the low-temperature test channel of group A is installed in the low-temperature test track device of group A, and the low-temperature test channel of group B is installed in the low-temperature test track device of group B.

[0017] Preferably, a group A test channel liquid supply pipe is installed between the device liquid supply diversion block and the lower interface of group A test channel, and a group B test channel liquid supply pipe is installed between the device liquid supply diversion block and the lower interface of group B test channel.

[0018] Preferably, a pre-heating flow channel liquid supply pipe of group A is installed on the outer wall of the bottom end of the low-temperature pre-heating flow channel device of group A, a flow channel liquid supply adapter block of group A is installed on the other end of the pre-heating flow channel liquid supply pipe of group A, a test flow channel return pipe of group A and a test flow channel return pipe of group B are installed on the outer wall of the flow channel liquid supply adapter block of group A, the test flow channel return pipe of group A is connected to the upper interface of the test flow channel of group A, and the test flow channel return pipe of group B is connected to the upper interface of the test flow channel of group B.

[0019] Preferably, a pre-heating flow channel return pipe of group A is installed on the top of the low-temperature pre-heating flow channel device of group A, a pre-heating flow channel supply pipe of group B is installed on the bottom outer surface of the low-temperature pre-heating flow channel device of group B, and a liquid supply input pipe from group A to group B is installed between the pre-heating flow channel return pipe of group A and the pre-heating flow channel supply pipe of group B.

[0020] Preferably, the ends of the pre-heating channel liquid return pipe of group A and the pre-heating channel liquid supply pipe of group B are respectively installed with the channel return liquid adapter block of group A and the channel supply liquid adapter block of group B, and the two ends of the liquid supply input pipe from group A to group B are respectively fixedly installed with the channel return liquid adapter block of group A and the channel supply liquid adapter block of group B.

[0021] Preferably, a group B preheating flow channel return pipe is installed at the top of the group B low-temperature preheating flow channel device, a device return liquid adapter block is installed at the end of the group B preheating flow channel return pipe, and the refrigerator return liquid output pipe is installed on the outer surface of the device return liquid adapter block.

[0022] Preferably, the upper interface of the pre-heating channel of group A and the lower interface of the pre-heating channel of group A are respectively opened at two ends of the low-temperature pre-heating channel device of group A, the liquid supply pipe of the pre-heating channel of group A is connected with the lower interface of the pre-heating channel of group A, the liquid return pipe of the pre-heating channel of group A is connected with the upper interface of the pre-heating channel of group A, the upper interface of the pre-heating channel of group B and the lower interface of the pre-heating channel of group B are respectively opened at two ends of the low-temperature pre-heating channel device of group B, the liquid supply pipe of the pre-heating channel of group B is connected with the lower interface of the pre-heating channel of group B, and the liquid return pipe of the pre-heating channel of group B is connected with the upper interface of the pre-heating channel of group B.

[0023] The present invention discloses a low-temperature test flow channel refrigeration device and method, which have the following beneficial effects:

[0024] The low-temperature test flow channel refrigeration device and method, the refrigerant enters the device through the refrigerator liquid supply input pipe, and then is diverted through the device liquid supply diversion block, a part of the refrigerant enters the low-temperature test flow channel of group A through the test flow channel liquid supply pipe of group A, and the other part of the refrigerant enters the low-temperature test flow channel of group B through the test flow channel liquid supply pipe of group B, thereby realizing diversion refrigeration, and then the two groups of diverted refrigerant are respectively collected into the pre-heating flow channel liquid supply pipe of group A through the test flow channel return pipe of group A and the test flow channel return pipe of group B, and then enter the low-temperature pre-heating flow channel device of group A from the lower end, and then flow to the low-temperature pre-heating flow channel device of group B through the A group to B group liquid supply input pipe at the top of the low-temperature pre-heating flow channel device of group A, and then flow out from the refrigerator return liquid output pipe at the top of the low-temperature pre-heating flow channel device of group B, and finally flow back to the refrigerator system, thereby realizing cooling liquid circulation, thereby solving the problems of high design and manufacturing cost, high storage and transportation management cost and poor safety existing in the low-temperature environment manufactured by traditional production testing using liquid nitrogen refrigeration. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a schematic diagram of the low-temperature test flow channel refrigeration method of the present invention;

[0027] Figure 2 This is a flow chart of the low-temperature test channel refrigeration method of the present invention;

[0028] Figure 3 This is a simplified structural diagram of the low-temperature test flow channel refrigeration device of the present invention;

[0029] Figure 4 This is a schematic diagram of the overall structure of the low-temperature test channel refrigeration device of the present invention;

[0030] Figure 5 For the present invention Figure 4 A magnified view of the structure of part A;

[0031] Figure 6 It is a schematic diagram of the outer surface structure of the low-temperature pre-temperature flow channel device group A and the low-temperature pre-temperature flow channel device group B of the present invention.

[0032] In the figure: 1. Liquid supply inlet pipe of refrigerator; 2. Liquid supply shunt block of device; 3. Liquid supply pipe of test channel of group A; 4. Low temperature test track device of group A; 5. Low temperature test channel of group A; 6. Liquid return pipe of test channel of group A; 7. Liquid supply pipe of test channel of group B; 8. Low temperature test track device of group B; 9. Low temperature test channel of group B; 10. Liquid return pipe of test channel of group B; 11. Liquid supply pipe of preheating channel of group A; 12. 1. Liquid supply pipe of group A preheating channel; 13. Liquid supply adapter block of group A channel; 14. Liquid supply adapter block of group B channel; 15. Low-temperature preheating channel device of group A; 16. Low-temperature preheating channel device of group B; 17. Liquid supply input pipe from group A to group B; 18. Liquid return adapter block of group A channel; 19. Liquid return pipe of group A preheating channel; 20. Liquid return pipe of group B preheating channel; 21. Liquid return adapter block of device; 22. Liquid return output pipe of refrigerator. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The embodiments of the present application provide a low-temperature test flow channel refrigeration device and method, which solves the problem that the main refrigeration method for low-temperature environments currently used in production tests is liquid nitrogen refrigeration, and the design and manufacturing costs of low-temperature test devices using liquid nitrogen refrigeration are high; the liquid nitrogen required for refrigeration is a consumable item, the storage, transportation and management costs are high, and the safety risks of using liquid nitrogen in production workshops are high.

[0035] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0036] The embodiment of the invention discloses a low-temperature test flow channel refrigeration device and method.

[0037] According to the attached Figure 1-6 As shown, the low-temperature test flow channel manufacturing method uses a refrigeration system to serially transport the thermal transfer fluid to two groups of pre-temperature zone flow channels and test zone flow channels AB placed vertically for refrigeration, and uses the heat pipe principle to fully transmit the temperature of the thermal transfer fluid to the two groups of pre-temperature zone flow channels AB and the test zone flow channels to achieve temperature consistency;

[0038] The refrigeration device is to arrange chip product directional tracks on the surface of the two groups of pre-heating zone flow channels and the test zone flow channels placed vertically. When the products enter the entrance of the directional track in turn, the products enter the directional track of the pre-heating zone one by one by using their own gravity for low-temperature pre-heating. After a period of low-temperature soaking and pre-heating;

[0039] According to the first-in-first-out principle, the temperature of each product is fully consistent with the ambient temperature. The separation mechanism at the end of the directional track in the pre-temperature zone will release a product into the directional track in the test zone, and the product will be tested at low temperature in the track in the low-temperature test zone;

[0040] The refrigeration operation of the refrigeration device includes the following steps;

[0041] S1. Refrigerant liquid diversion introduction test. The refrigerant liquid flows out through the liquid supply outlet of the refrigerator system and enters the refrigerant liquid flow channel inlet of the low-temperature test flow channel device, and then is diverted. A part of the diverted refrigerant liquid enters through the lower interface of the test flow channel of group A, and then flows out through the upper interface of the test flow channel of group A, and the other part of the refrigerant liquid enters through the lower interface of the test flow channel of group B, and then flows out through the upper interface of the test flow channel of group B;

[0042] S2, the refrigerant liquid is combined for preheating. The refrigerant liquid flowing out from the upper interfaces of the two test flow channels of group AB is combined and enters the preheating flow channel of group A, enters through the lower interface of the preheating flow channel of group A, then flows out through the upper interface of the preheating flow channel of group A, enters through the lower interface of the preheating flow channel of group B, and flows out through the upper interface of the preheating flow channel of group B, thereby preheating the preheating flow channels of group AB backwards;

[0043] S3, refrigerant reflux, the refrigerant flowing out from the interface on the pre-heating flow channel of group B flows out through the refrigerant flow channel outlet of the low-temperature test flow channel device, and then flows back to the refrigerator system through the return liquid inlet of the refrigerator system to realize the refrigerant circulation.

[0044] A device liquid supply diverter block 2 is installed at the end of the refrigerator liquid supply input pipe 1, and the outside of the device liquid supply diverter block 2 is respectively connected to a group A low-temperature test channel 5 and a group B low-temperature test channel 9, the output ends of the group A low-temperature test channel 5 and the group B low-temperature test channel 9 are connected to a group A low-temperature pre-heating channel device 15, the other end of the group A low-temperature pre-heating channel device 15 is connected to a group B low-temperature pre-heating channel device 16, and a refrigerator return liquid output pipe 22 is installed on the top of the group B low-temperature pre-heating channel device 16.

[0045] The upper interface of the test channel of group A and the lower interface of the test channel of group A are respectively opened at the upper and lower ends of the low-temperature test channel 5 of group A, the upper interface of the test channel of group B and the lower interface of the test channel of group B are respectively opened at the upper and lower ends of the low-temperature test channel 9 of group B, and the bottom of the low-temperature pre-heating channel device 15 of group A and the low-temperature pre-heating channel device 16 of group B are respectively installed with the low-temperature test track device 4 of group A and the low-temperature test track device 8 of group B, the low-temperature test channel 5 of group A is installed in the low-temperature test track device 4 of group A, and the low-temperature test channel 9 of group B is installed in the low-temperature test track device 8 of group B.

[0046] A group A test channel liquid supply pipe 3 is installed between the device liquid supply diversion block 2 and the lower interface of the group A test channel, and a group B test channel liquid supply pipe 7 is installed between the device liquid supply diversion block 2 and the lower interface of the group B test channel.

[0047] The bottom outer wall of the group A low-temperature preheating flow channel device 15 is installed with the group A preheating flow channel liquid supply pipe 11, the other end of the group A preheating flow channel liquid supply pipe 11 is installed with the group A flow channel liquid supply adapter block 13, the outer wall of the group A flow channel liquid supply adapter block 13 is installed with the group A test flow channel return pipe 6 and the group B test flow channel return pipe 10, the group A test flow channel return pipe 6 is connected to the upper interface of the group A test flow channel, and the group B test flow channel return pipe 10 is connected to the upper interface of the group B test flow channel.

[0048] A group A preheating flow channel return pipe 19 is installed on the top of the group A low-temperature preheating flow channel device 15, a group B preheating flow channel supply pipe 12 is installed on the bottom outer surface of the group B low-temperature preheating flow channel device 16, and a group A to group B liquid supply input pipe 17 is installed between the group A preheating flow channel return pipe 19 and the group B preheating flow channel supply pipe 12.

[0049] The ends of the pre-heating flow channel return pipe 19 of group A and the pre-heating flow channel supply pipe 12 of group B are respectively installed with the flow channel return liquid adapter block 18 of group A and the flow channel supply liquid adapter block 14 of group B, and the two ends of the liquid supply input pipe 17 from group A to group B are respectively fixedly installed with the flow channel return liquid adapter block 18 of group A and the flow channel supply adapter block 14 of group B.

[0050] A group B preheating flow channel return pipe 20 is installed at the top of the group B low-temperature preheating flow channel device 16, a device return liquid adapter block 21 is installed at the end of the group B preheating flow channel return pipe 20, and a refrigerator return liquid output pipe 22 is installed on the outer surface of the device return liquid adapter block 21.

[0051] The upper interface of the preheating channel of group A and the lower interface of the preheating channel of group A are respectively opened at the two ends of the low-temperature preheating channel device 15 of group A, the liquid supply pipe 11 of the preheating channel of group A is connected with the lower interface of the preheating channel of group A, the liquid return pipe 19 of the preheating channel of group A is connected with the upper interface of the preheating channel of group A, the upper interface of the preheating channel of group B and the lower interface of the preheating channel of group B are respectively opened at the two ends of the low-temperature preheating channel device 16 of group B, the liquid supply pipe 12 of the preheating channel of group B is connected with the lower interface of the preheating channel of group B, and the liquid return pipe 20 of the preheating channel of group B is connected with the upper interface of the preheating channel of group B.

[0052] Working principle: When the device is in use, the refrigerant enters the device through the refrigerator liquid supply input pipe 1, and then is diverted through the device liquid supply diversion block 2. A part of the refrigerant enters the low-temperature test flow channel 5 of group A through the test flow channel supply pipe 3 of group A, and the other part of the refrigerant enters the low-temperature test flow channel 9 of group B through the test flow channel supply pipe 7 of group B, thereby realizing diversion refrigeration;

[0053] Then the two groups of refrigerant liquids are respectively collected into the preheating flow channel supply pipe 11 of group A through the test flow channel return pipe 6 of group A and the test flow channel return pipe 10 of group B, and then enter the interior of the low-temperature preheating flow channel device 15 of group A from the lower end, and then flow into the low-temperature preheating flow channel device 16 of group B through the group A to group B supply liquid input pipe 17 at the top of the low-temperature preheating flow channel device 15 of group A, and then flow out from the refrigerator return liquid output pipe 22 at the top of the low-temperature preheating flow channel device 16 of group B;

[0054] Finally, it flows back to the refrigerator system to realize the circulation of coolant, thus solving the problems of high design and manufacturing cost, high storage and transportation management cost and poor safety in the low-temperature environment created by traditional production testing using liquid nitrogen refrigeration.

[0055] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A low-temperature test channel refrigeration device, which uses a refrigeration system to serially transport the thermal transfer fluid to two groups of pre-temperature zone flow channels and test zone flow channels placed vertically for refrigeration, and uses the heat pipe principle to fully transmit the temperature of the thermal transfer fluid to the two groups of pre-temperature zone flow channels and test zone flow channels to achieve temperature consistency; The refrigeration device is to arrange chip product directional tracks on the surface of the two groups of pre-heating zone flow channels and the test zone flow channels placed vertically. When the products enter the entrance of the directional track in turn, the products enter the directional track of the pre-heating zone one by one by using their own gravity for low-temperature pre-heating. After a period of low-temperature soaking and pre-heating; According to the first-in-first-out principle, the temperature of each product is fully consistent with the ambient temperature. The separation mechanism at the end of the directional track in the pre-temperature area will release a product into the directional track in the test area, and the product will undergo low-temperature testing in the track in the low-temperature test area. It comprises a refrigerator liquid supply input pipe (1), characterized in that: The end of the refrigerator liquid supply input pipe (1) is equipped with a device liquid supply diverter block (2), the outside of the device liquid supply diverter block (2) is respectively connected to a group A low-temperature test flow channel (5) and a group B low-temperature test flow channel (9), the output ends of the group A low-temperature test flow channel (5) and the group B low-temperature test flow channel (9) are connected to a group A low-temperature preheating flow channel device (15), the other end of the group A low-temperature preheating flow channel device (15) is connected to a group B low-temperature preheating flow channel device (16), and the top of the group B low-temperature preheating flow channel device (16) is equipped with a refrigerator liquid return output pipe (22); The upper interface of the low-temperature test channel (5) of group A and the lower interface of the low-temperature test channel (5) of group A are respectively arranged at the upper and lower ends of the low-temperature test channel (5) of group A, the upper interface of the low-temperature test channel (9) of group B and the lower interface of the low-temperature test channel (9) of group B are respectively arranged at the upper and lower ends of the low-temperature test channel (9) of group B, the bottom of the low-temperature preheating channel device (15) of group A and the low-temperature preheating channel device (16) of group B are respectively installed with the low-temperature test track device (4) of group A and the low-temperature test track device (8) of group B, the low-temperature test channel (5) of group A is installed in the low-temperature test track device (4) of group A, and the low-temperature test channel (9) of group B is installed in the low-temperature test track device (8) of group B; A group A test flow channel liquid supply pipe (3) is installed between the device liquid supply diversion block (2) and the lower interface of the group A test flow channel, and a group B test flow channel liquid supply pipe (7) is installed between the device liquid supply diversion block (2) and the lower interface of the group B test flow channel; The bottom outer wall of the group A low-temperature preheating flow channel device (15) is provided with a group A preheating flow channel liquid supply pipe (11), the other end of the group A preheating flow channel liquid supply pipe (11) is provided with a group A flow channel liquid supply adapter block (13), the outer wall of the group A flow channel liquid supply adapter block (13) is provided with a group A test flow channel liquid return pipe (6) and a group B test flow channel liquid return pipe (10), the group A test flow channel liquid return pipe (6) is connected to an upper interface of the group A test flow channel, and the group B test flow channel liquid return pipe (10) is connected to an upper interface of the group B test flow channel.

2. A low temperature test channel refrigeration device according to claim 1, characterized in that: A group A pre-heating flow channel return pipe (19) is installed on the top of the group A low-temperature pre-heating flow channel device (15), a group B pre-heating flow channel supply pipe (12) is installed on the bottom outer surface of the group B low-temperature pre-heating flow channel device (16), and a group A to group B liquid supply input pipe (17) is installed between the group A pre-heating flow channel return pipe (19) and the group B pre-heating flow channel supply pipe (12).

3. A low temperature test channel refrigeration device according to claim 2, characterized in that: The ends of the group A pre-heating channel liquid return pipe (19) and the group B pre-heating channel liquid supply pipe (12) are respectively installed with the group A channel liquid return adapter block (18) and the group B channel liquid supply adapter block (14), and the two ends of the group A to group B liquid supply input pipe (17) are respectively fixedly installed with the group A channel liquid return adapter block (18) and the group B channel liquid supply adapter block (14).

4. A low temperature test channel refrigeration device according to claim 2, characterized in that: A group B pre-heating flow channel return pipe (20) is installed at the top of the group B low-temperature pre-heating flow channel device (16), a device return liquid adapter block (21) is installed at the end of the group B pre-heating flow channel return pipe (20), and the refrigerator return liquid output pipe (22) is installed on the outer surface of the device return liquid adapter block (21).

5. A low temperature test channel refrigeration device according to claim 4, characterized in that: The upper interface of the group A preheating flow channel and the lower interface of the group A preheating flow channel are respectively arranged at two ends of the group A low-temperature preheating flow channel device (15); the group A preheating flow channel liquid supply pipe (11) is connected to the lower interface of the group A preheating flow channel; and the group A preheating flow channel liquid return pipe (19) is connected to the upper interface of the group A preheating flow channel.

6. A low temperature test channel refrigeration device according to claim 5, characterized in that: The upper interface of the group B preheating flow channel and the lower interface of the group B preheating flow channel are respectively arranged at two ends of the group B low-temperature preheating flow channel device (16); the group B preheating flow channel liquid supply pipe (12) is connected to the lower interface of the group B preheating flow channel; and the group B preheating flow channel liquid return pipe (20) is connected to the upper interface of the group B preheating flow channel.

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