A coating system

Abstract

This invention relates to the field of vacuum coating technology and discloses a coating system. The coating system includes a coating chamber and a cooling device. The coating chamber contains a film carrier with multiple bearing positions, and coating positions are provided within the coating chamber for coating. The bearing positions can be sequentially placed at the coating positions. The cooling device is located in the coating chamber and includes a coating position cooling mechanism for cooling the bearing positions placed at the coating positions, and a non-coating position cooling mechanism for cooling the bearing positions not located at coating positions. This invention provides multiple bearing positions on the film carrier to hold more film. By providing a cooling device to cool the film carrier placed in the coating chamber, the coating position cooling mechanism cools the bearing positions placed at the coating positions, and the non-coating position cooling mechanism cools the bearing positions after coating. This makes the cooling of the film carrier more targeted, improves the cooling effect, ensures the coating effect, and increases the safety factor.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to a coating system. Background Technology

[0002] In the field of vacuum coating technology, the coating process is generally carried out by methods such as electron beam evaporation, resistive evaporation, or sputtering. In these processes, excess heat is inevitably generated. If effective measures are not taken, the coating material carrier and other components may experience performance degradation or damage due to excessive temperature, posing serious safety hazards and affecting the coating effect. Therefore, effectively reducing the excess heat generated during the coating process and achieving stable and reliable automated continuous coating is an urgent problem to be solved.

[0003] Therefore, there is an urgent need for a coating system to solve the above problems. Summary of the Invention

[0004] Based on the above, the purpose of this invention is to provide a coating system that can reliably cool the film carrier, resulting in better cooling and coating effects, and a higher safety factor.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A coating system, comprising:

[0007] A coating chamber is provided with a film carrier having multiple bearing positions. The coating chamber is provided with coating positions for coating, and the bearing positions can be placed sequentially at the coating positions.

[0008] A cooling device is disposed in the coating cavity. The cooling device includes a coating position cooling mechanism for cooling the bearing position placed in the coating position, and a non-coating position cooling mechanism for cooling the bearing position located in the non-coating position.

[0009] As a preferred embodiment of a coating system, the coating position cooling mechanism includes a coating cooling drive and a coolant column disposed at the drive end of the coating cooling drive. The coating cooling drive can drive the coolant column to come into contact with and cool the bearing position placed at the coating position.

[0010] As a preferred embodiment of the coating system, a cooling groove is provided below the bearing position, and the end of the coolant column away from the coating cooling drive can be selectively placed in the cooling groove.

[0011] As a preferred embodiment of a coating system, the non-coating area cooling mechanism includes an upper cooling component and a lower cooling component for the non-coating area. The upper cooling component for the non-coating area is located above the film material carrier, and the lower cooling component for the non-coating area is located below the film material carrier.

[0012] As a preferred embodiment of a coating system, the cooling component on the non-coating position can be raised and lowered, and the cooling component on the non-coating position can contact and cool the upper part of the film material carrier.

[0013] And / or, the cooling assembly under the non-coating position can be raised and lowered, and the cooling assembly under the non-coating position can contact and cool the lower part of the film material carrier.

[0014] As a preferred embodiment of a coating system, the sidewall of the film carrier is inclined outward, and the cooling assembly on the non-coating position can abut against the sidewall of the film carrier for cooling.

[0015] As a preferred embodiment of the coating system, two cooling components are provided on the non-coating positions, and the two cooling components on the non-coating positions are respectively located on both sides of the film carrier.

[0016] As a preferred embodiment of a coating system, the non-coating site cooling mechanism extends along the length of the film carrier, and the length of the non-coating site cooling mechanism covers at least two of the carrier sites.

[0017] As a preferred embodiment of the coating system, the coating system further includes a conveying device configured to sequentially convey the bearing position to the coating position.

[0018] As a preferred embodiment of the coating system, the conveying device further includes an adjusting guide wheel, which is used to adjust the levelness of the film material carrier.

[0019] The beneficial effects of this invention are as follows:

[0020] This invention utilizes a coating chamber for vacuum coating. By providing multiple support positions on the film carrier to hold more film, and then sequentially conveying each support position to the coating position via a conveying device, the amount of film coated in a single conveying is increased. A cooling device is incorporated to cool the film carrier placed in the coating chamber. Furthermore, the coating position cooling mechanism cools the support positions placed in the coating position, while the non-coating position cooling mechanism cools the support positions after coating. This targeted cooling of the film carrier improves the cooling effect, ensures the coating effect, and enhances safety. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0022] Figure 1 This is a front view of the coating system provided in a specific embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the coating system provided in a specific embodiment of the present invention;

[0024] Figure 3 This is a cross-sectional view of the non-coating area of ​​the coating system provided in a specific embodiment of the present invention;

[0025] Figure 4 This is a cross-sectional view of the coating position of the coating system provided in a specific embodiment of the present invention.

[0026] In the picture:

[0027] 100. Coating cavity; 110. Coating position; 120. Support column;

[0028] 1. Film material carrier; 11. Carrier position; 111. Cooling groove; 112. Flanged edge; 12. Carrier strip; 121. Positioning hole;

[0029] 2. Cooling device; 21. Coating position cooling mechanism; 211. Coolant column; 212. Coating cooling drive component; 22. Non-coating position cooling mechanism; 221. Upper cooling assembly for non-coating position; 2211. Liquid cooling platform; 2212. First cooling drive component for non-coating position; 2213. Connecting plate; 2214. Coolant pipe; 2215. Drive component mounting flange; 222. Lower cooling assembly for non-coating position; 2221. Liquid cooling plate; 2222. Second cooling drive component for non-coating position;

[0030] 31. Support rail; 311. Adjust guide wheel. Detailed Implementation

[0031] Embodiments of the present invention are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0032] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0033] Unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0034] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] like Figures 1-4 As shown, this embodiment provides a coating system, which includes a coating chamber 100 and a cooling device 2. The coating chamber 100 is provided with a film carrier 1 having a plurality of bearing positions 11, and the coating chamber 100 is provided with coating positions 110 for coating. The bearing positions 11 can be placed sequentially in the coating positions 110. The cooling device 2 is provided in the coating chamber 100 and includes a coating position cooling mechanism 21 for cooling the bearing positions 11 placed in the coating positions 110, and a non-coating position cooling mechanism 22 for cooling the bearing positions 11 that have passed through the coating positions 110.

[0036] By setting up a coating chamber 100 for vacuum coating, and by providing multiple bearing positions 11 on the film material carrier 1 to hold more film material, and by using a conveying device to sequentially convey each bearing position 11 to the coating position 110 for coating, the amount of film material conveyed at one time is increased. By setting up a cooling device 2 to cool the film material carrier 1 placed in the coating chamber 100, and further, the coating position cooling mechanism 21 cools the bearing positions 11 placed in the coating position 110, and the non-coating position cooling mechanism 22 cools the bearing positions 11 after coating, making the cooling of the film material carrier 1 more targeted, improving the cooling effect, ensuring the coating effect, and increasing the safety factor.

[0037] As an optional solution for the coating system, the coating position cooling mechanism 21 includes a coolant column 211, which cools the coating position 110 by contacting the coolant column 211 with the bearing position 11. The coolant column 211 is disposed at the driving end of the coating cooling drive 212, which can drive the coolant column 211 to contact the bearing position 11 of the coating position 110.

[0038] In this embodiment, the coolant column 211 is positioned below the film carrier 1 to reduce the impact of the upper coating on the coolant column 211. The coating cooling drive 212 drives the coolant column 211 to move vertically. When the coolant column 211 rises to contact the film carrier 1, it cools the film carrier 1. When the coolant column 211 descends, the film carrier 1 can be transported without interference from the coating cooling mechanism 21. Exemplarily, the coating cooling drive 212 can be a drive cylinder or a drive motor.

[0039] Preferably, a cooling groove 111 is provided below the bearing position 11. The shape of the cooling groove 111 is adapted to the end of the coolant column 211 away from the coating cooling drive member 212. The coating cooling drive member 212 can drive the coolant column 211 to selectively place it in the cooling groove 111, effectively improving the cooling effect. It is worth noting that by placing the end of the coolant column 211 in the cooling groove 111, the coolant column 211 can also play a certain detection role, firstly detecting whether the coating position 110 has a bearing position 11, and secondly detecting whether the bearing position 11 is offset.

[0040] As an optional solution for the coating system, the non-coating area cooling mechanism 22 includes an upper cooling component 221 and a lower cooling component 222 for the non-coating area. The upper cooling component 221 is located above the film carrier 1, and the lower cooling component 222 is located below the film carrier 1. By setting the upper cooling component 221 and the lower cooling component 222, the cooling of the film carrier 1 after coating is more complete.

[0041] Specifically, the upper cooling assembly 221 of the non-coating position is vertically adjustable, and can contact the upper part of the film material carrier 1 for cooling; the lower cooling assembly 222 of the non-coating position is vertically adjustable, and can contact the lower part of the film material carrier 1 for cooling. By making both the upper cooling assembly 221 and the lower cooling assembly 222 of the non-coating position vertically adjustable, the cooling mechanism 22 of the non-coating position can contact the film material carrier 1 from both the upper and lower directions. On the one hand, contact cooling can effectively improve the cooling effect; on the other hand, when the cooling mechanism 22 of the non-coating position is disengaged from the film material carrier 1, it will not interfere with the conveying of the film material carrier 1.

[0042] In this embodiment, the sidewall of the film material carrier 1 is inclined outward, and the cooling assembly 221 on the non-coating position can abut against the sidewall of the film material carrier 1 for cooling the upper part of the film material carrier 1. It is worth noting that the upper edge of the film material carrier 1 is provided with a flange 112. When the cooling assembly 221 on the non-coating position rises to the point where it disengages from the sidewall of the film material carrier, the cooling assembly 221 on the non-coating position will not interfere with the flange 112, so as to ensure that the film material carrier 1 can be transported normally.

[0043] Preferably, two cooling components 221 are provided on the non-coating positions, and the two cooling components 221 on the non-coating positions are respectively located on both sides of the film material carrier 1 to cool both sides of the film material carrier 1.

[0044] Furthermore, the non-coating area cooling assembly 221 includes a liquid cooling platform 2211 and a non-coating area cooling first driving member 2212 that drives the liquid cooling platform 2211 to move up and down; the liquid cooling platform 2211 is connected to the non-coating area cooling first driving member 2212 through a connecting plate 2213. Preferably, the connecting plate 2213 is provided with weight reduction holes, which helps to reduce the driving weight of the non-coating area cooling first driving member 2212 and makes the driving more reliable.

[0045] It is worth noting that, in order to allow coolant to flow into the liquid cooling platform 2211, the cooling assembly 221 on the non-coating site also includes a coolant pipe 2214 connected to the liquid cooling platform 2211, with the other end of the coolant pipe 2214 connected to a coolant supply device. Multiple coolant pipes 2214 can also be provided to improve cooling efficiency and effect.

[0046] In this embodiment, the non-coating position cooling assembly 222 includes a liquid cooling plate 2221 and a second driving member 2222 for cooling the non-coating position, which drives the liquid cooling plate 2221 to move up and down.

[0047] Optionally, both the first driving component 2212 for cooling the non-coating area and the second driving component 2222 for cooling the non-coating area can be a driving cylinder or a driving motor. Both the first driving component 2212 and the second driving component 2222 for cooling the non-coating area are installed within the coating cavity 100 via a driving component mounting flange 2215. Further, the coating system is installed within the coating cavity 100 via a support column 120.

[0048] As an optional solution for the coating system, the non-coating area cooling mechanism 22 extends along the length of the film carrier 1, and the length of the non-coating area cooling mechanism 22 covers at least two or more carrier positions 11. This arrangement allows the non-coating area cooling mechanism 22 to be used for cooling multiple coated carrier positions 11, thus improving cooling efficiency.

[0049] In this embodiment, to achieve the conveying of the film material carrier 1, the coating system also includes a conveying device, which is configured to sequentially convey the carrier position 11 to the coating position 110. It is understood that since the cooling devices 2 are all designed to be liftable, when the cooling devices 2 are not working, the cooling devices 2 are disengaged from the film material carrier 1, and this will not affect the normal conveying of the film material carrier 1 by the conveying device.

[0050] Specifically, the film material carrier 1 includes a carrier strip 12, a plurality of carrier positions 11 are disposed on the carrier strip 12, and a positioning hole 121 is provided at one end of the carrier strip 12, and the conveying device is connected to the positioning hole 121.

[0051] For example, the support strip 12 can be a crucible platform, wherein the support position 11 is recessed in the support strip 12, and the shape of the support position 11 is not limited. A crucible adapted to its shape can be placed in the support position 11, and the coating material is placed in the crucible; or the coating material can be placed directly in the support position 11.

[0052] Furthermore, the conveying device includes a support rail 31 for supporting the movement of the film material carrier 1, and an adjusting guide wheel 311 disposed on the support rail 31 for adjusting the levelness of the film material carrier 1. By ensuring the levelness of the film material carrier 1, the stability of the film material carrier and the reliability of the cooling device 2 in contact with and cooling the film material carrier 1 are guaranteed.

[0053] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A coating system, characterized by, The application relates to a film plating system, which comprises: a film plating cavity (100) provided with a film material carrier (1) having a plurality of bearing positions (11) for bearing film materials, the film plating cavity (100) being provided with a film plating position (110) for film plating, and the bearing positions (11) being capable of being sequentially placed in the film plating position (110); a cooling device (2) provided in the film plating cavity (100), the cooling device (2) comprising a film plating position cooling mechanism (21) for cooling the bearing positions (11) placed in the film plating position (110) and a non-film plating position cooling mechanism (22) for cooling the bearing positions (11) located in non-film plating positions; the non-film plating position cooling mechanism (22) comprises an upper non-film plating position cooling assembly (221) and a lower non-film plating position cooling assembly (222), the upper non-film plating position cooling assembly (221) being located above the film material carrier (1), and the lower non-film plating position cooling assembly (222) being located below the film material carrier (1); the upper non-film plating position cooling assembly (221) is provided in a lifting mode, and the upper non-film plating position cooling assembly (221) is capable of abutting and cooling the upper part of the film material carrier (1); and / or, the lower non-film plating position cooling assembly (222) is provided in a lifting mode, and the lower non-film plating position cooling assembly (222) is capable of abutting and cooling the lower part of the film material carrier (1).

2. The coating system of claim 1, wherein, the film plating position cooling mechanism (21) comprises a film plating cooling driving member (212) and a cooling liquid column (211) provided at the driving end of the film plating cooling driving member (212), and the film plating cooling driving member (212) is capable of driving the cooling liquid column (211) to abut and cool the bearing positions (11) placed in the film plating position (110).

3. The coating system of claim 2, wherein, a cooling groove (111) is provided below the bearing positions (11), and the end of the cooling liquid column (211) away from the film plating cooling driving member (212) can be placed in the cooling groove (111).

4. The coating system of claim 1, wherein, the side wall of the film material carrier (1) is provided in a mode of inclining towards the outside, and the upper non-film plating position cooling assembly (221) is capable of abutting and cooling the side wall of the film material carrier (1).

5. The coating system of claim 1, wherein, two upper non-film plating position cooling assemblies (221) are provided, and the two upper non-film plating position cooling assemblies (221) are respectively located on the two sides of the film material carrier (1).

6. The coating system according to any one of claims 1 to 5, wherein the non-film plating position cooling mechanism (22) extends along the length direction of the film material carrier (1), and the length of the non-film plating position cooling mechanism (22) covers at least two or more bearing positions (11).

7. The coating system according to any one of claims 1 to 5, wherein the film plating system further comprises a conveying device configured to sequentially convey the bearing positions (11) to the film plating position (110).

8. The coating system of claim 7, wherein, the conveying device further comprises an adjusting guide wheel (311) for adjusting the levelness of the film material carrier (1).

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