Graphite crucible and chemical vapor deposition equipment

Abstract

The present application discloses a graphite crucible and chemical vapor deposition equipment, belonging to the field of hot field crucible technology. The graphite crucible includes an outer shell, an inner cylinder, and a partition assembly. The upper surface of the outer shell is provided with an air outlet, and the lower surface of the outer shell is provided with an air inlet. The inner cylinder is arranged in the outer shell, and a sandwich cavity is formed between the inner cylinder and the outer shell, and the side wall of the inner cylinder is penetrated by a first air guide hole and a second air guide hole. The partition assembly is installed in the sandwich cavity to separate the sandwich cavity into an air inlet chamber and an air outlet chamber. The air inlet is connected to the first air guide hole through the air inlet chamber, and the air outlet is connected to the second air guide hole through the air outlet chamber. By making the gas flow twice in the graphite crucible, the uniformity of the substrate surface coating is ensured while the outer wall of the outer shell is as close as possible to the inner wall of the furnace body, thereby facilitating the arrangement of the pipeline structure for gas flow into the graphite crucible in the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby improving processing efficiency and processing effect.

Description

Technical Field

[0001] The present application belongs to the technical field of thermal field crucibles, and in particular relates to a graphite crucible and a chemical vapor deposition device. Background Art

[0002] Chemical Vapor Deposition (CVD) equipment uses high-temperature heating, high-pressure, low-pressure methods to decompose materials such as silicides, nitrides, or oxides into atoms or molecules that are deposited on the surface of a substrate to form a thin film. Currently, in order to complete the coating of a substrate, it is often necessary to place a graphite crucible inside the furnace of the CVD equipment, that is, the gas carrying the material flows horizontally inside the graphite crucible on the surface of the substrate. However, due to the characteristic that the gas needs to flow in the horizontal direction, it is often difficult to install a graphite crucible with a large cross-sectional area in a vertical CVD equipment. At the same time, the height of the graphite crucible of a horizontal CVD equipment is limited by the size of its own furnace body, resulting in a limited range of substrate sizes that the graphite crucible can adapt to, affecting processing efficiency and processing results. Summary of the Invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a graphite crucible and a chemical vapor deposition device, which divides the cavity formed between the outer shell and the inner cylinder into an air inlet chamber and an air outlet chamber by setting a partition assembly, and cooperates with the air outlet and air inlet parts set in the outer shell and the first air guide hole and the second air guide hole set in the inner cylinder. By making the gas flow twice in the graphite crucible, the uniformity of the coating on the surface of the substrate is ensured while the outer wall of the outer shell is as close as possible to the inner wall of the furnace body, thereby facilitating the arrangement of the pipeline structure for gas flow into the graphite crucible in the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby increasing the volume area of the graphite crucible, making it adaptable to the largest possible range of substrate sizes, and improving processing efficiency and processing effect.

[0004] In a first aspect, the present application provides a graphite crucible, comprising:

[0005] An outer shell, wherein an air outlet is provided on an upper surface of the outer shell, and an air inlet is provided on a lower surface of the outer shell;

[0006] An inner cylinder, the inner cylinder being disposed in the outer shell, a cavity being formed between the inner cylinder and the outer shell, and a first air guide hole and a second air guide hole being formed through a side wall of the inner cylinder;

[0007] A partition assembly is installed in the clamp cavity to separate the clamp cavity into an air inlet chamber and an air outlet chamber, the air inlet portion is connected to the first air guide port through the air inlet chamber, and the air outlet portion is connected to the second air guide port through the air outlet chamber.

[0008] According to the graphite crucible of the present application, a partition assembly is installed to separate the clamping cavity into an air inlet chamber and an air outlet chamber, so that gas flows from the bottom of the outer shell through the air inlet portion into the air inlet chamber, flows horizontally through the first air guide port and the second air guide port within the accommodating cavity, then flows into the air outlet chamber, and then flows out of the outer shell through the air outlet portion. In other words, by causing the gas to flow first vertically, then horizontally, and finally vertically out of the graphite crucible, the outer wall of the outer shell is as close as possible to the inner wall of the furnace body, facilitating the arrangement of a piping structure for gas flow into the graphite crucible within the chemical vapor deposition equipment while maximizing the cross-sectional area of the graphite crucible. This, in turn, increases the volumetric area of the graphite crucible, allowing it to accommodate a wide range of substrate sizes, thereby improving processing efficiency and results.

[0009] According to one embodiment of the present application, the partition assembly includes:

[0010] a first partition plate, one side of the first partition plate abutting against the outer wall of the inner tube, and the other side of the first partition plate abutting against the inner wall of the outer shell;

[0011] A second partition, one side of the second partition abuts against the outer wall of the inner tube, the other side of the second partition abuts against the inner wall of the outer shell, and the second partition and the first partition are spaced apart along the circumference of the inner tube to divide the outer wall of the inner tube into a first side wall surface and a second side wall surface, the first air guide hole and the second air guide hole are respectively provided on the first side wall surface and the second side wall surface.

[0012] According to one embodiment of the present application, the area of the first side wall surface is not equal to the area of the second side wall surface.

[0013] According to one embodiment of the present application, a plurality of first air guide holes are provided, and the plurality of first air guide holes are arranged in an array; and / or

[0014] There are a plurality of the second air guide holes, and the plurality of the second air guide holes are arranged in an array.

[0015] According to one embodiment of the present application, the first air guide hole and / or the second air guide hole is a waist-shaped hole.

[0016] According to one embodiment of the present application, the outer shell includes:

[0017] a top plate, wherein the air outlet is arranged on the top plate;

[0018] a bottom plate, wherein the air inlet portion is arranged on the bottom plate;

[0019] The outer cylinder, the top plate and the bottom plate are respectively arranged at the upper and lower openings of the outer cylinder, the inner cylinder is coaxially arranged with the outer cylinder, and the top surface and the bottom surface of the inner cylinder are respectively connected to the top plate and the bottom plate.

[0020] According to one embodiment of the present application, the air outlet portion includes at least one air outlet hole, which is arranged on the top surface of the top plate, and the air outlet hole is located between the connection between the top plate and the inner edge of the top surface of the outer tube and the connection between the top plate and the outer edge of the top surface of the inner tube.

[0021] According to one embodiment of the present application, the air intake portion includes at least one air intake hole, which is arranged through the bottom surface of the bottom plate, and the air intake hole is located between the connection between the bottom plate and the inner edge of the bottom surface of the outer tube and the connection between the outer edge of the bottom surface of the inner tube.

[0022] According to one embodiment of the present application, the outer cylinder includes at least two first cylinders spliced up and down; and / or

[0023] The inner cylinder includes at least two second cylinders spliced up and down.

[0024] In a second aspect, the present application provides a chemical vapor deposition device, the chemical vapor deposition device comprising:

[0025] furnace body; and

[0026] The graphite crucible as described above is placed in the furnace body.

[0027] According to the chemical vapor deposition equipment of the present application, a partition assembly is arranged in the graphite crucible to separate the cavity formed between the outer shell and the inner cylinder into an air inlet chamber and an air outlet chamber, and the air outlet and air inlet parts are arranged in the outer shell and the first air guide hole and the second air guide hole are arranged in the inner cylinder. By making the gas flow in the graphite crucible twice, the uniformity of the coating on the surface of the substrate is ensured while the outer wall of the outer shell is made as close as possible to the inner wall of the furnace body, thereby facilitating the arrangement of the pipeline structure for supplying gas to flow into the graphite crucible in the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby increasing the volume area of the graphite crucible, making it possible to adapt to the largest possible range of substrate sizes, and improving processing efficiency and processing effects.

[0028] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0030] Figure 1 Schematic diagram of the structure of the graphite crucible provided in the embodiment of the present application;

[0031] Figure 2This is a schematic structural diagram of the inner cylinder provided in an embodiment of the present application;

[0032] Figure 3 This is a schematic structural diagram of the base plate provided in an embodiment of the present application;

[0033] Figure 4 is a cross-sectional view of a graphite crucible provided in an embodiment of the present application;

[0034] Figure 5 yes Figure 1 It is a cross-sectional view of the outer cylinder provided in an embodiment of the present application.

[0035] Reference numerals:

[0036] 100, outer shell; 1011, air inlet chamber; 1012, air outlet chamber; 110, top plate; 111, air outlet; 120, bottom plate; 121, air inlet; 130, outer cylinder;

[0037] 200, inner cylinder; 201, first air guide hole; 202, second air guide hole;

[0038] 300, partition assembly; 310, first partition; 320, second partition. DETAILED DESCRIPTION

[0039] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0040] Reference below Figure 1-Figure 5 The graphite crucible provided in an embodiment of the present application is described. The graphite crucible includes an outer shell 100 , an inner cylinder 200 and a partition assembly 300 .

[0041] The upper surface of the outer shell 100 is provided with an air outlet, and the lower surface of the outer shell 100 is provided with an air inlet. That is, gas flows into the outer shell 100 from the air inlet and then flows out of the outer shell 100 from the air outlet. The material of the outer shell 100 includes but is not limited to graphite.

[0042] The inner cylinder 200 is disposed within the outer shell 100, forming a sandwich cavity between the inner cylinder 200 and the outer shell 100. The sidewall of the inner cylinder 200 is provided with a first air guide hole 201 and a second air guide hole 202. The inner cylinder 200 and the outer shell 100 may be connected by methods including, but not limited to, welding, threading, or riveting.

[0043] It is understood that the inner wall of the outer shell 100 and the outer wall of the inner cylinder 200 form a sandwich cavity, and the upper and lower surfaces of the outer shell 100 and the inner wall of the inner cylinder 200 enclose a accommodating cavity for accommodating the substrate. Specifically, gas flows from the air inlet into the sandwich cavity, then sequentially passes through the first air guide hole 201, the accommodating cavity, and the second air guide hole 202, before passing through the sandwich cavity and out of the outer shell 100 through the air outlet. Simultaneously, the first air guide hole 201 and the second air guide hole 202 are provided through the side panels of the inner cylinder 200 to enable horizontal gas flow within the accommodating cavity, thereby ensuring uniform coating on the substrate surface. It should be noted that the shapes and sizes of the sandwich cavity, the accommodating cavity, the first air guide hole 201, and the second air guide hole 202 can be designed according to actual needs and are not specifically limited in this embodiment.

[0044] The partition assembly 300 is installed in the clamp cavity to separate the clamp cavity into an air inlet chamber 1011 and an air outlet chamber 1012. The air inlet part is connected to the first air guide port through the air inlet chamber 1011, and the air outlet part is connected to the second air guide port through the air outlet chamber 1012.

[0045] It is understood that the partition assembly 300 is used to separate the clamping cavity into an air inlet chamber 1011 and an air outlet chamber 1012, so that the gas flows from the bottom of the outer shell 100 through the air inlet portion into the air inlet chamber 1011, flows horizontally through the first air guide port and the second air guide port within the accommodating cavity, then flows into the air outlet chamber 1012, and then flows out of the outer shell 100 through the air outlet portion. That is, by causing the gas to flow first vertically, then horizontally, and finally vertically within the graphite crucible, the outer wall of the outer shell 100 is brought as close as possible to the inner wall of the furnace body, facilitating the arrangement of the pipeline structure for supplying gas to the graphite crucible within the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby increasing the volumetric area of the graphite crucible, making it adaptable to the widest possible range of substrate sizes, and improving processing efficiency and processing effects.

[0046] According to the graphite crucible provided in the embodiment of the present application, a partition assembly 300 is provided to separate the cavity formed between the outer shell 100 and the inner cylinder 200 into an air inlet chamber 1011 and an air outlet chamber 1012, and the air outlet and air inlet portions provided on the outer shell 100 and the first air guide holes 201 and the second air guide holes 202 provided on the inner cylinder 200 are coordinated to make the gas flow in the graphite crucible twice, thereby ensuring the uniformity of the coating on the surface of the substrate while making the outer wall of the outer shell 100 as close as possible to the inner wall of the furnace body, thereby facilitating the arrangement of a pipeline structure for supplying gas to flow into the graphite crucible in the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby increasing the volume area of the graphite crucible, making it possible to adapt to as large a range of substrate sizes as possible, and improving processing efficiency and processing effect.

[0047] In some embodiments, as Figure 1 、 Figure 3and Figure 4 As shown, the outer shell 100 includes a top plate 110, a bottom plate 120, and an outer cylinder 130. The air outlet is provided on the top plate 110; the air inlet is provided on the bottom plate 120; the top plate 110 and the bottom plate 120 are respectively provided at the upper and lower openings of the outer cylinder 130; the inner cylinder 200 is coaxially arranged with the outer cylinder 130, and the top surface and bottom surface of the inner cylinder 200 are respectively connected to the top plate 110 and the bottom plate 120. The connection methods between the top plate 110 and the outer cylinder 130, the connection method between the bottom plate 120 and the outer cylinder 130, the connection method between the top plate 110 and the inner cylinder 200, and the connection method between the bottom plate 120 and the inner cylinder 200 include, but are not limited to, threaded connection, rivet connection, or welding.

[0048] It is understood that, to form the clamping cavity, the outer wall of the inner cylinder 200 and the inner wall of the outer cylinder 130 are spaced apart, and the top and bottom surfaces of the inner cylinder 200 and the outer cylinder 130 are connected to the corresponding top plate 110 and bottom plate 120. It should be noted that the shapes of the inner cylinder 200 and the outer cylinder 130 include, but are not limited to, circular or square; the distance between the inner cylinder 200 and the outer cylinder 130 can be designed according to actual needs and is not specifically limited in this embodiment.

[0049] In this embodiment, the inner diameter of the outer cylinder 130 is 1400 mm, and the wall thickness of the outer cylinder 130 is 15 mm; the inner diameter of the inner cylinder 200 is 1320 mm, and the wall thickness of the inner cylinder 200 is 15 mm.

[0050] In this embodiment, the top plate 110 is circular, the bottom plate 120 is annular, and the outer edge of the bottom surface of the inner cylinder 200 is in contact with the top edge of the inner wall of the bottom plate 120, so that the graphite crucible can be placed in the furnace body while the base member can be accommodated in the inner cylinder 200.

[0051] In some embodiments, as Figure 1 As shown, the gas outlet portion includes at least one gas outlet hole 111, which is provided through the top surface of the top plate 110 and is located between the connection between the top plate 110 and the inner edge of the top surface of the outer tube 130, and the connection between the top plate 110 and the outer edge of the top surface of the inner tube 200. In other words, it can be understood that since the inner tube 200 is used to accommodate the base member, by locating the gas outlet hole 111 between the connection between the top plate 110 and the inner edge of the top surface of the outer tube 130, and the connection between the top plate 110 and the outer edge of the top surface of the inner tube 200, it is ensured that after passing through the base member, the gas must flow out of the outer shell 100 through the gas outlet chamber 1012 through the gas outlet chamber 1012.

[0052] In this embodiment, in order to improve the gas outlet efficiency, Figure 1As shown, the gas outlet hole 111 is arc-shaped, that is, the projection of the gas outlet hole 111 on the bottom plate 120 coincides with the projection of the gas outlet chamber 1012 on the bottom plate 120. Of course, in other embodiments, multiple gas outlet holes 111 may be arranged circumferentially. This embodiment does not impose any specific restrictions on the number and shape of the gas outlet holes 111, as long as they can facilitate the vacuum pump of the chemical vapor deposition equipment to extract gas.

[0053] In some embodiments, as Figure 3 and Figure 4 As shown, the air intake portion includes at least one air intake hole 121, which is arranged on the bottom surface of the bottom plate 120 and between the connection between the bottom plate 120 and the inner edge of the bottom surface of the outer tube 130 and the connection between the outer edge of the bottom surface of the inner tube 200.

[0054] It is understandable that since the inner tube 200 is used to accommodate the base member, the air inlet 121 is located between the connection between the bottom plate 120 and the inner edge of the bottom surface of the outer tube 130 and the connection between the bottom plate 120 and the outer edge of the bottom surface of the inner tube 200 to ensure that the gas must first pass through the air inlet before passing through the base member.

[0055] In this embodiment, in order to improve the air intake efficiency, Figure 3 and Figure 4 As shown, a plurality of air inlet holes 121 are arranged in a circle on a portion of the bottom plate 120, and the projection of each air inlet hole 121 on the bottom plate 120 coincides with the projection of the air inlet chamber 1011 on the bottom plate 120. Of course, in other embodiments, the air inlet holes 121 may also be arc-shaped. This embodiment does not impose any specific restrictions on the number and shape of the air outlet holes 111.

[0056] In some embodiments, as Figures 1 to 4 As shown, in order to enable the partition assembly 300 to divide the clamping cavity into the air inlet chamber 1011 and the air outlet chamber 1012, the partition assembly 300 includes a first partition 310 and a second partition 320, one side of the first partition 310 abuts the outer wall of the inner tube 200, and the other side of the first partition 310 abuts the inner wall of the outer shell 100; one side of the second partition 320 abuts the outer wall of the inner tube 200, and the other side of the second partition 320 abuts the inner wall of the outer shell 100, and the second partition 320 and the first partition 310 are arranged at intervals along the circumference of the inner tube 200 to divide the outer wall of the inner tube 200 into a first side wall surface and a second side wall surface, and the first air guide hole 201 and the second air guide hole 202 are respectively arranged on the first side wall surface and the second side wall surface. The connection method between the first partition 310 and the inner tube 200, the connection method between the first partition 310 and the outer tube 130, the connection method between the second partition 320 and the inner tube 200, and the connection method between the second partition 320 and the outer tube 130 include but are not limited to threaded connection, rivet connection and welding.

[0057] It can be understood that since the first partition 310 and the second partition 320 are both located in the clamping cavity and are respectively connected to the outer wall of the inner tube 200 and the inner wall of the outer tube 130, the outer wall of the inner tube 200 is divided into a first side wall surface and a second side wall surface, and the inner wall of the outer tube 130 is divided into a third side wall surface and a fourth side wall surface, the first side wall surface and the third side wall surface correspond to each other, and the second side wall surface and the fourth side wall surface correspond to each other, that is, one of the air inlet chamber 1011 or the air outlet chamber 1012 includes the first surface of the first partition 310, the first side wall surface, the first surface and the third side wall surface of the second partition 320 connected end to end in sequence, and the other of the air inlet chamber 1011 or the air outlet chamber 1012 includes the second surface of the first partition 310, the second side wall surface, the second surface and the fourth side wall surface of the second partition 320 connected end to end in sequence.

[0058] It should be noted that in this embodiment, the air inlet chamber 1011 includes the first surface of the first baffle 310, the first sidewall surface, the first surface and the third sidewall surface of the second baffle 320, which are connected end to end. The air outlet chamber 1012 includes the second surface of the first baffle 310, the second sidewall surface, the second surface and the fourth sidewall surface of the second baffle 320, which are connected end to end. Therefore, the first air guide hole 201 is provided through the first sidewall surface, and the second air guide hole 202 is provided through the second sidewall surface. The shape and thickness of the first baffle 310 and the second baffle 320, as well as the distance between the first baffle 310 and the second baffle 320, can be designed according to actual needs and are not specifically limited in this embodiment.

[0059] Compared to making the angle between the connecting line between the first partition 310 and the center of the inner tube 200 and the connecting line between the second partition 320 and the center of the inner tube 200 180 degrees, that is, the volume of the air inlet chamber 1011 is equal to the volume of the air outlet chamber 1012, as shown in FIG. Figures 1 to 4 As shown, in this embodiment, the area of the first side wall is not equal to the area of the second side wall, that is, the volume of the air inlet chamber 1011 and the volume of the air outlet chamber 1012 are not equal, so as to improve the corresponding air intake efficiency or air outlet efficiency as needed.

[0060] In this embodiment, the angle between the connecting line between the first partition 310 and the center of the inner tube 200 and the connecting line between the second partition 320 and the center of the inner tube 200 is 230°, and the volume of the air inlet chamber 1011 is smaller than the volume of the air outlet chamber 1012, which facilitates the concentration of gas when it enters the inner tube 200 and improves the efficiency of gas outlet, thereby achieving a better gas distribution method.

[0061] In some embodiments, as Figure 1 and Figure 2As shown, to increase the gas flow rate and the efficiency of coating the substrate with the graphite crucible, a plurality of first air guide holes 201 are provided, and the plurality of first air guide holes 201 are arranged in an array; and / or a plurality of second air guide holes 202 are provided, and the plurality of second air guide holes 202 are arranged in an array. It will be appreciated that the number and specific distribution of the first air guide holes 201 and the second air guide holes 202 can be designed according to actual needs and are not specifically limited in this embodiment.

[0062] In this embodiment, the first air guide hole 201 and / or the second air guide hole 202 are waist-shaped holes to further increase the volume of gas that can pass through and accelerate the gas flow rate. In this embodiment, the radius of the waist-shaped hole is 20 mm, and the distance between the two centers is 40 mm.

[0063] In some embodiments, as Figure 1 、 Figure 2 and Figure 5 As shown, considering ease of processing and the large size of the graphite crucible, the outer cylinder 130 comprises at least two first cylinders joined vertically; and / or the inner cylinder 200 comprises at least two second cylinders joined vertically. In this embodiment, at least one of the outer cylinder 130 and the inner cylinder 200 is joined in a stepped manner. It will be appreciated that by joining at least one of the outer cylinder 130 and the inner cylinder 200, not only is processing, handling, and assembly facilitated, but also adaptability can be achieved based on the size of the base component, thereby expanding its range of applications.

[0064] The embodiment of the present application further provides a chemical vapor deposition device, which includes a furnace body and the aforementioned graphite crucible, wherein the graphite crucible is placed in the furnace body.

[0065] According to the chemical vapor deposition equipment provided in the embodiment of the present application, a partition assembly 300 is provided in the graphite crucible to separate the cavity formed between the outer shell 100 and the inner cylinder 200 into an air inlet chamber 1011 and an air outlet chamber 1012, and the air outlet and air inlet parts provided in the outer shell 100 and the first air guide holes 201 and the second air guide holes 202 provided in the inner cylinder 200 are cooperated to make the gas flow twice in the graphite crucible, thereby ensuring the uniformity of the coating on the surface of the substrate while making the outer wall of the outer shell 100 as close to the inner wall of the furnace body as possible, thereby facilitating the arrangement of the pipeline structure for supplying gas to flow into the graphite crucible in the chemical vapor deposition equipment while making the cross-sectional area of the graphite crucible as large as possible, thereby increasing the volume area of the graphite crucible, making it possible to adapt to as large a range of substrate sizes as possible, and improving processing efficiency and processing effect.

[0066] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0067] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0068] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0069] In the description of this application, “plurality” means two or more.

[0070] In the description of the present application, a first feature being “on” or “under” a second feature may include the first and second features being in direct contact with each other, or the first and second features being in contact with each other not directly but via another feature therebetween.

[0071] In the description of this application, a first feature “on”, “above” and “above” a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0072] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0073] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and intent of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A graphite crucible, characterized in that: include: An outer shell, wherein an air outlet is provided on an upper surface of the outer shell, and an air inlet is provided on a lower surface of the outer shell; An inner cylinder, the inner cylinder being disposed in the outer shell, a cavity being formed between the inner cylinder and the outer shell, and a first air guide hole and a second air guide hole being penetrated through a side wall of the inner cylinder; A partition assembly is installed in the clamp cavity to separate the clamp cavity into an air inlet chamber and an air outlet chamber, the air inlet portion is connected to the first air guide hole through the air inlet chamber, and the air outlet portion is connected to the second air guide hole through the air outlet chamber.

2. The graphite crucible according to claim 1, characterized in that The partition assembly comprises: a first partition plate, one side of the first partition plate abutting against the outer wall of the inner tube, and the other side of the first partition plate abutting against the inner wall of the outer shell; A second partition, one side of the second partition abuts against the outer wall of the inner tube, the other side of the second partition abuts against the inner wall of the outer shell, and the second partition and the first partition are spaced apart along the circumference of the inner tube to divide the outer wall of the inner tube into a first side wall surface and a second side wall surface, the first air guide hole and the second air guide hole are respectively provided on the first side wall surface and the second side wall surface.

3. The graphite crucible according to claim 2, characterized in that The area of the first side wall surface is not equal to the area of the second side wall surface.

4. The graphite crucible according to any one of claims 1 to 3, characterized in that There are a plurality of first air guide holes, and the plurality of first air guide holes are arranged in an array; and / or There are a plurality of the second air guide holes, and the plurality of the second air guide holes are arranged in an array.

5. The graphite crucible according to any one of claims 1 to 3, characterized in that: The first air guide hole and / or the second air guide hole are waist-shaped holes.

6. The graphite crucible according to any one of claims 1 to 3, characterized in that: The outer shell comprises: a top plate, wherein the air outlet is arranged on the top plate; a bottom plate, wherein the air inlet portion is arranged on the bottom plate; The outer cylinder, the top plate and the bottom plate are respectively arranged at the upper and lower openings of the outer cylinder, the inner cylinder is coaxially arranged with the outer cylinder, and the top surface and the bottom surface of the inner cylinder are respectively connected to the top plate and the bottom plate.

7. The graphite crucible according to claim 6, characterized in that The air outlet portion includes at least one air outlet hole, which is arranged on the top surface of the top plate and is located between the connection between the top plate and the inner edge of the top surface of the outer tube and the connection between the top plate and the outer edge of the top surface of the inner tube.

8. The graphite crucible according to claim 6, characterized in that The air inlet portion includes at least one air inlet hole, which is arranged through the bottom surface of the bottom plate and is located between the connection between the bottom plate and the inner edge of the bottom surface of the outer tube and the connection between the outer edge of the bottom surface of the inner tube.

9. The graphite crucible according to claim 6, characterized in that The outer cylinder comprises at least two first cylinders joined up and down; and / or The inner cylinder includes at least two second cylinders spliced up and down.

10. A chemical vapor deposition device, characterized in that: include: furnace body; as well as The graphite crucible according to any one of claims 1 to 9, wherein the graphite crucible is placed in the furnace body.

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