A method of coating a rotating target
By using a rotating target coating fixture and ultrasonic coating technology, the problems of poor appearance and molten indium outflow in rotating target coating have been solved, achieving a high-efficiency and low-cost coating process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
- Filing Date
- 2023-12-14
- Publication Date
- 2026-06-02
AI Technical Summary
In existing rotary target coating processes, ceramic targets are easily stressed, leading to poor appearance and a high coating defect rate. Furthermore, molten indium is prone to overflow, increasing workload and cost.
A rotating target coating fixture, including a fixed end ring and a screw, is used in conjunction with ultrasonic coating technology. The target is protected by annular steps and through-hole design to prevent molten indium from flowing out, thus simplifying the operation process.
It effectively reduces coating defect rate and appearance defect rate, reduces cost consumption, improves coating efficiency, and reduces workload.
Smart Images

Figure CN118080287B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of target coating technology and relates to a method for coating a rotating target. Background Technology
[0002] With the increasing market demand for ceramic targets, the output of rotating targets has been increasing year by year. Coating technology is particularly important in the preparation process of rotating targets.
[0003] Currently, the following problems exist in the coating process of rotating targets: (1) In the existing rotating target coating process, ceramic targets are easily subjected to additional forces, resulting in poor target appearance and poor coating, increasing the cost of scrapping rotating targets. (2) In the existing rotating target coating process, molten indium will flow out of the inner circle of the rotating target, requiring staff to check and add indium liquid regularly, resulting in a cumbersome workload for personnel. Summary of the Invention
[0004] In view of the above-mentioned problems in the prior art, the purpose of this invention is to provide a simple and easy-to-operate method for coating rotating targets. This method, in conjunction with a rotating target coating fixture, can effectively reduce the defect rate of rotating targets in the coating process and reduce the cost consumption caused by defective targets.
[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:
[0006] A method for coating a rotating target includes the following steps:
[0007] (1) Clean the rotating target;
[0008] (2) Wipe the surface of the rotating target clean with a cleaning agent;
[0009] (3) Inspect the appearance and dimensions of the rotating target material according to the internal control standards to determine whether it is qualified;
[0010] (4) After the rotating target material passes the inspection, it is clamped using a rotating target material coating fixture;
[0011] (5) Preheat for 2-10 hours, then coat using ultrasonic method with an ultrasonic power of 15-60W;
[0012] The rotating target coating fixture includes two fixed end rings arranged opposite each other and a screw connecting the two fixed end rings. The fixed end rings are circular ring structures, each of which has a through hole for the screw to pass through. The inner sides of the opposite ends of the two circular ring structures are provided with annular steps, and the opposite annular steps form a space for clamping the rotating target.
[0013] Further, in step (2), the cleaning agent is at least one of acetone, alcohol, and isopropanol.
[0014] Furthermore, in step (5), an automatic ultrasonic coating device is used for coating.
[0015] Furthermore, the number of layers in a circular staircase is greater than or equal to 1, and the two circular staircases have the same number of layers and correspond one-to-one.
[0016] More preferably, the outer diameter and inner diameter of the corresponding single-layer annular steps are the same; the corresponding single-layer annular steps form a space for accommodating rotating targets of the appropriate size.
[0017] Furthermore, the outer diameter of each annular step is the same as the outer diameter of the rotating target being clamped, and the inner diameter of each annular step is smaller than the inner diameter of the rotating target being clamped.
[0018] Furthermore, the through hole is located near the outer circumferential edge of the annular structure, and a distance is left between the through hole and the annular step. That is, the through hole is located away from the annular step along the outer circumference of the annular structure.
[0019] Furthermore, each fixed end ring is provided with at least three through holes.
[0020] More preferably, the through holes are evenly distributed circumferentially along the fixed end.
[0021] Furthermore, the screw is made of a rigid material. More preferably, it is made of carbon steel, alloy steel, or stainless steel.
[0022] Furthermore, the fixing end ring is made of a soft material. More preferably, it is made of silicone, fluororubber, polytetrafluoroethylene, or butyl rubber.
[0023] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0024] The rotating target coating method of the present invention has a simple process and is easy to operate. When used with a rotating target coating fixture, this method can effectively reduce the defect rate of rotating targets in the coating process and reduce the cost consumption caused by defective targets.
[0025] The rotating target coating fixture of the present invention protects the rotating target during the coating process, preventing molten indium from flowing out of the inner circle of the rotating target, reducing the workload of the coating process and improving the coating efficiency. Attached Figure Description
[0026] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:
[0027] Figure 1 This is a schematic diagram of the structure of the rotating target coating fixture of the present invention. Figure 1 .
[0028] Figure 2 This is a schematic diagram of the structure of the rotating target coating fixture of the present invention. Figure 2 .
[0029] Figure 3 This is a schematic diagram of the structure of the rotating target coating fixture of the present invention. Figure 3 .
[0030] Figure 4 This is a process flow diagram for the rotary target coating process.
[0031] in:
[0032] 1—Fixed end ring, 2—Screw, 3—Through hole, 4—Annular step, 5—Rotating target. Detailed Implementation
[0033] To facilitate understanding of the present invention, the present invention will be described more fully and in detail below with reference to the accompanying drawings and preferred embodiments, but the scope of protection of the present invention is not limited to the following specific embodiments.
[0034] Unless otherwise defined, all technical terms used herein have the same meaning as commonly understood by those skilled in the art. The technical terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the scope of the invention.
[0035] Example 1
[0036] like Figures 1-3 As shown, this embodiment provides a rotating target coating fixture, including two fixed end rings 1 arranged opposite each other and a screw 2 connecting the two fixed end rings 1. The fixed end rings 1 are circular ring structures, each of which is provided with a through hole 3 for the screw 2 to pass through. The inner side of the opposite ends of the two circular ring structures is provided with annular steps 4, and the opposite annular steps 4 form a receiving space for clamping the rotating target 5.
[0037] In this embodiment, the annular step 4 has one layer, and its outer and inner diameters are the same. The outer diameter of this layer of the annular step 4 is the same as the outer diameter of the clamped rotating target 5, while the inner diameter of this layer of the annular step 4 is smaller than the inner diameter of the clamped rotating target 5. After clamping, this dimensional setting prevents molten indium from flowing out of the inner circle of the rotating target.
[0038] In this embodiment, the through hole 3 is located near the outer circumferential edge of the annular structure, and a distance is left between the through hole 3 and the annular step 4 so that the screw 2 will not pass through the receiving space during assembly. Each fixed end ring 1 is provided with at least three through holes 3, and the through holes 3 are evenly distributed along the circumference of the fixed end ring 1.
[0039] In this embodiment, the screw 2 is made of a rigid material, which can be carbon steel, alloy steel or stainless steel.
[0040] In this embodiment, the fixing end ring 1 is made of a soft material. It can be made of silicone, fluororubber, polytetrafluoroethylene, or butyl rubber.
[0041] Example 2
[0042] See Figure 4 This embodiment provides a rotary target coating process, including the following steps:
[0043] (1) After the rotating target is finished, clean it. Use cleaning tools to clean the surface. Brush the same position 1 to 4 times and rinse it in warm water at 20 to 50 degrees Celsius to ensure that there is no residue of slurry and oil on the surface.
[0044] (2) After cleaning, wipe the surface water stains and other dirt with cleaning agents (such as acetone, alcohol, isopropanol, etc.), and check and test the appearance and dimensions of the rotating target according to the internal control standards (i.e. the corresponding drawings) to determine whether it is qualified.
[0045] (3) After the rotating target material passes the inspection, the rotating target material coating fixture in Example 1 is used for installation. During installation, check whether the fixture and the rotating size are compatible and take care to avoid collision between the fixture and the rotating target during installation. After installation, check whether the fixture is installed correctly and whether the fixture plays a protective role for the target material. Check whether the fixture is fixed properly and whether there is no relative displacement between the fixture and the rotating target material.
[0046] (4) Preheat for 2 to 10 hours, then apply using ultrasonic method with an ultrasonic power of 15 to 60W.
[0047] (5) Coating completed.
[0048] Example 3
[0049] The rotary target coating process of Example 2 was used to coat 200 pieces of rotary target material, including the following steps:
[0050] (1) After the rotating target is finished, clean it. Use cleaning tools to clean the surface. Brush the same position 1 to 4 times and rinse it in warm water at 20 to 50 degrees Celsius to ensure that there is no residue of slurry and oil on the surface.
[0051] (2) After cleaning, wipe the surface water stains and other dirt with alcohol, and check and test the appearance and dimensions of the rotating target according to the corresponding drawings to determine whether it is qualified.
[0052] (3) After the rotating target material passes the inspection, the rotating target material coating fixture in Example 1 is used for installation. During installation, check whether the fixture and the rotating size are compatible and take care to avoid collision between the fixture and the rotating target during installation. After installation, check whether the fixture is installed correctly and whether the fixture plays a protective role for the target material. Check whether the fixture is fixed properly and whether there is no relative displacement between the fixture and the rotating target material.
[0053] (4) Preheat for 6 hours and apply using ultrasonic method with an ultrasonic power of 37.5W.
[0054] (5) Coating completed.
[0055] A total of 200 pieces were tested in this experiment. Among them, 10 pieces had poor coating, with a coating defect rate of 5%, and 8 pieces had poor target appearance (such as edge chipping and corner chipping), with an appearance defect rate of 4%.
[0056] Comparative Example 1
[0057] Coating 200 pieces of rotating targets includes the following steps:
[0058] (1) After the rotating target is finished, clean it. Use cleaning tools to clean the surface. Brush the same position 1 to 4 times and rinse it in warm water at 20 to 50 degrees Celsius to ensure that there is no residue of slurry and oil on the surface.
[0059] (2) After cleaning, wipe the surface water stains and other dirt with alcohol, and check and test the appearance and dimensions of the rotating target according to the corresponding drawings to determine whether it is qualified.
[0060] (3) Preheat for 6 hours and apply using ultrasonic method with an ultrasonic power of 37.5W.
[0061] (4) Coating completed.
[0062] A total of 200 pieces were tested in this experiment, of which 40 pieces had poor coating, with a coating defect rate of 20%, and 34 pieces had poor target appearance (edge chipping, corner chipping, etc.), with an appearance defect rate of 17%.
[0063] Compared with Comparative Example 3 and Comparative Example 1, the coating defect rate decreased by 15% and the appearance defect rate decreased by 13% after using the rotating target coating fixture of the present invention in the coating process.
[0064] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of the present invention.
Claims
1. A method for coating a rotating target, characterized in that, Includes the following steps: (1) Clean the rotating target; (2) Wipe the surface of the rotating target clean with a cleaning agent; (3) Inspect the appearance and dimensions of the rotating target material according to the internal control standards to determine whether it is qualified; (4) After the rotating target material passes the inspection, it is clamped using a rotating target material coating fixture; (5) Preheat for 2-10 hours, then coat using ultrasonic method with an ultrasonic power of 15-60W; The rotating target coating fixture includes two fixed end rings arranged opposite each other and a screw connecting the two fixed end rings. The fixed end rings are circular ring structures, each of which has a through hole for the screw to pass through. The inner sides of the opposite ends of the two circular ring structures are provided with annular steps, and the opposite annular steps form a space for clamping the rotating target. The fixed end ring is made of a soft material. The outer diameter of each annular step is the same as the outer diameter of the rotating target being clamped, and the inner diameter of each annular step is smaller than the inner diameter of the rotating target being clamped.
2. The rotary target coating method as described in claim 1, characterized in that, In step (2), the cleaning agent is at least one of acetone, alcohol, and isopropanol.
3. The rotary target coating method as described in claim 1, characterized in that, In step (5), an automatic ultrasonic coating device is used for coating.
4. The rotary target coating method as described in claim 1, characterized in that, The number of layers in a circular staircase is greater than or equal to 1, and two circular staircases have the same number of layers and correspond one-to-one.
5. The rotary target coating method as described in claim 4, characterized in that, The outer and inner diameters of the corresponding single-layer annular steps are the same.
6. The rotary target coating method as described in claim 1, characterized in that, The through hole is located near the outer circumferential edge of the ring structure, and a distance is left between the through hole and the annular step.
7. The rotary target coating method as described in claim 1, characterized in that, Each fixed end ring is provided with at least three through holes; the through holes are evenly distributed along the circumference of the fixed end ring.
8. The rotary target coating method as described in claim 1, characterized in that, The screw is made of a rigid material.