A diffusion furnace for producing topcon cell pieces with uniform diffusion

Abstract

The present application relates to the field of battery production, and more particularly to a diffusion furnace for topcon battery production with uniform diffusion, comprising a furnace body and a furnace door thereon, a mixing bin is installed on the furnace body, a total gas inlet pipe is communicated and installed at the front end of the mixing bin, at least two groups of gas inlet branch pipes are communicated and installed on the total gas inlet pipe, and a stirring mechanism is arranged on the mixing bin, a connecting pipe is installed through between the chamber of the furnace body and the mixing bin, a cover is arranged in the mixing bin, and a power member is arranged on the mixing bin; a shunt bin is fixed in the chamber of the furnace body and is communicated and installed with the connecting pipe, a shunt hole is formed in the bottom wall of the shunt bin, and an adjusting mechanism is arranged in the shunt bin. By adding the total gas inlet pipe, the mixing bin and the stirring mechanism, each group of gas enters the total gas inlet pipe for preliminary mixing through the corresponding gas inlet branch pipe, and then enters the mixing bin for secondary mixing through the working of the stirring mechanism, which is beneficial to the full and uniform mixing of each gas and improves the subsequent diffusion effect.

Description

Technical Field

[0001] This invention relates to the field of solar cell manufacturing technology, and more specifically to a diffusion furnace for producing Topcon solar cells with uniform diffusion. Background Technology

[0002] Topcon solar cells are a type of solar cell with tunneled oxide passivated contacts based on the selective carrier principle. During the production of Topcon solar cells, diffusion furnaces are used for diffusion, which is the most critical step in the entire Topcon solar cell manufacturing process. The diffusion process generates PN junctions, and the uniformity and controllability of PN junctions have always been the focus of solar cell research. Phosphorus oxychloride is usually used as the phosphorus source for gas-carried diffusion. When diffusion furnaces diffuse Topcon solar cells, because diffusion requires oxygen and other gases, existing diffusion furnaces are not convenient for mixing the gases, resulting in uneven diffusion and poor diffusion uniformity.

[0003] Patent CN219513121U discloses a diffusion furnace for producing Topcon solar cells with uniform diffusion, which enables more uniform discharge of the mixed gas, thereby achieving uniform diffusion of Topcon solar cells within the furnace and improving diffusion uniformity. However, when this diffusion furnace mixes the gas using a stirring mechanism, the mixing in the vertical direction is poor because the first and second inlet pipes are located on the upper and lower sides of the furnace, respectively. The gas entering through the first and second inlet pipes cannot mix effectively. Therefore, a diffusion furnace for producing Topcon solar cells with uniform diffusion is needed. Summary of the Invention

[0004] (i) In view of the shortcomings of the prior art, the present invention provides a diffusion furnace for the production of Topcon solar cells with uniform diffusion, which overcomes the problem of insufficient and uneven gas mixing in the existing solar cell diffusion furnace and improves the subsequent diffusion effect.

[0005] (II) To achieve the above objectives, the present invention is implemented through the following technical solution: a diffusion furnace for producing uniformly diffused topcon battery cells, including a furnace body and a furnace door thereon, a mixing chamber installed on the furnace body, a main air inlet pipe connected to the front end of the mixing chamber, at least two sets of air inlet branch pipes connected to the main air inlet pipe, and an agitation mechanism for mixing the gas is provided on the mixing chamber.

[0006] A connecting pipe is installed between the furnace chamber and the mixing chamber. A cover is installed inside the mixing chamber, and a power component is installed on the mixing chamber to drive the cover to open and close the connecting pipe.

[0007] A flow divider is fixed inside the furnace chamber. The flow divider is connected to the connecting pipe. The bottom wall of the flow divider has multiple sets of flow divider holes for the mixed gas to overflow. The flow divider is also equipped with an adjustment mechanism to control the flow rate of the gas overflowing from the flow divider holes.

[0008] Preferably, the agitation mechanism includes a support shaft rotatably mounted in the mixing chamber, a centrifugal impeller mounted on the support shaft, and a first motor mounted on the mixing chamber for driving the support shaft to rotate.

[0009] Preferably, the adjusting mechanism includes a bidirectional screw rotatably mounted in the diversion chamber and a guide rod fixed in the diversion chamber. Both sides of the bidirectional screw are threaded with movable blocks that are slidably connected to the guide rod. Arms are rotatably mounted on both sets of movable blocks. The other ends of the two sets of arms are rotatably mounted with the same set of frames. Multiple sets of conical columns that cooperate with the corresponding diversion holes are fixed on the frames. A second motor for driving the bidirectional screw to rotate is installed in the diversion chamber.

[0010] Preferably, a protective housing for protecting the second motor is installed inside the diversion chamber, the end of the bidirectional screw is rotatably mounted to the protective housing, and the end of the guide rod is fixed to the protective housing.

[0011] Preferably, the dimension of one end of the conical column away from the frame is smaller than the dimension of the other end, and the dimension of the end of the conical column away from the frame is smaller than the dimension of the diversion hole.

[0012] Preferably, the power component includes a rotating shaft rotatably mounted inside the mixing chamber and a third motor mounted on the mixing chamber to drive the rotating shaft to rotate, wherein the rotating shaft is fixed to the protruding section of the cover.

[0013] Preferably, the power component includes a lead screw rotatably mounted inside the mixing chamber and a fourth motor mounted on the mixing chamber to drive the lead screw to rotate. The protruding section of the cover is threadedly mounted to the lead screw, and a limiting rod fixed inside the mixing chamber is slidably mounted on the protruding section of the cover.

[0014] This invention provides a diffusion furnace for producing Topcon solar cells with uniform diffusion, which has the following beneficial effects:

[0015] 1. By adding a main intake pipe, a mixing chamber, and an agitation mechanism, each group of gases enters the main intake pipe through its corresponding intake branch pipe for initial mixing, and then enters the mixing chamber for secondary mixing through the agitation mechanism. This facilitates thorough and uniform mixing of the gases and improves the subsequent diffusion effect.

[0016] 2. By adding an adjustment mechanism, the conical column is driven to move, thereby controlling the flow rate of the mixed gas in the diversion hole. The flow rate of the mixed gas can be finely adjusted according to the battery manufacturing process requirements, which is beneficial to improving the diffusion effect.

[0017] 3. By adding a power component and a cap, after the gas in the mixing chamber is mixed a second time, the cap can be controlled to release the seal on the connecting pipe. The mixed gas can then enter the distribution chamber. Before the gas is fully mixed, the cap seals the connecting pipe to prevent the unmixed gas from directly entering the distribution chamber from the connecting pipe, thus ensuring the subsequent diffusion effect. Attached Figure Description

[0018] Figure 1 This is a cross-sectional view of the diffusion furnace structure in Embodiment 1 of the present invention;

[0019] Figure 2 This is a schematic diagram of the diffusion furnace structure in Embodiment 1 of the present invention;

[0020] Figure 3 This is a schematic diagram of the diffusion furnace from another perspective in Embodiment 1 of the present invention;

[0021] Figure 4 This is a cross-sectional view of the adjustment mechanism structure in Embodiment 1 of the present invention;

[0022] Figure 5 This is a front sectional view of the diffusion furnace structure in Embodiment 1 of the present invention;

[0023] Figure 6 This is a cross-sectional view of the diffusion furnace structure in Embodiment 2 of the present invention;

[0024] Figure 7 For the present invention Figure 6 Enlarged diagram of part A in the middle.

[0025] In the diagram: 1-furnace body, 2-mixing chamber, 3-main air inlet pipe, 4-air inlet branch pipe, 5-stirring mechanism, 6-connecting pipe, 7-diversion chamber, 8-diversion hole, 9-adjusting mechanism, 10-cover, 11-furnace door, 12-power component;

[0026] 51-Support shaft, 52-Centrifugal impeller, 53-First motor; 91-Frame, 92-Conical column, 93-Protective shell, 94-Bidirectional screw, 95-Guide rod, 96-Moving block, 97-Arm, 98-Second motor;

[0027] 1211-Rotating shaft, 1212-Third motor; 1221-Lead screw, 1222-Limit rod, 1223-Fourth motor. Detailed Implementation

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0029] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0030] Example 1

[0031] like Figures 1-5 As shown, a diffusion furnace for producing uniformly diffused Topcon solar cells includes a furnace body 1 and a furnace door 11. The furnace body 1 is equipped with an exhaust pipe for discharging waste gas. A mixing chamber 2 is installed on the furnace body 1, and a main air inlet pipe 3 is connected to the front end of the mixing chamber 2. At least two sets of air inlet branch pipes 4 are connected to the main air inlet pipe 3. An agitation mechanism 5 for mixing the gas is provided on the mixing chamber 2. A connecting pipe 6 is installed through the chamber of the furnace body 1 and the mixing chamber 2. A cover 10 is installed inside the mixing chamber 2, the size of which is larger than the outer diameter of the connecting pipe 6. A power component 12 for driving the cover 10 to open and close the connecting pipe 6 is provided on the mixing chamber 2. A diversion chamber 7 is fixed inside the chamber of the furnace body 1, and the diversion chamber 7 is connected to the connecting pipe 6. Multiple diversion holes 8 are provided on the bottom wall of the diversion chamber 7 for the mixed gas to overflow. An adjustment mechanism 9 for controlling the flow rate of the gas overflowing from the diversion holes 8 is provided inside the diversion chamber 7.

[0032] The operator opens furnace door 11 and places the rack containing the Topcon solar cells into furnace body 1. Then, furnace door 11 is closed. The corresponding gas enters the main inlet pipe 3 through each set of inlet branch pipes 4, where it undergoes initial mixing. Next, the stirring mechanism 5 starts working, and the initially mixed gas enters the mixing chamber 2 for secondary mixing, making the gas mixture more uniform. The mixed gas then enters the distribution chamber 7 through the connecting pipe 6, and subsequently exits through the distribution hole 8 into the chamber of furnace body 1, uniformly diffusing the Topcon solar cells. The flow rate of the mixed gas can be adjusted through the regulating mechanism 9, allowing for fine-tuning of the flow rate according to the battery manufacturing process requirements, which helps improve the diffusion effect.

[0033] In this embodiment, the stirring mechanism 5 includes a support shaft 51 rotatably mounted inside the mixing chamber 2, a centrifugal impeller 52 mounted on the support shaft 51, and a first motor 53 mounted on the mixing chamber 2 to drive the support shaft 51 to rotate. When gas is introduced into the mixing chamber 2, the first motor 53 is activated, driving the support shaft 51, which is connected to its output end, to rotate. This, in turn, drives the centrifugal impeller 52 to rotate, enabling secondary mixing of the gas and resulting in a more uniform gas mixture.

[0034] In this embodiment, the power component 12 includes a rotating shaft 1211 rotatably mounted inside the mixing chamber 2 and a third motor 1212 mounted on the mixing chamber 2 to drive the rotating shaft 1211 to rotate. The rotating shaft 1211 is fixed to the protruding section of the cover 10. After the gas in the mixing chamber undergoes secondary mixing, the third motor 1212 is activated, driving the rotating shaft 1211 to rotate, which in turn controls the cover 10 to rotate. The cover 10 changes from horizontal to vertical, and the top end of the connecting pipe 6 contacts the seal. The mixed gas then enters the diversion chamber 7 along the connecting pipe 6. Before the gas is fully mixed, the cover 10 is in a sealing state over the connecting pipe 6, preventing unmixed gas from directly entering the diversion chamber 7 from the connecting pipe 6, thus ensuring the subsequent diffusion effect.

[0035] In this embodiment, the adjusting mechanism 9 includes a bidirectional screw 94 rotatably mounted in the diversion chamber 7 and a guide rod 95 fixed in the diversion chamber 7. Both sides of the bidirectional screw 94 are threaded with movable blocks 96 that are slidably connected to the guide rod 95. Arms 97 are rotatably mounted on both sets of movable blocks 96. The other ends of the two sets of arms 97 are rotatably mounted with the same set of frames 91. Multiple sets of conical columns 92, which cooperate with corresponding diversion holes 8, are fixed on the frames 91. A second motor 98 for driving the bidirectional screw 94 to rotate is installed inside the diversion chamber 7. Specifically, the dimension of the end of the conical column 92 facing away from the frame 91 is smaller than the dimension of its other end, and the dimension of the end of the conical column 92 facing away from the frame 91 is smaller than the size of the diversion hole 8. When fine-tuning the flow rate of the mixed gas is required, taking the reduction of the mixed gas flow rate as an example: the second motor 98 is started, driving the bidirectional screw 94 connected to its output end to rotate. Under the constraint of the guide rod 95, the moving blocks 96 on both sides move inward simultaneously. Through the transmission of the two sets of arms 97, the frame 91 is then driven to move downward, thereby driving the conical column 92 on the frame 91 to move downward. As the conical column 92 moves downward, it gradually begins to pass through the diversion hole 8. Due to the obstruction of the conical column 92, the flow rate of the mixed gas entering the furnace body 1 will decrease. Moreover, the conical column 92 adopts a structure that is larger at the top and smaller at the bottom. As the conical column 92 goes deeper into the diversion hole 8, the flow rate of the mixed gas entering the furnace body 1 will gradually decrease. The flow rate of the mixed gas can be fine-tuned according to the battery manufacturing process requirements, which is beneficial to improving the diffusion effect.

[0036] Furthermore, a protective housing 93 for protecting the second motor 98 is installed inside the diversion chamber 7. The end of the bidirectional screw 94 is rotatably mounted to the protective housing 93, and the end of the guide rod 95 is fixed to the protective housing 93.

[0037] Example 2

[0038] refer to Figures 6-7The method is basically the same as in Example 1, except that: the power component 12 includes a lead screw 1221 rotatably installed in the mixing chamber 2 and a fourth motor 1223 installed on the mixing chamber 2 to drive the lead screw 1221 to rotate. The protruding section of the cover 10 is threadedly installed with the lead screw 1221, and the protruding section of the cover 10 is slidably installed with a limiting rod 1222 fixed in the mixing chamber 2.

[0039] After the gas in the mixing chamber is fully mixed a second time, the fourth motor 1223 is started, which drives the lead screw 1221 connected to its output end to rotate. Under the constraint of the limit rod 1222, the cover 10 is driven to gradually move away from the connecting pipe 6. The mixed gas in the mixing chamber 2 will enter the diversion chamber 7 through the connecting pipe 6. By controlling the fourth motor 1223 to reverse, the cover 10 can be moved down and re-sealed to the connecting pipe 6.

[0040] All components used in this application are standard parts that can be purchased from the market. The specific connection methods of each part adopt conventional methods such as bolts, rivets and welding that are mature in the existing technology. The machinery, parts and electrical equipment all adopt conventional models in the existing technology.

[0041] The embodiments disclosed herein are preferred embodiments, but are not limited thereto. Those skilled in the art can readily grasp the spirit of the present invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A diffusion furnace for producing uniformly diffused topcon solar cells, comprising a furnace body (1) and a furnace door (11) thereon, characterized in that: A mixing chamber (2) is installed on the furnace body (1). A main air inlet pipe (3) is connected to the front end of the mixing chamber (2). At least two sets of air inlet branch pipes (4) are connected to the main air inlet pipe (3). An agitation mechanism (5) for mixing gas is provided on the mixing chamber (2). A connecting pipe (6) is installed between the chamber of the furnace body (1) and the mixing chamber (2). A cover (10) is provided inside the mixing chamber (2), and a power component (12) is provided on the mixing chamber (2) to drive the cover (10) to open and close the connecting pipe (6). A flow divider (7) is fixed in the chamber of the furnace body (1). The flow divider (7) is connected to the connecting pipe (6). The bottom wall of the flow divider (7) is provided with multiple sets of flow divider holes (8) for the mixed gas to overflow. A regulating mechanism (9) is provided in the flow divider (7) to control the flow rate of the gas overflowing from the flow divider holes (8). The adjustment mechanism (9) includes a bidirectional screw (94) rotatably installed in the diversion chamber (7) and a guide rod (95) fixed in the diversion chamber (7). Both sides of the bidirectional screw (94) are threaded with moving blocks (96) that are slidably connected to the guide rod (95). Both sets of moving blocks (96) are rotatably installed with arms (97). The other ends of the two sets of arms (97) are rotatably installed with the same set of frames (91). Multiple sets of conical columns (92) that cooperate with the corresponding diversion holes (8) are fixed on the frame (91). A second motor (98) for driving the bidirectional screw (94) to rotate is installed in the diversion chamber (7). The size of one end of the conical column (92) away from the frame (91) is smaller than the size of the other end, and the size of the end of the conical column (92) away from the frame (91) is smaller than the size of the diversion hole (8). The movement of the conical column (92) enables fine adjustment of the overflow gas flow rate.

2. The diffusion furnace for producing uniformly diffused Topcon solar cells as described in claim 1, characterized in that: The agitation mechanism (5) includes a support shaft (51) rotatably mounted in the mixing chamber (2), a centrifugal impeller (52) mounted on the support shaft (51), and a first motor (53) mounted on the mixing chamber (2) for driving the support shaft (51) to rotate.

3. The diffusion furnace for producing uniformly diffused Topcon solar cells as described in claim 1, characterized in that: The diversion chamber (7) is equipped with a protective shell (93) to protect the second motor (98). The end of the bidirectional screw (94) is rotatably mounted with the protective shell (93), and the end of the guide rod (95) is fixed with the protective shell (93).

4. The diffusion furnace for producing uniformly diffused Topcon solar cells as described in claim 1, characterized in that: The power unit (12) includes a rotating shaft (1211) rotatably installed in the mixing chamber (2) and a third motor (1212) installed on the mixing chamber (2) to drive the rotating shaft (1211) to rotate. The rotating shaft (1211) is fixed to the protruding section of the cover (10).

5. The diffusion furnace for producing uniformly diffused Topcon solar cells as described in claim 1, characterized in that: The power unit (12) includes a lead screw (1221) rotatably installed in the mixing chamber (2) and a fourth motor (1223) installed on the mixing chamber (2) to drive the lead screw (1221) to rotate. The protruding section of the cover (10) is threadedly installed with the lead screw (1221), and the protruding section of the cover (10) is slidably installed with a limiting rod (1222) fixed in the mixing chamber (2).

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