A pipeline blockage early warning method and system

Abstract

The application relates to the technical field of semiconductor process waste gas treatment, and discloses a pipeline blockage early warning method and system. The method comprises the following steps: obtaining a real-time change curve of real-time pressure and a time sequence according to the obtained time sequence and the real-time pressure of a pipeline; obtaining a fitting function corresponding to the real-time change curve according to the real-time change curve; obtaining a first-order derivative and a second-order derivative of the fitting function according to the fitting function; determining whether the second-order derivative in the time sequence is equal to a first threshold value; if yes, judging a blockage condition of the pipeline at a target moment according to the fitting function; and if not, judging the blockage condition of the pipeline at the target moment according to the first-order derivative and the second-order derivative. The pipeline blockage early warning method can solve the defect that the prior art cannot predict the pipeline blockage condition.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor process waste gas treatment, and particularly relates to a pipeline blockage early warning method and system. BACKGROUND

[0002] A semiconductor special process waste gas treatment equipment is used for treating harmful gas generated in chip manufacturing. According to different process technologies, the gas contains various dust or gas used for solidification deposition (gas phase changes into solid phase), so that the pipeline into the waste gas treatment equipment is blocked, causing the equipment to be unable to normally treat waste gas. However, the current semiconductor special process waste gas treatment equipment has the problem that an alarm is issued only when the pipeline is about to be blocked, and then the equipment is shut down, which cannot predict the pipeline blockage. Therefore, how to predict the pipeline blockage is an urgent problem to be solved. SUMMARY

[0003] The present application provides a pipeline blockage early warning method and system to solve the defect that the prior art cannot predict the pipeline blockage.

[0004] The present application provides a pipeline blockage early warning method, comprising:

[0005] According to the obtained time sequence and the real-time pressure of the pipeline, a real-time change curve of the real-time pressure and the time sequence is obtained;

[0006] According to the real-time change curve, a fitting function y=f(t) corresponding to the real-time change curve is obtained;

[0007] According to the fitting function y=f(t), a first derivative y'=f'(t) and a second derivative y''=f''(t) of the fitting function y=f(t) are obtained;

[0008] In a case where the second derivative y''=f''(t) in the time sequence is equal to a first threshold value, a blockage condition of the pipeline at a target time is judged according to the fitting function y=f(t);

[0009] In a case where the second derivative y''=f''(t) in the time sequence is not equal to the first threshold value, a blockage condition of the pipeline at the target time is judged according to the first derivative y'=f'(t) and the second derivative y''=f''(t).

[0010] According to the pipeline blockage early warning method provided by the present application, the blockage condition of the pipeline at the target time is judged according to the fitting function y=f(t), comprising:

[0011] In a case where the fitting function y=f(t) corresponding to the target time is greater than a second threshold value, an early warning is performed;

[0012] In a case where the fitting function y=f(t) corresponding to the target moment is less than or equal to the second threshold value, no pre-warning is performed.

[0013] The second threshold value is a pressure threshold value corresponding to a first preset blockage state of the pipeline.

[0014] According to the pipeline blockage pre-warning method provided in the application, in a case where the fitting function y=f(t) corresponding to the target moment is greater than the second threshold value, pre-warning is performed, which comprises:

[0015] In a case where the fitting function y=f(t) corresponding to the target moment is greater than the second threshold value and less than or equal to a third threshold value, first-level pre-warning is performed.

[0016] If the fitting function y=f(t) corresponding to the target moment is greater than the third threshold value, second-level pre-warning is performed.

[0017] The third threshold value is greater than the second threshold value, and the third threshold value is a pressure threshold value corresponding to a second preset blockage state of the pipeline.

[0018] According to the pipeline blockage pre-warning method provided in the application, the determination of the blockage state of the pipeline at the target moment according to the first derivative y'=f'(t) and the second derivative y''=f''(t) comprises:

[0019] In a case where the second derivative y''=f''(t) corresponding to the target moment is greater than a first threshold value, pre-warning is performed.

[0020] In a case where the second derivative y''=f''(t) corresponding to the target moment is less than the first threshold value, no pre-warning is performed.

[0021] According to the pipeline blockage pre-warning method provided in the application, in a case where the second derivative y''=f''(t) corresponding to the target moment is greater than the first threshold value, pre-warning is performed, which comprises:

[0022] In a case where the second derivative y''=f''(t) corresponding to the target moment is greater than the first threshold value and less than or equal to a fifth threshold value, and the first derivative y'=f'(t) is less than or equal to a fourth threshold value, first-level pre-warning is performed.

[0023] In a case where the second derivative y''=f''(t) corresponding to the target moment is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is greater than the fourth threshold value, second-level pre-warning is performed.

[0024] In a case where the second derivative y''=f''(t) corresponding to the target moment is greater than the fifth threshold value, and the first derivative y'=f'(t) is less than or equal to the fourth threshold value, second-level pre-warning is performed.

[0025] In the case that the second derivative y''=f''(t) corresponding to the target moment is greater than a fifth threshold value and the first derivative y'=f'(t) is greater than a fourth threshold value, a third-level warning is performed.

[0026] The fifth threshold value is greater than the first threshold value, and the fourth threshold value is a first derivative of a pressure threshold value corresponding to a first preset blockage state of the pipeline.

[0027] According to the pipeline blockage warning method provided in the application, the first threshold value is any one of 0-0.5, and the fifth threshold value is any one of 0-5.

[0028] According to the pipeline blockage warning method provided in the application, the real-time change curve of the real-time pressure and the time sequence is obtained according to the acquired time sequence and the real-time pressure of the pipeline.

[0029] The real-time pressure of the pipeline from a start moment to a current moment and a time sequence corresponding to the real-time pressure are acquired, wherein the start moment of the time sequence is zero moment.

[0030] The real-time change curve of the real-time pressure and the time sequence is obtained according to the real-time pressure and the time sequence.

[0031] The application further provides a pipeline blockage warning system, comprising:

[0032] A data acquisition and processing module is configured to obtain a real-time change curve of a real-time pressure and a time sequence according to an acquired time sequence and a real-time pressure of a pipeline.

[0033] A data fitting module is configured to obtain a fitting function y=f(t) corresponding to the real-time change curve according to the real-time change curve.

[0034] A function derivation module is configured to obtain a first derivative y'=f'(t) and a second derivative y''=f''(t) of the fitting function y=f(t) according to the fitting function y=f(t).

[0035] A pipeline blockage prediction module is configured to determine a blockage condition of the pipeline at a target moment according to the fitting function y=f(t) in the case that the second derivative y''=f''(t) in the time sequence is equal to a first threshold value, and is configured to determine the blockage condition of the pipeline at the target moment according to the first derivative y'=f'(t) and the second derivative y''=f''(t) in the case that the second derivative y''=f''(t) in the time sequence is not equal to the first threshold value.

[0036] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement the pipe blockage early warning method described in any of the preceding claims.

[0037] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the pipeline blockage early warning method described in any of the preceding claims.

[0038] This invention provides a pipeline blockage early warning method and system. First, by acquiring a time series and the real-time pressure of the pipeline, a real-time pressure-time series change curve is obtained, which reveals the trend of real-time pressure change. Based on the real-time change curve, a fitting function y = f(t) corresponding to the real-time change curve is obtained. Then, based on the fitting function y = f(t), the first derivative y′ = f′(t) and the second derivative y″ = f″(t) are obtained. Finally, if the second derivative y″ = f″(t) in the time series is equal to a first threshold, the pipeline blockage status at the target time is determined based on the fitting function y = f(t). If the second derivative y″ = f″(t) in the time series is not equal to the first threshold, the pipeline blockage status at the target time is determined based on the first derivative y′ = f′(t) and the second derivative y″ = f″(t). The physical meanings of the first and second derivatives reveal that the first derivative represents the rate of change of real-time pressure within a time series, while the second derivative represents the rate of change of the rate of change of real-time pressure within the time series. The trend of the rate of change of real-time pressure is determined by comparing the second derivative with a first threshold. If the second derivative y″=f″(t) within the time series is equal to the first threshold, it indicates that the rate of change of real-time pressure is constant, meaning that the real-time pressure in the fitted function y=f(t) changes linearly within the time series. Figure 3 As shown, the fitting function y = f(t) is used to determine the blockage status of the pipeline at the target time. If the second derivative y″ = f″(t) in the time series is not equal to the first threshold, it indicates that the rate of change of real-time pressure is non-constant, that is, the change of real-time pressure in the fitting function y = f(t) in the time series is non-linear. In this case, the first derivative y′ = f′(t) and the second derivative y″ = f″(t) are used to determine the blockage status of the pipeline at the target time. Because the fitting function y = f(t), the first derivative y′ = f′(t), and the second derivative y″ = f″(t) of this invention are all obtained based on existing real-time pressure and time series, the pipeline blockage status at a certain future time can be predicted based on the changing trends of the fitting function y = f(t), the first derivative y′ = f′(t), and the second derivative y″ = f″(t). Therefore, the pipeline blockage early warning method of this invention can solve the defect of existing technology that cannot predict pipeline blockage status. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is one of the flowcharts illustrating the pipeline blockage early warning method provided by the present invention;

[0041] Figure 2 This is the second flowchart illustrating the pipeline blockage early warning method provided by the present invention;

[0042] Figure 3 It is one of the curves of the fitting function y=f(t) obtained by using the pipeline blockage early warning method of the present invention;

[0043] Figure 4 It is the second curve of the fitting function y=f(t) obtained by using the pipeline blockage early warning method of the present invention;

[0044] Figure 5 The third curve of the fitting function y=f(t) obtained by the pipeline blockage early warning method of the present invention.

[0045] Figure 6 This is a schematic diagram of the structure of the electronic device provided by the present invention.

[0046] Figure label:

[0047] 810, Processor; 820, Communication interface; 830, Memory; 840, Communication bus. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0049] In specific embodiments of the present invention, such as Figure 1 As shown, the present invention provides a pipeline blockage early warning method, the method comprising:

[0050] S100. Based on the acquired time series and the real-time pressure of the pipeline, obtain the real-time change curve of the real-time pressure versus the time series.

[0051] S200, obtaining a fitting function y=f(t) corresponding to the real-time change curve according to the real-time change curve;

[0052] S300, obtaining a first derivative y'=f'(t) and a second derivative y''=f''(t) of the fitting function y=f(t) according to the fitting function y=f(t);

[0053] S400, judging a blockage condition of the pipeline at the target time according to the fitting function y=f(t) in a case that the second derivative y''=f''(t) in the time sequence is equal to a first threshold value;

[0054] judging the blockage condition of the pipeline at the target time according to the first derivative y'=f'(t) and the second derivative y''=f''(t) in a case that the second derivative y''=f''(t) in the time sequence is not equal to the first threshold value.

[0055] In the specific embodiments of the present application, firstly, a real-time change curve of the real-time pressure and the time sequence is obtained through the obtained time sequence and the real-time pressure of the pipeline, and the change trend of the real-time pressure of the pipeline can be obtained; a fitting function y=f(t) corresponding to the real-time change curve is obtained according to the real-time change curve; then, a first derivative y'=f'(t) and a second derivative y''=f''(t) of the fitting function y=f(t) are obtained according to the fitting function y=f(t); finally, the blockage condition of the pipeline at the target time is judged according to the fitting function y=f(t) in a case that the second derivative y''=f''(t) in the time sequence is equal to a first threshold value; the blockage condition of the pipeline at the target time is judged according to the first derivative y'=f'(t) and the second derivative y''=f''(t) in a case that the second derivative y''=f''(t) in the time sequence is not equal to the first threshold value. It can be known from the physical meaning of the first derivative and the second derivative that the first derivative represents the change rate of the real-time pressure in the time sequence, and the second derivative represents the change rate of the change rate of the real-time pressure in the time sequence, and the change trend of the change rate of the real-time pressure is determined by comparing the second derivative with the first threshold value; if the second derivative y''=f''(t) in the time sequence is equal to the first threshold value, it is indicated that the change rate of the real-time pressure is constant, i.e., the real-time pressure in the fitting function y=f(t) is linearly changed in the time sequence, such as Figure 3As shown in the figure, at this time, the fitting function y=f(t) is used to determine the blockage of the pipeline at the target time; if the second derivative y''=f''(t) in the time sequence is determined to be not equal to the first threshold value, it indicates that the change rate of the real-time pressure is not constant, that is, the change of the real-time pressure in the fitting function y=f(t) is nonlinear in the time sequence, at this time, the first derivative y'=f'(t) and the second derivative y''=f''(t) are used to determine the blockage of the pipeline at the target time. Because the fitting function y=f(t), the first derivative y'=f'(t) and the second derivative y''=f''(t) of the present application are obtained according to the existing real-time pressure and time sequence, so the trend of the fitting function y=f(t), the first derivative y'=f'(t) and the second derivative y''=f''(t) can be used to predict the blockage of the pipeline at a certain time in the future, therefore, the pipeline blockage warning method of the present application solves the problem that the import pressure monitoring alarm system of the semiconductor special process waste gas treatment equipment is not sensitive, and the alarm is sent only when the pipeline is about to be blocked, causing the equipment to be down, and solves the defect that the existing technology cannot predict the blockage of the pipeline.

[0056] It can be understood that the target time can be any time earlier than the current time, or any time later than the current time. If the target time is any time later than the current time, the pipeline blockage warning method of the present application can play a role in advance warning, leaving maintenance time for equipment maintenance personnel and reducing the risk of equipment downtime.

[0057] However, because the real-time change curve of the real-time pressure and the time sequence has certain randomness, in order to consider the accuracy of the prediction, in some embodiments, the target time refers to any time from the current time to the first time. The first time is a time later than the current time. The time period from the current time to the first time includes, but is not limited to, any time period within 5-10 minutes.

[0058] It can be understood that the time period from the current time to the first time can be artificially set according to the actual working condition of the semiconductor special process waste gas treatment equipment.

[0059] In specific embodiments of the present application, the first threshold value is any value in the range of 0-0.5. In some embodiments, the first threshold value is 0, or any value infinitely close to 0.

[0060] In some embodiments, if the second derivative y''=f''(t) in the time sequence is equal to 0, it indicates that the first derivative in the time sequence is constant, that is, the real-time pressure of the pipeline increases at a constant rate, that is, the real-time pressure of the pipeline is linearly changed in the time sequence, as shown in the figure. Figure 3 At this time, the fitting function y=f(t) can be used to determine the blockage of the pipeline at the target time.

[0061] Understandably, in the process of plugging the pipeline of the semiconductor special process waste gas treatment equipment, the pipeline plugging warning method of the application can be repeated to increase the accuracy of predicting the pipeline plugging state at the target time.

[0062] Understandably, when obtaining the real-time pressure, all real-time pressures in the time period from the start time to the current time can be obtained, or the real-time pressure in any time period from the start time to the current time can be obtained.

[0063] In the specific embodiments of the application, the real-time pressure and time sequence real-time change curve is obtained according to the obtained time sequence and the real-time pressure of the pipeline, comprising:

[0064] obtaining the real-time pressure of the pipeline from the start time to the current time, and the time sequence corresponding to the real-time pressure, wherein the start time of the time sequence is zero time;

[0065] obtaining the real-time pressure and time sequence real-time change curve according to the real-time pressure and the time sequence.

[0066] In the specific embodiments of the application, first, the real-time pressure of the pipeline from the start time to the current time, and the time sequence corresponding to the real-time pressure are obtained, wherein the start time of the time sequence is zero time; ensure that each time the pipeline plugging warning method of the application is performed, the real-time pressure and the time sequence are collected from the start time, so that the fitting function is closer to the actual real-time pressure change of the pipeline. Then, the real-time pressure and time sequence real-time change curve is obtained according to the real-time pressure and the time sequence. In some embodiments, the real-time change curve is as shown in Figure 3 In some embodiments, the real-time change curve is as shown in Figure 4 In some other embodiments, the real-time change curve is as shown in Figure 5

[0067] In the specific embodiments of the application, the plugging condition of the pipeline at the target time is determined according to the fitting function y=f(t), comprising:

[0068] in the case where it is determined that the fitting function y=f(t) corresponding to the target time is greater than the second threshold value, a warning is performed;

[0069] in the case where it is determined that the fitting function y=f(t) corresponding to the target time is less than or equal to the second threshold value, no warning is performed;

[0070] wherein the second threshold value is a pressure threshold value corresponding to the first preset plugging state of the pipeline.

[0071] ​In specific embodiments of the present application, if the fitting function y=f(t) corresponding to the target time is greater than the second threshold value, it indicates that at this time, the pipeline has reached the first preset blockage state, and the pipeline is still in a state of gradually strengthening blockage, so a warning is given at this time to remind the maintenance personnel to pay attention to the pipeline at the target time, and if necessary, the pipeline may also need to be repaired and dredged. If the fitting function y=f(t) corresponding to the target time is less than or equal to the second threshold value, it indicates that at this time, the pipeline has not reached the first preset blockage state, and no warning is needed at this time.

[0072] In some embodiments, the warning includes a sound warning or / and a light warning.

[0073] It can be understood that, according to the current time and the target time, the time period when the real-time pressure is greater than the second threshold value can also be determined, thereby playing a role in early warning, reserving maintenance time for equipment maintenance personnel, and reducing the risk of equipment downtime.

[0074] In some embodiments, the pressure threshold value corresponding to the first preset blockage state includes, but is not limited to, the pressure threshold value corresponding to the half-block state of the pipeline.

[0075] It can be understood that the pressure threshold value corresponding to the first preset blockage state can be a pressure value set by a person according to the actual working condition of the semiconductor special process waste gas treatment equipment, which is not limited in specific embodiments of the present application.

[0076] In specific embodiments of the present application, as shown in Figure 2 When it is determined that the fitting function y=f(t) corresponding to the target time is greater than the second threshold value, a warning is given, including:

[0077] When it is determined that the fitting function y=f(t) corresponding to the target time is greater than the second threshold value and less than or equal to the third threshold value, a first-level warning is given;

[0078] If the fitting function y=f(t) corresponding to the target time is greater than the third threshold value, a second-level warning is given;

[0079] Wherein, the third threshold value is greater than the second threshold value, and the third threshold value is the pressure threshold value corresponding to the second preset blockage state of the pipeline.

[0080] In the specific embodiments of the present application, because the third threshold is greater than the second threshold, the third threshold is the pressure threshold corresponding to the second preset clogging state of the pipeline, so when the real-time pressure of the pipeline reaches the third threshold, it indicates that the pipeline may soon be clogged, so at this time the maintenance personnel need to pay special attention to the clogging state of the pipeline and make timely feedback. If the fitting function y=f(t) corresponding to the target time is greater than the second threshold and less than or equal to the third threshold, it indicates that at this time, i.e., the target time, the clogging state of the pipeline is gradually strengthening, but the clogging state of the pipeline will not be completely clogged in a relatively long period of time, that is, the pre-warning at this time is mainly to remind the maintenance personnel to pay attention to the clogging state of the pipeline at the target time and to make timely maintenance response to reduce the risk of equipment downtime. If the fitting function y=f(t) corresponding to the target time is greater than the third threshold, it indicates that at this time, i.e., the target time, the clogging state of the pipeline has reached a stage that requires special attention from the maintenance personnel, reminding the maintenance personnel to maintain and dredge the pipeline as soon as possible to reduce the risk of equipment downtime.

[0081] In some embodiments, the pressure threshold corresponding to the second preset clogging state includes, but is not limited to, the pressure threshold corresponding to the two-thirds clogging state of the pipeline.

[0082] It can be understood that the pressure threshold corresponding to the second preset clogging state can be a pressure value set by a person according to the actual working condition of the semiconductor process waste gas treatment equipment, which is not limited in the specific embodiments of the present application.

[0083] It can be understood that the first-level pre-warning can be a sound pre-warning, and the second-level pre-warning can be a light pre-warning. In the specific embodiments of the present application, the forms of the first-level pre-warning and the second-level pre-warning are not limited as long as they can be distinguished by the maintenance personnel.

[0084] In the specific embodiments of the present application, the clogging state of the pipeline at the target time is determined according to the first derivative y'=f'(t) and the second derivative y''=f''(t), which includes:

[0085] In the case where it is determined that the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold, a pre-warning is performed;

[0086] In the case where it is determined that the second derivative y''=f''(t) corresponding to the target time is less than the first threshold, no pre-warning is performed.

[0087] In specific embodiments of the present application, if the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value, it indicates that the first derivative y'=f'(t) is in a gradually increasing trend, and the pipeline is accelerating clogging, at which time a warning needs to be given to remind maintenance personnel to pay attention to the clogging state of the pipeline at this time, reducing the risk of equipment downtime. If the second derivative y''=f''(t) corresponding to the target time is less than the first threshold value, it indicates that the first derivative y'=f'(t) is in a gradually decreasing trend, and the clogging condition of the pipeline is gradually alleviating, at which time no warning is needed to avoid false positive warning information and waste of human resources.

[0088] In specific embodiments of the present application, as shown in Figure 2 the first derivative y'=f'(t) is less than or equal to the fourth threshold value, a first-level warning is given;

[0089] In a case where it is determined that the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is less than or equal to the fourth threshold value, a first-level warning is given;

[0090] In a case where it is determined that the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is greater than the fourth threshold value, a second-level warning is given;

[0091] In a case where it is determined that the second derivative y''=f''(t) corresponding to the target time is greater than the fifth threshold value, and the first derivative y'=f'(t) is less than or equal to the fourth threshold value, a second-level warning is given;

[0092] In a case where it is determined that the second derivative y''=f''(t) corresponding to the target time is greater than the fifth threshold value, and the first derivative y'=f'(t) is greater than the fourth threshold value, a third-level warning is given;

[0093] wherein the fifth threshold value is greater than the first threshold value; and the fourth threshold value is the first derivative of the pressure threshold value corresponding to when the pipeline reaches the first preset clogging state.

[0094] In specific embodiments of the present application, if the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is less than or equal to the fourth threshold value, it indicates that the change rate of the real-time pressure of the pipeline is in an increasing state, but because the second derivative y''=f''(t) is greater than the first threshold value and less than or equal to the fifth threshold value, the change rate of the real-time pressure increases less. Combined with the fact that the first derivative y'=f'(t) is less than or equal to the fourth threshold value, it indicates that although the change rate of the change rate of the real-time pressure increases less, the change rate of the real-time pressure is large at this time, which indicates that the pipeline may be completely blocked in a short time in the future. Therefore, a secondary warning is performed at this time to remind the maintenance personnel to repair and dredge the pipeline in time at this time to prevent the pipeline from being completely blocked and causing the equipment to be down, thereby reducing the risk of equipment downtime.

[0095] In specific embodiments of the present application, if the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is greater than the fourth threshold value, it indicates that the change rate of the real-time pressure of the pipeline is in an increasing state, but because the second derivative y''=f''(t) is greater than the first threshold value and less than or equal to the fifth threshold value, the change rate of the real-time pressure increases less. Combined with the fact that the first derivative y'=f'(t) is greater than the fourth threshold value, it indicates that although the change rate of the change rate of the real-time pressure increases less, the change rate of the real-time pressure is large at this time, which indicates that the pipeline may be completely blocked in a short time in the future. Therefore, a secondary warning is performed at this time to remind the maintenance personnel to repair and dredge the pipeline in time at this time to prevent the pipeline from being completely blocked and causing the equipment to be down, thereby reducing the risk of equipment downtime.

[0096] In specific embodiments of the present application, if the second derivative y''=f''(t) corresponding to the target time is greater than the first threshold value and less than or equal to the fifth threshold value, and the first derivative y'=f'(t) is greater than the fourth threshold value, it indicates that the change rate of the real-time pressure of the pipeline is in an increasing state, but because the second derivative y''=f''(t) is greater than the first threshold value and less than or equal to the fifth threshold value, the change rate of the real-time pressure increases less. Combined with the fact that the first derivative y'=f'(t) is greater than the fourth threshold value, it indicates that although the change rate of the change rate of the real-time pressure increases less, the change rate of the real-time pressure is large at this time, which indicates that the pipeline may be completely blocked in a short time in the future. Therefore, a secondary warning is performed at this time to remind the maintenance personnel to repair and dredge the pipeline in time at this time to prevent the pipeline from being completely blocked and causing the equipment to be down, thereby reducing the risk of equipment downtime.

[0097] In specific embodiments of the present application, if the second derivative y''=f''(t) corresponding to the target time is greater than the fifth threshold value, it indicates that the rate of change of the real-time pressure of the pipeline is in an increasing state, and the increasing rate of the rate of change of the real-time pressure is relatively large; in combination with the first derivative y'=f'(t) being greater than the fourth threshold value, it indicates that the rate of change of the real-time pressure is also relatively large at this time, and it further indicates that the pipeline urgently needs maintenance and dredging at this time, so a three-level warning is performed to remind the maintenance personnel to immediately maintain and dredge the pipeline, thereby avoiding equipment downtime and reducing the risk of equipment downtime.

[0098] Understandably, the first-level warning can be a sound warning, the second-level warning can be a light warning, and the third-level warning is a sound warning superimposed on a light warning. In specific embodiments of the present application, the form of the first-level warning, the second-level warning, and the third-level warning is not limited, as long as it can be distinguished by the maintenance personnel.

[0099] In specific embodiments of the present application, the fifth threshold value can be a value set by a person according to the actual working condition of the semiconductor special process waste gas treatment equipment, and in specific embodiments of the present application, the fifth threshold value is not limited.

[0100] In some embodiments, the fifth threshold value is any one value in 0-5.

[0101] In specific embodiments of the present application, the fourth threshold value is the first derivative of the pressure threshold value corresponding to the first preset blocked state of the pipeline, wherein the first derivative of the pressure threshold value corresponding to the first preset blocked state of the pipeline includes, but is not limited to, the first derivative of the pressure threshold value corresponding to the half-blocked state of the pipeline.

[0102] Understandably, the first derivative of the pressure threshold value corresponding to the first preset blocked state of the pipeline can be a value set by a person according to the actual working condition of the semiconductor special process waste gas treatment equipment, and in specific embodiments of the present application, the first derivative of the pressure threshold value corresponding to the first preset blocked state of the pipeline is not limited.

[0103] The present application also provides a pipeline blockage warning system, which comprises a data acquisition and processing module, a data fitting module, a function derivation module, and a pipeline blockage prediction module; the data fitting module is electrically connected with the data acquisition and processing module, the function derivation module is electrically connected with the data fitting module, and the pipeline blockage prediction module is electrically connected with the function derivation module.

[0104] The data acquisition and processing module is configured to obtain a real-time change curve of the real-time pressure and time sequence according to the obtained time sequence and the real-time pressure of the pipeline.

[0105] The data fitting module is configured to obtain a fitting function y=f(t) corresponding to the real-time change curve according to the real-time change curve.

[0106] The function derivative module is configured to obtain a first derivative y' = f'(t) and a second derivative y'' = f''(t) of the fitting function y = f(t) according to the fitting function y = f(t).

[0107] The pipeline blockage prediction module is configured to determine a blockage condition of the pipeline at a target time according to the fitting function y = f(t) when the second derivative y'' = f''(t) in the time sequence is equal to a first threshold value; and determine the blockage condition of the pipeline at the target time according to the first derivative y' = f'(t) and the second derivative y'' = f''(t) when the second derivative y'' = f''(t) in the time sequence is not equal to the first threshold value.

[0108] Figure 6 An example of a schematic diagram of a physical structure of an electronic device is shown in FIG. 1. Figure 6 As shown in FIG. 1, the electronic device can include a processor 810, a communications interface 820, a memory 830, and a communications bus 840, wherein the processor 810, the communications interface 820, and the memory 830 can communicate with each other through the communications bus 840. The processor 810 can invoke a logical instruction in the memory 830 to execute a pipeline blockage early warning method, including:

[0109] obtaining a real-time change curve of the real-time pressure and the time sequence according to the obtained time sequence and the real-time pressure of the pipeline;

[0110] obtaining a fitting function y = f(t) corresponding to the real-time change curve according to the real-time change curve;

[0111] obtaining a first derivative y' = f'(t) and a second derivative y'' = f''(t) of the fitting function y = f(t) according to the fitting function y = f(t);

[0112] determining a blockage condition of the pipeline at a target time according to the fitting function y = f(t) when the second derivative y'' = f''(t) in the time sequence is equal to a first threshold value;

[0113] determining the blockage condition of the pipeline at the target time according to the first derivative y' = f'(t) and the second derivative y'' = f''(t) when the second derivative y'' = f''(t) in the time sequence is not equal to the first threshold value.

[0114] In addition, the logic instructions in the memory 830 described above can be implemented in the form of software functional units and sold or used as independent products, and can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application essentially or the parts that contribute to the related art or the parts of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium, and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk, and various media that can store program codes.

[0115] The device embodiments described above are only schematic, wherein the units illustrated as separate components can or can not be physically separate, and the components illustrated as units can or can not be physical units, i.e., can be located in one place, or can be distributed on multiple network units. Part or all of the modules can be selected according to actual needs to achieve the purpose of the present embodiment. Those skilled in the art can understand and implement without creative labor.

[0116] From the above description of the embodiments, those skilled in the art can clearly understand that the embodiments can be implemented by means of software and the necessary general hardware platform, and of course can also be implemented by hardware. Based on such understanding, the technical solutions described above essentially or the parts that contribute to the related art can be embodied in the form of a software product. The computer software product can be stored in a computer readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0117] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for early warning of pipe blockage, characterized in that, include: The real-time pressure versus time series curve is obtained based on the acquired time series and the real-time pressure of the pipeline. Based on the real-time change curve, the fitting function corresponding to the real-time change curve is obtained. ; According to the fitting function The fitting function is obtained. first derivative and second derivative ; The second derivative within a defined time series When the value is equal to the first threshold, according to the fitting function Determine the blockage status of the pipeline at the target time; The second derivative within a defined time series If it is not equal to the first threshold, according to the first derivative and the second derivative Determine the blockage status of the pipeline at the target time; The first derivative and the second derivative Determining the blockage status of the pipeline at a target time includes: The second derivative corresponding to the target time. If the value exceeds the first threshold, an early warning will be issued; The second derivative corresponding to the target time. If the value is less than the first threshold, no warning will be issued; According to the fitting function Determining the blockage status of the pipeline at a target time includes: The fitting function corresponding to the target time is determined. If the value exceeds the second threshold, an early warning will be issued; The fitting function corresponding to the target time is determined. No warning will be issued if the threshold is less than or equal to the second threshold. Wherein, the second threshold is the pressure threshold corresponding to when the pipeline reaches the first preset blockage state; The fitting function corresponding to the target time. If the value exceeds the second threshold, an early warning will be issued, including: The fitting function corresponding to the target time is determined. If the value is greater than the second threshold and less than or equal to the third threshold, a Level 1 warning will be issued. If the fitting function corresponding to the target time If the value exceeds the third threshold, a level-two warning will be issued. Wherein, the third threshold is greater than the second threshold, and the third threshold is the pressure threshold corresponding to when the pipeline reaches the second preset blockage state.

2. The pipeline blockage early warning method according to claim 1, characterized in that, The second derivative corresponding to the target time. If the value exceeds the first threshold, an alert will be issued, including: The second derivative corresponding to the target time. The first derivative is greater than the first threshold and less than or equal to the fifth threshold. If the threshold is less than or equal to the fourth threshold, a Level 1 warning will be issued. The second derivative corresponding to the target time. The first derivative is greater than the first threshold and less than or equal to the fifth threshold. If the value exceeds the fourth threshold, a level-two warning will be issued; The second derivative corresponding to the target time. The first derivative is greater than the fifth threshold. If the threshold is less than or equal to the fourth threshold, a level-two warning will be issued. The second derivative corresponding to the target time. The first derivative is greater than the fifth threshold. If the value exceeds the fourth threshold, a level three warning will be issued. Wherein, the fifth threshold is greater than the first threshold; the fourth threshold is the first derivative of the pressure threshold corresponding to when the pipeline reaches the first preset blockage state.

3. The pipeline blockage early warning method according to claim 2, characterized in that, The first threshold is any value between 0 and 0.5; the fifth threshold is any value between 0 and 5.

4. The pipeline blockage early warning method according to claim 1, characterized in that, The step of obtaining the real-time pressure versus time series curve based on the acquired time series and the real-time pressure of the pipeline includes: Obtain the real-time pressure of the pipeline from the start time to the current time, and the time series corresponding to the real-time pressure, wherein the start time of the time series is time zero; The real-time change curve of the real-time pressure versus the time series is obtained based on the real-time pressure and the time series.

5. A pipeline blockage early warning system, characterized in that, include: The data acquisition and processing module is used to obtain the real-time change curve of real-time pressure versus time series based on the acquired time series and the real-time pressure of the pipeline. The data fitting module is used to obtain the fitting function corresponding to the real-time change curve based on the real-time change curve. ; The function differentiation module is used to calculate the derivative of the fitted function. The fitting function is obtained. first derivative and second derivative ; The pipeline blockage prediction module is used to determine the second derivative within a defined time series. When the value is equal to the first threshold, according to the fitting function It is used to determine the blockage status of the pipeline at a target time; it is also used to determine the second derivative within a defined time series. If it is not equal to the first threshold, according to the first derivative and the second derivative Determine the blockage status of the pipeline at the target time; The first derivative and the second derivative Determining the blockage status of the pipeline at a target time includes: The second derivative corresponding to the target time. If the value exceeds the first threshold, an early warning will be issued; The second derivative corresponding to the target time. If the value is less than the first threshold, no warning will be issued; According to the fitting function Determining the blockage status of the pipeline at a target time includes: The fitting function corresponding to the target time is determined. If the value exceeds the second threshold, an early warning will be issued; The fitting function corresponding to the target time is determined. No warning will be issued if the threshold is less than or equal to the second threshold. Wherein, the second threshold is the pressure threshold corresponding to when the pipeline reaches the first preset blockage state; The fitting function corresponding to the target time. If the value exceeds the second threshold, an early warning will be issued, including: The fitting function corresponding to the target time is determined. If the value is greater than the second threshold and less than or equal to the third threshold, a Level 1 warning will be issued. If the fitting function corresponding to the target time If the value exceeds the third threshold, a level-two warning will be issued. Wherein, the third threshold is greater than the second threshold, and the third threshold is the pressure threshold corresponding to when the pipeline reaches the second preset blockage state.

6. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the pipeline blockage early warning method as described in any one of claims 1 to 4.

7. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the pipeline blockage early warning method as described in any one of claims 1 to 4.

Images