Connection structure of scribing box of scribing machine and non-contact measuring device and scribing machine

By adopting an elastic connection structure in the dicing machine, the problem of measurement inaccuracy caused by rigid connection in non-contact measuring devices is solved, the stability and accuracy of measurement results are achieved, and the dicing quality is ensured.

CN117774151BActive Publication Date: 2026-06-02CETC BEIJING ELECTRONICS EQUIP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CETC BEIJING ELECTRONICS EQUIP
Filing Date
2023-11-17
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

In existing dicing machines, the non-contact measuring device, due to its rigid connection with the dicing box, results in inaccurate and unstable measurement results when the position of the dicing box changes.

Method used

The squaring box is connected to the non-contact measuring device using elastic connectors. The rubber elastic connectors are bonded to the side wall of the squaring box, and the non-contact measuring support plate extends through the elastic connectors into the squaring box and is fixed with screws to achieve an elastic connection and an independent non-contact measuring structure.

Benefits of technology

This improves the accuracy and stability of the measurement results from the non-contact measuring device, reduces the impact of changes in the position of the dicing box on the measurement, and ensures the dicing quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application belongs to the technical field of semiconductor packaging and manufacturing, and discloses a connecting structure of a dicing box of a dicing machine and a non-contact measuring device and the dicing machine. The connecting structure comprises an elastic connecting piece, a groove for placing the elastic connecting piece is arranged on the side wall of the dicing box, and the elastic connecting piece is sealingly connected in the groove. A window for the non-measuring support horizontal plate to pass through is arranged on the elastic connecting piece. The non-measuring support horizontal plate extends to a set length from outside the dicing box through the elastic connecting piece and into the dicing box. A non-measuring sensor is arranged at one end of the non-measuring support horizontal plate in the dicing box. The dicing machine comprises the connecting structure. The hard connection between the original dicing box and the non-contact measuring device is changed into elastic connection, and the structure of the non-contact measuring device is separated, so that the influence of the change of the dicing box on the non-contact measuring device is avoided, thereby ensuring the stability of the non-contact measuring device, and the accuracy and stability of the numerical value of the result of the non-contact measuring device.
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