A dicing blade and a method of manufacturing the same

Abstract

The present application belongs to the technical field of superhard abrasive tool manufacturing, and particularly relates to a scribing blade and a preparation method thereof, which are used to solve the technical problem of uneven diamond concentration in the abrasive layer of the scribing blade near the substrate side and away from the substrate side (both sides of the blade edge) in the electroplating process. The preparation steps are as follows: (1) the outer edge circular area of the aluminum alloy hub substrate is sequentially subjected to sand blasting and chemical treatment to obtain a pretreated substrate; (2) the pretreated substrate is subjected to surface impurity removal and sputtering of a zinc target in a magnetron sputtering device, then diamond micro powder is sprayed under vacuum conditions, and then a nickel-cobalt alloy target is magnetron sputtered, and the process of spraying and magnetron sputtering the nickel-cobalt alloy target is repeated to obtain a substrate containing a nickel-cobalt base-diamond composite coating; (3) the substrate containing the coating obtained in step (2) is subjected to post-processing to obtain a scribing blade. The present application proposes a green scribing blade preparation process, and the diamond concentration in the coating of the scribing blade is consistent in the thickness direction, and there is no cracking phenomenon when the material is processed.

Description

Technical Field

[0001] This invention belongs to the field of superhard abrasive manufacturing technology, and specifically refers to a dicing blade and its preparation method. Background Technology

[0002] In the semiconductor chip manufacturing process, dicing blades are used to precisely, efficiently, and with high quality dicing semiconductor wafers, achieving chip individualization. The quality of the diced wafer (such as chipping on both sides of the kerf) plays a decisive role in the chip quality; therefore, dicing blades are one of the important consumables in chip manufacturing. To meet market demands, various chip structures are becoming increasingly complex, and chip blocks are becoming narrower, placing increasingly higher demands on dicing blades used for precision wafer dicing, with extremely high requirements for chipping on both sides of the kerf. Researching and developing a high-quality and efficient dicing tool and process is one of the urgent needs to support the rapid development of my country's integrated circuit manufacturing industry.

[0003] Most current dicing blade abrasive layers are prepared using a composite electroplating process, such as patent CN115772688A, "A method for preparing a dual-abrasive electroplated grinding wheel." During the electroplating process, due to the buoyancy and flow resistance of the plating solution, the contact between the diamond micropowder and the substrate surface is not tight. Especially in the early stages of electroplating, the substrate surface is relatively smooth, and the relative movement between the substrate and the plating solution results in a large scouring force on the substrate surface, making it difficult for diamond to deposit into the coating. Subsequently, as the coating gradually increases, the concentration of diamond micropowder on the coating surface gradually increases until it tends to stabilize. This leads to a large difference in diamond concentration between the side of the abrasive layer near the substrate and the side away from the substrate (both sides of the blade). The number and size of the chip grooves cut on both sides of the dicing blade are significantly different, which in turn causes the blade to experience uneven stress when cutting the chip, resulting in one-sided chip breakage. This directly leads to low customer test pass rates and batch scrapping of customer chips. Meanwhile, the electroplating process for dicing blades requires electroplating solutions containing heavy metals such as nickel and cobalt, and is also acidic. These substances irritate human skin and respiratory tract, easily causing occupational diseases such as dermatitis, bronchitis, and pneumonia. Industrial electroplating wastewater that is not treated to meet standards not only poses a significant threat to human health but also leads to reduced agricultural yields and livestock deaths. Summary of the Invention

[0004] To address the technical problem of uneven diamond concentration in the abrasive layer of a dicing blade during electroplating, specifically on the side closer to the substrate and the side farther from the substrate (both sides of the blade), this invention proposes a dicing blade and its preparation method.

[0005] To achieve the above objectives, the technical solution of the present invention is implemented as follows:

[0006] A method for preparing a dicing blade, the specific steps of which are as follows:

[0007] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base is protected by clamps, exposing only a 3-4mm circular area on the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered quartz sand or ceramic particles (particle size 1-5μm), with a sandblasting distance of 30-50cm, a sandblasting pressure of 0.2-0.4MPa, and a sandblasting time of 20-40s.

[0008] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0009] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 5 × 10⁻⁶. -2 -20×10 -2 Pa; then sputter target 1 (zinc target) is used to deposit a zinc layer in a 3-4 mm annular region exposed on the substrate, with an operating current of 10-20 A and a deposition time of 30-50 min; then, under a vacuum of 5 × 10 -2 -20×10 -2 Under the condition of Pa, 1-4 μm diamond micropowder is sprayed, causing the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.005-0.01 g / s, and the spraying time is 5-10 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure reaches 5 × 10 Pa. -2 -20×10 -2 Pa, working current 20-40A, deposition time 200-500min; repeat spraying and magnetron sputtering of nickel-cobalt alloy target 40-100 times to form a nickel-cobalt-based diamond composite coating with diamond micro powder and nickel-cobalt coating.

[0010] 4) Post-processing of the dicing blade: The nickel-cobalt-diamond composite coating (together with the substrate) from step 3) is trimmed to a specific size using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is removed by etching with sodium hydroxide solution to form a blade with a ring width of 400-1020μm. The blade is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0011] Furthermore, in step 1), the flatness of the finished aluminum alloy wheel hub base is 0.001-0.003mm.

[0012] Furthermore, the particle size of the quartz sand or ceramic granules in step 1) should be larger than the particle size of the diamond micro powder in the particle spraying device in step 3).

[0013] Furthermore, in step 3), argon is used as a protective gas with a purity of 99.999%.

[0014] Furthermore, in step 3), the zinc target material has a purity of 99.9%, the nickel-cobalt alloy target material has a nickel content of 60%-80%, a cobalt content of 20%-40%, and impurities of less than 0.001%.

[0015] Furthermore, in step 3), the magnetron sputtering coating equipment has a pulse power supply radio frequency of 20-40kHz and a bias power supply radio frequency of 20-40kHz.

[0016] The dicing blade prepared by the above method.

[0017] The beneficial effects of this invention are:

[0018] (1) In this invention, the sandblasting process of the high-precision aluminum alloy wheel hub substrate increases the roughness of the substrate surface, and a zinc layer is sputtered before sputtering the nickel-cobalt-diamond composite coating, which increases the bonding force between the composite coating and the substrate and avoids the problem of coating peeling and falling off that is easy to occur in the traditional electroplating process.

[0019] (2) In this invention, a process combining vacuum spraying of diamond micro powder and magnetron sputtering PVD process is used to form a nickel-cobalt-based diamond composite coating. Due to the high vacuum during the spraying process, the gas resistance encountered by the diamond micro powder during movement is extremely low, and it is in close contact with the substrate surface. The diamond concentration in the composite coating is consistent in the early and later stages, and a composite coating with consistent diamond concentration can be prepared on the side close to the substrate and the side far from the substrate (both sides of the blade). This solves the technical problem of inconsistent diamond concentration on both sides of the blade in the preparation of dicing blades by electroplating.

[0020] (3) In this invention, vacuum spraying of diamond micro powder and magnetron sputtering PVD process are used to completely replace the traditional electroplating process of dicing blade, avoiding the recycling costs of heavy metal elements such as nickel and cobalt in electroplating waste liquid, as well as the environmental and personnel hazards caused by improper recycling. It is a green manufacturing process. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a physical image of the dicing blade prepared in Embodiment 1 of the present invention.

[0023] Figure 2 The distribution of diamonds on both sides of the dicing blade of the present invention is shown in (a) for the side closer to the substrate and (b) for the side farther from the substrate.

[0024] Figure 3 This is a schematic diagram of the dicing blade structure after electroplating to form a composite coating, as shown in Comparative Example 1.

[0025] Figure 4 The images show the distribution of diamonds on both sides of the cutting edge of the electroplated scribing knife in Comparative Example 1. (a) shows the side closer to the substrate, and (b) shows the side farther from the substrate.

[0026] Figure 5 This is a photograph of a complex wafer after being cut by a dicing blade prepared in Example 1 of this invention.

[0027] Figure 6 This is a picture of a chip cutting track cracking on one side during the initial cutting process of a chip using an electroplated dicing blade, as shown in Comparative Example 1. Detailed Implementation

[0028] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0029] Example 1

[0030] The following are the steps of a method for preparing a dicing blade according to this embodiment:

[0031] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base (flatness of 0.002mm) is protected by clamps, exposing only the 4mm circular area of ​​the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered quartz sand (particle size 3-5μm), with a sandblasting distance of 50cm, a sandblasting pressure of 0.4MPa, and a sandblasting time of 40s.

[0032] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0033] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 20 × 10⁻⁶. -2 Pa; then sputtering target 1 (zinc target) to deposit a zinc layer in the exposed 4mm annular region of the substrate, operating current 20A, deposition time 50min; then, under a vacuum of 20×10 -2 Under the condition of Pa, 2-4 μm diamond micropowder is sprayed to allow the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.01 g / s, and the spraying time is 10 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target, nickel content 60%, cobalt content 40%) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure is 20 × 10⁻⁶ Pa. -2 The process involves spraying and magnetron sputtering the nickel-cobalt alloy target 50 times, using a working current of 40A and a deposition time of 10min, to form a nickel-cobalt-based diamond composite coating from the diamond powder and the nickel-cobalt coating. In the magnetron sputtering equipment, the pulse power supply RF is 40kHz, and the bias power supply RF is also 40kHz.

[0034] 4) Post-processing of the dicing blade: The nickel-cobalt-based diamond composite coating (along with the substrate) from step 3) is ground to an outer diameter of 55.6 mm using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is etched away using sodium hydroxide solution to form a 1020 μm circumferential width cutting edge. The cutting edge is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade. A physical image is shown below. Figure 1 As shown.

[0035] Figure 2 The distribution of diamonds on both sides of the dicing blade prepared in Example 1 is shown in (a) on the side closer to the substrate and (b) on the side farther from the substrate. It can be seen that the diamond concentration on both sides is very consistent.

[0036] Example 2

[0037] The following are the steps of a method for preparing a dicing blade according to this embodiment:

[0038] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base (flatness of 0.002mm) is protected by clamps, exposing only a 3mm circular area on the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered ceramic particles (particle size 2-4μm), with a sandblasting distance of 30cm, a sandblasting pressure of 0.2MPa, and a sandblasting time of 20s.

[0039] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0040] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 5 × 10⁻⁶. -2 Pa; then sputtering target 1 (zinc target) to deposit a zinc layer in the exposed 3mm annular region of the substrate, operating current 10A, deposition time 30min; then, under a vacuum of 5×10 -2 Under the condition of Pa, diamond micropowder of 1-2 μm is sprayed, causing the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.005 g / s, and the spraying time is 5 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target, nickel content 80%, cobalt content 20%) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure is 5 × 10 Pa. -2 The process involved spraying and magnetron sputtering the nickel-cobalt alloy target 40 times, using a working current of 20A and a deposition time of 5min, to form a nickel-cobalt-based diamond composite coating from the diamond powder and the nickel-cobalt coating. In the magnetron sputtering equipment, the pulse power supply RF was 40kHz, and the bias power supply RF was also 40kHz.

[0041] 4) Post-processing of the dicing blade: The nickel-cobalt-based diamond composite coating (along with the substrate) from step 3) is trimmed to 55.6 mm on the outer diameter using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is removed by etching with sodium hydroxide solution to form a 400 μm wide cutting edge. The cutting edge is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0042] Example 3

[0043] The following are the steps of a method for preparing a dicing blade according to this embodiment:

[0044] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base (flatness of 0.002mm) is protected by clamps, exposing only the 3.5mm circular area of ​​the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered ceramic particles (particle size 4-5μm), with a sandblasting distance of 40cm, a sandblasting pressure of 0.3MPa, and a sandblasting time of 30s.

[0045] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0046] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 12 × 10⁻⁶. -2 Pa; then sputtering target 1 (zinc target) to deposit a zinc layer in the exposed 3.5 mm annular region of the substrate, operating current 15 A, deposition time 40 min; then, under a vacuum of 12 × 10⁻⁶ Pa. -2 Under the condition of Pa, 2-3 μm diamond micropowder is sprayed to allow the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.0075 g / s, and the spraying time is 7 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target, nickel content 70%, cobalt content 30%) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure is 12 × 10⁻⁶ Pa. -2 The process involves spraying and magnetron sputtering the nickel-cobalt alloy target 100 times, with a working current of 30A and a deposition time of 5min. This process forms a nickel-cobalt-based diamond composite coating by combining diamond micropowder with the nickel-cobalt coating. In the magnetron sputtering equipment, the pulse power supply RF is 30kHz, and the bias power supply RF is 30kHz.

[0047] 4) Post-processing of the dicing blade: The nickel-cobalt-diamond composite coating (together with the substrate) from step 3) is trimmed to an outer diameter of 55.6 mm using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is etched away using sodium hydroxide solution to form a 700 μm wide cutting edge. The cutting edge is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0048] Example 4

[0049] The following are the steps of a method for preparing a dicing blade according to this embodiment:

[0050] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base (flatness of 0.001mm) is protected by clamps, exposing only the 4mm circular area of ​​the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered ceramic particles (particle size 2-4μm), with a sandblasting distance of 30cm, a sandblasting pressure of 0.2MPa, and a sandblasting time of 30s.

[0051] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0052] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 20 × 10⁻⁶. -2 Pa; then sputtering target 1 (zinc target) to deposit a zinc layer in the exposed 3mm annular region of the substrate, operating current 20A, deposition time 30min; then, under a vacuum degree of 20×10 -2 Under the condition of Pa, diamond micropowder of 1-2 μm is sprayed, causing the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.005 g / s, and the spraying time is 10 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target, nickel content 70%, cobalt content 30%) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure is 20 × 10⁻⁶ Pa. -2 The process involved spraying and magnetron sputtering the nickel-cobalt alloy target 40 times, using a working current of 20A and a deposition time of 10min. This resulted in a nickel-cobalt-based diamond composite coating formed by the diamond powder and the nickel-cobalt coating. In the magnetron sputtering equipment, the pulse power supply RF was 20kHz, and the bias power supply RF was also 20kHz.

[0053] 4) Post-processing of the dicing blade: The nickel-cobalt-based diamond composite coating (along with the substrate) from step 3) is trimmed to 55.6 mm on the outer diameter using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is removed by etching with sodium hydroxide solution to form a 400 μm wide cutting edge. The cutting edge is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0054] Example 5

[0055] The following are the steps of a method for preparing a dicing blade according to this embodiment:

[0056] 1) Sandblasting treatment of aluminum alloy wheel hub base: First, the precision-machined aluminum alloy wheel hub base (flatness of 0.003mm) is protected by clamps, exposing only the 4mm circular area of ​​the outer edge of the large end face of the base; then, sandblasting is performed using micro-powdered ceramic particles (particle size 2-4μm), with a sandblasting distance of 50cm, a sandblasting pressure of 0.4MPa, and a sandblasting time of 30s.

[0057] 2) Chemical treatment of aluminum alloy wheel hub substrate: The substrate (including clamps) after sandblasting in step 1) is subjected to ultrasonic degreasing, water washing, acid pickling to remove dust, water washing, and spin drying in sequence.

[0058] 3) Preparation of composite coating: The chemically treated substrate (including the fixture) from step 2) is placed in a high-vacuum magnetron sputtering coating apparatus, and a vacuum is drawn to the apparatus's ultimate vacuum of 5×10⁻⁶. -3 Pa, a certain amount of argon gas is introduced to remove dust and dirt from the substrate surface, and a second vacuum is drawn to a base vacuum of 5×10. -3 Pa, argon gas is introduced to bring the chamber pressure to 20 × 10⁻⁶. -2 Pa; then sputtering target 1 (zinc target) to deposit a zinc layer in the exposed 3mm annular region of the substrate, operating current 10A, deposition time 50min; then, under a vacuum of 20×10 -2 Under the condition of Pa, diamond micropowder of 1-2 μm is sprayed, causing the diamond particles to fall onto the zinc layer surface. The spraying speed is 0.01 g / s, and the spraying time is 5 s. Then, in a high-vacuum magnetron sputtering coating equipment, target 2 (nickel-cobalt alloy target, nickel content 80%, cobalt content 20%) is sputtered to deposit a nickel-cobalt coating on the zinc layer and the surface of the diamond particles, so that the diamond is bonded to the nickel-cobalt coating, and the nickel-cobalt coating is bonded to the zinc layer. The chamber pressure is 20 × 10⁻⁶ Pa. -2 The process involves spraying and magnetron sputtering the nickel-cobalt alloy target 60 times, with a working current of 20A and a deposition time of 5min, to form a nickel-cobalt-based diamond composite coating by combining diamond micropowder with the nickel-cobalt coating. In the magnetron sputtering equipment, the pulse power supply RF is 20kHz, and the bias power supply RF is 20kHz.

[0059] 4) Post-processing of the dicing blade: The nickel-cobalt-based diamond composite coating (along with the substrate) from step 3) is trimmed to 55.6 mm on the outer diameter using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating is removed by etching with sodium hydroxide solution to form a 400 μm wide cutting edge. The cutting edge is pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0060] Comparative Example 1

[0061] The plating solution used in the preparation of dicing blades using electroplating process:

[0062] Diamond (2-4μm) 2g / L

[0063] Nickel aminosulfonate 350g / L

[0064] Cobalt aminosulfonate 100g / L

[0065] Nickel chloride 15g / L

[0066] Boric acid 40g / L

[0067] Sodium saccharin 0.8g / L

[0068] 1,4-Butynediol 0.4 g / L

[0069] The rest is water

[0070] The aluminum substrate is placed in the plating solution at 2A / dm 2 Electroplating was performed at a current density of 40 min. Then, the outer diameter of the obtained nickel-cobalt-diamond composite coating (together with the substrate) was trimmed to 55.6 mm using an external cylindrical grinder. The aluminum alloy wheel hub substrate near the outer edge of the composite coating was removed by etching with sodium hydroxide solution to form a 700 μm wide cutting edge. The cutting edge was pre-cut using a grinding plate and a silicon wafer, thus completing the preparation of the dicing blade.

[0071] See the schematic diagram of the electroplated dicing blade structure. Figure 3 The "1" side is closer to the matrix, with a lower diamond concentration, while the other side has a relatively higher concentration. This results in a large difference in diamond concentration between the matrix-closed and matrix-remote sides (the two sides of the cutting edge) in the abrasive layer. Figure 4 The number and size of the chip grooves cut on both sides of the dicing blade are significantly different, which leads to uneven force on the blade when cutting the chip, resulting in the chip breaking on one side.

[0072] Application examples

[0073] The dicing blades prepared in Example 1 and Comparative Example 1 were used to cut complex silicon-based IC wafers. The cutting parameters were: spindle speed 35000 rpm, cutting depth 0.21 mm, and feed rate 40 mm / s. Figure 5 This is a photograph of the dicing blade prepared in Example 1 of the present invention after dicing a complex wafer. As can be seen from the image, there is no obvious chipping on either side of the dicing path after dicing. This is in contrast to the dicing path of the blade prepared in Comparative Example 1 (see...). Figure 6 There has been a significant improvement.

[0074] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for preparing a dicing blade, characterized in that, The steps are as follows: (1) The outer edge ring area of ​​the aluminum alloy wheel hub substrate is successively subjected to sandblasting and chemical treatment to obtain the pretreated substrate; (2) After removing impurities from the surface of the pretreated substrate and sputtering zinc target material in a magnetron sputtering equipment, diamond micro powder is sprayed under vacuum conditions, and then nickel-cobalt alloy target material is sputtered by magnetron sputtering. The process of spraying and magnetron sputtering nickel-cobalt alloy target material is repeated to obtain a substrate containing nickel-cobalt-diamond composite coating. (3) The substrate containing nickel-cobalt-diamond composite coating obtained in step (2) is post-processed to obtain a dicing blade.

2. The method for preparing the dicing blade according to claim 1, characterized in that, In step (1), the flatness of the aluminum alloy wheel hub substrate is 0.001-0.003mm; the specific method of sandblasting is: sandblasting with quartz sand or ceramic particles, sandblasting distance 30-50cm, sandblasting pressure 0.2-0.4MPa, sandblasting time 20-40s.

3. The method for preparing the dicing blade according to claim 2, characterized in that, The chemical treatment steps in step (1) are as follows: ultrasonic degreasing, water washing, acid washing to remove ash, water washing, and spin drying.

4. The method for preparing the dicing blade according to claim 3, characterized in that, The surface impurity removal step in step (2) is as follows: evacuate the equipment to a vacuum level of 5×10⁻⁶. -3 Pa, argon gas is introduced to remove dust and dirt from the substrate surface.

5. The method for preparing the dicing blade according to claim 4, characterized in that, The process for sputtering the zinc target in step (2) is as follows: maintaining a vacuum level of 5×10 -3 Pa, argon gas is introduced to bring the chamber pressure to 5 × 10⁻⁶. -2 -20×10 -2 Pa sputters zinc targets with a purity of 99.9% under the following conditions: operating current of 10-20A, pulse power supply RF of 20-40kHz, bias power supply RF of 20-40kHz, and deposition time of 30-50min.

6. The method for preparing the dicing blade according to claim 5, characterized in that, The vacuum condition in step (2) is 5 × 10 -2 -20×10 -2 Pa; the spraying speed is 0.005-0.01 g / s, and the spraying time is 5-10 s; the particle size of the diamond powder is 1-4 μm.

7. The method for preparing the dicing blade according to claim 6, characterized in that, The process conditions for magnetron sputtering of the nickel-cobalt alloy target in step (2) are as follows: chamber pressure is 5 × 10⁻⁶. -2 -20×10 -2 Sputtering nickel-cobalt alloy targets under the following conditions: Pa, operating current 20-40A, pulse power supply RF 20-40kHz, bias power supply RF 20-40kHz, and deposition time 5-10min.

8. The method for preparing the dicing blade according to claim 7, characterized in that, In step (2), the nickel-cobalt alloy target has a nickel content of 60%-80%, a cobalt content of 20%-40%, and impurities of less than 0.001%; ​​the number of repetitions is 40-100 times.

9. The method for preparing a dicing blade according to claim 8, characterized in that, The post-processing steps in step (3) are as follows: the substrate containing the coating is subjected to external cylindrical grinding, chemical etching to create the cutting edge, and pre-cutting to obtain the dicing blade.

10. A dicing blade prepared by the preparation method according to any one of claims 1-9.

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