A mechanism for positioning a magnet assembly and a probe assembly

Abstract

The application provides a mechanism for positioning an excitation assembly and a probe card assembly, comprising an excitation assembly for generating a magnetic field, a probe card assembly for measuring an electric variable, a limiting device, and a positioning structure for relatively fixing the positions of the excitation assembly and the probe card assembly, wherein the position and direction of a preset region with a magnetic field environment and the probe card assembly are also relatively fixed, and the relative position of the probe end and the preset region is positioned, and the position of the detected region of the measured object in the magnetic field is substantially positioned, the movement and positioning of the detected region of the measured object in the magnetic field are realized, and the magnetic field of the preset region does not need to be calibrated during multiple detections, and the use of the detection equipment is facilitated.

Description

Technical Field

[0001] This invention belongs to the field of physical and semiconductor testing technology, and relates to the excitation component of a probe station and the positioning of the probe, specifically to a mechanism for positioning the excitation component and the probe card component. Background Technology

[0002] Probe station testing equipment is a widely used non-destructive testing method applicable to physics and semiconductor fields. Building upon this, magnetic field probe station testing systems further provide a magnetic field environment, enabling the equipment to further investigate the performance and characteristics of the tested materials or devices under magnetic fields.

[0003] When using a magnetic field probe station to test an object, the object needs to be placed in a preset magnetic field environment. This is typically done by calibrating the magnetic field environment generated by the excitation assembly and placing the object in the corresponding position to infer the actual magnetic field environment. However, because the uniform area of ​​the magnetic field generated by the excitation assembly is generally small, even a slight difference between the object's position and the preset position can lead to a significant discrepancy between the actual magnetic field environment and the inferred environment based on the calibration results. This results in inconsistencies between the test results and the actual environment, causing test failure.

[0004] Therefore, there is a need to provide a mechanism that allows the object being tested to be placed in a preset magnetic field environment.

[0005] The information disclosed in the background section is only intended to enhance the understanding of the background of the present invention, and therefore may contain information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0006] To provide a mechanism that enables a test object to be placed in a preset magnetic field environment, the present invention provides a mechanism for positioning an excitation component and a probe component, comprising an excitation component for generating a magnetic field, a probe component for measuring electrical variables, and a limiting device. The excitation component includes an excitation coil, a magnetic circuit extending outward from the excitation coil, and a first positioning plate. The excitation coil is mounted on the first positioning plate. The magnetic circuit is configured to extend at least partially within a preset area. The first positioning plate is configured to switch between positions that are in contact with or separate from the probe component. The probe component includes a second positioning plate and a probe card. The probe card is mounted on the second positioning plate, and the probe of the probe card extends outward from the second positioning plate. At least two sets of positioning structures are provided on the side of the first and second positioning plates that are close to each other. The positioning structure is a frustum and a conical groove that matches the frustum. The side of the second positioning plate away from the first positioning plate is configured to be limited by the limiting device.

[0007] Preferably, the excitation assembly further includes a pole head, which is disposed on the magnetic circuit and extends the magnetic circuit, with the end of the pole head close to the preset area.

[0008] More preferably, the second positioning plate is provided with a through hole, the through hole being configured to allow the end of the electrode head to pass through, and the probe extending to the side away from the first positioning plate.

[0009] More preferably, the electrode head includes at least one of a vertical electrode head and an in-plane electrode head.

[0010] Preferably, the second positioning plate overlaps with the limiting device.

[0011] More preferably, the limiting device is a boss, which overlaps with the edge of the second positioning plate.

[0012] Preferably, the excitation assembly and the probe assembly are each provided with a through hole, and the through hole is configured to at least partially overlap in the axial direction when the positioning structure is engaged.

[0013] More preferably, the excitation assembly includes a vertical pole head, which is mounted on the first positioning plate and disposed on the magnetic circuit where the excitation coil is located, and the through hole is disposed along the axial direction of the vertical pole head.

[0014] More preferably, the probe card is provided with a hollow portion, and the probe extends from the edge of the hollow portion toward the inside of the hollow portion; the second positioning plate is provided with a through hole that at least partially overlaps with the hollow portion of the probe card.

[0015] Preferably, the mechanism further includes a drive assembly and a support assembly. The support assembly is fixedly connected to the limiting device and slidably connected to the excitation assembly. The drive assembly is fixedly connected to the support assembly. The drive assembly is provided with a movable end, which is configured to engage or disengage with the excitation assembly under the drive of the drive assembly.

[0016] More preferably, the excitation component is disposed on the upper side of the detector component, and the mobile end is provided with a lifting platform that can overlap with the edge of the excitation component.

[0017] The present invention has at least the following beneficial effects: the position of the excitation component and the probe component is relatively fixed by the positioning structure, and the position and direction of the preset area with magnetic field environment and the probe component are also relatively determined. In this way, the relative position of the probe tip and the preset area is positioned, which essentially positions the position of the detected area of ​​the test object in the magnetic field. This realizes the movement and positioning of the detected area of ​​the test object in the magnetic field. There is no need to calibrate the magnetic field of the preset area during multiple tests, which facilitates the use of the test equipment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present invention.

[0019] Figure 2 for Figure 1 Another view of the embodiment shown.

[0020] Figure 3 For Figure 1 The illustrated embodiment is a view from one direction in another state.

[0021] Figure 4 For Figure 3 The illustrated embodiment is viewed from another direction. Detailed Implementation

[0022] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0023] Please see Figures 1 to 4 The present invention first provides a mechanism for positioning an excitation component and a probe component, including an excitation component 100 for generating a magnetic field, a probe component 200 for measuring electrical variables, and a limiting device 300.

[0024] The excitation assembly 100 includes an excitation coil 110, a magnetic circuit extending outward from the excitation coil 110, and a first positioning plate 120. The magnetic circuit is configured to extend at least partially within a preset region 140. The excitation coil 110 serves as a magnetic field source, generating a magnetic field extending into the preset region 140. In practical applications, the excitation coil 110 can be used to directly generate a magnetic field environment within the preset region 140. Alternatively, a combination of the excitation coil 110 and a magnetically conductive element can be used to adjust and extend the magnetic field generated by the excitation coil 110. For example, in some cases, the magnetic circuit can be adjusted by a magnetically conductive element. More specifically, the magnetic circuit can be adjusted by setting a pole head 130 of a corresponding shape. For example, by setting the extension direction of the pole head 130, the magnetic circuit can be at least partially extended along the pole head 130 and extended from the end of the pole head 130 to the preset area 140. The shape of the pole head 130 can also be further set to adjust the extension direction and shape of the magnetic circuit at the end of the pole head 130. Multiple pole heads 130 can also be set and their relative positions adjusted to adjust the magnetic circuit between the pole heads 130.

[0025] The excitation coil 110 is mounted on the first positioning plate 120, which is configured to switch between positions that are in contact with or separate from the detector assembly 200. In other words, the positioning plate 120 can move under the action of an external device or power source, and the direction of movement has at least a component in the direction of approaching or moving away from the detector assembly 200.

[0026] The probe card assembly 200 includes a second positioning plate 220 and a probe card 210. The probe card 210 is mounted on the second positioning plate 220, and the probe of the probe card 210 extends outward from the second positioning plate 220. That is, the probe extends away from the second positioning plate 220 so that the end of the probe can extend into the space outside the second positioning plate 220 to facilitate contact with the object being tested. In particular, when the object being tested is a wafer or other large planar object, the end of the probe needs to protrude from the plane of the probe card assembly 200 near the wafer side. When the object being tested is a chip or other smaller components, the end of the probe needs to protrude from the area of ​​the probe card assembly 200 near the object being tested, which is similar to the projection of the object being tested.

[0027] At least two sets of positioning structures are provided on the side of the first positioning plate 120 and the second positioning plate 220 that are close to each other. The positioning structure is a truncated cone 150 and a conical groove 250 that matches the truncated cone. The side of the second positioning plate 220 that is away from the first positioning plate 120 is configured to be limited by the limiting device 300.

[0028] Please see Figure 1When the excitation component 100 approaches the probe component 200, the two gradually approach each other and the positioning structure gradually engages. The cone 150 and the cone groove 250 are positioned relative to each other in the radial and axial directions. Furthermore, by setting at least two sets of positioning structures, the angle is further positioned based on the radial and axial positioning provided by one set of positioning structures. In other words, the relative position and angle of the excitation component 100 and the probe component 200 are positioned. Based on the characteristics of the frustum 150 and the groove 250, it can be seen that when the excitation component 100 gradually approaches the probe component 200 and cooperates with the probe component 200, it is not necessary to accurately align the two in advance. It is only necessary to roughly position them so that the frustum 150 can enter the groove 250. During the process of the excitation component 100 gradually approaching the probe component 200, the limiting component 300 is used to limit the probe component 200 so that the frustum 150 and the groove 250 can cooperate with each other. Thus, with the help of at least two sets of frustums 150 and grooves 250, the relative position and angle of the excitation component 100 and the probe component 200 can be gradually brought to the preset position and angle. At this time, the positions of the excitation component 100 and the probe component 200 are relatively fixed at the preset positions, and the positions and orientations of the preset area 140 and the probe component 200 are also relatively determined. This allows for the positioning of the relative position of the probe tip of the probe card 210 with respect to the preset area 140. Correspondingly, the position of the detected area of ​​the object being measured in the magnetic field is essentially determined. For details, please refer to... Figure 4 This diagram illustrates the positional relationship between the excitation assembly 100 and the probe assembly 200 when positioning is complete. By utilizing at least two sets of frustums 150 and grooves 250, the excitation assembly 100 and the probe assembly 200 maintain the same relative position during multiple combinations. This ensures that the probe tip of the probe card 210 remains consistent with the preset area 140 during multiple combinations, thus maintaining the consistent position of the tested area of ​​the object in the magnetic field. When the excitation assembly 100 does not modify the magnetic circuit within the preset area 140, the probe of the probe card 210 is positioned in the same location and magnetic field environment within the preset area 140. In other words, the position of the tested area of ​​the object remains consistent in the magnetic field, eliminating the need to label or detect the magnetic field environment of the object, thus simplifying the detection process of using probes and the magnetic field environment to detect the object. Furthermore, the excitation assembly 100 can be easily separated from the probe assembly 200, thereby facilitating the maintenance and replacement of the excitation assembly 100 and the probe assembly 200. In some cases, by removing the excitation assembly 100 and the probe assembly 200, the object under test can be exposed, making it easier to adjust or replace the object under test, as well as to perform partial inspections of the object under test, such as visual analysis.

[0029] When the excitation coil 110 of the excitation assembly 100 is positioned close to the probe assembly 200, due to the size limitation of the excitation coil 110, a certain distance needs to be maintained between the excitation assembly 100 and the probe assembly 200 to accommodate the excitation coil 110. In this case, please refer to... Figure 2 A protrusion 180 protruding towards the probe assembly 200 can be provided at the position where the positioning mechanism 150 is provided on the first positioning plate 120, and the positioning mechanism 150 is positioned on the protrusion 180, thereby forming a space between the first positioning plate 120 and the probe assembly 200 to accommodate the excitation coil 110. For easier handling and placement of the probe assembly 200, please refer to [link to relevant documentation]. Figure 1 A handle 260 can also be provided on the probe assembly 200. The handle 260 is located on the side of the probe assembly 200 closer to the excitation assembly 100, so that when the excitation assembly 100 is separated from the probe assembly 200, the probe assembly 200 can be picked up and placed using the handle 260. When a space for accommodating the excitation coil 110 is provided between the first positioning plate 120 and the probe assembly 200, this space can also accommodate the handle 260.

[0030] Please see Figure 1 , Figure 2 When the magnetic circuit of the excitation assembly 100 is adjusted using the pole head 130, the excitation assembly 100 may also include the pole head 130, which is disposed on the magnetic circuit and extends the magnetic circuit. The end of the pole head 130 is close to the preset region 140, so that the magnetic circuit can extend from the pole head 130 to the preset region 140. The specific form of the electrode head 130 can be configured as needed. For example, the electrode head 130 can be a vertical electrode head, approaching the preset area 140 from a direction generally perpendicular to the measured surface of the object being measured to form a corresponding magnetic field, such as a magnetic field perpendicular to the measured surface of the object being measured. The electrode head 130 can also be an in-plane electrode head 132, approaching the preset area 140 from a direction generally parallel to the measured surface of the object being measured to form a corresponding magnetic field, such as a magnetic field parallel to the measured surface of the object being measured. Alternatively, the vertical electrode head 131 and the in-plane electrode head 132 can be used together, adjusting the magnetic circuit by means of the spatial position between the vertical electrode head 131 and the in-plane electrode head 132, thereby forming a magnetic field in the preset area 140 that is different from that when the vertical electrode head 131 and the in-plane electrode head 132 are used separately, especially forming a spatial magnetic field that is different from the vertical magnetic field and the in-plane magnetic field. That is to say, the electrode head 130 includes at least one of the vertical electrode head 131 and the in-plane electrode head 132. As for the specific configuration, the appropriate combination can be selected under the guidance of this patent.

[0031] Please see Figure 1 , Figure 2 This illustrates an electrode head 130 configuration that simultaneously employs a vertical electrode head 131 and an in-plane electrode head 132. Please refer to [link to relevant documentation]. Figure 4Four in-plane poles 132 are provided, arranged in pairs facing each other, and all four in-plane poles 132 are positioned in the same plane. This allows the magnetic field generated by the excitation coil 110 to extend along the magnetic circuit into the region between the ends of the in-plane poles 132, i.e., into the preset region 140. One vertical pole 131 is provided, perpendicular to the plane containing the in-plane poles 132, with its end close to the preset region 140. This also allows the magnetic field generated by the excitation coil 110 to extend along the magnetic circuit into the preset region 140. Under the combined action of the vertical pole 131 and the in-plane poles 132, a spatial magnetic field is formed within the preset region 140. Furthermore, since the magnetic circuit extends the magnetic field generated by the excitation coil 110 to the preset region 140, the magnetic field within the preset region 140 can be adjusted by adjusting the magnetic field generated by the excitation coil 110. Please refer to [link to relevant documentation]. Figure 1 , Figure 2 Excitation coils 110 can be installed on each pole 130 as needed, and the strength, direction and other characteristics of the magnetic field generated by the excitation coils 110 on each pole 130 can be adjusted to adjust the strength, direction and other characteristics of the magnetic field in the preset area 140.

[0032] To bring the electrode tip 130 closer to the preset region 140, in some cases, the generally plate-shaped second positioning plate 220 may obstruct the electrode tip 130, requiring appropriate adjustment of the second positioning plate 220. Specifically, a through hole 230 can be provided in the second positioning plate 220, and the shape of the through hole 230 can be configured such that at least the end portion of the electrode tip 130 can pass through the through hole 230 and extend into the preset region 140, thereby enabling the electrode tip 130 to form the magnetic field environment required for detection in the preset region 140. Please refer to [link to relevant documentation]. Figure 3 , Figure 4 The end of the electrode 130 extends through the second positioning plate 220 into the preset area 140 and forms a magnetic field in the area. The sample to be tested must be located in the preset area 140. The probe needs to extend from the probe card 210 into the sample. That is, the probe needs to extend to the side away from the first positioning plate 120 in order to contact the sample to be tested.

[0033] Regarding the setting of the electrode 130, when it is necessary to place the object under test in an in-plane magnetic field, an in-plane electrode 132 can be used to generate an in-plane magnetic field; when it is necessary to place the object under test in a vertical magnetic field, a vertical electrode 131 can be used to generate a vertical magnetic field; when it is necessary to place the object under test in a spatial magnetic field, both a vertical electrode 131 and an in-plane electrode 132 can be used simultaneously to generate a spatial magnetic field. That is to say, when using the electrode to adjust the magnetic field of the preset area 140, the electrode 130 may include at least one of the vertical electrode 131 and the in-plane electrode 132.

[0034] Since the second positioning plate 220 and the first positioning plate 120 are positioned by a positioning structure, the side of the second positioning plate 220 away from the first positioning plate 120 does not require a positioning structure. Furthermore, it needs to allow for displacement of the second positioning plate 220 under the action of the first positioning plate 120. Therefore, as a feasible approach, the side of the second positioning plate 220 away from the first positioning plate 120 overlaps with the limiting device 300, thereby satisfying the aforementioned requirements. For the specific shape of the limiting device 300, please refer to [link to relevant documentation]. Figure 1 The diagram illustrates the shape of a limiting device 300, which is a boss 300 surrounding the edge of the second positioning plate 220. In use, the edge of the second positioning plate 220 overlaps with the limiting device 300. Alternatively, the limiting device 300 can be configured in other shapes, such as multiple protrusions extending towards the edge of the second positioning plate 220, and a limiting surface contacting a certain end face of the second positioning plate 200 on the side away from the first positioning plate 120.

[0035] Please see Figure 1 , Figure 2 The excitation assembly 100 and the probe card assembly 200 are respectively provided with through holes 160 and 240, which are used to observe the contact between the probe of the probe card 210 and the object under test, or to emit detection light towards the object under test, and to receive light reflected or emitted by the object under test. To achieve this observation purpose, the through holes 160 and 240 are configured to at least partially overlap axially when the positioning structure is engaged. Please refer to... Figure 1 When the first positioning plate 120 and the second positioning plate 220 are positioned by the positioning structure, the through hole 160 provided on the excitation component 100 can be coaxially set with the through hole 240 provided on the probe component 200.

[0036] Please see Figure 1 When the excitation assembly 100 is equipped with a vertical pole head 131, a corresponding through hole can be opened in the vertical pole head 131. Under the condition that a corresponding magnetic field environment can be provided to the preset position 140, the probe and the object under test can be observed, and corresponding optical signals can be sent or received. More specifically, the vertical pole head 131 is installed on the first positioning plate 120 and is set on the magnetic circuit where the excitation coil 110 is located, and the through hole 160 is set along the axial direction of the vertical pole head 131. In addition, it should be noted that when the vertical pole head 131 is not used, a through hole can also be set only on the first positioning plate 120.

[0037] For probe component 200, please refer to Figure 4In some cases, the probe card 210 is provided with a hollowed-out portion, and the probe extends from the edge of the hollowed-out portion toward the inside of the hollowed-out portion. It should be noted that extending toward the inside of the hollowed-out portion here refers to extending axially from the edge of the hollowed-out portion toward the hollowed-out portion, and it also needs to meet the condition of extending in a direction away from the excitation component 100 and closer to the preset position 140. The second positioning plate 220 is provided with a through hole 240 that at least partially overlaps with the hollowed-out portion of the probe card 210.

[0038] Please continue reading. Figure 1 , Figure 2 In the mechanism provided by this invention, the excitation component 100 can be positioned manually or by a corresponding mechanism. Specifically, the mechanism provided by this invention also includes a drive component 500 and a support component 400. The support component 400 provides support for the limiting device 300 and the drive component 500 to enable them to function normally. The support component 400 is fixedly connected to the limiting device 300 and slidably connected to the excitation component 100, and is used to limit the movement direction of the excitation component 100. The drive component 500 is fixedly connected to the support component 400 and is provided with a moving end 520. The moving end 520 is configured to engage or disengage with the excitation component 100 under the drive of the drive component 500. More specifically, the excitation component 100 is disposed on the upper side of the detector component 200, and the moving end 520 is provided with a lifting platform 521 that can engage with the edge of the excitation component 100. In use, the driving component 500 drives the lifting platform 521 of the movable end 520 to move upward, so that the edge of the lifting platform 521 and the excitation component 100 changes from a separated state to an overlapping state. The lifting platform 521 then lifts the excitation component 100 upward. During this process, the excitation component 100 is slidably connected to the support component 400, therefore the excitation component 100 will move in a preset sliding direction. Please refer to [link / reference]. Figure 1 , Figure 2 When the excitation assembly 100 and the support assembly 400 slide and are limited by the sliding sleeve 170 and the sliding shaft 410, the excitation assembly 100 will move upward along the direction of the sliding shaft 410, thereby separating the excitation assembly 100 from the probe assembly 200 and exposing the probe assembly 200 for easy removal. When testing is required, the driving assembly 500 drives the lifting platform 521 of the moving end 520 downward, so that the lifting platform 521 and the excitation assembly 100 move downward together. After the excitation assembly 100 and the probe assembly 200 are positioned by the positioning mechanism, the probe assembly 200 is limited by the limiting device 300, thereby limiting the excitation assembly 100. At this time, the excitation assembly 100 cannot continue to move downward, and the lifting platform 521 separates from the excitation assembly 100 and continues to move downward with the moving end 520 until it stops moving. In this case, please refer to Figure 3The excitation component 100 is pressed against the probe component 200 by its own weight. When the excitation component 100 has a pole, the weight of the pole is relatively large, which further presses the excitation component 100 and the probe component 200 together, thus ensuring the positioning effect of the excitation component 100 and the probe component 200. That is, when the excitation component 100 generates a magnetic field environment at the preset position 140, the positions of the excitation component 100 and the probe component 200 are relatively fixed. In addition, when the excitation component 100 is slidably connected to the support component 400, the support component 400 can also position the probe component 200 via the excitation component 100, further ensuring that the positions of the excitation component 100 and the probe component 200 remain unchanged. For the driving method of the moving end 520, a lifting cylinder 510, a linear motor, or other pneumatic, electric, or mechanical methods can be used. For ease of control, Figure 1 , Figure 2 In the illustrated embodiment, a lifting cylinder 510 is used as the driving method for the moving end 520. To make the force on the excitation assembly 100 more even, the lifting platform 521 can further increase the contact surface with the excitation assembly 100, or multiple sets of driving assemblies 500 can be provided to drive the excitation assembly 100 to move from multiple positions, for example... Figure 1 In the illustrated implementation, two sets of drive components 500 are provided.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Therefore, the above descriptions are merely embodiments of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the present invention. Various equivalent changes and modifications are included without departing from the spirit and scope of the present invention, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A mechanism for positioning an excitation assembly and a probe assembly, characterized in that: This includes an excitation assembly for generating a magnetic field, a probe assembly for measuring electrical variables, and a limit device. The excitation assembly includes an excitation coil, a magnetic circuit extending outward from the excitation coil, and a first positioning plate. The excitation coil is mounted on the first positioning plate. The magnetic circuit is configured to extend at least partially in a preset area. The first positioning plate is configured to switch between positions that are in contact with or separate from the detector assembly. The probe card assembly includes a second positioning plate and a probe card, wherein the probe card is installed on the second positioning plate and the probe of the probe card extends outward from the second positioning plate; At least two sets of positioning structures are provided on the side of the first positioning plate and the second positioning plate that are close to each other. The positioning structure is a frustum and a conical groove that matches the frustum. The side of the second positioning plate that is away from the first positioning plate is configured to be limited by the limiting device. The mechanism further includes a drive assembly and a support assembly. The support assembly is fixedly connected to the limiting device and slidably connected to the excitation assembly. The drive assembly is fixedly connected to the support assembly. The drive assembly is provided with a movable end, which is configured to engage or disengage with the excitation assembly under the drive of the drive assembly.

2. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 1, characterized in that: The excitation assembly also includes a pole head, which is disposed in the magnetic circuit and extends the magnetic circuit, with the end of the pole head close to the preset area.

3. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 2, characterized in that: The second positioning plate is provided with a through hole, which is configured to allow the end of the electrode head to pass through, and the probe extends to the side away from the first positioning plate.

4. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 2, characterized in that: The electrode head includes at least one of a vertical electrode head and an in-plane electrode head.

5. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 1, characterized in that: The second positioning plate overlaps with the limiting device.

6. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 5, characterized in that: The limiting device is a boss, which overlaps with the edge of the second positioning plate.

7. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 1, characterized in that: The excitation component and the probe component are each provided with a through hole, and the through hole is configured to at least partially overlap in the axial direction when the positioning structure is engaged.

8. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 7, characterized in that: The excitation assembly includes a vertical pole head, which is mounted on the first positioning plate and disposed on the magnetic circuit where the excitation coil is located. The through hole is disposed along the axial direction of the vertical pole head.

9. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 7, characterized in that: The probe card has a cutout portion, and the probe extends from the edge of the cutout portion toward the inside of the cutout portion; the second positioning plate has a through hole that at least partially overlaps with the cutout portion of the probe card.

10. The mechanism for positioning the excitation assembly and the probe assembly as described in claim 1, characterized in that: The excitation component is disposed on the upper side of the detector component, and the mobile end is provided with a lifting platform that can overlap with the edge of the excitation component.

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