A method, apparatus, electronic device, and storage medium for identifying abnormal chips.

By applying multiple detection input values ​​and multi-dimensional judgment conditions to the chip pins, the problem of inaccurate judgment of abnormal chips in the existing technology is solved, the judgment accuracy is improved, the risk of probe burn-out is reduced, and mass production testing is ensured to proceed smoothly.

CN117540699BActive Publication Date: 2025-12-02HYGON YUNXIN INTEGRATED CIRCUIT DESIGN (SHANGHAI) CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202311572008.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-11-22
Publication Date
2025-12-02
Estimated Expiration
2043-11-22

AI Technical Summary

Technical Problem

Existing technologies fail to effectively consider the variations in measurement values ​​between different levels and the differences in physical properties between wafers when identifying abnormal chips, resulting in judgment conditions that are too broad or too narrow, thus affecting the accuracy of identifying abnormal chips.

Method used

By applying at least two detection input values ​​to the chip's pins and combining multiple anomaly judgment conditions, such as the magnitude, variation range, and output value level of the detection output value, the chip is determined to be abnormal, and the judgment rules are updated during the detection process to improve accuracy.

Benefits of technology

This improves the accuracy of identifying faulty chips, reduces the risk of probe burnout due to inaccurate identification, and ensures the smooth progress of mass production testing.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN117540699B_ABST
    Figure CN117540699B_ABST
Patent Text Reader

Abstract

This invention discloses a method, apparatus, electronic device, and storage medium for determining abnormal chips, relating to the field of chip verification, and effectively improving the accuracy of abnormal chip determination. The method includes: sequentially applying at least two detection input values ​​to a first pin of a first chip on a first wafer to obtain corresponding detection output values; determining whether the first chip is abnormal based on the detection output values ​​and a preset abnormality determination rule, wherein the preset abnormality determination rule includes multiple abnormality determination conditions, and when any one of the multiple abnormality determination conditions is met, the first chip is determined to be an abnormal chip. This invention is applicable to chip verification.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This invention relates to the field of chip verification, and in particular to a method, apparatus, electronic device, and storage medium for identifying abnormal chips. Background Technology

[0002] As semiconductor chip manufacturing processes continue to advance, the number of transistors per unit area is rapidly increasing. However, with the leakage current of individual transistors unable to be significantly reduced, the total leakage current of a single chip is also increasing rapidly, leading to a rapid increase in the current that probes withstand during wafer testing. Since wafer probes have an upper limit to their current tolerance, the total current of the chip during high and low temperature testing can easily reach this limit. Furthermore, chips with high leakage current due to manufacturing defects are more likely to exhibit unexpectedly high currents during different IP (Intellectual Property) tests, further increasing the probability of probe burn-out. To ensure smooth mass production testing, chips with excessive leakage current must be screened out before normal functional testing.

[0003] However, current testing methods only perform a single, fixed-level test on a specific pin. The criteria for identifying faulty chips are fixed absolute values, without considering whether the changes in measured values ​​between different levels are within the normal range. Furthermore, they fail to account for the inherent differences between different wafers, resulting in some chips showing a significant increase in current under different voltage conditions. These chips are highly likely to exhibit excessively high currents, potentially causing pin burnout, under subsequent higher voltages. Therefore, the criteria can easily become too broad or too narrow, leading to inaccurate identification of faulty chips. Summary of the Invention

[0004] In view of this, embodiments of the present invention provide a method, apparatus, electronic device, and storage medium for determining abnormal chips, which can effectively improve the accuracy of abnormal chip determination.

[0005] In a first aspect, embodiments of the present invention provide a method for determining an abnormal chip, comprising: sequentially applying at least two detection input values ​​to a first pin of a first chip on a first wafer to obtain a corresponding detection output value; determining whether the first chip is abnormal based on the detection output value and a preset abnormal determination rule, wherein the preset abnormal determination rule includes multiple abnormal determination conditions, and when any one of the multiple abnormal determination conditions is satisfied, the first chip is determined to be an abnormal chip.

[0006] Optionally, the anomaly determination rule includes multiple anomaly determination conditions, including at least two of the following determination conditions:

[0007] Based on the magnitude of the detected output value, determine whether the first chip is abnormal;

[0008] The first chip is determined to be abnormal based on the change range of the detection output value corresponding to two adjacent detection input values.

[0009] Based on the output value level corresponding to two adjacent detection input values, determine whether the first chip is abnormal.

[0010] Optionally, determining whether the first chip is abnormal based on the magnitude of the detected output value includes: judging whether the magnitude of each detected output value exceeds a preset output value threshold; if the magnitude of any detected output value exceeds the preset output value threshold, then the first chip is determined to be an abnormal chip.

[0011] Optionally, determining whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values ​​includes: calculating the change range between the detection output values ​​corresponding to two adjacent detection input values ​​based on the detection output value; determining whether the change range is greater than a preset change range threshold; and if the change range is greater than the preset change range threshold, determining that the first chip is an abnormal chip.

[0012] Optionally, determining whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values ​​includes: determining the output value level corresponding to the detection output value of each detection input value based on a preset output value level; calculating the jump amplitude between the output value levels corresponding to two adjacent detection input values ​​based on the output value level corresponding to each detection output value; determining whether the jump amplitude is greater than a preset level jump amplitude threshold; and determining that the first chip is an abnormal chip if the jump amplitude is greater than the preset level jump amplitude threshold.

[0013] Optionally, applying at least two detection input values ​​sequentially to the first pin of the first chip on the first wafer to obtain a corresponding detection output value includes: applying at least two detection voltage values ​​sequentially to the first pin of the first chip on the first wafer to obtain a corresponding detection current value; or applying at least two detection current values ​​sequentially to the first pin of the first chip on the first wafer to obtain a corresponding detection voltage value.

[0014] Optionally, after performing anomaly detection on the first chip on the first wafer, the method further includes: determining whether the number of chips that have been anomaly detected on the first wafer has reached a preset chip number threshold; if the preset chip number threshold is reached, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the detected chips on the first wafer to obtain an updated anomaly determination rule; and performing anomaly detection on the remaining undetected chips on the first wafer based on the updated anomaly determination rule.

[0015] Optionally, when the detected input value is a voltage value, updating at least one abnormality determination condition in the preset abnormality determination rule based on the detected output value of the chip already detected on the first wafer includes: removing the maximum value from the detected output values ​​of the chip already detected on the first wafer to obtain the remaining detected output values; extracting the maximum value from the remaining detected output values; determining whether the extracted maximum value from the remaining detected output values ​​is less than a preset output value threshold; if the extracted maximum value from the remaining detected output values ​​is less than the preset output value threshold, then updating the preset output value threshold with the extracted maximum value from the remaining detected output values.

[0016] Optionally, when the detected input value is a current value, updating at least one abnormality determination condition in the preset abnormality determination rule based on the detected output value of the chip already detected on the first wafer includes: removing the minimum value from the detected output values ​​of the chip already detected on the first wafer to obtain the remaining detected output values; extracting the minimum value from the remaining detected output values; determining whether the extracted minimum value from the remaining detected output values ​​is greater than a preset output value threshold; if the extracted minimum value from the remaining detected output values ​​is greater than the preset output value threshold, then updating the preset output value threshold with the extracted minimum value from the remaining detected output values.

[0017] Optionally, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip detected on the first wafer includes: calculating the change amplitude value between two adjacent detection output values ​​based on the detection output value of the chip detected on the first wafer; removing the maximum value from the change amplitude values ​​to obtain the remaining change amplitude values; extracting the maximum value from the remaining change amplitude values; determining whether the extracted maximum value from the remaining change amplitude values ​​is less than a preset change amplitude threshold; if the extracted maximum value from the remaining change amplitude values ​​is less than the preset change amplitude threshold, then updating the preset change amplitude threshold with the extracted maximum value from the remaining change amplitude values.

[0018] Optionally, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output values ​​of the chips detected on the first wafer includes: removing the maximum and minimum values ​​from the detection output values ​​of the chips detected on the first wafer to obtain the remaining detection output values; classifying the remaining detection output values ​​into levels to obtain new output value levels; and updating the preset output value level with the new output value level.

[0019] Optionally, after performing anomaly detection on each chip on the first wafer, the method further includes: updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the detected chip on the first wafer to obtain a newly updated anomaly determination rule; applying at least two detection input values ​​sequentially to the first pin of the first chip on the second wafer based on the newly updated anomaly determination rule to obtain a corresponding detection output value; wherein the second wafer and the first wafer are wafers from the same production batch; determining whether the first chip on the second wafer is abnormal based on the detection output value of the first pin of the first chip on the second wafer and the newly updated anomaly determination rule.

[0020] Optionally, when the detected input value is a voltage value, updating at least one of the abnormality determination conditions in the preset abnormality determination rules based on the detected output values ​​of the chips already detected on the first wafer includes: calculating the median and variance of the detected output values ​​of all chips on the first wafer; the median plus N times the variance is used as the updated preset output value threshold; wherein, N is a natural number from 1 to 5.

[0021] Optionally, when the detected input value is a current value, updating at least one of the abnormal judgment conditions in the preset abnormal judgment rules based on the detected output values ​​of the chips already detected on the first wafer includes: calculating the median and variance of the detected output values ​​of all chips on the first wafer; subtracting M times the variance from the median as the updated preset output value threshold; wherein M is a natural number from 1 to 5.

[0022] Optionally, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output values ​​of the chips already detected on the first wafer includes: calculating the median and variance of the change amplitude values ​​of two adjacent detected output values ​​of all chips on the first wafer; adding X times the variance to the median as the updated preset change amplitude threshold; wherein X is a natural number from 1 to 5.

[0023] Optionally, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output values ​​of the chips already detected on the first wafer includes: calculating the median and variance of the detected output values ​​of all chips on the first wafer; calculating a new output value level based on the median and variance; and updating the preset output value level with the new output value level.

[0024] Secondly, embodiments of the present invention provide an apparatus for determining an abnormal chip, comprising: a data acquisition module, configured to sequentially apply at least two detection input values ​​to a first pin of a first chip on a first wafer to obtain a corresponding detection output value; and an anomaly determination module, configured to determine whether the first chip is abnormal based on the detection output value and a preset anomaly determination rule, wherein the preset anomaly determination rule includes multiple anomaly determination conditions, and when any one of the multiple anomaly determination conditions is satisfied, the first chip is determined to be an abnormal chip.

[0025] Optionally, the anomaly determination module includes at least two of the following determination units:

[0026] The first determination unit is used to determine whether the first chip is abnormal based on the magnitude of the detection output value.

[0027] The second determination unit is used to determine whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values.

[0028] The third determination unit is used to determine whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values.

[0029] Optionally, the first determination unit is specifically used to: determine whether the magnitude of each detection output value exceeds a preset output value threshold; if the magnitude of any detection output value exceeds the preset output value threshold, then determine that the first chip is an abnormal chip.

[0030] Optionally, the second determination unit includes: a first calculation subunit, used to calculate the change range between the detection output values ​​corresponding to two adjacent detection input values ​​based on the detection output value; and a first anomaly determination subunit, used to determine whether the change range is greater than a preset change range threshold; if the change range is greater than the preset change range threshold, then the first chip is determined to be an abnormal chip.

[0031] Optionally, the third determination unit includes: a determination subunit, used to determine the output value level corresponding to the detection output value of each detection input value based on a preset output value level; a second calculation subunit, used to calculate the jump amplitude between the output value levels corresponding to two adjacent detection input values ​​based on the output value level corresponding to each detection output value; and a second anomaly determination subunit, used to determine whether the jump amplitude is greater than a preset level jump amplitude threshold; if the jump amplitude is greater than the preset level jump amplitude threshold, then the first chip is determined to be an abnormal chip.

[0032] Optionally, the data acquisition module is specifically used to: sequentially apply at least two detection voltage values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection current value; or sequentially apply at least two detection current values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection voltage value;

[0033] Optionally, after the anomaly determination module, the device further includes: a quantity determination unit, used to determine whether the number of chips currently subjected to anomaly detection on the first wafer has reached a preset chip quantity threshold; a first rule update unit, used to, if the preset chip quantity threshold is reached, update at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the detected chips on the first wafer, to obtain an updated anomaly determination rule; the anomaly determination module is further used to perform anomaly detection on the remaining undetected chips on the first wafer based on the updated anomaly determination rule.

[0034] Optionally, when the detected input value is a voltage value, the first rule update unit is specifically used to: remove the maximum value from the detected output values ​​of the chips already detected on the first wafer to obtain the remaining detected output values; extract the maximum value from the remaining detected output values; determine whether the extracted maximum value from the remaining detected output values ​​is less than a preset output value threshold; if the extracted maximum value from the remaining detected output values ​​is less than the preset output value threshold, then update the preset output value threshold with the extracted maximum value from the remaining detected output values.

[0035] Optionally, when the detected input value is a current value, the first rule update unit is specifically used to: remove the minimum value from the detected output values ​​of the chips detected on the first wafer to obtain the remaining detected output values; extract the minimum value from the remaining detected output values; determine whether the extracted minimum value from the remaining detected output values ​​is greater than a preset output value threshold; if the extracted minimum value from the remaining detected output values ​​is greater than the preset output value threshold, then update the preset output value threshold with the extracted minimum value from the remaining detected output values.

[0036] Optionally, the first rule update unit is specifically used for: calculating the change amplitude value between two adjacent detection output values ​​based on the detection output value of the chip detected on the first wafer; removing the maximum value from the change amplitude value to obtain the remaining change amplitude value; extracting the maximum value from the remaining change amplitude value; determining whether the extracted maximum value from the remaining change amplitude value is less than a preset change amplitude threshold; if the extracted maximum value from the remaining change amplitude value is less than the preset change amplitude threshold, then updating the preset change amplitude threshold with the extracted maximum value from the remaining change amplitude value.

[0037] Optionally, the first rule update unit is further configured to: remove the maximum and minimum values ​​from the detection output values ​​of the detected chips on the first wafer to obtain the remaining detection output values; classify the remaining detection output values ​​into levels to obtain new output value levels; and update the preset output value level with the new output value level.

[0038] Optionally, after performing anomaly detection on each chip on the first wafer, the apparatus further includes:

[0039] The second rule update unit is used to update at least one abnormality determination condition in the preset abnormality determination rule based on the detection output value of the chip already detected on the first wafer, to obtain the updated abnormality determination rule; the detection unit applies at least two detection input values ​​to the first pin of the first chip on the second wafer in sequence based on the updated abnormality determination rule, to obtain the corresponding detection output value; wherein, the second wafer and the first wafer are wafers from the same production batch; the determination unit determines whether the first chip on the second wafer is abnormal based on the detection output value of the first pin of the first chip on the second wafer and the updated abnormality determination rule.

[0040] Optionally, when the detected input value is a voltage value, the second rule update unit is specifically used to: calculate the median and variance of the detected output values ​​of all chips on the first wafer; the median plus N times the variance is used as the updated preset output value threshold; wherein, N is a natural number from 1 to 5.

[0041] Optionally, when the detected input value is a current value, the second rule update unit is specifically used to: calculate the median and variance of the detected output values ​​of all chips on the first wafer; the median minus M times the variance is used as the updated preset output value threshold; wherein, M is a natural number from 1 to 5.

[0042] Optionally, the second rule update unit is specifically used to: calculate the median and variance of the change amplitude values ​​of two adjacent detection output values ​​of all chips on the first wafer; add X times the variance to the median as the updated preset change amplitude threshold; wherein, X is a natural number from 1 to 5.

[0043] Optionally, the second rule update unit is further configured to: calculate the median and variance of the detection output values ​​of all chips on the first wafer; calculate a new output value level based on the median and variance; and update the preset output value level with the new output value level.

[0044] Thirdly, embodiments of the present invention provide an electronic device, the electronic device comprising: a housing, a processor, a memory, a circuit board, and a power supply circuit, wherein the circuit board is disposed within the space enclosed by the housing, and the processor and the memory are disposed on the circuit board; the power supply circuit is used to supply power to various circuits or devices of the above-mentioned electronic device; the memory is used to store executable program code; the processor runs a program corresponding to the executable program code by reading the executable program code stored in the memory, for executing the method for determining an abnormal chip as described in any of the foregoing embodiments.

[0045] Fourthly, embodiments of the present invention provide a computer-readable storage medium, characterized in that the computer-readable storage medium stores one or more programs, which can be executed by one or more processors to implement the method for determining an abnormal chip as described in any of the foregoing embodiments.

[0046] The methods, apparatus, electronic devices, and storage media for determining abnormal chips provided in the embodiments of the present invention can sequentially apply at least two detection input values ​​to the first pin of a first chip on a first wafer to obtain corresponding detection output values; based on the detection output values ​​and preset abnormal determination rules, it is determined whether the first chip is abnormal. The preset abnormal determination rules include multiple abnormal determination conditions; when any one of the multiple abnormal determination conditions is met, the first chip is determined to be an abnormal chip. Because at least two detection input values ​​are applied, and the determination rules also include multiple abnormal determination conditions, multi-dimensional determination of the chip is possible. Therefore, the method for determining abnormal chips provided in the embodiments of the present invention can effectively improve the accuracy of abnormal chip determination. Attached Figure Description

[0047] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0048] Figure 1 A flowchart of a method for determining abnormal chips provided in an embodiment of the present invention;

[0049] Figure 2 A flowchart illustrating the updating of anomaly determination rules after detecting chips in a first wafer portion, provided as an embodiment of the present invention;

[0050] Figure 3 A flowchart of an embodiment of the present invention for updating the anomaly determination rule after detecting all chips in a first wafer;

[0051] Figure 4 A schematic diagram of a device for determining anomalies provided in an embodiment of the present invention;

[0052] Figure 5 A schematic diagram of a structure for updating the anomaly determination rule after detecting the first wafer portion of the chip, provided by an embodiment of the present invention.

[0053] Figure 6 A schematic diagram of a structure for updating the anomaly determination rule after detecting all chips in a first wafer, provided as an embodiment of the present invention;

[0054] Figure 7 A schematic diagram of an electronic device provided as an embodiment of the present invention. Detailed Implementation

[0055] The following is a detailed description of an abnormal chip detection scheme provided by an embodiment of the present invention, with reference to the accompanying drawings.

[0056] It should be understood that the described embodiments are merely some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0057] Figure 1 This is a flowchart illustrating a method for determining abnormal chips according to an embodiment of the present invention. Figure 1 As shown, the method for determining abnormal chips in this embodiment may include the following steps:

[0058] S11. Apply at least two detection input values ​​sequentially to the first pin of the first chip on the first wafer to obtain the corresponding detection output value;

[0059] A chip has many pins, and the impedance of each pin on the same chip is not necessarily the same. The impedance of the same pin on the same batch of chips will be within a reasonable range. The pin tested in this step is the same pin on the same batch of chips.

[0060] Optionally, applying at least two detection input values ​​to obtain the corresponding detection output value includes: applying at least two detection voltage values ​​to obtain the corresponding detection current value, or applying at least two detection current values ​​to obtain the corresponding detection voltage value.

[0061] S12. Determine whether the first chip is abnormal based on the detection output value and the preset anomaly determination rule, wherein the preset anomaly determination rule includes multiple anomaly determination conditions, and when any one of the multiple anomaly determination conditions is met, the first chip is determined to be an abnormal chip.

[0062] In this step, the preset anomaly determination rule is obtained based on the pin data of other chips tested in the past and the circuit design of the chip under test.

[0063] Optionally, the anomaly determination rule includes multiple anomaly determination conditions, including at least two of the following determination conditions: determining whether the first chip is abnormal based on the magnitude of the detection output value; determining whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values; and determining whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values.

[0064] Further, the determination condition one, based on the magnitude of the detected output value, includes: determining whether the magnitude of each detected output value exceeds a preset output value threshold; if the magnitude of any detected output value exceeds the preset output value threshold, then the first chip is determined to be an abnormal chip; the exceeding of the preset output value threshold may include being greater than or less than the preset output value threshold. In some embodiments, when the detected input value is a voltage value and the detected output value is a current value, if the magnitude of any detected output value is greater than the preset output value threshold, then the first chip is determined to be an abnormal chip; in other embodiments, when the detected input value is a current value and the detected output value is a voltage value, if the magnitude of any detected output value is less than the preset output value threshold, then the first chip is determined to be an abnormal chip;

[0065] Judgment condition two, determining whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values, includes: calculating the change range between the detection output values ​​corresponding to two adjacent detection input values ​​based on the detection output value; determining whether the change range is greater than a preset change range threshold; if the change range is greater than the preset change range threshold, then the first chip is determined to be an abnormal chip;

[0066] Judgment condition three, determining whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values, includes: determining the output value level corresponding to the detection output value corresponding to each detection input value based on a preset output value level; calculating the jump amplitude between the output value levels corresponding to two adjacent detection input values ​​based on the output value level corresponding to each detection output value; determining whether the jump amplitude is greater than a preset level jump amplitude threshold; if the jump amplitude is greater than the preset level jump amplitude threshold, then the first chip is determined to be an abnormal chip.

[0067] For example, for pin 1 of the chip under test, three detection voltage values ​​are set: 1V, 2V, and 3V. The corresponding output current values ​​are 0.5A, 2.5A, and 5A. The preset current threshold values ​​for judgment condition one are 0.5~1A, 1.5~2.5A, and 3~4A. The output current value of 5A corresponding to 3V exceeds the preset threshold of 3~4A, thus the chip is judged as abnormal. Alternatively, the preset change range threshold values ​​for judgment condition two are 100% and 200%. The output current change range for 1V and 2V is (2.5A-0.5A) / 0.5A = 400%, exceeding the preset change range threshold of 100%, thus the chip is judged as abnormal. Or, judgment condition three, based on the preset current value thresholds, divides the preset current value range at each voltage point into five levels. A change of more than three levels indicates an abnormal chip. The current level width corresponding to the 1V voltage point is (1A-0.5A) / 5 = 0.1A, meaning the 1V voltage point corresponds to L1(1V) (0.5~0.6A), L2(1V) (0.6~0.7A), L3(1V) (0.7~0.8A), L4(1V) (0.8~0.9A), and L5(1V) (0.9~1.0A). The current rating width corresponding to the 2V voltage point is (2.5A-1.5A) / 5 = 0.2A, meaning the 2V voltage point corresponds to L1(2V) (1.5~1.0A). The following chips are listed: L1 (7A), L2 (2V) (1.7~1.9A), L3 (2V) (1.9~2.1A), L4 (2V) (2.1~2.3A), and L5 (2V) (2.3~2.5A). The current output value of 0.5A corresponding to the 1V voltage point is located in L1 level, and the current output value of 2.5A corresponding to the 2V voltage point is located in L5 level. The level jumps to L5-L1=4 levels, which exceeds the preset level jump range of three levels. Therefore, the chip is determined to be an abnormal chip.

[0068] The method for determining abnormal chips provided in the embodiments of the present invention can sequentially apply at least two detection input values ​​to the first pin of a first chip on a first wafer to obtain corresponding detection output values; based on the detection output values ​​and preset abnormal determination rules, it is determined whether the first chip is abnormal. The preset abnormal determination rules include multiple abnormal determination conditions; when any one of the multiple abnormal determination conditions is met, the first chip is determined to be an abnormal chip. Since at least two detection input values ​​are applied, and the determination rules also include multiple abnormal determination conditions, multi-dimensional chip determination can be performed. Therefore, the method for determining abnormal chips provided in the embodiments of the present invention can effectively improve the accuracy of abnormal chip determination. Further, as... Figure 2 As shown, in one embodiment of the present invention, after performing anomaly detection on the first chip on the first wafer, the method may further include the following steps:

[0069] S13. Determine whether the number of chips that have been detected for anomalies on the first wafer has reached a preset chip number threshold.

[0070] If the preset chip quantity threshold is reached, proceed to step S14; otherwise, proceed to step S16.

[0071] S14. Based on the detection output value of the chip detected on the first wafer, update at least one abnormal judgment condition in the preset abnormal judgment rule to obtain the updated abnormal judgment rule.

[0072] S15. Based on the updated anomaly detection rules, perform anomaly detection on the remaining undetected chips on the first wafer;

[0073] S16. Continue to perform anomaly detection on the chips on the first wafer based on the existing chip anomaly judgment rules until the preset chip number threshold is reached.

[0074] For example, a wafer has 200 chips, divided into 4 batches of 50 chips each. Based on the data of the 50 chips, the preset anomaly judgment conditions are updated to obtain the first anomaly judgment rule. Then, the first anomaly judgment rule is used to detect the second batch of chips. After the second batch of chips is detected, the first anomaly judgment rule is updated based on the data of the second batch of chips to obtain the second anomaly judgment rule, until all 4 batches of chips have been detected.

[0075] Optionally, in one embodiment of the present invention, when the detected input value is a voltage value, in step S14, based on the detected output value of the chip already detected on the first wafer, at least one anomaly determination condition in the preset anomaly determination rule is updated, including:

[0076] S141a. Remove the maximum value from the detection output values ​​of the chips that have been detected on the first wafer to obtain the remaining detection output values; extract the maximum value from the remaining detection output values;

[0077] S142a. Determine whether the maximum value among the extracted remaining detection output values ​​is less than a preset output value threshold.

[0078] S143a. If the maximum value among the extracted remaining detection output values ​​is less than the preset output value threshold, then the maximum value among the extracted remaining detection output values ​​is used to update the preset output value threshold.

[0079] Optionally, in one embodiment of the present invention, when the detected input value is a current value, in step S14, based on the detected output value of the chip already detected on the first wafer, at least one anomaly determination condition in the preset anomaly determination rule is updated, including:

[0080] S141b: Remove the minimum value from the detection output values ​​of the chips that have been detected on the first wafer to obtain the remaining detection output values; extract the minimum value from the remaining detection output values;

[0081] S142b. Determine whether the minimum value among the extracted remaining detection output values ​​is greater than a preset output value threshold.

[0082] S143b. If the minimum value among the extracted remaining detection output values ​​is greater than the preset output value threshold, then the minimum value among the extracted remaining detection output values ​​is used to update the preset output value threshold.

[0083] Optionally, in one embodiment of the present invention, in step S14, updating at least one anomaly determination condition in the preset anomaly determination rules based on the detection output value of the detected chip on the first wafer includes:

[0084] S141c: Based on the detection output values ​​of the chips that have been detected on the first wafer, calculate the change range value between two adjacent detection output values;

[0085] S142c: Remove the maximum value from the change amplitude values ​​to obtain the remaining change amplitude values;

[0086] S143c, Extract the maximum value from the remaining change amplitude values;

[0087] S144c. Determine whether the maximum value among the extracted remaining change amplitude values ​​is less than a preset change amplitude threshold.

[0088] S145c. If the maximum value among the extracted remaining change amplitude values ​​is less than the preset change amplitude threshold, then the maximum value among the extracted remaining change amplitude values ​​is used to update the preset change amplitude threshold.

[0089] For example, when the input voltage is 1V and 2V, the preset change range value is 100%. After testing a batch of 10 chips, the obtained change range values ​​are 5 at 70%, 3 at 90%, 1 at 98%, and 1 at 110%. After removing the maximum value of 110%, the maximum value of the remaining change range values ​​is 98%, which is less than the preset change range value. Therefore, the preset change range value is updated to 98%.

[0090] Optionally, in one embodiment of the present invention, in step S14, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip already detected on the first wafer includes:

[0091] S141d: Remove the maximum and minimum values ​​from the detection output values ​​of the chips already detected on the first wafer to obtain the remaining detection output values;

[0092] S142d: Divide the remaining detection output values ​​into levels to obtain new output value levels;

[0093] S143d. Update the preset output value level with the new output value level.

[0094] For example, when the input voltage is 1V, the output values ​​obtained by testing a batch of 10 chips are 0.5A for 1 chip, 1A for 4 chips, 1.5A for 4 chips, and 1.8A for 1 chip. After removing the maximum value of 1.8A and the minimum value of 0.5A, the maximum value of the remaining output values ​​is 1.5A and the minimum value is 1A. The range of 1 to 1.5A is divided into 5 levels to obtain new output value levels, namely L1 (1 to 1.1A), L2 (1.1 to 1.2A), L3 (1.2 to 1.3A), L4 (1.3 to 1.4A), and L5 (1.4 to 1.5A). The preset output value level is updated with the new output value level.

[0095] Optional, such as Figure 3 As shown, in one embodiment of the present invention, after performing anomaly detection on each chip on the first wafer, the method further includes:

[0096] S17. Based on the detection output value of the chip detected on the first wafer, update at least one abnormal judgment condition in the preset abnormal judgment rule again to obtain the updated abnormal judgment rule.

[0097] S18. Based on the updated anomaly determination rules, at least two detection input values ​​are sequentially applied to the first pin of the first chip on the second wafer to obtain the corresponding detection output value; wherein, the second wafer and the first wafer are wafers from the same production batch;

[0098] S19. Determine whether the first chip on the second wafer is abnormal based on the detection output value of the first pin of the first chip on the second wafer and the updated anomaly determination rule.

[0099] In the aforementioned embodiments, the anomaly determination rule is updated based on the data of a certain batch of chips on the wafer. After the data of all chips on the wafer is acquired, the anomaly determination rule needs to be updated based on the data of all chips to obtain the final anomaly determination rule, which is then used in the chip testing of the remaining wafers.

[0100] Optionally, in one embodiment of the present invention, when the detected input value is a voltage value, in step S17, based on the detected output values ​​of the chips already detected on the first wafer, at least one abnormal judgment condition in the preset abnormal judgment rule is updated again, including: calculating the median and variance of the detected output values ​​of all chips on the first wafer; the median plus N times the variance is used as the updated preset output value threshold; wherein, N is a natural number from 1 to 5.

[0101] Optionally, in one embodiment of the present invention, when the detected input value is a current value, in step S17, based on the detected output values ​​of the chips already detected on the first wafer, at least one abnormal judgment condition in the preset abnormal judgment rule is updated again, including: calculating the median and variance of the detected output values ​​of all chips on the first wafer; the median minus M times the variance is used as the updated preset output value threshold; wherein, M is a natural number from 1 to 5.

[0102] Optionally, in one embodiment of the present invention, in step S17, based on the detection output values ​​of the chips already detected on the first wafer, at least one anomaly determination condition in the preset anomaly determination rule is updated again, including: calculating the median and variance of the change amplitude values ​​of two adjacent detection output values ​​of all chips on the first wafer; adding X times the variance to the median as the updated preset change amplitude threshold; wherein, X is a natural number from 1 to 5.

[0103] Optionally, in one embodiment of the present invention, step S17, based on the detection output values ​​of the chips already detected on the first wafer, updates at least one anomaly determination condition in the preset anomaly determination rule again, including: calculating the median and variance of the detection output values ​​of all chips on the first wafer; calculating a new output value level based on the median and variance; and updating the preset output value level with the new output value level. For example, if the median of the calculated detection output value is X and the variance is σ, the output value range can be determined as (X-3*σ,X+3*σ). If the output value level is 5, then the range of each level is [(X+3*σ)-(X-3*σ)] / 5=a. Therefore, the new output value levels are L1(X-3*σ~X-3*σ+a), L2(X-3*σ+a~X-3*σ+2*a), L3(X-3*σ+2*a~X-3*σ+3*a), L4(X-3*σ+3*a~X-3*σ+4*a), and L5(X-3*σ+4*a~X-3*σ+5*a).

[0104] Corresponding to the method for determining abnormal chips provided in the embodiments of the present invention, the embodiments of the present invention also provide an apparatus for determining abnormal chips, which can effectively improve the accuracy of abnormal chip determination.

[0105] like Figure 4 As shown, the fault-detection chip device provided in this embodiment includes:

[0106] The data acquisition module 21 is used to sequentially apply at least two detection input values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection output value;

[0107] The anomaly determination module 22 is used to determine whether the first chip is abnormal based on the detection output value and the preset anomaly determination rule. The preset anomaly determination rule includes multiple anomaly determination conditions. When any one of the multiple anomaly determination conditions is met, the first chip is determined to be an abnormal chip.

[0108] The abnormal chip determination device provided in the embodiments of the present invention can sequentially apply at least two detection input values ​​to the first pin of a first chip on a first wafer to obtain corresponding detection output values; based on the detection output values ​​and preset abnormal determination rules, it determines whether the first chip is abnormal. The preset abnormal determination rules include multiple abnormal determination conditions; when any one of the multiple abnormal determination conditions is met, the first chip is determined to be an abnormal chip. Since at least two detection input values ​​are applied, and the determination rules also include multiple abnormal determination conditions, multi-dimensional chip determination can be performed. Therefore, the abnormal chip determination device provided in the embodiments of the present invention can effectively improve the accuracy of abnormal chip determination.

[0109] Optionally, in one embodiment of the present invention, the anomaly determination module 22 includes at least two of the following determination units: a first determination unit, used to determine whether the first chip is abnormal based on the magnitude of the detection output value; a second determination unit, used to determine whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values; and a third determination unit, used to determine whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values.

[0110] Optionally, in one embodiment of the present invention, the first determination unit 221a is specifically used to determine whether the magnitude of each detected output value exceeds a preset output value threshold. If the magnitude of any detected output value exceeds the preset output value threshold, the first chip is determined to be an abnormal chip. The exceeding of the preset output value threshold may include being greater than or less than the preset output value threshold. In some embodiments, when the detected input value is a voltage value and the detected output value is a current value, if the magnitude of any detected output value is greater than the preset output value threshold, the first chip is determined to be an abnormal chip. In other embodiments, when the detected input value is a current value and the detected output value is a voltage value, if the magnitude of any detected output value is less than the preset output value threshold, the first chip is determined to be an abnormal chip.

[0111] Optionally, in one embodiment of the present invention, the second determination unit includes: a first calculation subunit 221b, used to calculate the change range between the detection output values ​​corresponding to two adjacent detection input values ​​based on the detection output value; a first anomaly determination subunit 222b, used to determine whether the change range is greater than a preset change range threshold; if the change range is greater than the preset change range threshold, then the first chip is determined to be an abnormal chip.

[0112] Optionally, in one embodiment of the present invention, the third determination unit includes: a determination subunit 221c, used to determine the output value level corresponding to the detection output value corresponding to each detection input value based on a preset output value level; a second calculation subunit 222c, used to calculate the jump amplitude between the output value levels corresponding to two adjacent detection input values ​​based on the output value level corresponding to each detection output value; and a second anomaly determination subunit 223c, used to determine whether the jump amplitude is greater than a preset level jump amplitude threshold; if the jump amplitude is greater than the preset level jump amplitude threshold, then the first chip is determined to be an abnormal chip.

[0113] Optionally, in one embodiment of the present invention, the data acquisition module 21 is specifically used to: sequentially apply at least two detection voltage values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection current value; or sequentially apply at least two detection current values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection voltage value.

[0114] Optional, such as Figure 5As shown, in one embodiment of the present invention, the device may further include: a quantity determination unit 23, configured to determine whether the number of chips that have been subjected to anomaly detection on the first wafer has reached a preset chip quantity threshold; if the preset chip quantity threshold has not been reached, then continue to perform anomaly detection on the chips on the first wafer based on the chip anomaly determination rule until the preset chip quantity threshold is reached; and a first rule update unit 24, configured to, if the preset chip quantity threshold is reached, update at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chips that have been detected on the first wafer, to obtain an updated anomaly determination rule.

[0115] The anomaly determination module 22 can perform anomaly detection on the remaining undetected chips on the first wafer based on the updated anomaly determination rules. Optionally, in one embodiment of the present invention, when the detection input value is a voltage value, the first rule update unit 24 is specifically used to: remove the maximum value from the detection output values ​​of the detected chips on the first wafer to obtain the remaining detection output values; extract the maximum value from the remaining detection output values; determine whether the extracted maximum value from the remaining detection output values ​​is less than the preset output value threshold; if the extracted maximum value from the remaining detection output values ​​is less than the preset output value threshold, then update the preset output value threshold with the extracted maximum value from the remaining detection output values. Optionally, in one embodiment of the present invention, when the detected input value is a current value, the first rule update unit 24 is specifically used to: remove the minimum value from the detected output values ​​of the chips detected on the first wafer to obtain the remaining detected output values; extract the minimum value from the remaining detected output values; determine whether the extracted minimum value from the remaining detected output values ​​is greater than a preset output value threshold; if the extracted minimum value from the remaining detected output values ​​is greater than the preset output value threshold, then update the preset output value threshold with the extracted minimum value from the remaining detected output values.

[0116] Optionally, in one embodiment of the present invention, the first rule update unit 24 is specifically configured to: calculate the change amplitude value between two adjacent detection output values ​​based on the detection output value of the detected chip on the first wafer; remove the maximum value in the change amplitude value to obtain the remaining change amplitude value; extract the maximum value in the remaining change amplitude value; determine whether the extracted maximum value in the remaining change amplitude value is less than the preset change amplitude threshold; if the extracted maximum value in the remaining change amplitude value is less than the preset change amplitude threshold, then update the preset change amplitude threshold with the extracted maximum value in the remaining change amplitude value.

[0117] Optionally, in one embodiment of the present invention, the first rule update unit 24 is further configured to: remove the maximum and minimum values ​​from the detection output values ​​of the detected chips on the first wafer to obtain the remaining detection output values; classify the remaining detection output values ​​into levels to obtain new output value levels; and update the preset output value level with the new output value level.

[0118] Optional, such as Figure 6 As shown, in one embodiment of the present invention, after performing anomaly detection on each chip on the first wafer, the device further includes: a second rule update unit 25, used to update at least one anomaly determination condition in the preset anomaly determination rule again based on the detection output value of the detected chip on the first wafer, to obtain the anomaly determination rule after the update; a detection unit 26, based on the anomaly determination rule after the update, sequentially applying at least two detection input values ​​to the first pin of the first chip on the second wafer to obtain the corresponding detection output value; wherein, the second wafer and the first wafer are wafers from the same production batch; and a determination unit 27, based on the detection output value of the first pin of the first chip on the second wafer and the anomaly determination rule after the update, to determine whether the first chip on the second wafer is abnormal.

[0119] Optionally, in one embodiment of the present invention, when the detected input value is a voltage value, the second rule update unit 25 is specifically used to: calculate the median and variance of the detected output values ​​of all chips on the first wafer; the median plus N times the variance is used as the updated preset output value threshold; wherein, N is a natural number from 1 to 5.

[0120] Optionally, in one embodiment of the present invention, when the detected input value is a current value, the second rule update unit 25 is specifically used to: calculate the median and variance of the detected output values ​​of all chips on the first wafer; the median minus M times the variance is used as the updated preset output value threshold; wherein, M is a natural number from 1 to 5.

[0121] Optionally, in one embodiment of the present invention, the second rule update unit 25 is specifically used to: calculate the median and variance of the change amplitude values ​​of two adjacent detection output values ​​of all chips on the first wafer; add X times the variance to the median as the updated preset change amplitude threshold; wherein, X is a natural number from 1 to 5.

[0122] Optionally, in one embodiment of the present invention, the second rule update unit 25 is further configured to: calculate the median and variance of the detection output values ​​of all chips on the first wafer; calculate a new output value level based on the median and variance; and update the preset output value level with the new output value level.

[0123] Accordingly, embodiments of the present invention also provide an electronic device that can effectively improve the accuracy of abnormal chip detection.

[0124] like Figure 7 As shown, the electronic device may include: a housing 31, a processor 32, a memory 33, a circuit board 34, and a power supply circuit 35, wherein the circuit board 34 is disposed inside the space enclosed by the housing 31, and the processor 32 and the memory 33 are disposed on the circuit board 34; the power supply circuit 35 is used to supply power to the various circuits or devices of the above-mentioned electronic device; the memory 33 is used to store executable program code; the processor 32 runs a program corresponding to the executable program code by reading the executable program code stored in the memory 33, for executing the abnormal chip determination method described in any of the foregoing embodiments.

[0125] Accordingly, embodiments of the present invention also provide a computer-readable storage medium storing one or more programs, which can be executed by one or more processors to implement the abnormal chip determination method provided in any of the foregoing embodiments.

[0126] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0127] The various embodiments in this specification are described in a related manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0128] In particular, the device embodiment is basically similar to the method embodiment, so the description is relatively simple. For relevant details, please refer to the description of the method embodiment.

[0129] For ease of description, the above apparatus is described by dividing it into various functional units / modules. Of course, in implementing this invention, the functions of each unit / module can be implemented in one or more software and / or hardware.

[0130] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0131] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for determining abnormal chips, characterized in that, include: At least two detection input values ​​are sequentially applied to the first pin of the first chip on the first wafer to obtain the corresponding detection output value. Based on the detection output value and the preset anomaly determination rule, it is determined whether the first chip is abnormal. The preset anomaly determination rule includes multiple anomaly determination conditions. When any one of the multiple anomaly determination conditions is met, the first chip is determined to be an abnormal chip. After performing anomaly detection on the first chip on the first wafer, the method further includes: Determine whether the number of chips that have undergone anomaly detection on the first wafer has reached a preset chip number threshold. If the preset chip quantity threshold is reached, then based on the detection output value of the chips detected on the first wafer, at least one of the abnormal judgment conditions in the preset abnormal judgment rule is updated to obtain the updated abnormal judgment rule. Based on the updated anomaly detection rules, anomaly detection is performed on the remaining undetected chips on the first wafer.

2. The method for determining abnormal chips according to claim 1, characterized in that, The preset anomaly determination rule includes multiple anomaly determination conditions, including at least two of the following determination conditions: Based on the magnitude of the detected output value, determine whether the first chip is abnormal; The first chip is determined to be abnormal based on the change range of the detection output value corresponding to two adjacent detection input values. The first chip is determined to be abnormal based on the output value level corresponding to two adjacent detection input values.

3. The method for determining abnormal chips according to claim 2, characterized in that, The step of determining whether the first chip is abnormal based on the magnitude of the detection output value includes: Determine whether the magnitude of each detection output value exceeds the preset output value threshold; If any detection output value exceeds a preset output value threshold, the first chip is determined to be an abnormal chip.

4. The method for determining abnormal chips according to claim 2, characterized in that, The step of determining whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values ​​includes: Based on the detected output value, calculate the change range between the detected output values ​​corresponding to two adjacent detected input values; Determine whether the change magnitude is greater than a preset change magnitude threshold; If the change magnitude is greater than a preset change magnitude threshold, then the first chip is determined to be an abnormal chip.

5. The method for determining abnormal chips according to claim 2, characterized in that, The step of determining whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values ​​includes: Based on the preset output value level, determine the output value level corresponding to the detection output value of each detection input value; Based on the output value level corresponding to each detection output value, calculate the jump amplitude between the output value levels corresponding to two adjacent detection input values; Determine whether the jump amplitude is greater than a preset level jump amplitude threshold; If the jump amplitude is greater than the preset level jump amplitude threshold, then the first chip is determined to be an abnormal chip.

6. The method for determining abnormal chips according to claim 1, characterized in that, The step of sequentially applying at least two detection input values ​​to the first pin of the first chip on the first wafer to obtain corresponding detection output values ​​includes: At least two detection voltage values ​​are sequentially applied to the first pin of the first chip on the first wafer to obtain the corresponding detection current value; or At least two detection current values ​​are sequentially applied to the first pin of the first chip on the first wafer to obtain the corresponding detection voltage value.

7. The method for determining abnormal chips according to claim 1, characterized in that, When the detected input value is a voltage value, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output value of the chip already detected on the first wafer includes: Remove the maximum value from the detection output values ​​of the chips that have been detected on the first wafer to obtain the remaining detection output values; Extract the maximum value from the remaining detection output values; Determine whether the maximum value among the extracted remaining detection output values ​​is less than a preset output value threshold; If the maximum value among the extracted remaining detection output values ​​is less than the preset output value threshold, then the maximum value among the extracted remaining detection output values ​​is used to update the preset output value threshold.

8. The method for determining abnormal chips according to claim 1, characterized in that, When the detected input value is a current value, updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output value of the chip already detected on the first wafer includes: The minimum value among the detected output values ​​of the chips already detected on the first wafer is removed to obtain the remaining detected output values; Extract the minimum value from the remaining detection output values; Determine whether the minimum value among the extracted remaining detection output values ​​is greater than a preset output value threshold; If the minimum value among the extracted remaining detection output values ​​is greater than the preset output value threshold, then the preset output value threshold is updated using the minimum value among the extracted remaining detection output values.

9. The method for determining abnormal chips according to claim 1, characterized in that, The step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip already detected on the first wafer includes: Based on the detection output values ​​of the chips already detected on the first wafer, calculate the change range between two adjacent detection output values; Remove the maximum value from the range of changes to obtain the remaining range of changes; Extract the maximum value from the remaining change range values; Determine whether the maximum value among the extracted remaining change amplitude values ​​is less than a preset change amplitude threshold; If the maximum value among the extracted remaining change amplitude values ​​is less than the preset change amplitude threshold, then the preset change amplitude threshold is updated using the maximum value among the extracted remaining change amplitude values.

10. The method for determining abnormal chips according to claim 1, characterized in that, The step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip already detected on the first wafer includes: Remove the maximum and minimum values ​​from the detection output values ​​of the chips already detected on the first wafer to obtain the remaining detection output values; The remaining detection output values ​​are classified into different levels to obtain new output value levels; Update the preset output value level with the new output value level.

11. The method for determining abnormal chips according to claim 1, characterized in that, After performing anomaly detection on each chip on the first wafer, the method further includes: Based on the detection output values ​​of the chips already detected on the first wafer, at least one of the abnormal judgment conditions in the preset abnormal judgment rules is updated again to obtain the updated abnormal judgment rules. Based on the updated anomaly detection rules, at least two detection input values ​​are sequentially applied to the first pin of the first chip on the second wafer to obtain the corresponding detection output value; wherein, the second wafer and the first wafer are wafers from the same production batch; The detection output value of the first pin of the first chip on the second wafer is used to determine whether the first chip on the second wafer is abnormal, based on the updated anomaly determination rule.

12. The method for determining abnormal chips according to claim 11, characterized in that, When the detected input value is a voltage value, the step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output value of the chip already detected on the first wafer includes: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The median plus N times the variance is used as the updated preset output value threshold; where N is a natural number from 1 to 5.

13. The method for determining abnormal chips according to claim 11, characterized in that, When the detected input value is a current value, the step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detected output value of the chip already detected on the first wafer includes: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The median minus M times the variance is used as the updated preset output value threshold; where M is a natural number from 1 to 5.

14. The method for determining abnormal chips according to claim 11, characterized in that, The step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip already detected on the first wafer includes: The median and variance of the variation amplitudes of two adjacent detection output values ​​of all chips on the first wafer were calculated. The median plus X times the variance is used as the updated preset change range threshold; where X is a natural number from 1 to 5.

15. The method for determining abnormal chips according to claim 11, characterized in that, The step of updating at least one anomaly determination condition in the preset anomaly determination rule based on the detection output value of the chip already detected on the first wafer includes: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The new output value level is calculated based on the median and variance. Update the preset output value level with the new output value level.

16. A device for determining abnormal chips, characterized in that, include: The data acquisition module is used to sequentially apply at least two detection input values ​​to the first pin of the first chip on the first wafer to obtain the corresponding detection output value; An anomaly determination module is used to determine whether the first chip is abnormal based on the detection output value and a preset anomaly determination rule. The preset anomaly determination rule includes multiple anomaly determination conditions. When any one of the multiple anomaly determination conditions is met, the first chip is determined to be an abnormal chip. Following the anomaly detection module, the device further includes: The quantity determination unit is used to determine whether the number of chips that have been subjected to anomaly detection on the first wafer has reached a preset chip quantity threshold. The first rule update unit is used to update at least one abnormal judgment condition in the preset abnormal judgment rule based on the detection output value of the detected chips on the first wafer if the preset chip quantity threshold is reached, so as to obtain the updated abnormal judgment rule. The anomaly detection module is also used to perform anomaly detection on the remaining undetected chips on the first wafer based on the updated anomaly detection rules.

17. The apparatus for determining an abnormal chip according to claim 16, characterized in that, The anomaly detection module includes at least two of the following detection units: The first determination unit is used to determine whether the first chip is abnormal based on the magnitude of the detection output value. The second determination unit is used to determine whether the first chip is abnormal based on the change range of the detection output value corresponding to two adjacent detection input values. The third determination unit is used to determine whether the first chip is abnormal based on the output value level corresponding to two adjacent detection input values.

18. The apparatus for determining an abnormal chip according to claim 17, characterized in that, The first determination unit is specifically used to: determine whether the magnitude of each detection output value exceeds a preset output value threshold; if the magnitude of any detection output value exceeds the preset output value threshold, then determine that the first chip is an abnormal chip.

19. The apparatus for determining an abnormal chip according to claim 17, characterized in that, The second determination unit includes: The first calculation subunit is used to calculate the change range between the detection output values ​​corresponding to two adjacent detection input values ​​based on the detection output value; The first anomaly determination subunit is used to determine whether the change amplitude is greater than a preset change amplitude threshold; if the change amplitude is greater than the preset change amplitude threshold, the first chip is determined to be an abnormal chip.

20. The apparatus for determining an abnormal chip according to claim 17, characterized in that, The third determination unit includes: The determination subunit is used to determine the output value level corresponding to the detection output value of each detection input value based on a preset output value level. The second calculation subunit is used to calculate the jump amplitude between the output value levels corresponding to two adjacent detection input values ​​based on the output value level corresponding to each detection output value. The second anomaly determination subunit is used to determine whether the jump amplitude is greater than a preset level jump amplitude threshold; if the jump amplitude is greater than the preset level jump amplitude threshold, the first chip is determined to be an abnormal chip.

21. The apparatus for determining an abnormal chip according to claim 16, characterized in that, The data acquisition module is specifically used for: At least two detection voltage values ​​are sequentially applied to the first pin of the first chip on the first wafer to obtain the corresponding detection current value; or At least two detection current values ​​are sequentially applied to the first pin of the first chip on the first wafer to obtain the corresponding detection voltage value.

22. The apparatus for determining an abnormal chip according to claim 16, characterized in that, When the detected input value is a voltage value, the first rule update unit is specifically used for: Remove the maximum value from the detection output values ​​of the chips that have been detected on the first wafer to obtain the remaining detection output values; Extract the maximum value from the remaining detection output values; Determine whether the maximum value among the extracted remaining detection output values ​​is less than a preset output value threshold; If the maximum value among the extracted remaining detection output values ​​is less than the preset output value threshold, then the maximum value among the extracted remaining detection output values ​​is used to update the preset output value threshold.

23. The apparatus for determining an abnormal chip according to claim 16, characterized in that, When the detected input value is a current value, the first rule update unit is specifically used for: The minimum value among the detected output values ​​of the chips already detected on the first wafer is removed to obtain the remaining detected output values; Extract the minimum value from the remaining detection output values; Determine whether the minimum value among the extracted remaining detection output values ​​is greater than a preset output value threshold; If the minimum value among the extracted remaining detection output values ​​is greater than the preset output value threshold, then the preset output value threshold is updated using the minimum value among the extracted remaining detection output values.

24. The apparatus for determining an abnormal chip according to claim 16, characterized in that, The first rule update unit is specifically used for: Based on the detection output values ​​of the chips already detected on the first wafer, calculate the change range between two adjacent detection output values; Remove the maximum value from the range of changes to obtain the remaining range of changes; Extract the maximum value from the remaining change range values; Determine whether the maximum value among the extracted remaining change amplitude values ​​is less than a preset change amplitude threshold; If the maximum value among the extracted remaining change amplitude values ​​is less than the preset change amplitude threshold, then the preset change amplitude threshold is updated using the maximum value among the extracted remaining change amplitude values.

25. The apparatus for determining an abnormal chip according to claim 16, characterized in that, The first rule update unit is further configured to: Remove the maximum and minimum values ​​from the detection output values ​​of the chips already detected on the first wafer to obtain the remaining detection output values; The remaining detection output values ​​are classified into different levels to obtain new output value levels; Update the preset output value level with the new output value level.

26. The apparatus for determining an abnormal chip according to claim 16, characterized in that, After performing anomaly detection on each chip on the first wafer, the device further includes: The second rule update unit is used to update at least one of the abnormal judgment conditions in the preset abnormal judgment rules based on the detection output value of the chip detected on the first wafer, so as to obtain the abnormal judgment rules after the update. The detection unit, based on the updated anomaly determination rules, sequentially applies at least two detection input values ​​to the first pin of the first chip on the second wafer to obtain the corresponding detection output value; wherein, the second wafer and the first wafer are wafers from the same production batch; The determination unit determines whether the first chip on the second wafer is abnormal based on the detection output value of the first pin of the first chip on the second wafer and the updated abnormal determination rule.

27. The apparatus for determining an abnormal chip according to claim 26, characterized in that, When the detected input value is a voltage value, the second rule update unit is specifically used for: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The median plus N times the variance is used as the updated preset output value threshold; where N is a natural number from 1 to 5.

28. The apparatus for determining an abnormal chip according to claim 26, characterized in that, When the detected input value is a current value, the second rule update unit is specifically used for: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The median minus M times the variance is used as the updated preset output value threshold; where M is a natural number from 1 to 5.

29. The apparatus for determining an abnormal chip according to claim 26, characterized in that, The second rule update unit is specifically used for: The median and variance of the variation amplitudes of two adjacent detection output values ​​of all chips on the first wafer were calculated. The median plus X times the variance is used as the updated preset change range threshold; where X is a natural number from 1 to 5.

30. The apparatus for determining an abnormal chip according to claim 26, characterized in that, The second rule update unit is also used for: The median and variance of the detection output values ​​of all chips on the first wafer were calculated. The new output value level is calculated based on the median and variance. Update the preset output value level with the new output value level.

31. An electronic device, characterized in that, The electronic device includes: a housing, a processor, a memory, a circuit board, and a power supply circuit, wherein the circuit board is disposed inside the space enclosed by the housing, and the processor and the memory are disposed on the circuit board; the power supply circuit is used to supply power to various circuits or devices of the electronic device; the memory is used to store executable program code; the processor runs a program corresponding to the executable program code by reading the executable program code stored in the memory, for executing the method for determining an abnormal chip as described in any one of claims 1 to 15.

32. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores one or more programs, which can be executed by one or more processors to implement the method for determining abnormal chips as described in any one of claims 1-15.

Citation Information

Patent Citations

  • Chip aging test method and chip aging test system

    CN116338432A

  • Abnormality detection method and device, terminal, storage medium and program product

    CN116961153A