Automatic flame polishing method for quartz wafer

Abstract

The application provides an automatic flame polishing method for a quartz wafer, which comprises the following steps: placing a quartz wafer to be polished on a clamp, wherein the clamp comprises a roller provided with a groove, and the edge of the quartz wafer is placed in the groove; controlling a polishing gun to be aimed at the surface of the quartz wafer; and controlling the polishing gun to spray a flame and automatically polish the quartz wafer according to a set moving track while the roller drives the quartz wafer to rotate. Compared with traditional manual polishing, the method has high efficiency, stable polishing, uniform appearance of the polished quartz wafer, and good consistency, so that the processing yield is improved. Moreover, the quartz wafer is driven to rotate by the roller, so that the bumping problem caused by repeated clamping during the polishing process of the quartz wafer is avoided.

Description

Technical Field

[0001] This invention relates to the field of quartz processing technology, and in particular to an automatic flame polishing method for quartz discs. Background Technology

[0002] In the quartz semiconductor industry, quartz sheets are used to manufacture the required components, especially quartz wafers. Due to their shape characteristics, they have extremely high requirements for clamping and polishing techniques. During the process, operators usually need to repeatedly adjust the clamping position and use flame polishing to achieve a crystal-clear appearance with near-zero defects. This not only suffers from the problems of low efficiency and high cost of manual polishing, but also from operator fatigue due to the complexity and long duration of the operation. Improper operation can lead to unsatisfactory polishing results for the quartz wafers, or damage from repeated clamping, resulting in chipping, scratches, uneven polishing, and other appearance quality problems. Alternatively, the sheet may deform after flame polishing, making subsequent processes impossible and forcing the sheet to be scrapped.

[0003] Therefore, there is an urgent need for an automated flame polishing method for quartz discs to improve the above-mentioned problems. Summary of the Invention

[0004] The purpose of this invention is to provide an automatic flame polishing method for quartz discs, which improves the polishing efficiency and uniformity of quartz discs and avoids the collision problem caused by repeated clamping during the polishing process.

[0005] In a first aspect, the present invention provides an automatic flame polishing method for quartz discs, comprising:

[0006] The quartz disc to be polished is placed in a clamp, which includes a roller with a groove, and the edge of the quartz disc is placed in the groove;

[0007] Control the polishing gun to aim at the surface of the quartz disc;

[0008] While the rollers rotate, driving the quartz disc to rotate, the polishing gun is controlled to spray flames and automatically polish the quartz disc according to the set movement trajectory.

[0009] The beneficial effects of the method of the present invention are as follows: by placing the quartz disc to be polished in a fixture, the fixture including a roller with a groove, the edge of the quartz disc is placed in the groove; the polishing gun is controlled to be aligned with the surface of the quartz disc; while the roller rotates and drives the quartz disc to rotate, the polishing gun is controlled to spray flame and automatically polish the quartz disc according to the set movement trajectory. Compared with traditional manual polishing, it is not only more efficient, but also more stable. The polished quartz disc has a more uniform appearance and better consistency, thereby improving the processing yield. Moreover, using the roller to drive the quartz disc to rotate can avoid the collision problem caused by repeated clamping during the polishing process.

[0010] Optionally, controlling the polishing gun's flame includes:

[0011] The size of the polishing gun's flame is adjusted according to the thickness and diameter of the quartz disc. The advantage of this is that adjusting the flame size based on the quartz disc's thickness and diameter improves polishing stability and increases processing yield.

[0012] Optionally, the automatic polishing of the quartz disc according to the set movement trajectory includes:

[0013] The polishing gun is controlled to move inwards along the diameter of the quartz disc in circles according to a preset time interval to automatically polish the quartz disc. The beneficial effect is that by setting the polishing gun to move inwards along the diameter of the quartz disc in circles according to a preset time interval for automatic polishing, the polishing is more uniform, improving yield and efficiency, and shortening product delivery time.

[0014] Optionally, the rollers include sliding rollers, lifting rollers, and fixed rollers;

[0015] The sliding roller, lifting roller, and fixed roller are arranged alternately from left to right. The grooves on the sliding roller and fixed roller form a clamping area, and the edge of the quartz disc is placed on the clamping area. The advantage is that by setting one active sliding roller and two driven fixed rollers alternately from left to right, the problem of bumping and knocking caused by repeated clamping during the polishing process of the quartz disc can be avoided, and the stability is high.

[0016] Optionally, the interval between the sliding roller and the lifting roller is adjustable. The advantage is that by making the interval between the sliding roller and the lifting roller adjustable, it can accommodate the polishing of quartz discs of different diameters.

[0017] Optionally, the height of the lifting roller is less than the height of the sliding roller, or the height of the lifting roller is less than the height of the fixed roller. This has the advantage of lowering the center of gravity of the quartz disc, preventing it from falling off during polishing.

[0018] Optionally, at least two opposite sides of the groove are beveled, and the contact between the beveled surface and the quartz disc is point contact. Furthermore, the opening size of the groove gradually decreases as the groove depth increases, allowing for the lifting roller and fixing roller to maintain contact. The advantage lies in that by setting the two opposite sides of the groove to be beveled, and the opening size of the groove gradually decreasing as the groove depth increases, point contact is formed between the groove and the quartz disc. This reduces damage to the surface of the quartz disc during polishing, improves product quality, and the wider top and narrower bottom of the groove makes it suitable for polishing quartz discs of different thicknesses.

[0019] Optionally, the sliding roller and the fixed roller work together to drive the quartz disc to rotate;

[0020] The lifting roller moves horizontally to limit the swing amplitude of the quartz disc during rotation, and the horizontal direction intersects the plane where the quartz disc is located; or the lifting roller moves vertically via a lifting device to support the bottom of the quartz disc. Its beneficial effects are that it not only limits the swing amplitude of lighter quartz discs but also supports heavier quartz discs, thereby reducing the wear of heavier quartz discs and improving the effect of flame polishing and product quality.

[0021] Optionally, placing the quartz disc to be polished before the fixture further includes:

[0022] The polishing gun is controlled to heat the fixture.

[0023] The quartz discs to be polished are cleaned. The beneficial effect is that by controlling the polishing gun to heat the fixture, the surface of the fixture is cleaned, preventing particulate matter on the fixture surface from contaminating the quartz discs. Cleaning the quartz discs to be polished facilitates subsequent flame polishing, improving yield.

[0024] Optionally, it may also include setting up a first robotic arm and a second robotic arm;

[0025] The first robotic arm is used to control the polishing gun;

[0026] The second robotic arm is used to grip the polished and naturally cooled quartz discs and place new quartz discs onto the fixture. Its advantage lies in improving production efficiency. Attached Figure Description

[0027] Figure 1A schematic flowchart of an automatic flame polishing method for quartz discs provided in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the fixture provided in an embodiment of the present invention;

[0029] Figure 3 This is a schematic diagram illustrating the polishing process of a quartz disc provided in an embodiment of the present invention.

[0030] Figure 4 A cross-sectional view of the groove provided in an embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram of the two lifting rollers combined according to an embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of the two lifting rollers after separation, as provided in an embodiment of the present invention. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0034] like Figure 1-6 As shown, the present invention provides an automatic flame polishing method for a quartz disc 1, comprising:

[0035] S101, the quartz disc 1 to be polished is placed in a fixture, the fixture including a roller 3 with a groove 2, the edge of the quartz disc 1 being placed within the groove 2. The roller 3 is preferably made of graphite, which improves the polishing effect of the quartz. To improve production efficiency, a first robotic arm 10 and a second robotic arm (not shown) are also included; the first robotic arm 10 is used to control the polishing gun 4; the second robotic arm is used to place the quartz disc 1 to be polished onto the fixture. It is possible that both the sliding roller 5 and the fixed roller 7 are provided with grooves 2, such as... Figure 4As shown, by setting the two opposite sides of the groove 2 as inclined surfaces, and the opening size of the groove 2 gradually decreases as the depth of the groove 2 increases, the groove 2 and the quartz disc 1 form point contact, which can reduce the damage to the surface of the quartz disc 1 during the polishing process and improve product quality. Moreover, setting the groove 2 to be larger at the top and smaller at the bottom can be used for polishing quartz discs 1 of different thicknesses.

[0036] In some embodiments, to clean the surface of the fixture and prevent particulate matter from contaminating the quartz disc 1 and improving yield, placing the quartz disc 1 to be polished before placing it in the fixture further includes: controlling the polishing gun 4 to heat the fixture; and cleaning the quartz disc 1 to be polished. The heating of the fixture can be performed by an operator using a manual torch, or by the first robotic arm 10 controlling the polishing gun 4 to heat the fixture.

[0037] In some embodiments, to avoid the bumping problem caused by repeated clamping during the polishing process of the quartz disc 1, and to ensure high stability, such as... Figure 2 As shown, the roller 3 includes a sliding roller 5, a lifting roller 6, and a fixed roller 7; the sliding roller 5, the lifting roller 6, and the fixed roller 7 are arranged alternately from left to right, and the grooves 2 on the sliding roller 5 and the fixed roller 7 form a clamping area, and the edge of the quartz disc 1 is placed on the clamping area.

[0038] In some specific embodiments, in order to accommodate the polishing of quartz discs 1 of different diameters, such as Figure 2 As shown, the interval between the sliding roller 5 and the lifting roller 6 is adjustable.

[0039] In other embodiments, to lower the center of gravity of the quartz disc 1 and prevent it from falling off during polishing, such as... Figure 2 As shown, the height of the lifting roller 6 is less than the height of the sliding roller 5, or the height of the lifting roller 5 is less than the height of the fixed roller 7.

[0040] In some other embodiments, to protect the operating table 9 from overheating and melting, such as Figure 2 As shown, it also includes a heat insulation layer 8 and an operating table 9; the heat insulation layer 8 is disposed on the operating table 9; the sliding rollers 5, lifting rollers 6, and fixed rollers 7 are all disposed on the heat insulation layer 8. Preferably, the heat insulation layer 8 is made of graphite, which can disperse heat and prevent the operating table 9 from locally overheating and melting.

[0041] S102, control the polishing gun 4 to be aligned with the surface of the quartz disc 1.

[0042] S103, while the roller 3 is rotating and driving the quartz disc 1 to rotate, the polishing gun 4 is controlled to spray flames and automatically polish the quartz disc 1 according to the set movement trajectory.

[0043] In some embodiments, in order to improve the stability of polishing and increase the processing yield, controlling the flame of the polishing gun 4 includes adjusting the size of the flame of the polishing gun 4 according to the thickness and diameter of the quartz disc 1.

[0044] In some embodiments, in order to make the polishing more uniform, improve yield and efficiency, and shorten product delivery time, the automatic polishing of the quartz disc 1 according to the set movement trajectory includes: controlling the polishing gun 4 to move inward along the diameter direction of the quartz disc 1 circle by circle to automatically polish the quartz disc 1 according to a preset time interval.

[0045] In some embodiments, to improve production efficiency, a second robotic arm (not shown) is also included; the second robotic arm is used to grip the quartz disc 1 that has been polished and naturally cooled, and to place a new quartz disc 1 onto the fixture.

[0046] In other embodiments, such as Figure 5 and Figure 6As shown, there are two lifting rollers 6, and both lifting rollers 6 are mounted on a roller frame (not shown) via roller shafts 11, and both lifting rollers 6 can move horizontally along the roller shafts 11; the bottom of the roller frame is connected to a lifting device (not shown) located in the operating table 9, and the roller frame moves vertically via the lifting device; the two separated lifting rollers 6 are located on opposite sides of the quartz disc 1, used to limit the swing amplitude of the quartz disc 1 during rotation, and the two combined lifting rollers 6 are located on the... Below the quartz disc 1, a support is provided. The sliding roller 5 and the fixed roller 7 work together to rotate the quartz disc 1. The two separated lifting rollers 6 are located on the side of the quartz disc 1, limiting the swing amplitude of the lighter quartz disc 1. The two combined lifting rollers 6 are moved to below the quartz disc 1 by a lifting device to support the heavier quartz disc 1, thereby reducing the wear of the heavier quartz disc 1 and improving the flame polishing effect and product quality. The lifting device can be a lifting slide rail, an electric push rod, or a pneumatic push rod. The lifting rollers 6 are sleeved on the roller shaft 11. The distance between the two lifting rollers 6 can be adjusted by threaded connection, or by setting a limiting member 12 on the outer side of each of the two lifting rollers 6, using the limiting member 12 to change the distance between the two lifting rollers 6 and fix their positions. It is worth noting that all the rollers are mounted on the roller frame via roller shafts, and the roller shafts and roller frame are rotatable; it also includes a drive motor (not shown) located inside the operating table 9, the output end of which is connected to one end of the roller shaft of the fixed roller 7 via a belt; as Figure 6 As shown, when the two lifting rollers 6 are separated, there is a gap between the bottom of the quartz disc 1 and the roller shaft 11 of the lifting roller 6, which reduces wear and improves product quality.

[0047] Compared with traditional manual polishing, the above method is not only more efficient, but also more stable. The polished quartz disc 1 has a more uniform appearance and better consistency, thereby improving the processing yield. Moreover, using the roller 3 to drive the quartz disc 1 can avoid the collision problem caused by repeated clamping during the polishing process.

[0048] For ease of understanding, such as Figure 2 and Figure 3 As shown in the figure, this embodiment further elaborates on the specific implementation method of the above method in conjunction with a specific application scenario, which includes the following steps:

[0049] Step a: First, heat the graphite fixture (sliding roller 5, lifting roller 6 and fixed roller 7) to clean the graphite surface.

[0050] Step b: The second robotic arm places the cleaned quartz disc 1 to be polished onto the graphite fixture, and adjusts the interval between the sliding roller 5 and the lifting roller 6 according to the diameter of the quartz disc 1.

[0051] Step c: The first robotic arm 10 controls the polishing gun 4 to align with the upper / lower surface of the quartz disc 1. The size of the flame sprayed by the polishing gun 4 is adjusted according to the thickness and diameter of the quartz disc 1. It is worth noting that two robotic arms and corresponding polishing guns 4 can also be set up to facilitate the simultaneous polishing of the upper and lower surfaces of the quartz disc 1.

[0052] In step d, while the sliding roller 5 rotates, driving the quartz disc 1 to rotate, the first robotic arm 10 controls the polishing gun 4 to move inward along the diameter direction of the quartz disc 1 circle by circle according to a preset time interval to automatically polish the quartz disc 1. During the polishing process, the flame size of the polishing gun 4 can be adjusted according to actual needs or kept stable.

[0053] In step e, the second robotic arm picks up the polished and naturally cooled quartz disc 1 and places a new quartz disc 1 onto the fixture for further processing. The specifications of the new quartz disc 1 can be the same as or different from the previous quartz disc 1.

[0054] This invention employs a first robotic arm to automatically flame-polish a quartz disc 1. A specially designed graphite fixture uses a double-roller configuration, with a groove 2 carved between the two rollers to hold the quartz disc 1 and create frictional contact. This friction causes the quartz disc 1 to rotate. While the first robotic arm 10 automatically polishes, the sliding rollers 5 of the specially designed graphite fixture also rotate to adjust the polishing surface of the quartz disc 1. This method requires less operator skill. The flame is adjusted to a suitable level based on the product's thickness and size (e.g., by pre-configuring the robotic arm), and a short observation period (e.g., by visual recognition equipment) is performed to determine if it is functioning correctly. This saves on the company's labor costs. The automated polishing by the robotic arm prevents product deformation during polishing, ensures uniform polishing, improves yield and efficiency, and shortens product delivery time.

[0055] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An automatic flame polishing method for quartz discs, characterized in that, include: The quartz disc to be polished is placed in a clamp, which includes a roller with a groove, and the edge of the quartz disc is placed in the groove; Control the polishing gun to aim at the surface of the quartz disc; While the roller rotates and drives the quartz disc to rotate, the polishing gun is controlled to spray flames and automatically polish the quartz disc according to the set movement trajectory. The rollers include sliding rollers, lifting rollers, and fixed rollers; The sliding roller, lifting roller, and fixed roller are arranged alternately from left to right. The grooves on the sliding roller and fixed roller form a clamping area, and the edge of the quartz disc is placed on the clamping area. At least one groove has two opposite sides that are inclined, the contact between the inclined surface and the quartz disc is a point contact, and the opening size of the groove gradually decreases as the groove depth increases; The sliding roller and the fixed roller work together to drive the quartz disc to rotate; The lifting roller moves horizontally to limit the swing amplitude of the quartz disc when it rotates, and the horizontal direction intersects the plane where the quartz disc is located; or the lifting roller moves vertically through a lifting device to support the bottom of the quartz disc. The lifting rollers are provided in two parts, and both lifting rollers are mounted on a roller frame via roller shafts. Both lifting rollers can move horizontally along the roller shafts. The bottom of the roller frame is connected to a lifting device located in the operating table, and the roller frame can move vertically via the lifting device. The two separated lifting rollers are located on opposite sides of the quartz disc to limit the swing amplitude of the quartz disc during rotation. The two combined lifting rollers are located below the quartz disc to support it.

2. The method according to claim 1, characterized in that, The control of the polishing gun's flame includes: The size of the flame emitted by the polishing gun is adjusted according to the thickness and diameter of the quartz disc.

3. The method according to claim 1, characterized in that, The automatic polishing of the quartz disc according to the set movement trajectory includes: The polishing gun is controlled to move inward along the diameter of the quartz disc in circles according to a preset time interval to automatically polish the quartz disc.

4. The method according to claim 1, characterized in that, The interval between the sliding roller and the lifting roller is adjustable.

5. The method according to claim 1, characterized in that, The height of the lifting roller is less than the height of the sliding roller, or the height of the lifting roller is less than the height of the fixed roller.

6. The method according to claim 1, characterized in that, The method of placing the quartz disc to be polished before placing it in the fixture also includes: The polishing gun is controlled to heat the fixture. Clean the quartz disc to be polished.

7. The method according to any one of claims 1-6, characterized in that, It also includes setting up a first robotic arm, and / or a second robotic arm; The first robotic arm is used to control the polishing gun; The second robotic arm is used to grip the polished and naturally cooled quartz discs and place new quartz discs onto the gripper.

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