A device and method for processing a blade tooth of a molecular pump blade

Abstract

The application discloses a kind of molecular pump blade's blade tooth processing device and processing method, including tool mounting assembly and part processing assembly, it is characterized in that, the tool mounting assembly is by machining center tool holder, tool tooling, gasket and tool group composition, machining center tool holder bottom is connected with tool tooling, the bottom of tool tooling installs tool group, tool group is by two pieces of tool, gasket is arranged between two pieces of tool;The part processing assembly is by four-axis rotary table, part clamping tooling and opening press plate;Four-axis rotary table is installed with part clamping tooling, part clamping tooling is provided with the part to be processed, and the part to be processed is clamped with part clamping tooling by setting opening press plate.The molecular pump blade's blade tooth processing device and processing method of the application solve the technical problems of high requirement for processing tool, poor processing economy and poor processing quality caused by easy vibration in the prior art.

Description

Technical Field

[0001] This invention relates to the field of blade processing, and specifically to a blade tooth processing device and method for molecular pump blades. Background Technology

[0002] The moving and stationary vanes of a molecular pump have dozens of toothed blades on their outer surfaces. These blades are relatively thin and long, and have specific tilt angle requirements, such as... Figure 5 The blade shown has a thickness of 1.2 mm, a blade length of 45 mm, an inclination angle of 40°, and a number of 40 teeth.

[0003] The blade blank is clamped on a four-axis rotary table fixture. The stationary blank is clamped vertically, keeping the blade teeth to be machined vertical. A bar end mill is used to mill each tooth downwards. After machining one tooth, the rotary table rotates a certain angle according to the number of blade teeth before machining the next tooth. Because the blade teeth are long and the gap between two teeth is small, a slender and extremely rigid bar end mill is required for machining. This places very high demands on the equipment and cutting tools. At the same time, this machining method is prone to blade vibration and poor machining quality.

[0004] The blade teeth are machined using a five-axis machining center with five-axis linkage. This machining method is relatively simple, but it has high equipment requirements and poor machining economy. Summary of the Invention

[0005] The purpose of this invention is to provide a blade tooth processing device and method for molecular pump blades, so as to solve the technical problems of high requirements for processing tools, poor processing economy and easy vibration leading to poor processing quality in the prior art.

[0006] To achieve the above objectives, the present invention provides a blade tooth machining device for a molecular pump, comprising a tool mounting assembly and a part machining assembly. The tool mounting assembly consists of a machining center tool holder, a tool fixture, a shim, and a tool set. The bottom of the machining center tool holder is connected to the tool fixture, and the bottom of the tool fixture is fitted with the tool set, which consists of two tools. The shim is positioned between the two tools. The part machining assembly comprises a four-axis rotary table, a part clamping fixture, and an open pressure plate. The part clamping fixture is mounted on the four-axis rotary table, and a part to be machined is placed on the part clamping fixture. The part to be machined is clamped to the part clamping fixture by the open pressure plate.

[0007] Furthermore, the machining fixture is a cylindrical structure with stepped ends. The side wall of the top cylinder of the machining fixture is the tool holder connection surface, which is locked to the tool holder of the machining center. The side wall of the bottom cylinder of the machining fixture is the positioning surface, and an M10 threaded hole is opened on the bottom surface of the machining fixture.

[0008] Furthermore, the tool set consists of a three-sided saw blade one and a three-sided saw blade two. The cutting edges of the three-sided saw blade one and the three-sided saw blade two are slightly higher than the main body to prevent the tool body from scratching the blade teeth of the workpiece during processing. A shim is placed between the three-sided saw blade one and the three-sided saw blade two. The three-sided saw blade one, the shim, and the three-sided saw blade two are installed on the positioning surface of the machining fixture. The outer side of the three-sided saw blade one abuts against the stepped surface of the machining fixture. A pressure plate is set on the outer side of the three-sided saw blade two. An M10 screw is set on the pressure plate and threadedly connected to the M10 threaded hole opened on the bottom surface of the machining fixture.

[0009] Furthermore, the four-axis turntable consists of a four-axis turntable body, a turntable disk, a turntable positioning hole, and a turntable support facade. The four-axis turntable body is movably connected to the turntable support facades located on both sides of the four-axis turntable body via a rotating shaft. The four-axis turntable body rotates under the action of the rotating shaft. A turntable disk is provided on the upper end face of the four-axis turntable body, and a turntable positioning hole is provided in the middle of the turntable disk. The turntable positioning hole is a through hole.

[0010] Furthermore, the bottom of the part clamping fixture is provided with a rear positioning boss, and an M14 threaded hole is opened in the middle of the rear positioning boss. The top of the part clamping fixture is provided with a front positioning boss, and an M8 threaded hole is opened in the middle of the front positioning boss. The rear positioning boss is installed in the rotary table positioning hole of the four-axis rotary table. The rear positioning boss is movably connected to the four-axis rotary table through an M14 double-ended stud. One end of the M14 double-ended stud is threaded to the M14 threaded hole of the rear positioning boss, and the other end of the M14 double-ended stud passes through the rotary table positioning hole of the four-axis rotary table. A cover plate and an M14 nut are fitted on the protruding part of the M14 double-ended stud. The M14 nut and the M14 double-ended stud are threaded together.

[0011] Furthermore, an inner through hole is provided in the middle of the part to be processed, and an open pressure plate is provided on the upper end face of the part to be processed. The part to be processed and the open pressure plate are sleeved on the front positioning boss of the part clamping fixture. An M8 screw is provided at the upper end of the open pressure plate. The M8 screw passes through the open pressure plate and the M8 threaded hole of the part to be processed and the part clamping fixture for threaded connection. The M8 screw and the open pressure plate clamp the part.

[0012] A method for machining the blade teeth of a molecular pump, comprising the following steps: S1. Tool preparation: Select the appropriate three-sided saw blade one, three-sided saw blade two and shim type according to the tooth length, number of teeth and tooth thickness of the blade teeth of the part to be processed. The thickness of three-sided saw blade one and three-sided saw blade two plus shim should be less than the gap at the root of the two blade teeth of the part to be processed. S2. Tool assembly: Install the tool assembly fixture on the machining center tool holder, install two three-sided saw blades (blade 1 and blade 2) on the tool fixture, separate the two blades by a shim, and finally lock them with a pressure plate and screws. Install the machining center tool holder with the tool assembly installed on the machining center spindle. S3. Four-axis rotary table preparation: The four-axis rotary table is fixed on the worktable of the CNC machining center. Adjust the angle between the main body of the four-axis rotary table and the worktable. The degree of adjustment is the degree of the blade teeth of the part to be machined. By adjusting the angle, it can adapt to the angle changes of different models and different blade teeth. Adjusting the angle is to ensure that the blade teeth and the saw blade remain parallel during the cutting process to achieve machining. S4. Preparation of part clamping fixture: After the part clamping fixture passes through, the positioning boss is installed on the four-axis rotary table and locked and positioned by M14 double-ended studs, cover plates and M14 nuts. The part clamping fixture rotates with the rotation of the rotary table. Different rotation angles are set by the program to achieve different numbers of blade teeth. The smaller the rotation angle, the more blade teeth are processed. S5. Installation of the part to be processed: The part to be processed is positioned and installed on the front positioning boss of the part clamping fixture through the inner round through hole. It is locked by the open pressure plate and M8 screw. By adjusting the size of the front positioning boss, it can accommodate the clamping of different models and specifications of the part to be processed. By adjusting the rotation of the turntable, the rotation of the part clamping fixture is driven, and finally the rotation of the part to be processed is driven. S6. During the machining process, the outer circle of the tool set is aligned with the middle part of the outer circle of the workpiece to be machined, and the two are tangent to complete the tool setting; the corresponding machining program is called and the machine tool is started. During the machining process, the three-sided saw blade one, the three-sided saw blade two and the shim of the tool set remain rotating in place. The machine tool table moves, which drives the workpiece to move in a straight line toward the position of the tool set for cutting. During the cutting process, the saw blade gradually approaches the root of the blade tooth. After the blade tooth length is processed to the required level, the workpiece is removed. S7. Once one tooth of the part to be processed is in place, the four-axis rotary table rotates and repeats the feed action of S6 to process the next tooth. After all the teeth are processed, the part is removed, the screw assembly is loosened, the opening pressure plate is removed, and the part to be processed is taken out, thus completing the processing of one part.

[0013] Furthermore, the shim in S1 is located between the three-sided saw blade one and the three-sided saw blade two. The gap between the three-sided saw blade one and the three-sided saw blade two is the thickness of the blade tooth, and the thickness of the shim is the thickness of the blade tooth. By adjusting the thickness of the shim, different thicknesses of blade teeth can be processed.

[0014] Based on the above technical solution, the present invention can produce the following beneficial effects: (1) The present invention provides a blade tooth processing device and processing method for molecular pump blades, which only requires a common CNC machining center and a four-axis rotary table to meet the requirements, reducing the requirements of traditional processing methods on equipment and tools. The blade tooth thickness is processed by the gap between the tool groups. During processing, the blade teeth are subjected to force on both sides at the same time, and the blade teeth are not easy to vibrate.

[0015] (2) The present invention provides a blade tooth processing device and processing method for molecular pump blades. By changing the gap between the tool sets, the size of the tool, the size of the clamping fixture positioning circle, the tilt angle of the four-axis turntable and the processing program through the shims, it can fully meet the processing of blade teeth with different thicknesses, different angles and different numbers of blade teeth. It has good adaptability and can conveniently realize the processing of various types of moving and stationary blades. At the same time, it can process both sides of the blade teeth, quickly complete the blade tooth processing and has high processing efficiency. Attached Figure Description

[0016] Figure 1 This is an exploded view of the tool mounting assembly according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the tool mounting assembly according to an embodiment of the present invention; Figure 3 This is an exploded view of the structure of the part processing assembly according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the part processing assembly according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the part to be processed according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the tooling structure of an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the four-axis rotary table according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the part clamping fixture according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the processing procedure according to an embodiment of the present invention; Figure 10 This is a partially enlarged view of the processing procedure in an embodiment of the present invention; In the diagram: 1. Machining center tool holder; 2. Tool fixture; 2-1. Tool holder connecting surface; 2-2. Positioning surface; 2-3. M10 threaded hole; 3. Three-sided saw blade one; 4. Washer; 5. Three-sided saw blade two; 6. Pressure plate; 7. M10 screw; 8. M8 screw; 9. Open pressure plate; 10. Part to be machined; 10-1. Leaf tooth; 10-2. Inner through hole; 11. Part clamping fixture; 11-1. Rear positioning surface; 11-2. M14 threaded hole; 11-3. Front positioning surface; 11-4. M8 threaded hole; 12. M14 double-ended stud; 13. Four-axis rotary table; 13-1. Four-axis rotary table body; 13-2. Rotary table surface; 13-3. Rotary table positioning hole; 13-4. Rotary table support surface; 14. Cover plate; 15. M14 nut. Detailed Implementation

[0017] To better understand the purpose, structure, and function of this invention, the following detailed description, in conjunction with the accompanying drawings, provides an apparatus and method for machining the blade teeth of a molecular pump according to this invention.

[0018] In the description of this invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] As shown in the figure, the present invention provides a blade tooth machining device for a molecular pump blade, comprising a tool mounting assembly and a part machining assembly. The tool mounting assembly consists of a machining center tool holder 1, a tool fixture 2, a shim 4, and a tool set. The bottom of the machining center tool holder 1 is connected to the tool fixture 2. The bottom of the tool fixture 2 is fitted with a tool set, which consists of two tools. The shim 4 is positioned between the two tools. The part machining assembly consists of a four-axis rotary table 13, a part clamping fixture 11, and an open pressure plate 9. The four-axis rotary table 13 is fitted with the part clamping fixture 11, on which a part to be machined 10 is placed. The part to be machined 10 is clamped to the part clamping fixture 11 by the open pressure plate 9.

[0020] The machining fixture 2 is a cylindrical structure with stepped ends. The side wall of the top cylinder of the machining fixture 2 is the tool holder connecting surface 2-1, which is locked to the tool holder 1 of the machining center. The side wall of the bottom cylinder of the machining fixture 2 is the positioning surface 2-2, and the bottom surface of the machining fixture 2 has an M10 threaded hole 2-3.

[0021] The tool set consists of a three-sided saw blade 3 and a three-sided saw blade 5. The cutting edges of the three-sided saw blade 3 and the three-sided saw blade 5 are slightly higher than the main body to prevent the tool body from scratching the blade teeth 10-1 of the workpiece 10 during processing. A shim 4 is placed between the three-sided saw blade 3 and the three-sided saw blade 5. The three-sided saw blade 3, the shim 4 and the three-sided saw blade 5 are installed on the positioning surface 2-2 of the machining fixture 2. The outer side of the three-sided saw blade 3 abuts against the stepped surface of the machining fixture 2. A pressure plate 7 is placed on the outer side of the three-sided saw blade 5. An M10 screw 6 is placed on the pressure plate 7 and threadedly connected to the M10 threaded hole 2-3 opened on the bottom surface of the machining fixture 2.

[0022] The four-axis turntable 13 consists of a four-axis turntable body 13-1, a turntable disk 13-2, a turntable positioning hole 13-3, and a turntable support surface 13-4. The four-axis turntable body 13-1 is movably connected to the turntable support surface 13-4 on both sides of the four-axis turntable body 13-1 through a rotating shaft. The four-axis turntable body 13-1 rotates under the action of the rotating shaft. The turntable disk 13-2 is provided on the upper end surface of the four-axis turntable body 13-1. A turntable positioning hole 13-3 is provided in the middle position of the turntable disk 13-2. The turntable positioning hole 13-3 is a through hole.

[0023] The bottom of the part clamping fixture 11 is provided with a rear positioning boss 11-1, and an M14 threaded hole 11-2 is opened in the middle of the rear positioning boss 11-1. The top of the part clamping fixture 11 is provided with a front positioning boss 11-3, and an M8 threaded hole 11-4 is opened in the middle of the front positioning boss 11-3. The rear positioning boss 11-1 is installed in the rotary table positioning hole 13-3 of the four-axis rotary table 13. The rear positioning boss 11-1 is movably connected to the four-axis rotary table 13 through an M14 double-ended stud 12. One end of the M14 double-ended stud 12 is connected to the M14 threaded hole of the rear positioning boss 11-1. The threaded hole 11-2 is used for threaded connection. The other end of the M14 double-ended stud 12 passes through the turntable positioning hole 13-3 of the four-axis turntable 13. A cover plate 14 and an M14 nut 15 are fitted on the protruding part of the M14 double-ended stud 12. The M14 nut 15 and the M14 double-ended stud 12 are connected by threads.

[0024] The part to be processed 10 has an inner through hole 10-2 in the middle position. An open pressure plate 9 is provided on the upper end face of the part to be processed 10. The part to be processed 10 and the open pressure plate 9 are sleeved on the front positioning boss 11-3 of the part clamping fixture 11. An M8 screw 8 is provided at the upper end of the open pressure plate 9. The M8 screw 8 passes through the open pressure plate 9 and the part to be processed 10 and is threadedly connected to the M8 threaded hole 11-4 of the part clamping fixture 11. The M8 screw 8 and the open pressure plate 9 press the part to be processed 10.

[0025] A method for machining the blade teeth of a molecular pump, comprising the following steps: S1. Tool preparation: Select the appropriate model of three-sided saw blade 1-3, three-sided saw blade 2-5 and shim 4 according to the tooth length, number of teeth and tooth thickness of the leaf teeth 10-1 of the part to be processed 10. The thickness of the three-sided saw blade 1-3 and three-sided saw blade 2-5 plus the shim 4 should be less than the gap between the roots of the two leaf teeth 10-1 of the part to be processed 10. S2. Tool assembly: Install the tool assembly fixture on the machining center tool holder 1, install two three-sided saw blades 3 and 5 on the tool fixture 2, separate the two three-sided saw blades 3 and 5 by a shim 4, and finally lock them by a pressure plate 7 and screws. Install the machining center tool holder 1 with the tool assembly installed on the machining center spindle. S3. The four-axis rotary table 13 is prepared and fixed on the worktable of the CNC machining center. The angle between the main body 13-1 of the four-axis rotary table and the worktable is adjusted. The degree of adjustment is the degree of the blade teeth 10-1 of the part 10 to be machined. By adjusting the angle, it can adapt to the angle changes of different models and blade teeth. The angle adjustment is to ensure that the blade teeth 10-1 and the saw blade remain parallel during the cutting process to achieve machining. S4. Preparation of part clamping fixture 11: Part clamping fixture 11 is installed on four-axis rotary table 13 by rear positioning boss 11-1 and locked and positioned by M14 double-ended studs 12, cover plate 14 and M14 nut 15. Part clamping fixture 11 rotates with the rotation of rotary table 13-2 of four-axis rotary table 13. Different rotation angles are set by the program to realize the processing of different number of blade teeth. The smaller the rotation angle, the more blade teeth are processed. S5. Installation of the part to be processed 10: The part to be processed 10 is positioned and installed on the front positioning boss 11-3 of the part clamping fixture 11 through the inner round through hole 10-2. It is locked by the open pressure plate 9 and the M8 screw 8. By adjusting the size of the front positioning boss 11-3, it can accommodate the clamping of different models and specifications of the part to be processed 10. By adjusting the rotation of the turntable 13-2, the rotation of the part clamping fixture 11 is driven, and finally the rotation of the part to be processed 10 is driven. S6. During the machining process, the outer circle of the tool set is aligned with the middle part of the outer circle of the workpiece 10 to be machined, and the two are tangent to complete the tool setting; the corresponding machining program is called and the machine tool is started. During the machining process, the three-sided saw blade 1 3, the three-sided saw blade 2 5 and the pad 4 of the tool set are rotated in place. The machine tool table moves, which drives the workpiece to move in a straight line toward the position of the tool set for cutting. During the cutting process, the saw blade gradually approaches the root of the blade tooth 10-1. After the blade tooth length is processed to the required position, the workpiece is removed. S7. One blade tooth 10-1 of the part to be processed 10 is processed into place. Then the four-axis rotary table 13 rotates and repeats the feed action of S6 to process the next blade tooth 10-1. After all blade teeth are processed, the part is removed, the screw assembly is loosened, the opening pressure plate is taken out, and the part to be processed 10 is taken out, thus completing the processing of one part to be processed 10.

[0026] In S1, the shim 4 is located between the three-sided saw blade 1 3 and the three-sided saw blade 2 5. The gap between the three-sided saw blade 1 3 and the three-sided saw blade 2 5 is the thickness of the blade tooth 10-1. The thickness of the shim 4 is the thickness of the blade tooth 10-1. By adjusting the thickness of the shim 4, different thicknesses of blade teeth can be processed.

[0027] It is understood that the present invention has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the invention. Furthermore, under the teachings of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present invention.

Claims

1. A method for machining the blade teeth of a molecular pump, implemented using a blade tooth machining device for a molecular pump, the machining device comprising a tool mounting assembly and a part machining assembly, the part machining assembly comprising a part clamping fixture (11), the part clamping fixture (11) having a rear positioning boss (11-1) at its bottom and a front positioning boss (11-3) at its top, characterized in that, The processing method includes the following steps: S1. Tool preparation: Select the appropriate model of three-sided saw blade one (3), three-sided saw blade two (5) and shim (4) according to the tooth length, number of teeth and tooth thickness of the blade teeth (10-1) of the part to be processed (10). The thickness of three-sided saw blade one (3) and three-sided saw blade two (5) plus shim (4) should be less than the gap at the root of the two blade teeth (10-1) of the part to be processed (10). S2. Tool assembly: Install the tool assembly fixture on the machining center tool holder (1), install two three-sided saw blades (3) and (5) on the tool fixture (2), separate the two three-sided saw blades (3) and (5) by a shim (4), and finally lock them by a pressure plate (7) and screws. Install the machining center tool holder (1) with the tool assembly installed on the machining center spindle. S3. Preparation of the four-axis rotary table (13): The four-axis rotary table (13) is fixed on the worktable of the CNC machining center. Adjust the angle between the main body of the four-axis rotary table (13-1) and the worktable. The degree of adjustment is the degree of the blade tooth (10-1) of the part to be processed (10). By adjusting the angle, it can adapt to the angle change of different models and different blade teeth (10-1). The angle adjustment is to ensure that the blade tooth (10-1) and the saw blade remain parallel during the cutting process to achieve processing. S4. Preparation of part clamping fixture (11): The part clamping fixture (11) is installed on the four-axis rotary table (13) by the rear positioning boss (11-1). It is locked and positioned by M14 double-ended studs (12), cover plate (14) and M14 nut (15). The part clamping fixture (11) rotates with the rotation of the rotary table surface (13-2) of the four-axis rotary table (13). Different rotation angles are set by the program to realize the processing of different number of blade teeth. The smaller the rotation angle, the more blade teeth are processed. S5. Installation of the part to be processed (10): The part to be processed (10) is positioned and installed on the front positioning boss (11-3) of the part clamping fixture (11) through the inner through hole (10-2). It is locked by the open pressure plate (9) and the M8 screw (8). By adjusting the size of the front positioning boss (11-3), it can be adapted to clamping different models and specifications of the part to be processed (10). By adjusting the rotation of the turntable (13-2), the part clamping fixture (11) is driven to rotate, and finally the part to be processed (10) is driven to rotate. S6. During the machining process, the outer circle of the tool set is aligned with the middle part of the outer circle of the workpiece (10) to be machined, and the two are tangent to complete the tool setting; call the corresponding machining program, start the machine tool, and during the machining process, the three-sided saw blade one (3), the three-sided saw blade two (5) and the pad (4) of the tool set remain rotating in place, the machine tool table moves, and drives the workpiece to move in a straight line towards the tool set position for cutting. During the saw blade cutting process, it gradually approaches the root of the blade tooth (10-1). After the blade tooth length is processed to the required position, the workpiece is removed. S7. One tooth (10-1) of the part to be processed (10) is processed into place. Then the four-axis rotary table (13) rotates and repeats the feed action of S6 to process the next tooth (10-1). After all the teeth (10-1) are processed, the part is removed, the screw assembly is loosened, the opening pressure plate is taken out, and the part to be processed (10) is taken out, thus completing the processing of one part to be processed (10).

2. The method for machining the blade teeth of a molecular pump according to claim 1, characterized in that, The tool mounting assembly consists of a machining center tool holder (1), a tool fixture (2), a shim (4), and a tool set. The bottom of the machining center tool holder (1) is connected to the tool fixture (2). The tool set is installed at the bottom of the tool fixture (2). The tool set consists of two tools. The shim (4) is placed between the two tools. The part processing assembly also includes a four-axis rotary table (13) and an open pressure plate (9). The part clamping fixture (11) is installed on the four-axis rotary table (13). The part clamping fixture (11) has a part to be processed (10) on it. The part to be processed (10) is clamped to the part clamping fixture (11) by the open pressure plate (9).

3. The method for machining the blade teeth of a molecular pump according to claim 2, characterized in that, The tool fixture (2) is a cylindrical structure with stepped ends. The side wall of the top cylinder of the tool fixture (2) is the tool holder connecting surface (2-1), which is locked to the tool holder (1) of the machining center. The side wall of the bottom cylinder of the tool fixture (2) is the positioning surface (2-2), and the bottom surface of the tool fixture (2) has an M10 threaded hole (2-3).

4. The method for machining the blade teeth of a molecular pump according to claim 3, characterized in that, The tool set consists of a three-sided saw blade one (3) and a three-sided saw blade two (5). The cutting edges of the three-sided saw blade one (3) and the three-sided saw blade two (5) are slightly higher than the main body to prevent the tool body from scratching the blade teeth (10-1) of the workpiece (10) during processing. A shim (4) is set between the three-sided saw blade one (3) and the three-sided saw blade two (5). The three-sided saw blade one (3), the shim (4) and the three-sided saw blade two (5) are installed on the positioning surface (2-2) of the tool fixture (2). The outer side of the three-sided saw blade one (3) abuts against the stepped surface of the tool fixture (2). A pressure plate (7) is set on the outer side of the three-sided saw blade two (5). An M10 screw (6) is set on the pressure plate (7) and threadedly connected to the M10 threaded hole (2-3) opened on the bottom surface of the tool fixture (2).

5. The method for machining the blade teeth of a molecular pump according to claim 4, characterized in that, The four-axis turntable (13) consists of a four-axis turntable body (13-1), a turntable disk (13-2), a turntable positioning hole (13-3), and a turntable support surface (13-4). The four-axis turntable body (13-1) is movably connected to the turntable support surface (13-4) set on both sides of the four-axis turntable body (13-1) through a rotating shaft. The four-axis turntable body (13-1) rotates under the action of the rotating shaft. The turntable disk (13-2) is set on the upper end surface of the four-axis turntable body (13-1). A turntable positioning hole (13-3) is opened in the middle position of the turntable disk (13-2). The turntable positioning hole (13-3) is a through hole.

6. The method for machining the blade teeth of a molecular pump according to claim 5, characterized in that, An M14 threaded hole (11-2) is opened in the middle position of the rear positioning boss (11-1), and an M8 threaded hole (11-4) is opened in the middle position of the front positioning boss (11-3). The rear positioning boss (11-1) is installed in the turntable positioning hole (13-3) of the four-axis turntable (13). The rear positioning boss (11-1) is movably connected to the four-axis turntable (13) through an M14 double-ended stud (12). One end of the M14 double-ended stud (12) is threadedly connected to the M14 threaded hole (11-2) of the rear positioning boss (11-1), and the other end of the M14 double-ended stud (12) passes through the turntable positioning hole (13-3) of the four-axis turntable (13). A cover plate (14) and an M14 nut (15) are fitted on the protruding part of the M14 double-ended stud (12). The M14 nut (15) is threadedly connected to the M14 double-ended stud (12).

7. The method for machining the blade teeth of a molecular pump according to claim 6, characterized in that, The part to be processed (10) has an inner through hole (10-2) in the middle position. An open pressure plate (9) is provided on the upper end face of the part to be processed (10). The part to be processed (10) and the open pressure plate (9) are sleeved on the front positioning boss (11-3) of the part clamping fixture (11). An M8 screw (8) is provided at the upper end of the open pressure plate (9). The M8 screw (8) passes through the open pressure plate (9) and the part to be processed (10) and is threadedly connected to the M8 threaded hole (11-4) of the part clamping fixture (11). The M8 screw (8) and the open pressure plate (9) press the part to be processed (10) tightly.

8. The method for machining the blade teeth of a molecular pump according to claim 1, characterized in that, The shim (4) in S1 is between the three-sided saw blade one (3) and the three-sided saw blade two (5). The gap between the three-sided saw blade one (3) and the three-sided saw blade two (5) is the thickness of the blade tooth (10-1). The thickness of the shim (4) is the thickness of the blade tooth. Different thicknesses of blade teeth can be processed by adjusting the thickness of the shim (4).

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