Substrate processing device

Abstract

The present invention relates to a substrate processing apparatus which coats a substrate while moving a slit nozzle with respect to the substrate held on a stage. In a coating apparatus provided with a stage on which a substrate is placed, particularly in the case where the stage is large, the apparatus is appropriately disassembled, and further, adjustment work after assembly is easily performed. In the substrate processing apparatus of the present invention, a guide member is extended with respect to a stage block, and an extension member is incorporated in a direction in which a nozzle moves (first direction). An extension guide member is provided on the extension member. In addition, a rectangular stage is set on an upper surface of the stage block with the first direction as a short side direction. The short side direction of the stage block is made to coincide with the short side direction of the stage, and is made to coincide with the direction in which the nozzle moves. On this basis, by disassembling the apparatus in this direction, disassembly can be performed in a manner satisfying a size limitation condition, and a stage of a maximum size can be ensured under this condition.

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus that coats a substrate while moving a slit nozzle relative to a substrate held on a stage. Background Technology

[0002] As a substrate processing apparatus for applying a coating solution to a substrate, the substrate is placed on a flat stage, and a slit nozzle disposed above it is moved relative to the substrate to scan and spray a processing solution such as a photoresist solution from the slit nozzle. Such a substrate processing apparatus is sometimes called a slit coating machine. For example, the substrate processing apparatus described in Japanese Patent Application Publication No. 2005-230807 has two sets of bridging structures, each of which has a nozzle arranged to span the flat stage supporting the substrate. The bridging structures are mounted on a pair of tracks separated from the stage and can move in a direction orthogonal to the length direction of the slit nozzle.

[0003] Furthermore, in this substrate processing apparatus, while one nozzle is performing coating treatment on the substrate, the other nozzle is maintained. At this time, the other nozzle is maintained at a position retracted from above the stage to the side. To enable this retraction movement, the track extends further outward beyond the end of the substrate, and consequently, the stage is also partially extended. In particular, extension portions are provided at both ends of the stage to provide maintenance mechanisms corresponding to the two sets of nozzles respectively.

[0004] The substrates being processed are becoming increasingly larger, with substrates exceeding two meters in side length now being manufactured. Naturally, substrate processing equipment requires large stages capable of holding such large substrates. If various components are installed around the stage, the size increases further. Therefore, for example, when moving the equipment from the substrate processing equipment manufacturing plant to other installation locations, there are problems with conventional transport mechanisms, such as the inability to transport the equipment in its assembled state.

[0005] Therefore, the substrate processing apparatus corresponding to such a large substrate is preferably configured to be able to disassemble the apparatus into sizes that can be transported by a transport mechanism. More preferably, the adjustment operation during assembly after transport is as simple as possible. However, in the above-described prior art, the ease of disassembly and reassembly accompanying such transport has not been taken into consideration, and there is room for improvement in this regard. Summary of the Invention

[0006] The present invention was made in view of the above-mentioned problems and aims to provide a technique for appropriately disassembling the coating apparatus, especially when the stage for placing a substrate is large, so as to facilitate the adjustment work after assembly.

[0007] One embodiment of the substrate processing apparatus of the present invention includes: a stage block having a pair of parallel sides, and a flat stage capable of holding a substrate provided on its upper surface; a pair of guide members, which, when a direction perpendicular to the pair of said sides is designated as a first direction and a direction perpendicular to the first direction and along the upper surface of the stage is designated as a second direction, clamp the stage at a position further outward than both ends of the stage in the second direction and extend along the upper surface of the stage block in the first direction; and a nozzle block having: a nozzle, an outlet provided above the stage and having a slit-like opening with the second direction as its length direction. ; and a nozzle support that supports the nozzle and engages with each of the pair of guide members in a manner movable in the first direction; an extension member that is detachably coupled to the platform block in a manner protruding from one of the pair of sides in the first direction; a pair of extended guide members supported from below by the extension members and engaging with the respective ends of the pair of guide members in the first direction and extending along the first direction; a moving mechanism that moves the nozzle block along the pair of guide members and the pair of extended guide members; and a maintenance unit disposed between the pair of extended guide members in a top view for performing maintenance on the nozzle.

[0008] Here, the stage has a rectangular shape with the first direction as its shorter side when viewed from above, and the length in the first direction is less than the length in the second direction in the stage block.

[0009] In this invention, by moving the nozzle block in a first direction with the nozzle positioned above the substrate placed on the stage, coating can be applied to the substrate. Furthermore, the substrate processing apparatus can be disassembled by dividing the length in the first direction between the stage block and the extension member. In this disassembled state, a pair of guide members, which are positioned to clamp the stage, are integrally mounted on the upper surface of the stage block and the stage.

[0010] Therefore, the positional relationship between the stage and the guide member does not change upon disassembly. Consequently, the positional relationship between the substrate supported by the stage and the nozzles mounted on the nozzle block that engages with the guide member also remains unchanged. This means that the positional accuracy between the stage and the nozzles, which are crucial for coating quality and require precise adjustment, can be ensured even after the device has been disassembled and reassembled. Therefore, it is possible to prevent a decrease in coating quality due to deviations in their positional relationship during the disassembly and reassembly processes.

[0011] Furthermore, by extending the components and lengthening the guide components, the movement path of the nozzle block from the stage to the maintenance section is ensured. Therefore, regarding nozzle maintenance, the same effect as existing technologies can be achieved. That is, in terms of either coating quality or maintainability, the same performance as devices that do not perform decomposition can be obtained, without the disadvantages caused by decomposition in these aspects.

[0012] Furthermore, in the positioning of nozzles for maintenance purposes, since the high positional accuracy required during coating is not necessary, the conditions related to the assembly accuracy of the extension members and the extended guide members are less demanding. Therefore, the adjustment work during assembly becomes easier compared to assembling the structure that corresponds to the main part of the coating operation.

[0013] Furthermore, in the stage block, the stage has a rectangular shape with a first direction as its shorter side. In addition, the length of the stage block in the first direction is less than that in the second direction. This means that, for example, when the envelope of the stage block is considered rectangular in a top view, the shorter side of the stage block's shape coincides with the shorter side of the stage itself, and this direction is the first direction. Therefore, without disassembling the stage itself, the dimension of the stage block in the first direction, assuming disassembly, can be minimized.

[0014] In other words, if the length of the stage blocks in the first direction is the same, the size of the stage in the short side direction can be maximized. Since the stage can be larger in the long side direction, it is ultimately possible to construct a substrate processing apparatus that can process substrates of the largest size within the constraints of transportable size.

[0015] As described above, according to the present invention, the short side direction of the stage is used as the nozzle's moving direction, and the device is disassembled in a way that cuts off the nozzle's moving path in that direction. Even when the stage is large, the device can be appropriately disassembled. Furthermore, since the parts where assembly accuracy is a problem can be set to positions with minimal impact on the coating operation, post-assembly adjustment operations can be easily performed. Attached Figure Description

[0016] Figure 1 This is a perspective view schematically illustrating one embodiment of the substrate processing apparatus of the present invention.

[0017] Figure 2 This is a perspective view showing the structure of the stage assembly of the substrate processing device.

[0018] Figure 3A and Figure 3B This is a diagram illustrating an example of stage decomposition.

[0019] Figure 4A and Figure 4BThis diagram illustrates the disassembly method of the stage in this embodiment.

[0020] Figure 5A and Figure 5B This is a diagram showing the structure of the mounting components that make up the support mechanism.

[0021] Figure 6A and Figure 6B This is a diagram showing the structure of the mounting components that make up the support mechanism.

[0022] Figure 7 This is a diagram showing the installation status of the support beam and the platform block from below.

[0023] Figures 8A to 8D This is a diagram showing the state changes when the extension unit and the stage unit are combined.

[0024] Figure 9 This is a diagram showing a modified example of a substrate processing apparatus.

[0025] Figure 10A and Figure 10B This is a diagram showing a variation of the installation structure of the extension member.

[0026] Figures 11A to 11D The diagram shows other variations of the mounting structure for the extension member.

[0027] Explanation of reference numerals in the attached figures

[0028] 1.1A Coating Apparatus (Substrate Processing Apparatus)

[0029] 2(2a, 2b) Slit nozzle (nozzle)

[0030] 4-stage assembly

[0031] 5 (5a, 5b) Coating treatment section (nozzle block)

[0032] 6 (6a, 6b) Nozzle maintenance unit (maintenance section)

[0033] 40 platform blocks

[0034] Side views of 40a and 40b (stage block 40)

[0035] 41-44 Extension members

[0036] 51 Nozzle Support (Nozzle Support Section)

[0037] 52 guide rails (guide components)

[0038] 54 Linear Motor (Moving Mechanism)

[0039] 401 Platform

[0040] 520 guide rail (guide component)

[0041] 521 guide rail (extended guide component)

[0042] S substrate

[0043] X Second Direction

[0044] Y First Direction Detailed Implementation

[0045] Figure 1 This is a perspective view schematically illustrating one embodiment of the substrate processing apparatus of the present invention. Additionally, Figure 2 This is a perspective view showing the structure of the stage assembly of the substrate processing apparatus. In these and the following figures, in order to clarify their directional relationships, an XYZ orthogonal coordinate system with the Z direction as the vertical direction and the XY plane as the horizontal plane is appropriately added, and the dimensions or number of each part are depicted in an enlarged or simplified manner as needed.

[0046] The substrate processing apparatus 1 is a coating apparatus that uses a slit nozzle 2 to apply a processing liquid to the surface Sa of a substrate S, which is an example of a substrate to be coated. It is called a slit coater. The processing liquid is, for example, a photoresist liquid. Alternatively, the processing liquid can be, for example, pigments for color filters, polyimide precursors, silicone agents, nano-metal inks, or various paste-like or slurry-like processing liquids containing conductive materials. The substrate S has a rectangular shape when viewed from above, and is, for example, a glass substrate. Furthermore, various substrates can be used for the substrate S to be coated, such as rectangular glass substrates, semiconductor substrates, flexible substrates for thin-film liquid crystals, photomask substrates, color filter substrates, solar cell substrates, and organic EL (Electroluminescence) substrates. It should be noted that, in this specification, "surface Sa of substrate S" refers to the side of substrate S on which the processing liquid is applied.

[0047] The substrate processing apparatus 1 includes: a stage assembly 4 having a stage 401 capable of holding a substrate S in a horizontal position; a coating processing unit 5 that performs coating processing on the substrate S held on the stage 401 using a slit nozzle 2; a nozzle maintenance unit 6 that performs maintenance processing on the slit nozzle 2; and a control unit 100 that controls these components.

[0048] It should be noted that in this embodiment, a stage assembly 4 is provided with two coating processing units 5 having the same structure. In particular, when it is necessary to distinguish between the two coating processing units 5, the coating processing unit 5 located on the (-Y) side is labeled with reference numeral 5a, and the coating processing unit 5 located on the (+Y) side is labeled with reference numeral 5b. Correspondingly, the nozzle 2 provided in the coating processing unit 5a is labeled with reference numeral 2a, and the nozzle 2 provided in the coating processing unit 5b is labeled with reference numeral 2b.

[0049] Furthermore, each of the two nozzles 2a and 2b is provided with a set of nozzle maintenance units 6. When it is necessary to distinguish them, the set of nozzle maintenance units located on the (-Y) side and maintaining nozzle 2a is labeled with reference numeral 6a. The set of nozzle maintenance units located on the (+Y) side and maintaining nozzle 2b is labeled with reference numeral 6b. These nozzle maintenance units 6a and 6b are structurally identical except that they are symmetrical with respect to the XZ plane. Therefore, a detailed diagram of the structure of nozzle maintenance unit 6b is omitted.

[0050] like Figure 2 As shown, the stage assembly 4 includes: a stage block 40, which has a generally rectangular shape and whose upper surface is machined into a generally horizontal flat surface; and four extension portions 41 to 44. Specifically, on the (-Y) side surface 40a of the stage block 40, extension portions 41 and 42 extending in the Y direction are respectively provided at its (-X) side end and (+X) side end. In addition, on the (+Y) side surface 40b of the stage block 40, extension portions 43 and 44 extending in the Y direction are respectively provided at its (-X) side end and (+X) side end. Thus, when viewed from above, the stage assembly 4 has a generally H-shaped form.

[0051] The platform 40 and the extensions 41-44 are each made of granite or other stone, and their upper surfaces are machined into a roughly horizontal, flat surface, hence the term "stone platform." Details will be provided later, but the upper surfaces of the platform 40 and the extensions 41-44 are adjusted to be on the same plane. Preferably, the platform 40 and the extensions 41-44 have the same thickness.

[0052] The upper surface of the stage block 40 is centrally formed with multiple vacuum suction ports, forming a stage 401 for adsorbing and holding the substrate S. By using these vacuum suction ports to adsorb the substrate S, the substrate S is held horizontally in a predetermined position during the coating process. Regarding the stage 401, it is preferable that its short side direction is aligned with the Y direction, that is, the Y-direction length Sy is smaller than the X-direction length Sx of the stage 401. The reason for this will be explained later. With this structure, in this embodiment, it is envisioned that the substrate S is placed on the stage 401 with its short side direction aligned with the Y direction. It should be noted that the method of holding the substrate S is not limited to this; for example, the substrate S may also be mechanically held.

[0053] The space between the extension portions 41 and 42 on the (-Y) side 40a of the platform 40 and the space between the extension portions 43 and 44 on the (+Y) side 40b of the platform 40 are respectively designated as nozzle adjustment areas RA, and nozzle maintenance units 6 (6a, 6b) are provided in the nozzle adjustment areas RA.

[0054] return Figure 1 In the slit nozzle 2 (2a, 2b), its lower end (spray lip portion) has a downwardly tapering shape. Furthermore, on the lower surface of this lower end, a slit-shaped spray outlet 21 extends along the X direction, and processing liquid, pressurized from a processing liquid supply unit (not shown), is sprayed from the spray outlet 21 onto the surface Sa of the substrate S. As a result, the surface Sa of the substrate S is coated with processing liquid.

[0055] The coating treatment unit 5 (5a, 5b) has a nozzle support 51 that supports the slit nozzles 2 (2a, 2b). This nozzle support 51 includes: a support member 511 extending parallel to the X direction above the stage 401; and two lifting mechanisms 512, 512 that support the support member 511 from both sides in the X direction and raise / lower it. The support member 511 is made of, for example, carbon fiber reinforced resin and is a rod member with a rectangular cross-section. The support member 511 detachably supports the slit nozzles 2 on its lower surface. It should be noted that various fastening mechanisms such as latches or screws can be appropriately used as the mechanism for attaching and detaching the slit nozzles 2 to the support member 511.

[0056] Two lifting mechanisms 512, 512 are connected to the two ends of the support member 511 along its length, and each has an AC servo motor and a ball screw, etc. Through these lifting mechanisms 512, 512, the support member 511 and the slit nozzle 2 fixed thereon move up and down in the vertical direction (Z direction), adjusting the distance between the nozzle outlet 21, which opens at the lower end of the slit nozzle 2, and the substrate S, i.e., the relative height of the nozzle outlet 21 relative to the substrate S. It should be noted that, although the vertical position of the support member 511 is not shown in the figure, it can be detected by a linear encoder consisting of a scale portion provided on the side of the lifting mechanism 512 and a detection sensor disposed opposite to the scale portion on the side of the slit nozzle 2.

[0057] like Figure 1 As shown, the nozzle support 51 configured in this way has a bridging structure that spans the stage 401 and is erected at both ends of the stage assembly 4 in the X direction. The coating processing unit 5 has a slit nozzle moving part 53 that moves the nozzle support 51 in the Y direction. The slit nozzle moving part 53 functions as a relative moving unit that moves the nozzle support 51, which is the bridging structure, and the slit nozzle 2 supported thereon, relative to the substrate S held on the stage 401 in the Y direction. Specifically, the slit nozzle moving part 53 has, on the ±X side, a guide rail 52 that guides the movement of the slit nozzle 2 in the Y direction; a linear motor 54 that serves as a drive source; and a linear encoder 55 that detects the position of the nozzle outlet of the slit nozzle 2.

[0058] like Figure 1 and Figure 2 As shown, two guide rails 52 are respectively disposed at both ends in the X direction on the upper surface of the stage assembly 4, and extend parallel to each other in the Y direction such that they cover the area where the nozzle adjustment region RA and the stage 401 are disposed. Therefore, the guide rail 52 disposed on the (-X) side extends from the extension portion 41 on the (-Y) side to the extension portion 43 on the (+Y) side via the stage block 40. In addition, the guide rail 52 disposed on the (+X) side extends from the extension portion 42 on the (-Y) side to the extension portion 44 on the (+Y) side via the stage block 40.

[0059] Furthermore, the two guide rails 52 guide the movement of the two lifting mechanisms 512, 512 along the Y direction, respectively. Additionally, two linear motors 54, each an AC magnetic core linear motor with a stator 541 and a mover 542, are respectively disposed on both sides of the stage assembly 4 in the X direction. The stator 541 is disposed on the side of the stage assembly 4 in the X direction along the Y direction. On the other hand, the mover 542 is fixedly disposed on the outside of the lifting mechanism 512. The two linear motors 54 drive the two lifting mechanisms 512, 512 along the Y direction using the magnetic force generated between the stator 541 and the mover 542, respectively.

[0060] Furthermore, each linear encoder 55 has a scale section 551 and a detection section 552. The scale section 551 is disposed along the Y direction at the lower part of the stator 541 of the linear motor 54, which is fixedly disposed on the stage 401. On the other hand, the detection section 552 is fixedly disposed further outward of the mover 542 of the linear motor 54, which is fixedly disposed on the lifting mechanism 512, and is disposed opposite to the scale section 551. The linear encoder 55 detects the position of the slit nozzle 2 in the Y direction, more specifically, the position of the nozzle outlet, based on the relative positional relationship between the scale section 551 and the detection section 552.

[0061] The slit nozzle moving part 53, with this structure, drives the nozzle support 51 along the Y direction, enabling the slit nozzle 2 to move between above the nozzle adjustment region RA and above the substrate S held on the stage 401. More specifically, the slit nozzle moving part 53 moves the slit nozzle 2a between above the nozzle adjustment region RA on the (-Y) side and above the substrate S. Additionally, it moves the slit nozzle 2b between above the nozzle adjustment region RA on the (+Y) side and above the substrate S.

[0062] Then, the substrate processing apparatus 1 forms a processing liquid layer on the surface Sa of the substrate S by spraying processing liquid from the nozzle outlet 2a in the (+Y) direction. Additionally, a processing liquid layer is formed on the surface Sa of the substrate S by spraying processing liquid from the nozzle outlet 21 of the nozzle 2b in the (-Y) direction.

[0063] After the coating of the processing liquid is completed, the slit nozzle 2 returns to the nozzle adjustment area RA for standby. The two nozzle adjustment areas RA are respectively located offset from the stage 401 in the (-Y) direction and the (+Y) direction. The nozzle adjustment areas RA function as standby locations for the slit nozzle 2 during periods when it is not being coated on the stage 401, such as during the handover of the substrate processing apparatus 1 to the substrate S of the external transport mechanism (during the loading / unloading of the substrate S). Furthermore, the nozzle maintenance unit 6 performs various maintenance procedures on the slit nozzle 2 located in the nozzle adjustment areas RA.

[0064] like Figure 1 As shown, the nozzle maintenance unit 6, located in the nozzle adjustment area RA, includes a pre-dispensing mechanism 61, a cleaning block 62, and a standby box 63. Equipped with these, the nozzle maintenance unit 6 removes excess processing liquid adhering to the nozzle 2 and adjusts the tip of the nozzle 2 to a suitable state for coating. Since known structures can be used, descriptions are omitted. For example, the content described in Japanese Patent Application Publication No. 2008-290031, previously disclosed by the applicant of this application, can be applied.

[0065] As described above, the substrate processing apparatus 1 of this embodiment has a structure in which various mechanical components are mounted around the stage assembly 4. The stage 401 must have a planar dimension sufficient to hold the substrate S, which is the object of processing, in a horizontal position. If the substrate S is large, then of course the stage 401 and the entire apparatus including the stage will also be large.

[0066] The stage assembly 4 has the greatest impact on the size of the device. For the following explanation, the maximum length of the stage assembly 4 in the X direction will be indicated by the reference numeral Lx. The maximum length in the Y direction will be indicated by the reference numeral Ly.

[0067] However, in recent years, substrates have been trending towards larger sizes. For example, in the manufacture of glass substrates for liquid crystal display panels, substrates with dimensions generally referred to as G8 (2620mm × 2290mm) have begun to circulate. Consequently, in the substrate processing apparatus 1 that processes such substrates, the planar dimensions (Sx × Sy) of the stage 401 need to be of this size. The lengths Lx and Ly of the stage assembly 4 are naturally greater than this length; for example, there are cases where both exceed 3m.

[0068] Generally, various processing devices are assembled and adjusted in the manufacturing plant before being moved to the location where they are actually used. However, for such large devices, maintaining their assembled state for transport is difficult. For example, there are size limits to the loads transported by rail or truck, making it impossible to utilize these transport mechanisms in some cases. Therefore, it is necessary to break the device down into several parts.

[0069] This substrate processing device 1 is a precision machine that requires extremely high processing / assembly accuracy. The stage assembly 4 is another example; when it is disassembled, high precision must be ensured during on-site reassembly.

[0070] Figure 3A and Figure 3B This diagram illustrates an example of stage disassembly. It should be noted that the description uses the structure of the above-described embodiment as an example; for some parts of the structure, the reference numerals used in the description so far are directly applied. Figure 3A and Figure 3B The structure shown is not the structure of this embodiment. When considering the disassembly of the stage assembly 4, for example... Figure 3A As shown, the stage assembly 4 can be disassembled into a stage body 405 including a stage 401 and a side part 406 on which a guide rail 52, a linear motor 54 and a linear encoder 55 are mounted.

[0071] During reassembly, side portions 406 are installed at both ends of the stage body 405 in the X direction. At this time, the flatness of the upper surface of the stage assembly 4 needs to be controlled within a specified range. For example, this specified value is 10 μm or less. Achieving such precision in the installation environment is not easy, for example... Figure 3B As shown, when the side portion 406 is offset from the mounting position relative to the stage body 405, the nozzle 2 is supported in an inclined state. As a result, the gap between the nozzle outlet 21 located at the lower end of the nozzle 2 and the substrate S on the stage 401 varies depending on the position, resulting in uneven coating thickness and reduced coating quality.

[0072] Figure 4A and Figure 4B This diagram illustrates the disassembly method of the stage in this embodiment. It should be noted that... Figure 4A The supporting frame 10 of the support platform assembly 4, which has been omitted from the illustration so far, is also shown in the figure. Figure 4A As shown, in this embodiment, the stage assembly 4 is disassembled between the stage module 40 and the extensions 41 to 44 on which a portion of the guide rail 52 is mounted (reference numeral 521). The stage module 40 includes a stage 401 and a portion of the guide rail 52 disposed on the upper surface of the stage assembly 4, which is arranged to clamp the stage 401 (reference numeral 520). The support frame 10 has: a frame 11 that supports the stage block 40, a frame 12 that integrally supports the extensions 41 and 42 on the (-Y) side, and a frame 13 that integrally supports the extensions 43 and 44 on the (+Y) side.

[0073] More specifically, the (-Y) side surface 40a of the flat platform 40 is machined into a plane perpendicular to the Y-axis, and a generally cuboid-shaped extension member 41 is joined to its (-X) side end. The extension member 41 is joined to the platform 40 such that its upper surfaces form a coplanar plane, thereby functioning as an extension portion 41. In this embodiment, the extension portion 41 is configured as a separate component independent of the platform 40. Therefore, in this embodiment, "extension portion" and "extension member" are essentially synonymous. Therefore, in this specification, this extension member is also labeled with the same reference numeral 41 as the corresponding extension portion. The other extension portions 42 to 44 described below are also labeled in the same way.

[0074] Although not shown in the figure, the (+Y) side end face of the extension member 41 is also machined into a plane perpendicular to the Y-axis, so that the two fit tightly together between the planes by engaging with the stage block 40.

[0075] In addition, an extension member 42, which functions as an extension part, is also installed at the (+X) end of the (-Y) side surface 40a of the platform block 40. The extension members 41 and 42 are integrally supported by the frame 12. Hereinafter, the structure integrating the extension members 41 and 42 and the frame 12 will be referred to as the "first extension unit".

[0076] Similarly, the (+Y) side surface 40b of the stage block 40 is also machined into a plane perpendicular to the Y-axis, and approximately cuboid-shaped extension members 43 and 44 are respectively joined to its (-X) side end and (+X) side end. To compare the states where the extension members are joined to and separated from the stage block 40, in... Figure 4A The figure shows the extension members 43 and 44 in their combined state with the platform 40. However, like extension members 41 and 42, extension members 43 and 44 can also be separated from the platform 40. Extension members 43 and 44 are integrally supported by the frame 13. Hereinafter, the structure integrating extension members 43 and 44 with the frame 13 will be referred to as the "second extension unit" and labeled with reference numeral 72.

[0077] That is, the platform assembly 4 in this embodiment can be decomposed into a platform unit 70 that integrates the platform block 40 and the frame 11, a first extension unit 71, and a second extension unit 72. By decomposing it in this way, the maximum horizontal dimension of each unit can be suppressed to below the upper limit of the transportable dimension.

[0078] Before explaining each part in detail, let's explain the effects of disassembling the stage assembly 4 in this way. Figure 4B This diagram illustrates the effect of disassembling the stage in this embodiment. In this embodiment, even when the stage assembly 4 is disassembled, the pair of guide rails 52, 52 that clamp the stage 401 remain mounted on the upper surface of the stage block 40. Therefore, the positional relationship between the guide rails 52, 52 and the stage 401 remains unchanged during the disassembly and reassembly processes.

[0079] Therefore, the positional relationship between the nozzle 2, supported by the nozzle support 51 that engages with the guide rail 52, and the substrate S, which is adsorbed and held on the stage 401, remains the same as in the factory shipment stage. That is, these positional accuracies will not decrease during disassembly and reassembly.

[0080] Furthermore, even assuming that the mounting accuracy of any extension member relative to the stage 40 deteriorates, the resulting tilting of the nozzle 2 will only occur in the nozzle adjustment area RA, and not in the position where the nozzle 2 is opposed to the substrate S. Therefore, at least the impact on coating quality can be avoided.

[0081] In addition, in this embodiment, such as Figure 4AAs shown, in the stage block 40, the Y-direction end of the guide rail 52 (520) does not extend to the end of the stage block 40, and is cut off at a position further inward than the Y-direction end of the stage block 40. The reason for doing so is as follows.

[0082] like Figure 4A As shown, the portion 521 of the guide rail 52 that is mounted on the upper surface of the extension member 41, etc., can be detached from the extension member 41, etc. Furthermore, when mounted on the upper surface of the extension member 41, etc., the (+Y) side end of the guide rail 52 (521) protrudes from the (+Y) side end face of the extension member 41, etc. Therefore, the (+Y) side end of the guide rail 521 extends to the upper surface of the stage 40. By fixing it to the upper surface of the stage 40, even if there is a height difference between the stage 40 and the extension member 41, etc., the connection with the guide rail 52 can be made more smoothly. As a result, problems such as vibration of the coating processing unit 5 due to the height difference of the guide rail 52 can be avoided.

[0083] According to the above-described decomposition method, in the platform 40, its two sides 40a and 40b in the Y direction are parallel to each other, and there are no components that protrude outward beyond these sides 40a and 40b. Therefore, the Y-direction length Ly2 of the platform 40 can be set up to the upper limit of the transportable size (hereinafter referred to as the "upper limit size"). It should be noted that in this platform 40, since its two ends in the Y direction terminate at mutually parallel (perpendicular to the Y-axis) planes, the distance between these sides is the length Ly2 of the platform 40.

[0084] The area on the upper surface of the stage block 40 that is sandwiched between the guide rails 520, 520, can be used almost entirely to support the substrate S. That is, this entire area can be used as the stage 401. The substrate processing apparatus 1 can process the substrate S up to the Y-direction length Ly2 of the stage block 40, so in principle, the substrate S can be increased to the upper limit size.

[0085] In particular, for a rectangular substrate S, by placing it on the stage 401 with its short side facing the Y direction, the long side extending in the X direction can be allowed to exceed the upper limit size. In this case, the size of the substrate S that can be placed on the stage 401 can be maximized. In other words, based on the technical concept of this embodiment, as long as the length of the short side of the substrate S does not exceed the upper limit size, a substrate processing apparatus 1 capable of processing such a substrate S can be configured.

[0086] Furthermore, by aligning the nozzle's movement direction (Y-direction) with the short side direction of the substrate S, the travel distance of the coating processing unit 5 during the coating process can be reduced. The flatness of the upper surface of the stage 40 needs to be strictly controlled within the range of its travel distance; therefore, shortening the travel distance also helps to alleviate the pressure on the machining accuracy of the stage 40 to some extent.

[0087] Next, the structure for supporting the disassembleable stage assembly 4, as described above, will be explained. Figure 4A As shown, regarding the platform 40, the platform surface is supported at a specified height by a sturdy frame 11 connected to the lower part of the platform 40.

[0088] On the other hand, a support beam 81 of the support mechanism 8 (described later) is installed at the lower part of the extension member 41, with the (+Y) side end of the support beam 81 protruding to a position further (+Y) than the (+Y) side end of the extension member 41. Similarly, a support beam 82 protruding further (+Y) than the (+Y) side end of the extension member 42 is installed at the lower part of the extension member 42. The support beams 81 and 82 are mounted on the frame 12, which is composed of several components, via movable feet 122.

[0089] The movable foot 122 can switch between a locked state in which the support beams 81 and 82 are fixed to the frame 12, and an unlocked state in which the support beams 81 and 82 can move freely in the XYZ directions within a specified range of motion. The mechanism used to achieve this is arbitrary, but even in the unlocked state, it is preferable to maintain the function of preventing the support beams 81 and 82 from detaching from the frame 12. The movable foot 122 may have a lifting mechanism to adjust the height of the extension members 41, etc., and the platform 40. Although the description is omitted, the method by which the frame 13 supports the extension members 43 and 44 is similar.

[0090] During transport, the movable foot 122 is locked, thereby preventing the support beams 81 and 82 and the extension members 41 and 42 fixed thereto from shaking due to vibration. On the other hand, when the extension members 41 and 42 are combined with the platform block 40 to form the platform assembly 4, the movable foot 122 is unlocked, and the support of the extension members 41 and 42 is entrusted to the support mechanism 8, which will be described next.

[0091] Figure 5A , Figure 5B , Figure 6A , Figure 6B , Figure 7 , Figures 8A to 8D This is a diagram illustrating the structure and function of the support mechanism. More specifically, Figure 5A and Figure 5B as well as Figure 6A and Figure 6B This is a diagram showing the structure of the mounting fittings that constitute the support mechanism 8. Additionally, Figure 7 This diagram shows the installation status of the support beam 81 and the platform 40 from below. Additionally, Figures 8A to 8D These are diagrams illustrating the state changes when the first extension unit 71 and the stage unit 70 are combined. In these diagrams, structures not directly related to the explanation are omitted for ease of understanding. Furthermore, the following description illustrates the combination of one extension member with the stage block, but this can be done similarly for other extension members.

[0092] Figure 5A and Figure 5B This indicates the connection state between the (+X) side surface 41a of the extension member 41 and the (-Y) side end surface 40a of the platform block 40. For example... Figure 5A As shown, at least one (two in this example) metal plate member 831 is fixed near the (+Y) side end of the (+X) side surface 41a of the extension member 41. A through hole 831a extending to the (+Y) side end face is provided on the (-Y) side end face of the plate member 831. On the other hand, a threaded hole 831b is provided on the (+X) side end face of the plate member 831.

[0093] Additionally, a metal plate member 832 is fixed adjacent to the (-Y) side end face 40a of the platform block 40, in an area that avoids the contact with the extension member 41. Threaded holes 832a and 832b are provided on the (-Y) side end face of the plate member 832. The threaded hole 832a is located at a position corresponding to the through hole 831a of the plate member 831 when the extension member 41 contacts the platform block 40.

[0094] With the extension member 41 and the platform 40 in a close configuration, the extension member 41 is positioned relative to the platform 40 by inserting a bolt 833 from the through hole 831a of the plate member 831 into the threaded hole 832a of the plate member 832.

[0095] In this state, L-shaped fittings 834, with through holes 834a and 834b respectively corresponding to threaded holes 831b and 832b, are fixed to plate members 831 and 832 by fastening members 835 such as bolts. As a result, as... Figure 5B As shown, the extension member 41 and the platform block 40 are joined together in an appropriate positional relationship, i.e., their upper surfaces are on the same plane.

[0096] Even with threaded holes directly provided on the stone platform 40 and the extension member 41, mechanical strength cannot be guaranteed. Therefore, by fixing metal plate members 831 and 832 to them and providing threaded holes on the plate members 831 and 832, a support mechanism that ensures mechanical strength and can be repeatedly assembled and disassembled can be constructed.

[0097] Figure 6A and Figure 6B The state of the (+X) side surface 42a of the extension member 42 and the (-Y) side end face 40a of the platform block 40 is shown. Figure 6A As shown, at least one (one in this example) metal plate member 841 is fixed near the (+Y) side end of the (+X) side surface 42a of the extension member 42. A through hole 841a extending to the (+Y) side end face is provided on the (-Y) side end face of the plate member 841. In addition, a threaded hole 841b is provided on the (+X) side end face of the plate member 841.

[0098] Additionally, a metal plate member 842 is fixed near the (-Y) side end of the (+X) side end face 40c of the platform block 40. A threaded hole 842a corresponding to the through hole 841a is provided on the (-Y) side end face of the plate member 842. Furthermore, a threaded hole 842b is provided on the (+X) side end face of the plate member 842.

[0099] With the extension member 42 and the platform 40 in a close configuration, the extension member 42 is positioned relative to the platform 40 by inserting a bolt 843 from the through hole 841a of the plate member 841 into the threaded hole 842a of the plate member 842.

[0100] In this state, plate-shaped fittings 844, with through holes 844a and 844b respectively formed at positions corresponding to threaded holes 841b and 842b, are fixed to plate members 841 and 842 by fastening members 845 such as bolts. As a result, as... Figure 6B As shown, the extension member 42 and the platform block 40 are joined together in an appropriate positional relationship, that is, their upper surfaces are on the same plane.

[0101] The extension member 41 and the platform block 40 are also provided with the same as those on the (-X) side end face. Figure 6A and Figure 6B The same mechanism. On the other hand, a similar mechanism is also provided between the (-X) side end face of the extension member 42 and the (-Y) side end face of the platform block 40. Figure 5A and Figure 5BThe same mechanisms are used. Through these mechanisms, the extension member 41 and the platform 40, as well as the extension member 42 and the platform 40, are securely connected to each other. The same mechanisms are also provided between the extension members 43 and 44 and the platform 40.

[0102] In this stage, the extension members 41-44 are mounted relative to the platform 40 in a so-called cantilever beam configuration. Since the extension members 41-44 need to support the weight of the coating treatment section 5, a cantilever beam-shaped support is insufficient. Therefore, in this embodiment, a support beam 81 extending to the lower surface of the platform 40 is mounted on the lower surface of the extension members 41, etc. By fixing the support beam 81, etc., to the lower surface of the platform 40, the mechanical strength can be improved.

[0103] Specifically, such as Figure 7 As shown, with the extension members 41 and 42 engaged with the side of the platform 40, the (+Y) side ends of the support beams 81 and 82 extend to the underside of the platform 40. The support beams 81 and 82 have a angular tube shape and through holes 81a and 82a are appropriately provided at positions contacting the underside of the platform 40. Fastening members 811 and 821, such as bolts, are inserted through these through holes 81a and 82a from below, thus securing the support beams 81 and 82 to the platform 40.

[0104] During the manufacturing stage at the factory, if the extension members 41 and 42 are aligned with the upper surface of the platform 40 via the support beams 81 and 82, it is expected that the same result can be achieved during reassembly at the installation site. Furthermore, during reassembly, height adjustments can be made as needed using shims or similar adjusting components between the upper surface of the support beams 81 and 82 and the bottom surface of the platform 40. As described above, the height discrepancy between the extension members 41 and 42 and the platform 40 does not affect the coating quality, thus the required precision for this adjustment can be relatively moderate. Therefore, on-site adjustment operations can be easily performed.

[0105] In this way, by combining the side of the extension member 41, etc., with the side of the platform block 40, Figure 5A , Figure 5B , Figure 6A , Figure 6B The structure, along with the support beams 81 and 82 that support the extension members 41 and the platform 40 from the lower surface side, firmly connects the extension members 41 and the platform 40, and is also capable of bearing the load of the coating treatment section 5. These structures form a support mechanism 8 as a single unit.

[0106] The first extension unit 71 and the stage unit 70 can be combined as follows: They move relative to each other, from... Figure 8AThe first extension unit 71 and the stage unit 70 are separated as shown, until... Figure 8B As shown, the support beams 81 and 82 of the first extension unit enter below the platform 40 and the extension members 41 and 42 are close to the platform 40.

[0107] For the horizontal movement of the first extension unit 71, friction-reducing units such as casters (wheels) may be provided on the frame 12. As explained below, the final extension member 41 does not require the support of the frame 12, so the frame 12 may not have the function of maintaining the height accuracy of the upper surface of the extension member.

[0108] At this time, the movable foot 122 is in the locked state, and supports the support beams 81 and 82 such that the upper surfaces of the support beams 81 and 82 are lower than the lower surface of the platform block 40. From this state, the movable foot 122 is switched to the unlocked state. Furthermore, as... Figure 8C As shown, the extension members 41 and 42 are positioned with the platform 40 using bolts 833, 843, etc.; the plate members are fastened using fastening members 835, 845; and the platform 40 and the extension members 41 are joined together with the upper surfaces aligned using fastening members 811, 821, etc., ultimately as shown... Figure 8D As shown, guide rails 52 are installed on extension components 41 to complete the stage assembly 4.

[0109] In this state, the support beams 81 and 82 are not supported by the movable feet 122, but only by the support mechanism 8. By adopting this structure, strength sufficient to withstand the load of the coating treatment section 5 can be obtained, and the flatness of the upper surface of the stage assembly 4 as a whole can be ensured. Furthermore, since the frame 12 does not affect the final installation position accuracy of the components, high dimensional accuracy is not required.

[0110] It should be noted that the coating processing unit 5 is not shown here, but it can be installed on the stage unit 70 before the units are assembled. Furthermore, the height of the coating processing unit 5 is not very large relative to the planar dimensions of the stage block 40; therefore, by adding an appropriate locking mechanism, the stage block 40 can be transported while the coating processing unit 5 is installed. In this case, it can be directly moved to the installation site in a precision-assembled state at the factory, thus simplifying the adjustment work at the installation site and ensuring stable subsequent operation.

[0111] The operation when separating the stage unit 70 and the first extension unit 71 is the reverse of the above. In addition, the loading and unloading between the stage unit 70 and the second extension unit 72 can also be performed in the same way as the loading and unloading between the stage unit 70 and the first extension unit 71.

[0112] As described above, in this embodiment, the substrate processing apparatus 1, which serves as a coating apparatus, corresponds to the "substrate processing apparatus" of the present invention. Furthermore, the slit nozzles 2 (2a, 2b) function as "nozzles" of the present invention. Additionally, the coating processing unit 5 (5a, 5b) functions as "nozzle blocks" of the present invention, and the nozzle maintenance units 6 (6a, 6b) function as "maintenance units" of the present invention, respectively.

[0113] Furthermore, in the above embodiment, the sides 40a and 40b of the platform 40 correspond to the "sides" of the present invention. Additionally, the extension members 41 to 44 function as "extension members" of the present invention. Furthermore, the nozzle support 51 functions as a "nozzle support" of the present invention. Furthermore, the portion of the guide rail 52 mounted on the platform 40 functions as a "guide member" of the present invention, while the portion of the guide rail 52 mounted on the extension portion 41, etc., functions as an "extension guide member" of the present invention. Finally, the linear motor 54 functions as a "moving mechanism" of the present invention.

[0114] Furthermore, in the above embodiments, the X direction corresponds to the "second direction" of the present invention, while the Y direction corresponds to the "first direction" of the present invention.

[0115] It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made in addition to the structures described above without departing from its spirit. For example, the substrate processing apparatus 1 of the above embodiment has two sets of coating processing units 5 (5a, 5b) relative to a stage 401. However, as shown below, even if there is only one set of coating processing units 5, the same effect as described above can be obtained.

[0116] Figure 9 This diagram shows a modified example of the substrate processing apparatus. In this modified example, the substrate processing apparatus 1A has only one coating processing unit 5, and consequently, the stage extension portion is only installed at one of the two ends of the stage block 40 in the Y direction. In such a substrate processing apparatus 1A, by configuring the extension members 41 and 42, which extend along the nozzle movement direction (Y direction), to be detachable from the stage block 40, the apparatus can be appropriately disassembled.

[0117] Furthermore, in the above embodiment, the generally cuboid-shaped extension members 41-44 and the platform 40 are joined by plate fittings, L-shaped fittings, etc. Alternatively, or otherwise, as described below, a structure in which the extension members and the platform are directly fixed may also be adopted.

[0118] Figure 10A and Figure 10B This is a diagram showing a modified example of the mounting structure for the extension member. For example... Figure 10AAs shown, in the extension member 42A of this modified example, a transverse hole 421A is provided on its (+X) side surface 42c, and a through hole 422A is also provided on its (+Y) side inner wall surface. Furthermore, a threaded hole 402 is provided on the (-Y) side surface 40d of the stage block 40A at a position corresponding to the through hole 422A. Moreover, bolts 851 inserted through the through holes 422A are prepared according to the number of through holes 422A provided.

[0119] like Figure 10B As shown, the extension member 42A abuts against the (-Y) side end face 40d of the stage block 40A. With the upper surfaces of both members at the same height, the extension member 42A and the stage block 40A are fastened together using bolts 851, allowing them to be directly and securely joined. Furthermore, by directly joining the extension member 42A and the stage block 40A, the straightness of the upper surface connecting the stage block 40A and the extension member 42A in the Y direction is easily ensured, and its reproducibility is improved.

[0120] The transverse hole 421A can be provided on the (-X) side of the extension member 42A, or it can be provided through the extension member 42A in the X direction. Alternatively, shallow transverse holes can be provided on both the (-X) and (+X) sides of the extension member 42A. Furthermore, multiple transverse holes can be provided on a single surface of the extension member 42A in the X direction.

[0121] Furthermore, the number of bolts used for fixing is arbitrary, and more bolts can be used to enhance the bonding force between the extension member 42A and the platform block 40A. However, if the transverse hole 421A is too large, the mechanical strength of the extension member 42A itself will decrease. Therefore, it is effective to combine it with other bonding means illustrated in the above embodiments to ensure the necessary strength.

[0122] Figures 11A to 11D These are diagrams illustrating other variations of the mounting structure for the extension member. For example... Figure 11A as well as Figure 11C As shown, in this modified example, the platform 40B has a stop hole 404 on its lower surface 40e for fastening the extension member 42B and the platform 40B, and a plurality of through holes 404A (four in this embodiment) extending from the (-Y) side surface 40f of the platform 40B to the (-Y) side inner wall of the stop hole 404. Additionally, a threaded hole (not shown) is provided on the (+Y) side surface 42d of the extension member 42B at a position corresponding to the through holes 404A. Furthermore, bolts 852 for inserting into the through holes 404A are provided according to the number of through holes 404A provided.

[0123] Additionally, a reference plate 410 is fixed to the lower surface 40e of the stage block 40B to ensure that the upper surface 40h of the stage block 40B is at the same height as the upper surface 42g of the extension member 42B. In this embodiment, as... Figure 11C and Figure 11D As shown, the reference plate 410 is formed as a cuboid, with its (-Y) side end protruding from the stage block 40B in the (-Y) direction, and its opposite side end, the (+Y) side end, fixed to the lower surface 40e of the stage block 40B. At this time, the reference plate 410 is configured such that its (+X) side surface 410b and the (+X) side surface 40g of the stage block 40B form approximately the same plane.

[0124] When installing the extension member 42B onto the platform block 40B, as follows: Figure 11B and Figure 11D As shown, the extension member 42B abuts against the (-Y) side surface 40f of the stage block 40B, and the lower surface 42e of the extension member 42B abuts against the upper surface 410a of the portion of the reference plate 410 protruding from the stage block 40B. Figure 11A The extension member 42B is placed in a contact manner. In this state, the upper surface 42g of the extension member 42B and the upper surface 40h of the platform 40B are at the same height. Furthermore, each bolt 852 enters from the stop hole 404 of the platform 40B, and the tip of each bolt 852 is inserted into the through hole 404A from the inner wall side of the (-Y) side of the stop hole 404. Then, the tip portion of the bolt 852 extending from the (-Y) side surface 40f of the platform 40B engages with the threaded hole of the corresponding extension member 42B, thereby fastening the extension member 42B to the platform 40B. It should be noted that in... Figure 11C In the diagram, the portion of the dashed line parallel to the Z-direction indicates that each bolt 852 is positioned in the stop hole 404 from the underside of the platform block 40B. Additionally, the portion of the dashed line parallel to the Y-direction indicates the insertion / tightening direction of each bolt 852. Figure 11A The dotted line corresponds to Figure 11C The part of the dotted line that is parallel to the Y direction.

[0125] In this way, by fastening the extension member 42B and the platform 40B with bolts 852, they can be directly and firmly joined together with the upper surfaces ((+Z) side surfaces) of the extension member 42B and the platform 40B having the same height. Furthermore, by providing a reference plate 410 on the platform 40B, when the extension member 42B is mounted on the platform 40B, straightness in the Y direction from the upper surface of the platform 40B connected to the extension member 42B is easily ensured, and its reproducibility is improved. In addition, by adopting such a structure, even if the platform 40B is made of stone, cracks or gaps are less likely to occur within the stop hole 404, resulting in excellent strength.

[0126] It should be noted that in this example, a stop hole 404 for inserting a bolt 852 is provided on the side of the platform 40B, but it can also be configured such that a stop hole for bolt insertion is provided on the side of the extension member 42B (the lower surface 42e of the extension member 42B). In this case, multiple through holes are provided, extending from the inner wall of the (+Y) side of the stop hole towards the (+Y) side surface of the extension member 42B, and threaded holes are provided on the (-Y) side surface 40f of the platform 40B at positions corresponding to the through holes. Then, bolts are inserted into the stop holes of the extension member 42B to fasten the extension member 42B and the platform 40B. According to this structure, even when the extension member 42B is formed of stone, cracks or gaps are less likely to occur in the stop holes, resulting in excellent strength.

[0127] Alternatively, a bolt insertion hole can be provided on the (+X) side 40g of the platform block instead of the stop hole 404 of the platform block 40B. In this case, a through hole for bolt insertion can be provided, extending from the inner wall of the (-Y) side of the bolt insertion hole to the (-Y) side 40f of the platform block 40B. Alternatively, a bolt insertion hole can be provided on the (+X) side 42f of the extension member 42B instead of the stop hole 404 in this example.

[0128] Alternatively, a support plate for reinforcing the support of the extension member 42B can be provided on the lower surface of the reference plate 410, so that the extension member 42B can be reliably supported by the reference plate 410 and the support plate.

[0129] Furthermore, the number of bolts used for fixing is arbitrary, and more bolts can be used to enhance the bonding force between the extension member 42B and the platform 40B. However, if the stop hole 404 is too large, the mechanical strength of the platform 40B itself will decrease. Therefore, it is effective to combine it with other bonding means illustrated in the above embodiments to ensure the necessary strength.

[0130] As described above in the specific embodiments, in the substrate processing apparatus of the present invention, for example, the distance between a pair of side surfaces can be the length in a first direction. That is, by not providing portions that protrude beyond the side surfaces of the stage block, the stage can be maximized relative to the upper limit size determined by constraints such as transport. In other words, substrates of the largest size can be processed within constraints.

[0131] Alternatively, the stage and extension members can also be stone platforms with flat upper surfaces. With such a structure, surface finishing with high flatness is possible, and by using stone that exhibits minimal dimensional changes due to temperature, a certain distance can be maintained between the substrate on the stage and the nozzle, resulting in coating with excellent quality.

[0132] Alternatively, a support beam may also be provided, extending from the lower surface of the extension member along a first direction to the lower surface of the platform block, supporting the extension member from the lower surface side in conjunction with the platform block. The extension member, which protrudes laterally from the platform block, and the extended guide member disposed on its upper surface, need to withstand the load generated by the nozzle block. By providing the support beam connecting the extension member and the platform block, the load-bearing capacity of the extension member can be increased, and positional misalignment between the extension member and the platform block in the vertical direction can be suppressed, achieving a nozzle block movement path without height differences.

[0133] Here, the support beam can also be substantially unsupported by other components. While receiving support from other components increases mechanical strength, stress concentration at specific locations can cause unevenness on the upper surface. Such unevenness can be prevented by reinforcing and supporting the extending components from the lower surface side using the support beam mounted on the platform.

[0134] Alternatively, for example, the guide member may be positioned further inward than the end of the upper surface of the stage block in a first direction, while the extended guide member may be a structure that protrudes outward than the end of the extension member in the first direction. With such a structure, when the extension member is joined to the stage block, the guide member and the extended guide member are connected to the upper surface of the stage block. When the guide member and the extended guide member are connected at the same location as the connection point between the extension member and the stage block, a height difference arises between them, but this difference can be suppressed by dispersing the connection points.

[0135] Alternatively, for example, extension members can be attached to both sides of the stage block in the first direction, and two sets of nozzle blocks sharing a common guide member can be provided. With this structure, two sets of nozzle blocks can be selectively used for coating the substrate. For example, while one nozzle block is undergoing maintenance, coating can be performed using the other nozzle block, thereby improving the operating rate of the device and increasing the processing throughput.

[0136] This invention can be applied to nozzle protectors for protecting nozzles and to the entire coating apparatus equipped with the nozzle protector.

Claims

1. A substrate processing apparatus, wherein having: a stage block having a pair of side surfaces parallel to each other, a flat stage capable of placing a substrate is provided on an upper surface; a pair of guide members, when a direction perpendicular to the pair of side surfaces is set as a first direction and a direction perpendicular to the first direction and along the upper surface of the stage is set as a second direction, are provided so as to sandwich the stage at positions outward of both ends of the stage in the second direction and extend along the upper surface of the stage block in the first direction; a nozzle block having a nozzle, a nozzle outlet is provided above the stage so as to open in a slit shape in the second direction; and a nozzle support portion supporting the nozzle and engaging with each of the pair of guide members in a manner movable in the first direction; a pair of extension members combined with the stage block in a manner detachable in the first direction from one of the pair of side surfaces; a pair of extension guide members supported from below by the pair of extension members and extending in the first direction by engaging with the end portions in the first direction of the pair of guide members, respectively; a moving mechanism moving the nozzle block along the pair of guide members and the pair of extension guide members; and a maintenance portion provided between the pair of extension guide members when viewed from above, performing maintenance of the nozzle, the pair of extension members are provided so as to sandwich a space for arranging the maintenance portion from the second direction, the stage has a rectangular shape when viewed from above with the first direction as a short side direction, a length of the stage block in the first direction is smaller than a length in the second direction, the guide members terminate at positions inward of the end portions of the upper surface of the stage block in the first direction, on the other hand, the extension guide members protrude to positions outward of the end portions of the extension members in the first direction, the portions of the extension guide members protruding to the positions outward of the end portions of the extension members in the first direction are fixed to the upper surface of the stage block, the moving mechanism is two linear motors having a stator and a mover, the two linear motors are provided on both sides of the second direction of the stage block and the extension members, respectively, the stator is provided so as to extend in the first direction and can be divided into a portion provided to the stage block and a portion provided to the extension member, by moving the nozzle block along the pair of guide members in the first direction by the moving mechanism above the substrate placed on the stage block, the substrate is coated with a processing liquid by moving the nozzle and ejecting the processing liquid from the nozzle outlet.

2. The substrate processing apparatus according to claim 1, wherein a distance between the pair of side surfaces is a length of the stage block in the first direction.

3. The substrate processing apparatus according to claim 1, wherein the stage block and the extension member are stone platforms whose upper surfaces are processed to be flat.

4. The substrate processing apparatus according to claim 1, wherein has: a support beam extending from a lower surface of the extension member to a lower surface of the stage block in the first direction, and joining the extension member and the stage block from the lower surface side to support the extension member.

5. The substrate processing apparatus according to claim 4, wherein the support beam is substantially not supported by other members.

6. The substrate processing apparatus according to claim 1, wherein the extension member is joined to both sides of the stage block in the first direction, the substrate processing apparatus has two sets of the nozzle blocks sharing the guide member.

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