A variable stiffness gel-filled bladder polishing head and compound polishing apparatus

Abstract

This invention discloses a variable stiffness gel-filled capsule-type polishing head and a composite polishing device. The capsule-type polishing head includes a base plate, a capsule, a heating wire, and a cooling medium delivery pipe. The capsule is fixed on the base plate. The capsule is filled with a variable stiffness gel; the cooling medium delivery pipe and the heating wire are embedded inside the variable stiffness gel. The heating wire and the cooling medium delivery pipe are used to regulate the temperature of the variable stiffness gel; the stiffness of the variable stiffness gel changes with temperature. During operation, the cooling medium delivery pipe is connected to an external coolant supply device. By changing the temperature of the variable stiffness gel, the capsule can be controlled to switch between a rigid and a flexible state. This capsule-type polishing head can adaptively deform according to the workpiece surface in a flexible state and switch to a rigid state after deformation; it uses the deformed surface that matches the workpiece surface to polish the workpiece, while also having the advantage of sufficient contact in elastic polishing operations.

Description

Technical Field

[0001] This invention belongs to the field of polishing equipment technology, specifically relating to a variable stiffness gel-filled capsule-type polishing head and polishing method. Background Technology

[0002] In recent years, driven by the increasing demand from major national scientific projects and various optoelectronic products, the demand for complex curved surface parts in the automotive, shipbuilding, aerospace, and optics fields has become increasingly widespread. Complex mold surfaces refer to the complex shapes presented on the molds used in manufacturing curved surface parts. The production of complex curved surface parts is inseparable from molds, such as stamping, casting processes, and the ultra-precision pressing and mold compensation deformation methods used in the mass production of optical components. Although the development of computer 300 technology and digital control technology has largely achieved automated processing of complex curved surface parts, their finishing still requires manual assistance, resulting in low efficiency and difficulty in ensuring good surface accuracy and quality. This has become a major factor restricting the development of complex curved surface manufacturing technology.

[0003] In recent years, against this backdrop, ultra-precision polishing technology has developed rapidly, leading to the emergence of numerous ultra-precision polishing methods, such as capsule polishing, ion beam polishing, shear thickening polishing, vibration-assisted polishing, and hydrodynamic polishing. These methods all operate on different processing principles, resulting in variations in technical difficulty, removal function stability, processing efficiency, subsurface damage, edge effects, and economic viability. Capsule polishing technology is highly adaptable, capable of handling more complex surfaces compared to traditional rigid polishing heads, while offering higher removal efficiency and lower costs, thus securing its place in the ultra-precision polishing field. However, in capsule polishing, the elastic capsule directly contacts the workpiece surface, and the capsule requires continuous pressure to maintain its shape, making low-pressure polishing difficult. Furthermore, the capsule air pressure and the mechanical properties of the capsule material directly affect the abrasive movement within the contact area between the grinding wheel and the workpiece, thus influencing the material removal efficiency and surface polishing quality. Summary of the Invention

[0004] The purpose of this invention is to provide a variable stiffness gel-filled capsule-type polishing head and a composite polishing device.

[0005] In a first aspect, the present invention provides a capsule-type polishing head filled with variable stiffness gel, comprising a base plate, a capsule, a heating wire, and a cooling medium delivery pipe. The capsule is fixed to the base plate. The capsule is filled with a variable stiffness gel; the cooling medium delivery pipe and the heating wire are embedded inside the variable stiffness gel. The heating wire and the cooling medium delivery pipe are used to regulate the temperature of the variable stiffness gel; the stiffness of the variable stiffness gel changes with temperature. During operation, the cooling medium delivery pipe is connected to an external coolant supply device. By changing the temperature of the variable stiffness gel, the capsule is controlled to switch between a rigid state and a flexible state.

[0006] Preferably, the capsule-type polishing head further includes an external input connector, an internal input connector, an external output connector, and an internal output connector. The base plate has an input hole and an output hole. The external input connector and the internal input connector are respectively installed at the top and bottom of the input hole; the external output connector and the internal output connector are respectively installed at the top and bottom of the output hole; the internal input connector and the internal output connector are respectively connected to both ends of the cooling medium delivery pipe; the external input connector is connected to an external coolant supply device.

[0007] Preferably, a one-way valve is installed in each of the external input connector, internal input connector, external output connector, and internal output connector.

[0008] Preferably, the coolant stored in the coolant supply device is liquid nitrogen.

[0009] Preferably, the inlet of the cooling medium conveying pipe is connected to the position of the cooling medium conveying pipe furthest from the base plate to form an input section of the cooling medium conveying pipe; the position of the cooling medium conveying pipe furthest from the base plate is connected to the outlet of the cooling medium conveying pipe to form an output section of the cooling medium conveying pipe; both the input section and the output section are spiral-shaped, and the spiral radius gradually decreases in the direction away from the base plate.

[0010] Preferably, the heating wire is wound around the outside of the cooling medium delivery pipe.

[0011] Preferably, the outer surface of the capsule is provided with an abrasive layer that can change shape with the deformation of the capsule.

[0012] Preferably, the base plate has an annular groove on the side opposite to the bladder body; a coil is installed in the annular groove.

[0013] Preferably, the power supply lines for both the coil and the heating wire are led out through the conductive slip ring 13 to an external power supply element capable of adjusting the output voltage.

[0014] Preferably, the base plate has a concave connecting groove at its bottom; the connecting groove has an internal thread; the bladder and the base plate are connected by a fixing ring; the upper end of the fixing ring has an external thread, and the fixing ring and the base plate are connected by the thread; the opening edge of the bladder is clamped between the fixing ring and the base plate.

[0015] Secondly, the present invention provides a polishing method using the aforementioned capsule-type polishing head; the polishing method includes the following steps:

[0016] Step 1: Heat the variable stiffness gel with a heating wire to switch the capsule to a flexible state.

[0017] Step 2: Use the capsule to compress the workpiece to be polished; the capsule and the variable stiffness gel adapt to the surface shape of the workpiece to be polished.

[0018] Step 3: Pass coolant into the cooling medium delivery pipe to switch the capsule to a rigid state and maintain its shape that matches the surface of the workpiece being polished.

[0019] Step 4: The capsule-type polishing head performs contact polishing or non-contact polishing on the workpiece.

[0020] Thirdly, the present invention provides an energy field-assisted composite polishing device, comprising an ultrasonic generator, an ultrasonic transducer, a magnetic field generator, a polishing spindle, a clamping mechanism, a liquid nitrogen supply pump, a vacuum adsorption fixture, a collection pool, and the aforementioned capsule-type polishing head. The bottom of the collection pool is fixed to the top of the clamping spindle. The vacuum adsorption fixture is fixed inside the collection pool for clamping workpieces; the polishing spindle is mounted on the clamping mechanism; the capsule-type polishing head is mounted on the bottom of the polishing spindle. The capsule-type polishing head is located above the vacuum adsorption fixture. Both the clamping spindle and the polishing spindle are capable of rotating under the drive of a power element.

[0021] The ultrasonic transducer is mounted on a clamping mechanism. An ultrasonic generator drives the ultrasonic transducer to perform ultrasonic vibration. A second electromagnet is installed in the collection tank.

[0022] Preferably, a nozzle for spraying polishing liquid is provided above the collection pool.

[0023] The beneficial effects of this invention are:

[0024] 1. This invention utilizes the characteristic that the stiffness of a variable stiffness gel changes with temperature to provide a capsule-type polishing head whose stiffness can be altered by adjusting the temperature. This capsule-type polishing head can adaptively deform according to the workpiece surface in a flexible state and switch to a rigid state after deformation. It uses the deformed surface that matches the workpiece surface to polish the workpiece, combining the advantages of sufficient contact in elastic polishing with the low pressure of rigid polishing. Therefore, this invention can perform polishing under low pressure (less than 1.0 psi). Polishing under low pressure reduces tearing and over-polishing of low-strength media, significantly reduces the sensitivity of the polishing process to device patterns, and also reduces tool wear, extending tool life.

[0025] 2. This invention uses a variable stiffness gel instead of air as the filling material, which can reduce the airtightness requirements of the polishing head. Furthermore, the stiffness of the gel changes rapidly, and the stiffness or shape of the polishing head can be changed by altering the gel temperature as needed, enabling the polishing head to polish planar, spherical, aspherical, or even arbitrary curved surfaces.

[0026] 3. This invention utilizes a cooling medium delivery pipe and a heating wire to control the temperature and the gel pressure in the polishing head in real time, so that during the polishing process, the workpiece to be polished and the polishing head contact each other with a certain path, pressure, and angle to achieve polishing.

[0027] 4. This invention integrates ultrasonic processing, chemical mechanical polishing, and magnetohydrodynamic polishing into a variable stiffness gel-filled capsule-type polishing head, combining acoustic and magnetic fields to achieve a novel composite energy field-assisted polishing technology. This novel composite processing method integrates the advantages of advanced processing technologies such as ultrasonic vibration-assisted polishing, chemical mechanical polishing, and magnetic polishing, while compensating for each other's shortcomings. This composite processing system offers flexible selection, facilitating the choice of processing method based on the processing performance and quality requirements of the material being processed.

[0028] 5. This invention has the advantages of high processing efficiency, good surface quality, low cost, high degree of automation, and ease of operation. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of Embodiment 1 of the present invention.

[0030] Figure 2 This is a cross-sectional schematic diagram of Embodiment 1 of the present invention.

[0031] Figure 3 This is a side view of the cooling medium delivery pipe in Embodiment 1 of the present invention.

[0032] Figure 4 This is a top view of the cooling medium delivery pipe in Embodiment 1 of the present invention.

[0033] Figure 5 This is a system block diagram of Embodiment 2 of the present invention. Detailed Implementation

[0034] The present invention will be further described below with reference to the accompanying drawings.

[0035] Example 1

[0036] like Figure 1 and Figure 2 As shown, a variable stiffness gel-filled capsule-type polishing head includes a base plate 1, a capsule 2, a retaining ring 3, an external input connector 4, an internal input connector 5, an external output connector 6, an internal output connector 7, a heating wire (not shown in the figure), a cooling medium delivery pipe 9, a conductive slip ring 13, and a gasket 10.

[0037] The base plate 1 has a recessed connecting groove at its bottom; the connecting groove has an internal thread; the capsule 2 is connected to the base plate 1 by a fixing ring 3; the upper end of the fixing ring 3 has an external thread, and the fixing ring 3 is threaded to the base plate 1; a gasket 10 is provided between the fixing ring 3 and the capsule 2; the capsule 2 is hemispherical, and the opening edge of the capsule 2 is clamped between the fixing ring 3 and the base plate 1; this fixes the capsule 2 to the base plate 1 and forms a sealed space between the inner side of the capsule 2 and the base plate 1. The top of the base plate has an annular groove; a coil 8 is installed in the annular groove; the coil 8 cooperates with the main shaft to form a first electromagnet, providing a magnetic field for composite polishing. The power supply lines of the coil 8 and the heating wire are both led out through a conductive slip ring 13 to an external power supply element capable of adjusting the output voltage.

[0038] The outer surface of the capsule 2 is provided with an abrasive layer; the abrasive layer is used for polishing the workpiece and can change shape with the deformation of the capsule 2. The interior of the capsule 2 is filled with a variable stiffness gel 11; a cooling medium delivery pipe 9 and a heating wire are embedded inside the variable stiffness gel 11.

[0039] The base plate 1 has an input hole and an output hole. External input connector 4 and internal input connector 5 are respectively installed at the top and bottom of the input hole; external output connector 6 and internal output connector 7 are respectively installed at the top and bottom of the output hole; internal input connector 5 and internal output connector 7 are respectively connected to both ends of the cooling medium delivery pipe 9 for the input of coolant and the discharge of gas generated after coolant vaporization. All connectors are equipped with one-way valves to increase the airtightness of the pipeline. In this embodiment, liquid nitrogen is used as the coolant. External input connector 4 is connected to an external coolant supply device, thereby forming a coolant supply passage that can supply coolant to the capsule 2, increasing the stiffness of the variable stiffness gel 11 and reducing the overall stiffness of the capsule-type polishing head.

[0040] The cooling medium delivery pipe 9 is arranged in a double-layered spiral shape, with the spiral radius gradually decreasing from top to bottom (i.e., away from the base plate 1). Specifically, the cooling medium delivery pipe 9 starts from the inner inlet connector 5, gradually spirals downwards with a gradually decreasing spiral radius, and after reaching the lowest point, the cooling medium delivery pipe 9 gradually spirals upwards with a gradually increasing spiral radius until it connects to the inner outlet connector 7. The inner inlet connector 5 and the lowest point form the inlet section of the cooling medium delivery pipe 9; the inner outlet connector 7 and the lowest point form the outlet section of the cooling medium delivery pipe 9; the inlet section of the cooling medium delivery pipe 9 surrounds the outer side of the outlet section.

[0041] This spiral arrangement with gradually changing curvature radius ensures that the cooling medium delivery pipe 9 can meet the deformation requirements of the bladder when the bladder surface is polished or the shape of the bladder is changed, and that different positions of the cooling medium delivery pipe 9 will not be squeezed against each other.

[0042] The heating wire is arranged along the path of the medium delivery pipe 9 or wound around the cooling medium delivery pipe 9. The heating wire is used to heat the variable stiffness gel 11, thereby reducing the stiffness of the variable stiffness gel 11, so that the capsule-type polishing head can adapt to the shape of the surface being processed.

[0043] The variable stiffness gel 11 can switch between a transparent and soft solid state and a white and hard state between temperatures ranging from -90℃ to 58℃, becoming harder when cooled and softer when heated.

[0044] During operation, electricity is first applied to the heating wire to heat the variable stiffness gel 11, reducing its stiffness and switching the capsule-type polishing head to a flexible state. The flexible capsule-type polishing head is then used to compress the workpiece being polished, causing it to adaptively deform according to the surface shape of the workpiece. Next, liquid nitrogen is introduced into the cooling medium delivery pipe 9 to lower the temperature of the variable stiffness gel 11, further reducing its stiffness and switching the capsule-type polishing head to a rigid state, maintaining its shape. At this point, the rigid capsule-type polishing head is positioned to match the surface shape of the workpiece. Finally, the capsule-type polishing head is used to polish the workpiece. Before polishing, the pipe connected to the external coolant supply device on the external input connector 4 is disconnected to prevent pipe entanglement during the rotation of the capsule-type polishing head. This embodiment combines the advantages of both rigid and flexible polishing head operation.

[0045] In some embodiments, a liquid rotary joint is installed on the capsule-type polishing head; the external input joint 4 is connected to an external coolant supply device via the liquid rotary joint; this eliminates the need to remove the pipe before polishing and allows coolant to be continuously supplied to the capsule-type polishing head during polishing to continuously control the temperature of the capsule-type polishing head.

[0046] In some embodiments, the capsule-type polishing head is used for non-contact polishing. During operation, the capsule-type polishing head is first switched to a flexible state. Then, the capsule-type polishing head is pressed against the surface of the workpiece to be polished. After the shape of the capsule-type polishing head matches the surface of the workpiece, the capsule-type polishing head is switched to a rigid state. Next, the capsule-type polishing head is separated from the workpiece, and polishing fluid is added between the capsule-type polishing head and the workpiece. Finally, the capsule-type polishing head is driven to rotate or vibrate to perform non-contact polishing on the workpiece. During this process, because the shape of the capsule-type polishing head matches the workpiece, the gap between the capsule-type polishing head and the workpiece remains consistent at different positions during non-contact polishing. Therefore, the capsule-type polishing head provided in this embodiment helps to improve the consistency of polishing effect at different positions of the workpiece during non-contact polishing.

[0047] Variable stiffness gel 11 is a sal-gel gel, and its preparation process is as follows:

[0048] (1) Mix acetic acid and deionized water at a molar ratio of 1:3 to obtain an acetic acid solution; mix the acetic acid solution with sodium acetate trihydrate (ACS) at a weight ratio of 10:100 and heat at 90°C for at least 72 hours (to completely melt all crystals) to obtain a supercooled salt stock solution.

[0049] (2) A variable stiffness gel was prepared by mixing an acetic acid solution, a supercooled salt stock solution, and a polymer precursor at 90°C. The polymer precursor was prepared by mixing acrylic acid monomer (containing 200 ppm 4-methoxyphenol as an inhibitor, 99.5%) with a low water content and N,N′-methylenebis(acrylamide) crosslinking agent in a weight ratio of 100:5.

[0050] Different gels can be prepared by adjusting the weight ratio of acetic acid solution, supercooled salt stock solution and polymer precursor, resulting in different stiffness variations.

[0051] Example 2

[0052] See Figure 3As shown, an energy field-assisted composite polishing device includes an ultrasonic generator 100, an ultrasonic transducer 200, a computer 300, a magnetic field generator 400, a polishing spindle 500, a clamping mechanism 600, a liquid nitrogen supply pump 700, a temperature control device 710, a vacuum adsorption fixture 800, a collection pool 900, and a capsule-type polishing head provided in Example 1. The bottom of the collection pool is fixed to the top of the fixture spindle. The vacuum adsorption fixture 800 is fixed in the collection pool for clamping workpieces; the polishing spindle 500 is mounted on the clamping mechanism 600; the capsule-type polishing head is mounted on the bottom of the polishing spindle 500. The capsule-type polishing head is located above the vacuum adsorption fixture 800. Both the fixture spindle and the polishing spindle 500 can rotate under the drive of a power element.

[0053] A nozzle 910 for spraying polishing liquid is provided above the collection pool 900.

[0054] An ultrasonic transducer 200 is mounted on a clamping mechanism 600. An ultrasonic generator 100 drives the ultrasonic transducer 200 to perform ultrasonic vibration. A magnetic field generator 400 includes a second electromagnet and a first electromagnet mounted on the capsule-type polishing head. The coil of the second electromagnet is wound around the outside of the vacuum adsorption clamp 800 to generate a magnetic field of controllable strength around the workpiece. A temperature control device 710 is used to detect the temperature inside the capsule-type polishing head. Based on the temperature measured by the temperature control device 710, a computer 300 controls the output flow rate of the liquid nitrogen supply pump 700 and the power of the heating wire, thereby precisely regulating the temperature inside the capsule-type polishing head; and controlling the temperature of the gel in the polishing head to change the gel stiffness.

[0055] During operation, the workpiece to be polished is fixed in the collection pool by a vacuum adsorption fixture 800; the polishing head is mounted on the polishing spindle 500; the ultrasonic generator 100 generates a high-frequency alternating current signal and outputs it to the ultrasonic transducer 200; the ultrasonic transducer 200 converts the high-frequency alternating current signal into mechanical energy and applies ultrasonic vibration to the capsule-type variable stiffness gel polishing head; the energy field-assisted composite polishing device provided in this embodiment can realize ultrasonic vibration-assisted polishing, magnetorheological polishing, ultrasonic vibration-assisted magnetorheological polishing, chemical mechanical polishing, and chemical mechanical polishing under ultrasonic and magnetic field assistance, realizing multiple polishing methods with one device, reducing cost investment, and realizing polishing of planes, spheres, aspherical surfaces, and even arbitrary curved surfaces; in addition, the grinding function can also be realized through the surface material of the capsule, and with the assistance of the energy field, multi-dimensional composite processing can be realized to achieve the purpose of cost reduction and efficiency improvement.

[0056] The process of energy field-assisted polishing using the above-mentioned composite polishing device includes the following steps:

[0057] The workpiece to be polished is fixed in the collection pool by a vacuum adsorption fixture 800. A capsule-type polishing head filled with variable stiffness gel is mounted on the polishing spindle 500, forming a sealed cavity. The cavity is filled with variable stiffness gel, and the gel pressure inside the capsule can be adjusted in real time. In this way, the capsule itself, as a polishing tool, not only has good flexibility but also a certain strength, and has a good resistance to deformation.

[0058] A variable stiffness gel-filled capsule-type polishing head is brought close to the workpiece surface. Polishing fluid is added between the variable stiffness gel-filled capsule-type polishing head and the workpiece surface. The temperature of the capsule-type polishing head is increased, which reduces the stiffness of the capsule-type polishing head. During polishing, the distance between the polishing head and the workpiece surface is adjusted so that the capsule-type polishing head contacts the workpiece being polished, deforms, and closely adheres to the surface of the workpiece being polished, forming a polishing contact area. Liquid nitrogen is introduced into the capsule-type polishing head, which increases the stiffness of the capsule-type polishing head.

[0059] The ultrasonic generator 100 or magnetic field generator 400 can be activated as needed to provide an energy field to assist the processing area. Energy field-assisted polishing is a typical multi-component composite processing system, and its theory involves multiple disciplines such as mechanics, materials science, tribology, control science, physical chemistry, fluid dynamics, and chemical reaction kinetics.

[0060] With the assistance of an external energy field, the polished surface of the workpiece forms a friction pair with the capsule-type polishing head filled with variable stiffness gel. The friction pair polishes the workpiece under the action of the polishing fluid's chemical mechanical properties, ultrasonic vibration, and an external magnetic field, resulting in an ultra-precise and smooth workpiece surface.

[0061] This invention applies a novel variable stiffness gel to capsule polishing and uses a capsule-type polishing head made from this gel in composite polishing, combining it with ultrasound and magnetic fields to achieve a novel composite polishing technology. This novel composite processing method integrates the advantages of advanced processing technologies such as ultrasonic vibration-assisted grinding, ultrasonic processing, and magnetic polishing, while compensating for each other's shortcomings. By changing the temperature of the gel, thereby altering the stiffness and shape of the capsule, it can achieve not only ternary composite processing of ultrasonic processing-grinding-magnetic fluid polishing, but also binary composite processing of ultrasonic vibration-assisted grinding, grinding-magnetic polishing, and ultrasonic-assisted magnetic polishing. Therefore, this composite processing system has flexible selection freedom, facilitating the selection of processing methods based on the processing performance and quality requirements of the material being processed.

Claims

1. A variable stiffness gel-filled capsule-type polishing head, comprising a base disk (1) and a capsule (2); characterized in that: It also includes a heating wire and a cooling medium delivery pipe (9); the capsule (2) is fixed on the base plate (1); the capsule (2) is filled with a variable stiffness gel (11); the variable stiffness gel (11) is embedded with a cooling medium delivery pipe (9) and a heating wire; the heating wire and the cooling medium delivery pipe (9) are used to adjust the temperature of the variable stiffness gel (11); the stiffness of the variable stiffness gel (11) changes with the temperature; during operation, the cooling medium delivery pipe (9) is connected to an external coolant supply device; by changing the temperature of the variable stiffness gel (11), the capsule (2) is controlled to switch between a rigid state and a flexible state; The inlet of the cooling medium conveying pipe (9) and the position of the cooling medium conveying pipe (9) furthest from the base plate (1) form an inlet section of the cooling medium conveying pipe (9); the position of the cooling medium conveying pipe (9) furthest from the base plate (1) and the outlet of the cooling medium conveying pipe (9) form an outlet section of the cooling medium conveying pipe (9); both the inlet section and the outlet section are spiral-shaped, and the spiral radius gradually decreases in the direction away from the base plate (1); The heating wire is wound around the outside of the cooling medium delivery pipe (9); The base plate has an annular groove on the side away from the bladder (2); a coil (8) is installed in the annular groove; the coil (8) cooperates with the main shaft to form a first electromagnet.

2. The variable stiffness gel-filled capsule-type polishing head according to claim 1, characterized in that: It also includes an external input connector (4), an internal input connector (5), an external output connector (6), and an internal output connector (7); the base plate (1) is provided with an input hole and an output hole; the external input connector (4) and the internal input connector (5) are respectively installed at the top and bottom of the input hole; the external output connector (6) and the internal output connector (7) are respectively installed at the top and bottom of the output hole; the internal input connector (5) and the internal output connector (7) are respectively connected to the two ends of the cooling medium conveying pipe (9); the external input connector (4) is connected to the external coolant supply equipment; a one-way valve is installed in each of the external input connector (4), the internal input connector (5), the external output connector (6), and the internal output connector (7).

3. The variable stiffness gel-filled capsule-type polishing head according to claim 1, characterized in that: The coolant stored in the coolant supply device is liquid nitrogen.

4. The variable stiffness gel-filled capsule-type polishing head according to claim 1, characterized in that: The outer surface of the capsule (2) is provided with an abrasive layer that can change shape with the deformation of the capsule (2).

5. A variable stiffness gel-filled capsule-type polishing head according to claim 1, characterized in that: The base plate (1) has a concave connecting groove at the bottom; the connecting groove has an internal thread; the bladder (2) and the base plate (1) are connected by a fixing ring (3); the upper end of the fixing ring (3) has an external thread, and the fixing ring (3) and the base plate (1) are connected by a thread; the opening edge of the bladder (2) is clamped between the fixing ring (3) and the base plate (1).

6. A polishing method, characterized in that: Using the capsule-type polishing head as described in any one of claims 1-5; the polishing method includes the following steps: Step 1: Heating the variable stiffness gel (11) with an electric heating wire causes the capsule (2) to switch to a flexible state; Step 2: Use the capsule (2) to squeeze the workpiece to be polished; the capsule (2) and the variable stiffness gel (11) adapt to the surface shape of the workpiece to be polished; Step 3: Pass coolant into the cooling medium delivery pipe (9) to switch the capsule (2) to a rigid state and maintain the shape that matches the surface of the workpiece being polished. Step 4: The capsule-type polishing head performs contact polishing or non-contact polishing on the workpiece.

7. A composite polishing device assisted by an energy field, comprising an ultrasonic generator (100), an ultrasonic transducer (200), a magnetic field generator (400), a polishing spindle (500), a clamping mechanism (600), a liquid nitrogen supply pump (700), a vacuum adsorption fixture (800), and a collection tank (900); characterized in that: It also includes a capsule-type polishing head as described in any one of claims 1-5; the bottom of the collection pool is fixed to the top of the fixture spindle; a vacuum adsorption fixture (800) is fixed in the collection pool for clamping workpieces; a polishing spindle (500) is mounted on the clamping mechanism (600); the capsule-type polishing head is mounted at the bottom of the polishing spindle (500); the capsule-type polishing head is located above the vacuum adsorption fixture (800); both the fixture spindle and the polishing spindle (500) are capable of rotating under the drive of a power element; The ultrasonic transducer (200) is mounted on the clamping mechanism (600); the ultrasonic generator (100) is used to drive the ultrasonic transducer (200) to perform ultrasonic vibration; a second electromagnet is installed in the collection pool.

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