Reticle assembly and method of making the same
By combining a high-precision alignment mask assembly with a CCD detection device, the problems of long screen-forming time and low precision of metal masks have been solved, enabling efficient and precise mask assembly manufacturing, improving production efficiency and precision, and avoiding substrate waste.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGSU TOPTO MATERIALS CO LTD
- Filing Date
- 2023-11-08
- Publication Date
- 2026-06-02
AI Technical Summary
Traditional metal photomasks have long screen-forming times, make it difficult to achieve high precision, and there are relative deviations between the alignment marks and the openings, resulting in low production efficiency and substrate waste.
A high-precision alignment mask assembly is adopted, including a frame and an alignment mask. By combining the independent alignment mask with the metal mask plate, a CCD detection device is used to perform high-precision alignment, reducing the relative deviation between the alignment hole and the pattern opening, and improving the accuracy and efficiency of screen forming.
It significantly improves the accuracy and efficiency of mask assembly, reduces time costs and eases the difficulty of mask assembly, and eliminates the need for substrate compensation when used by panel manufacturers, thus avoiding substrate waste.
Smart Images
Figure CN117403188B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of optoelectronic display technology, and in particular to a mask assembly and its manufacturing method. Background Technology
[0002] Currently, metal masks (CMMs) are widely used in AMOLED, PMOLED and Micro OLED displays. Metal masks play a role in defining the active area during the vapor deposition process.
[0003] In the traditional process of stretching metal masks, a CCD inspection device captures alignment marks on the metal mask and determines the origin and X / Y axes of the alignment coordinate system based on these marks. This serves as a reference for measuring and determining the positional accuracy of the openings (cells) in the metal mask, thus achieving alignment and welding. During alignment, the tension applied to the metal mask by the stretching machine's grippers is adjusted to regulate the opening position. During this adjustment, the position of the alignment marks on the metal mask also changes, causing the aforementioned coordinate system to be redefined. Therefore, this process requires repeated alignment-measurement until both the accuracy of the alignment marks and the accuracy of the openings are within the required range before the metal mask can be welded to the mask frame.
[0004] This traditional mask structure results in a very long screen-forming time for the metal mask, severely slowing down the production efficiency of metal masks; furthermore, it is difficult to achieve higher precision requirements for the metal mask. In addition, there is a relative deviation between the alignment marks and the openings on the produced mask fixture, requiring panel manufacturers to perform offset compensation operations when using this fixture, which also leads to substrate waste.
[0005] Therefore, with the trend towards high PPI and narrow bezel products, the precision requirements for metal photomasks are also increasing, and there is an urgent need to design a new technology to improve the above problems. Summary of the Invention
[0006] The purpose of this invention is to provide a mask assembly and its manufacturing method to improve the technical problems of low efficiency and low precision in metal mask forming.
[0007] To achieve this objective, the present invention adopts the following technical solution:
[0008] Mask components, including:
[0009] Framework; and
[0010] Alignment masks, each having alignment holes that meet a preset precision, and four alignment masks respectively fixedly arranged at the four corners of the frame; and
[0011] A metal mask having four through holes adapted to accommodate the alignment masks, the metal mask being stretched and fixed on the frame, the four alignment masks being respectively accommodated in each of the through holes.
[0012] As a preferred embodiment of the mask assembly, the alignment holes satisfy the following preset precisions:
[0013] The diameter deviation of the alignment hole is <0.5μm;
[0014] The roundness of the alignment hole is >99.9%.
[0015] As a preferred embodiment of the mask assembly, the four alignment masks are grouped in pairs, with each pair of alignment masks originating from different parts of the same base strip;
[0016] The base strip is stretched and fixed to the frame, and then the remaining part of the base strip is removed, leaving only the alignment mask.
[0017] As a preferred embodiment of the mask assembly, the mesh tension accuracy of the base strip is controlled to be ≤1μm.
[0018] As a preferred embodiment of the mask assembly, the base strip has a preset boundary along the edge of the alignment mask. During welding, welding is performed on the alignment mask along the inner side of the preset boundary. After welding, the remaining part of the base strip is removed along the preset boundary.
[0019] As a preferred embodiment of the mask assembly, the preset boundary is a semi-groove or a discontinuous dashed cut that penetrates the base strip.
[0020] As a preferred embodiment of the mask assembly, the soldering covers at least one set of opposing edges of the alignment mask, or extends to the perimeter of the alignment mask.
[0021] As a preferred embodiment of the mask assembly, the frame has two first fixing holes facing each other at the middle of a set of opposite sides, and the metal mask has two second fixing holes, the second fixing holes corresponding to the positions of the first fixing holes.
[0022] The method for creating a mask component, applied to the aforementioned mask component, includes the following steps:
[0023] S1: Select the aforementioned frame, base strip, and metal mask;
[0024] S2: Tension the base strip and control the tensioning accuracy, and weld the base strip to the frame around the alignment hole;
[0025] Two base strips are stretched and welded along another set of opposite sides of the frame (different from the set of opposite sides with the first fixing hole), the excess part of the base strips is removed, and the part at the alignment hole is retained to form an alignment mask at the four corners of the frame.
[0026] S3: Use a CCD detection device to capture the alignment holes of the alignment mask on the frame for alignment and positioning of the frame;
[0027] The metal mask is stretched, and the metal mask is adjusted to obtain a controlled predetermined stretching accuracy, ensuring that the alignment mask is accommodated in the through holes on the metal mask. Then the metal mask is welded to the frame.
[0028] As a preferred embodiment of the method for manufacturing a mask assembly, in step S2, the tensioning accuracy of the base strip is controlled based on a first alignment reference system.
[0029] The first alignment reference system is a coordinate system constructed with the direction of the line connecting the two first fixing holes as the X-axis, the center of the line connecting the two first fixing holes as the origin of the first alignment reference system, and the direction perpendicular to the X-axis at the origin of the first alignment reference system as the Y-axis.
[0030] As a preferred embodiment of the manufacturing method of the mask assembly, in step S3, the meshing accuracy of the metal mask is controlled based on a second alignment reference system.
[0031] The second alignment reference system is established as follows:
[0032] Determine the midpoint of the line connecting the two alignment holes on the same side, and the midpoint of the line connecting the two alignment holes on the other side;
[0033] The X-axis is defined by the direction of the line connecting the two midpoints, the origin of the second alignment reference system is defined by the center of the line connecting the two midpoints, and the Y-axis is defined by the direction perpendicular to the X-axis at the origin of the second alignment reference system.
[0034] The second alignment reference frame is constructed by the origin, the X-axis, and the Y-axis of the second alignment reference frame.
[0035] As a preferred embodiment of the method for manufacturing a mask assembly, in step S3, the relative positions of the metal mask and the frame are determined in advance by aligning the two second fixing holes on the metal mask with the two first fixing holes on the frame.
[0036] As a preferred embodiment of the method for manufacturing a mask assembly, in step S2, the mesh stretching accuracy of the base strip is controlled to be ≤1μm.
[0037] The beneficial effects of this invention are:
[0038] 1) In the process of manufacturing the mask assembly, the present invention manufactures a high-precision alignment mask that is independent of the mask, so that the pattern openings and alignment holes on the metal mask are not related to each other and do not affect each other during the mesh stretching process. This reduces the relative deviation between the alignment holes and the pattern openings on the metal mask and greatly improves the mesh stretching accuracy of the manufactured mask assembly.
[0039] 2) In the process of stretching the metal mask, the present invention does not require simultaneous consideration of the alignment accuracy of the alignment holes and the pattern openings. Therefore, it is easier to adjust and obtain the appropriate stretching force and stretching accuracy, which can effectively reduce the time cost required for stretching the metal mask and reduce the difficulty of stretching.
[0040] 3) The mask assembly of the present invention has higher alignment hole accuracy and pattern opening accuracy than existing products. When panel manufacturers use this fixture, they can directly perform alignment without substrate waste. Attached Figure Description
[0041] Figure 1 This is a schematic diagram of the overall structure of a metal photomask in the prior art;
[0042] Figure 2 This is a schematic diagram of the overall structure of the framework in the existing technology;
[0043] Figure 3 This is a schematic diagram of the structure for adjusting the tension of a metal mask using grippers in the prior art;
[0044] Figure 4 This is a schematic diagram of the structure after the metal mask and frame are welded together in the prior art;
[0045] Figure 5 This is a schematic diagram of the structure of the base strip and the frame in an embodiment of the present invention;
[0046] Figure 6 This is a schematic diagram of the alignment mask and frame in an embodiment of the present invention;
[0047] Figure 7 This is a schematic diagram of the structure of the metal mask in an embodiment of the present invention;
[0048] Figure 8 This is a schematic diagram of the structure for adjusting the tension of the metal mask in an embodiment of the present invention;
[0049] Figure 9 This is a schematic diagram of the structure after the metal mask and frame are welded together in an embodiment of the present invention.
[0050] Figures 1-4 middle:
[0051] 1' Metal mask; 11' Alignment hole; 12' Pattern opening;
[0052] 2', Framework;
[0053] 3', Gripper;
[0054] Figures 5-9 middle:
[0055] 1. Metal mask; 11. Second fixing hole; 12. Through hole;
[0056] 2. Frame; 21. First fixing hole;
[0057] 3. Base strip; 31. Alignment hole; 32. Alignment mask; 33. Preset boundary. Detailed Implementation
[0058] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.
[0059] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0060] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0061] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.
[0062] Existing metal photomasks and their fabrication methods, such as Figures 1 to 4 As shown, Figure 1 This is a schematic diagram of the overall structure of the metal mask 1'; Figure 2 This is a schematic diagram of the overall structure of frame 2'; Figure 3 This is a schematic diagram of the structure for adjusting the tension of the metal mask plate 1' held by the gripper 3'. Figure 4 This is a schematic diagram of the structure after the metal mask 1' and frame 2' are welded together. In existing metal mask 1', the pattern opening 12' and alignment hole 11' are on the same metal mask sheet. The positional deviation between the pattern opening 12' and the alignment hole 11' is greater than 20μm. During the screen stretching process, the metal mask 1' is aligned with the alignment hole 11' to determine the X-axis, Y-axis and origin. Based on this, the positional accuracy of the pattern opening 12' is measured, and the positional accuracy of the pattern opening 12' is adjusted by the tension of the gripper 3'. However, the position of the frame 2' will also change during the adjustment process. Therefore, repeated alignment and measurement are required. Only when all positional accuracies are within specifications are the metal mask 1' welded to the frame 2'. This results in a very long screen stretching time and difficulty in guaranteeing accuracy. Moreover, due to the relative positional deviation between the alignment hole 11' and the pattern opening 12', panel manufacturers must perform compensation operations when using this fixture, which will cause substrate waste.
[0063] To solve the above problems, combined with Figures 5 to 9 As shown, this embodiment provides a mask assembly, which includes a frame 2, alignment masks 32, and a metal mask 1. The frame 2 is a rectangular frame structure. Four alignment masks 32 are provided, and the four alignment masks 32 are fixedly arranged at the four corners of the frame 2. The alignment masks 32 have alignment holes 31, which meet a preset precision. The metal mask 1 has four through holes 12 adapted to accommodate the alignment masks 32. After the metal mask 1 is fixedly connected to the frame 2, the four alignment masks 32 are respectively accommodated in the through holes 12.
[0064] This invention employs an independent combination structure of a metal mask 1 and a alignment mask 32. This allows the mesh-setting and positioning process of the alignment mask 32 to be performed separately from the mesh-setting and fixing process of the metal mask 1, with the former unaffected by the latter. Furthermore, the alignment mask 32 has alignment holes 31 with preset precision, thus easily obtaining high-precision alignment holes 31 on the mask assembly. In addition, during mesh-setting and fixing of the metal mask 1, the alignment holes 31 on the alignment mask 32 serve as fixed reference points, eliminating the need to consider the impact on the position and shape accuracy of the alignment holes 31 themselves. Only the positioning accuracy and pattern opening accuracy of the metal mask 1 need to be considered, reducing the relative deviation between the alignment holes 31 and the pattern openings on the metal mask 1, significantly improving mesh-setting efficiency and the mesh-setting accuracy of the manufactured mask assembly. Therefore, the mask assembly of this invention has higher alignment hole accuracy and pattern opening accuracy than existing products.
[0065] To further improve the accuracy of the photomask assembly, the alignment hole 31 meets the preset accuracy requirements, specifically including: the diameter deviation of the alignment hole 31 is less than 0.5 μm, and the roundness of the alignment hole 31 is greater than 99.9%. For example, the diameter deviation of the alignment hole 31 can be 0.1 μm, 0.2 μm, 0.3 μm, or 0.4 μm, etc., and the roundness of the alignment hole 31 can be 99.92%, 99.95%, or 99.98%, etc.
[0066] In addition, such as Figure 5 As shown, the four alignment masks 32 in the mask assembly are grouped in pairs, with each group of alignment masks 32 originating from different parts of the same base strip 3. That is, when fabricating the alignment mask 32, two base strips 3 are provided, each base strip 3 having two alignment holes 31, located at both ends of its respective base strip 3. After the base strip 3 is stretched and welded to the frame 2, the remaining parts of the base strip 3 are removed, leaving only the alignment mask 32.
[0067] Each set of alignment masks 32 is obtained by setting two alignment holes 31 on a base strip 3 for mesh stretching. Compared with stretching four alignment masks 32 one by one, the relative position between the two alignment masks 32 originating from the same base strip 3 is more accurate, which helps to reduce the cumulative error caused by individual mesh stretching and welding of the alignment masks 32 and improves the accuracy of the alignment holes 31. In addition, the base strip 3 can provide clamping space for the grippers, which is convenient for mesh stretching and is more conducive to the operation of the mesh stretching machine; and stretching only two base strips 3 also improves the mesh stretching efficiency.
[0068] In addition, in this embodiment, during the process of stretching the base strip 3, the stretching accuracy of the base strip 3 is controlled to be ≤1μm. For example, the stretching accuracy can be 0.3μm, 0.5μm, 0.7μm, or 0.9μm, etc.
[0069] By controlling the machining accuracy of the alignment holes 31 on the base strip 3 and the mesh stretching accuracy of the base strip 3, and by obtaining the alignment mask 32 through the mesh stretching base strip 3, the accuracy deviation of the alignment mask 32 on the mask assembly can be further reduced, and alignment marks with higher accuracy can be obtained on the mask assembly. Furthermore, it provides a higher accuracy reference for the subsequent mesh stretching alignment of the metal mask 1, which helps to improve the mesh stretching alignment accuracy of the metal mask 1.
[0070] like Figure 5 and Figure 6 As shown, a preset boundary 33 is provided on the base strip 3 along the edge of the alignment mask 32. During welding, welding is performed on the inner side of the alignment mask 32 along the preset boundary 33. After welding, the remaining part of the base strip 3 is removed along the preset boundary 33. The setting of the preset boundary 33 plays a positioning role for several points of the welding point, which facilitates the implementation of the welding operation.
[0071] In some embodiments, the preset boundary 33 is set as a semi-etched groove, that is, a linear groove formed by etching, to reduce the material thickness in this area; or, the preset boundary 33 can also be set as a discontinuous dotted line cut that penetrates the base strip 3. By setting a semi-etched groove or a dotted line cut, the remaining part of the base strip 3 outside the alignment mask 32 is easier to remove, which not only facilitates the removal of the remaining part of the base strip 3, but also ensures that the obtained alignment mask 32 is more regular and does not require a trimming process.
[0072] Furthermore, when welding the base strip 3, the welding point must cover at least one set of opposing edges of the alignment mask 32 to ensure the weld strength of the alignment mask 32, for example: see Appendix Figure 5 As shown, welding is performed along the inner sides of two preset boundaries 33 on both sides of an alignment mask 32. In some embodiments, the welding can also extend to the four edges of the alignment mask 32, thereby more firmly fixing the four peripheries of the alignment mask 32 to the frame 2, avoiding situations such as warping at the four corners or four sides of the alignment mask 32, and improving welding reliability.
[0073] like Figures 7 to 9 As shown, the frame 2 has two first fixing holes 21 facing each other in the middle of one set of opposite sides, and the metal mask plate 1 has two second fixing holes 11, which are positioned opposite to the first fixing holes 21.
[0074] The first fixing hole 21 is used to determine the first alignment reference system for tensioning the base strip 3. Specifically, when tensioning the base strip 3, the center point of the line connecting the two first fixing holes 21 is defined as the origin, the direction of the line is defined as the X-axis, and the direction perpendicular to the line is defined as the Y-axis. This first alignment reference system is used to adjust the tensioning of the base strip 3. In addition, the first fixing hole 21 and the second fixing hole 11 are also used as one of the positioning structures for aligning the metal mask 1 and the frame 2. That is, when tensioning the metal mask 1, the relative position of the metal mask 1 on the frame 2 is determined by ensuring that the second fixing hole 11 coincides with the first fixing hole 21 within a certain range.
[0075] In addition, combined Figures 5 to 9 As shown, this disclosure also provides a method for manufacturing a mask component, which is applied to the above-mentioned mask component and includes the following steps:
[0076] S1: Select the frame 2, base strip 3 and metal mask 1 mentioned above in the mask assembly. The manufacturing process of the frame 2, base strip 3 and metal mask 1 will not be described in detail here.
[0077] S2: Tension the base strip 3 and control the tensioning accuracy, then weld the base strip 3 to the frame 2 around the alignment hole 31; see appendix. Figure 5 As shown in the base strip 3 structure, during the netting process, the claws of the netting machine hold both ends of the base strip 3 and apply tension along the extension direction of the base strip 3 to perform netting.
[0078] In accordance with the above method, two base strips 3 are welded along another set of opposite sides of the frame 2. The other set of opposite sides is different from the set of opposite sides of the frame 2 with the first fixing hole. The two base strips 3 are each set at one frame edge. Then, the excess part of the base strip 3 is removed, and the part at the alignment hole 31 is retained. Finally, alignment masks 32 are formed at the four corners of the frame 2.
[0079] S3: Use a CCD detection device (such as a CCD camera) to capture the alignment hole 31 of the alignment mask 32 on the frame 2 for alignment and positioning;
[0080] The metal mask 1 is stretched, and the metal mask 1 is adjusted to obtain a controlled predetermined stretching accuracy, ensuring that the alignment mask 32 is accommodated in the through hole 12 on the metal mask 1. Then the metal mask 1 is welded to the frame 2.
[0081] In step S2, the tensioning accuracy of the base strip 3 is adjusted based on the first alignment reference system. Specifically, the first alignment reference system is constructed with the line connecting the two first fixing holes 21 as the X-axis, the center of the line connecting the two first fixing holes 21 as the origin of the first alignment reference system, and the direction perpendicular to the X-axis at the origin of the first alignment reference system as the Y-axis. During the tensioning and positioning of the base strip 3, the four alignment holes 31 form a virtual rectangle, with each of the four alignment holes 31 being one of the four vertices of this rectangle. The position of the intersection of the diagonals of this rectangle is compared with the position of the origin of the first alignment reference system, and the distance between the two is controlled to meet the predetermined requirements, thereby ensuring the tensioning accuracy of the base strip 3.
[0082] Here, this solution preferably controls the mesh stretching accuracy of the base strip 3 to ≤1μm. For example, the mesh stretching accuracy can be 0.3μm, 0.5μm, or 0.8μm, etc. Combining the control of the accuracy of the alignment holes 31 on the base strip 3, controlling the mesh stretching accuracy within this range can effectively ensure the accuracy of the alignment holes 31 as alignment marks on the mask assembly, so that they meet the predetermined requirements and improve the mesh stretching accuracy of the subsequent metal mask 1.
[0083] In step S3, the tensioning accuracy of the control metal mask 1 is adjusted based on the second alignment reference system. (See appendix) Figure 8 As shown, the second alignment reference system is established as follows: The midpoint of the line connecting two alignment holes 31 on the same side and the midpoint of the line connecting two alignment holes 31 on the other side are determined; the direction of the line connecting the two midpoints is taken as the X-axis, the center of the line connecting the two midpoints is taken as the origin of the second alignment reference system, and the direction perpendicular to the X-axis at the origin of the second alignment reference system is taken as the Y-axis; the second alignment reference system is constructed from the origin, the X-axis, and the Y-axis. Within the second alignment reference system, the ideal position of the metal mask 1 and the ideal position and shape of the pattern openings on the metal mask 1 are determined. During the mesh-setting and positioning process of the metal mask 1, the actual position of the metal mask 1 and the actual position and shape of the pattern openings on the metal mask 1 are compared with the aforementioned ideal state, and the deviation is controlled within a reasonable range, thus completing the mesh-setting and alignment of the metal mask 1.
[0084] Of course, before using the second alignment reference system for alignment, the relative positions of the metal mask 1 and the frame 2 are determined by aligning the two second fixing holes 11 on the metal mask 1 with the two first fixing holes 21 on the frame 2. Then, the position of the metal mask 1 is further fine-tuned using the alignment holes 31 to make the alignment efficiency higher.
[0085] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.
Claims
1. A method for fabricating a mask component, characterized by the use of a mask component, wherein... The mask assembly includes: Framework (2); and Alignment mask (32), the alignment mask (32) having alignment holes (31), the alignment holes (31) meeting a preset precision, and four alignment masks (32) respectively fixedly arranged at the four corners of the frame (2); and A metal mask plate (1) has four through holes (12) adapted to accommodate the alignment mask (32). The metal mask plate (1) is stretched and fixed on the frame (2), and the four alignment masks (32) are respectively accommodated in each of the through holes (12). The four alignment masks (32) are paired up, and each pair of alignment masks (32) originates from different parts of the same base strip (3); The base strip (3) is stretched and fixed on the frame (2), and then the base strip (3) is removed, leaving only the alignment mask (32). The method for manufacturing the mask component includes: S1: Select the frame (2), base strip (3) and metal mask (1); S2: Tensioning the base strip (3) and controlling the tensioning accuracy, welding the base strip (3) to the frame (2) around the alignment hole (31); Two base strips (3) are welded along another set of opposite sides of the frame (2), the excess part of the base strips (3) is removed, and the part at the alignment hole (31) is retained, forming an alignment mask (32) at the four corners of the frame (2). S3: Use a CCD detection device to capture the alignment hole (31) of the alignment mask (32) on the frame (2) for alignment and positioning. The metal mask (1) is stretched, and the metal mask (1) is adjusted to obtain a controlled predetermined stretching accuracy, and the alignment mask (32) is accommodated in the through hole (12) on the metal mask (1). Then the metal mask (1) is welded to the frame (2).
2. The method for manufacturing the mask assembly according to claim 1, characterized in that, The preset accuracy satisfied by the alignment hole (31) includes: The diameter deviation of the alignment hole (31) is <0.5μm; The roundness of the alignment hole (31) is >99.9%.
3. The method for manufacturing the mask assembly according to claim 1, characterized in that, The tensioning accuracy of the base strip (3) is controlled to be ≤1μm.
4. The method for manufacturing the mask assembly according to claim 1, characterized in that, A preset boundary (33) is provided on the base strip (3) along the edge of the alignment mask (32). During welding, welding is performed on the alignment mask (32) along the inner side of the preset boundary (33). After welding, the remaining part of the base strip (3) is removed along the preset boundary (33).
5. The method for manufacturing the mask assembly according to claim 4, characterized in that, The preset boundary (33) is a half-groove or a discontinuous dotted line cut that penetrates the base strip (3).
6. The method for manufacturing a mask assembly according to claim 4, characterized in that, The welding covers at least one set of opposing edges of the alignment mask (32), or extends to the perimeter of the alignment mask (32).
7. The method for manufacturing a mask assembly according to any one of claims 1 to 6, characterized in that, The frame (2) has two first fixing holes (21) facing each other at the middle of one of its opposite sides, and the metal mask (1) has two second fixing holes (11) corresponding to the positions of the first fixing holes (21).
8. The method for manufacturing a mask assembly according to claim 1, characterized in that, In step S2, the tensioning accuracy of the base strip (3) is controlled based on the first alignment reference system; The first alignment reference system is a coordinate system constructed with the line connecting the two first fixing holes (21) as the X-axis, the center of the line connecting the two first fixing holes (21) as the origin of the first alignment reference system, and the direction perpendicular to the X-axis at the origin of the first alignment reference system as the Y-axis.
9. The method for manufacturing a mask assembly according to claim 1, characterized in that, In step S3, the meshing accuracy of the metal mask (1) is controlled based on the second alignment reference system; The second alignment reference system is established as follows: Determine the midpoint of the line connecting the two alignment holes (31) on the same side, and the midpoint of the line connecting the two alignment holes (31) on the other side; The X-axis is defined by the direction of the line connecting the two midpoints, the origin of the second alignment reference system is defined by the center of the line connecting the two midpoints, and the Y-axis is defined by the direction perpendicular to the X-axis at the origin of the second alignment reference system. The second alignment reference frame is constructed by the origin, the X-axis, and the Y-axis of the second alignment reference frame.
10. The method for manufacturing a mask assembly according to claim 1, characterized in that, In step S3, the relative positions of the metal mask (1) and the frame (2) are determined in advance by aligning the two second fixing holes (11) on the metal mask (1) with the two first fixing holes (21) on the frame (2).
11. The method for manufacturing a mask assembly according to claim 1, characterized in that, In step S2, the tensioning accuracy of the base strip (3) is controlled to be ≤1μm.