Special gas environment simulation and vibration suppression device and method for closed space

Abstract

A kind of special gas environment simulation and vibration suppression device and method in closed space belong to high-end equipment field.Vacuum tank is fixedly communicated with pump group by first bellow, diaphragm vacuum gauge and piezoresistance vacuum gauge are installed on vacuum tank, vacuum tank is fixedly connected with first ground base by vacuum tank support;Vacuum tank is fixedly communicated with one end of two upper end sealing pipes, the other end of two upper end sealing pipes is fixedly communicated with one end of corresponding second bellow respectively, the other end of two second bellows is fixedly communicated with corresponding lower end sealing pipe respectively, two lower end sealing pipes are fixedly connected with second ground base;Workbench is arranged in vacuum tank, workbench bottom is fixedly connected with the top end of two workbench supports, the bottom end of two workbench supports respectively penetrates corresponding upper end sealing pipe, second bellow and lower end sealing pipe and is fixedly connected with second ground base, movement module and balance mass module are all slidingly matched with workpiece table.The present application is used for special gas environment simulation and vibration suppression in closed space.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of high-end equipment, and particularly relates to a special gas environment simulation and vibration suppression device and method in a closed space. BACKGROUND

[0002] In the field of high-end equipment, such as deep space exploration equipment and semiconductor equipment, it is often necessary to simulate a special gas environment for research and development and testing. For example, when developing a Mars exploration equipment, it is necessary to simulate the thin carbon dioxide gas environment on the surface of Mars. Similarly, the development of semiconductor lithography equipment also needs to simulate a vacuum environment. Generally, in order to carry out these simulations, a closed space, such as a vacuum tank, is used to simulate the gas environment. However, during the simulation of a special gas environment, it is often disturbed by external vibrations from outside the closed space, such as vibrations caused by equipment such as vacuum pumps. In addition, high-end equipment itself may involve uniform speed and acceleration and deceleration movements inside, which will also adversely affect the research and development work. The current challenge is that there is no ground simulation equipment for simulating a special gas environment in a closed space while considering external and internal vibration suppression. SUMMARY

[0003] The purpose of the present application is to propose a special gas environment simulation and vibration suppression device and method in a closed space for special gas environment simulation and internal and external vibration suppression, so as to realize the simulation of a special gas environment.

[0004] To achieve the above purpose, the technical solutions adopted by the present application are as follows:

[0005] Scheme one: a special gas environment simulation and vibration suppression device in a closed space, comprising a vacuum tank, a motion module, a workbench, a balance mass module, a first bellows, a pump group, a diaphragm vacuum gauge, a piezoresistive vacuum gauge, a vacuum tank support, two upper end sealed pipes, two second bellows, two lower end sealed pipes and two workbench supports.

[0006] The vacuum tank is horizontally arranged, one end of the vacuum tank is fixedly communicated with the pump set through the first corrugated pipe, the pump set is fixedly connected with the third ground base, the diaphragm vacuum gauge and the piezoresistive vacuum gauge are both installed on the vacuum tank and used for monitoring the gas pressure in the vacuum tank, the bottom of the vacuum tank is fixedly connected with the top end of the vacuum tank support, and the bottom end of the vacuum tank support is fixedly connected with the first ground base; the left and right ends of the bottom of the vacuum tank are fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is fixedly communicated with one end of the corresponding second corrugated pipe, the other end of the two second corrugated pipes is fixedly communicated with one end of the corresponding lower end sealing pipe, and the other end of the two lower end sealing pipes is fixedly connected with the second ground base; the workbench is horizontally arranged in the vacuum tank, the bottom of the workbench is fixedly connected with the top end of the two workbench supports, the bottom end of the two workbench supports is respectively inserted into the corresponding upper end sealing pipe, second corrugated pipe and lower end sealing pipe and fixedly connected with the second ground base, and the motion module and the balance mass module are both in sliding fit with the upper surface of the workbench.

[0007] Scheme two: on the basis of scheme one, a wall is added, and the first corrugated pipe is fixedly inserted through the wall.

[0008] Scheme three: a special gas environment simulation and vibration suppression device for a closed space, comprising a vacuum tank, a motion module, a workbench, a balance mass module, a first corrugated pipe, a pump set, a diaphragm vacuum gauge, a piezoresistive vacuum gauge, a vacuum tank support, an air floating plane, an air floating module, two upper end sealing pipes, two second corrugated pipes, two lower end sealing pipes and two workbench supports.

[0009] The vacuum tank is horizontally arranged, one end of the vacuum tank is fixedly communicated with the pump set through the first corrugated pipe, the pump set is fixedly connected with the third ground base, the diaphragm vacuum gauge and the piezoresistive vacuum gauge are both installed on the vacuum tank and used for monitoring the gas pressure in the vacuum tank, the bottom of the vacuum tank is fixedly connected with the top end of the vacuum tank support, and the bottom end of the vacuum tank support is fixedly connected with the first ground base; the left and right ends of the bottom of the vacuum tank are fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is fixedly communicated with one end of the corresponding second corrugated pipe, the other end of the two second corrugated pipes is fixedly communicated with one end of the corresponding lower end sealing pipe, and the other end of the two lower end sealing pipes is fixedly connected with the second ground base; the workbench is horizontally arranged in the vacuum tank, the bottom of the workbench is fixedly connected with the top end of the two workbench supports, the bottom end of the two workbench supports is respectively inserted into the corresponding upper end sealing pipe, second corrugated pipe and lower end sealing pipe and fixedly connected with the second ground base, and the motion module and the balance mass module are both in sliding fit with the upper surface of the workbench.

[0010] Scheme four: a special gas environment simulation and vibration suppression device for a closed space, comprising a vacuum tank, a motion module, a workbench, a first bellows, a pump group, a diaphragm vacuum gauge, a piezoresistive vacuum gauge, an air floating plane, an air floating module, a vacuum tank support, two upper end sealing pipes, two second bellows, two lower end sealing pipes and two workbench supports;

[0011] The vacuum tank is horizontally arranged, one end of the vacuum tank is fixedly communicated with the pump group through the first bellows, the pump group is fixedly connected with the third foundation, the diaphragm vacuum gauge and the piezoresistive vacuum gauge are both installed on the vacuum tank and used for monitoring the gas pressure in the vacuum tank, the bottom of the vacuum tank is fixedly connected with the top end of the vacuum tank support, and the bottom end of the vacuum tank support is fixedly connected with the first foundation; the bottom of the vacuum tank is fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is fixedly communicated with one end of the corresponding second bellows, the other end of the two second bellows is fixedly communicated with one end of the corresponding lower end sealing pipe, the other end of the two lower end sealing pipes is fixedly connected with the air floating module, the air floating module is arranged above the air floating plane and has a gap therebetween; the workbench is horizontally arranged in the vacuum tank, the bottom of the workbench is fixedly connected with the top end of the two workbench supports, the bottom end of the two workbench supports is respectively inserted into the corresponding upper end sealing pipe, second bellows and lower end sealing pipe and fixedly connected with the air floating module, and the motion module is in sliding fit with the upper surface of the workbench.

[0012] A method for simulating a special gas environment and suppressing vibration in a closed space by using the device of scheme one, the method comprising the following steps:

[0013] Step one: gas environment simulation;

[0014] The pump group is started, the vacuum tank is pumped through the first bellows, when the gas pressure in the vacuum tank is lower than -3 Pa, the pump group is stopped, the vacuum tank is ventilated with special gas through the first bellows, and the gas pressure in the vacuum tank is monitored by the diaphragm vacuum gauge and the piezoresistive vacuum gauge; when the gas pressure in the vacuum tank meets the requirement, the ventilation of the vacuum tank is stopped;

[0015] Step two: external vibration suppression;

[0016] The main source of external vibration is the pump group, the vibration of the pump group is transmitted to the vacuum tank through the first bellows, the vibration of the vacuum tank is transmitted to the first foundation through the vacuum tank support and is absorbed by the first foundation; in addition, part of the vibration of the vacuum tank is transmitted to the two second bellows through the two upper end sealing pipes, and the two second bellows are in the form of welded bellows to absorb the vibration;

[0017] Step three: internal vibration suppression;

[0018] When the motion module moves at a uniform speed, accelerates or decelerates on the workbench, the motion module will produce an impact on the workbench, thereby causing endogenous vibration; when the motion module moves, the balance mass module moves in the opposite direction, thereby suppressing the endogenous vibration of the internal world.

[0019] Further, in step two, when the vibration of the pump group is still difficult to effectively eliminate, the first bellows is fixed through the wall, the pump group is isolated from the vacuum tank through the wall, and the external vibration of the pump group is further absorbed through the wall.

[0020] A method for simulating a special gas environment in a closed space and suppressing vibration using the device of scheme three, the method comprising the following steps:

[0021] Step one: gas environment simulation;

[0022] Start the pump group, and pump the vacuum tank through the first bellows; when the gas pressure in the vacuum tank is lower than -3 Pa, stop the pump group, and introduce special gas into the vacuum tank through the first bellows; and monitor the gas pressure in the vacuum tank through the diaphragm vacuum gauge and the piezoresistive vacuum gauge; when the gas pressure in the vacuum tank meets the requirements, stop the gas introduction;

[0023] Step two: external vibration suppression;

[0024] The main source of external vibration is the pump group, the vibration of the pump group is transmitted to the vacuum tank through the first bellows, and the vacuum tank transmits the vibration to the air floating module through the vacuum tank support, at this time the external vibration of the vacuum tank will be suppressed by the air floating module, thereby greatly weakening the external vibration of the device;

[0025] Step three: endogenous vibration suppression;

[0026] When the motion module moves at a uniform speed, accelerates or decelerates on the workbench, the motion module will produce an impact on the workbench, thereby causing endogenous vibration; when the motion module moves, the balance mass module moves in the opposite direction, thereby suppressing the endogenous vibration of the internal world.

[0027] A method for simulating a special gas environment in a closed space and suppressing vibration using the device of scheme four, the method comprising the following steps:

[0028] Step one: gas environment simulation;

[0029] Start the pump group, and pump the vacuum tank through the first bellows; when the gas pressure in the vacuum tank is lower than -3 Pa, stop the pump group, and introduce special gas into the vacuum tank through the first bellows; and monitor the gas pressure in the vacuum tank through the diaphragm vacuum gauge and the piezoresistive vacuum gauge; when the gas pressure in the vacuum tank meets the requirements, stop the gas introduction;

[0030] Step two: external vibration suppression;

[0031] The main source of external vibration is the pump group, the pump group vibration is transmitted to the vacuum tank through the first bellow, the vacuum tank transmits the vibration to the first foundation through the vacuum tank support and is absorbed by the first foundation; in addition, part of the vibration of the vacuum tank is transmitted to the two second bellows through the two upper end sealing pipes, the two second bellows adopt the form of welded bellows to absorb the vibration;

[0032] Step three: internal vibration suppression;

[0033] When the motion module moves at a uniform speed, accelerates or decelerates on the workbench, the motion module will produce an impact on the workbench and cause internal vibration; when the motion module moves, the impact vibration is transmitted to the air floating module through the workbench and the two workbench supports, and the air floating module will move in the opposite direction of the motion module, thereby eliminating the motion impact vibration of the motion module to the device.

[0034] Compared with the prior art, the beneficial effects of the simulation suppression device are: the simulation suppression device is a ground simulation device, and the simulation suppression device and method can realize simulation of a special gas environment in a closed space, and can simultaneously consider external and internal vibration suppression.

[0035] The simulation suppression device of the application is not limited to the simulation of the gas environment of extraterrestrial bodies and extreme vacuum environment, but also can suppress internal and external vibration in the simulated environment, thereby ensuring the relative stability of the simulated environment. BRIEF DESCRIPTION OF DRAWINGS

[0036] Figure 1 is a structure schematic view of a special gas environment simulation and vibration suppression device in a closed space according to a first scheme of the application;

[0037] Figure 2 is a structure schematic view of a special gas environment simulation and vibration suppression device in a closed space according to a second scheme of the application;

[0038] Figure 3 is a structure schematic view of a special gas environment simulation and vibration suppression device in a closed space according to a third scheme of the application;

[0039] Figure 4 is a structure schematic view of a special gas environment simulation and vibration suppression device in a closed space according to a fourth scheme of the application.

[0040] The component names and figure marks involved in the above drawings are as follows:

[0041] Vacuum tank 1, motion module 2, workbench 3, left workbench support 4, right workbench support 5, left vacuum tank support 6, right vacuum tank support 7, upper left sealing tube 8, left second corrugated tube 9, lower left sealing tube 10, upper right sealing tube 11, right second corrugated tube 12, lower right sealing tube 13, second foundation 14, balance mass module 15, first corrugated tube 16, pump group 17, first foundation 18, diaphragm vacuum gauge 19, piezoresistive vacuum gauge 20, air flotation plane 21, air flotation module 22, wall 23. Detailed Implementation

[0042] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0043] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. In the description of this invention, the terms "left," "right," "top," "bottom," etc., indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention, not to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention.

[0044] Specific implementation method one: as follows Figure 1 As shown, this embodiment describes a device for simulating a special gas environment in a confined space and for vibration suppression, including a vacuum tank 1, a motion module 2, a worktable 3, a balance mass module 15, a first bellows 16, a pump group 17, a thin-film vacuum gauge 19, a piezoresistive vacuum gauge 20, a vacuum tank support, two upper sealing tubes, two second bellows, two lower sealing tubes, and two worktable supports.

[0045] The vacuum tank 1 is horizontally arranged, one end of the vacuum tank 1 is fixedly communicated with the pump set 17 through the first corrugated pipe 16, the pump set 17 is fixedly connected with the third ground base, the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both installed on the vacuum tank 1 and used for monitoring the gas pressure in the vacuum tank 1 (the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both fixedly installed on the flange plate at the other end of the vacuum tank 1), the bottom of the vacuum tank 1 is fixedly connected with the top end of the vacuum tank support (by welding), and the bottom end of the vacuum tank support is fixedly connected with the first ground base 18 (the vacuum tank support comprises a left vacuum tank support 6 and a right vacuum tank support 7, the top ends of the left vacuum tank support 6 and the right vacuum tank support 7 are fixedly connected with the left and right ends of the bottom of the vacuum tank 1 by welding respectively, and the bottom ends of the left vacuum tank support 6 and the right vacuum tank support 7 are fixedly connected with the first ground base 18);

[0046] The left and right ends of the bottom of the vacuum tank 1 are fixedly communicated with two upper end sealing pipes, one ends of the two upper end sealing pipes are fixedly communicated with corresponding second corrugated pipes respectively, the other ends of the two second corrugated pipes are fixedly communicated with corresponding lower end sealing pipes respectively, and the other ends of the two lower end sealing pipes are fixedly connected with the second ground base 14 (the two upper end sealing pipes are a left upper end sealing pipe 8 and a right upper end sealing pipe 11 respectively, the two lower end sealing pipes are a left lower end sealing pipe 10 and a right lower end sealing pipe 13 respectively, and the two second corrugated pipes are a left second corrugated pipe 9 and a right second corrugated pipe 12 respectively; the left and right ends of the bottom of the vacuum tank 1 are welded and communicated with one ends of the left upper end sealing pipe 8 and the right upper end sealing pipe 11 respectively, the other ends of the left upper end sealing pipe 8 and the right upper end sealing pipe 11 are fixedly communicated with one ends of the left second corrugated pipe 9 and the right second corrugated pipe 12 respectively, the other ends of the left second corrugated pipe 9 and the right second corrugated pipe 12 are fixedly communicated with one ends of the left lower end sealing pipe 10 and the right lower end sealing pipe 13 respectively, and the other ends of the left lower end sealing pipe 10 and the right lower end sealing pipe 13 are fixedly connected with the second ground base 14);

[0047] The workbench 3 is horizontally arranged in the vacuum tank 1, the bottom of the workbench 3 is fixedly connected with the top ends of two workbench supports, the bottom ends of the two workbench supports are respectively inserted into corresponding upper end sealing pipes, second corrugated pipes and lower end sealing pipes and fixedly connected with the second ground base 14 (the two workbench supports are a left workbench support 4 and a right workbench support 5 respectively, the left and right ends of the bottom of the workbench 3 are fixedly connected with the top ends of the left workbench support 4 and the right workbench support 5 respectively, the bottom end of the left workbench support 4 is respectively inserted into the left upper end sealing pipe 8, the left second corrugated pipe 9 and the left lower end sealing pipe 10 and fixedly connected with the second ground base 14, and the bottom end of the right workbench support 5 is respectively inserted into the right upper end sealing pipe 11, the right second corrugated pipe 12 and the right lower end sealing pipe 13 and fixedly connected with the second ground base 14), and the motion module 2 and the balance mass module 15 are both in sliding fit with the upper surface of the workbench 3.

[0048] The main source of exogenous vibration is pump unit 17. The vibration of pump unit 17 is transmitted to vacuum tank 1 through the first bellows 16. Vacuum tank 1 transmits the vibration to the first foundation 18 through the left vacuum tank support 6 and the right vacuum tank support 7, where it is absorbed. In addition, part of the vibration of vacuum tank 1 is transmitted to the left second bellows 9 and the right second bellows 12 through the left upper sealing pipe 8 and the right upper sealing pipe 11. The left second bellows 9 and the right second bellows 12 are usually made of welded bellows to absorb the vibration.

[0049] In the case of endogenous vibration, when the motion module 2 moves at a constant speed, accelerates, or decelerates on the worktable 3, the motion module 2 will exert an impact on the worktable 3, thereby causing endogenous vibration. When the motion module 2 moves, the balancing mass module 15 moves in the opposite direction to the motion module 2, thereby suppressing the endogenous vibration of the internal world.

[0050] Specific implementation method two: such as Figure 2 As shown, this embodiment is a further explanation of the first specific embodiment. The first corrugated pipe 16 is fixedly passed through the wall 23, and the wall 23 is located in the middle of the first corrugated pipe 16.

[0051] In the case of exogenous vibration, when the vibration of pump unit 17 is still difficult to eliminate effectively, the first bellows 16 can be fixed through the wall 23 to isolate pump unit 17 from vacuum tank 1 through the wall 23, and the exogenous vibration of pump unit 17 can be further absorbed through the wall 23.

[0052] Specific implementation method three: such as Figure 3 As shown, this embodiment describes a device for simulating a special gas environment in a confined space and suppressing vibration, including a vacuum tank 1, a motion module 2, a worktable 3, a balance mass module 15, a first bellows 16, a pump group 17, a thin-film vacuum gauge 19, a piezoresistive vacuum gauge 20, a vacuum tank support, an air flotation plane 21, an air flotation module 22, two upper sealing pipes, two second bellows, two lower sealing pipes, and two worktable supports.

[0053] The vacuum tank 1 is horizontally arranged, one end of the vacuum tank 1 is fixedly communicated with the pump set 17 through the first corrugated pipe 16, the pump set 17 is fixedly connected with the third ground base, the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both installed on the vacuum tank 1 and used for monitoring the gas pressure in the vacuum tank 1 (the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both fixedly installed on the flange plate at the other end of the vacuum tank 1), the bottom of the vacuum tank 1 is fixedly connected with the top end of the vacuum tank support (by welding), the bottom end of the vacuum tank support is fixedly connected with the air floating module 22, the air floating module 22 is arranged above the air floating plane 21 and has a gap (the gap is about 25 microns) therebetween. The vacuum tank support comprises a left vacuum tank support 6 and a right vacuum tank support 7, the top ends of the left vacuum tank support 6 and the right vacuum tank support 7 are fixedly connected with the left and right ends of the bottom of the vacuum tank 1 by welding respectively, and the bottom ends of the left vacuum tank support 6 and the right vacuum tank support 7 are fixedly connected with the air floating module 22 respectively.

[0054] The left and right ends of the bottom of the vacuum tank 1 are fixedly communicated with one ends of two upper end sealing pipes, the other ends of the two upper end sealing pipes are fixedly communicated with one ends of corresponding second corrugated pipes respectively, the other ends of the two second corrugated pipes are fixedly communicated with one ends of corresponding lower end sealing pipes respectively, and the other ends of the two lower end sealing pipes are fixedly connected with the second ground base 14 (the two upper end sealing pipes are a left upper end sealing pipe 8 and a right upper end sealing pipe 11 respectively, the two lower end sealing pipes are a left lower end sealing pipe 10 and a right lower end sealing pipe 13 respectively, and the two second corrugated pipes are a left second corrugated pipe 9 and a right second corrugated pipe 12 respectively; the left and right ends of the bottom of the vacuum tank 1 are welded and communicated with one ends of the left upper end sealing pipe 8 and the right upper end sealing pipe 11 respectively, the other ends of the left upper end sealing pipe 8 and the right upper end sealing pipe 11 are fixedly communicated with one ends of the left second corrugated pipe 9 and the right second corrugated pipe 12 respectively, the other ends of the left second corrugated pipe 9 and the right second corrugated pipe 12 are fixedly communicated with one ends of the left lower end sealing pipe 10 and the right lower end sealing pipe 13 respectively, and the other ends of the left lower end sealing pipe 10 and the right lower end sealing pipe 13 are fixedly connected with the second ground base 14).

[0055] The workbench 3 is horizontally arranged in the vacuum tank 1, the bottom of the workbench 3 is fixedly connected with top ends of two workbench supports, the bottom ends of the two workbench supports are respectively inserted into corresponding upper end sealing pipes, second corrugated pipes and lower end sealing pipes and fixedly connected with the second ground base 14 (the two workbench supports are a left workbench support 4 and a right workbench support 5 respectively, the left and right ends of the bottom of the workbench 3 are fixedly connected with top ends of the left workbench support 4 and the right workbench support 5 respectively, the bottom end of the left workbench support 4 is respectively inserted into the left upper end sealing pipe 8, the left second corrugated pipe 9 and the left lower end sealing pipe 10 and fixedly connected with the second ground base 14, and the bottom end of the right workbench support 5 is respectively inserted into the right upper end sealing pipe 11, the right second corrugated pipe 12 and the right lower end sealing pipe 13 and fixedly connected with the second ground base 14), and the motion module 2 and the balance mass module 15 are both in sliding fit with the upper surface of the workbench 3.

[0056] When the vibration of the pump group 17 is still difficult to effectively eliminate in the external vibration, the first foundation 18 can be replaced by the air floating module 22, and the air floating plane 21 is added, at this time the external vibration of the vacuum tank 1 will be inhibited by the air floating module 22 with high stiffness, thereby greatly weakening the external vibration of the device.

[0057] Specific implementation four: as Figure 4 shown, the present embodiment describes a special gas environment simulation and vibration suppression device for closed space, which includes a vacuum tank 1, a movement module 2, a workbench 3, a first bellows 16, a pump group 17, a thin film vacuum gauge 19, a piezoresistive vacuum gauge 20, an air floating plane 21, an air floating module 22, a vacuum tank support, two upper end sealing pipes, two second bellows, two lower end sealing pipes and two workbench supports;

[0058] The vacuum tank 1 is horizontally arranged, one end of the vacuum tank 1 is fixedly communicated with the pump group 17 through the first bellows 16, the pump group 17 is fixedly connected with the third foundation, the thin film vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both installed on the vacuum tank 1, and are used for monitoring the gas pressure in the vacuum tank 1 (the thin film vacuum gauge 19 and the piezoresistive vacuum gauge 20 are both fixedly installed on the flange plate at the other end of the vacuum tank 1), the bottom of the vacuum tank 1 is fixedly connected with the top end of the vacuum tank support (by welding), and the bottom end of the vacuum tank support is fixedly connected with the first foundation 18 (the vacuum tank support includes a left vacuum tank support 6 and a right vacuum tank support 7, the top ends of the left vacuum tank support 6 and the right vacuum tank support 7 are fixedly connected with the left and right ends of the bottom of the vacuum tank 1 by welding respectively, and the bottom ends of the left vacuum tank support 6 and the right vacuum tank support 7 are both fixedly connected with the first foundation 18);

[0059] The bottom of the vacuum tank 1 is fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is respectively fixedly communicated with one end of the corresponding second bellows, the other end of the two second bellows is respectively fixedly communicated with one end of the corresponding lower end sealing pipe, the other end of the two lower end sealing pipes is both fixedly connected with the air floating module 22, the air floating module 22 is arranged above the air floating plane 21, and there is a gap between the air floating module 22 and the air floating plane 21 (the two upper end sealing pipes are a left upper end sealing pipe 8 and a right upper end sealing pipe 11 respectively, the two lower end sealing pipes are a left lower end sealing pipe 10 and a right lower end sealing pipe 13 respectively, and the two second bellows are a left second bellows 9 and a right second bellows 12 respectively; the bottom of the vacuum tank 1 is welded and communicated with one end of the left upper end sealing pipe 8 and the right upper end sealing pipe 11, the other end of the left upper end sealing pipe 8 and the right upper end sealing pipe 11 is respectively fixedly communicated with one end of the left second bellows 9 and the right second bellows 12, the other end of the left second bellows 9 and the right second bellows 12 is respectively fixedly communicated with one end of the left lower end sealing pipe 10 and the right lower end sealing pipe 13, and the other end of the left lower end sealing pipe 10 and the right lower end sealing pipe 13 is both fixedly connected with the air floating module 22);

[0060] The workbench 3 is horizontally set inside the vacuum tank 1. The bottom of the workbench 3 is fixedly connected to the top of the two workbench supports. The bottom ends of the two workbench supports are respectively inserted into the corresponding upper sealing tube, second corrugated tube and lower sealing tube and fixedly connected to the air flotation module 22 (the two workbench supports are the left workbench support 4 and the right workbench support 5, the left and right ends of the bottom of the workbench 3 are respectively fixedly connected to the top of the left workbench support 4 and the right workbench support 5, the bottom end of the left workbench support 4 is respectively inserted into the upper left sealing tube 8, the left second corrugated tube 9 and the lower left sealing tube 10 and fixedly connected to the air flotation module 22, the bottom end of the right workbench support 5 is respectively inserted into the upper right sealing tube 11, the right second corrugated tube 12 and the lower right sealing tube 13 and fixedly connected to the air flotation module 22). The motion module 2 slides with the upper surface of the workbench 3.

[0061] In this embodiment, the second foundation 14 in Specific Embodiment 1 is replaced with the air flotation module 22, the balance mass module 15 is replaced with the air flotation plane 21, and the air flotation module 22 is placed above the air flotation plane 21.

[0062] During endogenous vibration, when the motion module 2 moves, the impact vibration is transmitted to the air flotation module 22 through the worktable 3, the left worktable support 4, and the right worktable support 5. The air flotation module 22 will undergo an equivalent reverse motion to the motion module 2, thereby eliminating the motion impact vibration of the motion module 2 to the device. The movement of the air flotation module 22 in this endogenous vibration suppression process is limited by the columnar space formed by the upper left sealing tube 8, the second left bellows tube 9, and the lower left sealing tube 10.

[0063] Specific implementation method five: such as Figure 1 As shown, this embodiment discloses a method for simulating a special gas environment in a confined space and suppressing vibration using the device described in Specific Embodiment 1. The method includes the following steps:

[0064] Step 1: Gas Environment Simulation;

[0065] Start the pump group 17, and pump the vacuum tank 1 through the first bellow 16 (for the gas pressure above 500 Pa in the vacuum tank, use the piezoresistive vacuum gauge 20 to monitor the vacuum degree; for the gas pressure below 500 Pa, use the diaphragm vacuum gauge 19 to monitor the vacuum degree), when the gas pressure in the vacuum tank 1 is lower than -3 Pa, stop the pump group 17, and introduce the special gas into the vacuum tank 1 through the first bellow 16, and monitor the gas pressure in the vacuum tank 1 through the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20; when the gas pressure in the vacuum tank 1 meets the requirement, stop the gas introduction into the vacuum tank 1 (if the gas pressure in the vacuum tank 1 is still lower than the required gas pressure, continue to pressurize the gas into the vacuum tank 1 through the first bellow 16; if the gas pressure in the vacuum tank 1 is higher than the required gas pressure, start the pump group 17 to pump the vacuum tank 1, and repeat the process until the gas pressure in the vacuum tank 1 is consistent with the required gas pressure; at this time, the gas composition and gas pressure in the vacuum tank 1 are stable, and consistent with the special gas environment requirement);

[0066] Step two: external vibration suppression;

[0067] The main source of external vibration is the pump group 17, and the vibration of the pump group 17 is transmitted to the vacuum tank 1 through the first bellow 16, and the vibration of the vacuum tank 1 is transmitted to the first foundation 18 through the vacuum tank support and absorbed by the first foundation 18; in addition, part of the vibration of the vacuum tank 1 is transmitted to the two second bellows through the two upper end sealed pipes, and the two second bellows are in the form of welded bellows to absorb the vibration;

[0068] Step three: internal vibration suppression;

[0069] When the motion module 2 moves at a constant speed, accelerates or decelerates on the workbench 3, the motion module 2 will have an impact on the workbench 3, causing internal vibration; when the motion module 2 moves, the balance mass module 15 moves in the opposite direction of the motion module 2, thereby suppressing the internal vibration of the internal world.

[0070] Specific implementation method six: as shown in Figure 2 the embodiment discloses a method for simulating a special gas environment in a sealed space and suppressing vibration using the device described in specific implementation method two, in step two, when the vibration of the pump group 17 is still difficult to effectively eliminate, the first bellow 16 is fixed to pass through the wall 23, the pump group 17 is isolated from the vacuum tank 1 through the wall 23, and the external vibration of the pump group 17 is further absorbed through the wall 23.

[0071] Specific implementation method seven: as shown in Figure 3 the embodiment discloses a method for simulating a special gas environment in a sealed space and suppressing vibration using the device described in specific implementation method three, the method comprising the following steps:

[0072] Step one: gas environment simulation;

[0073] Start the pump group 17, and pump the vacuum tank 1 through the first bellow 16 (for the gas pressure above 500 Pa inside the vacuum tank, use the piezoresistive vacuum gauge 20 to monitor the vacuum degree; for the gas pressure below 500 Pa, use the diaphragm vacuum gauge 19 to monitor the vacuum degree). When the gas pressure inside the vacuum tank 1 is lower than -3 Pa, stop the pump group 17, and pump the vacuum tank 1 through the first bellow 16. Monitor the gas pressure inside the vacuum tank 1 through the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20. When the gas pressure inside the vacuum tank 1 meets the requirement, stop pumping the gas into the vacuum tank 1 (if the gas pressure inside the vacuum tank 1 is still lower than the required gas pressure, continue to pump the gas into the vacuum tank 1 through the first bellow 16; if the gas pressure inside the vacuum tank 1 is higher than the required gas pressure, start the pump group 17 to pump the gas out of the vacuum tank 1, and repeat the process until the gas pressure inside the vacuum tank 1 is consistent with the required gas pressure. At this time, the gas composition and pressure inside the vacuum tank 1 are stable and consistent with the special gas environment requirement);

[0074] Step two: external vibration suppression;

[0075] The main source of external vibration is the pump group 17. The vibration of the pump group 17 is transmitted to the vacuum tank 1 through the first bellow 16, and the vacuum tank 1 transmits the vibration to the air floating module 22 through the vacuum tank support. At this time, the external vibration of the vacuum tank 1 will be suppressed by the air floating module 22 (which has high rigidity), thereby greatly weakening the external vibration of the device (this scheme is used when the vibration of the pump group 17 is still difficult to effectively eliminate);

[0076] Step three: internal vibration suppression;

[0077] When the motion module 2 moves at a constant speed, accelerates or decelerates on the workbench 3, the motion module 2 will produce an impact on the workbench 3, causing internal vibration. When the motion module 2 moves, the balance mass module 15 moves in the opposite direction of the motion module 2, thereby suppressing the internal vibration of the internal world.

[0078] Specific embodiment eight: as shown in Figure 4 The present embodiment discloses a method for simulating a special gas environment in a sealed space and suppressing vibration using the device described in specific embodiment four, which comprises the following steps:

[0079] Step one: gas environment simulation;

[0080] Start the pump group 17, and pump the vacuum tank 1 through the first bellow 16 (for the gas pressure above 500 Pa in the vacuum tank, use the piezoresistive vacuum gauge 20 to monitor the vacuum degree; for the gas pressure below 500 Pa, use the diaphragm vacuum gauge 19 to monitor the vacuum degree), when the gas pressure in the vacuum tank 1 is lower than -3 Pa, stop the pump group 17, and input the special gas into the vacuum tank 1 through the first bellow 16, and monitor the gas pressure in the vacuum tank 1 through the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20; when the gas pressure in the vacuum tank 1 meets the requirement, stop the gas input into the vacuum tank 1 (if the gas pressure in the vacuum tank 1 is still lower than the required gas pressure, continue to pressurize the gas input into the vacuum tank 1 through the first bellow 16; if the gas pressure in the vacuum tank 1 is higher than the required gas pressure, start the pump group 17 to pump the vacuum tank 1, and repeat the process until the gas pressure in the vacuum tank 1 is consistent with the required gas pressure; at this time, the gas composition and gas pressure in the vacuum tank 1 are stable, and consistent with the special gas environment requirement);

[0081] Step two: external vibration suppression;

[0082] The main source of external vibration is the pump group 17, the vibration of the pump group 17 is transmitted to the vacuum tank 1 through the first bellow 16, and the vacuum tank 1 transmits the vibration to the first foundation 18 through the vacuum tank support and is absorbed by the first foundation 18; in addition, part of the vibration of the vacuum tank 1 is transmitted to the two second bellows through the two upper end sealing pipes, and the two second bellows adopt the form of welded bellows to absorb the vibration;

[0083] Step three: internal vibration suppression;

[0084] When the motion module 2 moves at a uniform speed, accelerates or decelerates on the workbench 3, the motion module 2 will produce an impact effect on the workbench 3, thereby causing internal vibration; when the motion module 2 moves, the impact vibration is transmitted to the air floating module 22 through the workbench 3 and the two workbench supports, and the air floating module 22 will move in the opposite direction equivalent to the motion module 2, thereby eliminating the motion impact vibration of the motion module 2 to the device (the motion of the air floating module 22 in this internal vibration suppression process is limited by the columnar space size formed by the left upper end sealing pipe 8, the left second bellow 9 and the left lower end sealing pipe 10).

[0085] Embodiment:

[0086] Taking the vibration flight ground experiment environment of the flapping wing aircraft in the simulated Mars atmosphere environment as an example, the Mars atmosphere environment of the sealed space special gas environment simulation and vibration suppression device of the application is a CO2 gas environment, the atmospheric pressure is 640 Pa, and the atmospheric density is 0.0167 kg / m 3 , and the device (scheme four) shown in Figure 4 is used to carry out the simulation process, and the process is as follows:

[0087] Start the pump group 17, and pump the vacuum tank 1 through the first bellow 16. Monitor the pressure of the gas in the vacuum tank 1 by the diaphragm vacuum gauge 19. When the pressure of the gas in the vacuum tank 1 is lower than -3 Pa, stop the pump group 17. Pump the vacuum tank 1 through the first bellow 16, and monitor the pressure of the gas in the vacuum tank 1 by the diaphragm vacuum gauge 19 and the piezoresistive vacuum gauge 20. When the pressure of the gas in the vacuum tank 1 reaches 640 Pa, stop the pump. The vacuum tank 1 is static for 1 min. When the pressure of the gas in the vacuum tank 1 is still lower than 640 Pa, continue to pump the vacuum tank 1 through the first bellow 16. When the pressure of the gas in the vacuum tank 1 is higher than 640 Pa, start the pump group 17 to pump the vacuum tank 1. Repeat the process until the pressure of the gas in the vacuum tank 1 is consistent with the required pressure. At this time, the gas in the vacuum tank 1 is CO2, and the pressure of the gas is 640 Pa. The density of the CO2 in the vacuum tank 1 is 0.0167 kg / m3. 3 The vacuum tank 1 is in a stable state. If the pressure of the gas in the vacuum tank 1 changes more than 5%, repeat the process of pumping or filling the CO2 in the vacuum tank 1.

[0088] During the process of stabilizing the pressure, the main source of the external vibration is the pump group 17. The vibration of the pump group 17 is transmitted to the vacuum tank 1 through the first bellow 16. The vibration of the vacuum tank 1 is transmitted to the first foundation 18 through the left vacuum tank support 6 and the right vacuum tank support 7, and is absorbed by the first foundation 18. In addition, part of the vibration of the vacuum tank 1 is transmitted to the left second bellow 9 and the right second bellow 12 through the left upper end sealing pipe 8 and the right upper end sealing pipe 11. The left second bellow 9 and the right second bellow 12 usually adopt welded bellows to absorb the vibration.

[0089] Then start the flapping-wing aircraft on the workbench 3 in the vacuum tank 1. At this time, the flapping-wing aircraft is equivalent to the motion module 2 in the application. Since the motion module 2 repeatedly moves at a constant speed, accelerates or decelerates on the workbench 3, the impact vibration is transmitted to the air floating module 22 through the workbench 3, the left workbench support 4 and the right workbench support 5. The air floating module 22 will move in the opposite direction equivalent to the motion module 2, so as to eliminate the motion impact vibration of the device caused by the motion module 2.

[0090] In the application, the external world of the scheme one, the scheme two and the scheme three comprises the pump group 17, the first bellows 16, the vacuum tank 1, the left upper end sealing pipe 8, the left second bellows 9, the left lower end sealing pipe 10, the second foundation 14, the right lower end sealing pipe 13, the right second bellows 12 and the right upper end sealing pipe 11 which are sequentially connected, and the external world of the workbench 3 is formed by the above components and is space-tightly sealed. The left second bellows 9 and the right second bellows 12 in the external world do not provide support, and the external world is fixedly connected with the first foundation 18 (the scheme one and the scheme two) or the air floating module 22 (the scheme three) through the left vacuum tank support 6 and the right vacuum tank support 7 to realize the support of the external world.

[0091] In the application, the internal world of the scheme one, the scheme two and the scheme three comprises the motion module 2, the workbench 3, the left workbench support 4, the right workbench support 5 and the second foundation 14, the motion module 2 is slidingly arranged on the workbench 3, the workbench 3 is connected with the left workbench support 4 and the right workbench support 5, and the left workbench support 4 and the right workbench support 5 are connected with the second foundation 14, thereby forming the internal world of the scheme one to the scheme three of the device. The common part of the internal world and the external world is the second foundation 14.

[0092] In the application, the external world of the scheme four comprises the pump group 17, the first bellows 16, the vacuum tank 1, the left upper end sealing pipe 8, the left second bellows 9, the left lower end sealing pipe 10, the air floating module 22, the right lower end sealing pipe 13, the right second bellows 12 and the right upper end sealing pipe 11 which are sequentially connected, and the external world of the workbench 3 is formed by the above components and is space-tightly sealed. The left second bellows 9 and the right second bellows 12 in the external world do not provide support, and the external world is fixedly connected with the first foundation 18 through the left vacuum tank support 6 and the right vacuum tank support 7 to realize the support of the external world.

[0093] In the application, the internal world of the scheme four comprises the motion module 2, the workbench 3, the left workbench support 4, the right workbench support 5 and the air floating module 22, the motion module 2 is slidingly arranged on the workbench 3, the workbench 3 is connected with the left workbench support 4 and the right workbench support 5, and the left workbench support 4 and the right workbench support 5 are connected with the air floating module 22, thereby forming the internal world of the scheme four of the device. The common part of the internal world and the external world is the air floating module 22.

[0094] In the application, the gas pressure in the vacuum tank 1 ranges from 10E-3 Pa to 30000 Pa, and the special gas is one of vacuum, air, carbon dioxide, nitrogen, helium and argon.

[0095] It is apparent to a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other embodiments without departing from the spirit or essential characteristics of the application. Therefore, the embodiments should be considered in all respects as illustrative and not restrictive, the scope of the application being defined by the appended claims rather than by the above description, and all changes coming within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. No reference signs in the claims should be considered as limiting the scope of the claims to the features to which the reference signs are attached.

[0096] Furthermore, it should be understood that although the description is made on embodiments, not every embodiment contains only one independent technical solution, and the description is made in this way only for the sake of clarity, and a person skilled in the art should consider the description as a whole, and the technical solutions in each embodiment can also be combined appropriately to form other embodiments that can be understood by a person skilled in the art.

Claims

1. A device for simulating special gas environments and suppressing vibrations in confined spaces, characterized in that: The vacuum tank (1), the motion module (2), the workbench (3), the balance mass module (15), the first bellow (16), the pump group (17), the diaphragm vacuum gauge (19), the piezoresistive vacuum gauge (20), the vacuum tank support, two upper end sealing pipes, two second bellows, two lower end sealing pipes and two workbench supports are provided. The vacuum tank (1) is horizontally arranged, one end of the vacuum tank (1) is fixedly communicated with the pump group (17) through the first bellow (16), the pump group (17) is fixedly connected with the third ground, the diaphragm vacuum gauge (19) and the piezoresistive vacuum gauge (20) are both installed on the vacuum tank (1) and used for monitoring the gas pressure in the vacuum tank (1), the bottom of the vacuum tank (1) is fixedly connected with the top end of the vacuum tank support, the bottom end of the vacuum tank support is fixedly connected with the first ground (18); the left and right ends of the bottom of the vacuum tank (1) are fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is fixedly communicated with one end of the corresponding second bellow, the other end of the two second bellows is fixedly communicated with one end of the corresponding lower end sealing pipe, and the other end of the two lower end sealing pipes is fixedly connected with the second ground (14); the workbench (3) is horizontally arranged in the vacuum tank (1), the bottom of the workbench (3) is fixedly connected with the top end of the two workbench supports, the bottom end of the two workbench supports is respectively inserted into the corresponding upper end sealing pipe, second bellow and lower end sealing pipe and fixedly connected with the second ground (14), and the motion module (2) and the balance mass module (15) are both in sliding fit with the upper surface of the workbench (3).

2. The special gas environment simulation and vibration suppression device for a closed space according to claim 1, characterized in that: The first bellow (16) is fixedly inserted through the wall (23).

3. A method for simulating a special gas environment and suppressing vibration in a closed space using the apparatus of claim 1 or 2, characterized in that: The method comprises the following steps: Step one: gas environment simulation; The pump group (17) is started, the vacuum tank (1) is pumped through the first bellow (16), when the gas pressure in the vacuum tank (1) is lower than -3Pa, the pump group (17) is closed, the vacuum tank (1) is ventilated through the first bellow (16), and the gas pressure in the vacuum tank (1) is monitored through the diaphragm vacuum gauge (19) and the piezoresistive vacuum gauge (20); when the gas pressure in the vacuum tank (1) meets the requirement, the ventilation of the vacuum tank (1) is stopped; Step two: external vibration suppression; The main source of external vibration is the pump group (17), the vibration of the pump group (17) is transmitted to the vacuum tank (1) through the first bellow (16), the vibration of the vacuum tank (1) is transmitted to the first ground (18) through the vacuum tank support and absorbed by the first ground (18); in addition, part of the vibration of the vacuum tank (1) is transmitted to the two second bellows through the two upper end sealing pipes, and the two second bellows are in the form of welded bellows to absorb the vibration; Step three: internal vibration suppression; When the motion module (2) moves at a constant speed, accelerates or decelerates on the workbench (3), the motion module (2) will produce an impact on the workbench (3) and cause internal vibration; when the motion module (2) moves, the balance mass module (15) moves in the opposite direction of the motion module (2) equivalently, so as to suppress the internal vibration of the internal world.

4. The method of claim 3, wherein: In step two, when the vibration of the pump group (17) is still difficult to effectively eliminate, the first bellow (16) is fixed through the wall (23), the pump group (17) is isolated from the vacuum tank (1) through the wall (23), and the external vibration of the pump group (17) is further absorbed through the wall (23).

5. A special gas environment simulation and vibration suppression device for a closed space, characterized in that: The device comprises a vacuum tank (1), a motion module (2), a workbench (3), a balance mass module (15), a first bellow (16), a pump group (17), a diaphragm vacuum gauge (19), a piezoresistive vacuum gauge (20), a vacuum tank support, an air floating plane (21), an air floating module (22), two upper end sealing pipes, two second bellows, two lower end sealing pipes and two workbench supports; The vacuum tank (1) is horizontally arranged, one end of the vacuum tank (1) is fixedly communicated with the pump group (17) through the first bellow (16), the pump group (17) is fixedly connected with the third ground, the diaphragm vacuum gauge (19) and the piezoresistive vacuum gauge (20) are both installed on the vacuum tank (1) and used for monitoring the gas pressure in the vacuum tank (1), the bottom of the vacuum tank (1) is fixedly connected with the top end of the vacuum tank support, the bottom end of the vacuum tank support is fixedly connected with the air floating module (22), the air floating module (22) is arranged above the air floating plane (21) and has a gap therebetween, the left and right ends of the bottom of the vacuum tank (1) are fixedly communicated with one end of the two upper end sealing pipes, the other end of the two upper end sealing pipes is respectively fixedly communicated with one end of the corresponding second bellow, the other end of the two second bellows is respectively fixedly communicated with one end of the corresponding lower end sealing pipe, and the other end of the two lower end sealing pipes is fixedly connected with the second ground (14); the workbench (3) is horizontally arranged in the vacuum tank (1), the bottom of the workbench (3) is fixedly connected with the top end of the two workbench supports, the bottom end of the two workbench supports is respectively inserted into the corresponding upper end sealing pipe, second bellow and lower end sealing pipe and fixedly connected with the second ground (14), and the motion module (2) and the balance mass module (15) are both in sliding fit with the upper surface of the workbench (3).

6. A method for simulating a special gas environment and suppressing vibration in a closed space using the apparatus of claim 5, characterized in that: The method comprises the following steps: Step one: gas environment simulation; The pump group (17) is started, the vacuum tank (1) is pumped through the first bellow (16), when the gas pressure in the vacuum tank (1) is lower than -3Pa, the pump group (17) is closed, the vacuum tank (1) is ventilated through the first bellow (16), and the gas pressure in the vacuum tank (1) is monitored through the diaphragm vacuum gauge (19) and the piezoresistive vacuum gauge (20); when the gas pressure in the vacuum tank (1) meets the demand, the ventilation of the vacuum tank (1) is stopped; Step two: external vibration suppression; The main source of external vibration is the pump group (17), the vibration of the pump group (17) is transmitted to the vacuum tank (1) through the first bellow (16), the vacuum tank (1) transmits the vibration to the air floating module (22) through the vacuum tank support, at this time, the external vibration of the vacuum tank (1) is suppressed by the air floating module (22), thereby greatly weakening the external vibration of the device; Step three: internal vibration suppression; When the motion module (2) moves at a constant speed, accelerates or decelerates on the workbench (3), the motion module (2) will produce an impact on the workbench (3) and cause endogenous vibration; when the motion module (2) moves, the balance mass module (15) moves in the opposite direction of the motion module (2) equivalently, thereby suppressing the endogenous vibration of the internal world.

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