A method and system for debugging a vacuum ultraviolet spectrometer

Abstract

The present application belongs to the field of optical collimation technology, and provides a kind of vacuum ultraviolet spectrometer debugging method and system, wherein the method comprises: setting up level gauge, adjusting and fixing the level of debugging substrate;Draw auxiliary line on debugging substrate, each auxiliary line is parallel or intersected, then install multiple theodolites based on the intersection position of multiple auxiliary lines;Install parts of vacuum ultraviolet spectrometer based on the analog light emitted by theodolite, including light source, pre-lens and collimating lens etc.The present application draws multiple auxiliary lines on the debugging substrate during optical collimation, positions theodolite using auxiliary line, then positions equipment through the analog light of theodolite, thereby improving the accuracy of the whole system.

Description

Technical Field

[0001] This invention belongs to the field of optical collimation technology, and specifically relates to a method and system for adjusting a vacuum ultraviolet spectrometer. Background Technology

[0002] A "vacuum ultraviolet spectrometer" is a system that measures spectra in the "vacuum ultraviolet" range under vacuum conditions. Because there are no products available in the domestic market, and imported products are extremely expensive, the development and research of electric light source devices with vacuum ultraviolet spectra are limited. Consequently, highly reliable, long-life, and urgently needed new electric light source devices with significant application value have been slow to emerge, hindering the expansion of their application areas.

[0003] Optical collimation requires extremely high overall accuracy, especially for grating scanning spectrometer systems, where the collimation accuracy of the entire system is even more critical. Currently, there is no clear specification for a collimation scheme for this type of vacuum ultraviolet spectrometer. Summary of the Invention

[0004] To address at least one of the problems in the background art, the present invention proposes a method and system for debugging a vacuum ultraviolet spectrometer.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A method for adjusting a vacuum ultraviolet spectrometer includes the following steps:

[0007] Set up a level, adjust the test base plate to be horizontal and fix it in place;

[0008] Draw auxiliary lines on the debugging board;

[0009] Install the theodolite based on auxiliary lines;

[0010] The components of the vacuum ultraviolet spectrometer are installed based on the simulated light emitted by the theodolite.

[0011] Preferably, the auxiliary lines are made on the debugging substrate, including the following steps:

[0012] Establish a planar coordinate system by setting the lower left corner of the rectangular debugging board as the origin;

[0013] Draw the first auxiliary line with coordinates X1 and Y1 as the starting point. The first auxiliary line is a straight line.

[0014] Draw a second auxiliary line starting from coordinates X2 and Y2. The second auxiliary line is a straight line and intersects the first auxiliary line.

[0015] Draw a third auxiliary line with coordinates X3 and Y3 as the starting point. The third auxiliary line is a straight line.

[0016] Draw a fourth auxiliary line with coordinates X4 and Y4 as the starting point. The fourth auxiliary line is a straight line.

[0017] Draw a fifth auxiliary line starting from coordinates X5 and Y5. The fifth auxiliary line is a straight line.

[0018] Preferably, the value of X1 is 0.5L to 0.6L, the value of Y1 is 0, and L is the length of the debugging substrate;

[0019] The value of X2 is 0.1L to 0.2L, and the value of Y2 is h, where h is the width of the debugging substrate;

[0020] The value of X3 is L, and the value of Y3 is 0.5h to 0.8h;

[0021] The value of X4 is 0.3L to 0.5L, and the value of Y4 is 0;

[0022] The value of X5 is L, and the value of Y5 is 0.4h to 0.7h.

[0023] Preferably, the value of X1 is 0.600L, the value of X2 is 0.105L, the value of Y3 is 0.688h, the value of X4 is 0.368L, and the value of Y5 is 0.629h.

[0024] Preferably, the angle between the first auxiliary line and the horizontal direction is 0° to 150°;

[0025] The second auxiliary line makes an angle of 60° to 70° with the horizontal direction;

[0026] The third auxiliary line is parallel to the horizontal direction;

[0027] The fourth auxiliary line is perpendicular to the horizontal direction;

[0028] The fifth auxiliary line is parallel to the horizontal direction.

[0029] Preferably, the first auxiliary line makes an angle of 147.56° with the horizontal direction;

[0030] The second auxiliary line makes an angle of 63.66° with the horizontal direction.

[0031] Preferably, the theodolite is installed based on auxiliary lines, including the following steps:

[0032] Install the first theodolite at the starting point of the first auxiliary line;

[0033] Install the second theodolite at the starting point of the second auxiliary line;

[0034] Install the third theodolite at the starting point of the third auxiliary line;

[0035] Install the fourth theodolite at the starting point of the fourth auxiliary line;

[0036] Install the fifth theodolite at the starting point of the fifth auxiliary line.

[0037] Preferably, the components of the vacuum ultraviolet spectrometer are mounted based on the simulated light emitted by the theodolite, including the following steps:

[0038] The first theodolite emits the first simulated light along the direction of the first auxiliary line, and the simulated light is adjusted so that its height is consistent with the height determined by the level.

[0039] A front mirror is installed at the intersection of the first auxiliary line and the second auxiliary line, and the front mirror is adjusted so that the first simulated light emitted by the first theodolite illuminates the center of the front mirror, and the first simulated light reflected by the front mirror is consistent with the second theodolite in the direction perpendicular to the debugging base plate and is consistent with the height of the level.

[0040] Install the entrance slit along the direction of the second auxiliary line;

[0041] The third theodolite emits a third simulated light along the direction of the third auxiliary line. A grating rotating stage is installed at the intersection of the third simulated light and the first simulated light. The grating rotating stage is used to install the grating.

[0042] A first collimating lens is installed at the intersection of the third auxiliary line and the fourth auxiliary line. The position of the first collimating lens is adjusted so that the first simulated light of the grating illuminates the center of the first collimating lens. The first simulated light reflected by the first collimating lens is consistent with the direction of the fourth theodolite perpendicular to the debugging substrate and is consistent with the height determined by the level.

[0043] Install the exit slit along the direction of the third auxiliary line;

[0044] Install a second collimating lens at the intersection of the fourth auxiliary line and the fifth auxiliary line. Adjust the position of the second collimating lens so that the first simulated light reflected by the first collimating lens illuminates the center of the second collimating lens. The first simulated light reflected by the second collimating lens is consistent with the direction of the fifth theodolite perpendicular to the debugging base plate and is consistent with the height determined by the level.

[0045] Install the chopper and sample sequentially along the fifth auxiliary line, so that the simulated light reflected by the second collimating mirror illuminates the center of the sample. At the same time, rotate the sample so that it rotates at any angle, and the height of the first simulated light reflected by the sample is always consistent with the height determined by the level.

[0046] Preferably, the angle between the chopper and the first simulated light reflected by the second collimating mirror is 45°.

[0047] A vacuum ultraviolet spectrometer calibration system includes:

[0048] The assembly unit is used to set up the level instrument, adjust the debugging base plate to be horizontal and fix it in place;

[0049] Auxiliary line unit, used to create auxiliary lines on the debugging substrate;

[0050] Simulated optical unit, used for mounting theodolites based on auxiliary lines;

[0051] Assembly unit, used to install components of a vacuum ultraviolet spectrometer based on simulated light emitted by a theodolite.

[0052] The beneficial effects of this invention are:

[0053] In the process of optical collimation, this invention creates multiple auxiliary lines on the adjustment substrate, uses these auxiliary lines to position the theodolite, and then uses the simulated light of the theodolite to position the equipment, thereby improving the accuracy of the entire system.

[0054] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures pointed out in the description and the drawings. Attached Figure Description

[0055] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0056] Figure 1 A flowchart of a vacuum ultraviolet spectrometer debugging method according to the present invention is shown;

[0057] Figure 2 A schematic diagram of the auxiliary lines of the present invention is shown;

[0058] Figure 3 A top view of a vacuum ultraviolet spectrometer according to the present invention is shown;

[0059] Figure 4 A diagram illustrating the architecture of a vacuum ultraviolet spectrometer debugging system according to the present invention is shown.

[0060] In the diagram: 1. Debugging substrate; 2. Light source; 3. Front mirror; 4. Entrance slit; 5. Grating; 6. Exit slit; 7. First collimating lens; 8. Second collimating lens; 9. Chopper; 10. Sample; 11. First auxiliary line; 12. Second auxiliary line; 13. Third auxiliary line; 14. Fourth auxiliary line; 15. Fifth auxiliary line; 16. First theodolite; 17. Second theodolite; 18. Third theodolite; 19. Fourth theodolite; 20. Fifth theodolite. Detailed Implementation

[0061] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0062] A method for adjusting a vacuum ultraviolet spectrometer, such as Figure 1 As shown, it includes the following steps:

[0063] S1: Set up the level instrument, adjust and fix the debugging base plate 1 to be horizontal, so that the height determined by the level instrument is consistent with the theoretical height of the spectrometer optical system;

[0064] S2: Draw auxiliary lines on the debugging substrate 1;

[0065] S3: Install the theodolite based on auxiliary lines;

[0066] S4: Components for installing a vacuum ultraviolet spectrometer based on the simulated light emitted by the theodolite.

[0067] Further, step S2 includes the following steps:

[0068] S101: Establish a planar coordinate system by setting the lower left corner of the rectangular debugging substrate 1 as the origin; S102: Draw the first auxiliary line 11 with coordinates (X1, Y1) as the starting point. The first auxiliary line 11 is a straight line; S103: Draw the second auxiliary line 12 with coordinates (X2, Y2) as the starting point. The second auxiliary line 12 is a straight line and intersects with the first auxiliary line 11. h is the height of the debugging substrate 1; S104: Draw the third auxiliary line 13 with coordinates (X3, Y3) as the starting point. The third auxiliary line 13 is a straight line; S105: Draw the fourth auxiliary line 14 with coordinates (X4, Y4) as the starting point. The fourth auxiliary line 14 is a straight line; S106: Draw the fifth auxiliary line 15 with coordinates (X5, Y5) as the starting point. The fifth auxiliary line 15 is a straight line.

[0069] It should be noted that in S101 to S105, the value of X1 is 0.5L to 0.6L, the value of Y1 is 0, and L is the length of the debugging substrate (1); the value of X2 is 0.1L to 0.2L, the value of Y2 is h, and h is the width of the debugging substrate 1; the value of X3 is L, the value of Y3 is 0.5h to 0.8h; the value of X4 is 0.3L to 0.5L, the value of Y4 is 0; the value of X5 is L, and the value of Y5 is 0.4h to 0.7h.

[0070] It should be further noted that the angle between the first auxiliary line 11 and the horizontal direction is 0° to 150°; the angle between the second auxiliary line 12 and the horizontal direction is 60° to 70°; the third auxiliary line 13 is parallel to the horizontal direction; the fourth auxiliary line 14 is perpendicular to the horizontal direction; and the fifth auxiliary line 15 is parallel to the horizontal direction. The aforementioned horizontal direction is... Figure 2 The direction is parallel to that of substrate 1.

[0071] by Figure 2 For example, X1 is 0.600L, X2 is 0.105L, Y3 is 0.688h, X4 is 0.368L, and Y5 is 0.629h. Meanwhile, the first auxiliary line 11 makes an angle of 147.56° with the horizontal direction; the second auxiliary line 12 makes an angle of 63.66° with the horizontal direction.

[0072] Furthermore, S3 includes the following steps:

[0073] Install a first theodolite 16 at the starting point of the first auxiliary line 11, and install a second theodolite 17 at the starting point of the second auxiliary line 12. Requirement: The first theodolite 16 and the second theodolite 17 should be aligned with the first auxiliary line 11 and the second auxiliary line 12 respectively in a direction perpendicular to the debugging substrate 1. The purpose of this step is to simulate light construction and determine the optical path.

[0074] Install the third theodolite 18 at the starting point of the third auxiliary line 13;

[0075] Install the fourth theodolite 19 at the starting point of the fourth auxiliary line 14;

[0076] Install the fifth theodolite 20 at the starting point of the fifth auxiliary line 15.

[0077] Furthermore, in S4, combined Figure 2 and Figure 3 This includes the following steps:

[0078] S401: The first theodolite 16 emits a first simulated light along the direction of the first auxiliary line 11, and adjusts the simulated light so that its height is consistent with the height determined by the level; S402: A front mirror 3 is installed at the intersection of the first auxiliary line 11 and the second auxiliary line 12, and the front mirror 3 is adjusted so that the first simulated light emitted by the first theodolite 16 illuminates the center of the front mirror 3, and the first simulated light reflected by the front mirror 3 is consistent with the second theodolite 17 in the direction perpendicular to the adjustment base plate 1, and is at the same height as the level in the horizontal direction. S403: An entrance slit 4 is installed along the direction of the second auxiliary line 12, and the angle between the chopper 9 and the first simulated light reflected by the second collimating mirror 8 is 45°; S404: The third theodolite 18 emits a third simulated light along the direction of the third auxiliary line 13, and a grating rotating stage is installed at the intersection of the third simulated light and the first simulated light. The grating rotating stage is used to install the grating 5; S405: An exit slit 6 is installed along the direction of the third auxiliary line 13; S406: At the intersection of the third auxiliary line 13 and the fourth auxiliary line 1... S407: Install a first collimating lens 7 at the intersection of the fourth auxiliary line 14 and the fifth auxiliary line 15. Adjust the position of the first collimating lens 7 so that the first simulated light reflected by the grating 5 illuminates the center of the first collimating lens 7, and the first simulated light reflected by the first collimating lens 7 is consistent with the fourth theodolite 19 in the direction perpendicular to the adjustment base plate 1, and the horizontal direction is consistent with the height determined by the level instrument; S408: Install a second collimating lens 8 at the intersection of the fourth auxiliary line 14 and the fifth auxiliary line 15. Adjust the position of the second collimating lens 8 so that the first simulated light reflected by the first collimating lens 7 illuminates the center of the second collimating lens 8, and the first simulated light reflected by the second collimating lens 8 is consistent with the fifth theodolite 20 in the direction perpendicular to the adjustment base plate 1, and the horizontal direction is consistent with the height determined by the level instrument; S409: Install a chopper 9 and a sample 10 sequentially along the direction of the fifth auxiliary line 15 so that the simulated light reflected by the second collimating lens 8 illuminates the center of the sample 10. At the same time, rotate the sample 10 so that the height of the first simulated light reflected by the sample 10 is always consistent with the height determined by the level instrument.

[0079] It should be noted that in step S404, a grating rotary stage is installed, and a slit is placed at the center of the stage as the rotation axis (transforming the invisible rotation center into a visible one). The position and orientation of the rotary stage are adjusted so that the center of the stage remains aligned with the intersection of the third analog light and the first analog light within a 360° rotation range. Furthermore, the intersection of the first analog light and the third analog light is the intersection of the first auxiliary line 11 and the third auxiliary line 13. Therefore, the purpose of step S404 is to determine that the rotation center of the stage is aligned with the intersection of the second auxiliary line 12 and the third auxiliary line 13, which is the rotation center of the grating 5. After the rotation axis position and rotation orientation are determined, the slit component is removed, the grating 5 is installed, and the position and orientation of the grating 5 are adjusted so that the grating surface is on the rotation center.

[0080] In addition, adjustments are required during the installation of grating 5. Specifically, the reflected light from the first analog light of the first theodolite 16, after passing through the first collimating lens 7, should illuminate the center of grating 5. Furthermore, the first analog light after passing through grating 5 should be aligned with the third theodolite 18 in the direction perpendicular to the adjustment substrate 1, and its horizontal height should match the height determined by the level. The diffracted light from grating 5 should also match the horizontal height determined by the level (record the position mark X at this point). Within the range of motion, the height of the reflected and diffracted light from grating 5 should always remain consistent with the height determined by the level.

[0081] Additionally, in step S408, there can be multiple samples 10. When measuring other samples 10, the height of the reflected light from each sample 10 must be consistent with the height determined by the level. Install the PMT (photomultiplier tube), test and calibrate the relationship between the rotation of the PMT and the rotation of the sample 10, and ensure that the reflected light from the sample 10 illuminates the center position of the receiving surface of the PMT (measured with a ruler).

[0082] It should be further noted that sample 10 needs to be placed on the turntable structure, and the rotation center of the turntable mechanism is located on the fifth auxiliary line 15. Finally, it is also necessary to install the cavities of the front mirror 3, the first collimating mirror 7, and the second collimating mirror 8, install and adjust the position and orientation of the entrance slit 4 and the exit slit so that the simulated light passes through the two slits, and the slits are vertical without obvious tilt. At the same time, it is also necessary to seal each cavity, wire the circuit, assemble the light source 2 and other components, and perform vacuum testing.

[0083] Furthermore, once the equipment is adjusted, a light source 2 can be installed along the direction of the first auxiliary line 11 to replace the first simulated light for testing.

[0084] A vacuum ultraviolet spectrometer calibration system is used for the above methods, such as Figure 4 As shown, it includes:

[0085] The assembly unit is used to assemble the level instrument, and to adjust and fix the debugging base plate 1 to be horizontal.

[0086] Auxiliary line unit, used to create auxiliary lines on the debugging substrate 1;

[0087] Simulated optical unit, used for mounting theodolites based on auxiliary lines;

[0088] Assembly unit, used to install components of a vacuum ultraviolet spectrometer based on simulated light emitted by a theodolite.

[0089] It should be noted that, for the system embodiment, since it basically corresponds to the method embodiment, the relevant parts can be referred to in the description of the method embodiment. The various units and modules of the vacuum ultraviolet spectrometer debugging system are divided according to functional logic, but are not limited to the above division, as long as the corresponding functions can be achieved; in addition, the specific names of each unit are only for easy distinction and are not used to limit the scope of protection of this invention.

[0090] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for adjusting a vacuum ultraviolet spectrometer, characterized in that, Includes the following steps: Set up a level (11), adjust the debugging base plate (1) to be horizontal and fix it so that the height determined by the level is consistent with the theoretical height of the spectrometer optical system; Draw auxiliary lines on the debugging board (1): Set the lower left corner of the rectangular debugging board (1) as the origin and establish a plane coordinate system; draw the first auxiliary line (11) with coordinates (X1, Y1) as the starting point, and the first auxiliary line (11) is a straight line; draw the second auxiliary line (12) with coordinates (X2, Y2) as the starting point, and the second auxiliary line (12) is a straight line, and the second auxiliary line (12) intersects with the first auxiliary line (11); draw the third auxiliary line (13) with coordinates (X3, Y3) as the starting point, and the third auxiliary line (13) is a straight line; draw the fourth auxiliary line (14) with coordinates (X4, Y4) as the starting point, and the fourth auxiliary line (14) is a straight line; draw the fifth auxiliary line (15) with coordinates (X5, Y5) as the starting point, and the fifth auxiliary line (15) is a straight line. Line; the value of X1 is 0.5L~0.6L, the value of Y1 is 0, and L is the length of the debugging substrate (1); the value of X2 is 0.1L~0.2L, the value of Y2 is h, and h is the width of the debugging substrate (1); the value of X3 is L, and the value of Y3 is 0.5h~0.8h; the value of X4 is 0.3L~0.5L, and the value of Y4 is 0; the value of X5 is L, and the value of Y5 is 0.4h~0.7h; the angle between the first auxiliary line (11) and the horizontal direction is 0~150°; the angle between the second auxiliary line (12) and the horizontal direction is 60°~70°; the third auxiliary line (13) is parallel to the horizontal direction; the fourth auxiliary line (14) is perpendicular to the horizontal direction; the fifth auxiliary line (15) is parallel to the horizontal direction; Install the theodolite based on the auxiliary lines: Install the first theodolite (16) at the starting point of the first auxiliary line (11); install the second theodolite (17) at the starting point of the second auxiliary line (12); install the third theodolite (18) at the starting point of the third auxiliary line (13); install the fourth theodolite (19) at the starting point of the fourth auxiliary line (14); install the fifth theodolite (20) at the starting point of the fifth auxiliary line (15); The components of the vacuum ultraviolet spectrometer are installed based on the simulated light emitted by the theodolite: The first theodolite (16) emits the first simulated light along the direction of the first auxiliary line (11), and the simulated light is adjusted so that its height is consistent with the height determined by the level (11); a front mirror (3) is installed at the intersection of the first auxiliary line (11) and the second auxiliary line (12), and the front mirror (3) is adjusted so that the first simulated light emitted by the first theodolite (16) illuminates the center of the front mirror (3), and the first simulated light reflected by the front mirror (3) is perpendicular to the second theodolite (17). The direction of the debugging substrate (1) is consistent with that of the level (11); the entrance slit (4) is installed along the direction of the second auxiliary line (12); the third theodolite (18) emits a third analog light along the direction of the third auxiliary line (13), and a grating rotating stage is installed at the intersection of the third analog light and the first analog light. The grating rotating stage is used to install the grating (5); a first collimating lens (7) is installed at the intersection of the third auxiliary line (13) and the fourth auxiliary line (14), and the position of the first collimating lens (7) is adjusted so that the first grating (5) is aligned with the direction of the level (11); the direction of the level (12) is consistent with that of the level (11); the direction of the level (12) is consistent with that of the level (13); the direction of the level (12) is consistent with that of the level (13); the direction of the level (12) is consistent with that of the level (13); the direction of the level (14) is consistent with that of the level (11); the direction of the level (12) is consistent with that of the level (13); the direction of the level (14) is consistent with that of the level (11); the direction of the level (12) is consistent with that of the level (13); the direction of the level (14) is consistent with that of the level (15); the direction of the level (15) is consistent with that of the level (16); the direction of the level (17 ...8); the direction of the level (19) is consistent with that of the level (11); the direction of the level (12) is consistent with The simulated light shines on the center of the first collimating lens (7), and the first simulated light reflected by the first collimating lens (7) is aligned with the fourth theodolite (19) in a direction perpendicular to the adjustment base plate (1), and is also aligned with the height determined by the level (11); an exit slit (6) is installed along the direction of the third auxiliary line (13); a second collimating lens (8) is installed at the intersection of the fourth auxiliary line (14) and the fifth auxiliary line (15), and the position of the second collimating lens (8) is adjusted so that the first simulated light reflected by the first collimating lens (7) shines on the center of the second collimating lens (8). The first simulated light reflected by the second collimating lens (8) is consistent with the fifth theodolite (20) in the direction perpendicular to the debugging base plate (1) and is consistent with the height determined by the level (11). The chopper (9) and the sample (10) are installed sequentially along the direction of the fifth auxiliary line (15) so that the simulated light reflected by the second collimating lens (8) illuminates the center of the sample (10). At the same time, the sample (10) is rotated so that the sample (10) is rotated at any angle. The height of the first simulated light reflected by the sample (10) is always consistent with the height determined by the level (11).

2. The method for adjusting a vacuum ultraviolet spectrometer according to claim 1, characterized in that, The values ​​of X1 are 0.600L, X2 are 0.105L, Y3 is 0.688h, X4 is 0.368L, and Y5 is 0.629h.

3. The method for adjusting a vacuum ultraviolet spectrometer according to claim 1, characterized in that, The first auxiliary line (11) makes an angle of 147.56° with the horizontal direction; The second auxiliary line (12) makes an angle of 63.66° with the horizontal direction.

4. The method for adjusting a vacuum ultraviolet spectrometer according to claim 1, characterized in that, The angle between the chopper (9) and the first simulated light reflected by the second collimating mirror (8) is 45°.

5. A vacuum ultraviolet spectrometer calibration system, used to implement the method described in any one of claims 1-4, characterized in that, include: The assembly unit is used to assemble the level (11), and to adjust and fix the debugging base plate (1) to be horizontal; Auxiliary line unit, used to make auxiliary lines on the debugging substrate (1); Simulated optical unit, used for mounting theodolites based on auxiliary lines; Assembly unit, used to install components of a vacuum ultraviolet spectrometer based on simulated light emitted by a theodolite.

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