Electron Curtain Accelerator and its Usage

Abstract

This invention relates to the field of accelerators, providing an electron curtain accelerator and its usage method. The electron curtain accelerator includes an electron curtain body, which comprises an outer cylinder and a cathode cylinder. The cathode cylinder is disposed inside the outer cylinder, and its inner wall is filled with a zirconium vanadium iron (ZVA FI) getter. A pump assembly is connected to the rear end of the outer cylinder, and a vacuum valve is provided between the pump assembly and the rear end of the outer cylinder. By placing the ZVA FI getter on the inner wall of the cathode cylinder, a vacuum environment can be generated within the electron curtain body by evacuating the vacuum using the pump assembly. Simultaneously, the ZVA FI getter is activated by heating the filament to a certain current, thus enabling the ZVA FI getter to maintain a vacuum relative to the electron curtain body. After the vacuum environment within the electron curtain body is formed and stabilized, the pump assembly can be separated by opening and closing the vacuum valve, thereby reducing the size and operating cost of the electron curtain accelerator, as well as lowering its power consumption and energy consumption.

Description

Technical Field

[0001] This invention relates to the field of accelerators, and provides an electron curtain accelerator and its usage method. Background Technology

[0002] Irradiation-type electron curtain accelerators mainly consist of a cathode assembly, a titanium window assembly, and a vacuum chamber assembly. Their working principle involves electrons emitted from the surface of a hot tungsten filament cathode in a vacuum environment. The beam size is controlled by a grid voltage, and the emission angle is controlled by a semi-circular focusing electrode. After being accelerated by a high-voltage electric field between the cathode cylinder and the outer wall of the vacuum chamber, the electrons penetrate the titanium window structure composed of a copper grid and a 10μm titanium film into the air for surface irradiation processing. They are primarily used for coating curing, packaging printing, and surface sterilization, with significant advantages, especially in the sterilization of food cold chains, medical reagent kits, and express delivery surfaces. Foreign countries have a longer history of development in this field, with mature technology and a relatively complete industrial chain, and are trending towards miniaturization. Domestically, they are still in the research and development stage, with some products already on the market. However, current electron curtain accelerators on the market have a large vacuum system at the tail end, requiring a vacuum pump to continuously evacuate to maintain a stable working environment; when applied to production lines, their size is also somewhat bulky. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the related art. To this end, the present invention proposes an electron curtain accelerator that can reduce the electron curtain accelerator's dependence on a vacuum system and reduce the size of the electron curtain accelerator.

[0004] This invention also provides a method for using an electron curtain accelerator.

[0005] A first aspect of the present invention provides an electron curtain accelerator, comprising:

[0006] An electronic curtain body, comprising an outer cylinder and a cathode cylinder, wherein the cathode cylinder is disposed inside the outer cylinder and the inner wall of the cathode cylinder is filled with a zirconium vanadium iron getter.

[0007] A pump assembly is connected to the rear end of the outer cylinder, and a vacuum valve is provided between the pump assembly and the rear end of the outer cylinder.

[0008] According to the first aspect of the present invention, the electron curtain accelerator, by setting a cathode cylinder in the outer cylinder and placing a zirconium vanadium iron getter on the inner wall of the cathode cylinder, can generate a vacuum environment in the electron curtain body by evacuating the vacuum using a pump assembly. Simultaneously, the zirconium vanadium iron getter is activated by heating the filament to a certain current, thus enabling the zirconium vanadium iron getter to maintain a vacuum relative to the electron curtain body. After the vacuum environment in the electron curtain body is formed and stabilized, the pump assembly can be separated by opening and closing a vacuum valve, thereby reducing the size and operating cost of the electron curtain accelerator, as well as lowering its power consumption and losses.

[0009] According to one embodiment of the present invention, it further includes a titanium window assembly, the titanium window assembly comprising:

[0010] Titanium window brackets are welded to the outer cylinder;

[0011] A stainless steel frame is connected to the side of the titanium window bracket opposite to the outer cylinder;

[0012] A titanium membrane is attached to the side of the stainless steel frame opposite to the titanium window bracket.

[0013] According to one embodiment of the present invention, a water-cooling pipe is provided in the titanium window assembly.

[0014] According to one embodiment of the present invention, a metal flange is provided at the front end of the outer cylinder, and a shielding ring is provided at the end of the cathode cylinder facing the front end of the outer cylinder;

[0015] The metal flange is connected to the cathode cylinder in sequence via a ceramic cone and a ceramic insulating plate;

[0016] Part of the ceramic cone extends into the shielding ring.

[0017] According to one embodiment of the present invention, a filament is disposed inside the cathode cylinder along the length direction of the cathode cylinder, the zirconium vanadium iron getter is disposed around the filament, and a conductive support is connected between the filament and the ceramic cone.

[0018] According to one embodiment of the present invention, a spring is provided on the side of the filament facing the rear end of the outer cylinder.

[0019] According to one embodiment of the present invention, a plug, a conductive boss and a filament support are sequentially provided between the conductive support and the filament, and the filament is mounted on the filament support.

[0020] According to one embodiment of the present invention, a connecting post is provided between the filament support and the conductive support.

[0021] According to one embodiment of the present invention, the pump assembly includes a molecular pump and a mechanical pump.

[0022] A second aspect of the present invention provides a method of using an electron curtain accelerator as described above, comprising:

[0023] When the electronic curtain body is pre-evacuated or the zirconium vanadium iron getter is activated, the vacuum valve is opened;

[0024] While maintaining a working vacuum in the electronic curtain body, close the vacuum valve and remove the pump assembly.

[0025] According to the second aspect of the present invention, the method of using the electronic curtain accelerator can flexibly select the opening and closing of the vacuum pump when the electronic curtain body is in different working conditions, so as to meet the usage requirements of various working conditions such as pre-evacuation of the electronic curtain body, activation of getter, and provision of initial vacuum.

[0026] The above-described one or more technical solutions in the embodiments of the present invention have at least one of the following technical effects:

[0027] According to the first aspect of the present invention, the electron curtain accelerator, by providing a cathode cylinder in the outer cylinder and a zirconium vanadium iron getter on the inner wall of the cathode cylinder, can generate a vacuum environment in the electron curtain body by activating the zirconium vanadium iron getter. Simultaneously, the zirconium vanadium iron getter has the feasibility of maintaining a vacuum relative to the electron curtain body. After the vacuum environment in the electron curtain body is formed, the pump assembly can be separated by opening and closing the vacuum valve, thereby reducing the size and operating cost of the electron curtain accelerator, and lowering its power consumption and losses.

[0028] Furthermore, according to the method of using the electronic curtain accelerator provided in the second aspect embodiment of the present invention, by implementing the electronic curtain accelerator described above, the opening and closing of the vacuum pump can be flexibly selected under different working conditions of the electronic curtain body, so as to meet the usage requirements of various working conditions such as pre-evacuation of the electronic curtain body, activation of getter, and provision of initial vacuum.

[0029] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1This is a schematic structural diagram of the electron curtain accelerator provided in an embodiment of the present invention;

[0032] Figure 2 This is a schematic structural diagram of the electron curtain accelerator removal pump assembly provided in an embodiment of the present invention;

[0033] Figure 3 This is a schematic flowchart illustrating the method of using the electron curtain accelerator provided in an embodiment of the present invention.

[0034] Figure label:

[0035] 100. Outer cylinder; 102. Cathode cylinder; 104. Zirconium vanadium iron getter; 106. Vacuum valve; 108. Titanium window bracket; 110. Stainless steel frame; 112. Titanium film; 114. Water cooling pipe; 116. Metal flange; 118. Shielding ring; 120. Ceramic cone; 122. Ceramic insulating plate; 124. Filament; 126. Conductive support; 128. Spring; 130. Plug; 132. Conductive boss; 134. Filament support; 136. Connecting post; 138. Molecular pump; 140. Mechanical pump. Detailed Implementation

[0036] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0037] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0039] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0041] like Figures 1 to 2 As shown, a first aspect of the present invention provides an electron curtain accelerator, comprising:

[0042] The electronic curtain body includes an outer cylinder 100 and a cathode cylinder 102. The cathode cylinder 102 is disposed inside the outer cylinder 100, and the inner wall of the cathode cylinder 102 is filled with zirconium vanadium iron getter 104.

[0043] A pump assembly is connected to the rear end of the outer cylinder 100, and a vacuum valve 106 is provided between the pump assembly and the rear end of the outer cylinder 100.

[0044] According to the first aspect of the embodiment of the present invention, the electron curtain accelerator, by providing a cathode cylinder 102 in the outer cylinder 100 and providing a zirconium vanadium iron getter 104 on the inner wall of the cathode cylinder 102, can generate a vacuum environment in the electron curtain body by activating the zirconium vanadium iron getter 104. Simultaneously, the zirconium vanadium iron getter 104 has the feasibility of maintaining a vacuum relative to the electron curtain body. After the vacuum environment in the electron curtain body is formed, the pump assembly can be separated by opening and closing the vacuum valve 106, thereby reducing the size and operating cost of the electron curtain accelerator, and lowering the power consumption and losses of the electron curtain accelerator.

[0045] Please continue reading Figure 1 and Figure 2In the electron curtain accelerator provided in the first aspect embodiment of the present invention, it mainly includes an electron curtain body and a pump assembly, wherein the electron curtain body includes an outer cylinder 100 and a cathode cylinder 102, and the cathode cylinder 102 is disposed inside the outer cylinder 100.

[0046] like Figure 1 As shown, a pump assembly is provided at the rear end of the outer cylinder 100. The rear end of the outer cylinder 100 mentioned here refers to... Figure 1 The right end of the outer cylinder 100 is shown. In this embodiment of the invention, a vacuum valve 106 is provided between the pump assembly and the rear end of the outer cylinder 100.

[0047] When vacuum valve 106 is open, the electronic curtain body can be in a pre-evacuation state. When the vacuum pump is turned off, the electronic curtain body can be in a state of maintaining working vacuum. At this time, the pump assembly can be removed. By setting it up in this way, the size of the electronic curtain accelerator can be effectively reduced and the operating cost of the electronic curtain accelerator can be reduced.

[0048] According to one embodiment of the present invention, the pump assembly includes a molecular pump 138 and a mechanical pump 140. By providing the molecular pump 138 and the mechanical pump 140, the entire internal space of the electronic curtain can be pre-evacuated.

[0049] Combination Figure 1 and Figure 2 According to one embodiment of the present invention, it further includes a titanium window assembly, the titanium window assembly comprising:

[0050] Titanium window bracket 108, welded to outer cylinder 100;

[0051] A stainless steel frame 110 is connected to the titanium window bracket 108 on the side opposite to the outer cylinder 100;

[0052] The titanium film 112 is connected to the stainless steel frame 110 on the side opposite to the titanium window bracket 108.

[0053] By welding a titanium window bracket 108 onto the outer cylinder 100, and then placing a stainless steel frame 110 on the titanium window bracket 108, and finally laying a titanium film 112 on the stainless steel frame 110, electrons emitted from the surface of the cathode cylinder 102 can have their beam size controlled by the grid voltage and their emission angle controlled by the semi-circular focusing electrode. After being accelerated by the high-voltage electric field between the cathode cylinder 102 and the outer cylinder 100, they penetrate the titanium window structure composed of a copper grid and a 10-micron titanium film 112 into the air for surface irradiation processing. This electron curtain accelerator can be applied to coating curing, packaging printing, and surface sterilization.

[0054] It should be noted that in related technologies, titanium window components are mostly sealed with bolts. In this embodiment of the invention, the titanium window components are connected by welding, such as vacuum brazing or resistance welding; the titanium window bracket 108 and the outer cylinder 100 are connected by welding, such as argon arc welding.

[0055] According to one embodiment of the present invention, a water-cooling pipe 114 is provided in the titanium window assembly.

[0056] By installing water-cooling pipes 114 in the titanium window assembly, heat dissipation can be achieved for the electronic curtain body and the titanium window assembly, thereby improving the heat dissipation efficiency of the electronic curtain body and the titanium window assembly.

[0057] According to one embodiment of the present invention, a metal flange 116 is provided at the front end of the outer cylinder 100, and a shielding ring 118 is provided at one end of the cathode cylinder 102 facing the front end of the outer cylinder 100.

[0058] The metal flange 116 is connected to the cathode cylinder 102 in sequence via the ceramic cone 120 and the ceramic isolation plate 122;

[0059] Part of the ceramic cone 120 extends into the shielding ring 118.

[0060] like Figure 1 and Figure 2 As shown, a metal flange 116 is provided at the front end of the outer cylinder 100. It should be noted that the front end of the outer cylinder 100 mentioned here refers to... Figure 1 The left end of the outer cylinder 100 is shown. The metal flange 116 is connected to the cathode cylinder 102 in the outer cylinder 100 via a ceramic cone 120 and a ceramic spacer 122. It can be understood that, from the metal flange 116 to the cathode cylinder 102, the sequence is metal flange 116, ceramic cone 120, ceramic spacer 122 and cathode cylinder 102.

[0061] On the side of the cathode cylinder 102 facing the front end of the outer cylinder 100, a shielding ring 118 is also provided on the cathode cylinder 102, and a portion of the ceramic cone 120 extends into the shielding ring 118. In this embodiment of the invention, the shielding ring 118 is designed with a large curvature in order to reduce the field strength between the end face of the cathode cylinder 102 and the ground.

[0062] The ceramic cone 120 is sealed with Kovar welding to the shielding ring 118 and the metal flange 116, respectively, and the metal flange 116 is sealed with a knife-edge seal to the outer cylinder 100. In addition, the ceramic cone 120 is provided with an inner cone hole for use with a standard high-voltage plug.

[0063] As mentioned above, the cathode cylinder 102 is disposed inside the outer cylinder 100. The inner wall of the cathode cylinder 102 is filled with zirconium vanadium iron getter 104. By filling the inner wall of the cathode cylinder 102 with zirconium vanadium iron getter 104, the activation temperature of zirconium vanadium iron getter 104 is feasible relative to that of the electron curtain accelerator. At the same time, zirconium vanadium iron getter 104 also has good getter performance at high temperature to ensure the vacuum of the electron curtain accelerator.

[0064] According to one embodiment of the present invention, a filament 124 is provided inside the cathode cylinder 102 along the length direction of the cathode cylinder 102, a zirconium vanadium iron getter 104 is surrounding the filament 124, and a conductive support 126 is connected between the filament 124 and the ceramic cone 120.

[0065] like Figure 1 and Figure 2 As shown, along the length of the cathode cylinder 102, a filament 124 is also provided inside the cathode cylinder 102. The filament 124 is used to provide a high-temperature environment. The zirconium vanadium iron getter 104 mentioned above is arranged around the filament 124, so that the high temperature of the filament 124 can activate the zirconium vanadium iron getter 104.

[0066] By setting a conductive support 126 between the filament 124 and the ceramic cone 120, and connecting the conductive support 126 to the metal electrode, power can be supplied to the filament 124, thereby generating a high-temperature environment.

[0067] According to one embodiment of the present invention, a spring 128 is provided on the side of the filament 124 facing the rear end of the outer cylinder 100.

[0068] like Figure 1 and Figure 2 As shown, a spring 128 is provided on the side of the filament 124 facing the rear end of the outer cylinder 100, so that the current of the filament 124 does not pass through the spring 128. In order to avoid the loss of elasticity due to excessive total heat generated by conductive heat and current flowing through the spring 128, the spring 128 plays the role of regulating the elongation of the filament 124 when heated and the shortening when cooled, so that the filament 124 remains straight in the cold state and during the heating process. Therefore, the spring 128 is made of high-temperature elastic alloy.

[0069] According to one embodiment of the present invention, a plug 130, a conductive boss 132 and a filament bracket 134 are sequentially arranged between the conductive bracket 126 and the filament 124, and the filament 124 is mounted on the filament bracket 134.

[0070] Please continue reading Figure 1 and Figure 2In this embodiment of the invention, a plug 130, a conductive boss 132, and a filament bracket 134 are sequentially arranged between the conductive bracket 126 and the filament 124. The filament 124 is mounted on the filament bracket 134. With this arrangement, the plug 130 can be installed through the conductive boss 132, and the filament 124 can be installed through the filament bracket 134.

[0071] According to one embodiment of the present invention, a connecting post 136 connects the filament support 134 and the conductive support 126. Please continue to see... Figure 1 and Figure 2 By setting a connecting post 136 between the filament support 134 and the conductive support 126, power can be supplied to the filament support 134, thereby supplying power to the filament 124.

[0072] The working method of the electron curtain accelerator provided in the embodiments of the present invention will be explained below:

[0073] First, the space inside the outer cylinder 100 can be pre-vacuumed using molecular pump 138 and mechanical pump 140.

[0074] Next, power is supplied to the filament 124, which generates a high-temperature environment to vacuum activate the zirconium vanadium iron getter 104.

[0075] After the zirconium vanadium iron getter 104 is activated, close the vacuum valve 106 and remove the molecular pump 138 and mechanical pump 140. At this point, the electron curtain accelerator can work normally.

[0076] The maintenance method for the electron curtain accelerator provided in the embodiments of the present invention will be explained below:

[0077] When the electronic curtain accelerator is in a low working vacuum, consider turning off the current of the filament 124 first. After the electronic curtain accelerator cools down, if the outer cylinder 100 returns to a high vacuum, it proves that the zirconium vanadium iron getter 104 is still active. Continue to adjust the filament 124 to the working current, and it can work normally at this time.

[0078] If the outer cylinder 100 does not return to a high vacuum after the electron curtain accelerator cools down, it indicates that the zirconium vanadium iron getter 104 is basically saturated and cannot continue to maintain the working vacuum. At this time, it is necessary to open the knife-edge seal between the metal flange 116 and the outer cylinder 100, then open the threaded connection between the cathode cylinder 102 and the shielding ring 118, replace the zirconium vanadium iron getter 104, connect the molecular pump 138 and the mechanical pump 140, and then perform pre-vacuuming and activation.

[0079] like Figure 3 As shown, a second aspect of the present invention provides a method of using an electron curtain accelerator as described above, comprising:

[0080] Step 10: With the electronic curtain body pre-evacuated or the zirconium vanadium iron getter 104 activated, open the vacuum valve 106.

[0081] Step 20: While maintaining the working vacuum in the electronic curtain body, close the vacuum valve 106 and remove the pump assembly.

[0082] According to the second aspect of the present invention, the method of using the electronic curtain accelerator can flexibly select the opening and closing of the vacuum pump when the electronic curtain body is in different working conditions, thereby meeting the usage requirements of various working conditions such as pre-evacuation and vacuum conditions of the electronic curtain body.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electron curtain accelerator, characterized in that, include: The electronic curtain body includes an outer cylinder (100) and a cathode cylinder (102), the cathode cylinder (102) is disposed inside the outer cylinder (100), and the inner wall of the cathode cylinder (102) is filled with zirconium vanadium iron getter (104). A pump assembly is connected to the rear end of the outer cylinder (100), and a vacuum valve (106) is provided between the pump assembly and the rear end of the outer cylinder (100). It also includes titanium window assemblies, which are connected by vacuum brazing or resistance welding. The titanium window assemblies include: A titanium window bracket (108) is welded to the outer cylinder (100); A stainless steel frame (110) is connected to the side of the titanium window bracket (108) away from the outer cylinder (100); A titanium film (112) is attached to the side of the stainless steel frame (110) away from the titanium window bracket (108); The outer cylinder (100) is provided with a metal flange (116) at its front end. The metal flange (116) is connected to the cathode cylinder (102) in sequence through a ceramic cone (120) and a ceramic isolation plate (122). Along the length of the cathode cylinder (102), a filament (124) is provided inside the cathode cylinder (102), and the zirconium vanadium iron getter (104) surrounds the filament (124). A conductive support (126) is connected between the filament (124) and the ceramic cone (120).

2. The electron curtain accelerator according to claim 1, characterized in that, A water-cooling pipe (114) is installed in the titanium window assembly.

3. The electron curtain accelerator according to any one of claims 1 to 2, characterized in that, A shielding ring (118) is provided at one end of the cathode cylinder (102) facing the front end of the outer cylinder (100); A portion of the ceramic cone (120) extends into the shielding ring (118).

4. The electron curtain accelerator according to claim 3, characterized in that, A spring (128) is provided on the side of the filament (124) facing the rear end of the outer cylinder (100).

5. The electron curtain accelerator according to claim 3, characterized in that, A plug (130), a conductive boss (132), and a filament bracket (134) are sequentially arranged between the conductive bracket (126) and the filament (124), and the filament (124) is mounted on the filament bracket (134).

6. The electron curtain accelerator according to claim 5, characterized in that, A connecting post (136) connects the filament support (134) and the conductive support (126).

7. The electron curtain accelerator according to any one of claims 1 to 2, characterized in that, The pump assembly includes a molecular pump (138) and a mechanical pump (140).

8. A method of using the electron curtain accelerator as described in any one of claims 1 to 7, characterized in that, include: When the electronic curtain body is pre-evacuated or the zirconium vanadium iron getter (104) is activated, the vacuum valve (106) is opened; While the electronic curtain body maintains a working vacuum, the vacuum valve (106) is closed and the pump assembly is removed.

Images