Dynamic compensation method for full closed loop control of grating ruler based driver of wafer scriber

By combining full closed-loop control with dynamic compensation methods for rotary encoder and grating ruler signals, the problem of decreased Y-axis accuracy in the dicing machine was solved, achieving high-precision and reliable cutting results and extending the equipment's lifespan.

CN117631608BActive Publication Date: 2026-05-29JIANGSU JCA ELECTRONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGSU JCA ELECTRONICS TECH CO LTD
Filing Date
2022-08-16
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

The Y-axis motion accuracy of existing dicing machines decreases over time, leading to a reduction in cutting quality. This can cause loss of control, especially when the grating ruler signal is poor or subject to electromagnetic interference, thus affecting the accuracy requirements of wafer production.

Method used

A fully closed-loop control method is adopted, which combines the signals from the motor rotary encoder and the grating ruler to monitor the position difference and compare it with the factory compensation table of the laser interferometer for dynamic compensation. The accuracy and rigidity are ensured by calculation through computer terminal and verification through microscope.

Benefits of technology

It improves the accuracy and reliability of the dicing machine, extends its service life, and ensures that high-precision cutting can still be maintained in the event of grating ruler failure or interference.

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Abstract

The application discloses a dynamic compensation method for full closed loop control of a grating ruler-based driver of a scriber, and comprises the following steps: realizing closed loop control positioning of the scriber through motor self-rotation encoder signals and grating ruler signals; long-term monitoring of position difference value data, comparison and analysis of data after grating ruler and rotation encoder failure with factory laser interferometer data to obtain changes of the scriber in service life; and dynamic compensation of precision and rigidity of the scriber. The application takes rotation encoders and grating rulers as main measuring devices, has higher data precision, realizes closed loop control, and improves the precision and reliability of the scriber; the dynamic compensation of precision and rigidity of the scriber can effectively prolong the service life of the scriber, and when the scriber approaches the designed service time and the precision deteriorates, the required precision can be effectively achieved.
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