Solid edge glass material for controlling deformation of ultra-thin microchannel plate and application thereof

By using solid edge glass material with high thermal expansion coefficient and low softening point, the deformation problem of ultrathin microchannel plates during hydrogen reduction process was solved, and deformation control of microchannel plates was achieved with a deformation of less than 5μm.

CN117567024BActive Publication Date: 2026-03-20NORTH NIGHT VISION TECH +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-11-10
Publication Date
2026-03-20

AI Technical Summary

Technical Problem

Ultrathin microchannel plates are prone to deformation during hydrogen reduction, mainly due to the mismatch between the effective area and the solid edge glass material during chemical reaction and thermal expansion, which is especially pronounced after the plate thickness is reduced.

Method used

A solid edge glass material with a thermal expansion coefficient higher than that of the effective region skin glass material and a softening point lower than that of the effective region skin glass material is used as a single material solid edge, and tensile stress is pre-formed to offset the volume and thermal expansion coefficient change trend of the effective region during hydrogen reduction.

Benefits of technology

The deformation of the ultrathin microchannel plate during the hydrogen reduction process is effectively controlled, with a deformation of less than 5 μm, ensuring the structural stability and performance consistency of the microchannel plate.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides a solid edge glass material for controlling deformation of an ultrathin microchannel plate and an application thereof, and the solid edge glass material comprises the following components in percentage by mass: SiO2 60-70%; Na2O 8-12%; K2O 5-10%; MgO 2-8%; CaO 2-8%; and BaO 1-5%. The coefficient of thermal expansion of the solid edge glass material is higher than that of the effective area skin glass material, and the softening point of the solid edge glass material is lower than that of the effective area skin glass material. The single material solid edge made of the solid edge glass material forms a tensile stress on the effective area before hydrogen reduction of the microchannel plate, offsets the change trend of the volume and the coefficient of thermal expansion of the effective area skin glass during the hydrogen reduction process, and solves the deformation problem of the ultrathin microchannel plate during the hydrogen reduction process.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microchannel plate, in particular to a solid edge glass material for controlling deformation of an ultrathin microchannel plate and application thereof, and aims to solve the problem of deformation of the ultrathin microchannel plate in the production and manufacturing process. BACKGROUND

[0002] A micro-light image intensifier is a core device of a micro-light night vision instrument, and a microchannel plate is a core element of the micro-light image intensifier, and the performance of the microchannel plate is crucial to the micro-light night vision instrument. With the improvement of the performance of the micro-light image intensifier and other devices, the requirements for the microchannel plate are getting higher and higher, and one important development trend is to gradually reduce the aperture of the microchannel plate to improve the position resolution. Consequently, the thickness of the microchannel plate is thinned to maintain a suitable aspect ratio to achieve higher gain performance.

[0003] Thinning the thickness of the microchannel plate will face a problem: deformation is prone to occur in the hydrogen reduction process. The root cause of the deformation is that, in the hydrogen reduction process, the effective area glass material and hydrogen gas react chemically under high temperature, and the oxides such as lead oxide and bismuth oxide are reduced, resulting in changes in the properties of the effective area glass, accompanied by changes in volume and stress during the process; and the solid edge glass material is different from the porous array state of the effective area, and the area in contact with hydrogen gas is very limited, so the volume and stress do not change significantly, which leads to incompatibility between the effective area and the solid edge in the chemical reaction process and the temperature change process due to the different states, and the problem that the effective area is restricted by the solid edge when it tries to expand, thus causing deformation. Moreover, the thinner the thickness of the microchannel plate, the more obvious and serious the deformation problem. SUMMARY

[0004] In view of the problems in the prior art, the present application aims to provide a solid edge glass material for controlling deformation of an ultrathin microchannel plate to solve the problem of deformation of the ultrathin microchannel plate, the solid edge glass material has a higher thermal expansion coefficient than the effective area skin glass material and a lower softening point than the effective area skin glass material, and as a single material solid edge, it forms a certain tensile stress on the effective area before hydrogen reduction of the microchannel plate, offsetting the change trend of the volume and thermal expansion coefficient of the effective area skin glass during the hydrogen reduction process, thereby solving the problem of deformation of the ultrathin microchannel plate during the hydrogen reduction process.

[0005] According to a first aspect of the object of the present application, the solid edge glass material for controlling deformation of an ultrathin microchannel plate comprises the following components in mass percentage:

[0006] SiO2 60%~70%;

[0007] Na2O 8%~12%;

[0008] K2O 5% to 10%;

[0009] MgO 2% to 8%;

[0010] CaO 2% to 8%;

[0011] BaO 1% to 5%;

[0012] and the thermal expansion coefficient of the entity edge glass material is higher than the thermal expansion coefficient of the effective area skin glass material, and the softening point of the entity edge glass material is lower than the softening point of the effective area skin glass material, the single material entity edge made of the entity edge glass material forms a tensile stress of the entity edge to the effective area before the hydrogen reduction of the micro-channel plate, which offsets the change trend of the volume and the thermal expansion coefficient of the effective area skin glass during the hydrogen reduction process.

[0013] As an optional embodiment, the softening point of the entity edge glass material is 10°C to 50°C lower than the softening point of the matched effective area skin glass.

[0014] As an optional embodiment, the thermal expansion coefficient of the entity edge glass material is (85 to 95) x 10 -7 / ℃.

[0015] As an optional embodiment, the thermal expansion coefficient of the entity edge glass material is (0.5 to 10) x 10 -7 / ℃, compared with the matched effective area skin glass material.

[0016] According to the second aspect of the object of the present application, a method for preparing an ultra-thin micro-channel plate is also provided, comprising the following steps:

[0017] Step 1, using the circular glass rod made of the entity edge glass material as described above to draw a single filament, then arranging a plurality of single filaments into a multifilament rod, and performing a multifilament drawing process to obtain an entity edge multifilament;

[0018] Step 2, selecting the effective area skin glass and the core glass of the micro-channel plate according to the method of claim 1, and after matching the pipe rod, performing the single filament drawing, the multifilament rod arrangement of a plurality of single filaments, and the multifilament drawing process in sequence to obtain an effective area multifilament, wherein the thermal expansion coefficient of the entity edge glass material is higher than the thermal expansion coefficient of the effective area skin glass material, and the softening point of the entity edge glass material is lower than the softening point of the effective area skin glass material;

[0019] Step 3, arranging the effective area multifilament and the entity edge multifilament in the screen mold according to a predetermined order, and the cross-sectional shape is a regular hexagon, wherein the entity edge multifilament is located at the periphery, and the effective area multifilament is located inside the combined area of the entity edge multifilament;

[0020] Step 4, the arranged multifilament is sent into a hot pressing mold to perform hot melting and pressing, and then after slicing, a circular flake-shaped microchannel plate blank screen section is obtained;

[0021] Step 5, the blank screen section is etched to remove the effective area core glass, to form a micron-level micro-porous channel structure, and to prepare a microchannel plate base, which is a porous flake structure;

[0022] Step 6, the porous flake structure is subjected to hydrogen reduction treatment, so that the inner wall of the porous channel forms a functional layer with secondary electron emission capability;

[0023] Step 7, metal electrodes are plated on the input face and the output face of the porous flake structure after hydrogen reduction treatment, and a functional layer is plated in the channel, to obtain a microchannel plate.

[0024] According to a third aspect of the object of the application, a method for preparing an ultrathin microchannel plate is also provided, comprising the following steps:

[0025] Step 1, using a hexagonal glass rod made of the aforementioned solid edge glass material, directly once-drawing a hexagonal edge filament;

[0026] Step 2, according to the method of claim 1, the effective area skin glass and the core glass of the microchannel plate are matched, after pipe rod matching, the single filament, the multi-single filament rod, the multifilament rod and the multifilament drawing process are carried out in sequence, to obtain an effective area multifilament, wherein the thermal expansion coefficient of the solid edge glass material is higher than the thermal expansion coefficient of the effective area skin glass material, and the softening point is lower than the softening point of the effective area skin glass material;

[0027] Step 3, the effective area multifilament and the shaped hexagonal edge filament are arranged in the screen mold in a predetermined order, and the cross-sectional shape is a regular hexagon, wherein the shaped hexagonal edge filament is located at the periphery, and the effective area multifilament is located inside the shaped hexagonal edge filament surrounding area;

[0028] Step 4, the arranged multifilament is sent into a hot pressing mold to perform hot melting and pressing, and then after slicing, a circular flake-shaped microchannel plate blank screen section is obtained;

[0029] Step 5, the blank screen section is etched to remove the effective area core glass, to form a micron-level micro-porous channel structure, and to prepare a microchannel plate base, which is a porous flake structure;

[0030] Step 6, the porous flake structure is subjected to hydrogen reduction treatment, so that the inner wall of the porous channel forms a functional layer with secondary electron emission capability;

[0031] Step 7, metal electrodes are plated on the input face and the output face of the porous flake structure after hydrogen reduction treatment, and a functional layer is plated in the channel, to obtain a microchannel plate.

[0032] According to the fourth aspect of the present application, a microchannel plate with a diameter of Φ20mm-Φ33mm and a thickness of 0.18mm-0.25mm is also provided, which is prepared according to the above method. The deformation of the microchannel plate after hydrogen reduction is less than 5μm.

[0033] It should be understood that all combinations of the foregoing concepts and additional concepts described in greater detail below (provided such concepts are not mutually inconsistent) are contemplated as being part of the inventive subject matter. Additionally, it should be understood that the various aspects of the claimed subject matter can be implemented in a variety of ways.

[0034] For a more complete understanding of the present application, reference is now made to the following descriptions taken in conjunction with the accompanying drawings in which: BRIEF DESCRIPTION OF DRAWINGS

[0035] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical, or nearly identical, component that is illustrated in various figures is represented with a like numeral. For purposes of clarity, not every component is called out in every drawing. Embodiments of various aspects of the application will now be described, by way of example, with reference to the drawings, in which:

[0036] Figure 1 is a schematic diagram of a microchannel plate structure of an exemplary embodiment of the present application.

[0037] BRIEF DESCRIPTION OF DRAWINGS

[0038] 1 - solid edge area; 2 - active area; 3 - hexagonal edge wire (with / without single wire structure); 4 - active area glass; 5 - channel. DETAILED DESCRIPTION

[0039] For a more complete understanding of the present application, reference is now made to the following descriptions taken in conjunction with the accompanying drawings in which:

[0040] Aspects of the present application are described in the disclosure by reference to the drawings, in which various embodiments of the application are shown. The embodiments of the disclosure need not necessarily include all aspects of the application. It should be understood that various concepts and embodiments introduced above and in greater detail below can be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any particular manner of implementation. Additionally, some aspects of the present application can be utilized independently, or in any suitable combination with other aspects of the present application.

[0041] According to an embodiment of the present application, a solid edge glass material for solving the deformation problem of an ultra-thin micro-channel plate is provided, the solid edge glass material has a higher thermal expansion coefficient than the effective area skin glass material and a lower softening point than the effective area skin glass material, and the solid edge glass material is used as a single material solid edge to form a certain solid edge tension on the effective area before hydrogen reduction of the micro-channel plate, offsetting the change trend of the volume and thermal expansion coefficient of the effective area skin glass during the hydrogen reduction process, thereby solving the deformation problem of the ultra-thin micro-channel plate during the hydrogen reduction process.

[0042] According to an embodiment of the present application, a solid edge glass material for controlling the deformation of an ultra-thin micro-channel plate includes the following components in mass percentage:

[0043] SiO2 60% to 70%;

[0044] Na2O 8% to 12%;

[0045] K2O 5% to 10%;

[0046] MgO 2% to 8%;

[0047] CaO 2% to 8%;

[0048] BaO 1% to 5%;

[0049] In addition, the solid edge glass material has a higher thermal expansion coefficient than the effective area skin glass material and a lower softening point than the effective area skin glass material, and the single material solid edge made of the solid edge glass material forms a solid edge tension on the effective area before hydrogen reduction of the micro-channel plate, offsetting the change trend of the volume and thermal expansion coefficient of the effective area skin glass during the hydrogen reduction process.

[0050] As an optional embodiment, the softening point of the solid edge glass material is 10°C to 50°C lower than the softening point of the matching effective area skin glass.

[0051] As an optional embodiment, the thermal expansion coefficient of the solid edge glass material is (85 to 95) × 10 -7 / ℃.

[0052] As an optional embodiment, the thermal expansion coefficient of the solid edge glass material is (0.5 to 10) × 10 -7 / ℃.

[0053] The solid edge glass material according to the embodiment of the present application, when applied to an ultra-thin micro-channel plate, is used as a single material solid edge, including two use modes:

[0054] (1) A round glass rod is drawn into a single filament, the single filaments are arranged into a multifilament rod, and the multifilament is drawn;

[0055] (2) Hexagonal glass rod, directly once drawn into hexagonal edge wire.

[0056] In combination with the above embodiments, according to the second aspect of the object of the present application, a method for preparing an ultra-thin micro-channel plate is also proposed, comprising the following steps:

[0057] Step 1, using the round glass rod made of the aforementioned solid edge glass material to draw a single wire, then arranging multiple single wires into a multifilament rod, and performing a multifilament drawing process to obtain a solid edge multifilament;

[0058] Step 2, according to the method of claim 1, selecting the effective area skin glass and core glass of the micro-channel plate that match, after pipe rod matching, performing the single wire drawing, multiple single wire arrangement into a multifilament rod, and multifilament drawing processes in sequence to obtain an effective area multifilament, wherein the thermal expansion coefficient of the solid edge glass material is higher than the thermal expansion coefficient of the effective area skin glass material, and the softening point is lower than the softening point of the effective area skin glass material;

[0059] Step 3, arranging the effective area multifilament and the solid edge multifilament in the screen mold in a predetermined order, and the cross-sectional shape is a regular hexagon, wherein the solid edge multifilament is located at the periphery, and the effective area multifilament is located inside the solid edge multifilament surrounding area;

[0060] Step 4, sending the arranged multifilament into the hot pressing mold for hot melting and pressing, and then after slicing, obtaining a circular thin sheet-shaped micro-channel plate blank screen segment;

[0061] Step 5, etching the blank screen segment to remove the effective area core glass, forming a micron-level micro-pore channel structure, and preparing a micro-channel plate background, which is a porous sheet structure;

[0062] Step 6, performing hydrogen reduction treatment on the porous sheet structure, so that the inner wall of the porous channel forms a functional layer with secondary electron emission capability;

[0063] Step 7, plating metal electrodes on the input face and output face of the hydrogen reduction treated porous sheet structure, and plating a functional layer in the channel, to prepare a micro-channel plate.

[0064] According to the third aspect of the object of the present application, a method for preparing an ultra-thin micro-channel plate is also proposed, comprising the following steps:

[0065] Step 1, using the hexagonal glass rod made of the aforementioned solid edge glass material to directly once draw a hexagonal edge wire;

[0066] Step 2, the effective area of the matched microchannel plate is selected according to the method of claim 1, the core material glass and the skin material glass are matched through a tube rod, and then the single filament is drawn, the multi-single filament is arranged to form a multifilament rod, and the multifilament drawing process is carried out, to obtain the effective area multifilament, wherein the thermal expansion coefficient of the solid edge glass material is higher than the thermal expansion coefficient of the effective area skin material glass, and the softening point is lower than the softening point of the effective area skin material glass;

[0067] Step 3, the effective area multifilament and the shaped hexagonal edge filament are arranged in the screen mold in a predetermined order, and the cross-sectional shape is a regular hexagon, wherein the shaped hexagonal edge filament is located at the periphery, and the effective area multifilament is located inside the combined area of the shaped hexagonal edge filament;

[0068] Step 4, the arranged multifilament is sent into a hot pressing mold for hot melting and pressing, and then a circular sheet-shaped microchannel plate blank screen segment is obtained after slicing;

[0069] Step 5, the blank screen segment is etched to remove the effective area core material glass, to form a micron-level micro-pore channel structure, and to prepare a microchannel plate background, which is a porous sheet structure;

[0070] Step 6, the porous sheet structure is subjected to hydrogen reduction treatment, so that the inner wall of the porous channel forms a functional layer with secondary electron emission capability;

[0071] Step 7, metal electrodes are plated on the input face and the output face of the porous sheet structure after hydrogen reduction treatment, and a functional layer is plated in the channel, to prepare a microchannel plate.

[0072] The diameter of the microchannel plate prepared by the above process is Φ20mm-Φ33mm, and the thickness is 0.18mm-0.25mm. The deformation of the microchannel plate after hydrogen reduction is less than 5μm.

[0073] In order to better understand the test process of the above embodiment of the application, the following further describes in combination with specific embodiments.

[0074] {Example 1}

[0075] The composition of the solid edge glass material used in this embodiment includes: SiO265%, Na2O 10%, K2O 8%, MgO 7%, CaO 6%, and BaO 4%. The edge filament is directly formed by drawing a hexagonal glass rod, the difference between the thermal expansion coefficients of the edge filament and the effective area skin material glass is 10×10-7 / ℃, and the MCP specification applied is: diameter 25mm, plate thickness 0.25mm.

[0076] The prepared MCP has a deformation of about 1.5μm.

[0077] {Example 2}

[0078] The entity edge glass material composition used in the embodiment includes: SiO2 60%, Na2O 12%, K2O 10%, MgO 7.5%, CaO 6.5%, BaO 4%, the edge wire uses a circular glass rod to be shaped by twice wire drawing, the difference of the thermal expansion coefficient of the skin glass in the effective area is 15x10-7 / ℃, and the MCP applied has a specification of: diameter 25mm, plate thickness 0.18mm.

[0079] The prepared MCP has a deformation of about 2μm.

[0080] {Example 3}

[0081] The entity edge glass material composition used in the embodiment includes: SiO2 70%, Na2O 8%, K2O 6%, MgO 6.5%, CaO 5.5%, BaO 4%, the edge wire uses a circular glass rod to be shaped by twice wire drawing, the difference of the thermal expansion coefficient of the skin glass in the effective area is 5x10-7 / ℃, and the MCP applied has a specification of: diameter 20mm, plate thickness 0.25mm.

[0082] The prepared MCP has a deformation of about 1μm.

[0083] {Example 4}

[0084] The entity edge glass material composition used in the embodiment includes: SiO2 63%, Na2O 11%, K2O 9%, MgO 7.5%, CaO 5.5%, BaO 4%, the edge wire uses a circular glass rod to be shaped by twice wire drawing, the difference of the thermal expansion coefficient of the skin glass in the effective area is 12x10-7 / ℃, and the MCP applied has a specification of: diameter 33mm, plate thickness 0.25mm.

[0085] The prepared MCP has a deformation of about 3μm.

[0086]

[0087]

[0088] In the above various embodiments, the skin glass and the core glass used in the effective area are the same, and are as follows:

[0089]

[0090] Although the present application has been disclosed with reference to the preferred embodiments, it is not intended to limit the application. Those skilled in the art who are familiar with the technical field of the present application can make various modifications and improvements without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application shall be subject to the scope defined by the claims.

Claims

1. An ultrathin microchannel plate, characterized in that, The ultrathin microchannel plate includes solid edge glass material and effective area skin glass material; The solid edge glass material comprises the following components by weight percentage: SiO2 60%~70%; Na2O 8%~12%; K2O 5%~10%; MgO 2%~8%; CaO 2%~8%; BaO 1%~5%; Furthermore, the coefficient of thermal expansion of the solid edge glass material is higher than that of the effective area skin glass material, and its softening point is lower than that of the effective area skin glass material. The solid edge glass material is made into a single material solid edge. The softening point of the solid edge glass material is 10°C to 50°C lower than that of the matching effective area skin glass; the difference in the coefficient of thermal expansion between the solid edge glass material and the matching effective area skin glass material is (0.5~10)×10. -7 / ℃.

2. The ultrathin microchannel plate according to claim 1, characterized in that, The coefficient of thermal expansion of the solid edge glass material is (85~95)×10. -7 / ℃.

3. A method for preparing the ultrathin microchannel plate according to any one of claims 1-2, characterized in that, Includes the following steps: Step 1: Using a circular glass rod made of solid-edge glass material according to any one of claims 1-2, draw a single filament, then arrange multiple single filament rods into a multifilament rod, and perform a multifilament drawing process to obtain a solid-edge multifilament. Step 2: Select the effective area skin glass and core glass of the matching microchannel plate according to claim 1. After matching with the tube rod, perform single wire drawing, multiple single wires arranged into a multi-wire rod and multi-wire drawing process to obtain effective area multi-wire. The coefficient of thermal expansion of the solid edge glass material is higher than that of the effective area skin glass material, and the softening point is lower than that of the effective area skin glass material. Step 3: Arrange the effective area multiwire and solid edge multiwire in the screen display mold in a predetermined order. The cross-sectional shape is a regular hexagon, with the solid edge multiwire located on the outer perimeter and the effective area multiwire located inside the area enclosed by the solid edge multiwire. Step 4: The prepared multifilaments are fed into a hot press mold for hot melting and pressing, and then sliced ​​to obtain a circular thin sheet-shaped microchannel plate blank segment. Step 5: Etch the screen section of the blank to remove the effective core glass, forming a micron-scale microporous channel structure, and prepare the microchannel plate substrate, which is a porous thin sheet structure. Step 6: Perform hydrogen reduction treatment on the porous sheet structure to form a functional layer with secondary electron emission capability on the inner wall of the porous channel; Step 7: Deposit metal electrodes on the input and output surfaces of the porous thin-film structure after hydrogen reduction treatment, and deposit functional layers in the channels to prepare a microchannel plate.

4. A method for preparing the ultrathin microchannel plate according to any one of claims 1-2, characterized in that, Includes the following steps: Step 1: Using a hexagonal glass rod made of any one of the solid edge glass materials of claims 1-2, directly draw it into a hexagonal edge wire in one step; Step 2: Select the effective area skin glass and core glass of the matching microchannel plate according to claim 1. After matching with the tube rod, perform single wire drawing, multiple single wires arranged into a multi-wire rod and multi-wire drawing process to obtain effective area multi-wire. The coefficient of thermal expansion of the solid edge glass material is higher than that of the effective area skin glass material, and the softening point is lower than that of the effective area skin glass material. Step 3: Arrange the effective area multiwire and the shaped hexagonal edge wire in the screen mold in a predetermined order. The cross-sectional shape is a regular hexagon, with the shaped hexagonal edge wire located on the outer periphery and the effective area multiwire located inside the area enclosed by the shaped hexagonal edge wire. Step 4: The prepared multifilaments are fed into a hot press mold for hot melting and pressing, and then sliced ​​to obtain a circular thin sheet-shaped microchannel plate blank segment. Step 5: Etch the screen section of the blank to remove the effective core glass, forming a micron-scale microporous channel structure, and prepare the microchannel plate substrate, which is a porous thin sheet structure. Step 6: Perform hydrogen reduction treatment on the porous sheet structure to form a functional layer with secondary electron emission capability on the inner wall of the porous channel; Step 7: Deposit metal electrodes on the input and output surfaces of the porous thin-film structure after hydrogen reduction treatment, and deposit functional layers in the channels to prepare a microchannel plate.

5. The microchannel plate prepared according to claim 3 or 4, characterized in that, The microchannel plate has a diameter of Φ20mm to Φ33mm and a thickness of 0.18mm to 0.25mm.

6. The microchannel plate according to claim 5, characterized in that, The microchannel plate, after hydrogen reduction, has a deformation of less than 5 μm.

Citation Information

Patent Citations

  • Glass for solid edge of micro-channel plate

    CN102399062A

  • Method for manufacturing micro-channel plate with solid edge

    CN1758405A