Optical measuring equipment, optical measuring method and related devices

By abolishing the fiber coupling point and fiber optic ring in the optical measurement equipment for laser processing, and directly using spectroscopes and photoelectric sensors for light intensity signal acquisition, the problem of interference introduced by optical jitter is solved, and the defocus accuracy of the laser welding system is improved and laser processing accuracy.

CN118032287BActive Publication Date: 2025-02-18GUANGZHOU DILIGINE PHOTONICS CO LTD
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Patent Information

Application Number
CN202410167157.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-02-06
Publication Date
2025-02-18
Estimated Expiration
2044-02-06

AI Technical Summary

Technical Problem

During laser processing based on laser confocal measurement method, the interference signal introduced by the jitter of the optical fiber causes inaccurate light intensity signals detected by the photoelectric sensor, which in turn affects the defocus accuracy of the laser welding system.

Method used

An optical measurement device was designed to cancel the optical fiber coupling point and the fiber ring, and directly use a spectroscope and photoelectric sensor to collect light intensity signals, avoiding the jitter interference of the optical fiber and improving the accuracy of the optical intensity signals.

Benefits of technology

Through this method, the defocusing accuracy of the laser welding system is significantly improved, errors are reduced, and the accuracy and reliability of laser processing are improved.

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Abstract

The embodiment of the present application discloses an optical measuring device, a defocus measurement method and a related device, the optical measuring device includes: a first lens, a second lens, a plane mirror, a variable focal length element, a first collimating element, a spectroscope and a photoelectric sensor; the light beam emitted by the light source passes through the second lens after passing through the spectroscope, the variable focal length element and the first collimating element, wherein the first collimating element collimates the light beam into a first parallel light, the second lens focuses the first parallel light on the plane mirror, the first lens collimates the light passing through the plane mirror into a second parallel light, and the second parallel light is converged to the surface of the object to be measured through the optical convergence element of the laser head or an optical convergence element independent of the laser head; the light source measurement light reflected from the surface of the object to be measured enters the optical measuring device in reverse through the optical convergence element, and passes through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the spectroscope to the photoelectric sensor. It is beneficial to improve the accuracy of the measured defocus amount.
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Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular to an optical measurement device, an optical measurement method and related apparatus. Background Art

[0002] In recent years, laser processing has been used by more and more processing companies and has become a standard method in manufacturing workpieces. Laser confocal measurement methods are widely used in laser processing defocus detection due to their advantages such as high precision and high resolution.

[0003] Based on the principle of laser confocal measurement method Figure 1 As shown, the light source 30 passes through the third optical fiber 43 to the fiber circulator 28, and then passes through the second optical fiber 42 and the fiber coupling point 27 to the laser zoom module 80 to generate a laser beam 70. The laser beam 70 is collimated into parallel light after passing through the first collimating element 22. The parallel light passes through the variable focal length element 21 to the second lens 23a, and the laser beam is focused on the plane mirror 24 by the second lens 23a, and then re-collimated by the first lens 23b, and is focused and acts on the surface of the workpiece through the return lens 12 and the optical convergence element 13 in the laser head. The laser is reflected on the surface of the workpiece, and the reflected light enters the laser zoom module 80 through the optical convergence element 13 and the return lens 12, and is converged to the fiber coupling point 27 through the first lens 23b, the plane mirror 24, the second lens 23a, the variable focal length element 21 and the first collimating element 22 in the laser zoom module 80, and is transmitted to the photoelectric sensor 26 through the second optical fiber 42, the fiber circulator 28 and the first optical fiber 41. When determining the working distance of the laser welding system, the focal length of the laser zoom module 80 is adjusted within the range of the minimum focal length and the maximum focal length. When the laser focus is located on the surface of the workpiece, the light intensity amplitude of the light signal detected by the photoelectric sensor 26 is the largest. At this time, the working distance of the laser welding system is the distance between the laser head and the surface of the object to be measured.

[0004] In the above process, due to the jitter of the second optical fiber 42 and / or the first optical fiber 41, interference signals are introduced, resulting in inaccurate light intensity signals detected by the photoelectric sensor 26, thereby causing inaccurate defocus value of the laser welding system to be determined. Summary of the invention

[0005] The present application proposes an optical measurement device, an optical measurement method and related apparatus, which are beneficial to improving the accuracy of the measured defocus amount.

[0006] This application is implemented using the following technical solutions.

[0007] In a first aspect, an embodiment of the present application provides an optical measuring device, comprising: a variable focal length module, a measuring module and a light source, wherein the variable focal length module comprises a first lens, a second lens, a plane mirror, a variable focal length element and a first collimating element; the measuring module comprises a spectroscope and a photoelectric sensor;

[0008] The light beam emitted by the light source passes through the second lens after passing through the beam splitter, the variable focal length element, and the first collimating element, wherein the first collimating element collimates the light beam into a first parallel light, the second lens focuses the first parallel light on the plane mirror, the first lens collimates the light passing through the plane mirror into a second parallel light, and the second parallel light is converged to the surface of the object to be measured through the optical convergence element of the laser head or an optical convergence element independent of the laser head; the measurement light of the light source reflected from the surface of the object to be measured enters the optical measuring device in reverse through the optical convergence element, and passes through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the beam splitter to the photoelectric sensor.

[0009] It can be seen that compared with the existing technology, the measurement module does not include a fiber optic coupling point and a fiber optic circulator, so there is no need to introduce a fiber optic connection, thereby avoiding the introduction of interference signals due to the jitter of the optical fiber, resulting in the light intensity signal detected by the photoelectric sensor being inaccurate, thereby improving the accuracy of the subsequent defocus amount determined based on the light intensity value.

[0010] In combination with the first aspect, in a possible implementation, the variable focal length element and the first collimating element are located between the beam splitter and the second lens, wherein the variable focal length element is before the first collimating element, or the collimating element is before the variable focal length element. In other words, the position of the variable focal length element and the position of the first collimating element are interchangeable. Through this arrangement, the optical elements in the optical measuring device are made more compact, and the volume of the optical measuring device is reduced.

[0011] In combination with the first aspect, in a possible implementation manner, the beam splitter is one or more of a plane mirror, a beam splitter prism, an intensity beam splitter, or a polarization beam splitter.

[0012] In combination with the first aspect, in a possible implementation manner, the variable focal length element is a liquid lens.

[0013] In combination with the first aspect, in a possible implementation, the first lens and the second lens are convex lenses with the same focal length, the distance between the first lens and the second lens is within a distance range, the difference between the upper limit of the distance range and twice the focal length of the first lens is less than a preset value, and the difference between twice the focal length of the first lens and the lower limit of the distance range is less than the preset value. In other words, the distance between the first lens and the second lens can be twice the focal length of the first lens, or slightly greater than twice the distance between the first lens and the second lens, or slightly less than twice the distance between the first lens and the second lens. The focal point of the first lens and / or the second lens is set between the two side surfaces of the plane mirror.

[0014] In a second aspect, an embodiment of the present application provides an optical measurement method, an industrial control computer. The industrial control computer performs the following operations:

[0015] Acquire a first light intensity value, a second light intensity value, and a third light intensity value, wherein the first light intensity value and the second light intensity value are light intensity values ​​collected by the photoelectric sensor after the light source is reflected by the left and right planes of the plane mirror in the optical measuring device as described in any one of the first aspects, and the third light intensity value is a light intensity value collected by the photoelectric sensor in the variable focal length module measured by the optical measuring device as described in any one of the first aspects after the light source is irradiated to the surface of the object to be measured by the optical measuring device as described in any one of the first aspects; acquire a first distance and a second distance, and determine the third distance based on the third light intensity value and a table of light intensity value and distance relationship, the first distance being the distance between the left plane of the plane mirror and the reference object, the second distance being the distance between the right plane of the plane mirror and the reference object, and the third distance being the distance between the imaging point of the first lens and the reference object when the focal length of the liquid lens changes, wherein the imaging point of the first lens is the corresponding point of the optical image of the focusing point where the second parallel light converges to the surface of the object to be measured; determine the distance between the light source and the reference object based on the first distance, the second distance, and the third distance. Figure 2a or Figure 2b When the optical measuring device and the laser head shown are incident on the surface of the object to be measured, the distance between the focus of the optical converging element and the surface of the object to be measured.

[0016] The distance between the focus of the optical convergence element and the surface of the object to be measured is the defocus amount of the laser head when the laser head processes the surface of the object to be measured.

[0017] By measuring the light intensity value obtained by the optical measuring device proposed in any one of the first aspects, the accurate first distance, second distance and third distance can be obtained, and the accurate defocus amount can be obtained based on the accurate first distance, second distance and third distance.

[0018] Optionally, the reference object is a light source, a principal surface of the first lens, a principal surface of the second lens, or other devices in the optical measuring device described in the first aspect.

[0019] In conjunction with the second aspect, in a possible implementation, the defocus amount of the laser head is Among them, S1 and S2 are the first distance and the second distance respectively, S is the third distance; 2L is the distance between the left and right planes of the plane mirror imaged in the optical system composed of the optical convergence element, the first lens and the optical convergence element.

[0020] In conjunction with the second aspect, in a possible implementation manner, the method of this embodiment further includes:

[0021] Before laser processing, the industrial control computer compares the defocus of the laser head with the standard defocus range. If the defocus of the laser head is within the standard defocus range, the defocus of the laser head is determined to be used to process the object to be measured; if the defocus of the laser head is not within the standard defocus range, the industrial control computer adjusts the distance between the laser head and the surface of the object to be measured until the defocus of the laser head is within the standard defocus range.

[0022] Before laser processing the workpiece, focus measurement is performed to determine whether the defocus amount of the laser head is qualified. If the measurement result is qualified, laser processing is performed. If the measurement result is unqualified, the height position of the laser head or the standard part to be measured is adjusted until the defocus amount measurement result is qualified, and then laser processing is performed. This can effectively avoid the occurrence of unqualified laser processing quality due to unqualified defocus amount.

[0023] In conjunction with the second aspect, in a possible implementation manner, the method of this embodiment further includes:

[0024] The industrial control computer obtains a reference electrical signal, which is an electrical signal corresponding to the light signal radiated by the standard parts with qualified processing quality during processing; the industrial control computer obtains multiple electrical signals corresponding to the light signal radiated by the standard parts when the standard parts are processed under multiple determined first defocus amounts, and the multiple electrical signals correspond to the multiple determined first defocus amounts. The industrial control computer obtains multiple second defocus amounts from the multiple determined first defocus amounts based on the multiple electrical signals and the reference electrical signal, and the second defocus amount is the defocus amount in which the corresponding electrical signal in the multiple determined first defocus amounts matches the reference electrical signal; the industrial control computer determines a standard defocus amount range based on the multiple second defocus amounts, and the upper and lower limits of the standard defocus amount range are the maximum and minimum values ​​among the multiple second defocus amounts.

[0025] In a third aspect, an embodiment of the present application provides an industrial control computer, comprising an acquisition unit and a determination unit. The acquisition unit and the determination unit are used to implement any method provided in the second aspect.

[0026] In a fourth aspect, an embodiment of the present application provides an industrial control computer, comprising: a processor, the processor is connected to a memory, the memory is used to store a computer program, and the processor is used to execute the computer program stored in the memory, so that the industrial control computer executes a method as provided in any one of the second aspects.

[0027] In a fifth aspect, an embodiment of the present application provides an optical measurement system, comprising a laser head, an optical measurement device as described in any one of the first aspect, and an industrial control computer, wherein the industrial control computer is used to execute a method as provided in any one of the second aspect.

[0028] In a sixth aspect, an embodiment of the present application provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and the computer program enables a computer to execute a method as provided in any one of the second aspects.

[0029] In a seventh aspect, an embodiment of the present application provides a computer program product, which includes a non-transitory computer-readable storage medium storing a computer program, and the computer is operable to cause the computer to execute the method described in the second aspect.

[0030] It can be understood that the industrial control computer described in the third and fourth aspects, the laser processing control system described in the fifth aspect, the computer storage medium described in the sixth aspect, or the computer program product described in the seventh aspect are all used to implement any method provided in the first aspect. Therefore, the beneficial effects that can be achieved can refer to the beneficial effects in the corresponding methods, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 Schematic diagram of the principle of laser confocal measurement method.

[0033] Figure 2a A schematic diagram of a system structure provided in an embodiment of the present application.

[0034] Figure 2b Another schematic diagram of a system structure provided for an embodiment of the present application.

[0035] Figure 3a A schematic diagram of a light intensity signal collected by a photoelectric sensor.

[0036] Figure 3b Schematic diagram of another light intensity signal collected by the photoelectric sensor.

[0037] Figure 4 A schematic flow chart of an optical measurement method provided in an embodiment of the present application.

[0038] Figure 5 Another schematic diagram of a system structure provided for an embodiment of the present application.

[0039] Figure 6 A structural schematic diagram of an industrial control computer is provided for an embodiment of the present application.

[0040] Figure 7 A structural schematic diagram of another industrial control computer is provided for the embodiment of the present application. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The singular forms of "a", "said" and "the" used in the embodiments of the present application, the accompanying drawings and the claims are also intended to include plural forms, unless the context clearly indicates other meanings. It should be understood that the term "and / or" used in this article is only a kind of association relationship describing the associated objects, indicating that there can be three relationships, for example, A and / or B, which can be represented by: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are an "or" relationship. It should be understood that although the terms "first", "second" and similar words may be used in the embodiments of the present application, they do not represent any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one" or "one" do not represent quantity restrictions, but represent the existence of at least one. The "multiple" involved in the embodiments of the present application refers to greater than or equal to two.

[0043] See also Figure 2a , Figure 2a A schematic diagram of a system structure provided in an embodiment of the present application. Figure 2a As shown, the system includes a laser head 10 , an optical measuring device 20 and an industrial computer 40 .

[0044] The laser head 10 includes a second collimating element 11, a folding lens 12 and an optical convergence element 13. Optionally, the laser head 10 also includes a galvanometer. Figure 2a or Figure 2b By introducing a galvanometer into the laser head, it is possible to ensure that the defocus amount is the defocus amount corresponding to the processing part during processing, thereby ensuring the processing quality pass rate of the processing part. And due to the flexibility of the galvanometer, it is not only possible to measure the defocus amount corresponding to the part, but also the defocus amount corresponding to the processing part.

[0045] The optical measuring device 20 includes a variable focal length module 50, a measuring module 60 and a light source 30. It is understood that the light source 30 may be a laser light source or an LED light source.

[0046] Optional, such as Figure 2a As shown, the measuring module 60 includes a spectroscope 25 and a photoelectric sensor 26, or as shown in Figure 2b As shown, the measuring module 60 includes a fiber coupling point 27, a fiber circulator 28 and a photoelectric sensor 26. The variable focal length module 50 includes a first lens 23b, a second lens 23a, a plane mirror 24, a variable focal length element 21 and a first collimating element 22. Among them, the first lens 23b and the second lens 23a can change the magnification of the light beam. The plane mirror 24 has a certain transmission and reflection ratio. The focal length change of the variable focal length element 21 is controllable and periodic.

[0047] In one example, the first lens 23 b and the second lens 23 a are both double cemented achromatic lenses with a focal length of 19 mm and a beam magnification of 1.

[0048] In one example, the plane mirror 24 is a non-coated quartz glass flat plate, with a reflectivity of 4% on both sides, and a thickness of 1.5 mm.

[0049] In one example, the plane mirror 24 is located between the first lens 23b and the second lens 23a, the first collimating element 22 is located between the second lens 23a and the variable focal length element 21, and the variable focal length element 21 is located between the first collimating element 22 and the measuring module 60. Specifically, as Figure 2a The measuring module 60 shown includes a beam splitter 25 and a photoelectric sensor 26, and the variable focal length element 21 is located between the first collimating element 22 and the measuring module 60. Specifically, the variable focal length element 21 is located between the first collimating element 22 and the beam splitter 25. Figure 2bThe measurement module 60 shown includes a fiber coupling point 27, a fiber circulator 28, and a photoelectric sensor 26. The variable focal length element 21 is located between the first collimating element 22 and the measurement module 60, which specifically means that the variable focal length element 21 is located between the first collimating element 22 and the fiber circulator 28. Compared with the prior art in which the variable focal length element 21 is located between the first collimating element 22 and the second lens 23a, the variable focal length element 21 is arranged between the first collimating element 22 and the measurement module 60, so that the optical elements in the optical measurement device 20 are more compact, which is conducive to reducing the volume of the optical measurement device 20. In addition, compared with the prior art, the measurement module 60 does not include the fiber coupling point 27 and the fiber circulator 28, so there is no need to introduce a fiber connection, thereby avoiding the introduction of interference signals due to the jitter of the optical fiber, resulting in the occurrence of an inaccurate light intensity signal detected by the photoelectric sensor 26, thereby improving the accuracy of the subsequent defocus amount determined based on the light intensity value.

[0050] In one example, the variable focal length element 21 is a liquid lens. The focal length of the liquid lens is adjustable and is related to the magnitude of the input current.

[0051] Optionally, the plane mirror 24 is a plane mirror, a beam splitter prism, an intensity beam splitter, a polarization beam splitter or other optical devices, which are not limited here.

[0052] Optionally, the optical measuring device 20 further includes a light source 30 .

[0053] like Figure 2a As shown, the light beam emitted by the light source 30 passes through the second lens 23a after passing through the beam splitter 25, the variable focal length element 21, and the first collimating element 22. The first collimating element 22 collimates the light beam into a first parallel light. The second lens 23a focuses the first parallel light on the plane mirror 24. After the first lens 23b collimates the light passing through the plane mirror 24 into a second parallel light, the second parallel light is focused onto the surface of the object to be measured through the optical convergence element 13 in the laser head 10 or an optical convergence element 13 independent of the laser head. It can be understood that the optical convergence element 13 can be a focusing lens or a lens group.

[0054] The light source measurement light reflected by the surface of the object to be measured enters the optical measurement device 20 in reverse direction through the optical convergence element 13, and passes through the first lens 23b, the plane mirror 24, the second lens 23a, the first collimating element 22, the variable focal length element 21 and the beam splitter 25 to the photoelectric sensor 26.

[0055] like Figure 2bAs shown, the laser beam emitted by the light source 30 enters the variable focal length module 50 through the optical fiber circulator 28 and the optical fiber coupling point 27, and then passes through the variable focal length element 21 in the variable focal length module 50 to the first collimating element 22. The first collimating element 22 collimates the laser beam into a first parallel light, and the second lens 23a focuses the first parallel light on the plane mirror 24. The first lens 23b then collimates the laser beam through the plane mirror 24 into a second parallel light, which is input into the laser head 10. The second parallel light is then focused onto the surface of the object to be measured by the optical converging element 13 in the laser head 10 or an optical converging element independent of the laser head.

[0056] The light source measurement light reflected from the surface of the object to be measured enters the optical measurement device 20 in reverse through the optical convergence element 13, passes through the first lens 23b, the plane mirror 24, the second lens 23a, the first collimating element 22, the variable focal length element 21 to the fiber coupling point 27, and then passes through the fiber circulator 28 to the photoelectric sensor 26.

[0057] for Figure 2a or Figure 2b In the structure shown in FIG. 1 , after the light source 30 emits laser light, the photoelectric sensor 26 will collect two light intensity peaks, which are respectively collected by the photoelectric sensor 26 from the left and right planes of the plane mirror 24 reflecting the laser light. Figure 3a As shown, Figure 3a The light intensity value corresponding to the N point in is collected by the photoelectric sensor 26 from the laser reflected by the left plane of the plane mirror 24; Figure 3a The light intensity value corresponding to point P in is collected by the photoelectric sensor 26 from the laser reflected by the right plane of the plane mirror 24.

[0058] When the focus of the laser head 10 is located on the surface of the object to be measured, the laser reflected by the surface of the object to be measured is collected by the photoelectric sensor 26 to obtain a new light intensity peak value, which is located between the light intensity value corresponding to point N and the light intensity value corresponding to point P in time, such as Figure 3b As shown, the light intensity value corresponding to point S is the new light intensity peak value.

[0059] The industrial computer 40 obtains the light intensity value collected by the photoelectric sensor 26. When the industrial computer 40 obtains the light intensity value corresponding to point S, it determines that the distance between the laser head 10 and the surface of the object to be measured is the working distance of the laser head 10. It should be understood that the working distance of the laser head 10 is the distance between the focus of the laser head 10 and the laser head 10. The industrial computer 40 can also determine the distance between the focus of the optical converging element 13 and the surface of the object to be measured when the light source is incident on the surface of the object to be measured through the optical measuring device 20 based on the light intensity value corresponding to point N, the light intensity value corresponding to point P, and the light intensity value corresponding to point S, that is, the defocus amount of the laser head when the laser head processes the surface of the object to be measured. For the specific process, see Figure 4 The relevant description of the illustrated embodiment will not be repeated here.

[0060] The solution of this application is described in detail below.

[0061] See also Figure 4 , Figure 4 The following is a flow chart of an optical measurement method provided in an embodiment of the present application. Figure 4 As shown, the method includes:

[0062] S401. An industrial control computer obtains a first light intensity value, a second light intensity value, and a third light intensity value.

[0063] The first light intensity value and the second light intensity value are the values ​​of the light source. Figure 2a or Figure 2b The light reflected by the left and right planes of the plane mirror 24 is the light intensity value collected by the photoelectric sensor 26, and the third light intensity value is the light intensity value collected by the photoelectric sensor 26 in the measuring module 60 after the light source passes through the optical measuring device 20 and the laser head 10 to irradiate the surface of the object to be measured, and the light source reflected by the surface of the object to be measured passes through the laser head and the variable focal length module 50.

[0064] In other words, the first light intensity value, the second light intensity value and the third light intensity value are respectively Figure 3b The light intensity value corresponding to point N, the light intensity value corresponding to point P, and the light intensity value corresponding to point S.

[0065] S402: The industrial control computer obtains the first distance and the second distance, and determines the third distance based on the third light intensity value and a corresponding relationship table between the light intensity value and the distance.

[0066] Among them, the first distance is the distance between the left plane of the plane mirror and the reference object, the second distance is the distance between the right plane of the plane mirror and the reference object, and the third distance is the distance between the imaging point of the first lens and the reference object when the focal length of the liquid lens changes, wherein the imaging point of the first lens is the focal point where the second parallel light converges to the surface of the object to be measured and the corresponding point of the optical image.

[0067] Specifically, the industrial computer stores a correspondence table between light intensity values ​​and distances, where the distance refers to the distance between the imaging point of the first lens and the reference object. The industrial computer determines the third distance based on the third light intensity value and the correspondence table between the light intensity value and the distance.

[0068] Optional, reference is Figure 2a or Figure 2b The first lens 23b, the second lens 23a or other devices are not limited here.

[0069] It should be pointed out here that the correspondence table between light intensity values ​​and distances is a correspondence between the third light intensity value set by processing personnel based on historical experience and the distance between the imaging point of the first lens and the reference object.

[0070] S403: The industrial control computer determines the defocus amount of the laser head based on the first distance, the second distance and the third distance.

[0071] Specifically, the industrial computer obtains the target optical path; determines the first value based on the target optical path and the third distance; determines the second value based on the first distance, the second distance and the target optical path; and calculates the defocus amount of the laser head based on the first value, the second value, the first distance and the second distance.

[0072] The target optical path is the distance between the left and right planes of the plane mirror imaged in the optical system composed of the optical converging element 13, the first lens and the folding lens 12. Figure 5 As shown, N' and P' respectively represent the imaging of the left and right planes of the plane mirror in the optical system composed of the optical converging element 13, the first lens and the folding lens 12, and the target optical path is the distance between N' and P', which is indicated by 2L.

[0073] In one example, the defocus amount d of the laser head satisfies the following formula:

[0074]

[0075] Wherein, S1 and S2 are the first distance and the second distance respectively, S is the third distance, 2LS is the first value, L(S1+S2) is the second value, and 2L is the target optical path.

[0076] Since the first distance, the second distance and the third distance are affected by the working temperature, when the working temperature changes, the first distance, the second distance and the third distance increase or decrease at the same time. The denominator in the above formula is set to 2LS-L(S1+S2). When the working temperature changes, 2LS-L(S1+S2) is a relative value and will not change. Therefore, the defocus amount d of the laser head calculated based on the above formula will not change due to temperature changes, thereby ensuring the accuracy of the defocus amount d of the laser head.

[0077] Before laser processing, the defocus amount of the laser head is determined according to the above industrial computer, and the defocus amount of the laser head is compared with the standard defocus amount range; if the defocus amount of the laser head is within the standard defocus amount range, the defocus amount of the laser head is used to process the object to be measured; if the defocus amount of the laser head is not within the standard defocus amount range, the industrial computer adjusts the distance between the laser head and the surface of the object to be measured until the defocus amount of the laser head is within the standard defocus amount range. In one example, the industrial computer sends an instruction message to the terminal device of the processing personnel to instruct the processing personnel to adjust the defocus amount of the laser head. In another example, the industrial computer directly adjusts the defocus amount of the laser head.

[0078] In a possible implementation, the standard defocus range is obtained as follows:

[0079] The industrial control computer obtains a reference electrical signal, which is an electrical signal corresponding to the light signal radiated by a standard part with qualified processing quality during processing; obtains multiple electrical signals corresponding to the light signal radiated by the standard part when the standard part is processed under multiple determined first defocus amounts, the multiple electrical signals correspond to the multiple determined first defocus amounts, and obtains multiple second defocus amounts from the multiple determined first defocus amounts based on the multiple electrical signals and the reference electrical signal, the second defocus amount is the defocus amount in which the corresponding electrical signal in the multiple determined first defocus amounts matches the reference electrical signal; determines a standard defocus amount range based on the multiple second defocus amounts, the upper and lower limits of the standard defocus amount range are the maximum and minimum values ​​among the multiple second defocus amounts.

[0080] Specifically, the industrial computer obtains multiple electrical signals corresponding to the optical signals radiated by multiple standard parts when processing multiple standard parts, and the industrial computer obtains the processing results of the multiple standard parts; the processing results of the multiple standard parts can be determined manually, or the industrial computer can determine the processing results of the standard parts based on the metallographic image of the processed part of the standard parts, or determine the processing results of the standard parts based on the depth and / or width of the molten column corresponding to the processed part. Of course, it can also be determined in other ways, which are not limited here. The processing results include qualified processing quality and unqualified processing quality. Based on the processing results, the industrial computer obtains the electrical signal corresponding to the optical signal radiated by the standard parts with qualified processing quality from the above-mentioned multiple electrical signals, and uses the electrical signal as the reference electrical signal.

[0081] The same standard part is processed by a laser head at multiple determined first defocus amounts respectively, and the industrial computer obtains multiple electrical signals corresponding to the light signals radiated by the standard part when the standard part is processed at multiple determined first defocus amounts; the multiple electrical signals correspond to the multiple determined first defocus amounts. The industrial computer matches the multiple electrical signals with the reference electrical signal respectively to determine whether the processing quality of the standard part is qualified at the multiple determined first defocus amounts; for example, the similarity between the multiple electrical signals and the reference electrical signal is calculated; if the similarity is greater than the similarity threshold, it is determined that the processing quality is qualified. The industrial computer selects multiple second defocus amounts that make the processing quality of the standard part qualified from the multiple determined defocus amounts, and the industrial computer determines the standard defocus amount range based on the multiple second defocus amounts, and the upper and lower limits of the standard defocus amount range are the maximum and minimum values ​​of the multiple second defocus amounts.

[0082] In this way, the focus measurement is performed before laser processing of the workpiece to determine whether the defocus amount of the laser head is qualified. If the measurement result is qualified, laser processing is performed. If the measurement result is unqualified, the height position of the laser head or the standard part to be measured is adjusted until the defocus amount measurement result is qualified, and then laser processing is performed. This can effectively avoid the occurrence of unqualified laser processing quality due to unqualified defocus amount.

[0083] See also Figure 6 , the present application embodiment provides a structural diagram of an industrial control computer. Figure 6 As shown, the industrial computer 600 includes:

[0084] The acquisition unit 601 is used to acquire a first light intensity value, a second light intensity value and a third light intensity value, wherein the first light intensity value and the second light intensity value are the values ​​of the light source after Figure 2a or Figure 2b The light intensity values ​​of the light reflected by the left and right planes of the plane mirror in the optical measuring device shown in the figure are collected by the photoelectric sensor, and the third light intensity value is the light source passing through Figure 2a or Figure 2b After the optical measuring device and laser head shown in the figure irradiate the surface of the object to be measured, the light reflected from the surface of the object to be measured passes through the laser head and Figure 2a or Figure 2b The variable focal length module in the optical measuring device shown in the figure is used to collect the light intensity value of the photoelectric sensor in the measured module; obtain the first distance and the second distance, the first distance is the distance between the left plane of the plane mirror and the reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object;

[0085] The determining unit 602 is used to determine the third distance based on the third light intensity value and the relationship table between the light intensity value and the distance, wherein the third distance is the distance between the imaging point of the first lens and the reference object when the focal length of the liquid lens changes, wherein the imaging point of the first lens is the focal point where the second parallel light converges to the surface of the object to be measured. The light source is determined based on the first distance, the second distance and the third distance. Figure 2a or Figure 2b When the optical measuring device and the laser head shown are incident on the surface of the object to be measured, the distance between the focus of the optical converging element 13 and the surface of the object to be measured.

[0086] The distance between the focus of the optical convergence element 13 and the surface of the object to be measured is the defocusing amount of the laser head when the laser head processes the surface of the object to be measured.

[0087] In a possible implementation, in determining the defocus amount of the laser head based on the first distance, the second distance, and the third distance, the determining unit 602 is specifically configured to:

[0088] Obtain a target optical path, which is the distance between the left and right planes of the plane mirror imaged in the optical system composed of the optical convergence element 13, the first lens and the folding lens 12; determine a first value based on the target optical path and the third distance; determine a second value based on the first distance, the second distance and the target optical path; and calculate the defocus amount of the laser head based on the first value, the second value, the first distance and the second distance.

[0089] Among them, the defocus of the laser head is Among them, S1 and S2 are the first distance and the second distance respectively, S is the third distance; 2L is the distance between the left and right planes of the plane mirror imaged in the optical system composed of the optical convergence element 13, the first lens and the optical convergence element 13.

[0090] In a possible implementation, the determination unit 602 is further configured to, before laser processing, compare the defocus amount of the laser head with a standard defocus amount range by the industrial control computer, and if the defocus amount of the laser head is within the standard defocus amount range, determine to use the defocus amount of the laser head to process the object to be measured;

[0091] Industrial computer 600, also includes:

[0092] The adjustment unit 603 is used for adjusting the distance between the laser head and the surface of the object to be measured by the industrial computer if the defocus amount of the laser head is not within the standard defocus amount range until the defocus amount of the laser head is within the standard defocus amount range.

[0093] In a possible implementation, the acquisition unit 601 is further configured to acquire a reference electrical signal, which is an electrical signal corresponding to an optical signal radiated by a standard part with qualified processing quality during processing; and to acquire multiple electrical signals corresponding to an optical signal radiated by a standard part when the standard part is processed under multiple determined first defocus amounts, wherein the multiple electrical signals correspond to multiple determined first defocus amounts.

[0094] The determination unit 602 is also used to obtain multiple second defocus amounts from multiple determined first defocus amounts based on multiple electrical signals and a reference electrical signal, where the second defocus amount is the defocus amount in which the corresponding electrical signal in the multiple determined first defocus amounts matches the reference electrical signal; and determine a standard defocus amount range based on the multiple second defocus amounts, where the upper and lower limits of the standard defocus amount range are the maximum and minimum values ​​among the multiple second defocus amounts.

[0095] It should be noted that the above-mentioned units (acquisition unit 601, determination unit 602 and adjustment unit 603) are used to execute the relevant steps of the above-mentioned method. The various units or modules in the industrial computer 600 can be separately or completely combined into one or several other units or modules to constitute, or one (some) of the units or modules can be further divided into multiple functionally smaller units or modules to constitute, which can achieve the same operation without affecting the realization of the technical effects of the embodiments of the present invention. The above-mentioned units or modules are divided based on logical functions. In actual applications, the functions of one unit (or module) can also be implemented by multiple units (or modules), or the functions of multiple units (or modules) can be implemented by one unit (or module).

[0096] Based on the description of the above method embodiment and device embodiment, please refer to Figure 7, an embodiment of the present invention also provides a structural schematic diagram of an industrial control computer 700. Figure 7 The industrial computer 700 shown (the industrial computer 700 may be a computer device) includes a memory 701, a processor 702, a communication interface 703 and a bus 704. The memory 701, the processor 702 and the communication interface 703 are connected to each other through the bus 704.

[0097] The memory 701 may be a read-only memory (ROM), a static storage device, a dynamic storage device or a random access memory (RAM).

[0098] The memory 701 can store programs. When the program stored in the memory 701 is executed by the processor 702, the processor 702 and the communication interface 703 are used to execute the various steps of the optical measurement method of the embodiment of the present application.

[0099] The processor 702 can be a general-purpose central processing unit (CPU), a microprocessor, an application-specific integrated circuit (ASIC), a graphics processing unit (GPU) or one or more integrated circuits, which are used to execute relevant programs to implement the functions required to be performed by the units in the industrial control computer 600 of the embodiment of the present application, or to execute the optical measurement method of the method embodiment of the present application.

[0100] Processor 702 can also be an integrated circuit chip with signal processing capability. In the implementation process, each step of the optical measurement method of the present application can be completed by the hardware integrated logic circuit or software instruction in the processor 702. The above-mentioned processor 702 can also be a general-purpose processor, a digital signal processor (Digital Signal Processing, DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (Field Programmable Gate Array, FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The disclosed methods, steps and logic block diagrams in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in conjunction with the embodiments of the present application can be directly embodied as a hardware decoding processor to execute, or the hardware and software modules in the decoding processor are combined and executed. The software module can be located in a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, and other mature storage media in the art. The storage medium is located in the memory 701, and the processor 702 reads the information in the memory 701, and combines its hardware to complete the functions required to be executed by the units included in the industrial control computer 700 of the embodiment of the present application, or executes the optical measurement method of the method embodiment of the present application.

[0101] The communication interface 703 uses a transceiver such as, but not limited to, a transceiver to implement communication between the industrial computer 700 and other devices or a communication network. For example, data can be obtained through the communication interface 703 .

[0102] The bus 704 may include a path for transmitting information between various components of the industrial computer 700 (eg, the memory 701 , the processor 702 , and the communication interface 703 ).

[0103] It should be noted that although Figure 7 The industrial computer 700 shown only shows a memory, a processor, and a communication interface. However, in the specific implementation process, those skilled in the art should understand that the industrial computer 700 also includes other devices necessary for normal operation. At the same time, according to specific needs, those skilled in the art should understand that the industrial computer 700 may also include hardware devices for implementing other additional functions. In addition, those skilled in the art should understand that the industrial computer 700 may also include only the devices necessary for implementing the embodiments of the present application, and does not necessarily include Figure 7 All devices shown in .

[0104] An embodiment of the present application further provides a chip, which includes a processor and a data interface. The processor reads instructions stored in a memory through the data interface to implement the optical measurement method.

[0105] Optionally, as an implementation manner, the chip may further include a memory, in which instructions are stored, and the processor is used to execute the instructions stored in the memory. When the instructions are executed, the processor is used to execute the optical measurement method.

[0106] An embodiment of the present application also provides a computer-readable storage medium, which stores instructions. When the computer-readable storage medium is executed on a computer or a processor, the computer or the processor executes one or more steps in any of the above methods.

[0107] The embodiment of the present application further provides a computer program product including instructions. When the computer program product is executed on a computer or a processor, the computer or the processor executes one or more steps in any of the above methods.

[0108] Those skilled in the art will appreciate that the functions described in conjunction with the various illustrative logic blocks, modules, and algorithm steps disclosed herein can be implemented in hardware, software, firmware, or any combination thereof. If implemented in software, the functions described in the various illustrative logic blocks, modules, and steps can be stored or transmitted as one or more instructions or codes on a computer-readable medium and executed by a hardware-based processing unit. Computer-readable media may include computer-readable storage media, which corresponds to tangible media, such as data storage media, or includes any media (e.g., based on a communication protocol) that facilitates the transfer of a computer program from one place to another. In this manner, computer-readable media may generally correspond to (1) non-temporary tangible computer-readable storage media, or (2) communication media, such as signals or carrier waves. Data storage media may be any available media that can be accessed by one or more computers or one or more processors to retrieve instructions, codes, and / or data structures for implementing the techniques described in this application. A computer program product may include computer-readable media.

[0109] As an example and not limitation, such computer-readable storage media may include RAM, ROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage, flash memory, or any other medium that can be used to store the desired program code in the form of instructions or data structures and can be accessed by a computer. Also, any connection is properly referred to as a computer-readable medium. For example, if instructions are transmitted from a website, server or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital subscriber line (DSL), or wireless technologies such as infrared, radio and microwave, then the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio and microwave are included in the definition of media. However, it should be understood that the computer-readable storage media and data storage media do not include connections, carrier waves, signals or other temporary media, but are actually directed to non-temporary tangible storage media. As used herein, disks and optical disks include compact disks (CDs), laser optical disks, optical optical disks, digital versatile disks (DVDs), and Blu-ray disks, where disks typically reproduce data magnetically, while optical disks reproduce data optically using lasers. Combinations of the above should also be included within the scope of computer-readable media.

[0110] Instructions may be executed by one or more processors, such as one or more digital signal processors (DSPs), general purpose microprocessors, application specific integrated circuits (ASICs), field programmable logic arrays (FPGAs), or other equivalent integrated or discrete logic circuits. Thus, the term "processor" as used herein may refer to any of the aforementioned structures or any other structures suitable for implementing the techniques described herein. Additionally, in some aspects, the functions described by the various illustrative logic blocks, modules, and steps described herein may be provided within dedicated hardware and / or software modules configured for encoding and decoding, or incorporated in a combined codec. Moreover, the techniques may be fully implemented in one or more circuits or logic elements.

[0111] The techniques of the present application may be implemented in a variety of devices or apparatuses, including a wireless handset, an integrated circuit (IC), or a set of ICs (e.g., a chipset). Various components, modules, or units are described in this application to emphasize functional aspects of devices for performing the disclosed techniques, but do not necessarily need to be implemented by different hardware units. In fact, as described above, the various units may be combined in an encoded hardware unit in conjunction with appropriate software and / or firmware, or provided by interoperating hardware units (including one or more processors as described above).

[0112] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the specific descriptions of the corresponding steps in the aforementioned method embodiments, and will not be repeated here.

[0113] It should be understood that in the description of the present application, unless otherwise specified, " / " indicates that the objects associated before and after are in an "or" relationship, for example, A / B can represent A or B; wherein A and B can be singular or plural. Also, in the description of the present application, unless otherwise specified, "multiple" refers to two or more than two. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single items or plural items. For example, at least one of a, b, or c can represent: a, b, c, ab, ac, bc, or abc, wherein a, b, c can be single or multiple. In addition, in order to facilitate the clear description of the technical solutions of the embodiments of the present application, in the embodiments of the present application, the words "first", "second", etc. are used to distinguish the same items or similar items with substantially the same functions and effects. Those skilled in the art can understand that the words "first", "second", etc. do not limit the quantity and execution order, and the words "first", "second", etc. do not limit them to be necessarily different. Meanwhile, in the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a concrete manner for ease of understanding.

[0114] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the division of the unit is only a logical function division, and there may be other division methods in actual implementation, for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. The mutual coupling, direct coupling, or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0115] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0116] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function according to the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium or transmitted through the computer-readable storage medium. The computer instructions can be transmitted from a website site, computer, server or data center to another website site, computer, server or data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (digital subscriber line, DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that contains one or more available media integrations. The available medium may be a read-only memory (ROM), or a random access memory (RAM), or a magnetic medium, such as a floppy disk, a hard disk, a tape, a disk, or an optical medium, such as a digital versatile disc (DVD), or a semiconductor medium, such as a solid state disk (SSD), etc.

[0117] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

[0118] The device embodiments described above are merely illustrative, wherein the units and modules described as separate components may or may not be physically separated. In addition, some or all of the units and modules may be selected according to actual needs to achieve the purpose of the present embodiment. Those of ordinary skill in the art may understand and implement the present invention without creative effort.

[0119] The above is only a specific implementation of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. An optical measuring device, characterized in that: The optical measuring device comprises: a variable focal length module, a measuring module and a light source, wherein the variable focal length module comprises a first lens, a second lens, a plane mirror, a variable focal length element and a first collimating element; the measuring module comprises a spectroscope and a photoelectric sensor; the focus of the first lens and / or the second lens is set between the two side surfaces of the plane mirror; The light beam emitted by the light source passes through the beam splitter, the variable focal length element, the first collimating element, and then passes through the second lens; The first collimating element collimates the light beam into a first parallel light, the second lens focuses the first parallel light on the plane mirror, and after the first lens collimates the light passing through the plane mirror into a second parallel light, the second parallel light is converged onto the surface of the object to be measured through an optical convergence element of the laser head or an optical convergence element independent of the laser head; The light source measurement light reflected from the surface of the object to be measured enters the optical measurement device in reverse through the optical convergence element, and reaches the photoelectric sensor through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the beam splitter.

2. The device according to claim 1, characterized in that The variable focal length element and the first collimating element are located between the beam splitter and the second lens, wherein the variable focal length element is before the first collimating element, or the first collimating element is before the variable focal length element.

3. The device according to any one of claims 1 to 2, characterized in that: The beam splitter is one or more of a plane mirror, a beam splitter prism, an intensity beam splitter or a polarization beam splitter.

4. The device according to any one of claims 1 to 2, characterized in that: The variable focal length element is a liquid lens.

5. The device according to any one of claims 1 to 2, characterized in that: The first lens and the second lens are convex lenses with the same focal length, the distance between the first lens and the second lens is within a distance range, the difference between the upper limit of the distance range and twice the focal length of the first lens is less than a preset value, and the difference between twice the focal length of the first lens and the lower limit of the distance range is less than the preset value.

6. An optical measurement method, characterized in that: include: Acquire a first light intensity value, a second light intensity value, and a third light intensity value, wherein the first light intensity value and the second light intensity value are light intensity values ​​collected by the photoelectric sensor from light reflected by the left and right planes of the plane mirror in the optical measuring device according to any one of claims 1 to 5, and the third light intensity value is a light intensity value collected by the photoelectric sensor in the measuring module from the light reflected by the surface of the object to be measured after the light source passes through the optical measuring device according to any one of claims 1 to 5 and is irradiated to the surface of the object to be measured; Acquire a first distance and a second distance, and determine the third distance based on a third light intensity value and a relationship table between the light intensity value and the distance, wherein the first distance is the distance between the left plane of the plane mirror and the reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object; the third distance is the distance between the imaging point of the first lens and the reference object when the focal length of the variable focal length element changes, wherein the imaging point of the first lens is the optical object image corresponding point where the second parallel light converges to the focusing point of the surface of the object to be measured; The distance between the focus of the optical converging element and the surface of the object to be measured when the light source is incident on the surface of the object to be measured via the optical measuring device and the laser head is determined based on the first distance, the second distance and the third distance.

7. The method according to claim 6, characterized in that The distance between the focus of the optical converging element and the surface of the object to be measured is the defocus amount of the laser head when the surface of the object to be measured is processed by the laser head.

8. The method according to claim 7, characterized in that The defocus of the laser head is Among them, S1 and S2 are the first distance and the second distance respectively, S is the third distance; 2L is the distance between the left and right planes of the plane mirror imaged in the optical system composed of the optical convergence element, the first lens and the optical convergence element.

9. The method according to any one of claims 6 to 8, characterized in that: The method further comprises: Before laser processing, the defocus amount of the laser head is compared with a standard defocus amount range. If the defocus amount of the laser head is within the standard defocus amount range, the defocus amount of the laser head is used to process the object to be measured; If the defocus amount of the laser head is not within the standard defocus amount range, the distance between the laser head and the surface of the object to be measured is adjusted until the defocus amount of the laser head is within the standard defocus amount range.

10. The method according to claim 9, characterized in that The method further comprises: Acquire a reference electrical signal, where the reference electrical signal is an electrical signal corresponding to an optical signal radiated by a standard part having qualified processing quality during processing; Acquire a plurality of electrical signals corresponding to the optical signals radiated by the standard component when the standard component is processed under a plurality of determined first defocus amounts, wherein the plurality of electrical signals correspond to the plurality of determined first defocus amounts, Acquire a plurality of second defocus amounts from the plurality of determined first defocus amounts based on the plurality of electrical signals and the reference electrical signal, wherein the second defocus amounts are defocus amounts whose corresponding electrical signals among the plurality of determined first defocus amounts match the reference electrical signal; The standard defocus amount range is determined based on the plurality of second defocus amounts, and an upper limit and a lower limit of the standard defocus amount range are a maximum value and a minimum value of the plurality of second defocus amounts.

11. An industrial computer, characterized in that: include: An acquisition unit, used for acquiring a first light intensity value, a second light intensity value and a third light intensity value, wherein the first light intensity value and the second light intensity value are light intensity values ​​collected by the photoelectric sensor after the light reflected by the light source via the left and right planes of the plane mirror in the optical measuring device according to any one of claims 1 to 5 is irradiated to the surface of the object to be measured by the optical measuring device according to any one of claims 1 to 5 and the laser head, and the light reflected by the surface of the object to be measured via the laser head and the variable focal length module in the optical measuring device according to any one of claims 1 to 5 is collected by the photoelectric sensor in the measuring module; The acquisition unit is further used to acquire a first distance and a second distance; the first distance is the distance between the left plane of the plane mirror and the reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object; A determination unit is used to determine a third distance based on a third light intensity value and a table of relationships between light intensity values ​​and distances, wherein the third distance is the distance between the imaging point of the first lens and the reference object when the focal length of the variable focal length element changes, wherein the imaging point of the first lens is a focal point where the second parallel light converges onto the surface of the object to be measured and corresponds to the optical object image; and the defocus amount of the laser head is determined based on the first distance, the second distance and the third distance.

12. An industrial computer, characterized in that: It includes a processor, the processor is connected to a memory, the memory is used to store a computer program, and the processor is used to execute the computer program stored in the memory, so that the industrial computer executes the method as described in any one of claims 6-10.

13. An optical measurement system, comprising: A laser head, an optical measuring device as claimed in any one of claims 1 to 5, and an industrial computer, wherein the industrial computer is used to execute the method as claimed in any one of claims 6 to 10.

14. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and the computer program is executed by a processor to implement the method according to any one of claims 6 to 10.

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