An optical waveguide nanobelt preparation device and method based on controllable thermal melting

By using a controllable thermal melting optical waveguide nanoribbon fabrication device and employing temperature sensors and CCD cameras for precise temperature control, the fabrication challenge of polymer optical waveguide nanoribbons has been solved, achieving low-cost and high-efficiency nanoribbon fabrication.

CN117584505BActive Publication Date: 2026-04-24ZHONGBEI UNIV
View PDF 2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHONGBEI UNIV
Filing Date
2023-11-20
Publication Date
2026-04-24

AI Technical Summary

Technical Problem

Existing technologies make it difficult to prepare optical waveguide nanoribbons made of polymers and other high-molecular materials, and the preparation cost is high, requiring large-scale equipment.

Method used

An optical waveguide nanoribbon fabrication device based on controllable thermal melting was used, and nanoribbons with different aspect ratios were fabricated by using temperature sensors, CCD cameras and heating plates, etc., through precise temperature control and real-time monitoring.

Benefits of technology

Precision fabrication of polymer optical waveguide nanoribbons has been achieved, reducing fabrication costs, and it has a wide range of applications, making it suitable for industrialization.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN117584505B_ABST
    Figure CN117584505B_ABST
Patent Text Reader

Abstract

The application belongs to the technical field of optical nanochannel, and particularly relates to a preparation device and method of optical waveguide nanobelt based on controllable thermal melting, which comprises a temperature sensor, a CCD camera, a heating plate, an electrically-controlled heating table, a heating table controller and a computer, the temperature sensor is connected with the electrically-controlled heating table, the lens of the CCD camera is directly opposite to the heating plate, the CCD camera is electrically connected with the computer through a cable, the electric heating plate is arranged on the electrically-controlled heating table, and the electrically-controlled heating table is electrically connected with the heating table controller through a control cable. The application does not need large equipment such as a high-temperature furnace and a photoetching machine, and auxiliary materials such as inert gas and photoresist, has the characteristics of controllable size, low cost, wide application range, short preparation time, high repetition rate and the like, and is beneficial to the industrialization popularization of polymer optical waveguide nanobelt in the field of integrated optical communication.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This invention belongs to the field of optical nanowaveguide technology, specifically relating to an optical waveguide nanoribbon fabrication device and method based on controllable thermal melting. Background Technology

[0002] Benefiting from strong light field confinement, low transmission loss, and small size, optical waveguide nanoribbons have wide applications in pattern detection, optical communication, and other fields. Among them, amorphous nanoribbons made of polymers and glass have significant application value due to their high coupling and high integration characteristics with fiber optic systems. Currently, optical nanoribbons are mainly fabricated using CMOS processing methods such as chemical vapor deposition (CVD) and photolithography: 1) For CVD, the fabrication is typically based on the principle of supersaturated precipitation, achieving nanoribbon fabrication through the transformation of different phases of the raw materials (solid-liquid-gas) under high temperature and inert gas protection; 2) For CMOS processing, semiconductor processing techniques such as photolithography and EBL are typically used to etch nanoribbon structures onto semiconductor thin films. Both methods can obtain optical waveguide nanoribbons with heights below 1 μm, but are limited by the fabrication principles, restricting the selection of raw materials and preventing the fabrication and processing of certain polymers and other high-molecular materials. Furthermore, these methods require large-scale equipment such as high-temperature furnaces or photolithography machines, resulting in high fabrication costs. Summary of the Invention

[0003] To address the aforementioned technical problem of the inability to prepare and process certain polymers and other high-molecular materials, this invention provides an optical waveguide nanoribbon preparation device and method based on controllable thermal melting, which can be used for the precision preparation of amorphous optical waveguide nanoribbons made of polymers, glass, etc.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0005] An optical waveguide nanoribbon fabrication device based on controllable thermal melting includes a temperature sensor, a CCD camera, a heating plate, an electrically controlled heating stage, a heating stage controller, and a computer. The temperature sensor is connected to the electrically controlled heating stage, the lens of the CCD camera faces the heating plate, the CCD camera is electrically connected to the computer via a cable, the heating plate is placed on the electrically controlled heating stage, and the electrically controlled heating stage is electrically connected to the heating stage controller via a control cable.

[0006] The heating plate is fixed with nanofibers, which are positioned at the geometric center of the heating plate.

[0007] The maximum heating temperature of the heating plate is greater than the minimum temperature required for the thermal melting of the nanofiber material.

[0008] The nanofiber material is an amorphous material such as polymer or glass, the diameter of the nanofiber is <1μm, and the length of the central region of the nanofiber is >10μm.

[0009] The temperature sensor has a temperature measurement range of 0~500℃, and the heating plate can withstand a temperature of 600℃.

[0010] The CCD camera has an imaging frequency > 60 Hz and an imaging line resolution < 300 nm.

[0011] The highest temperature that the temperature sensor can measure is greater than or equal to the highest temperature of the heating plate. The temperature sensor is a thermocouple or an optical infrared thermometer.

[0012] A method for fabricating optical waveguide nanoribbons based on controllable thermal melting includes the following steps:

[0013] S1. Place the nanofiber to be processed on the heating plate;

[0014] S2. Adjust the position of the CCD camera to make it clearly imaged on the computer, turn on the switch of the heating stage controller, and set the temperature of the heating plate;

[0015] S3. As the temperature slowly rises and reaches the material's thermal melting temperature, the nanofiber melts and changes shape. By adjusting the temperature and heating time, the melting state of the material can be controlled, thereby preparing nanoribbons with different aspect ratios.

[0016] S4. A CCD camera is used for real-time monitoring during the preparation process to precisely control the morphology and structure of the nanoribbons.

[0017] The method for adjusting the temperature and heating time in S3 is as follows:

[0018] During the thermal deformation process of nanofibers, the heating time is related to the thermal conductivity of the material and the initial temperature difference. The temperature and heating time are expressed as follows:

[0019]

[0020] Where T(t) represents the temperature of the nanofiber, a represents the temperature of the heating plate, T represents the initial temperature of the nanofiber, t represents the heating time, and k represents the thermal conductivity.

[0021] During the heating process, the volume of the nanofiber expands to a certain extent, affecting the cross-sectional area of ​​the prepared nanoribbon. Thermal expansion is related to the type of material and temperature; different materials have different coefficients of thermal expansion. The expression for the coefficient of thermal expansion is:

[0022]

[0023] in: dV represents the coefficient of thermal expansion, V represents the initial volume, dV represents the volume change, and dT represents the temperature change.

[0024] The method for precisely controlling the morphology and structure of nanoribbons in S4 is as follows:

[0025] During the thermal deformation of the nanofiber, the cross-sectional shape of the nanofiber gradually changes from a circle to an approximately rectangular shape with an aspect ratio > 10, while the cross-sectional area remains constant throughout the process, as shown below:

[0026]

[0027]

[0028]

[0029] Where r represents the radius of the cylindrical cross-section. Let be the area of ​​a circle, and a and b be the lengths of two sides of an approximate rectangle. Let be the area of ​​the rectangle; during the collapse process, its a and b will change accordingly, resulting in the following formula:

[0030]

[0031] The longer the heating time, the more obvious the downward collapse of the nanofiber under the action of gravity, and the larger the aspect ratio of the rectangular cross section of the obtained nanoribbon. During the preparation process, the shape of the nanoribbon is monitored by detecting the image formed by the CCD camera on the computer screen, and the controller is adjusted in real time to realize feedback control of the heating plate.

[0032] Compared with the prior art, the beneficial effects of this invention are:

[0033] This invention utilizes the thermal melting of polymers and glass, and through precise temperature control, achieves accurate control of the nanoribbon structure dimensions, thus solving the problem of precision fabrication of polymer optical waveguide nanoribbons. This invention eliminates the need for large equipment such as high-temperature furnaces and lithography machines, as well as auxiliary materials such as inert gases and photoresists. It features controllable dimensions, low cost, wide applicability, short fabrication time, and high repeatability, which is beneficial for the industrialization and promotion of polymer optical waveguide nanoribbons in fields such as integrated optical communication. Attached Figure Description

[0034] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0035] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0036] Figure 1 This is a schematic diagram of the structure of the present invention;

[0037] Figure 2 This is a flowchart illustrating the preparation process of polymer-controlled thermally meltable nanoribbons according to the present invention.

[0038] Figure 3 This is a graph showing the relationship between the heating time and temperature of the polyphenylene ether resin of this invention.

[0039] Figure 4 This is a diagram showing the change of the cross-section of the polyphenylene ether resin during the heating and melting process of the present invention;

[0040] Figure 5 This diagram illustrates the shape change of the material of the present invention during the collapse process, approximated by a rectangle.

[0041] Figure 6 This is a schematic diagram of different sizes of polyphenylene ether resin nanoribbons in this invention;

[0042] Figure 7 This is a schematic diagram of nanoribbons of the same size but different materials used in this invention.

[0043] Among them: 1 is a temperature sensor, 2 is a CCD camera, 3 is a heating plate, 4 is an electrically controlled heating stage, 5 is a heating stage controller, 6 is a computer, and 7 is a nanofiber. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. These descriptions are only for further illustrating the features and advantages of the present invention, and not for limiting the claims of the present invention. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0045] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0046] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0047] In this embodiment, as Figure 1 As shown, the lens of CCD camera 2 is directly facing the heating plate 3, and the image captured by CCD camera 2 is displayed on the computer 6 monitor for better monitoring of the nanoribbon fabrication process. In this embodiment, the temperature sensor 1 used is a thermocouple. Figure 2 As shown, polymer or glass nanofibers are used as the raw materials for preparation. First, the nanofiber to be processed 7 is placed on the heating plate 3. Second, the position of the CCD camera 2 is adjusted so that it can be clearly imaged on the computer 6. Third, the switch of the heating stage controller 5 is turned on, and the temperature of the heating plate 3 is set. As the temperature slowly rises and reaches the material's thermal melting temperature, the nanofiber 7 melts and changes shape. By adjusting the temperature and heating time, the melting state of the material can be controlled, thereby preparing nanoribbons with different aspect ratios. Finally, the CCD camera 2 is used for real-time monitoring during the preparation process to precisely control the morphology and structure of the nanoribbons.

[0048] Furthermore, the nanofiber material used is an amorphous material such as polymer or glass, with a diameter of <1μm.

[0049] Furthermore, the nanoribbon preparation process is controlled by adjusting parameters such as the set temperature (which should be higher than the temperature required for material melting, as shown in Table 1, the melting temperature of some materials) and heating time of the heating stage controller 5.

[0050] Table 1. Melting temperature and refractive index of some polymer materials that can be used to prepare optically guided nanoribbons.

[0051]

[0052] Furthermore, the maximum heating temperature of the heating plate 3 used is greater than the minimum temperature required for the thermal melting of the nanofiber 7 material used.

[0053] Furthermore, during the thermal deformation of the nanofiber 7, the cross-sectional shape changes, while the length remains unchanged.

[0054] During the thermal deformation process of polymers and glasses, the heating time is related to the thermal conductivity of the materials, the initial temperature difference, etc., and can be expressed as:

[0055] (1)

[0056] Where T(t) represents the polymer temperature, a represents the heating plate temperature, T(0) represents the initial polymer temperature (room temperature), t represents the heating time, and k represents the thermal conductivity.

[0057] During heating, the material expands in volume, affecting the cross-sectional area of ​​the prepared nanoribbons. Thermal expansion is related to the type of material and temperature; different materials have different coefficients of thermal expansion. The general expression for the coefficient of thermal expansion is:

[0058]

[0059] in, dV represents the coefficient of thermal expansion, V represents the initial volume, dV represents the volume change, and dT represents the temperature change.

[0060] During the thermal deformation of the nanofiber 7, the cross-sectional shape of the fiber gradually changes from a circle to an approximately rectangular shape with an aspect ratio > 10, while the cross-sectional area remains constant throughout the process. Figure 6 and Figure 7 As shown. It can be represented as:

[0061] (3)

[0062]

[0063]

[0064] Where r represents the radius of the cylindrical cross-section. Let be the area of ​​the circle; a and b are the lengths of two sides of the approximate rectangle, respectively. Let be the area of ​​the rectangle. During the collapse process, its a and b will change accordingly, resulting in the following formula:

[0065] (4)

[0066] The longer the heating time, the more obvious the optical fiber collapses downward under the action of gravity, and the larger the aspect ratio of the rectangular cross section of the obtained nanoribbon.

[0067] During the preparation process, the shape of the nanoribbon is monitored by detecting the image formed by the CCD camera 2 on the computer screen 6, and the heating stage controller 5 is adjusted in real time to achieve feedback control of the heating plate.

[0068] The specific implementation parameters are as follows:

[0069] Preparation environment: a cleanroom with a level of a thousand-fold improvement

[0070] Length of tapered section of nanofiber 7: 1mm

[0071] 7-cone diameter of nanofiber: 800nm

[0072] Temperature sensor 1 temperature measurement range: 0~500℃

[0073] Heating plate 3 can withstand a temperature of 600℃.

[0074] Taking polyphenylene ether resin as an example, using formula (1), with a laboratory temperature of 25℃, the initial melting temperature of polyphenylene ether resin is approximately 290℃, and its thermal conductivity is 0.7. The temperature of heating plate 3 is set to 350℃, and the heating curve is as follows: Figure 3 As shown.

[0075] Once everything is ready, begin heating. The melting temperature of polyphenylene ether resin is approximately 290℃. Turn on the switch for the electric heating plate 4 and set the heating temperature to 350℃. Figure 3 As shown, the nanofiber 7 reaches 290°C after 2.5 seconds, which is the melting temperature of the polyphenylene ether resin. With continued heating, it reaches 350°C after 8 seconds. During the heating process, the volume of the polyphenylene ether resin also changes accordingly; as the temperature increases, the volume change of the polyphenylene ether resin shows an increasing trend. In this embodiment, as... Figure 4 , Figure 5 As shown, the volume change is mainly reflected in the increase of cross-sectional area because no force was applied in the longitudinal direction of the nanofiber 7 and the length of the nanofiber 7 remained almost unchanged. After the preparation was completed and cooled and shaped, the volume returned to its original size.

[0076] The above description only illustrates the preferred embodiments of the present invention. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention, and all such changes should be included within the protection scope of the present invention.

Claims

1. A device for fabricating optical waveguide nanoribbons based on controllable thermal melting, characterized in that: The system includes a temperature sensor (1), a CCD camera (2), a heating plate (3), an electrically controlled heating stage (4), a heating stage controller (5), and a computer (6). The temperature sensor (1) is connected to the electrically controlled heating stage (4). The lens of the CCD camera (2) faces the heating plate (3). The CCD camera (2) is electrically connected to the computer (6) via a cable. The heating plate (3) is placed on the electrically controlled heating stage (4). The electrically controlled heating stage (4) is electrically connected to the heating stage controller (5) via a control cable. A nanofiber (7) is fixed on the heating plate (3). The nanofiber (7) is placed at the geometric center of the heating plate (3). The maximum heating temperature of the heating plate (3) is greater than the minimum temperature required for the nanofiber (7) material to melt. During the preparation process, the shape of the nanoribbon is monitored by detecting the image formed by the CCD camera (2) on the computer (6) screen, and the controller (5) is adjusted in real time to achieve feedback control of the heating plate.

2. The optical waveguide nanoribbon fabrication device based on controllable thermal melting according to claim 1, characterized in that: The nanofiber (7) is made of polymer or glass, the diameter of the nanofiber (7) is <1μm, and the length of the central region of the nanofiber (7) is >10μm.

3. The optical waveguide nanoribbon fabrication device based on controllable thermal melting according to claim 1, characterized in that: The temperature sensor (1) has a temperature measurement range of 0~500℃, and the heating plate (3) can withstand a temperature of 600℃.

4. The optical waveguide nanoribbon fabrication device based on controllable thermal melting according to claim 1, characterized in that: The imaging frequency of the CCD camera (2) is >60Hz, and the imaging line resolution of the CCD camera (2) is <300nm.

5. The optical waveguide nanoribbon fabrication device based on controllable thermal melting according to claim 1, characterized in that: The highest measuring temperature of the temperature sensor (1) is greater than or equal to the highest temperature of the heating plate (3), and the temperature sensor (1) is a thermocouple or an optical infrared thermometer.

6. A method for fabricating optical waveguide nanoribbons based on controllable thermal melting, characterized in that: Includes the following steps: S1. Place the nanofiber (7) to be processed on the heating plate (3); S2. Adjust the position of the CCD camera (2) so that it can be clearly imaged on the computer (6), turn on the switch of the heating stage controller (5), and set the temperature of the heating plate (3); S3. As the temperature slowly rises and reaches the material's thermal melting temperature, the nanofiber (7) melts and changes shape. By adjusting the temperature and heating time, the melting state of the material can be controlled, thereby preparing nanoribbons with different aspect ratios. S4. A CCD camera (2) is used for real-time monitoring during the preparation process in order to accurately control the morphology and structure of the nanoribbons; During the thermal deformation of the nanofiber (7), the cross-sectional shape of the nanofiber (7) gradually changes from a circle to an approximate rectangle with an aspect ratio > 10, while the cross-sectional area remains constant during the process, as shown in the following expression: Where r represents the radius of the cylindrical cross-section. Let be the area of ​​a circle, and a and b be the lengths of two sides of an approximate rectangle. Let be the area of ​​the rectangle; during the collapse process, its a and b will change accordingly, resulting in the following formula: The longer the heating time, the more obvious the downward collapse of the nanofiber (7) under the action of gravity, and the larger the aspect ratio of the rectangular cross section of the obtained nanoribbon. During the preparation process, the shape of the nanoribbon is monitored by detecting the image formed by the CCD camera (2) on the computer (6) screen, and the controller (5) is adjusted in real time to realize the feedback control of the heating plate.

7. The method for fabricating optical waveguide nanoribbons based on controllable thermal melting according to claim 6, characterized in that: The method for adjusting the temperature and heating time in S3 is as follows: During the thermal deformation process of nanofibers (7), the heating time is related to the thermal conductivity of the material and the initial temperature difference. The temperature and heating time are expressed as follows: Where T(t) represents the temperature of the nanofiber (7), a represents the temperature of the heating plate (3), T(0) represents the initial temperature of the nanofiber (7), t represents the heating time, and k represents the thermal conductivity. During the heating process, the volume of the nanofiber (7) will expand to a certain extent, which will affect the cross-sectional area of ​​the prepared nanoribbon. The thermal expansion is related to the type of material and the temperature. Different materials have different coefficients of thermal expansion. The expression for the coefficient of thermal expansion is: in: dV represents the coefficient of thermal expansion, V represents the initial volume, dV represents the volume change, and dT represents the temperature change.

Citation Information

Patent Citations

  • Temperature control tunable optical fiber filter based on micro-nano optical fibers and manufacturing method

    CN106526751A

  • Method and equipment for batch production of AR diffracted optical waveguides

    CN110927873A