Buffering device, production system and processing method

Abstract

The application discloses a kind of caching equipment, production system and processing method.Caching equipment includes first boat support, second boat support, lifting mechanism and conveying mechanism, lifting mechanism includes multiple first lifting components and multiple second lifting components, conveying mechanism includes first conveying component and second conveying component, multiple first lifting components and multiple second lifting components can buffer multiple first quartz boats and multiple second quartz boats respectively, first conveying component and second conveying component can transport first quartz boat and second quartz boat to material moving area respectively, and cooperate the lifting action of first lifting component and second lifting component to solve the interference problem in transportation process, realize the segmented first quartz boat and second quartz boat of single quartz boat are sent into process equipment and are processed simultaneously, on the basis of reducing the structural requirements of loading and unloading equipment, multiple first quartz boats and multiple second quartz boats are circulated to speed up production rhythm and improve production efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cells, in particular to a buffer device, a production system and a processing method. BACKGROUND

[0002] In the preparation process of crystalline silicon solar cell pieces, the silicon wafer needs to be processed. In the related art, a single quartz boat loaded with silicon wafers is sent into a process equipment to process the silicon wafers, and after the process is completed, the quartz boat is sent into a loading and unloading equipment through a docking position for unloading and loading processing. The process is time-consuming and inefficient, and the length of the loading and unloading equipment needs to be designed according to the length of the quartz boat. The length of the loading and unloading equipment is long, and the number of silicon wafers to be loaded is large, which requires high structure and site requirements for the loading and unloading equipment. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application proposes a buffer device that can improve production efficiency and reduce the requirements for the loading and unloading equipment.

[0004] The present application also proposes a production system with the above buffer device.

[0005] The present application also proposes a processing method based on the above buffer device.

[0006] The buffer device according to the embodiments of the present application comprises a first boat holder, a second boat holder, a lifting mechanism and a conveying mechanism; the first boat holder is used to carry a first quartz boat, and the second boat holder is used to carry a second quartz boat;

[0007] The lifting mechanism comprises a plurality of first lifting assemblies and a plurality of second lifting assemblies; the first lifting assemblies can carry and lift the first boat holder in a first direction, and each first lifting assembly is arranged in sequence in a second direction perpendicular to the first direction; the second lifting assemblies can carry and lift the second boat holder in the first direction, and each second lifting assembly is arranged in sequence in the second direction; each first lifting assembly and each second lifting assembly are arranged at intervals in the second direction, and a material moving area is defined between adjacent first lifting assemblies and second lifting assemblies, and the material moving area is used for moving the first boat holder and the second boat holder;

[0008] The conveying mechanism comprises a first conveying assembly and a second conveying assembly; the first conveying assembly is used to carry the first boat holder, and the first conveying assembly can move in the second direction to correspond to the first lifting assembly and the material moving area; the second conveying assembly is used to carry the second boat holder, and the second conveying assembly can move in the second direction to correspond to the second lifting assembly and the material moving area.

[0009] According to the cache device of the embodiment of the present application, at least the following beneficial effects are achieved: the plurality of first lifting assemblies and the plurality of second lifting assemblies can respectively cache the plurality of first quartz boats and the plurality of second quartz boats, the first conveying assembly and the second conveying assembly can respectively transport the first quartz boats and the second quartz boats to the material transfer area, and the interference problem in the transportation process is solved by cooperating with the lifting action of the first lifting assembly and the second lifting assembly, on the basis of realizing the simultaneous processing of the single quartz boat segmented into the first quartz boat and the second quartz boat into the process equipment, the production rhythm is accelerated and the production efficiency is improved by the circulation of the plurality of first quartz boats and the plurality of second quartz boats.

[0010] According to some embodiments of the present application, the first boat holder and the second boat holder each have a set carrying length, and the carrying length of the first boat holder is greater than the carrying length of the second boat holder.

[0011] The production system according to the embodiment of the present application comprises a process equipment, a loading and unloading equipment, a feeding equipment and the cache device of any one of the above embodiments, the process equipment is used for processing the silicon wafers carried by the first quartz boat and the second quartz boat, the loading and unloading equipment is used for loading or unloading the silicon wafers on the first quartz boat or the second quartz boat lifted by the lifting mechanism, and the feeding equipment is used for feeding the first quartz boat or the second quartz boat located in the material transfer area into the process equipment.

[0012] The production system according to the embodiment of the present application has at least the following beneficial effects: by applying the cache device of the embodiment of the present application, on the basis of realizing the simultaneous processing of the single quartz boat segmented into the first quartz boat and the second quartz boat into the process equipment, the production rhythm is accelerated and the production efficiency of the production system is improved by the circulation of the plurality of first quartz boats and the plurality of second quartz boats.

[0013] The processing method according to the embodiment of the present application is based on the production system of the above embodiments, and comprises the following steps:

[0014] According to the loading length of the process equipment, the first quartz boat and the second quartz boat for loading the silicon wafers are prepared;

[0015] The first quartz boat is cached in the first lifting assembly, and the second quartz boat is cached in the second lifting assembly;

[0016] The conveying mechanism and the feeding equipment cooperate to sequentially convey the first quartz boat and the second quartz boat into the process equipment;

[0017] The process equipment simultaneously processes the silicon wafers carried by the first quartz boat and the second quartz boat;

[0018] sequentially taking out the second quartz boat and the first quartz boat.

[0019] According to the production system of the embodiments of the present application, at least the following beneficial effects can be achieved: by dividing the quartz boats to be processed in the process equipment into the first quartz boats and the second quartz boats, the corresponding clamping length required to be provided by the feeding equipment and the number of silicon wafers required to be clamped can be reduced, and the structural requirement of the feeding equipment and the space requirement during movement can be reduced.

[0020] According to some embodiments of the present application, the steps of buffering the first quartz boats in the first lifting assemblies and buffering the second quartz boats in the second lifting assemblies further include the following steps:

[0021] The conveying mechanism and the feeding equipment cooperate to sequentially convey the first quartz boats and the second quartz boats into the process equipment;

[0022] The steps of buffering a plurality of the first quartz boats in the first lifting assemblies and buffering a plurality of the second quartz boats in the second lifting assemblies further include the following steps:

[0023] sequentially conveying one of the first quartz boats and one of the second quartz boats into the process equipment.

[0024] According to some embodiments of the present application, the step of sequentially conveying one of the first quartz boats and one of the second quartz boats into the process equipment further includes the following steps:

[0025] sequentially detecting whether there are full first quartz boats and full second quartz boats;

[0026] If there are full first quartz boats, one of the full first quartz boats is selected to be conveyed into the process equipment;

[0027] If there are full second quartz boats, one of the full second quartz boats is selected to be conveyed into the process equipment.

[0028] According to some embodiments of the present application, the step of selecting one of the full first quartz boats to be conveyed into the process equipment further includes the following steps:

[0029] Before the first conveying assembly carries the full first quartz boat to the material moving area, it is detected whether there are interfering other first quartz boats in the conveying path of the first conveying assembly;

[0030] If there are interfering other first quartz boats, the first lifting assembly lifts the interfering first quartz boats;

[0031] The step of selecting one of the second quartz boats with full load to be transported into the process equipment further comprises the following steps:

[0032] Before the second transporting assembly carries the second quartz boat with full load to the material moving area, the second transporting assembly detects whether there is another second quartz boat interfering with the transporting path of the second transporting assembly.

[0033] If there is another second quartz boat interfering, the second lifting assembly lifts the interfering second quartz boat.

[0034] According to some embodiments of the present application, the step of sequentially taking out the second quartz boat and the first quartz boat further comprises the following steps:

[0035] Before the second transporting assembly carries the taken-out second quartz boat from the material moving area to the second lifting assembly with empty load, the second transporting assembly detects whether there is another interfering second quartz boat in the transporting path of the second transporting assembly.

[0036] If there is another interfering second quartz boat, the second lifting assembly corresponding to the second lifting assembly lifts the interfering second quartz boat.

[0037] Before the first transporting assembly carries the taken-out first quartz boat from the material moving area to the first lifting assembly with empty load, the first transporting assembly detects whether there is another interfering first quartz boat in the transporting path of the first transporting assembly.

[0038] If there is another interfering first quartz boat, the first lifting assembly corresponding to the first lifting assembly lifts the interfering first quartz boat.

[0039] According to some embodiments of the present application, the step of sequentially taking out the second quartz boat and the first quartz boat further comprises the following steps:

[0040] The step of sequentially transporting one of the first quartz boats and one of the second quartz boats into the process equipment further comprises the following steps: selecting the first quartz boats and the second quartz boats with the same arrangement order to be sequentially transported into the process equipment.

[0041] According to some embodiments of the present application, when the conveying mechanism is conveying one of the first quartz boats or one of the second quartz boats, the loading and unloading device is unloading the other full first quartz boat or the other full second quartz boat; or, when the conveying mechanism is conveying one of the first quartz boats or one of the second quartz boats, the loading and unloading device is loading the other empty first quartz boat or the other empty second quartz boat.

[0042] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0043] The present application will be further described with reference to the drawings and examples, wherein:

[0044] Figure 1 is a schematic view of a loading and unloading device according to an embodiment of the present application;

[0045] Figure 2 is a schematic view of a hoisting mechanism according to an embodiment of the present application;

[0046] Figure 3 is a schematic view of a hoisting mechanism according to an embodiment of the present application; Figure 2

[0047] Figure 4 is a schematic view of a hoisting mechanism according to an embodiment of the present application; Figure 2

[0048] Figure 5 is a schematic view of a conveying mechanism according to an embodiment of the present application;

[0049] Figure 6 is a schematic view of a production system according to an embodiment of the present application;

[0050] Figure 7 is a flowchart of a processing method according to some embodiments of the present application;

[0051] Figure 8 is a flowchart of a processing method according to some embodiments of the present application;

[0052] Figure 9 is a flowchart of a processing method according to some embodiments of the present application;

[0053] Figure 10 is a flowchart of a processing method according to some embodiments of the present application;

[0054] Figure 11 is a flowchart of a processing method according to some embodiments of the present application;

[0055] Figure 12 ​​Flow chart of the processing method for some embodiments of the present application;

[0056] Figure 13 Flow chart of the processing method for some embodiments of the present application.

[0057] Reference signs:

[0058] Cache device 100, first boat 110, first quartz boat 111, second boat 120, second quartz boat 121, material transfer area 130;

[0059] Lifting mechanism 200, first lifting assembly 210, second lifting assembly 220, lifter 230, driving piece 240, abutting piece 250, guide block 251, guide surface 252, fixing frame 260, connecting part 261;

[0060] Conveying mechanism 300, first conveying assembly 310, second conveying assembly 320, guide rail 330, conveying belt 340;

[0061] Process equipment 400, feeding equipment 500, loading and unloading equipment 600. DETAILED DESCRIPTION

[0062] The embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0063] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as a limitation of the present application.

[0064] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. is understood as not including the number, above, below, etc. is understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0065] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be understood in a broad sense, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0066] In the description of the application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0067] In order to solve the problems of low production efficiency of silicon wafers, high structural requirements and site requirements of loading and unloading equipment in the related art, the quartz boat loaded during processing of the process equipment is divided into a first quartz boat and a second quartz boat for processing, so as to reduce the corresponding clamping length required by the loading and unloading equipment when loading or unloading a single quartz boat, reduce the number of silicon wafers required to be simultaneously carried by the loading and unloading equipment, reduce the structural requirements of the loading and unloading equipment, and realize the circulation of multiple quartz boats through the buffer equipment, speed up the production rhythm, and improve the production efficiency.

[0068] The buffer equipment, production system and processing method of the embodiments of the application will be described below with reference to the accompanying drawings of the specification.

[0069] Referring to Figure 1 According to the buffer equipment 100 of the embodiments of the application, the first boat holder 110 is used to carry the first quartz boat 111, and the second boat holder 120 is used to carry the second quartz boat 121.

[0070] The lifting mechanism 200 includes a plurality of first lifting assemblies 210 and a plurality of second lifting assemblies 220. The first lifting assemblies 210 can carry and lift the first boat holder 110 in a first direction, and each first lifting assembly 210 is arranged in sequence in a second direction perpendicular to the first direction. The second lifting assemblies 220 can carry and lift the second boat holder 120 in the first direction, and each second lifting assembly 220 is arranged in sequence in the second direction. Each first lifting assembly 210 and each second lifting assembly 220 are arranged in the second direction. The adjacent first lifting assemblies 210 and second lifting assemblies 220 define a material moving area 130 for the first boat holder 110 and the second boat holder 120 to move materials.

[0071] The conveying mechanism 300 comprises a first conveying assembly 310 and a second conveying assembly 320, the first conveying assembly 310 is used to carry the first boat holder 110, and the first conveying assembly 310 is capable of moving to the first lifting assembly 210 and the material transfer area 130 in the second direction, the second conveying assembly 320 is used to carry the second boat holder 120, and the second conveying assembly 320 is capable of moving to the second lifting assembly 220 and the material transfer area 130 in the second direction.

[0072] The first conveying assembly 310 and the second conveying assembly 320 are capable of respectively transporting the first quartz boat 111 and the second quartz boat 121 to the material transfer area 130, and cooperate with the lifting action of the first lifting assembly 210 and the second lifting assembly 220 to solve the interference problem in the transportation process, realize the processing of the single quartz boat by dividing the single quartz boat into the first quartz boat 111 and the second quartz boat 121, and send the first quartz boat 111 and the second quartz boat 121 into the process equipment 400 for simultaneous processing, thereby reducing the structural requirements of the loading and unloading equipment 600, speeding up the production rhythm through the circulation of the plurality of first quartz boats 111 and the plurality of second quartz boats 121, and improving the production efficiency.

[0073] Referring to Figure 1 In some embodiments, the first boat holder 110 and the second boat holder 120 both have a set carrying length, and the carrying length of the first boat holder 110 is greater than that of the second boat holder 120. The difference in the carrying length of the first boat holder 110 and the second boat holder 120 can serve as a foolproof function to quickly determine whether the quartz boat is the first quartz boat 111 or the second quartz boat 121, thereby improving the processing efficiency. In some cases, the process equipment 400 has a special processing position, and the differentiation of the first quartz boat 111 and the second quartz boat 121 can meet the positioning requirements of the special processing position.

[0074] Referring to Figures 1 to 3In some embodiments, the lifting mechanism 200 comprises a lifter 230, the lifter 230 comprises a driving member 240 and an abutting member 250, the driving member 240 is connected with the abutting member 250, the driving member 240 is used to drive the abutting member 250 to move in the first direction, the lifting action can be realized through the lifter 230, and the lifter 230 can be arranged at the bottom of the first boat support 110 or the second boat support 120, so that the bottom of the first boat support 110 and the second boat support 120 can be directly jacked up. Alternatively, in some embodiments, the first lifting assembly 210 comprises a plurality of lifters 230, the first conveying assembly 310 is respectively provided with a lifter 230 on both sides in the third direction, and the abutting member 250 of the lifter 230 of the first conveying assembly 310 is used to abut against the first boat support 110, the third direction, the second direction and the first direction are perpendicular to each other. The lifters 230 located on both sides of the first conveying assembly 310 can respectively lift the first boat support 110 on both sides of the first boat support 110, and the abutting member 250 only needs to abut against the bottom side edge of the first boat support 110, the plurality of lifters 230 jointly acting can reduce the driving force and structural requirement of a single lifter 230, and reduce the probability of interference between the first lifting assembly 210 and the first conveying assembly 310.

[0075] Similarly, in some embodiments, the second lifting assembly 220 comprises a plurality of lifters 230, the second conveying assembly 320 is respectively provided with a lifter 230 on both sides in the third direction, and the abutting member 250 of the lifter 230 of the second conveying assembly 320 is used to abut against the second boat support 120. The lifters 230 located on both sides of the second conveying assembly 320 can respectively lift the second boat support 120 on both sides of the second boat support 120, and the abutting member 250 only needs to abut against the bottom side edge of the second boat support 120, the plurality of lifters 230 jointly acting can reduce the driving force and structural requirement of a single lifter 230, and reduce the probability of interference between the second lifting assembly 220 and the second conveying assembly 320.

[0076] Referring to Figure 4In some embodiments, the abutting member 250 is provided with a guide block 251, the guide block 251 is provided with a guide surface 252, the guide surface 252 is inclined to the first direction, and the guide surface 252 is used to abut against the first boat holder 110 or the second boat holder 120. The abutment between the guide surface 252 and the first boat holder 110 or the second boat holder 120 can reduce the rigid collision when the first boat holder 110 or the second boat holder 120 contacts the abutting member 250, and the guide surface 252 can realize the guiding function, so that the first boat holder 110 or the second boat holder 120 slides to the set position, and the positioning accuracy of the first boat holder 110 on the first lifting assembly 210 and the second boat holder 120 on the second lifting assembly 220 can be improved. Specifically, the guide block 251 can be provided with a plurality of guide blocks 251, and the guide surfaces 252 are located on the opposite sides of the opposite guide blocks 251 in the second direction. The abutting members 250 of the two lifting devices 230 opposite in the third direction are respectively provided with guide blocks 251 opposite in the third direction, and the guide surfaces 252 are located on the opposite sides of the opposite guide blocks 251 in the third direction.

[0077] Referring to Figure 3 In some embodiments, the lifting mechanism 200 includes a plurality of fixing frames 260, the fixing frame 260 is provided with a plurality of connecting portions 261, each lifting device 230 located on the same side of the first conveying assembly 310 in the third direction is connected to each connecting portion 261 of the same fixing frame 260, the fixing frame 260 provides a connection basis for each lifting device 230 located on the same side of the first lifting assembly 210, and each connecting portion 261 of the fixing frame 260 can be pre-set with a distance to quickly realize the positioning of each lifting device 230. When each lifting device 230 on both sides in the third direction is positioned one by one, only two fixing frames 260 need to be positioned, and the corresponding of the lifting device 230 in the third direction can be realized, and the positioning efficiency is improved.

[0078] Similarly, in some embodiments, each lifting device 230 located on the same side of the second conveying assembly 320 in the third direction is connected to each connecting portion 261 of the same fixing frame 260, the fixing frame 260 provides a connection basis for each lifting device 230 located on the same side of the second lifting assembly 220, and each connecting portion 261 of the fixing frame 260 can be pre-set with a distance to quickly realize the positioning of each lifting device 230. When each lifting device 230 on both sides in the third direction is positioned one by one, only two fixing frames 260 need to be positioned, and the corresponding of the lifting device 230 in the third direction can be realized, and the positioning efficiency is improved.

[0079] Referring to Figure 1 and Figure 5In some embodiments, the conveying mechanism 300 further comprises a guide rail 330 extending along a second direction, the first conveying assembly 310 and the second conveying assembly 320 are connected to the guide rail 330 and are movable along the guide rail 330. The guide rail 330 can guide and limit the movement of the first conveying assembly 310 and the second conveying assembly 320, and improve the stability of the movement of the first conveying assembly 310 and the second conveying assembly 320.

[0080] With reference to Figure 5 In some embodiments, the conveying mechanism 300 is provided with a conveying belt 340 having a conveying direction along a third direction. In some embodiments, the first conveying assembly 310 is provided with the conveying belt 340, and the conveying belt 340 of the first conveying assembly 310 can abut against the first boat holder 110, so as to conveniently move the first boat holder 110 out of the material moving area 130 along the third direction on the basis of supporting the first boat holder 110, and make the production rhythm compact. Similarly, in some embodiments, the second conveying assembly 320 is provided with the conveying belt 340, and the conveying belt 340 of the second conveying assembly 320 can abut against the second boat holder 120, so as to conveniently move the second boat holder 120 out of the material moving area 130 along the third direction on the basis of supporting the second boat holder 120, and make the production rhythm compact.

[0081] In some embodiments, the buffer device 100 further comprises a detection assembly (not shown in the figure) for detecting whether the first quartz boat 111 carried by the first boat holder 110 and / or the second quartz boat 121 carried by the second boat holder 120 is full. The detection assembly can be a visual system such as a visual camera or a photoelectric module for sensing whether it is full. A plurality of detection assemblies can be provided to detect whether the first quartz boat 111 carried by the first boat holder 110 and the second quartz boat 121 carried by the second boat holder 120 are full, or a movable detection assembly can be used to detect whether the first quartz boat 111 carried by the first boat holder 110 and the second quartz boat 121 carried by the second boat holder 120 are full.

[0082] With reference to Figure 1 and Figure 6According to the production system of the embodiments of the present application, the process equipment 400 is used for processing the silicon wafers carried by the first quartz boat 111 and the second quartz boat 121, the loading and unloading equipment 600 is used for loading or unloading the silicon wafers to the first quartz boat 111 or the second quartz boat 121 lifted by the lifting mechanism 200, and the feeding equipment 500 is used for feeding the first quartz boat 111 or the second quartz boat 121 located in the material transfer area 130 into the process equipment 400. By applying the buffer device 100 of the embodiments of the present application, the single quartz boat can be segmented into the first quartz boat 111 and the second quartz boat 121 for simultaneous processing, so as to reduce the structural requirements of the loading and unloading equipment 600, speed up the production rhythm through the circulation of multiple first quartz boats 111 and multiple second quartz boats 121, and improve the production efficiency of the production system.

[0083] Referring to Figure 6 In some embodiments, the process equipment 400 is located on one side of the material transfer area 130 in the third direction, and the feeding equipment 500 is located between the material transfer area 130 and the process equipment 400. With respect to the material transfer area 130, the loading and unloading equipment 600 is located on the opposite side of the process equipment 400 in the third direction, so that the loading and unloading and the process are located on the two sides of the buffer device 100 respectively, reducing the probability of device interference and facilitating the operation of the first quartz boat 111 and the second quartz boat 121.

[0084] Specifically, the feeding equipment 500 can be selected from a conveyor belt 340, a conveying roller, a crane and other conventional conveying equipment in the art. The loading and unloading equipment 600 can be selected from a conventional silicon wafer loading and unloading equipment 600 in the art, which can simultaneously hold multiple silicon wafers to be placed in the quartz boat, or can hold multiple silicon wafers on the quartz boat for unloading.

[0085] Referring to Figure 1 , Figure 6 and Figure 7 According to the processing method of the embodiments of the present application, based on the production system of the above embodiments, the method comprises the following steps:

[0086] S100, according to the loading length of the process equipment 400, preparing the first quartz boat 111 and the second quartz boat 121 for loading the silicon wafers;

[0087] S200, buffering the first quartz boat 111 to the first lifting assembly 210 and buffering the second quartz boat 121 to the second lifting assembly 220;

[0088] S300, the conveying mechanism 300 and the feeding equipment 500 cooperate to sequentially convey the first quartz boat 111 and the second quartz boat 121 into the process equipment 400;

[0089] S400, the process equipment 400 processes the silicon wafers carried by the first quartz boat 111 and the second quartz boat 121 simultaneously;

[0090] S500, the second quartz boat 121 and the first quartz boat 111 are taken out in sequence.

[0091] By segmenting the quartz boat to be processed in the process equipment 400 into the first quartz boat 111 and the second quartz boat 121 through step S100, the corresponding clamping length required to be set by the feeding equipment 500 and the number of silicon wafers required to be clamped can be reduced, and the structural requirement of the feeding equipment 500 and the space requirement during movement can be reduced. Through steps S200 to S500, the transportation of the first quartz boat 111 and the second quartz boat 121 can be realized, and the order of the first quartz boat 111 and the second quartz boat 121 entering the process equipment 400 can be ensured, and the position of the first quartz boat 111 and the second quartz boat 121 in the process equipment 400 can be ensured.

[0092] Referring to Figure 1 and Figure 8 In some embodiments, step S200 further comprises the following steps:

[0093] S210, the plurality of first quartz boats 111 are buffered in the first lifting assemblies 210 one by one, and the plurality of second quartz boats 121 are buffered in the second lifting assemblies 220 one by one.

[0094] Step S300 further comprises the following steps:

[0095] S310, one of the first quartz boats 111 and one of the second quartz boats 121 are sequentially transported into the process equipment 400.

[0096] By buffering the plurality of first quartz boats 111 and the plurality of second quartz boats 121 through step S210, the turnover rate can be improved, and the waiting time can be reduced. After the previous first quartz boat 111 and the previous second quartz boat 121 complete processing and return, the next first quartz boat 111 and the next second quartz boat 121 can be transported into the process equipment 400.

[0097] Referring to Figure 1 and Figure 9 In some embodiments, step S220 further comprises the following steps:

[0098] S230, whether there are full first quartz boats 111 and second quartz boats 121 is detected in sequence;

[0099] S240, if there is a full first quartz boat 111, one of the full first quartz boats 111 is selected and transported to the process equipment 400;

[0100] S250, if there is a full load of the second quartz boat 121, select one of the full load of the second quartz boat 121 to be transported to the process equipment 400.

[0101] The first quartz boat 111 and the second quartz boat 121 are detected before being carried in step S230, which can ensure that the first quartz boat 111 and the second quartz boat 121 entering the process equipment 400 are full load for processing, ensure production efficiency, and prevent the occurrence of product defects that may occur when processing under the condition of not full load. The detection can be realized by manual or automatic detection assembly.

[0102] Referring to Figure 1 , 10 and Figure 11 In some embodiments, step S240 further comprises the following steps:

[0103] S241, before the first conveying assembly 310 carries the full load of the first quartz boat 111 to the material transfer area 130, detect whether there is an interfering other first quartz boat 111 in the conveying path of the first conveying assembly 310;

[0104] S242, if there is an interfering first quartz boat 111, the first lifting assembly 210 lifts the interfering first quartz boat 111;

[0105] Step S250 further comprises the following steps:

[0106] S251, before the second conveying assembly 320 carries the full load of the second quartz boat 121 to the material transfer area 130, detect whether there is an interfering other second quartz boat 121 in the conveying path of the second conveying assembly 320;

[0107] S252, if there is an interfering second quartz boat 121, the second lifting assembly 220 lifts the interfering second quartz boat 121.

[0108] In the process of carrying the first quartz boat 111 and the second quartz boat 121 to the process equipment 400, the conveying path of the first conveying assembly 310 and the second conveying assembly 320 is detected in advance, which can ensure the correct movement of the first conveying assembly 310 and the second conveying assembly 320. When interference is detected, the first lifting assembly 210 is driven to lift the interfering first quartz boat 111, and the second lifting assembly 220 is driven to lift the interfering second quartz boat 121, so that the first conveying assembly 310 and the second conveying assembly 320 can smoothly reach the material transfer area 130.

[0109] Referring to Figure 1 and Figure 12In some embodiments, step S500 further comprises the following steps:

[0110] S510, detecting the position of the empty second lifting assembly 220, and the second conveying assembly 320 carries the removed second quartz boat 121 to the front of the empty second lifting assembly 220, and detecting whether there is another interfering second quartz boat 121 in the conveying path of the second conveying assembly 320;

[0111] S520, if there is an interfering second quartz boat 121, the corresponding second lifting assembly 220 lifts the interfering second quartz boat 121;

[0112] S530, detecting the position of the empty first lifting assembly 210, and the first conveying assembly 310 carries the removed first quartz boat 111 to the front of the empty first lifting assembly 210, and detecting whether there is another interfering first quartz boat 111 in the conveying path of the first conveying assembly 310;

[0113] S540, if there is an interfering first quartz boat 111, the corresponding first lifting assembly 210 lifts the interfering first quartz boat 111.

[0114] In the process of carrying the finished first quartz boat 111 and the second quartz boat 121 to the buffer device 100 for buffering, the correct movement of the first conveying assembly 310 and the second conveying assembly 320 can be ensured by detecting the conveying path of the first conveying assembly 310 and the second conveying assembly 320 in advance. When interference is detected, the corresponding first lifting assembly 210 is driven to lift the interfering first quartz boat 111, and the corresponding second lifting assembly 220 is driven to lift the interfering second quartz boat 121, so that the first conveying assembly 310 and the second conveying assembly 320 can smoothly reach the material transfer area 130.

[0115] Referring to Figure 1 and Figure 13 In some embodiments, step S210 further comprises the following steps:

[0116] S211, arranging and buffering each first quartz boat 111 in each first lifting assembly 210 and each second quartz boat 121 in each second lifting assembly 220, starting or ending with the material transfer area;

[0117] Step S310 further comprises the following steps:

[0118] S311, selecting first quartz boats 111 and second quartz boats 121 with the same arrangement order to be conveyed to the process equipment 400 in sequence;

[0119] By selecting the first quartz boat 111 and the second quartz boat 121 with the same arrangement order to enter the process equipment 400 at the same time for processing, the production can be more regular, the automation of the conveying mechanism 300 and the lifting mechanism 200 can be easily realized, and the difficulty of action control is reduced. It can be understood that when arranging from the start of the material moving area, the labels of each first quartz boat 111 and each second quartz boat 121 in the direction away from the material moving area gradually increase from 1 to n, n is the maximum number of each first quartz boat 111 and each second quartz boat 121, and the first quartz boat 111 and the second quartz boat 121 with the same label enter the process equipment 400 at the same time for processing. Similarly, when arranging from the end of the material moving area, the labels of each first quartz boat 111 and each second quartz boat 121 in the direction away from the material moving area gradually decrease from n to 1, n is the maximum number of each first quartz boat 111 and each second quartz boat 121, and the first quartz boat 111 and the second quartz boat 121 with the same label enter the process equipment 400 at the same time for processing.

[0120] Referring to Figure 1 In some embodiments, in the state that the conveying mechanism 300 conveys one of the first quartz boats 111 or one of the second quartz boats 121, the loading and unloading device 600 unloads other full first quartz boats 111 or other full second quartz boats 121 to synchronize the unloading during the conveying process of the conveying mechanism 300, so that the production rhythm is more compact and the production efficiency is improved.

[0121] Alternatively, in some embodiments, in the state that the conveying mechanism 300 conveys one of the first quartz boats 111 or one of the second quartz boats 121, the loading and unloading device 600 loads other empty first quartz boats 111 or other empty second quartz boats 121 to synchronize the loading during the conveying process of the conveying mechanism 300, so that the production rhythm is more compact and the production efficiency is improved.

[0122] The following are specific production steps in some embodiments:

[0123] The buffer device 100 sets two first lifting assemblies 210 and two second lifting assemblies 220, two empty first quartz boats 111 are respectively carried on the two first lifting assemblies 210, and two empty second quartz boats 121 are respectively carried on the two second lifting assemblies 220. The loading and unloading device loads the first quartz boats 111 and the second quartz boats 121 relatively close to the material transfer area 130. When the first quartz boats 111 relatively close to the material transfer area 130 are full, the first conveying assembly 310 conveys the first quartz boats 111 to the material transfer area 130, and the loading device 500 conveys the first quartz boats 111 into the process device 400. When the second quartz boats 121 relatively close to the material transfer area 130 are full, the second conveying assembly 320 conveys the second quartz boats 121 to the material transfer area 130, and the loading device 500 conveys the second quartz boats 121 into the process device 400. After the process device 400 completes processing, the second quartz boats 121 and the first quartz boats 111 respectively return to the corresponding second lifting assemblies 220 and the first lifting assemblies 210 in the original way, and the loading and unloading device 600 unloads the processed silicon wafers on the second quartz boats 121 and the second quartz boats 121.

[0124] At the same time, it is detected whether the first quartz boats 111 and the second quartz boats 121 relatively far from the material transfer area 130 are full. In the full state, the first quartz boats 111 and the second quartz boats 121 relatively close to the material transfer area 130 are lifted to avoid interference. Subsequently, the loading action is repeated, and the first quartz boats 111 and the second quartz boats 121 relatively far from the material transfer area 130 are sequentially conveyed into the process device 400 for processing. After processing is completed, it is detected whether the first quartz boats 111 and the second quartz boats 121 relatively close to the material transfer area 130 are lowered by the lifting mechanism 200. If the first quartz boats 111 and the second quartz boats 121 relatively close to the material transfer area 130 are in the lowered interference state, the first quartz boats 111 and the second quartz boats 121 relatively close to the material transfer area 130 are lifted to avoid interference, and the second quartz boats 121 and the first quartz boats 111 originally relatively far from the material transfer area 130 are sequentially reset to the corresponding second lifting assemblies 220 and the first lifting assemblies 210.

[0125] The above process is repeated to realize the cyclic processing of the two groups of first quartz boats 111 and second quartz boats 121.

[0126] The above describes the embodiments of the present application in detail in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A cache device, characterized by The application relates to a buffer device for a process equipment, comprising: a first boat holder for carrying a first quartz boat; a second boat holder for carrying a second quartz boat; a lifting mechanism comprising a plurality of first lifting assemblies and a plurality of second lifting assemblies, each of the first lifting assemblies being capable of carrying and lifting the first boat holder in a first direction, the first lifting assemblies being arranged in sequence in a second direction perpendicular to the first direction, each of the second lifting assemblies being capable of carrying and lifting the second boat holder in the first direction, the second lifting assemblies being arranged in sequence in the second direction, the first lifting assemblies and the second lifting assemblies being spaced apart in the second direction, and a material transfer area being defined between adjacent first lifting assemblies and second lifting assemblies for the first boat holder and the second boat holder to transfer materials; a conveying mechanism comprising a first conveying assembly and a second conveying assembly, the first conveying assembly being used for carrying the first boat holder and being capable of moving in the second direction to correspond to the first lifting assemblies and the material transfer area, the second conveying assembly being used for carrying the second boat holder and being capable of moving in the second direction to correspond to the second lifting assemblies and the material transfer area, the conveying mechanism further comprising a guide rail extending in the second direction, the first conveying assembly and the second conveying assembly being connected to the guide rail and being capable of moving along the guide rail; the lifting mechanism comprises a plurality of fixing frames and lifters, the fixing frames are provided with a plurality of connecting portions, the lifters comprise driving members and abutting members, the driving members are connected to the abutting members, and the driving members are used for driving the abutting members to move in a first direction; the first lifting assemblies comprise a plurality of the lifters, the first conveying assembly is provided with the lifters on both sides in a third direction, the abutting members of the lifters of the first conveying assembly are used for abutting against the first boat holder, each of the lifters on the same side of the first conveying assembly in the third direction is connected to each of the connecting portions of the same fixing frame, and the third direction, the second direction and the first direction are perpendicular to each other; and / or, the second lifting assemblies comprise a plurality of the lifters, the second conveying assembly is provided with the lifters on both sides in the third direction, the abutting members of the lifters of the second conveying assembly are used for abutting against the second boat holder, and each of the lifters on the same side of the second conveying assembly in the third direction is connected to each of the connecting portions of the same fixing frame.

2. The cache apparatus according to claim 1, wherein, The first boat holder and the second boat holder each have a set carrying length, and the carrying length of the first boat holder is greater than that of the second boat holder.

3. A production system for the preparation of solar cells, characterized in that The application further relates to a process equipment for processing silicon wafers carried by the first quartz boat and the second quartz boat, and a buffer device as claimed in claim 1 or 2. The application further relates to a loading and unloading device for loading or unloading the silicon wafers to the first quartz boat or the second quartz boat lifted by the lifting mechanism. ​ ​ A loading device is used to load the first quartz boat or the second quartz boat located in the material transfer area into the process equipment.

4. A method of processing, based on the production system of claim 3, characterized in that, The method comprises the following steps: According to the loading length of the process equipment, a first quartz boat and a second quartz boat are prepared for loading silicon wafers; The first quartz boat is cached in the first lifting assembly, and the second quartz boat is cached in the second lifting assembly; The conveying mechanism and the loading device are matched to sequentially convey the first quartz boat and the second quartz boat into the process equipment; The process equipment simultaneously processes the silicon wafers carried by the first quartz boat and the second quartz boat; The second quartz boat and the first quartz boat are sequentially taken out.

5. The method of claim 4, wherein, The step of caching the first quartz boat in the first lifting assembly and caching the second quartz boat in the second lifting assembly further comprises the following steps: The conveying mechanism and the loading device are matched to sequentially convey the first quartz boat and the second quartz boat into the process equipment; The step of sequentially caching a plurality of first quartz boats in the first lifting assemblies and a plurality of second quartz boats in the second lifting assemblies further comprises the following steps: One of the first quartz boats and one of the second quartz boats are sequentially conveyed into the process equipment.

6. The method of claim 5, wherein, The step of sequentially conveying one of the first quartz boats and one of the second quartz boats into the process equipment further comprises the following steps: Whether there is a full first quartz boat and a full second quartz boat is sequentially detected; If there is a full first quartz boat, one of the full first quartz boats is selected to be conveyed into the process equipment; If there is a full second quartz boat, one of the full second quartz boats is selected to be conveyed into the process equipment.

7. The method of claim 6, wherein, The step of selecting one of the full first quartz boats to be conveyed into the process equipment further comprises the following steps: Before the first conveying assembly carries the full first quartz boat to the material transfer area, it is detected whether there is an interfering other first quartz boat in the conveying path of the first conveying assembly; If there is an interfering other first quartz boat, the first lifting assembly lifts the interfering first quartz boat; The step of selecting one of the full second quartz boats to be conveyed into the process equipment further comprises the following steps: Before the second conveying assembly carries the full second quartz boat to the material transfer area, it is detected whether there is an interfering other second quartz boat in the conveying path of the second conveying assembly; If there is an interfering other second quartz boat, the second lifting assembly lifts the interfering second quartz boat.

8. The method of claim 5, wherein, The step of sequentially taking out the second quartz boat and the first quartz boat further comprises the following steps: Before the second conveying assembly carries the taken-out second quartz boat from the material transfer area to the empty second lifting assembly, it is detected whether there is another interfering second quartz boat in the conveying path of the second conveying assembly; If there is the second quartz boat interfering, the second lifting assembly corresponding to the second lifting assembly is lifted to interfere with the second quartz boat; Detecting the position of the first lifting assembly with no load, the first conveying assembly is carried by the material transfer area to unload the first quartz boat in front of the first lifting assembly with no load, detecting whether there is other interfering first quartz boat in the conveying path of the first conveying assembly; If there is the first quartz boat interfering, the first lifting assembly corresponding to the first lifting assembly is lifted to interfere with the first quartz boat.

9. The method of claim 5, wherein, The steps of buffering a plurality of first quartz boats in each first lifting assembly and buffering a plurality of second quartz boats in the second lifting assembly further comprise the following steps: starting or ending with the material transfer area, arranging and buffering each first quartz boat in each first lifting assembly, and arranging and buffering each second quartz boat in each second lifting assembly; The step of sequentially conveying one of the first quartz boats and one of the second quartz boats into the process equipment further comprises the following steps: selecting the first quartz boats and the second quartz boats with the same arrangement order to be sequentially conveyed into the process equipment.

10. The method of claim 5, wherein, In the state that the conveying mechanism conveys one of the first quartz boats or one of the second quartz boats, the loading and unloading device unloads other full first quartz boats or other full second quartz boats; or, in the state that the conveying mechanism conveys one of the first quartz boats or one of the second quartz boats, the loading and unloading device loads other empty first quartz boats or other empty second quartz boats.

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