Remote operation and maintenance system of multi-stage turbine vacuum pump and fault handling method and device thereof

Through the remote operation and maintenance system, the sensor group and distributed control unit are used to realize real-time monitoring and efficient fault handling of multi-stage turbine vacuum pumps, solving the problems of difficulty in determining faults and high maintenance costs in the existing technology, and improving production efficiency .

CN117869355BActive Publication Date: 2024-12-24HUBEI SANFENG TURBINE EQUIP CO LTD
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Patent Information

Application Number
CN202410187099.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-02-20
Publication Date
2024-12-24
Estimated Expiration
2044-02-20

AI Technical Summary

Technical Problem

The existing turbine vacuum pump fault handling relies on manual labor, which leads to difficulty in determining faults and blind investigation, which improves maintenance costs and reduces production efficiency.

Method used

Design a remote operation and maintenance system of multi-stage turbine vacuum pump, including a remote operation and maintenance center, monitoring unit and distributed control unit. Use sensor groups to collect data, send it to the remote operation and maintenance center through intelligent gateway for fault diagnosis and emergency control generation Instructions to realize real-time monitoring and efficient troubleshooting.

Benefits of technology

Real-time monitoring of the working status of multi-stage turbine vacuum pumps and efficient fault handling are realized, reducing manual intervention, and improving the accuracy and production efficiency of fault diagnosis.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The present application provides a remote operation and maintenance system for a multi-stage turbine vacuum pump and a fault handling method and device thereof, wherein the system comprises: a remote operation and maintenance center and a monitoring unit arranged at a production site; the monitoring unit comprises a sensor group, a distributed control unit and an intelligent gateway corresponding to a target multi-stage turbine vacuum pump, the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center; the remote operation and maintenance center is used to perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and generate an emergency control instruction when a fault occurs in the target multi-stage turbine vacuum pump and send it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, so as to realize monitoring and efficient fault handling of the multi-stage turbine vacuum pump.
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Description

Technical Field

[0001] The present application relates to the technical field of turbine vacuum pump monitoring, and in particular to a remote operation and maintenance system for a multi-stage turbine vacuum pump and a fault handling method and device thereof. Background Art

[0002] At present, most turbine vacuum pump troubleshooting is done manually. Since the causes of some faults are relatively complex, maintenance personnel are unable to determine the fault point of the equipment in a short period of time, resulting in the use of a blind carpet-style troubleshooting method, which not only greatly increases the after-sales maintenance costs, but also greatly reduces the company's production efficiency. Summary of the invention

[0003] The present application provides a remote operation and maintenance system for a multi-stage turbine vacuum pump and a fault handling method thereof, so as to realize real-time monitoring of the working status of the multi-stage turbine vacuum pump and efficient fault handling.

[0004] The present application provides a remote operation and maintenance system for a multi-stage turbine vacuum pump, the system comprising:

[0005] Remote operation and maintenance center and monitoring unit installed at the production site;

[0006] The monitoring unit includes a sensor group corresponding to the target multi-stage turbine vacuum pump, a distributed control unit and an intelligent gateway, wherein the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center;

[0007] The remote operation and maintenance center is used to perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and to generate emergency control instructions when a fault occurs in the target multi-stage turbine vacuum pump and send them to the distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0008] According to the remote operation and maintenance system of a multi-stage turbine vacuum pump provided by the present application, the sensor group includes sensor groups corresponding to each stage of the target multi-stage turbine vacuum pump, and each sensor group includes an inlet pressure sensor, an outlet pressure sensor, a horizontal vibration sensor and a vertical vibration sensor; the inlet pressure sensor is used to detect the inlet pressure of the corresponding stage, the outlet pressure sensor is used to detect the outlet pressure of the corresponding stage, the horizontal vibration sensor is used to detect the vibration of the corresponding stage in the horizontal direction, and the vertical vibration sensor is used to detect the vibration of the corresponding stage in the vertical direction.

[0009] According to the remote operation and maintenance system of the multi-stage turbine vacuum pump provided in the present application, the distributed control unit is also used to control the operation of the multi-stage turbine vacuum pump based on the speed combination preset by the user and synchronously send the preset speed combination to the remote operation and maintenance center. Correspondingly, each sensor group also includes a speed sensor for detecting the turbine speed of the corresponding stage.

[0010] According to the remote operation and maintenance system of the multi-stage turbine vacuum pump provided in the present application, each sensor group also includes a liquid level sensor for detecting the liquid level of the gas-water separator of the corresponding stage.

[0011] The present application also provides a fault handling method of a remote operation and maintenance system of a multi-stage turbine vacuum pump, the method being applied to a remote operation and maintenance center of the remote operation and maintenance system of the multi-stage turbine vacuum pump as described above, the method comprising:

[0012] determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump;

[0013] In the case where the target multi-stage turbine vacuum pump is in an abnormal operating state, determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction;

[0014] When the target multi-stage turbine vacuum pump shows surge indication, the target stage where surge occurs and the root stage causing surge are determined based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and the cause of surge is determined in combination with the liquid level of the gas-water separator;

[0015] An emergency control instruction is generated based on the surge cause and sent to a distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0016] According to the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the present application, the step of determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump specifically includes:

[0017] Obtain a comparison result between the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and a preset speed combination, and determine whether the real-time turbine speed of each stage is abnormal based on the comparison result; if so, obtain the latest speed combination and perform a secondary comparison with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump, and when the secondary comparison result indicates that the real-time turbine speed is abnormal, determine that the operating state of the target multi-stage turbine vacuum pump is abnormal.

[0018] According to the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the present application, the method of determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction specifically includes:

[0019] The vibration frequencies of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction are obtained. If the vibration frequencies in the horizontal direction and the vertical direction both match the preset surge frequencies, it is determined that the target multi-stage turbine vacuum pump has surge indications.

[0020] According to the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the present application, the target level where surge occurs and the root level causing surge are determined based on the inlet pressure and outlet pressure of each level of the target multi-stage turbine vacuum pump, specifically including:

[0021] Based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, determining whether the fluctuation frequency of the inlet pressure and outlet pressure of each stage matches the preset surge fluctuation frequency, and if so, the target stage is the one where surge occurs;

[0022] The root stage causing surge is determined based on the time when the inlet pressure and outlet pressure of each target stage fluctuate.

[0023] According to the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the present application, the surge cause is determined in combination with the liquid level of the gas-water separator, specifically including:

[0024] If the liquid level of the gas-water separator exceeds the preset value, the cause of the surge is determined to be a gas-water separator failure; otherwise, the cause of the surge is determined based on the vibration amplitude in the horizontal and vertical directions of the root level.

[0025] The present application also provides a fault handling device of a remote operation and maintenance system of a multi-stage turbine vacuum pump, the device is applied to a remote operation and maintenance center of the remote operation and maintenance system of the multi-stage turbine vacuum pump as described above, and the device comprises:

[0026] A first judgment module is used to determine whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump;

[0027] The second judgment module is used to determine whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction when the target multi-stage turbine vacuum pump is in an abnormal operating state;

[0028] The first determination module is used to determine the target stage where surge occurs and the root stage causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump when the target multi-stage turbine vacuum pump has surge indications, and determine the cause of the surge in combination with the liquid level of the gas-water separator;

[0029] The fault processing module is used to generate an emergency control instruction based on the surge cause and send it to a distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0030] The present application provides a remote operation and maintenance system for a multi-stage turbine vacuum pump and a fault handling method and device thereof. The system includes: a remote operation and maintenance center and a monitoring unit arranged at a production site; the monitoring unit includes a sensor group, a distributed control unit and an intelligent gateway corresponding to a target multi-stage turbine vacuum pump, the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center; the remote operation and maintenance center is used to perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and generate an emergency control instruction when a fault occurs in the target multi-stage turbine vacuum pump and send it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, so as to realize real-time monitoring of the working status of the multi-stage turbine vacuum pump and efficient fault handling. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the present application or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 It is a structural schematic diagram of a remote operation and maintenance system for a multi-stage turbine vacuum pump provided by the present application;

[0033] Figure 2 It is a flow chart of a fault handling method of a remote operation and maintenance system of a multi-stage turbine vacuum pump provided by the present application;

[0034] Figure 3 It is a schematic diagram of the target level and root level determination process provided by this application;

[0035] Figure 4 It is a structural schematic diagram of a fault handling device of a remote operation and maintenance system of a multi-stage turbine vacuum pump provided by the present application;

[0036] Figure 5It is a structural schematic diagram of the electronic device provided by this application. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of this application clearer, the technical solutions in this application will be clearly and completely described below in conjunction with the drawings in this application. Obviously, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0038] Figure 1 A schematic diagram of the structure of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided in this application, such as Figure 1 As shown, the system includes:

[0039] Remote operation and maintenance center and monitoring unit installed at the production site;

[0040] The monitoring unit includes a sensor group corresponding to the target multi-stage turbine vacuum pump, a distributed control unit and an intelligent gateway, wherein the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center;

[0041] The remote operation and maintenance center is used to perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and to generate emergency control instructions when a failure occurs in the target multi-stage turbine vacuum pump and send them to the distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0042] Specifically, it can be understood that the service object of the remote operation and maintenance system of the multi-stage turbine vacuum pump is the supplier (i.e., the seller) of the multi-stage turbine vacuum pump. Based on the remote operation and maintenance system of the multi-stage turbine vacuum pump, the supplier can monitor the operating status of the sold multi-stage turbine vacuum pump in real time, and then provide timely operation and maintenance services. Based on this, it can also be understood that the target multi-stage turbine vacuum pump refers to a multi-stage turbine vacuum pump distributed at the production site of Party A (i.e., the purchaser). Through the remote operation and maintenance system of the multi-stage turbine vacuum pump of the embodiment of the present application, the supplier can conveniently and quickly perform remote operation and maintenance on all multi-stage turbine vacuum pumps distributed in different areas.

[0043] In order to comprehensively monitor the target multi-stage turbine vacuum pump, each target multi-stage turbine vacuum pump is equipped with a corresponding sensor group, a distributed control unit and an intelligent gateway to collect, summarize and upload the operating data of the target multi-stage turbine vacuum pump to the remote operation and maintenance center. Based on this, the remote operation and maintenance center can perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and generate emergency control instructions and send them to the distributed control unit corresponding to the target multi-stage turbine vacuum pump when a fault occurs in the target multi-stage turbine vacuum pump.

[0044] More specifically, the sensor group includes a sensor group corresponding to each stage of the target multi-stage turbine vacuum pump, and each sensor group includes an inlet pressure sensor, an outlet pressure sensor, a horizontal vibration sensor, and a vertical vibration sensor; the inlet pressure sensor is used to detect the inlet pressure of the corresponding stage, the outlet pressure sensor is used to detect the outlet pressure of the corresponding stage, the horizontal vibration sensor is used to detect the vibration of the corresponding stage in the horizontal direction, and the vertical vibration sensor is used to detect the vibration of the corresponding stage in the vertical direction. It can be understood that since each stage of the multi-stage turbine vacuum pump independently controls the turbine speed, any stage may fail. Based on this, the embodiment of the present application sets a corresponding sensor group for each stage to comprehensively collect and analyze the operating status of the target multi-stage turbine vacuum pump. It is worth noting that the aforementioned horizontal direction refers to the direction corresponding to the plane including the axis of the corresponding stage rotor and parallel to the bottom surface of the corresponding stage, and the aforementioned vertical direction refers to the direction corresponding to the plane perpendicular to the axis of the corresponding stage rotor. Based on this, the embodiment of the present application can comprehensively and accurately monitor the rotor vibration of each stage of the target multi-stage turbine vacuum pump, thereby ensuring the accuracy of the subsequent surge indication monitoring results.

[0045] It should also be noted that, in addition to being able to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center, the distributed control unit is also an interface for Party A's staff to control the operation of the multi-stage turbine vacuum pump. Accordingly, the distributed control unit is also used to control the operation of the multi-stage turbine vacuum pump based on the speed combination preset by the user and synchronously send the preset speed combination to the remote operation and maintenance center. Correspondingly, each sensor group also includes a speed sensor for detecting the turbine speed of the corresponding stage. Based on the foregoing, it can be understood that each stage of the multi-stage turbine vacuum pump independently controls the turbine speed. Therefore, the user needs to pre-set the corresponding speed combination to control the operation of the multi-stage turbine vacuum pump. Based on this, by detecting the turbine speed of the corresponding stage through the speed sensor, it is possible to quickly diagnose whether the actual turbine speed meets expectations.

[0046] Furthermore, each sensor group also includes a liquid level sensor for detecting the liquid level of the gas-water separator. It is worth noting that in order to avoid the influence of moisture and impurities generated by the preceding equipment on the rotors of each stage, the multi-stage turbine vacuum pump of the embodiment of the present application will be provided with a gas-water separator for each stage. As an associated equipment of the multi-stage turbine vacuum pump, the gas-water separator can effectively separate the moisture and impurities generated by the preceding equipment, but if the gas-water separator fails, it will directly affect the working state of the multi-stage turbine vacuum pump. Based on this, the embodiment of the present application can detect the state of the associated equipment of the multi-stage turbine vacuum pump by setting a liquid level sensor, thereby ensuring the accuracy and efficiency of subsequent fault diagnosis.

[0047] The system provided in the present application includes: a remote operation and maintenance center and a monitoring unit arranged at a production site; the monitoring unit includes a sensor group, a distributed control unit and an intelligent gateway corresponding to a target multi-stage turbine vacuum pump, the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center; the remote operation and maintenance center is used to perform fault diagnosis based on the operating data of the target multi-stage turbine vacuum pump, and generate emergency control instructions when a fault occurs in the target multi-stage turbine vacuum pump and send them to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, so as to realize real-time monitoring of the working status of the multi-stage turbine vacuum pump and efficient fault handling.

[0048] Figure 2 A flow chart of a fault handling method of a remote operation and maintenance system for a multi-stage turbine vacuum pump provided in the present application, wherein the method is applied to a remote operation and maintenance center of the remote operation and maintenance system for a multi-stage turbine vacuum pump as described above, such as Figure 2 As shown, the method includes:

[0049] Step 101: Determine whether the operating state of a target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump.

[0050] Specifically, determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump specifically includes:

[0051] Obtain a comparison result between the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and a preset speed combination, and determine whether the real-time turbine speed of each stage is abnormal based on the comparison result; if so, obtain the latest speed combination and perform a secondary comparison with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump, and when the secondary comparison result indicates that the real-time turbine speed is abnormal, determine that the operating state of the target multi-stage turbine vacuum pump is abnormal.

[0052] It is worth noting that, based on the foregoing content, the distributed control unit is also used to control the operation of the multi-stage turbine vacuum pump based on the speed combination preset by the user and synchronously send the preset speed combination to the remote operation and maintenance center. Under normal circumstances, the user will only set the speed combination before the multi-stage turbine vacuum pump works. Therefore, the distributed control unit will only send the preset speed combination to the remote operation and maintenance center synchronously when the multi-stage turbine vacuum pump just starts to run or before it starts to run. However, the present application has found through research that during the operation of the multi-stage turbine vacuum pump, the speed combination may change during the production process due to process requirements or user misoperation, which may cause the real-time turbine speed to be inconsistent with the speed combination recorded in the remote operation and maintenance center, thereby causing a misjudgment of the abnormal state. Therefore, the embodiment of the present application first determines whether the real-time turbine speed of each stage is abnormal based on the comparison result of the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and the preset speed combination recorded in the remote operation and maintenance center. If so, the latest speed combination is obtained (i.e., the updated speed combination is obtained from the distributed control unit) and compared with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump for a second time. When the secondary comparison result indicates that the real-time turbine speed is abnormal, the operation state of the target multi-stage turbine vacuum pump is judged to be abnormal. Based on this, it is possible to avoid the misjudgment of abnormal state caused by the user changing parameters during production to the greatest extent. It is understandable that if the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump completely matches the speed combination recorded in the remote operation and maintenance center, the speed is judged to be normal, otherwise, the speed is judged to be abnormal. It is also understandable that matching can mean that the real-time turbine speed is the same as the set value (i.e., the corresponding value in the speed combination) (which can maximize the consistency of the working state with the demand), or it can mean that the difference between the two is less than the preset threshold (which can avoid the misjudgment of abnormality caused by slight external disturbances), and the embodiment of the present application does not make specific restrictions on this.

[0053] Step 102, when the target multi-stage turbine vacuum pump is in an abnormal operating state, determine whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal and vertical directions.

[0054] Specifically, the present application has found through research that when the target multi-stage turbine vacuum pump is in an abnormal operating state, it is very easy to cause vacuum pump surge, which in turn leads to substandard production processes and even causes collision and damage between the blades and the casing of the target multi-stage turbine vacuum pump. In order to avoid the serious consequences caused by surge, the prior art usually adopts vibration monitoring or pressure monitoring to determine whether surge occurs and the severity of surge by comparing the vibration amplitude of the vacuum pump with a preset amplitude threshold or the pressure of the vacuum pump with a preset pressure threshold. The detection accuracy of the above method is low, which is easy to cause missed or misjudgment of surge.

[0055] In response to the above problems, the present application has conducted an in-depth study of the surge characteristics of a multi-stage turbine vacuum pump and found that when a multi-stage turbine vacuum pump is about to surge, its vibration frequency will have obvious regularity. Therefore, the surge tendency can be discovered in advance through vibration monitoring, but vibration monitoring alone cannot directly determine whether the multi-stage turbine vacuum pump is surging. For example, loosening of the fixings of the multi-stage turbine vacuum pump will also cause regular vibration, but will not cause surge. Therefore, using vibration monitoring alone is prone to false alarms, affecting production efficiency. On the contrary, pressure monitoring can intuitively reflect the surge situation, but the problem with pressure monitoring is that the detection is more accurate when obvious surge occurs, but it is too late to handle the fault at this time, which may cause irreparable losses. Based on this, in order to overcome the drawbacks of vibration monitoring and pressure monitoring, the present application proposes a surge monitoring scheme that integrates vibration monitoring and pressure monitoring, which can take into account the timeliness and accuracy of surge monitoring. Specifically, in the embodiment of the present application, when the operating state of the target multi-stage turbine vacuum pump is abnormal, firstly, based on the vibration conditions of each level of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction, it is determined whether the target multi-stage turbine vacuum pump has surge indications. More specifically, the determination of whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each level of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction specifically includes:

[0056] The vibration frequencies of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction are obtained. If the vibration frequencies in the horizontal direction and the vertical direction both match the preset surge frequencies, it is determined that the target multi-stage turbine vacuum pump has surge indications.

[0057] Based on the foregoing, further, the present application has discovered through research that when the target multi-stage turbine vacuum pump is about to surge, its vibration frequencies in the horizontal and vertical directions will match the preset surge frequencies (obtained through preliminary tests). Based on this, the embodiment of the present application can detect the surge risk in the first place, and then promptly confirm whether surge occurs through pressure monitoring results, thereby ensuring timely intervention of emergency measures to avoid irreparable losses.

[0058] Step 103, when the target multi-stage turbine vacuum pump shows surge indications, the target stage where surge occurs and the root stage causing the surge are determined based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and the cause of the surge is determined in combination with the liquid level of the gas-water separator.

[0059] Specifically, based on the above content, it can be known that when the target multi-stage turbine vacuum pump shows surge indications, it does not necessarily surge. Based on this, the embodiment of the present application further determines whether surge occurs based on the pressure monitoring result. Based on the above content, it can also be known that the traditional method of determining whether surge occurs by comparing the vacuum pump pressure with the preset pressure threshold is only more accurate when obvious surge occurs, but it is too late to handle the fault at this time. In response to this problem, the embodiment of the present application further studies and finds that when the turbine vacuum pump surges, its inlet pressure and outlet pressure will fluctuate regularly (i.e., increase and decrease regularly, similar to a sine wave). Based on this, when the target multi-stage turbine vacuum pump shows surge indications, the embodiment of the present application further determines whether surge occurs, the target level where surge occurs, and the root level causing surge based on the fluctuation frequency of the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump. It is understandable that since surge monitoring is performed only through the pressure fluctuation frequency, accurate detection can be achieved even if the pressure fluctuation amplitude is small. Based on this, the timeliness of surge monitoring can be guaranteed to the maximum extent and the losses that may be caused by traditional surge monitoring methods can be avoided.

[0060] At the same time, when it is determined that the target multi-stage turbine vacuum pump is surging, it is necessary to further determine the target level of surging and the root level of surging so as to take targeted emergency measures. Figure 3 This is a schematic diagram of the target level and root level determination process provided by this application, such as Figure 3 As shown, the target level at which surge occurs and the root level causing surge are determined based on the inlet pressure and outlet pressure of each level of the target multi-stage turbine vacuum pump, specifically including:

[0061] Step 1031, based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, determine whether the fluctuation frequency of the inlet pressure and outlet pressure of each stage matches the preset surge fluctuation frequency, and if so, it is the target stage where surge occurs;

[0062] Step 1032: Determine the root stage causing the surge based on the time when the inlet pressure and outlet pressure of each target stage fluctuate.

[0063] It can be understood that the preset surge fluctuation frequency is obtained through preliminary tests. If the fluctuation frequency of the inlet pressure and outlet pressure of the current stage matches the preset surge fluctuation frequency, it is judged to be the target stage where surge occurs. Otherwise, it can be judged that surge does not occur, and the corresponding abnormal state cause can be determined as loose fixings. Through research, the present application has found that in the case of loose fixings, the loose parts can be determined by the vibration amplitudes in the horizontal and vertical directions. Based on this, in the case of no surge, the embodiments of the present application can further determine the loose parts in combination with the vibration amplitudes in the horizontal and vertical directions of each stage of the target multi-stage turbine vacuum pump, and then send targeted emergency control instructions to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, such as reducing the speed and prompting the user to perform tightening operations.

[0064] In the case of judging the occurrence of surge, it should be noted that for a multi-stage turbine vacuum pump, if surge occurs in multiple stages, it may be a chain surge caused by surge in a certain stage. Therefore, to solve this problem, it is only necessary to find the root stage causing the surge and perform targeted processing. Based on this, the efficiency of fault diagnosis can be greatly improved. Specifically, the embodiment of the present application can determine the root stage causing the surge based on the time when the inlet pressure and outlet pressure of each target stage fluctuate. In addition, through research, the embodiment of the present application found that the main reasons for the surge of a multi-stage turbine vacuum pump include two: one is that impurities or liquid enter the impeller (i.e., rotor) due to a failure of the gas-water separator, and the other is that the impeller shaft is loose or the impeller is deformed. Based on this, after determining the target stage where the surge occurs and the root stage causing the surge, the embodiment of the present application further determines the cause of the surge in combination with the gas-water separator liquid level. Specifically, the determination of the cause of the surge in combination with the gas-water separator liquid level specifically includes:

[0065] If the liquid level of the gas-water separator exceeds the preset value, the cause of the surge is determined to be a gas-water separator failure; otherwise, the cause of the surge is determined based on the vibration amplitude in the horizontal and vertical directions of the root level.

[0066] More specifically, the embodiments of the present application have found through research that for surge caused by loose impeller shaft and impeller deformation, there are obvious differences in the vibration amplitudes in the horizontal and vertical directions. Specifically, when surge is caused by loose impeller shaft, the vibration amplitudes in the horizontal and vertical directions are both large, while when surge is caused by impeller deformation, the vibration amplitude in the horizontal direction is large, but the vibration amplitude in the vertical direction is small. Based on this, when it is determined that the cause of surge is not a gas-water separator failure, the embodiments of the present application can determine whether the cause of surge is loose impeller shaft or impeller deformation based on the vibration amplitudes in the horizontal and vertical directions of the root level.

[0067] Step 104: Generate an emergency control instruction based on the surge cause and send it to a distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0068] Specifically, after determining the cause of surge, the embodiment of the present application can generate an emergency control instruction based on the surge cause and send it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump. If the surge cause is a gas-water separator failure, the gas-water separator is controlled to drain water; if the surge cause is a loose impeller shaft, the machine is controlled to shut down for maintenance; if the surge cause is an impeller deformation, the vacuum pump is controlled to reduce the speed, and the user is notified to perform maintenance confirmation after the process is completed.

[0069] The method provided in an embodiment of the present application includes: determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; in the case that the operating state of the target multi-stage turbine vacuum pump is abnormal, determining whether the target multi-stage turbine vacuum pump has surge indications based on the horizontal and vertical vibration conditions of each stage of the target multi-stage turbine vacuum pump; in the case that the target multi-stage turbine vacuum pump has surge indications, determining the target stage where surge occurs and the root stage causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and determining the cause of surge in combination with the liquid level of the gas-water separator; generating an emergency control instruction based on the surge cause and sending it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, so as to realize real-time monitoring of the working state of the multi-stage turbine vacuum pump and efficient fault handling.

[0070] The fault handling device of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided in the present application is described below. The fault handling device of the remote operation and maintenance system of the multi-stage turbine vacuum pump described below and the control method of the remote operation and maintenance system of the multi-stage turbine vacuum pump described above can be referenced to each other.

[0071] Based on any of the above embodiments, Figure 4 is a structural schematic diagram of a fault handling device of a remote operation and maintenance system for a multi-stage turbine vacuum pump provided by the present application, such as Figure 4 As shown, the device comprises:

[0072] The first judgment module 201 is used to determine whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump;

[0073] The second judgment module 202 is used to determine whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction when the target multi-stage turbine vacuum pump is in an abnormal operating state;

[0074] The first determination module 203 is used to determine the target stage where surge occurs and the root stage causing surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump when surge indication occurs in the target multi-stage turbine vacuum pump, and determine the cause of surge in combination with the liquid level of the gas-water separator;

[0075] The fault processing module 204 is used to generate an emergency control instruction based on the surge cause and send it to a distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0076] The device provided in the embodiment of the present application determines whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump through the first judgment module 201; the second judgment module 202 determines whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal and vertical directions when the operating state of the target multi-stage turbine vacuum pump is abnormal; the first determination module 203 determines the target level of surge and the root level causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump when the target multi-stage turbine vacuum pump has surge indications, and determines the cause of the surge in combination with the liquid level of the gas-water separator; the fault handling module 204 generates an emergency control instruction based on the surge cause and sends it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump, which can realize real-time monitoring of the working state of the multi-stage turbine vacuum pump and efficient fault handling.

[0077] Based on any of the above embodiments, determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump specifically includes:

[0078] Obtain a comparison result between the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and a preset speed combination, and determine whether the real-time turbine speed of each stage is abnormal based on the comparison result; if so, obtain the latest speed combination and perform a secondary comparison with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump, and when the secondary comparison result indicates that the real-time turbine speed is abnormal, determine that the operating state of the target multi-stage turbine vacuum pump is abnormal.

[0079] Based on any of the above embodiments, determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction specifically includes:

[0080] The vibration frequencies of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction are obtained. If the vibration frequencies in the horizontal direction and the vertical direction both match the preset surge frequencies, it is determined that the target multi-stage turbine vacuum pump has surge indications.

[0081] Based on any of the above embodiments, determining the target level at which surge occurs and the root level causing the surge based on the inlet pressure and outlet pressure of each level of the target multi-stage turbine vacuum pump specifically includes:

[0082] Based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, determining whether the fluctuation frequency of the inlet pressure and outlet pressure of each stage matches the preset surge fluctuation frequency, and if so, the target stage is the one where surge occurs;

[0083] The root stage causing surge is determined based on the time when the inlet pressure and outlet pressure of each target stage fluctuate.

[0084] Based on any of the above embodiments, determining the cause of surge in combination with the liquid level of the gas-water separator specifically includes:

[0085] If the liquid level of the gas-water separator exceeds the preset value, the cause of the surge is determined to be a gas-water separator failure; otherwise, the cause of the surge is determined based on the vibration amplitude in the horizontal and vertical directions of the root level.

[0086] Figure 5 An example of a physical structure diagram of an electronic device is shown in FIG. Figure 5 As shown, the electronic device may include: a processor (processor) 301, a communication interface (Communications Interface) 302, a memory (memory) 303 and a communication bus 304, wherein the processor 301, the communication interface 302, and the memory 303 communicate with each other through the communication bus 304. The processor 301 can call the logic instructions in the memory 303 to execute the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the above methods, and the method includes: determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; when the operating state of the target multi-stage turbine vacuum pump is abnormal, determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal and vertical directions; when the target multi-stage turbine vacuum pump has surge indications, determining the target stage where surge occurs and the root stage causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and determining the cause of surge in combination with the liquid level of the gas-water separator; generating an emergency control instruction based on the surge cause and sending it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0087] In addition, the logic instructions in the above-mentioned memory 303 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on such an understanding, the technical solution of the present application can be essentially or partly embodied in the form of a software product that contributes to the prior art, and the computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a disk or an optical disk.

[0088] On the other hand, the present application also provides a computer program product, which includes a computer program, which can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump provided by the above methods, and the method includes: determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; when the operating state of the target multi-stage turbine vacuum pump is abnormal, determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal and vertical directions; when the target multi-stage turbine vacuum pump has surge indications, determining the target level where surge occurs and the root level causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and determining the cause of the surge in combination with the liquid level of the gas-water separator; generating an emergency control instruction based on the surge cause and sending it to the distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0089] On the other hand, the present application also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements a fault handling method for a remote operation and maintenance system of a multi-stage turbine vacuum pump provided by the above-mentioned methods, the method comprising: determining whether the operating state of a target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; in the case where the operating state of the target multi-stage turbine vacuum pump is abnormal, determining whether a surge indication occurs in the target multi-stage turbine vacuum pump based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal and vertical directions; in the case where a surge indication occurs in the target multi-stage turbine vacuum pump, determining the target stage where the surge occurs and the root stage causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and determining the cause of the surge in combination with the liquid level of the gas-water separator; generating an emergency control instruction based on the surge cause and sending it to a distributed control unit corresponding to the target multi-stage turbine vacuum pump.

[0090] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0091] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A fault handling method for a remote operation and maintenance system of a multi-stage turbine vacuum pump, characterized in that: The method is applied to a remote operation and maintenance center of a remote operation and maintenance system of a multi-stage turbine vacuum pump, and the remote operation and maintenance system of the multi-stage turbine vacuum pump comprises: Remote operation and maintenance center and monitoring unit installed at the production site; The monitoring unit includes a sensor group corresponding to the target multi-stage turbine vacuum pump, a distributed control unit and an intelligent gateway, wherein the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center; The remote operation and maintenance center is used to perform fault diagnosis based on the operation data of the target multi-stage turbine vacuum pump, and generate an emergency control instruction when a fault occurs in the target multi-stage turbine vacuum pump and send the emergency control instruction to the distributed control unit corresponding to the target multi-stage turbine vacuum pump; The sensor group includes sensor groups corresponding to each stage of the target multi-stage turbine vacuum pump, each sensor group includes an inlet pressure sensor, an outlet pressure sensor, a horizontal vibration sensor and a vertical vibration sensor; the inlet pressure sensor is used to detect the inlet pressure of the corresponding stage, the outlet pressure sensor is used to detect the outlet pressure of the corresponding stage, the horizontal vibration sensor is used to detect the vibration of the corresponding stage in the horizontal direction, and the vertical vibration sensor is used to detect the vibration of the corresponding stage in the vertical direction; The distributed control unit is also used to control the operation of the multi-stage turbine vacuum pump based on the speed combination preset by the user and synchronously send the preset speed combination to the remote operation and maintenance center. Correspondingly, each sensor group also includes a speed sensor for detecting the turbine speed of the corresponding stage; each sensor group also includes a liquid level sensor for detecting the liquid level of the gas-water separator of the corresponding stage; The method comprises: determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; In the case where the target multi-stage turbine vacuum pump is in an abnormal operating state, determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction; When the target multi-stage turbine vacuum pump shows surge indication, the target stage where surge occurs and the root stage causing surge are determined based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, and the cause of surge is determined in combination with the liquid level of the gas-water separator; Generate an emergency control command based on the surge cause and send it to a distributed control unit corresponding to the target multi-stage turbine vacuum pump; The step of determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump specifically includes: Obtain a comparison result between the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and a preset speed combination, and determine whether the real-time turbine speed of each stage is abnormal based on the comparison result; if so, obtain the latest speed combination and perform a secondary comparison with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump, and when the secondary comparison result indicates that the real-time turbine speed is abnormal, determine that the operating state of the target multi-stage turbine vacuum pump is abnormal.

2. The fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump according to claim 1, characterized in that: The step of determining whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction specifically includes: The vibration frequencies of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction are obtained. If the vibration frequencies in the horizontal direction and the vertical direction both match the preset surge frequencies, it is determined that the target multi-stage turbine vacuum pump has surge indications.

3. The fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump according to claim 2 is characterized in that: The step of determining the target level for surge and the root level for surge based on the inlet pressure and outlet pressure of each level of the target multi-stage turbine vacuum pump specifically includes: Based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump, determining whether the fluctuation frequency of the inlet pressure and outlet pressure of each stage matches the preset surge fluctuation frequency, and if so, the target stage is the one where surge occurs; The root stage causing surge is determined based on the time when the inlet pressure and outlet pressure of each target stage fluctuate.

4. The fault handling method of the remote operation and maintenance system of the multi-stage turbine vacuum pump according to claim 3 is characterized in that: Determining the cause of surge in combination with the liquid level of the gas-water separator specifically includes: If the liquid level of the gas-water separator exceeds the preset value, the cause of the surge is determined to be a gas-water separator failure; otherwise, the cause of the surge is determined based on the vibration amplitude in the horizontal and vertical directions of the root level.

5. A fault handling device for a remote operation and maintenance system of a multi-stage turbine vacuum pump, characterized in that: The device is applied to a remote operation and maintenance center of a remote operation and maintenance system of a multi-stage turbine vacuum pump, and the remote operation and maintenance system of the multi-stage turbine vacuum pump comprises: Remote operation and maintenance center and monitoring unit installed at the production site; The monitoring unit includes a sensor group corresponding to the target multi-stage turbine vacuum pump, a distributed control unit and an intelligent gateway, wherein the sensor group is used to collect operating data of the target multi-stage turbine vacuum pump, the distributed control unit is used to receive the operating data of the target multi-stage turbine vacuum pump and send it to the remote operation and maintenance center through the intelligent gateway, and the distributed control unit is also used to perform emergency operations on the target multi-stage turbine vacuum pump based on the emergency control instructions of the remote operation and maintenance center; The remote operation and maintenance center is used to perform fault diagnosis based on the operation data of the target multi-stage turbine vacuum pump, and generate an emergency control instruction when a fault occurs in the target multi-stage turbine vacuum pump and send the emergency control instruction to the distributed control unit corresponding to the target multi-stage turbine vacuum pump; The sensor group includes sensor groups corresponding to each stage of the target multi-stage turbine vacuum pump, each sensor group includes an inlet pressure sensor, an outlet pressure sensor, a horizontal vibration sensor and a vertical vibration sensor; the inlet pressure sensor is used to detect the inlet pressure of the corresponding stage, the outlet pressure sensor is used to detect the outlet pressure of the corresponding stage, the horizontal vibration sensor is used to detect the vibration of the corresponding stage in the horizontal direction, and the vertical vibration sensor is used to detect the vibration of the corresponding stage in the vertical direction; The distributed control unit is also used to control the operation of the multi-stage turbine vacuum pump based on the speed combination preset by the user and synchronously send the preset speed combination to the remote operation and maintenance center. Correspondingly, each sensor group also includes a speed sensor for detecting the turbine speed of the corresponding stage; each sensor group also includes a liquid level sensor for detecting the liquid level of the gas-water separator of the corresponding stage; The device comprises: A first judgment module is used to determine whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump; The second judgment module is used to determine whether the target multi-stage turbine vacuum pump has surge indications based on the vibration conditions of each stage of the target multi-stage turbine vacuum pump in the horizontal direction and the vertical direction when the target multi-stage turbine vacuum pump is in an abnormal operating state; The first determination module is used to determine the target stage where surge occurs and the root stage causing the surge based on the inlet pressure and outlet pressure of each stage of the target multi-stage turbine vacuum pump when the target multi-stage turbine vacuum pump has surge indications, and determine the cause of the surge in combination with the liquid level of the gas-water separator; a fault processing module, configured to generate an emergency control instruction based on the surge cause and send the emergency control instruction to a distributed control unit corresponding to the target multi-stage turbine vacuum pump; The step of determining whether the operating state of the target multi-stage turbine vacuum pump is abnormal based on the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump specifically includes: Obtain a comparison result between the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump and a preset speed combination, and determine whether the real-time turbine speed of each stage is abnormal based on the comparison result; if so, obtain the latest speed combination and perform a secondary comparison with the real-time turbine speed of each stage of the target multi-stage turbine vacuum pump, and when the secondary comparison result indicates that the real-time turbine speed is abnormal, determine that the operating state of the target multi-stage turbine vacuum pump is abnormal.