Material property equivalence method, simulation method and manufacturing method of metal mask

Abstract

The present disclosure provides a material property equivalence method, simulation method, and manufacturing method for a metal mask. The material property equivalence method includes establishing a unit model of the metal mask based on the area of ​​the metal mask with holes; setting the basic material properties of the unit model; obtaining a first deformation of the unit model under a preset load; establishing a solid model with the same size as the unit model and without holes; setting the initial material properties of the solid model; obtaining a second deformation of the solid model under a preset load, adjusting the initial material properties so that the second deformation approaches or is equal to the first deformation, and obtaining equivalent material properties based on the adjusted initial material properties. This method can better simulate the morphology of a precision metal mask with higher accuracy than existing technologies.

Description

Technical Field

[0001] The present disclosure relates to the technical field of OLED manufacturing, and in particular to a material property equivalence method, a simulation method, and a manufacturing method of a metal mask. Background Art

[0002] OLED (Organic Light-Emitting Diode) is an organic light-emitting diode, which typically includes organic light-emitting layers on a substrate that can produce red (R), green (G), and blue (B). These organic layers are usually deposited by evaporation. In the evaporation equipment of current OLED mass production lines, FMM (Fine Metal Mask) is used to achieve the separate deposition of RGB pixel light-emitting layers.

[0003] Before using a precision metal mask for vapor deposition, the precision metal mask needs to be stretched. Since the precision metal mask is extremely thin and requires extremely high precision, how to compensate for the precision metal mask to improve the stretching accuracy is a problem that is difficult to solve in existing technologies. Summary of the Invention

[0004] In order to solve or improve the above-mentioned problems existing in the prior art, a first aspect of an embodiment of the present disclosure provides a method for material property equivalence of a metal mask, the method comprising:

[0005] Establishing a cell model of the metal mask based on a region of the metal mask having holes;

[0006] Set the basic material properties of the element model;

[0007] Obtain the first deformation of the unit model under the preset load;

[0008] Create a solid model with the same size as the unit model and without holes;

[0009] Set the initial material properties of the solid model;

[0010] A second deformation of the solid model under a preset load is obtained, and the initial material properties are adjusted so that the second deformation approaches or is equal to the first deformation, and equivalent material properties are obtained according to the adjusted initial material properties.

[0011] This equivalence method, significantly different from existing techniques, no longer uses a complete mask with holes as the modeling object. Instead, the mask is divided into relatively small units, from which its deformation under unit load is calculated. A solid plate of the same size is then used to approximate the corresponding deformation, thereby obtaining equivalent material properties. This overcomes the anisotropy caused by etching the mask plate and achieves high accuracy.

[0012] Optionally, base material properties include the density, elastic modulus, and Poisson's ratio of the Invar foil selected for the metal mask.

[0013] Optionally, the initial material properties include: initial elastic modulus, initial shear modulus, and initial Poisson's ratio; the equivalent material properties include equivalent elastic modulus, equivalent shear modulus, and equivalent Poisson's ratio.

[0014] Optional, preset loads selected from:

[0015] For the x-axis tensile load, one end of the unit model or solid model in the x-axis is fixed and a tensile load is applied to the other end;

[0016] For y-direction tensile load, one end of the unit model or solid model in the y-direction is fixed and a tensile load is applied to the other end;

[0017] Tensile load in z direction: one end of the unit model or solid model in z direction is fixed and tensile load is applied to the other end;

[0018] Shear load: applies xy-direction shear load to the diagonal corners of the unit model or solid model;

[0019] Among them, the z direction is the thickness direction of the unit model or the solid model, and the x direction, y direction and z direction are perpendicular to each other.

[0020] Optionally, the equivalent method further comprises:

[0021] Repeating the process of obtaining a second deformation and adjusting at least one of the initial elastic modulus in the x-direction, the initial elastic modulus in the y-direction, and the initial Poisson's ratio in the xy-direction until the second deformation under the x-direction tensile load or the y-direction tensile load approaches or is equal to the first deformation under the same load;

[0022] The x-direction equivalent elastic modulus, y-direction equivalent elastic modulus, and xy-direction equivalent Poisson's ratio are obtained according to the adjusted initial material properties.

[0023] Optionally, the equivalent method further comprises:

[0024] Adjusting the initial elastic modulus in the z-direction so that the second deformation under the z-direction tensile load approaches or is equal to the first deformation under the same load;

[0025] Obtain the equivalent elastic modulus in the z direction based on the adjusted initial material properties.

[0026] Optionally, the equivalent method further comprises:

[0027] Adjust the initial shear modulus in the xy direction so that the second deformation under shear load approaches or is equal to the first deformation under the same load;

[0028] Obtain the equivalent shear modulus in the xy direction based on the adjusted initial material properties.

[0029] The equivalent material properties obtained by the above equivalence method include equivalent elastic modulus, equivalent shear modulus, and equivalent Poisson's ratio. Through the above optional scheme, the equivalent elastic modulus in the x-direction, equivalent elastic modulus in the y-direction, equivalent Poisson's ratio in the xy-direction, and equivalent shear modulus in the xy-direction can be obtained. At the same time, the equivalent material properties in other directions, including the z-direction equivalent elastic modulus, vary little or remain unchanged. Therefore, the above scheme is sufficient to achieve high-precision property equivalence of metal masks.

[0030] Optionally, under the condition that the preset load is an x-direction tensile load, a y-direction tensile load or a shear load, the x-direction and y-direction components of the first deformation and the second deformation are obtained; under the condition that the preset load is a z-direction tensile load, the x-direction, y-direction and z-direction components of the first deformation and the second deformation are obtained.

[0031] A second aspect of the present disclosure provides a method for simulating the stretching of a metal mask. The method specifically uses the equivalent material properties obtained in the technical solution of the first aspect and any preferred solution thereof to perform a simulation operation on the metal mask to obtain a simulation result after the metal mask is stretched.

[0032] The above simulation results include at least one of deformation, stress and strain of the metal mask after stretching.

[0033] A third aspect of the disclosed embodiments provides a method for manufacturing a metal mask, which specifically includes the simulation method described in the technical solution of the second aspect.

[0034] In summary, the above-mentioned equivalent method, simulation method and manufacturing method can better simulate the shape of the precision metal mask compared with the existing technology, and on this basis, the accuracy of simulation and manufacturing are greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the background technology, the drawings required for use in the embodiments of the present disclosure or the background technology will be described below.

[0036] Figure 1 This is a schematic diagram of the overall process of the material property equivalent method of the metal mask in the embodiment of the present disclosure;

[0037] Figure 2 is a schematic diagram of establishing a metal mask unit model in an embodiment of the present disclosure;

[0038] Figure 3This is a schematic diagram of obtaining the deformation of a unit model under a preset load in an embodiment of the present disclosure;

[0039] Figure 4 This is a schematic diagram of obtaining the deformation of a solid model under a preset load in an embodiment of the present disclosure;

[0040] Figure 5 It is a schematic diagram of the specific steps of adjusting the initial material properties and obtaining equivalent material properties in the embodiment of the present disclosure. DETAILED DESCRIPTION

[0041] In this specification, the embodiments describe the provided methods, devices, and electronic devices through flowcharts and / or block diagrams.

[0042] The present disclosure will now be described more fully below with reference to the accompanying drawings. However, the present disclosure can be implemented in many different ways and should not be construed as limited to the embodiments set forth herein. On the contrary, the embodiments provided herein will make the present disclosure more detailed and complete, and fully convey the scope of the present disclosure to those skilled in the art. The same reference numerals throughout the text represent the same objects. The z-direction described in the embodiments of the present disclosure is the thickness direction of the FMM unit model or the solid model, and the x-direction, y-direction and z-direction are perpendicular to each other, as shown in FIG. Figure 3 or Figure 4 shown.

[0043] A fine metal mask (FMM) is usually formed on a metal foil and has dense slots. During the vapor deposition process, the FMM is placed close to the LTPS backplane, and the holes on the FMM are aligned with the pixel areas where the organic layer needs to be evaporated. This allows the organic film to be deposited on the designated pixel areas.

[0044] During the evaporation process, FMMs must be exposed to high temperatures, placing stringent demands on the material's thermal expansion coefficient. Excessive expansion at high temperatures can cause changes in pixel size and position. Currently, FMMs are typically made from an extremely low thermal expansion coefficient, Invar alloy (ideally composed of 36% Ni and 64% Fe).

[0045] Because large-width Invar alloy foils are difficult to process, and it is difficult to ensure the accuracy of precision structures when the area of ​​Invar alloy foil is large, FMMs are often made into long strips. If large pieces of glass are to be evaporated, multiple FMMs need to be spliced ​​together. This process is called FMM stretching. Therefore, in addition to the densely hollow effective evaporation area on the FMM, stretching areas need to be set at both ends of the long axis. When subjected to the tension of the stretching, very thin FMMs will deform. Therefore, simulation calculations must be performed on the FMM during the design stage to compensate for the deformation during stretching.

[0046] INVAR sheet (foil) material itself has isotropic metallic properties, but after etching, tens of millions of arc-shaped holes are formed in the x / y direction (both parallel to the plane of the sheet), causing its sheet properties to change. During the simulation process, it is impossible to draw all the holes for simulation. Therefore, it is necessary to perform a simulation design that includes equivalent properties to compensate for the deformation and strain deviation caused by the force when the net is stretched.

[0047] Conventional compensation design methods rely primarily on the unit equivalence function or equivalent calculations within simulation software such as ANSYS or Abaqus. However, due to the characteristics of FMM, the holes are extremely small, numerous, and, as mentioned above, complex in shape. The computing power and resolution of existing simulation software cannot meet these requirements, leading to significant deviations in the equivalent calculation results, which can affect subsequent production.

[0048] In light of this, the technical concept of this application is to divide the FMM into smaller units and establish a unit model. Simultaneously, a solid model (excluding holes) of equal size and geometry is established. By adjusting the material properties of the solid model, the deformation of the two models under the same load is similar or identical, thereby achieving equivalent material properties. Furthermore, these equivalent material properties can be used to achieve better net stretching simulation results, allowing for the production of higher-precision FMM products.

[0049] In a specific embodiment, Figure 1 As shown, the material property equivalent method of the metal mask provided by the present disclosure includes:

[0050] S100. Establishing a cell model of the metal mask based on the region having holes in the metal mask;

[0051] S200. Setting the basic material properties of the unit model;

[0052] S300. Obtaining the first deformation of the unit model under the preset load;

[0053] S400. Establishing a solid model having the same size as the unit model and having no holes;

[0054] S500. Setting the initial material properties of the solid model;

[0055] S600. Obtain a second deformation of the solid model under a preset load, adjust initial material properties so that the second deformation approaches or is equal to the first deformation, and obtain equivalent material properties based on the adjusted initial material properties.

[0056] It should be understood that the steps of the above method can be performed in a different order than described above. The above execution order is merely a typical embodiment of the present disclosure. For example, S100 and S400 can be performed first, that is, two models can be established, and then the basic material properties can be set in subsequent steps. This is suitable for simulation calculations using a variety of different foil materials.

[0057] In an embodiment, the method for determining whether the second deformation variable is close to the first deformation variable can be adjusted according to the accuracy requirements during actual equivalence. In the embodiment of the present disclosure, it is preferred that: if the deviation between the second deformation variable and the first deformation variable is less than or equal to one thousandth, it can be determined that the second deformation variable has approached the first deformation variable.

[0058] In an embodiment, if the deviation between the second deformation amount and the first deformation amount does not exceed one thousandth of the first deformation amount or the second deformation amount, it can be determined that the two deformation amounts are approaching each other.

[0059] In the embodiment, step S100. Based on the area of ​​the metal mask having holes, a cell model of the metal mask is established. For details, please refer to Figure 2 As shown, a portion of the FMM with holes is selected for modeling. Due to its small size and fewer holes, less computing power and resolution are required.

[0060] In a typical embodiment, the unit model is a square, and the side length can be selected from 1mm, 2mm, 3mm, 4mm, etc.

[0061] In alternative embodiments, the unit model may be of various geometric shapes.

[0062] In a typical embodiment, the cell model includes different numbers of rows / columns of holes.

[0063] In an alternative embodiment, the unit model includes the same number of rows / columns of holes.

[0064] In a preferred embodiment, step S200 of setting the basic material properties of the cell model includes setting the properties of the FMM foil material, such as the density ρ, elastic modulus E, and Poisson's ratio V of the Invar foil. This means that the model is established based on the geometry of a small cell in the FMM and its specific material properties.

[0065] It should be understood that the aforementioned construction models, including unit models and solid models, can be operated using existing software such as ANSYS or ABAQUS. The specific methods can be performed by those skilled in the art based on existing technologies and will not be elaborated in this disclosure due to space limitations.

[0066] In a typical embodiment, for the aforementioned step S300. obtaining a first deformation of the unit model under a preset load, and step S600. obtaining a second deformation of the solid model under a preset load, wherein the preset load is, for example, Figure 3 and Figure 4 It should be understood that when obtaining equivalent material properties, the same preset load is applied to the unit model and the solid model. For example, in order to obtain the equivalent elastic modulus E in the z direction z `, apply the same load to both the unit model and the solid model, such as Figure 3 S330 and Figure 4 S630.

[0067] In a typical embodiment, the preset load is selected from:

[0068] For the x-axis tensile load, one end of the unit model or solid model in the x-axis is fixed and a tensile load is applied to the other end. For example, Figure 3 S310 in Figure 4 As shown in S610;

[0069] For y-direction tensile load, one end of the unit model or solid model in the y-direction is fixed and a tensile load is applied to the other end, for example Figure 3 S320 in Figure 4 As shown in S620;

[0070] For z-direction tensile load, one end of the unit model or solid model in the z-direction is fixed and a tensile load is applied to the other end, for example Figure 3 S330 in Figure 4 As shown in S630;

[0071] Shear load applies xy-direction shear load to the diagonal corners of the unit model or solid model, for example Figure 3 S340 in Figure 4 As shown in S640.

[0072] Optionally, the above loads are all unit loads, such as 1N, 2N, 3N, etc.

[0073] In a specific embodiment, the aforementioned step S300. obtains the first deformation of the unit model under the preset load; specifically, Figure 3 As shown, including optional, in any order:

[0074] S310. Apply the tensile load in the x-direction to obtain the first deformation L of the unit model under the load. x1 and L y1 ;

[0075] S320. Apply a tensile load in the y direction to obtain the first deformation L of the unit model under the load. x2 and L y2 ;

[0076] S330. Apply a tensile load in the z direction to obtain the first deformation L of the unit model under the load. z , L x3 and L y3 ;

[0077] S340. Apply shear load to obtain the first deformation L of the unit model under the load. x4 and L y4 .

[0078] In view of the above, it should be understood that the first deformation variable in the embodiment of the present disclosure is the deformation variable generated by the unit model under the preset load, which is orthogonally decomposed into L x 、L y 、L z For equal components, when different preset loads are applied, the acquisition of the first deformation variable is also different, and the same is true for the second deformation variable of the solid model in the embodiment.

[0079] In a typical embodiment, for step S400, a solid model having the same size as the unit model and no holes is established; and, S500, initial material properties of the solid model are set; wherein the initial material property parameters include:

[0080]

[0081] This includes:

[0082] Initial elastic modulus E in x direction x0 , initial elastic modulus E in y direction y0 , initial elastic modulus E in z direction z0 .

[0083] Initial Poisson's ratio V in xy direction xy0 , initial Poisson's ratio V in yz direction yz0 , initial Poisson's ratio V in xz direction xz0 .

[0084] Initial shear modulus G in xy direction xy0 , initial shear modulus G in yz direction yz0 , initial shear modulus G in xz direction xz0 .

[0085] For the initial material properties of the solid model, empirical data can be used, or calculations can be performed referring to the following examples:

[0086] set up:

[0087] The lengths of the sides W and L, and the thickness H of the solid model;

[0088] Area in x direction: W*H, area in y direction: L*H, area in z direction: L*W;

[0089] Force F in the x direction x Next, the x deformation is Δx1, and the y deformation is Δy1;

[0090] Force F in the y direction y Next, the x deformation is Δx2, and the y deformation is Δy2;

[0091] Force F in the z direction z Bottom, x deformation Δx3, y deformation Δy3, z deformation Δz1;

[0092] x / y shear force G xy Next, the x deformation is Δx4, and the y deformation is Δy4;

[0093] x / z shear force G xz Under this condition, the x deformation is Δx5, and the z deformation is Δz2. Since the material thickness is relatively thin, the z deformation Δz2 has little effect and can be ignored. The parameters of the same order of magnitude can be given.

[0094] y / z shear force G yz Under the above conditions, the y deformation is Δy5, and the z deformation is Δz3. Because the material thickness is relatively thin, the z deformation Δz3 has little effect and can be ignored. The parameters of the same order of magnitude can be given.

[0095] Equivalent initial calculation:

[0096] E x0 =x normal stress / x normal strain = (F x / (W*H)) / (L / Δx1);

[0097] E y0 = y normal stress / y normal strain = (F y / (L*H)) / (W / Δy1);

[0098] E z0 = z normal stress / z normal strain = (F z / (W*L)) / (H / Δz1);

[0099] V xy0 = strain / stress*elastic modulus;

[0100] V yz0 =Same as above;

[0101] V xz0 =Same as above;

[0102] G xy0= shear stress / shear strain;

[0103] G yz0 =Same as above;

[0104] G xz0 =Same as above.

[0105] In a typical embodiment, Figure 4 Apply the same loads as those for the element model to the solid model as shown, including the following optional and unrestricted execution order:

[0106] S610. Apply a tensile load in the x-direction to obtain the second deformation L of the unit model under the action of this load. x1 ` and L y1 `;

[0107] S620. Apply a tensile load in the y direction to obtain the second deformation L of the unit model under the action of this load. x2 ` and L y2 `;

[0108] S630. Apply a tensile load in the z direction to obtain the second deformation L of the unit model under the action of this load. z `、L x3 ` and L y3 `;

[0109] S640. Apply shear load to obtain the second deformation L of the unit model under the load. x4 ` and L y4 `.

[0110] Based on the above-mentioned acquisition of the second deformation amount, the steps in the embodiment of the present disclosure are: adjusting the initial material properties so that the second deformation amount approaches or is equal to the first deformation amount, and obtaining equivalent material properties based on the adjusted initial material properties, specifically including the following steps: Figure 5 Optional, in any order, execution as shown:

[0111] S611. Adjust the initial elastic modulus E x0 , Poisson's ratio V xy0 At least one of them makes the deformation L x1 ′、L y1 ' is close to or the same as L x1 、L y1 .

[0112] S621. Adjust the initial elastic modulus E y0 , Poisson's ratio V xy0 At least one of them makes the deformation L x2 ′、L y2 ' is close to or the same as L x2 、L y2 .

[0113] The adjusted initial material properties E x0 、E y0 、V xy0 As the equivalent material property E x ′、E y ′、V xy ', further, repeat the above S611 and S621 until a set of E is obtained x ′、E y ′、V xy ′, while satisfying L x1 ′ and L y1 ' is close to or the same as L x1 and L y1 , and make L x2 ′ and L y2 ' is close to or the same as L x2 and L y2 ;

[0114] Similarly, it also includes:

[0115] S631. Adjust the initial elastic modulus E z0 , so that the deformation variable L z ′、L x3 ′、L y3 ' is close to or the same as L z 、L x3 、L y3 , according to the adjusted initial elastic modulus E z0 Get the equivalent elastic modulus E in the z direction z ′.

[0116] S641. Adjust the initial shear modulus G xy0 , so that the deformation variable L x4 ′、L y4 ' is close to or the same as L x4 、L y4 , according to the adjusted initial shear modulus G xy0 Obtain the equivalent shear modulus G in the xy direction xy ′.

[0117] In the aforementioned steps S611 to S641, the method for determining whether two deformation variables are close can be adjusted according to the accuracy requirements when they are actually equivalent. Preferably, if the deviation of the two deformation variables is less than or equal to one thousandth, it can be determined that the two deformation variables are close.

[0118] In the embodiment, steps S631 and S641 are executed in any order relative to steps S611 / S621 .

[0119] After the steps in the above embodiment are performed, the initial material properties are:

[0120]

[0121] The initial elastic modulus E in the x direction x0 , initial elastic modulus E in y direction y0 , initial elastic modulus E in z direction z0 , initial Poisson's ratio V in xy direction xy0 , initial shear modulus G in xy direction xy0 are all adjusted and treated as equivalent material properties, namely:

[0122]

[0123] The above numerical matrix is ​​the output result of the material property equivalence method in the embodiment of the present application.

[0124] Due to E z ′ and E z0 Compared with the usual changes, E is small or unchanged. Therefore, in the preferred embodiment, the main parameters to be adjusted and the final equivalent material properties to be obtained are generally only E x ′、E y ′、V xy ′、G xy ',Right now:

[0125]

[0126] In summary, the material property equivalence method described in the above embodiments no longer uses a complete mask with holes as the modeling object. Instead, it divides the mask into relatively small units, from which its deformation under unit load is calculated. A solid plate of the same size is then used to approximate the corresponding deformation, thereby obtaining equivalent material properties. This overcomes the anisotropy caused by etching the mask plate and achieves high accuracy.

[0127] The material property equivalence method provided in the embodiments of the present disclosure can be implemented using existing analysis and modeling software or independently designed software. Therefore, the embodiments of the present disclosure also include a non-volatile computer-readable storage medium having a computer program stored thereon. When executed by a processor, this computer program implements the steps of the material property equivalence method described in any of the aforementioned embodiments.

[0128] Furthermore, the present disclosure also includes a design device for a precision metal mask for OLED manufacturing, which is an electronic device comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and runnable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus; wherein the computer program, when executed by the processor, can implement the steps in the material property equivalence method as described in any one of the aforementioned embodiments.

[0129] Optionally, the above-mentioned design device can load and read the non-volatile computer-readable storage medium described in the above-mentioned embodiment, and can execute the computer program therein.

[0130] Optionally, the transceiver can input geometric parameters, basic material properties, initial material properties, and load parameters required to establish a unit model; and can output equivalent material properties.

[0131] The disclosed embodiment further provides a simulation method for stretching a precision metal mask. Under the simulation conditions of this simulation method, a three-dimensional simulation of the precision metal mask is performed based on the obtained equivalent material properties to obtain a simulation result after the precision metal mask is stretched.

[0132] The above-mentioned simulation results include at least one of the deformation, stress and strain of the precision metal mask after stretching.

[0133] The embodiments of the present disclosure further provide a method for manufacturing a precision metal mask, including the precision metal mask stretching simulation method. Other technical means in the manufacturing method, such as photoresist coating, exposure, etching, etc., are the same as those in the prior art and will not be described in detail in this disclosure due to space limitations.

[0134] In summary, compared with the existing technology, the above-mentioned equivalent method, simulation method and production method can better simulate the shape of the precision metal mask, and the equivalent accuracy can be controlled to 4 decimal places. On this basis, the accuracy of simulation and production is greatly improved.

[0135] The above descriptions are only some specific embodiments of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the embodiments of the present disclosure should be included in the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on the scope of protection of the claims.

Claims

1. A metal mask material property equivalent method, characterized in that: include: Establishing a cell model of the metal mask based on a region of the metal mask having holes; Setting the basic material properties of the element model; Obtaining a first deformation of the unit model under a preset load; Establishing a solid model with the same size as the unit model and without holes; Setting initial material properties of the solid model; A second deformation of the solid model under the preset load is obtained, the initial material properties are adjusted so that the second deformation approaches or is equal to the first deformation, and equivalent material properties are obtained according to the adjusted initial material properties.

2. The material property equivalence method according to claim 1, characterized in that: The basic material properties include the density, elastic modulus and Poisson's ratio of the Invar foil material selected for the metal mask.

3. The material property equivalence method according to claim 1, characterized in that: The initial material properties include: initial elastic modulus, initial shear modulus and initial Poisson's ratio; the equivalent material properties include equivalent elastic modulus, equivalent shear modulus and equivalent Poisson's ratio.

4. The material property equivalence method according to claim 3, characterized in that: The preset load is selected from: Tensile load in the x-direction: one end of the unit model or solid model in the x-direction is fixed, and a tensile load is applied to the other end; Tensile load in the y-direction: one end of the unit model or solid model in the y-direction is fixed, and a tensile load is applied to the other end; Tensile load in z direction: one end of the unit model or solid model in z direction is fixed and a tensile load is applied to the other end; Shear load, applying shear load in xy direction to the diagonal corners of the unit model or solid model; The z direction is the thickness direction of the unit model or the solid model, and the x direction, y direction and z direction are perpendicular to each other.

5. The material property equivalence method according to claim 4, characterized in that: include: Repeating the acquisition of the second deformation and adjusting at least one of the initial elastic modulus in the x-direction, the initial elastic modulus in the y-direction, and the initial Poisson's ratio in the xy-direction until the second deformation under the x-direction tensile load or the y-direction tensile load approaches or is equal to the first deformation under the same load; The x-direction equivalent elastic modulus, y-direction equivalent elastic modulus, and xy-direction equivalent Poisson's ratio are obtained according to the adjusted initial material properties.

6. The material property equivalence method according to claim 4, characterized in that: include: Adjusting the initial elastic modulus in the z-direction so that the second deformation under the z-direction tensile load approaches or is equal to the first deformation under the same load; Obtain the equivalent elastic modulus in the z direction based on the adjusted initial material properties.

7. The material property equivalence method according to claim 4, characterized in that: include: Adjust the initial shear modulus in the xy direction so that the second deformation under shear load approaches or is equal to the first deformation under the same load; Obtain the equivalent shear modulus in the xy direction based on the adjusted initial material properties.

8. The material property equivalence method according to any one of claims 4 to 7, characterized in that: Under the condition that the preset load is an x-direction tensile load, a y-direction tensile load or a shear load, the x-direction and y-direction components of the first deformation and the second deformation are obtained; under the condition that the preset load is a z-direction tensile load, the x-direction, y-direction and z-direction components of the first deformation and the second deformation are obtained.

9. A simulation method for stretching a metal mask, characterized in that: According to the equivalent material properties obtained according to any one of claims 1 to 8, a simulation operation is performed on the metal mask to obtain a simulation result after the metal mask is stretched; The simulation result includes at least one of a deformation condition, a stress condition, and a strain condition of the metal mask after the metal mask is stretched.

10. A method for manufacturing a metal mask, characterized in that: Including the simulation method described in claim 9.

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