A hybrid abrasive system and method for immersion microfluidic machining of RB-SiC ceramic microstructures.

Abstract

A mixed abrasive synergistic enhancement immersion microjet processing system and method for RB-SiC ceramic microstructures is characterized by: the micro-abrasive air jet nozzle is driven by an active rack and driven gear, and one end is connected to a precision sandblasting machine containing micron-sized abrasive particles; its output end is immersed in a slurry tank containing submicron / nano-sized abrasive particles; the micro-abrasive air jet nozzle ejects a gas-solid two-phase flow and generates a large number of microbubbles; the driving effect of the microbubbles effectively mixes the submicron / nano-sized abrasive particles in the slurry tank with the gas-solid two-phase flow ejected by the micro-abrasive air jet nozzle, thereby obtaining a mixed abrasive synergistic enhancement immersion microjet; the waste liquid passes through a primary filter particle recovery outlet, a secondary filter particle recovery outlet, and a tertiary filter particle recovery outlet in real time, where the micron-sized abrasive particles and erosion debris are screened, dried, and classified for collection, ultimately achieving efficient and high-quality processing of RB-SiC ceramic microstructures.

Description

Technical Field

[0001] This invention relates to the field of high-efficiency and high-quality processing of RB-SiC ceramics, specifically to an immersion microjet processing system and method for RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement. Background Technology

[0002] Reactive sintered silicon carbide (RB-SiC, also known as SiC particle-reinforced Si-based composite material) exhibits high brittleness and hardness, and is widely used in engineering applications such as mechanical seals and water-lubricated bearings. Abrasive jet machining (AJM) technology utilizes a high-energy jet medium to accelerate abrasive particles, achieving material removal through erosion of the workpiece surface. Since the 1970s, this technology has gradually developed and been widely applied to deburring and surface pretreatment in areas such as air film vents for aerospace blades, cardiovascular stents, and orthopedic implants. Starting in 1991, Philips Laboratories in the Netherlands spent five years refining this technology into Micro-abrasive air-jet machining (MAJM), introducing a finer concept, and achieving micro-hole machining on glass panels. Compared to laser processing and chemical etching, MAJM technology is widely favored due to its advantages such as high processing efficiency, negligible thermal effects, and environmental friendliness. However, due to the high brittleness of RB-SiC ceramic materials, it is still difficult to achieve efficient and high-quality micro-machining in actual production.

[0003] Patent (ZL202310026757.7) discloses an ultrasonic cavitation-assisted abrasive jet processing system and method; patent (ZL201911425998.9) discloses a split-phase control cavitation enhanced abrasive microjet polishing system; patent (ZL202010119034.8) discloses an immersion-type gas jet driven polishing device and polishing method; and patent (ZL202210604223.3) discloses an ultrasonic cavitation-assisted submerged pulsating gas jet polishing system. Although the above can improve the quality of jet processing to some extent, they are mostly used in the polishing field and are difficult to achieve efficient and high-quality micro-machining of RB-SiC ceramic material microstructures. Summary of the Invention

[0004] To address the above problems, this invention provides an immersion microjet processing system and method that synergistically enhances RB-SiC ceramic microstructure with hybrid abrasive, thereby solving the aforementioned issues.

[0005] The technical solution of this invention is:

[0006] A hybrid abrasive synergistic enhancement immersion microjet processing system for RB-SiC ceramic microstructures is characterized by comprising: a storage tank, a worktable, a slurry cylinder, a precision sandblasting machine, a waste liquid filtration assembly, and the following interconnected components: a slurry supply unit including a slurry cylinder cover, a stirring motor, and a pressurized diaphragm metering pump assembly, wherein the stirring motor drives a slurry stirring rod to mix the slurry, and the pressurized diaphragm metering pump assembly connects the slurry cylinder and the storage tank via a slurry delivery pipe; and a nozzle adjustment unit including a micro-abrasive air jet nozzle and a micro-abrasive air jet nozzle rotation adjustment mechanism. The assembly includes a micro abrasive air jet nozzle connected to a precision sandblasting machine via a gas-solid two-phase flow delivery pipe; a position control unit including an X-axis, Y-axis, Z-axis, Z-axis 1, and Z-axis 2, used to adjust the relative position of the micro abrasive air jet nozzle and the RB-SiC ceramic workpiece; and a waste liquid treatment unit including a waste liquid filtration assembly and a circulation pump. The waste liquid filtration assembly is connected to a storage tank via a slurry return pipe, and the circulation pump delivers the filtered slurry to a slurry cylinder. The slurry in the slurry cylinder consists of a shear-thinned fluid containing submicron / nano-scale abrasive particles.

[0007] Furthermore, preferably, the booster diaphragm metering pump assembly is connected to the slurry cylinder via a slurry delivery pipe and is electrically connected to the slurry level probe; the slurry level probe is fixed on the slurry level probe sliding strip, and the output end of the slurry level probe sliding strip drive cylinder is fixed to the slurry level probe sliding strip. The slurry level probe and the slurry level probe sliding strip are moved up and down relative to the storage tank by the slurry level probe sliding strip drive cylinder, which is used to control the start and stop of the booster diaphragm metering pump assembly and the immersion height of the slurry in the storage tank.

[0008] Furthermore, preferably, the primary filter honeycomb sheet, the secondary filter honeycomb sheet, and the tertiary filter honeycomb sheet in the waste liquid filtration assembly are fixed in the waste liquid filter housing by slots 1, 2, and 3, respectively.

[0009] Furthermore, preferably, the micro abrasive air jet nozzle rotation adjustment assembly includes an active rack, which is mechanically connected to the base plate via a slider and a guide rail, and is connected to the rack drive cylinder via a drive connecting rod;

[0010] Furthermore, the active rack also drives the micro abrasive air jet nozzle through the driven gear, which facilitates the adjustment of the relative tilt angle between the micro abrasive air jet nozzle and the RB-SiC ceramic workpiece; the driven gear is mechanically connected to the base plate through a connecting shaft and bearing; and the micro abrasive air jet nozzle is fixed to the end face of the driven gear through clamping plates and clamping screws.

[0011] Furthermore, one end of the micro abrasive air jet nozzle is connected to a precision sandblasting machine containing micron-sized abrasive particles, and its output end is immersed in a slurry tank containing submicron / nano-sized abrasive particles.

[0012] Further, preferably, the waste liquid filtration assembly includes:

[0013] The primary filter honeycomb sheet is fixed to the waste liquid filter housing near the inlet end of the waste liquid filter assembly via slot 1;

[0014] The three-stage filter honeycomb sheet is fixed to the waste liquid filter housing near the outlet end of the waste liquid filter assembly via the slot 3.

[0015] The secondary filter honeycomb sheet is fixed inside the waste liquid filter housing at the position between the primary filter honeycomb sheet and the tertiary filter honeycomb sheet via the slot 2.

[0016] Furthermore, preferably, the storage tank is connected in sequence to the waste liquid gate valve, the waste liquid gate valve, the waste liquid filter assembly, the circulation pump and the slurry cylinder via the slurry return pipe; and the pore density of the primary filter honeycomb sheet, the secondary filter honeycomb sheet and the tertiary filter honeycomb sheet increases sequentially, which is used to fully filter the micron-sized abrasive particles and erosion debris in the waste liquid.

[0017] Furthermore, the waste liquid filter housing is equipped with a primary filter particle recovery outlet, a secondary filter particle recovery outlet, and a tertiary filter particle recovery outlet, which are used to discharge the filtered micron-sized abrasive particles and erosion-removed debris and separate them, facilitating the reuse of micron-sized abrasive particles.

[0018] A hybrid abrasive-assisted immersion microfluidic machining system and method for RB-SiC ceramic microstructures, characterized by the following steps:

[0019] S1: Fix the RB-SiC ceramic workpiece on the workbench, start the slurry level probe sliding bar drive cylinder, and adjust the slurry level probe to the predetermined position; turn on the stirring motor and the booster diaphragm metering pump assembly in sequence, and send a shut-off command to the booster diaphragm metering pump assembly when the slurry level probe touches the slurry level in the storage tank.

[0020] S2: Adjust the relative tilt angle between the micro-abrasive air jet nozzle and the RB-SiC ceramic workpiece by rotating the micro-abrasive air jet nozzle adjustment assembly to achieve the adjustment of the erosion processing angle; adjust the erosion processing distance and processing range between the micro-abrasive air jet nozzle and the RB-SiC ceramic workpiece by adjusting the X horizontal axis, Y horizontal axis and Z vertical rod to make the micro-abrasive air jet nozzle completely immersed in the slurry;

[0021] S3: The injection pressure is adjusted by the pressure regulating valve assembly, and the waste liquid gate valve, circulation pump, gas switch and precision sandblasting machine are opened in sequence. The micro abrasive air jet nozzle sprays out gas-solid two-phase flow and generates a large number of micro bubbles. The submicron / nano abrasive particles in the slurry in the storage tank are effectively mixed with the gas-solid two-phase flow sprayed out by the micro abrasive air jet nozzle, thereby obtaining a mixed abrasive synergistic enhancement immersion micro jet.

[0022] S4: Adjust the X and Y axes to obtain the processing trajectory of the immersion microjets with synergistic enhancement of mixed abrasives, so as to achieve efficient and high-quality processing of RB-SiC ceramic microstructures; during the processing, the waste liquid in the storage tank passes through the primary, secondary and tertiary filter honeycomb sheets in real time to fully filter the micron-sized abrasive particles and erosion debris.

[0023] S5: Sequentially shut down the precision sandblasting machine, gas switch, booster diaphragm metering pump assembly, slurry level probe sliding bar drive cylinder, waste liquid gate valve and circulation pump, adjust the X and Y axes to remove the RB-SiC ceramic workpiece and clean it.

[0024] S6: Open the primary filter particle recovery outlet, secondary filter particle recovery outlet and tertiary filter particle recovery outlet respectively to screen, dry and classify the micron-sized abrasive particles and erosion debris, and finally complete the RB-SiC ceramic microstructure processing task.

[0025] Compared with the prior art, the present invention provides an immersion microjets processing system and method for synergistic enhancement of RB-SiC ceramic microstructure hybrid abrasives, which has the following beneficial effects:

[0026] In this invention, the micro-abrasive air jet nozzle and the RB-SiC ceramic workpiece are completely immersed in a slurry environment. Micron-sized abrasive air jets are ejected from the nozzle. During this process, the micron-sized abrasive air jets are subjected to shear-thinning flexible constraints and effectively mix with submicron / nano-sized abrasives in the slurry immersion medium to form a multi-stage mixed abrasive micro-jet beam, effectively eroding and removing the SiC and Si phases in the RB-SiC ceramic. On one hand, the mixed abrasive synergistic enhancement immersion micro-abrasive air jet avoids the problems of low processing resolution and high dust pollution caused by the jet beam divergence effect of micro-abrasive air jets, and also avoids the need for masks to achieve microstructure processing due to the large nozzle diameter (generally greater than 2 mm) of multiphase jets. On the other hand, the mixed abrasive synergistic enhancement immersion micro-abrasive air jet causes less environmental pollution than micro-abrasive air jets, representing an important trend in the manufacturing field. Attached Figure Description

[0027] Figure 1A schematic diagram of the overall layout of an immersion microjet processing system and method that uses RB-SiC ceramic microstructure hybrid abrasive to synergistically enhance the process.

[0028] Figure 2 This is a schematic diagram of the waste liquid filtration assembly at point A in an RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement immersion microjet processing system and method.

[0029] Figure 3 This is a schematic diagram of the micro abrasive air jet nozzle rotation adjustment assembly at point B in an immersion microjet processing system and method for RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement.

[0030] In the diagram: 1-Slurry cylinder cover, 2-Agitator motor, 3-Slurry delivery pipe, 4-Z-vertical shaft 1, 5-Micro abrasive air jet nozzle, 6-Micro abrasive air jet nozzle rotation adjustment assembly, 7-Z-vertical rod, 8-Y-horizontal axis, 9-Gas-solid two-phase flow delivery pipe, 10-X-horizontal axis, 11-Z-vertical shaft 2, 12-Air pipe, 13-Pressure regulating valve assembly, 14-Gas switch, 15-Precision sandblasting machine, 16-Storage tank, 17-RB-SiC ceramic workpiece, 18-Workbench, 19-Slurry level probe, 20-Slurry level probe sliding bar, 21-Waste liquid gate valve, 22-Boosting diaphragm metering pump assembly, 23-Waste liquid filter assembly, 24-Circulation pump, 25-Slurry return pipe, 26-Slurry agitator rod, 27-Slurry cylinder 28-Control line, 29-Slurry level probe sliding bar drive cylinder, 30-Waste liquid filter assembly outlet, 31-Third-stage filter honeycomb sheet, 32-Second-stage filter honeycomb sheet, 33-First-stage filter honeycomb sheet, 34-Waste liquid filter assembly inlet, 35-First-stage filter particle recovery outlet, 36-Waste liquid filter housing, 37-Second-stage filter particle recovery outlet, 38-Third-stage filter particle recovery outlet, 39-Slot 3, 40-Slot 2, 41-Slot 1, 42-Base plate, 43-Rack and pinion drive cylinder support, 44-Rack and pinion drive cylinder, 45-Drive connecting rod, 46-Slider, 47-Drive rack, 48-Guide rail, 49-Driven gear, 50-Connecting shaft, 51-Clamping plate, 52-Clamping screw, 53-Bearing. Detailed Implementation

[0031] Reference Figures 1-3 This invention provides a technical solution: an RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement immersion microjets processing system, comprising:

[0032] The booster diaphragm metering pump assembly 22 is connected to the slurry cylinder 27 via the slurry delivery pipe 3 and is electrically connected to the slurry level probe 19. The slurry level probe 19 is fixed on the slurry level probe sliding strip 20. The output end of the slurry level probe sliding strip drive cylinder 29 is fixed to the slurry level probe sliding strip 20. The slurry level probe 19 and the slurry level probe sliding strip 20 are moved up and down relative to the storage tank 16 by the slurry level probe sliding strip drive cylinder 29, which is used to control the start and stop of the booster diaphragm metering pump assembly 22 and the immersion height of the slurry in the storage tank 16. The slurry in the slurry cylinder 27 is composed of a shear-thinned fluid containing submicron / nano-scale abrasive particles.

[0033] In this embodiment, the micro-abrasive air jet nozzle rotation adjustment assembly 6 includes:

[0034] The active rack 47 is mechanically connected to the base plate 42 via a slider 46, a guide rail 48, and a drive connecting rod 45 is connected to one end of the rack drive cylinder 44.

[0035] Furthermore, the active rack 47 also drives the micro abrasive air jet nozzle 5 through the driven gear 49, which facilitates the adjustment of the relative tilt angle between the micro abrasive air jet nozzle 5 and the RB-SiC ceramic workpiece 17; the driven gear 49 is mechanically connected to the base plate 42 through the connecting shaft 50 and the bearing 53; and the micro abrasive air jet nozzle 5 is fixed to the end face of the driven gear 49 by the clamping plate 51 and the clamping screw 52.

[0036] It should be noted that one end of the micro abrasive air jet nozzle 5 is connected to the precision sandblasting machine 15 containing micron-sized abrasive particles, and its output end is immersed in the slurry in the storage tank 16 containing submicron / nano-sized abrasive particles.

[0037] In this embodiment, the waste liquid filtration assembly 23 includes:

[0038] The primary filter honeycomb sheet 33 is fixed to the waste liquid filter housing 36 near the waste liquid filter assembly inlet 34 via the slot 1 (41);

[0039] The three-stage filter honeycomb sheet 31 is fixed to the waste liquid filter housing 36 near the outlet 30 of the waste liquid filter assembly via the slot 3 (39);

[0040] The secondary filter honeycomb sheet 32 ​​is fixed in the waste liquid filter housing 36 at the middle position between the primary filter honeycomb sheet (33) and the tertiary filter honeycomb sheet 31 through the slot 2 (40);

[0041] In a preferred embodiment, the storage tank 16 is connected in sequence to the waste liquid gate valve 21, the waste liquid filter assembly 23, the circulation pump 24 and the slurry cylinder 27 via the slurry return pipe 25; and the pore density of the primary filter honeycomb sheet 33, the secondary filter honeycomb sheet 32 ​​and the tertiary filter honeycomb sheet 31 increases sequentially, which is used to fully filter the micron-sized abrasive particles and erosion debris in the waste liquid;

[0042] It should be noted that the waste liquid filter housing 36 is provided with a primary filter particle recovery outlet 35, a secondary filter particle recovery outlet 37 and a tertiary filter particle recovery outlet 38, which are used to discharge the filtered micron-sized abrasive particles and erosion-removed debris and separate them, so as to facilitate the reuse of micron-sized abrasive particles.

[0043] The use of an immersion microjets synergistically enhanced method for fabricating RB-SiC ceramic microstructures includes the following steps:

[0044] S1: Fix the RB-SiC ceramic workpiece 17 on the workbench 18, start the slurry level probe sliding bar drive cylinder 29, and adjust the slurry level probe 19 to the predetermined position; turn on the stirring motor 2 and the booster diaphragm metering pump assembly 22 in sequence, and send a shutdown command to the booster diaphragm metering pump assembly 22 when the slurry level probe 19 touches the slurry level in the storage tank 16.

[0045] S2: The relative tilt angle between the micro-abrasive air jet nozzle 5 and the RB-SiC ceramic workpiece 17 is adjusted by the micro-abrasive air jet nozzle rotation adjustment assembly 6, thereby adjusting the erosion processing angle. The erosion processing distance and processing range between the micro-abrasive air jet nozzle 5 and the RB-SiC ceramic workpiece 17 are adjusted by the X horizontal axis 10, Y horizontal axis 8 and Z vertical rod 7, so that the micro-abrasive air jet nozzle 5 is completely immersed in the slurry;

[0046] S3: Adjust the injection pressure through the pressure regulating valve assembly, and sequentially open the waste liquid gate valve 21, circulation pump 24, gas switch 14 and precision sandblasting machine 15. The micro abrasive air jet nozzle 5 sprays out a gas-solid two-phase flow and generates a large number of micro bubbles. Relying on the driving effect of the micro bubbles, the submicron / nano-scale abrasive particles in the slurry in the storage tank 16 are effectively mixed with the gas-solid two-phase flow sprayed out by the micro abrasive air jet nozzle 5, thereby obtaining a mixed abrasive synergistic enhancement immersion micro jet.

[0047] S4: Adjusting the X-axis 10 and Y-axis 8 obtains the processing trajectory of the immersion microjets synergistically enhanced by the mixed abrasives, achieving efficient and high-quality processing of RB-SiC ceramic microstructures. During the processing, the waste liquid in the storage tank 16 is filtered in real time through the primary filter honeycomb sheet 33, the secondary filter honeycomb sheet 32, and the tertiary filter honeycomb sheet 31 to fully filter the micron-sized abrasive particles and erosion debris.

[0048] S5: Sequentially shut down the precision sandblasting machine 15, gas switch 14, booster diaphragm metering pump assembly 22, slurry level probe sliding bar drive cylinder 9, waste liquid gate valve 21 and circulation pump 24, adjust the X horizontal axis 10 and Y horizontal axis 8 to remove the RB-SiC ceramic workpiece 17 and clean it.

[0049] S6: Open the primary filter particle recovery outlet 35, the secondary filter particle recovery outlet 37, and the tertiary filter particle recovery outlet 38 respectively to screen, dry, and classify the micron-sized abrasive particles and erosion debris, and finally complete the RB-SiC ceramic microstructure processing task.

[0050] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention. Meanwhile, although this paper uses a lot of components such as slurry cylinder cover 1, stirring motor 2, slurry conveying pipe 3, Z vertical shaft 1 (4), micro abrasive air jet nozzle 5, micro abrasive air jet nozzle rotation adjustment assembly 6, Z vertical rod 7, Y horizontal shaft 8, gas-solid two-phase flow conveying pipe 9, X horizontal shaft 10, Z vertical shaft 2 (11), air pipe 12, pressure regulating valve assembly 13, gas switch 14, precision sandblasting machine 15, liquid storage tank 16, RB-SiC ceramic workpiece 17, workbench 18, slurry level probe 19, slurry level probe sliding bar 20, waste liquid gate valve 21, booster diaphragm metering pump assembly 22, waste liquid filter assembly 23, circulation pump 24, slurry return pipe 25, slurry stirring rod 26, slurry cylinder 27, control line 28 The terms used include: 29. Slurry level probe sliding bar drive cylinder; 30. Waste liquid filter assembly outlet; 31. Three-stage filter honeycomb sheet; 32. Two-stage filter honeycomb sheet; 33. One-stage filter honeycomb sheet; 34. Waste liquid filter assembly inlet; 35. One-stage filter particle recovery outlet; 36. Waste liquid filter housing; 37. Two-stage filter particle recovery outlet; 38. Three-stage filter particle recovery outlet; 3(39), 2(40), 1(41); base plate; 42. Rack drive cylinder support; 43. Rack drive cylinder; 44. Drive connecting rod; 45. Slider; 46. Drive rack; 47. Guide rail; 48. Driven gear; 49. Connecting shaft; 50. Clamping piece; 52. Clamping screw; and 53. Bearing, etc., but the possibility of using other terms is not excluded. These terms are used merely for the convenience of describing and explaining the essence of the invention; interpreting them as any additional limitation would be contrary to the spirit of the invention.

[0051] This embodiment is just one example of the present invention, and any technical solution that adopts a similar structure is within the protection scope of the present invention.

[0052] The parts not covered in this invention are the same as or can be implemented using existing technologies.

Claims

1. A hybrid abrasive-reinforced immersion microjet machining system for RB-SiC ceramic microstructures, characterized in that... include: The liquid storage tank (16), the workbench (18), the slurry cylinder (27), the precision sandblasting machine (15), the waste liquid filtration assembly (23), and the following interconnected components: Slurry supply unit: includes slurry cylinder cover (1), stirring motor (2), and booster diaphragm metering pump assembly (22), wherein the stirring motor (2) drives the slurry stirring rod (26) to mix the slurry, and the booster diaphragm metering pump assembly (22) connects the slurry cylinder (27) and the storage tank (16) through the slurry delivery pipe (3); Nozzle adjustment unit: includes a fine abrasive air jet nozzle (5) and a fine abrasive air jet nozzle rotation adjustment assembly (6), wherein the fine abrasive air jet nozzle (5) is connected to a precision sandblasting machine (15) through a gas-solid two-phase flow conveying pipe (9); Position control unit: including X horizontal axis (10), Y horizontal axis (8), Z vertical rod (7), Z vertical axis 1 (4) and Z vertical axis 2 (11), used to adjust the relative position of the micro abrasive air jet nozzle (5) and the RB-SiC ceramic workpiece (17); Waste liquid treatment unit: includes waste liquid filtration assembly (23) and circulation pump (24), wherein the waste liquid filtration assembly (23) is connected to the storage tank (16) through slurry return pipe (25), and the circulation pump (24) delivers the filtered slurry to the slurry cylinder (27), and the slurry in the slurry cylinder (27) is composed of shear-thinned fluid containing submicron / nano-scale abrasive particles; in: The booster diaphragm metering pump assembly (22) is connected to the slurry tank (27) through the slurry delivery pipe (3) and is electrically connected to the slurry level probe (19). The slurry level probe (19) is fixed on the slurry level probe sliding bar (20). The output end of the slurry level probe sliding bar drive cylinder (29) is fixed to the slurry level probe sliding bar (20). The slurry level probe (19) and the slurry level probe sliding bar (20) are driven to move up and down relative to the storage tank (16) through the slurry level probe sliding bar drive cylinder (29) to control the start and stop of the booster diaphragm metering pump assembly (22) and the immersion height of the slurry in the storage tank (16). The primary filter honeycomb sheet (33), the secondary filter honeycomb sheet (32) and the tertiary filter honeycomb sheet (31) in the waste liquid filtration assembly (23) are fixed in the waste liquid filter housing (36) by the slot 1 (41), the slot 2 (40) and the slot 3 (39) respectively.

2. The RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement immersion microjets processing system according to claim 1, characterized in that: The micro abrasive air jet nozzle rotation adjustment assembly (6) includes an active rack (47), which is mechanically connected to the base plate (42) by means of a slider (46) and a guide rail (48), and is connected to the rack drive cylinder (44) by a drive connecting rod (45); Furthermore, the active rack (47) also drives the micro-abrasive air jet nozzle (5) via the driven gear (49), facilitating the adjustment of the relative tilt angle between the micro-abrasive air jet nozzle (5) and the RB-SiC ceramic workpiece (17); the driven gear (49) is mechanically connected to the base plate (42) via a connecting shaft (50) and a bearing (53); and The micro abrasive air jet nozzle (5) is fixed to the end face of the driven gear (49) by a clamping plate (51) and a clamping screw (52); Furthermore, one end of the micro abrasive air jet nozzle (5) is connected to a precision sandblasting machine (15) containing micron-sized abrasive particles, and its output end is immersed in the slurry of the storage tank (16) containing submicron / nano-sized abrasive particles.

3. The RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement immersion microjets processing system according to claim 1, characterized in that: The primary filter honeycomb sheet (33) is fixed to the waste liquid filter housing (36) near the inlet (34) of the waste liquid filter assembly via the slot 1 (41); The three-stage filter honeycomb sheet (31) is fixed to the waste liquid filter housing (36) near the outlet (30) of the waste liquid filter assembly by the slot 3 (39); The secondary filter honeycomb sheet (32) is fixed in the middle position between the primary filter honeycomb sheet (33) and the tertiary filter honeycomb sheet (31) inside the waste liquid filter housing (36) through the slot 2 (40); The storage tank (16) is connected in sequence to the waste liquid gate valve (21), the waste liquid gate valve (21), the waste liquid filter assembly (23), the circulation pump (24), and the slurry cylinder (27) via the slurry return pipe (25); and The pore density of the primary filter honeycomb sheet (33), the secondary filter honeycomb sheet (32) and the tertiary filter honeycomb sheet (31) increases sequentially, which is used to fully filter the micron-sized abrasive particles and erosion debris in the waste liquid. Furthermore, the waste liquid filter housing (36) is provided with a primary filter particle recovery outlet (35), a secondary filter particle recovery outlet (37) and a tertiary filter particle recovery outlet (38), which are used to discharge the filtered micron-sized abrasive particles and erosion-removed debris and separate them, so as to facilitate the reuse of micron-sized abrasive particles.

4. A method for immersion microjet processing based on RB-SiC ceramic microstructure hybrid abrasive synergistic enhancement according to the system of claim 1, characterized in that... Includes the following steps: S1: Fix the RB-SiC ceramic workpiece (17) on the workbench (18), start the slurry level probe sliding bar drive cylinder (29), and adjust the slurry level probe (19) to the predetermined position; turn on the stirring motor (2) and the booster diaphragm metering pump assembly (22) in sequence, and send a shutdown command to the booster diaphragm metering pump assembly (22) when the slurry level probe (19) touches the slurry level of the storage tank (16); S2: Adjust the relative tilt angle between the micro abrasive air jet nozzle (5) and the RB-SiC ceramic workpiece (17) by adjusting the rotation adjustment assembly (6) of the micro abrasive air jet nozzle, thereby adjusting the erosion processing angle; adjust the erosion processing distance and processing range between the micro abrasive air jet nozzle (5) and the RB-SiC ceramic workpiece (17) by adjusting the X horizontal axis (10), Y horizontal axis (8) and Z vertical rod (7), so that the micro abrasive air jet nozzle (5) is completely immersed in the slurry; S3: Adjust the injection pressure through the pressure regulating valve assembly, and open the waste liquid gate valve (21), circulation pump (24), gas switch (14) and precision sandblasting machine (15) in sequence. The micro abrasive air jet nozzle (5) sprays out gas-solid two-phase flow and generates a large number of micro bubbles. Relying on the driving effect of micro bubbles, the submicron / nano abrasive particles in the slurry in the storage tank (16) are effectively mixed with the gas-solid two-phase flow sprayed out by the micro abrasive air jet nozzle (5), thereby obtaining a mixed abrasive synergistic enhancement immersion micro jet; S4: Adjust the X horizontal axis (10) and Y horizontal axis (8) to obtain the processing trajectory of the immersion microjets with synergistic enhancement of mixed abrasives, so as to realize the efficient and high-quality processing of RB-SiC ceramic microstructures; during the processing, the waste liquid in the storage tank (16) passes through the first-stage filter honeycomb sheet (33), the second-stage filter honeycomb sheet (32) and the third-stage filter honeycomb sheet (31) in real time to fully filter the micron-sized abrasive particles and erosion debris. S5: Sequentially shut down the precision sandblasting machine (15), gas switch (14), booster diaphragm metering pump assembly (22), slurry level probe sliding bar drive cylinder (29), waste liquid gate valve (21) and circulation pump (24), adjust the X horizontal axis (10) and Y horizontal axis (8) to remove the RB-SiC ceramic workpiece (17) and clean it; S6: Open the primary filter particle recovery outlet (35), secondary filter particle recovery outlet (37) and tertiary filter particle recovery outlet (38) respectively to screen, dry and classify the micron-sized abrasive particles and erosion debris, and finally complete the RB-SiC ceramic microstructure processing task.

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