An integrated device and method for plasma cleaning, inspection, and sorting of cover glass

Abstract

The application relates to the technical field of cover plate glass processing, in particular to a plasma cleaning, detection and sorting integrated processing device and method for cover plate glass, which comprises a cabinet body; an operation table arranged at the top of the cabinet body; a PLASMA platform for loading a tray, a transfer platform and a conveying platform arranged in the cabinet body; a transfer mechanical arm for transferring the tray arranged between the PLASMA platform and the transfer platform; a detection mechanism for detecting defects of the cover plate glass and installed on the operation table; a carrying mechanical arm for carrying the cover plate glass to the detection mechanism and installed on the operation table; and a sorting mechanical arm installed on the operation table. The application realizes PLASMA processing and dry wiping feeding and discharging simultaneously, provides high-precision detection and sorting equipment, effectively avoids the problems of missed detection or wrong detection, and combines the originally dispersed manufacturing steps into the same equipment, so that the production rate is greatly improved and the cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of cover plate glass processing, in particular to a plasma cleaning, detection, sorting integrated processing device and method for cover plate glass. BACKGROUND

[0002] With the development of science and technology, cover plate glass is more and more widely used in various industries, such as commercial display, vehicle-mounted, UTG, etc. In the manufacturing process of cover plate glass, the glass after coating needs to be cleaned by plasma (i.e. PLASMA cleaning process) and dry wiping before bonding.

[0003] However, in the current industry, plasma cleaning and dry wiping are carried out separately, and the glass cannot be inspected before bonding, which causes a lot of time and labor waste, and may also cause damage to the glass during transportation, resulting in rising costs and declining production efficiency. In addition, traditional detection methods often rely on manual inspection, which not only requires high skills of the operator, but also has the possibility of misdiagnosis. Therefore, it has high practical value to develop a device that can simultaneously perform defect detection, sorting, plasma cleaning and dry wiping. SUMMARY

[0004] To solve the problems in the background art, the present application provides a plasma cleaning, detection, sorting integrated processing device for cover plate glass, which comprises a cabinet body; an operation table arranged at the top of the cabinet body; a PLASMA platform for carrying a tray, a transfer platform and a conveying platform arranged inside the cabinet body; the tray is loaded with cover plate glass; a PLASMA cleaning mechanism installed above the PLASMA platform; a transfer mechanical arm for transferring the tray arranged between the PLASMA platform and the transfer platform; a detection mechanism installed on the operation table for detecting defects of the cover plate glass; a carrying mechanical arm installed on the operation table for carrying the cover plate glass to the detection mechanism; a sorting mechanical arm installed on the operation table for sorting the cover plate glass; wherein:

[0005] The detection mechanism comprises a detection table provided with an upper platform and a base for placing the cover plate glass; the two ends of the upper platform are provided with mobile roller shafts carrying dust-free cloth for cleaning the cover plate glass;

[0006] The base is provided with a laser component for detecting defects of the cover plate glass; the base is provided with a moving groove, and the laser component is slidingly installed in the moving groove and can move left and right along the moving groove;

[0007] The side of the detection table is provided with an ion fan for removing dust points of the cover plate glass, and a roller type cleaning mechanical arm for cleaning the cover plate glass.

[0008] In the preferred solution, the end of the roller cleaning mechanical arm is provided with a dust-free cloth placing roller and a dust-free cloth recycling roller, and a dust-free cloth is installed between the dust-free cloth placing roller and the dust-free cloth recycling roller. After the dust-free cloth placing roller and the dust-free cloth recycling roller are moved above the cover plate glass by the roller cleaning mechanical arm, the dust-free cloth is attached to the cover plate glass, and the dust-free cloth is rotated by the dust-free cloth placing roller and the dust-free cloth recycling roller to clean the cover plate glass.

[0009] In the preferred solution, the laser component includes a transmission system for detecting burning defects during PLASMA processing and a reflection system for detecting transport scratches, dust spots and dirt. The operating platform is also provided with a signal receiver for transmitting data of the transmission system and the reflection system.

[0010] In the preferred solution, the cabinet is provided with a temperature probe, a humidity probe and a particle concentration probe for detecting environmental parameters in the cabinet, and an air purification device for purifying air.

[0011] In the preferred solution, the side of the cabinet is provided with a computer in communication connection with the transport mechanical arm, the carrying mechanical arm, the sorting mechanical arm, the signal receiver, the roller cleaning mechanical arm, the temperature probe, the humidity probe, the particle concentration probe and the air purification device.

[0012] In the preferred solution, the PLASMA cleaning mechanism includes a cleaning main machine, a telescopic rod telescoping in the X-axis direction, and a nozzle installed at the front end of the telescopic rod. The cabinet is provided with an air inlet hole and an air outlet hole for connecting the cleaning main machine and the nozzle. The nozzle is installed above the PLASMA platform for PLASMA cleaning of the cover plate glass in the tray carried by the PLASMA platform. The rear end of the telescopic rod is slidingly connected to the inside of the cabinet and can move in the Y-axis direction.

[0013] In the preferred solution, the operating platform is also provided with a waste box for placing unqualified products. The sorting mechanical arm is provided with a multi-degree-of-freedom rotating shaft and a clamping jaw. The unqualified cover plate glass detected by the detection mechanism is grabbed by the clamping jaw and placed in the waste box.

[0014] In the preferred solution, the cabinet is provided with a cabinet door, and the cabinet is sequentially provided with a PLASMA platform, a transport platform and a conveying platform, each of which is connected with a lead screw for driving the respective lead screw to move up and down in the Z-axis direction. The conveying platform is arranged at the front end of the transport platform, and the transport platform is provided with a transmission mechanism for pushing the tray from the transport platform to the conveying platform. The conveying platform can convey the tray to the operating platform in the Z-axis direction.

[0015] In the preferred solution, the tray includes a main body structure and a silica gel telescopic device arranged in the main body structure and capable of telescoping up and down. The silica gel telescopic device is provided with a suction nozzle at the upper end for adsorbing the cover plate glass. The main body structure is made of resin material.

[0016] A plasma cleaning, detection, sorting integrated processing method for cover plate glass, comprising the following steps:

[0017] S1, open the cabinet door of the cabinet body, and convey the tray loaded with cover plate glass to the PLASMA platform through the conveying belt for plasma cleaning treatment on the PLASMA platform;

[0018] S2, after the plasma cleaning treatment is completed, the tray is clamped to the transfer platform by the transfer mechanical arm, and is pushed to the conveying platform by the transmission mechanism of the transfer platform, and is conveyed to the operation table by the conveying platform;

[0019] S3, the handling mechanical arm takes off the cover plate glass on the tray and places it on the detection mechanism; the tray with the cover plate glass removed is placed on the operation table by the handling mechanical arm;

[0020] S4, the roller type cleaning mechanical arm moves the dust-free cloth placing roller and the dust-free cloth recycling roller above the cover plate glass, the dust-free cloth is attached to the cover plate glass, and the dust-free cloth is cleaned by the dust-free cloth placing roller and the dust-free cloth recycling roller rotating to drive the dust-free cloth;

[0021] S5, the detection mechanism is provided with a laser component and a moving groove, the laser component moves in the moving groove to detect defects of the cover plate glass, and unqualified products are sorted by the sorting mechanical arm; the laser component includes a transmission system for detecting burning defects during PLASMA treatment, and a reflection system for detecting transfer scratches, dust points and dirt, and the detection process includes:

[0022] S51, transmission system detection: the small area burning of the cover plate glass surface caused by PLASMA treatment will affect the laser transmission rate of the cover plate glass, the transmission rate of the whole surface of the cover plate glass is tested by the transmission system, and the deviation ξ is obtained by comparing with the standard transmission rate; the detection signal is transmitted to the signal receiver, and then transmitted to the computer by the receiver, and the deviation threshold value ξ0 of the transmission rate of the whole surface of the cover plate glass and the standard transmission rate is set;

[0023] S511, if ξ≤ξ0, it is judged that the transmission rate is qualified, and the qualified product is carried to the temporary storage area of the operation table by the computer control sorting mechanical arm, and is prepared for reflection rate detection;

[0024] S512, if ξ>ξ0, it is judged that there is burning, and the computer controls the moving roller of the detection table to drive the dust-free cloth to wipe;

[0025] S513, after wiping, the transmission system performs secondary detection, if ξ≤ξ0, it is judged that the transmission rate is qualified, and the qualified product is carried to the temporary storage area of the operation table by the computer control sorting mechanical arm, and is prepared for reflection rate detection; if ξ>ξ0, the cover plate glass is transported to the waste box by the sorting mechanical arm;

[0026] S52, the reflection system detects: the dust spot of the glass surface, the dirty which is not easy to dry wipe can cause the different light reflectivity, the cover glass of the temporary storage area passes through the reflection system, tests the reflectivity of the cover glass whole surface, compares with the standard reflectivity and obtains the deviation epsilon;The detection signal is transmitted to the signal receiver, and is transmitted to the computer by the receiver, and the deviation threshold epsilon0 of the test cover glass whole surface reflectivity and the standard reflectivity is set;

[0027] S521, if epsilon is less than or equal to epsilon0, it is judged as a qualified product, and the computer controls the sorting mechanical arm to carry the qualified product to the qualified product area;

[0028] S522, if epsilon is greater than epsilon0, it is judged that there may be a bad condition, the computer controls the ion fan to start, and the cover glass is cleaned by blowing and wiping;

[0029] S523, after processing, the second detection is carried out through the system, if epsilon is less than or equal to epsilon0, the computer controls the sorting mechanical arm to carry the qualified product to the qualified product area;If epsilon is greater than epsilon0, the cover glass is transported to the waste box by the sorting mechanical arm.

[0030] The beneficial effects achieved by the present application are:

[0031] Firstly, the present application realizes the PLASMA processing and dry wiping feeding and discharging simultaneously, and provides high-precision detection and sorting equipment, which can avoid the problems of missed detection or wrong detection caused by human factors;

[0032] Secondly, the present application combines the original dispersed manufacturing steps into the same equipment, which greatly improves the production rate;

[0033] Thirdly, the present application provides a new cover glass transfer tray, which avoids the problems of breakage, scratching and other adverse problems caused by sliding and friction of glass during the transfer process;

[0034] Fourthly, the present application provides a device for automatic PLASMA processing, dry wiping feeding and discharging and automatic sorting of cover glass, which effectively utilizes the use space and is more convenient to operate, increases work efficiency and reduces cost. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a schematic diagram of the three-dimensional structure of the present application Figure One ;

[0036] Figure 2 is Figure 1 the enlarged view of the structure at D in figure

[0037] Figure 3 is a schematic diagram of the three-dimensional structure of the present application Figure Two ;

[0038] Figure 4 is a schematic diagram of the three-dimensional structure of the present application Figure Three ;

[0039] Figure 5 is a schematic diagram of the detection mechanism structure

[0040] Figure 6 is a schematic diagram of the tray structure

[0041] Figure 7 is a schematic diagram of the three-dimensional structure of the present application Figure Four .

[0042] Figure label:

[0043] 1, PLASMA platform; 2, transfer platform; 21, transmission mechanism; 3, conveying platform; 41, transfer mechanical arm; 42, carrying mechanical arm; 43, sorting mechanical arm; 431, clamping jaw; 5, cabinet body; 51, computer; 52, air purifier; 53, temperature probe; 54, humidity probe; 55, particle concentration probe; 56, waste box; 57, operation table; 58, cabinet door; 6, PLASMA cleaning mechanism; 61, nozzle; 62, telescopic rod; 7, detection mechanism; 71, detection table; 72, ion fan; 73, signal receiver; 74, roller type cleaning mechanical arm; 741, dust-free cloth placement roller; 742, dust-free cloth recovery roller; 75, moving roller; 76, laser component; 77, moving groove; 8, tray; 81, silica gel telescopic device; 9, cover glass. DETAILED DESCRIPTION

[0044] The technical solutions in the present application will be described clearly and completely below in combination with the drawings in the present application, and in addition, the forms of each structure described in the following embodiments are only examples, and the present application is not limited to each structure described in the following embodiments. All other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0045] Reference Figures 1-7The application provides an integrated processing device for plasma cleaning, detection and sorting of cover plate glass 9, which comprises a cabinet body 5, an operation table 57 arranged on the top of the cabinet body 5, a PLASMA platform 1 for loading a tray 8, a transfer platform 2 and a conveying platform 3 arranged in the cabinet body 5, wherein the tray 8 is loaded with the cover plate glass 9, a PLASMA cleaning mechanism 6 installed above the PLASMA platform 1, a transfer mechanical arm 41 arranged between the PLASMA platform 1 and the transfer platform 2 and used for transferring the tray 8, a detection mechanism 7 installed on the operation table 57 and used for detecting defects of the cover plate glass 9, a carrying mechanical arm 42 installed on the operation table 57 and used for carrying the cover plate glass 9 to the detection mechanism 7, a sorting mechanical arm 43 installed on the operation table 57 and used for sorting the cover plate glass 9, and wherein

[0046] The detection mechanism 7 comprises a detection table 71, which is provided with an upper platform and a base for placing the cover plate glass 9, and the two ends of the upper platform are provided with moving roller shafts 75 loaded with dust-free cloth and used for cleaning the cover plate glass 9.

[0047] The base is provided with a laser component 76 used for detecting defects of the cover plate glass 9, and the base is provided with a moving groove 77, and the laser component 76 is slidingly installed in the moving groove 77 and can move left and right along the moving groove 77.

[0048] The side of the detection table 71 is provided with an ion fan 72 used for removing dust points of the cover plate glass 9 and a roller shaft type cleaning mechanical arm 74 used for cleaning the cover plate glass 9.

[0049] The end of the roller shaft type cleaning mechanical arm 74 is provided with a dust-free cloth placing roller shaft 741 and a dust-free cloth recycling roller shaft 742, and the dust-free cloth is installed between the dust-free cloth placing roller shaft 741 and the dust-free cloth recycling roller shaft 742, after the dust-free cloth placing roller shaft 741 and the dust-free cloth recycling roller shaft 742 are moved above the cover plate glass 9 by the roller shaft type cleaning mechanical arm 74, the dust-free cloth is attached to the cover plate glass 9, and the dust-free cloth is rotated by the dust-free cloth placing roller shaft 741 and the dust-free cloth recycling roller shaft 742 to clean the cover plate glass 9.

[0050] The laser component 76 comprises a transmission system used for detecting burning defects during PLASMA processing and a reflection system used for detecting transfer scratches, dust points and dirt, and the operation table 57 is further provided with a signal receiver 73 used for transmitting data of the transmission system and the reflection system.

[0051] The cabinet 5 is provided with a temperature probe 53, a humidity probe 54, a particle concentration probe 55 for detecting the environmental parameters in the cabinet 5, and an air purification device for purifying air. When the temperature and humidity exceed the range, the test device can automatically adjust the temperature and humidity. When the environment exceeds the standard, a signal is transmitted to the air purification device to purify the air in the device to ensure that the production requirements are met.

[0052] The computer 51 is communicatively connected to the transfer robot arm 41, the carrying robot arm 42, the sorting robot arm 43, the signal receiver 73, the roller cleaning robot arm 74, the temperature probe 53, the humidity probe 54, the particle concentration probe 55, and the air purification device.

[0053] The PLASMA cleaning mechanism 6 includes a cleaning main machine, a telescopic rod 62 extending in the X-axis direction, and a nozzle 61 installed at the front end of the telescopic rod 62; the cabinet 5 is provided with an air inlet hole and an air outlet hole for connecting the cleaning main machine to the nozzle 61; the nozzle 61 is installed above the PLASMA platform 1 for PLASMA cleaning of the cover glass 9 in the tray 8 carried by the PLASMA platform 1; the rear end of the telescopic rod 62 is slidingly connected to the inside of the cabinet 5 and can move in the Y-axis direction.

[0054] The operation table 57 is also provided with a waste box 56 for placing unqualified products, and the sorting robot arm 43 is provided with a multi-degree-of-freedom rotating shaft and a gripper 431. The unqualified cover glass 9 detected by the detection mechanism 7 is grabbed by the gripper 431 and placed in the waste box 56.

[0055] The cabinet 5 is provided with a cabinet door 58, and the cabinet 5 is sequentially provided with a PLASMA platform 1, a transfer platform 2, and a conveying platform 3, each of which is connected to a lead screw for driving the respective lead screw to move up and down in the Z-axis direction; the conveying platform 3 is arranged at the front end of the transfer platform 2, and the transfer platform 2 is provided with a transmission mechanism 21 for pushing the tray 8 from the transfer platform 2 to the conveying platform 3; the conveying platform 3 can convey the tray 8 to the operation table 57 in the Z-axis direction.

[0056] The tray 8 includes a main body structure and a silicon rubber expander 81 arranged in the main body structure and capable of extending up and down; the silicon rubber expander 81 is provided with a suction nozzle at the upper end for adsorbing the cover glass 9; the main body structure is made of resin material. The silicon rubber expander 81 can be extended up and down, and when the cover glass 9 is placed on the tray 8, it can be placed according to the different sizes and different structures (2D, 2.5D, 3D) or other special shapes of the cover glass 9, so that the cover glass 9 is placed in the sunken area, and the area without the cover glass 9 remains unchanged, which can play a role in positioning and protecting the cover glass 9 from falling off and sliding; the suction nozzle on the silicon rubber expander 81 can adsorb the cover glass 9, further playing a fixing role, and also playing a buffering role when the cover glass 9 is taken.

[0057] The integrated processing device for plasma cleaning, detection and sorting of the cover plate glass 9 opens the cabinet door 58 of the cabinet body 5, and the tray 8 loaded with the cover plate glass 9 is conveyed to the PLASMA platform 1 through the conveying belt, and the plasma cleaning process is carried out on the PLASMA platform 1; after the plasma cleaning process is completed, the tray 8 is clamped to the transfer platform 2 by the transfer mechanical arm 41, and is pushed to the conveying platform 3 by the transmission mechanism 21 of the transfer platform 2, and is conveyed to the operation table 57 by the conveying platform 3; the cover plate glass 9 on the tray 8 is taken off by the carrying mechanical arm 42 and placed on the detection mechanism 7; the tray 8 with the cover plate glass 9 is placed on the operation table 57 by the carrying mechanical arm 42; the dust-free cloth is placed on the roller shaft 741 and the dust-free cloth recovery roller shaft 742 above the cover plate glass 9, and the dust-free cloth is attached to the cover plate glass 9, and the dust-free cloth is cleaned on the cover plate glass 9 by rotating the dust-free cloth placing roller shaft 741 and the dust-free cloth recovery roller shaft 742;

[0058] The detection mechanism 7 is provided with a laser component 76 and a moving groove 77, the laser component 76 moves in the moving groove 77 to detect defects of the cover plate glass 9, and unqualified products are sorted by the sorting mechanical arm 43; the laser component 76 includes a transmission system for detecting burning defects during PLASMA processing, and a reflection system for detecting transfer scratches, dust spots and dirt, and the detection process includes:

[0059] The transmission system detects: the small area burning of the cover plate glass 9 surface caused by the PLASMA processing will affect the laser transmission rate of the cover plate glass 9, the transmission system tests the transmission rate of the whole surface of the cover plate glass 9, and compares it with the standard transmission rate to obtain the deviation ξ; the detection signal is transmitted to the signal receiver 73, and then to the computer 51 by the receiver, and the deviation threshold ξ0 of the test transmission rate of the whole surface of the cover plate glass 9 and the standard transmission rate is set;

[0060] If ξ≤ξ0, it is judged that the transmission rate is qualified, and the qualified products are carried to the temporary storage area of the operation table 57 by the computer 51 to prepare for the reflectivity detection;

[0061] If ξ>ξ0, it is judged that there is burning, and the computer 51 controls the moving roller 75 of the detection table 71 to drive the dust-free cloth to wipe;

[0062] After wiping, the transmission system carries out secondary detection, if ξ≤ξ0, it is judged that the transmission rate is qualified, and the qualified products are carried to the temporary storage area of the operation table 57 by the computer 51 to prepare for the reflectivity detection; if ξ>ξ0, the cover plate glass 9 is transported to the waste box 56 by the sorting mechanical arm 43;

[0063] Reflection system detection: dust spots and difficult-to-clean dirt on the glass surface can cause different light reflectivity. The cover glass 9 in the temporary storage area is tested by the reflection system. The reflectivity of the entire surface of the cover glass 9 is compared with the standard reflectivity to obtain the deviation ε. The detection signal is transmitted to the signal receiver 73 and then to the computer 51. The deviation threshold ε0 of the reflectivity of the entire surface of the cover glass 9 from the standard reflectivity is set.

[0064] If ε≤ε0, it is judged to be a qualified product. The computer 51 controls the sorting mechanical arm 43 to transport the qualified product to the qualified product area.

[0065] If ε>ε0, it is judged that there may be a defect. The computer 51 controls the ion fan 72 to start and clean the entire surface of the cover glass 9 by blowing. At the same time, the moving roller 75 of the detection table 71 drives the dust-free cloth to wipe the cover glass 9.

[0066] After processing, the system is detected again. If ε≤ε0, the computer 51 controls the sorting mechanical arm 43 to transport the qualified product to the qualified product area. If ε>ε0, the sorting mechanical arm 43 transports the cover glass 9 to the waste box 56.

[0067] The above process realizes the PLASMA processing and dry wiping unloading at the same time, and provides a high-precision detection and sorting method, effectively avoiding the problems of missed detection or wrong detection caused by human factors.

[0068] The above only describes the preferred embodiments of the present application and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An integrated apparatus for plasma cleaning, inspection, and sorting of cover glass, characterized by, It includes: Cabinet (5); The operating platform (57) provided on the top of the cabinet (5); PLASMA platform (1), transfer platform (2), conveying platform (3) for carrying tray (8) are arranged in the cabinet (5); the tray (8) is loaded with cover glass (9); PLASMA cleaning mechanism (6) installed above the PLASMA platform (1); Transfer robot (41) for transferring tray (8) is arranged between the PLASMA platform (1) and the transfer platform (2); Detection mechanism (7) for detecting defects of cover glass (9) is installed on the operating platform (57); The carrying robot (42) for carrying the cover glass (9) to the detection mechanism (7) is installed on the operating platform (57); The sorting robot (43) for sorting the cover glass (9) is installed on the operating platform (57); Wherein: The detection mechanism (7) includes a detection table (71), which is provided with an upper platform and a base for placing the cover glass (9); the upper platform is provided with a moving roller shaft (75) carrying a dust-free cloth at both ends, for cleaning the cover glass (9); The base is provided with a laser component (76) for detecting defects of the cover glass (9); the base is provided with a moving groove (77), and the laser component (76) is slidingly installed in the moving groove (77) and can move left and right along the moving groove (77); The detection table (71) is provided with an ion fan (72) for removing dust points of the cover glass (9), and a roller type cleaning robot arm (74) for cleaning the cover glass (9); The end of the roller type cleaning robot arm (74) is provided with a dust-free cloth placing roller shaft (741) and a dust-free cloth recycling roller shaft (742), and a dust-free cloth is installed between the dust-free cloth placing roller shaft (741) and the dust-free cloth recycling roller shaft (742); after the dust-free cloth placing roller shaft (741) and the dust-free cloth recycling roller shaft (742) are moved above the cover glass (9) by the roller type cleaning robot arm (74), the dust-free cloth is attached to the cover glass (9), and the dust-free cloth is rotated by the dust-free cloth placing roller shaft (741) and the dust-free cloth recycling roller shaft (742) to clean the cover glass (9); The laser component (76) includes a transmission system for detecting burning defects during PLASMA processing, and a reflection system for detecting transfer scratches, dust points and dirt, and a signal receiver (73) for transmitting data of the transmission system and the reflection system is arranged on the operating platform (57); The plasma cleaning mechanism (6) comprises a cleaning main machine, a telescopic rod (62) extending along the X-axis direction, and a nozzle (61) installed at the front end of the telescopic rod (62); the cabinet (5) is provided with an air inlet hole and an air outlet hole for connecting the nozzle (61) with the cleaning main machine; the nozzle (61) is installed above the PLASMA platform (1) and is used for performing plasma cleaning on the cover plate glass (9) in the tray (8) carried by the PLASMA platform (1); the rear end of the telescopic rod (62) is slidingly connected to the inner side of the cabinet (5) and can move along the Y-axis direction; The cabinet (5) is provided with a cabinet door (58), and the cabinet (5) is sequentially provided with the PLASMA platform (1), the transfer platform (2), and the conveying platform (3); the PLASMA platform (1), the transfer platform (2), and the conveying platform (3) are respectively connected with a lead screw for driving each to ascend and descend along the Z-axis direction; the conveying platform (3) is arranged at the front end of the transfer platform (2), and the transfer platform (2) is provided with a transmission mechanism (21) for pushing the tray (8) from the transfer platform (2) to the conveying platform (3); the conveying platform (3) can convey the tray (8) to the operation table (57) along the Z-axis direction; The tray (8) comprises a main body structure and a silica gel telescopic device (81) arranged in the main body structure and capable of extending up and down; the upper end of the silica gel telescopic device (81) is provided with a suction nozzle for adsorbing the cover plate glass (9); the main body structure is made of resin material.

2. The apparatus for integrated processing of plasma cleaning, inspection, and sorting of cover glass according to claim 1, characterized by: The cabinet (5) is provided with a temperature probe (53), a humidity probe (54), a particle concentration probe (55) for detecting the environmental parameters in the cabinet (5), and an air purification device for purifying air.

3. The apparatus for integrated processing of plasma cleaning, inspection, and sorting of cover glass according to claim 2, characterized by: The cabinet (5) is provided with a computer (51) in communication connection with the transfer robot arm (41), the carrying robot arm (42), the sorting robot arm (43), the signal receiver (73), the roller type cleaning robot arm (74), the temperature probe (53), the humidity probe (54), the particle concentration probe (55), and the air purification device.

4. The apparatus for integrated processing of plasma cleaning, inspection, and sorting of cover glass according to claim 1, characterized by: The operation table (57) is further provided with a waste box (56) for placing unqualified products, the sorting robot arm (43) is provided with a multi-degree-of-freedom rotating shaft and a clamping jaw (431), and the unqualified cover plate glass (9) detected by the detection mechanism (7) is grabbed by the clamping jaw (431) to the waste box (56).

5. A method for integrated processing of plasma cleaning, inspection and sorting of cover glass using the apparatus according to any one of claims 1 to 4, characterized in that, It comprises the following steps: S1, open the cabinet door (58) of the cabinet (5), convey the tray (8) loaded with the cover plate glass (9) to the PLASMA platform (1) through the conveying belt, and perform plasma cleaning treatment on the PLASMA platform (1); S2, after the plasma cleaning treatment is completed, the tray (8) is clamped to the transfer platform (2) by the transfer robot arm (41), is pushed to the conveying platform (3) by the transmission mechanism (21) of the transfer platform (2), and is conveyed to the operation table (57) by the conveying platform (3); S3, the carrying robot arm (42) takes off the cover plate glass (9) on the tray (8) and places it on the detection mechanism (7); the tray (8) from which the cover plate glass (9) is taken off is placed on the operation table (57) by the carrying robot arm (42); S4, the roller cleaning robot (74) moves the dust cloth placing roller (741) and the dust cloth recycling roller (742) above the cover glass (9), the dust cloth is attached to the cover glass (9), and the dust cloth is cleaned on the cover glass (9) by the rotation of the dust cloth placing roller (741) and the dust cloth recycling roller (742); S5, the detection mechanism (7) is provided with a laser component (76) and a moving groove (77), the laser component (76) moves in the moving groove (77) to detect the defects of the cover glass (9), and the unqualified products are sorted by the sorting robot (43); the laser component (76) includes a transmission system for detecting the burning defect during plasma treatment, and a reflection system for detecting the transfer scratch, dust point and dirt, and the detection process includes: S51, the transmission system detects: the small area burning of the cover glass (9) caused by plasma treatment will affect the laser transmission rate of the cover glass (9), through the transmission system, the transmission rate of the cover glass (9) is tested, and the deviation ξ is obtained by comparing with the standard transmission rate; the detection signal is transmitted to the signal receiver (73), and then transmitted to the computer (51) by the receiver, and the deviation threshold ξ0 of the transmission rate of the cover glass (9) is set; S511, if ξ≤ξ0, it is judged that the transmission rate is qualified, and the sorting robot (43) is controlled by the computer (51) to carry the qualified product to the temporary storage area of the operation table (57), ready for reflection rate detection; S512, if ξ>ξ0, it is judged that there is burning, and the computer (51) controls the moving roller (75) of the detection table (71) to drive the dust cloth to wipe; S513, after wiping, the transmission system is detected again, if ξ≤ξ0, it is judged that the transmission rate is qualified, and the sorting robot (43) is controlled by the computer (51) to carry the qualified product to the temporary storage area of the operation table (57), ready for reflection rate detection; if ξ>ξ0, the cover glass (9) is transported to the waste box (56) by the sorting robot (43); S52, the reflection system detects: the dust point and the dirt which is not easy to dry wipe on the surface of the glass will cause different light reflectivity, the cover glass (9) in the temporary storage area is tested by the reflection system, the reflectivity of the cover glass (9) is tested, and the deviation ε is obtained by comparing with the standard reflectivity; the detection signal is transmitted to the signal receiver (73), and then transmitted to the computer (51) by the receiver, and the deviation threshold ε0 of the reflectivity of the cover glass (9) is set; S521, if ε≤ε0, it is judged that the product is qualified, and the sorting robot (43) is controlled by the computer (51) to carry the qualified product to the qualified product area; S522, if ε>ε0, it is judged that there may be defects, the computer (51) controls the ion fan (72) to start, blows the cover glass (9) and cleans the cover glass (9) at the same time, and the moving roller (75) of the detection table (71) drives the dust cloth to wipe the cover glass (9); S523, the post-processing reflection system performs secondary detection. If ε≤ε0, the computer (51) controls the sorting mechanical arm (43) to transport the qualified product to the qualified product area. If ε>ε0, the cover glass (9) is transported to the waste box (56) by the sorting mechanical arm (43).

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