Fully automatic wafer expansion equipment

Abstract

The present invention discloses a fully automatic crystal expansion device, which includes a workbench, a material storage mechanism, a material picking mechanism, a film solidification mechanism, a film expansion mechanism, a visual inspection mechanism, and a film cutting mechanism. The material storage mechanism, the material picking mechanism, the film solidification mechanism, the film expansion mechanism, the visual inspection mechanism, and the film cutting mechanism are all arranged on the workbench, and the material picking mechanism, the film cutting mechanism, and the visual inspection mechanism are all able to move freely above the workbench. The material storage mechanism is used to store workpieces, and the material picking mechanism is used to load or unload workpieces. The film solidification mechanism is used to fix or release the workpiece, the die expansion mechanism is used to stretch the workpiece located on the film solidification mechanism, the visual inspection mechanism is used to detect the spacing between each grain on the stretched workpiece, and the film cutting mechanism is used to cut the edge of the stretched workpiece. Through the above arrangement, the problem of low production efficiency caused by the low degree of automation of existing crystal expansion machines is effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal expansion equipment, and in particular to a fully automatic crystal expansion equipment. Background Art

[0002] The crystal expansion process refers to the process of adhering concentrated grains through film materials, then using a crystal expansion mechanism to stretch the film material to expand the spacing between the grains until the desired grain spacing is reached, and then using a crystal bonding mechanism to transfer the grains to the circuit.

[0003] However, the current crystal expansion machine requires manual operation of each step of the crystal expansion work during the stretching and film expansion process, which is cumbersome, has a low degree of automation and low production efficiency. Summary of the Invention

[0004] The present invention mainly provides a fully automatic crystal expansion device to solve the problem of low production efficiency caused by low automation level of existing crystal expansion machines.

[0005] To achieve the above-mentioned purpose, the present invention proposes a fully automatic crystal expansion device, which includes a workbench, a material storage mechanism, a material taking mechanism, a film solidification mechanism, a film expansion mechanism, a visual inspection mechanism and a film cutting mechanism; wherein,

[0006] The material storage mechanism, the material taking mechanism, the film fixing mechanism, the film expanding mechanism, the visual inspection mechanism and the film cutting mechanism are all arranged on the workbench, and the material taking mechanism, the film cutting mechanism and the visual inspection mechanism are all able to move freely above the workbench;

[0007] The material storage mechanism is used to store the workpiece, and the material taking mechanism is used to clamp the workpiece from the material storage mechanism and transfer the workpiece to the film solidification mechanism, or to clamp the processed workpiece from the film solidification mechanism and transfer the processed workpiece to the material storage mechanism;

[0008] The film solidifying mechanism is used to fix or release the workpiece, the mold expanding mechanism is used to stretch the workpiece located on the film solidifying mechanism, the visual inspection mechanism is used to detect the spacing between each grain on the stretched workpiece, and the film cutting mechanism is used to cut the edge of the stretched workpiece.

[0009] In some embodiments of the present invention, the film expansion mechanism includes a plurality of stretching modules, each of which is disposed on the workbench and spaced apart along the circumferential direction of the film solidification mechanism. Each of the stretching modules has a clamping state for clamping an edge of the workpiece and a releasing state for releasing the edge of the workpiece.

[0010] In the clamping state, each of the stretching modules stretches the workpiece in a direction away from the center of the workpiece; in the releasing state, each of the stretching modules releases the workpiece.

[0011] In some embodiments of the present invention, the stretching module includes a driving component and a clamping component, the driving component is installed on the workbench, the clamping component is connected to the driving component, the driving component is used to drive the clamping component to move toward or away from the solid film mechanism, and the clamping component is used to clamp or release the workpiece.

[0012] In some embodiments of the present invention, the film solidifying mechanism includes a lifting component and an adsorption component, the lifting component is installed on the workbench, the adsorption component is connected to the lifting component, the lifting component is used to drive the adsorption component to move in the up and down directions, and the adsorption component is used to adsorb, fix or release the workpiece.

[0013] In some embodiments of the present invention, the adsorption component includes an adsorption part and a pneumatic part. The adsorption part has an adsorption surface, and the adsorption surface is provided with a plurality of adsorption holes. The adsorption part is connected to the pneumatic part through an air circuit. The adsorption part adsorbs, fixes or releases the workpiece through the adsorption holes under the drive of the pneumatic part.

[0014] In some embodiments of the present invention, the fully automatic crystal expansion equipment further includes a first drive module and a second drive module, the first drive module is disposed on the workbench, the second drive module is connected to the first drive module, and the material taking mechanism, the film cutting mechanism, and the visual inspection mechanism are all connected to the second drive module;

[0015] The first driving module is used to drive the second driving module to move back and forth along a first direction, and the second driving module is used to drive the material picking mechanism, the film cutting mechanism and the visual inspection mechanism to move back and forth along a second direction, and the first direction is perpendicular to the second direction.

[0016] In some embodiments of the present invention, the film cutting mechanism includes a vertically movable module and a cutting die assembly, the vertically movable module is connected to the second driving module, the cutting die assembly is connected to the vertically movable module, the vertically movable module is used to drive the cutting die assembly to move in the vertical direction, and the cutting die assembly is used to cut the edge of the workpiece.

[0017] In some embodiments of the present invention, the material picking mechanism includes a clamping assembly and a power part, the power part is installed on the side of the cutting die assembly facing the material storage mechanism, the clamping assembly is connected to the power part, and the power part is used to drive the clamping assembly to clamp or release the workpiece.

[0018] In some embodiments of the present invention, the visual detection mechanism includes a visual detection component and a light source, both of which are connected to the second driving module, the light source is used to provide light for the visual detection component, and the visual detection component is used to detect the spacing information between each grain on the stretched workpiece;

[0019] The visual inspection component and the film expansion mechanism are both in communication with an external control system, and the external control system controls the stretching force of the film expansion mechanism on the workpiece based on the spacing information.

[0020] In some embodiments of the present invention, the material storage mechanism includes a loading frame assembly and a unloading frame assembly, both of which are arranged on the workbench, the loading frame assembly is used to store the workpiece to be processed, and the unloading frame assembly is used to store the processed workpiece.

[0021] The beneficial effects of the present invention are: different from the prior art, the fully automatic crystal expansion equipment disclosed in the present invention is able to realize automatic loading and unloading, automatically stretch the film material through a material storage mechanism, a material taking mechanism, a film solidifying mechanism, a film expanding mechanism, a visual inspection mechanism and a film cutting mechanism, and can also intelligently monitor the spacing between each chip in real time during film expansion to better control the spacing between each chip. After the film expansion is completed, it can also realize automatic film cutting without manual operation. With such a setting, the degree of automation is high, the functionality is strong, the accuracy of expanding the spacing between each chip is high, and the production efficiency is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0023] Figure 1 This is a structural diagram of an embodiment of a fully automatic crystal expansion device of the present invention;

[0024] Figure 2 This is a schematic top view of the structure of an embodiment of the fully automatic crystal expansion equipment of the present invention;

[0025] Figure 3 This is a structural diagram of an embodiment of a stretching module of the present invention;

[0026] Figure 4 It is a structural schematic diagram of an embodiment of a film-fixing mechanism of the present invention;

[0027] Figure 5 It is a structural schematic diagram of an embodiment of the film cutting mechanism and the material taking mechanism of the present invention;

[0028] Figure 6 Schematic diagram of the structure of a visual inspection mechanism according to an embodiment of the present invention.

[0029] Description of Figure Numbers:

[0030] 100. Fully automatic crystal expansion equipment; 101. First drive module; 102. Second drive module; 1. Workbench; 11. Mounting surface; 2. Material storage mechanism; 21. Loading frame assembly; 22. Unloading frame assembly; 3. Removal mechanism; 31. Clamping assembly; 32. Power component; 4. Film solidification mechanism; 41. Lifting assembly; 42. Adsorption assembly; 421. Adsorption component; 4211. Adsorption surface; 4212. Adsorption hole; 43. Support frame; 44. Carrying ring; 5. Film expansion mechanism; 51. Stretching module; 511. Driving assembly; 512. Clamping assembly; 5121. Pneumatic clamp; 6. Visual inspection mechanism; 61. Visual inspection assembly; 62. Light source; 63. Vertical sliding module; 7. Film cutting mechanism; 71. Vertical moving module; 72. Cutting die assembly; 721. Connecting frame; 722. Cutting knife; 723. Film cutting cylinder.

[0031] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0033] In the present invention, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0034] In addition, in the present invention, descriptions such as "first" and "second" are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0035] The present invention proposes a fully automatic crystal expansion device, referring to Figure 1 The fully automatic crystal expansion equipment 100 can automatically perform crystal expansion operations on the workpiece to be processed, so as to expand the spacing between the chips arranged on the workpiece. It has a high degree of automation and strong functionality, and does not require manual operation throughout the process. It not only greatly improves production efficiency, but also can well ensure the accuracy of the spacing between the chips during the crystal expansion process, and the processing quality is guaranteed.

[0036] The workpiece can be a combination of a membrane and a ring. The membrane is adhered to and covers the ring, and the ring is used to carry the membrane, making it easier to remove the material. Multiple chips are adhered to the membrane and positioned within the hollow region of the ring. The chips can be arranged in a matrix or other configuration.

[0037] It is understandable that the workpiece can also be other products that need to be enlarged or stretched and flattened. For the sake of convenience, the workpieces mentioned below are all described by taking membrane materials and ring bodies as examples.

[0038] Reference Figure 1 and Figure 2 The fully automatic crystal expansion equipment 100 includes a workbench 1, a material storage mechanism 2, a material removal mechanism 3, a film solidification mechanism 4, a film expansion mechanism 5, a visual inspection mechanism 6, and a film cutting mechanism 7. Among them, the material storage mechanism 2, the material removal mechanism 3, the film solidification mechanism 4, the film expansion mechanism 5, the visual inspection mechanism 6, and the film cutting mechanism 7 are all arranged on the workbench 1, and the material removal mechanism 3, the film cutting mechanism 7, and the visual inspection mechanism 6 are all able to move freely above the workbench 1.

[0039] The stocking mechanism 2 is used to store workpieces, the picking mechanism 3 is used to pick up workpieces from the stocking mechanism 2 and transfer them to the film-forming mechanism 4, or the picking mechanism 3 is used to pick up processed workpieces from the film-forming mechanism 4 and transfer them to the stocking mechanism 2. The film-forming mechanism 4 is used to secure or release the workpiece, the die-expanding mechanism is used to stretch the workpiece on the film-forming mechanism 4, the visual inspection mechanism 6 is used to detect the spacing between individual grains on the stretched workpiece, and the film-cutting mechanism 7 is used to trim the edges of the stretched workpiece.

[0040] With this arrangement, the material storage mechanism 2 can store workpieces to be processed and workpieces that have been processed, thereby meeting the requirements of sufficient material preparation and timely material unloading and storage, ensuring the production rhythm and continuity, and meeting the continuity of production and processing, thereby greatly improving the production efficiency of the fully automatic wafer expansion equipment 100 to a certain extent;

[0041] The material taking mechanism 3 can automatically take the material from the material storage mechanism 2, and can also automatically return the processed workpiece to the material storage mechanism 2 for unloading, which well ensures the efficiency of loading and unloading the workpiece, and helps to improve the overall production efficiency; the film fixing mechanism 4 can automatically adsorb and fix the workpiece without manual operation, which not only shortens the time for fixing the workpiece and is conducive to improving production capacity, but also can stably fix the workpiece, which helps the film expanding mechanism 5 to stretch the film material, reduce the error of the film expanding mechanism 5, and improve the quality of film pulling and crystal expansion;

[0042] Furthermore, the visual inspection mechanism 6 monitors the spacing between individual chips during the film stretching process in real time, enabling precise expansion of the spacing between chips based on processing requirements. This intelligent system helps improve production and processing quality. Based on the above solution, the fully automatic wafer expansion equipment 100 has a high degree of automation, strong functionality, and high processing precision, significantly improving production efficiency.

[0043] Reference Figures 1 to 6 The film expansion mechanism 5 includes a plurality of stretching modules 51, each of which is disposed on the workbench 1 and spaced apart along the circumference of the film solidification mechanism 4. Each stretching module 51 has a clamping state for clamping the edge of the workpiece and a releasing state for releasing the edge of the workpiece. In the clamping state, each stretching module 51 stretches the workpiece in a direction away from the center of the workpiece, and in the releasing state, each stretching module 51 releases the workpiece.

[0044] The multiple stretching modules 51 work together, with each stretching module 51 automatically stretching the workpiece in a direction away from the center of the workpiece. This automatically stretches the film material, expanding it and increasing the spacing between the individual chips. Furthermore, the multiple stretching modules 51 stretch the film material uniformly, which helps to evenly expand the spacing between the individual chips and improve the quality of the stretching and crystal expansion process.

[0045] It is worth noting that the multiple stretching modules 51 are all on the same horizontal plane on the workbench 1, so that the film material can be stretched on the same horizontal plane during the stretching process, so that the film material has better horizontal tension, which can effectively avoid the phenomenon of uneven spacing between chips.

[0046] The stretching module 51 includes a driving component 511 and a clamping component 512. The driving component 511 is installed on the workbench 1, and the clamping component 512 is connected to the driving component 511. The driving component 511 is used to drive the clamping component 512 to move toward or away from the solid film mechanism 4, and the clamping component 512 is used to clamp or release the workpiece.

[0047] Among them, the driving component 511 can include a servo motor and a screw slide module. The servo motor cooperates with the screw slide module, and the servo motor drives the screw slide module to work. The clamping component 512 is installed on the sliding terminal of the screw slide module, so that the servo motor can drive the clamping component 512 to move through the screw slide module.

[0048] The driving component 511 may also be a linear motor module, and the clamping component 512 is mounted on the moving terminal of the linear motor module. The driving component 511 may also be other power components with linear motion function, which is not specifically limited here.

[0049] The clamping assembly 512 includes a pneumatic clamp 5121 and a cylinder (not marked in the figure). The cylinder is fixedly mounted on the sliding terminal of the driving assembly 511. The pneumatic clamp 5121 is connected to the cylinder. The cylinder is used to drive the pneumatic clamp 5121 to close or open, so that the pneumatic clamp 5121 can clamp or release the edge of the film material.

[0050] The clamping assembly 512 may also be other structural members with clamping and fixing functions, as long as they can fix the edge of the film material for stretching, and they are not listed here one by one.

[0051] Continue to refer to Figures 1 to 6 The film solidifying mechanism 4 includes a lifting component 41 and an adsorption component 42. The lifting component 41 is installed on the workbench 1. The adsorption component 42 is connected to the lifting component 41. The lifting component 41 is used to drive the adsorption component 42 to move in the up and down directions. The adsorption component 42 is used to adsorb and fix or release the workpiece.

[0052] The workbench 1 has a mounting surface 11, and a plurality of stretching modules 51 are mounted on the mounting surface 11. The mounting surface 11 is provided with a through hole (not shown in the figure), and the plurality of stretching modules 51 are spaced apart in the circumferential direction around the through hole. The lifting assembly 41 includes a lifting module, which is mounted in the workbench 1, and the sliding terminal of the lifting module is connected to the adsorption assembly 42. The adsorption assembly 42 also passes through the through hole, and the lifting module is used to drive the adsorption assembly 42 to move vertically, so that the adsorption assembly 42 can drive the workpiece to move vertically, so as to be able to adaptively adjust the vertical height position of the workpiece, so as to facilitate the clamping assembly 512 to clamp the edge of the film material.

[0053] Such an arrangement can meet the stretching processing requirements of workpieces of different sizes, and greatly improve the processing performance of the fully automatic crystal expansion equipment 100.

[0054] The lifting module may be a screw slide module or a linear motor module, or may be other power components with linear motion functions, which are not specifically limited here.

[0055] The suction assembly 42 includes a suction member 421 and a pneumatic member (not shown). The suction member 421 is fixedly connected to the sliding terminal of the lifting module via a support frame 43. The suction member 421 has a suction surface 4211 with a plurality of suction holes 4212. The suction member 421 is connected to the pneumatic member through an air path. Driven by the pneumatic member, the suction member 421 suctions and fixes or releases the workpiece through the suction holes 4212.

[0056] The adsorption assembly 42 further includes a supporting ring 44 , which is mounted on the mounting surface 11 . The supporting ring 44 is used to support the adsorption member 421 so that the adsorption member 421 can be stably disposed on the workbench 1 .

[0057] The adsorption member 421 may be a suction disc having a plurality of adsorption holes 4212 formed therein, the adsorption disc being connected to the pneumatic circuit of the pneumatic member. The adsorption member 421 may also be any other structural member having adsorption and support functions, as long as it can achieve adsorption and fixation of the membrane material. Detailed description is omitted here.

[0058] The pneumatic part may be a pneumatic structural part such as a suction machine, a suction cylinder or an air pump.

[0059] Continue to refer to Figures 1 to 6 The fully automatic crystal expansion equipment 100 further includes a first drive module 101 and a second drive module 102. The first drive module 101 is disposed on the workbench 1, and the second drive module 102 is connected to the first drive module 101. The material picking mechanism 3, the film cutting mechanism 7, and the visual inspection mechanism 6 are all connected to the second drive module 102. The first drive module 101 is used to drive the second drive module 102 to reciprocate along a first direction, and the second drive module 102 is used to drive the material picking mechanism 3, the film cutting mechanism 7, and the visual inspection mechanism 6 to reciprocate along a second direction, where the first direction is perpendicular to the second direction.

[0060] Such an arrangement enables the material picking mechanism 3, the film cutting mechanism 7 and the visual inspection mechanism 6 to move freely above the workbench 1, so that the material picking mechanism 3 can automatically take out materials from the material storage mechanism 2 or clamp the processed workpiece from the adsorption component 42, and transfer the processed workpiece to the material storage mechanism 2.

[0061] In addition, the first driving module 101 and the second driving module 102 drive the visual inspection mechanism 6 to move above the workbench 1, so that during the stretching and film expansion process, the visual inspection mechanism 6 can automatically detect the spacing between each chip to achieve intelligent production and processing.

[0062] The first direction is as follows Figure 2 As shown by the arrow I in the second direction Figure 2 As shown by arrow II.

[0063] The first drive module 101 and the second drive module 102 can both be screw slide modules or linear motor modules. The first drive module 101 and the second drive module 102 can also be other structural components with linear motion functions. As long as they can drive the material picking mechanism 3, the film cutting mechanism 7 and the visual inspection mechanism 6 to move freely above the workbench 1, no specific limitation is made here.

[0064] Continue to refer to Figures 1 to 6 The film cutting mechanism 7 includes a vertical moving module 71 and a cutting die assembly 72. The vertical moving module 71 is fixedly connected to the moving terminal of the second driving module 102. The cutting die assembly 72 is connected to the vertical moving module 71. The vertical moving module 71 is used to drive the cutting die assembly 72 to move in the vertical direction so that the film cutting assembly can approach or move away from the mounting surface 11. The cutting die assembly 72 is used to cut the edge of the workpiece.

[0065] The vertically movable module 71 can be used to drive the film cutting assembly to move back and forth in the vertical direction, so that the film cutting assembly can cut the edge of the film material after the film stretching and expansion is completed, thereby completing the cutting process.

[0066] The film cutting assembly can include a connecting frame 721, a cutting blade 722, and a film cutting cylinder 723. The connecting frame 721 is fixedly mounted on the vertically movable module 71, and the film cutting cylinder 723 is fixedly mounted on the connecting frame 721. The cutting blade 722 is movably connected to the connecting frame 721 and is connected to the driving end of the film cutting cylinder 723. The film cutting cylinder 723 is used to drive the cutting blade 722 to cut the excess edge of the stretched film material, so as to facilitate the subsequent removal of the processed workpiece.

[0067] The film cutting component can also be other structural components with cutting functions, as long as it can achieve cutting of film materials. A detailed description is not provided here.

[0068] The vertical moving module 71 can be a screw slide module or a linear motor module, or other structural components with linear motion function, as long as it can drive the film cutting assembly to move back and forth in the vertical direction. No specific limitation is made here.

[0069] Continue to refer to Figures 1 to 6The material picking mechanism 3 includes a clamping assembly 31 and a power piece 32. The power piece 32 is installed on the side of the cutting die assembly 72 facing the material storage mechanism 2, that is, the power piece 32 is installed on the side of the connecting frame 721 facing the material storage mechanism 2. The clamping assembly 31 is connected to the power piece 32, and the power piece 32 is used to drive the clamping assembly 31 to clamp or release the workpiece.

[0070] Such arrangement enables the clamping assembly 31 to quickly retrieve material from the material storage mechanism 2, which is beneficial to improving the efficiency of retrieving material. In addition, the clamping assembly 31 and the power member 32 are connected to the connecting frame 721, so that the material retrieving mechanism 3 and the film cutting mechanism 7 can share a set of power devices, which can well save power.

[0071] The clamping assembly 31 includes a clamping jaw, and the power part 32 can be a cylinder, which is fixedly mounted on the connecting frame 721. The clamping jaw is connected to the cylinder, and the cylinder is used to drive the clamping jaw to close or open, so that the clamping jaw can clamp or release the edge of the workpiece.

[0072] The clamping assembly 31 may also be other structural components with clamping and fixing functions, as long as it can clamp and fix the workpiece, and they are not listed here one by one.

[0073] Continue to refer to Figures 1 to 6 The visual detection mechanism 6 includes a visual detection component 61 and a light source 62. The visual detection mechanism 6 also includes a vertical sliding module 63. The vertical sliding module 63 is fixedly connected to the movable terminal of the second driving module 102. The visual detection component 61 and the light source 62 are both installed on the side of the vertical sliding module 63 facing away from the second driving module 102. The vertical sliding module 63 is used to drive the visual detection component 61 and the light source 62 to slide back and forth in the vertical direction.

[0074] Light source 62 provides light for visual inspection assembly 61, which detects the spacing between individual grains on the stretched workpiece. Both visual inspection assembly 61 and film expansion mechanism 5 are connected to an external control system, which controls the stretching force of film expansion mechanism 5 on the workpiece based on the spacing information. The external control system can be a computer management platform.

[0075] Based on the above scheme, during the process of stretching and expanding the film, the chip spacing is measured in real time by the visual detection component 61 and fed back to the external control system. The external control system controls the stretching force of multiple stretching modules 51 to achieve the purpose of regulating the spacing between each core, thereby realizing the adjustable spacing function of the fully automatic crystal expansion equipment 100.

[0076] Among them, the visual detection component 61 can be an industrial camera, such as a 3D camera, a 2D camera, etc. The visual detection component 61 can also be other electronic devices that can detect the distance between each chip. As long as it can detect the distance between each chip, there is no specific limitation here.

[0077] The light source 62 can be an illumination lamp or an infrared lamp, as long as it can provide a light source for the visual detection component 61 , and they are not listed here one by one.

[0078] Reference Figure 1 and Figure 2 The storage mechanism 2 includes a loading frame assembly 21 and a unloading frame assembly 22. The loading frame assembly 21 and the unloading frame assembly 22 are both arranged on the workbench 1. The loading frame assembly 21 is used to store the workpiece to be processed, and the unloading frame assembly 22 is used to store the processed workpiece.

[0079] This arrangement can separate the workpiece to be processed from the processed workpiece, so that loading and unloading can be carried out independently, and the loading and unloading workpieces share the same material-taking mechanism 3, which can save power sources and production costs.

[0080] The loading frame assembly 21 and the unloading frame assembly 22 can both be storage boxes or storage frames, and both storage boxes or storage frames can position and fix the stacked workpieces. The loading frame assembly 21 and the unloading frame assembly 22 can also be other structural members that can position and fix the workpieces, as long as they can stably place the workpieces, and are not specifically limited here.

[0081] Reference Figures 1 to 6 The working principle of the fully automatic crystal expansion equipment 100 is as follows:

[0082] The loading frame assembly 21 stores the workpiece to be processed. Under the joint drive of the first driving module 101 and the second driving module 102, the clamping assembly 31 is moved to the loading frame assembly 21, and the material is taken from the loading frame assembly 21. The workpiece to be processed is transferred to the adsorption assembly 42. The clamping assembly 31 places the workpiece to be processed on the adsorption surface 4211. The adsorption component 421 adsorbs and fixes the workpiece to be processed under the action of the pneumatic component. Each clamping assembly 512 clamps and fixes the edge of the workpiece to be processed, so that the multiple clamping assemblies 512 are driven by the corresponding driving assembly 511 to stretch the film material in a direction away from the center of the adsorption surface 4211 to expand the distance between each chip.

[0083] During the process of stretching and expanding the film, the visual detection component 61 is used to detect the spacing between each chip in real time to control the spacing between each chip. After the stretching and expanding the film is completed, the first drive module 101 and the second drive module 102 jointly drive the film cutting component to move above the adsorption component 421, and approach the workpiece under the drive of the vertical moving module 71. The film cutting cylinder 723 drives the cutting knife 722 to cut the edge of the film material, and then the material picking mechanism 3 transports the processed workpiece to the blanking frame component 22 for storage, thereby completing the crystal expansion work.

[0084] The above descriptions are merely optional embodiments of the present invention and do not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present description and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. A fully automatic crystal expansion device, characterized in that: The fully automatic crystal expansion equipment includes a workbench, a material storage mechanism, a material taking mechanism, a film solidification mechanism, a film expansion mechanism, a visual inspection mechanism and a film cutting mechanism; wherein, The material storage mechanism, the material taking mechanism, the film fixing mechanism, the film expanding mechanism, the visual inspection mechanism and the film cutting mechanism are all arranged on the workbench, and the material taking mechanism, the film cutting mechanism and the visual inspection mechanism are all able to move freely above the workbench; The material storage mechanism is used to store the workpiece, and the material taking mechanism is used to clamp the workpiece from the material storage mechanism and transfer the workpiece to the film solidification mechanism, or to clamp the processed workpiece from the film solidification mechanism and transfer the processed workpiece to the material storage mechanism; The film fixing mechanism is used to fix or release the workpiece, the film expanding mechanism is used to stretch the workpiece located on the film fixing mechanism, the visual inspection mechanism is used to detect the spacing between each grain on the stretched workpiece, and the film cutting mechanism is used to cut the edge of the stretched workpiece; The film expansion mechanism includes a plurality of stretching modules, each of which is arranged on the workbench and spaced apart along the circumferential direction of the film solidification mechanism. Each of the stretching modules has a clamping state for clamping the edge of the workpiece and a releasing state for releasing the edge of the workpiece. In the clamping state, each of the stretching modules stretches the workpiece in a direction away from the center of the workpiece; in the releasing state, each of the stretching modules releases the workpiece; The film solidifying mechanism includes a lifting component and an adsorption component. The lifting component is installed on the workbench. The adsorption component is connected to the lifting component. The lifting component is used to drive the adsorption component to move in the up and down directions. The adsorption component is used to adsorb and fix or release the workpiece.

2. The fully automatic crystal expansion equipment according to claim 1, characterized in that: The stretching module includes a driving component and a clamping component. The driving component is installed on the workbench, and the clamping component is connected to the driving component. The driving component is used to drive the clamping component to move toward or away from the film solidifying mechanism, and the clamping component is used to clamp or release the workpiece.

3. The fully automatic crystal expansion equipment according to claim 1, characterized in that: The adsorption assembly includes an adsorption part and a pneumatic part. The adsorption part has an adsorption surface, and the adsorption surface is provided with a plurality of adsorption holes. The adsorption part is connected to the pneumatic part through an air circuit. The adsorption part is driven by the pneumatic part to adsorb, fix or release the workpiece through the adsorption holes.

4. The fully automatic crystal expansion equipment according to claim 1, characterized in that The fully automatic crystal expansion equipment further includes a first drive module and a second drive module, wherein the first drive module is disposed on the workbench, the second drive module is connected to the first drive module, and the material taking mechanism, the film cutting mechanism, and the visual inspection mechanism are all connected to the second drive module; The first driving module is used to drive the second driving module to move back and forth along a first direction, and the second driving module is used to drive the material picking mechanism, the film cutting mechanism and the visual inspection mechanism to move back and forth along a second direction, and the first direction is perpendicular to the second direction.

5. The fully automatic crystal expansion equipment according to claim 4, characterized in that: The film cutting mechanism includes a vertical moving module and a film cutting assembly. The vertical moving module is connected to the second driving module, and the film cutting assembly is connected to the vertical moving module. The vertical moving module is used to drive the film cutting assembly to move in the vertical direction, and the film cutting assembly is used to cut the edge of the workpiece.

6. The fully automatic crystal expansion equipment according to claim 5, characterized in that: The material picking mechanism includes a clamping assembly and a power piece. The power piece is installed on the side of the film cutting assembly facing the material storage mechanism. The clamping assembly is connected to the power piece. The power piece is used to drive the clamping assembly to clamp or release the workpiece.

7. The fully automatic crystal expansion equipment according to claim 4, characterized in that: The visual detection mechanism includes a visual detection component and a light source, both of which are connected to the second driving module. The light source is used to provide light for the visual detection component, and the visual detection component is used to detect the spacing information between each grain on the stretched workpiece; The visual inspection component and the film expansion mechanism are both in communication with an external control system, and the external control system controls the stretching force of the film expansion mechanism on the workpiece based on the spacing information.

8. The fully automatic crystal expansion equipment according to claim 1, characterized in that: The material storage mechanism includes a loading frame assembly and a unloading frame assembly. Both the loading frame assembly and the unloading frame assembly are arranged on the workbench. The loading frame assembly is used to store workpieces to be processed, and the unloading frame assembly is used to store processed workpieces.

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