Masking paste, preparation method and application thereof

Abstract

The application discloses a kind of mask pastes, the mask pastes is made of the following raw materials: resin, organic solvent, inorganic filler, pigment;The resin includes resin A1, resin A2, resin B1 and resin B2, wherein the resin A1 has first hydrophilic group, the resin A2 has first lipophilic group, the number N1 of first hydrophilic group is 200-2000, the number M1 of first lipophilic group is 200-2000;The resin B1 has second hydrophilic group, the resin B2 has second lipophilic group, the number N2 of second hydrophilic group is 50-5000, the number M2 of second lipophilic group is 150-500.The resin component in the mask paste of the application is improved, different kinds of hydrophilic modified resin and lipophilic modified resin are matched with each other, which can not only meet the excellent water washing performance of the paste, but also meet the good printing resolution of the paste, and the application range is wider.

Description

Technical Field

[0001] This invention belongs to the field of chemical materials technology, specifically relating to a masking slurry, its preparation method, and its application. Background Technology

[0002] In industrial production, when fabricating patterned thin film layers on a substrate using methods such as sputtering, a protective layer complementary to the patterned thin film layer needs to be formed on the substrate using a mask paste first. Then, the thin film layer is sputtered, and after sputtering, the protective layer is removed by heating, baking, and washing to obtain the patterned thin film layer. However, removing the protective layer formed by existing mask pastes requires high baking temperatures and long times, making the production process complex and costly. Furthermore, during subsequent high-temperature processes, the mask paste may penetrate into the substrate, affecting its performance. To eliminate the energy-intensive and cumbersome high-temperature aging step, it is necessary to improve the washability of the mask paste, allowing it to be directly washed away with water after drying. Therefore, it is essential to develop a mask paste with good printing and washability properties. Summary of the Invention

[0003] To overcome the problems existing in the prior art, one objective of the present invention is to provide a masking slurry. A second objective of the present invention is to provide a method for preparing the aforementioned masking slurry. A third objective of the present invention is to provide applications of the aforementioned masking slurry.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0005] A first aspect of the present invention provides a mask slurry, characterized in that the mask slurry is prepared from the following raw materials in the following mass percentages: 5wt%-25wt% resin, 10wt%-40wt% organic solvent, 30wt%-70wt% inorganic filler, and 0wt%-5wt% pigment; wherein the resin comprises resin A1, resin A2, resin B1, and resin B2, and the content ratio of the mass of resin A1 and resin A2 to the mass of resin B1 and resin B2 is 2:3-9:1;

[0006] Resin A1 has a first hydrophilic group, which is selected from one or more of amide, amino, and ketone groups. Resin A2 has a first lipophilic group, which is selected from one or a combination of aliphatic hydrocarbon and aromatic groups. The number of first hydrophilic groups N1 is 200-2000, the number of first lipophilic groups M1 is 200-2000, and 0.5≤N1 / M1≤1.8. The matrix resins of resin A1 and resin A2 are the same.

[0007] Resin B1 has a second hydrophilic group, which is selected from one or a combination of carboxyl and hydroxyl groups. Resin B2 has a second lipophilic group, which is selected from one or a combination of aliphatic hydrocarbon and aromatic groups. The number of second hydrophilic groups N2 is 50-5000, the number of second lipophilic groups M2 is 150-500, and 7≤N2 / M2≤13. The matrix resins of resin B1 and resin B2 are the same.

[0008] Wherein, the number of groups in the resin = the number of groups in the repeating unit of the resin × the number of repeating units n.

[0009] Preferably, the matrix resin of resin A1 is selected from one or more of waterborne polyurethane resin, polyvinylpyrrolidone, and waterborne acrylic resin.

[0010] Preferably, the matrix resin of resin B1 is selected from one or more of hydroxypropyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose, and cellulose acetate.

[0011] More preferably, the hydrophilic groups of resin A1 and resin B1, and the lipophilic groups of resin A2 and resin B2 are obtained by grafting and modifying the corresponding matrix resins.

[0012] More preferably, the resin A1 is amino-modified polyvinylpyrrolidone; the preparation method of the amino-modified polyvinylpyrrolidone is as follows: the chain initiator azobisisobutyronitrile is added to the reaction flask, the vacuum is drawn and nitrogen gas is introduced, and then 1-vinyl-2-pyrrolidone (NVP), chain transfer agent 1-butylamine and N,N-dimethylformamide (DMF) are added to the reaction flask in sequence, the vacuum is drawn again and nitrogen gas is introduced, the reaction is carried out in an oil bath at 80°C for 7 hours, after natural cooling, the solvent is removed by rotary evaporation, the precipitate is filtered and dried to remove water, and hydrophilic modified amino-containing polyvinylpyrrolidone is obtained.

[0013] Preferably, the ketone group is selected from one or more of methyl ketone, ethyl ketone, and acetone.

[0014] Preferably, in the first or second lipophilic group, the aliphatic hydrocarbon group is an alkane and / or an olefin.

[0015] Preferably, in the first or second lipophilic group, the aromatic group is terephthalic acid and / or toluene.

[0016] Preferably, the molecular weights of resin A1 and resin A2 are 40,000-160,000.

[0017] Preferably, the molecular weights of resin B1 and resin B2 are 140,000-370,000.

[0018] Preferably, the ratio of the number of first hydrophilic groups in resin A1 to the number of second hydrophilic groups in resin B1 is 0.3 ≤ N1 / N2 ≤ 1.1.

[0019] The first hydrophilic group of this invention has a stronger polarity than the second hydrophilic group, resulting in a stronger affinity between the first hydrophilic group and water. By limiting N1 / N2 within the aforementioned range, superior water-washing performance of the mask slurry can be ensured. If N1 / N2 < 0.3, the overall hydrophilicity of the mask slurry weakens, leading to poor water-washing performance; if N1 / N2 > 1.1, the overall hydrophilicity of the mask slurry is too strong, making it prone to combining with water molecules in the air, resulting in moisture absorption problems.

[0020] Preferably, the number of carbon atoms S1 in the main chain of the first lipophilic group is 3-8.

[0021] Preferably, the number of carbon atoms in the main chain of the second lipophilic group, S2, is 9-15.

[0022] Preferably, the first lipophilic group has no branches.

[0023] Preferably, the second lipophilic group has 2-6 branches, and the branches of the second lipophilic group are hydrocarbon chains. More preferably, the branches of the second lipophilic group have 4-8 carbon atoms, and the hydrocarbon chain is an alkane.

[0024] Preferably, the organic solvent is selected from one or more of ethyl acetate, glycerol, ethylene glycol, polyethylene glycol 400, diethylene glycol monobutyl ether, propylene glycol, butanediol, N-methylpyrrolidone, N-ethylpyrrolidone, ethylene glycol monobutyl ether, diethylene glycol monobutyl ether, triethylene glycol monobutyl ether, diethylene glycol monobutyl ether, ethylene glycol dibutyl ether, 1,3,5-tris(enhexyl)-3-methyl-pentanetriether, fatty alcohol polyoxyethylene ether triether, diethylene glycol dibutyl ether, ethylene glycol methyl ether, and di(propylene glycol) methyl ether acetate.

[0025] Preferably, the inorganic powder is selected from at least two of the following: kaolin, mica powder, bentonite, silicon dioxide, aluminum oxide, magnesium oxide, talc, titanium dioxide, magnesium aluminum silicate, calcium carbonate, wollastonite, brucite, and calcium oxide. More preferably, the inorganic filler is one or more of the following: flake-shaped powder, needle-shaped powder, and spherical powder. Even more preferably, the particle size of the inorganic powder is 0.1-10 μm.

[0026] Preferably, the pigment is one or more of chromium oxide, phthalocyanine blue, and phthalocyanine green.

[0027] A second aspect of the present invention provides a method for preparing the above-mentioned mask slurry, comprising the following steps:

[0028] First, the resin is dissolved in an organic solvent to obtain an organic carrier. Then, the organic carrier, inorganic powder, and pigment are mixed to obtain a masking slurry.

[0029] Preferably, the mixing temperature is 15-35℃ and the mixing time is 1.5h-4h.

[0030] Preferably, the method for preparing the organic carrier further includes: adding solid resin to an organic solvent, mixing evenly, stirring thoroughly and dissolving completely, and filtering to obtain the organic carrier for later use.

[0031] Preferably, the method for preparing the mask slurry further includes: adding the organic carrier, inorganic powder, and pigment into a mixing tank for mixing, and then rolling the mixture after it is stirred evenly to obtain the mask slurry.

[0032] A third aspect of the invention provides the application of the mask slurry described in the first aspect in the preparation of patterned thin films.

[0033] The beneficial effects of this invention are:

[0034] This invention improves the resin composition of the mask slurry by combining different types of hydrophilic and oleophilic modified resins. This satisfies both the excellent water washing performance and good printing resolution of the slurry. On the one hand, it simplifies the cumbersome film removal process, and on the other hand, it improves the film coating efficiency and precision. It has a wider range of applications and is more convenient to use.

[0035] Specifically, compared with the prior art, the present invention has the following advantages:

[0036] The mask slurry of this invention contains four different resins: A1, A2, B1, and B2. The hydrophilic groups in the resins attract water molecules or dissolve in water, making the surface of the resins with hydrophilic groups easily wetted by water. This allows water to penetrate the film layer more easily, disrupting the adhesion between the resin and the substrate, thus giving the mask slurry excellent washability. The lipophilic groups in the resins can form hydrogen bonds or cross-linked network structures with small molecule solvents, giving the mask slurry a certain thixotropic recovery ability. On the one hand, the mask slurry has a low viscosity when subjected to external pressure, allowing for good slurry application during screen printing. On the other hand, the mask slurry can quickly recover to a higher viscosity after the external force is removed, resulting in high resolution of the printed pattern. Therefore, the mask slurry has excellent printing performance. The specific combination of the types and quantities of hydrophilic and lipophilic groups, the ratio of the two groups, and the main chain and branches of the lipophilic groups in the four resins in this invention greatly improves the washability of the mask slurry while ensuring excellent printing performance, thereby effectively reducing the baking temperature and time required for the mask slurry cleaning process. Detailed Implementation

[0037] The present invention will be further described in detail below through specific embodiments. Unless otherwise specified, the raw materials used in the following embodiments can be obtained from conventional commercial channels or prepared and isolated through simple synthesis; unless otherwise specified, the processes employed are conventional processes in the art.

[0038] The number of repeating units n of resin A1 and resin A2 in the following examples and comparative examples A The number of repeating units n in resins B1 and B2 are the same, and their molecular weights are between 40,000 and 160,000. B The same, with a molecular weight between 140,000 and 370,000, the inorganic filler is spherical powder with an average particle size of 2-4 μm.

[0039] Example 1

[0040] This embodiment provides a masking slurry. The components and their amounts in this masking slurry are as follows: 17 wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 3 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 28 wt% diethylene glycol monobutyl ether, and inorganic filler (silica to bentonite mass ratio of 1:1).

[0041] 1) 49 wt% and 3 wt% chromium oxide, wherein the specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 1.

[0042] The method for preparing the mask slurry described in this embodiment is as follows:

[0043] Preparation of organic carrier: Solid resin is added to organic solvent and mixed evenly, stirred thoroughly and completely dissolved, and then filtered through a 250-325 mesh sieve to obtain organic carrier for use;

[0044] Preparation of mask slurry: The above-mentioned organic carrier, inorganic filler and pigment are added to the mixing tank for mixing. The mixing temperature is 25℃ and the mixing time is 2h. After being stirred evenly, the mask slurry is rolled by a three-roll mill.

[0045] Examples 2-11

[0046] The components and amounts of the masking slurry described in Examples 2 to 11 are the same as those in Example 1, except that the specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 1.

[0047] The preparation methods of the mask slurry described in Examples 2 to 11 are the same as those in Example 1.

[0048] Example 12

[0049] This embodiment provides a mask slurry. The components and their amounts of the mask slurry in this embodiment are as follows: 15 wt% of hydrophilic modified waterborne polyurethane resin and lipophilic modified waterborne polyurethane resin, 8 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 40 wt% ethyl acetate, 32 wt% inorganic filler (alumina), and 5 wt% phthalocyanine blue. The specific parameters of the hydrophilic and lipophilic groups of the modified waterborne polyurethane resin and modified hydroxypropyl cellulose are shown in Table 1.

[0050] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0051] Example 13

[0052] This embodiment provides a masking slurry. The components and their amounts of the masking slurry in this embodiment are as follows: 3 wt% of hydrophilic modified waterborne acrylic resin and lipophilic modified waterborne acrylic resin, 4.5 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 24 wt% glycerol, 68 wt% inorganic filler (kaolin), and 0.5 wt% phthalocyanine green. The specific parameters of the hydrophilic and lipophilic groups of the modified waterborne acrylic resin and modified hydroxypropyl cellulose are shown in Table 1.

[0053] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0054] Example 14

[0055] This embodiment provides a masking slurry. The components and their amounts of the masking slurry in this embodiment are as follows: 15wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 4wt% of hydrophilic modified cellulose acetate and lipophilic modified cellulose acetate, 12wt% of N-methylpyrrolidone, and 69wt% of inorganic filler (calcium carbonate). The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified cellulose acetate are shown in Table 1.

[0056] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0057] Example 15

[0058] This embodiment provides a masking slurry. The components and their amounts of the masking slurry in this embodiment are as follows: 11.5 wt% of hydrophilic modified waterborne acrylic resin and lipophilic modified waterborne acrylic resin, 1.5 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 40 wt% of fatty alcohol polyoxyethylene ether triether, and 47 wt% of inorganic filler (titanium dioxide). The specific parameters of the hydrophilic and lipophilic groups of the modified waterborne acrylic resin and modified hydroxypropyl cellulose are shown in Table 1.

[0059] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0060] Example 16

[0061] This embodiment provides a masking slurry. The components and their amounts in the masking slurry of this embodiment are as follows: 6.3 wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 0.7 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 35 wt% ethylene glycol, 55 wt% inorganic filler (mica powder), and 3 wt% chromium oxide. The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 1.

[0062] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0063] Example 17

[0064] This embodiment provides a masking slurry. The components and their amounts of the masking slurry in this embodiment are as follows: 4 wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 3 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 35 wt% of diethylene glycol monobutyl ether, 55 wt% of inorganic filler (silica and bentonite in a mass ratio of 1:1), and 3 wt% of chromium oxide. The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 1.

[0065] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0066] Example 18

[0067] This embodiment provides a masking slurry. The components and their amounts of the masking slurry in this embodiment are as follows: 4 wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 3 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 35 wt% of diethylene glycol monobutyl ether, 55 wt% of inorganic filler (silica and bentonite in a mass ratio of 1:1), and 3 wt% of chromium oxide. The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 1.

[0068] The method for preparing the masking slurry described in this embodiment is the same as in Embodiment 1.

[0069] The specific parameters of the hydrophilic and lipophilic groups of resins A1, A2, B1, and B2 in Examples 1-18 are shown in Table 1. The double bonds of the olefins are located between carbons 1 and 2, furthest from the resin, and the para-carbon of the methyl group in toluene is chemically bonded to the resin.

[0070] Table 1

[0071]

[0072]

[0073]

[0074] Comparative Example 1

[0075] Comparative Example 1 provides a mask slurry. The difference between Comparative Example 1 and Example 1 is that it lacks resins B1 and B2. The components and amounts of the mask slurry in Comparative Example 1 are as follows: 20 wt% of hydrophilic modified polyvinylpyrrolidone and lipophilic modified polyvinylpyrrolidone, 28 wt% of diethylene glycol monobutyl ether, 49 wt% of inorganic filler (silica and bentonite in a mass ratio of 1:1), and 3 wt% of chromium oxide. The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone are shown in Table 2.

[0076] The preparation method of the masking slurry is the same as in Example 1.

[0077] Comparative Example 2

[0078] Comparative Example 2 provides a masking slurry. The difference between Comparative Example 2 and Example 1 is that it lacks resins A1 and A2. The components and amounts of the masking slurry in Comparative Example 1 are as follows: 20 wt% of hydrophilic modified hydroxypropyl cellulose and lipophilic modified hydroxypropyl cellulose, 28 wt% of diethylene glycol monobutyl ether, 49 wt% of inorganic filler (silica and bentonite in a mass ratio of 1:1), and 3 wt% of chromium oxide. The specific parameters of the hydrophilic and lipophilic groups of the modified hydroxypropyl cellulose are shown in Table 2.

[0079] The preparation method of the masking slurry is the same as in Example 1.

[0080] Comparative Examples 3-8

[0081] Comparative Examples 3-8 provide a masking slurry. The components and amounts of the masking slurry in Comparative Examples 3-8 are the same as those in Example 1. The difference lies in the specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose. The specific parameters of the hydrophilic and lipophilic groups of the modified polyvinylpyrrolidone and modified hydroxypropyl cellulose are shown in Table 2.

[0082] The preparation method of the masking slurry is the same as in Example 1.

[0083] The specific parameters of the hydrophilic and lipophilic groups of resins A1, A2, B1, and B2 in Comparative Examples 1-8 are shown in Table 2.

[0084]

[0085] Performance testing

[0086] 1. Testing Method

[0087] (1) Sample preparation method:

[0088] A strip-shaped coating of 0.5mm*50mm*10μm was prepared on a substrate by screen printing using a mask paste and then dried.

[0089] (2) Printing performance:

[0090] To meet the standard, the dimensions of the elongated coating should be measured, and the required diffusion shrinkage of the graphic dimensions should be ≤5%.

[0091] (3) Washability:

[0092] Heat and dry the strip-shaped coating at 150℃ for 10 minutes, then immerse it in room temperature water for 30 seconds and rinse it with room temperature water for 30 seconds. Calculate the degree of cleaning based on the area of ​​coating peeling off. A degree of cleaning of ≥90% is required to meet the standard.

[0093] (4) Moisture absorption performance:

[0094] Print a batch of approximately 300 sample sheets, dry them at 150℃ for 10 minutes, stack them together, and store them at 20-90% humidity for 3 days. If there is no obvious adhesion between the sheets, it can be determined that the paste does not easily absorb moisture.

[0095] 2. Test Results

[0096] The properties of the mask slurries of Examples 1-18 and Comparative Examples 1-8 are shown in Table 3 below:

[0097] Table 3

[0098]

[0099]

[0100] Based on the results in Table 3, the following analysis can be obtained:

[0101] Examples 1-18 meet the requirements for the combination of resin A1, resin A2, resin B1 and resin B2, the types of resin groups, the range of group numbers N and M, and the ratio of N to M, and the corresponding printing performance and water washing performance are up to standard.

[0102] In Examples 1-18, except for Examples 2 and 11 where the N1 to N2 ratio did not meet the limiting conditions and the moisture absorption could not meet the requirements (Example 11), and the water washing performance deteriorated (Example 2), the moisture absorption of the other examples met the standards.

[0103] In Examples 15 and 16, the number of carbon atoms S in the lipophilic group backbone did not meet the limiting conditions, resulting in poorer printing performance, but the printing performance still met the standards.

[0104] In Examples 17 and 18, the number of branches and the number of carbon atoms in the second lipophilic group did not meet the specified conditions, resulting in poorer printing performance, but the printing performance still met the standards.

[0105] Comparative Example 1, which does not contain resins B1 and B2, fails to meet printing performance standards.

[0106] Comparative Example 2, which does not contain resins A1 and A2, fails to meet the water washability standards.

[0107] In Comparative Example 3, the N to M ratio of resins A1 and A2, as well as resins B1 and B2, was too small and did not meet the limiting conditions, resulting in substandard water washing performance.

[0108] In Comparative Example 4, the N to M ratio of resins A1 and A2, as well as resins B1 and B2, was too high and did not meet the limiting conditions, resulting in substandard printing performance.

[0109] In Comparative Example 5, the N to M ratio of resins B1 and B2 was too high and did not meet the limiting conditions, resulting in substandard printing performance.

[0110] In Comparative Example 6, the N to M ratio of resins A1 and A2 was too high and did not meet the limiting conditions, resulting in substandard printing performance.

[0111] In Comparative Example 7, the N to M ratio of resins B1 and B2 was too small to meet the limiting conditions, and the water washing performance was substandard.

[0112] In Comparative Example 8, the N to M ratio of resins A1 and A2 was too small to meet the limiting conditions, and the water washing performance was substandard.

[0113] In summary, this invention improves the resin composition of the mask slurry by combining different types of hydrophilic and oleophilic modified resins. This satisfies both the excellent water washability of the slurry and its good printing resolution. On the one hand, it simplifies the cumbersome film removal process, and on the other hand, it improves the film coating efficiency and precision. It has a wider range of applications and is more convenient to use.

[0114] The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present invention shall be considered equivalent substitutions and shall be included within the protection scope of the present invention.

Claims

1. A masking slurry, characterized in that, The mask slurry is prepared from the following raw materials by mass percentage: 5wt%-25wt% resin, 10wt%-40wt% organic solvent, 30wt%-70wt% inorganic filler, and 0wt%-5wt% pigment; wherein the resin comprises resin A1, resin A2, resin B1, and resin B2, and the content ratio of the sum of the masses of resin A1 and resin A2 to the sum of the masses of resin B1 and resin B is 2:3-9:1; Resin A1 has a first hydrophilic group selected from amino groups, and resin A2 has a first lipophilic group selected from aliphatic hydrocarbon groups. The number of first hydrophilic groups, N1, is 200-2000, and the number of first lipophilic groups, M1, is 200-2000, with 0.5 ≤ N1 / M1 ≤ 1.

8. The matrix resins of resins A1 and A2 are the same; the matrix resin of resin A1 is selected from polyvinylpyrrolidone. Resin B1 has a second hydrophilic group, which is selected from one or a combination of carboxyl and hydroxyl groups. Resin B2 has a second lipophilic group, which is selected from aliphatic hydrocarbon groups. The number of second hydrophilic groups N2 is 50-5000, the number of second lipophilic groups M2 is 150-500, and 7 ≤ N2 / M2 ≤ 13. The matrix resins of resins B1 and B2 are the same. The matrix resin of resin B1 is selected from one or more of hydroxypropyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose, and cellulose acetate. The organic solvent is selected from one or more of ethylene glycol monobutyl ether, diethylene glycol monobutyl ether, triethylene glycol monobutyl ether, ethylene glycol dibutyl ether, diethylene glycol dibutyl ether, ethylene glycol methyl ether acetate, and di(propylene glycol) methyl ether acetate; In the first or second lipophilic group, the aliphatic hydrocarbon group is an alkane; The ratio of the number of first hydrophilic groups in resin A1 to the number of second hydrophilic groups in resin B1 is 0.3 ≤ N1 / N2 ≤ 1.1; The number of carbon atoms S1 in the main chain of the aliphatic hydrocarbon group of the first lipophilic group is 3-8; The number of carbon atoms (S2) in the main chain of the aliphatic hydrocarbon group of the second lipophilic group is 9-15; The aliphatic hydrocarbon group of the first lipophilic group has no branches; The number of branches of the aliphatic hydrocarbon group of the second lipophilic group is 2-6, and the branches of the second lipophilic group are hydrocarbon chains.

2. The masking slurry according to claim 1, characterized in that, The molecular weights of resin A1 and resin A2 are 40,000-160,000; And / or, the molecular weights of resin B1 and resin B2 are 140,000-370,000.

3. The masking slurry according to claim 1, characterized in that, The inorganic filler is selected from at least two of the following: kaolin, mica powder, bentonite, silicon dioxide, aluminum oxide, magnesium oxide, talc, titanium dioxide, magnesium aluminum silicate, calcium carbonate, wollastonite, brucite, and calcium oxide. And / or, the pigment is one or more of chromium oxide, phthalocyanine blue, and phthalocyanine green.

4. The method for preparing the mask slurry according to any one of claims 1 to 3, characterized in that, The process includes the following steps: first, dissolving the resin in an organic solvent to obtain an organic carrier; then, mixing the organic carrier, inorganic filler, and pigment to obtain a masking slurry.

5. The use of the masking paste according to any one of claims 1 to 3 in the preparation of patterned thin films.

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