Vacuum adsorption multi-point flexible support tool and positioning precision control method thereof

Abstract

The application discloses a kind of vacuum adsorption multi-point flexible support tool and its positioning precision control method, belong to manufacturing engineering technical field, including the tooling frame of top opening, the bottom of tooling frame is symmetrically provided with Y-axis guide rail assembly, multiple groups of support unit row frame two ends are respectively carried on multiple Y-axis sliding table of Y-axis guide rail assembly, the bottom of each group support unit row frame is respectively provided with X-axis guide rail assembly, multiple X-axis sliding table of X-axis guide rail assembly is respectively provided with support unit that can slide along support unit row frame inner side, the upper portion of multiple support units is arranged with the measuring device carried on the upper portion of tooling frame, laser displacement sensor is arranged on the execution end of measuring device, and the side of Y-axis guide rail assembly and X-axis guide rail assembly is respectively provided with grating ruler.The application controls support unit height by Z-axis motor, uses Y-axis guide rail assembly and X-axis guide rail assembly to control horizontal direction position, and can adapt to the machining of different shapes, different size curved surface parts.

Description

Technical Field

[0001] This invention discloses a vacuum adsorption multi-point flexible support fixture and its positioning accuracy control method, belonging to the field of manufacturing engineering technology. Background Technology

[0002] With the development of industries such as aviation and shipbuilding, the demand for machining complex curved surface parts has increased significantly. Welding, precision measurement, and repair of curved surface parts require positioning and support. Traditional positioning fixtures are typically solid molds, and one set of fixtures can only be used to machine one set of parts. This makes them unsuitable for machining multiple complex curved surface parts, resulting in low fixture utilization and high storage and maintenance costs.

[0003] In the prior art, the Chinese invention patent titled "A General-Purpose Precision CNC Support Column" with patent number CN201310244483.5 discloses a flexible support column. By adjusting the height of the flexible support column, it can adapt to curved surface parts of different shapes, realize multiple shapes from one mold, and improve the processing efficiency of curved surface parts.

[0004] However, the aforementioned flexible support column has the disadvantage of insufficient adsorption force when adsorbing curved workpieces, making it unable to stably support the curved workpieces. Furthermore, the patent does not provide a method for controlling the positioning accuracy of the support unit, which cannot meet the high-precision processing requirements of curved parts. Summary of the Invention

[0005] The purpose of this invention is to solve the problems of insufficient adsorption force of existing flexible support columns, inability to stably support curved workpieces, and inability to meet the high-precision machining requirements of curved parts. This invention proposes a vacuum adsorption multi-point flexible support fixture and its positioning accuracy control method. Based on the characteristics of the suction cup structure of the remora head adsorbing onto other large fish and ships for long-distance travel, a skeleton structure is designed on the surface of the suction cup. By increasing the friction and deformation resistance during suction adsorption, the adsorption stability of the flexible support unit is greatly improved, enabling high-precision measurement of curved parts.

[0006] The problem to be solved by this invention is achieved by the following technical solution:

[0007] According to a first aspect of the present disclosure, a vacuum adsorption multi-point flexible support fixture is provided, including a fixture frame with a top opening. A Y-axis guide rail assembly is symmetrically arranged at the bottom of the fixture frame. Multiple sets of support unit frames are mounted on multiple Y-axis slides of the Y-axis guide rail assembly at both ends. An X-axis guide rail assembly is arranged at the bottom inner side of each set of support unit frames. Support units capable of sliding along the inner side of the support unit frames are arranged on multiple X-axis slides of the X-axis guide rail assembly. A measuring device mounted on the upper part of the multiple support units is arranged on the upper part of the fixture frame. A laser displacement sensor is provided on the execution end of the measuring device. A grating ruler is provided on one side of each of the Y-axis guide rail assembly and the X-axis guide rail assembly.

[0008] Preferably, the tooling frame includes two first side plates, two second side plates, and a bottom plate that are detachably connected by a base plate rod. A worktable is provided on the top of the two first side plates and the two second side plates. Two upper baffles and two tooling upper slide rails are respectively provided on the worktable at positions corresponding to the two first side plates and the two second side plates. The two tooling upper slide rails have profiles fixed to the worktable on the back side for supporting the measuring device.

[0009] Preferably, the Y-axis guide rail assembly includes a Y-axis slide base disposed on the side of the base plate near the inner side of the two second side plates. Y-axis dovetail columns are symmetrically arranged on the Y-axis slide base. The bottom of the plurality of Y-axis slides is provided with Y-axis dovetail grooves that can slide along the Y-axis dovetail columns. A Y-axis motor is disposed on the Y-axis slide. The main shaft of the Y-axis motor passes through the part of the Y-axis slide and is fitted with a Y-axis drive gear. A Y-axis drive rack is disposed between the two Y-axis dovetail columns, fixed on the Y-axis slide base and cooperating with the plurality of Y-axis drive gears. The grating ruler includes a first measuring ruler disposed on one side of the Y-axis slide. The upper part of the first measuring ruler on the side of the Y-axis slide is provided with a first measuring head corresponding to the plurality of support unit frames.

[0010] Preferably, the support unit frame includes a crossbeam base plate with its bottom ends set on a Y-axis slide table. The four corners of the crossbeam base plate are connected to the four corners of the upper cover plate by support rods. The upper cover plate has upper baffle sliders at both ends that can move along the slide grooves inside the tooling upper slide rail. The upper cover plate has symmetrical upper support slide rails on both sides of the top. The two upper support slide rails have multiple upper support sliders that can slide along their slide grooves and are fitted onto multiple support units. Adjacent upper support slide rails are connected to each other and to the profile by an X-axis dust cover. Adjacent upper support sliders are connected to each other and to the tooling upper slide rail by a Y-axis dust cover.

[0011] Preferably, the X-axis guide rail assembly includes an X-axis slide base mounted on the bottom plate of the crossbeam, X-axis dovetail columns symmetrically arranged on the X-axis slide base, X-axis dovetail grooves that can slide along the X-axis dovetail columns provided at the bottom of the plurality of X-axis slides, an X-axis motor mounted on the X-axis slide, an X-axis drive gear sleeved on the part of the X-axis motor extending out of the X-axis slide, an X-axis drive rack fixed on the X-axis slide base and cooperating with the plurality of X-axis drive gears arranged between two X-axis dovetail columns, a positioning block for positioning the plurality of X-axis slides provided on the plurality of X-axis slides, and the grating ruler also includes a second measuring ruler mounted on one side of the X-axis slide, a second measuring head corresponding to the plurality of support unit frames respectively provided on the X-axis slide side of the upper part of the second measuring ruler.

[0012] Preferably, the support unit includes a support guide sleeve passing through the upper slider of the support. A fixing plate for connecting and fixing to the upper slider is fitted onto the support guide sleeve. A lifting column is inserted into the support guide sleeve. A guide key is provided between the inner side of the support guide sleeve and the lifting column. A ball screw is inserted into the bottom end of the lifting column. A ball nut connected to the bottom end of the lifting column is threaded onto the ball screw. A fixing ring is provided on the inner side of the bottom end of the support guide sleeve. A connector that cooperates with the fixing ring to enclose the ball nut within the support guide sleeve is fitted onto the ball screw. The bottom end of the support guide sleeve is connected to the top end of the motor housing. A Z-axis motor with its main shaft connected to one end of the ball screw via a coupling is installed inside the motor housing. The bottom end of the motor housing cooperates with a positioning block through a positioning hole. The top of the lifting column... The suction cup rotating head support is provided at one end. The lifting column tube wall is provided with a first air passage. One end of the first air passage is provided with a first air nozzle connected to an external air pump. The other end of the first air passage is sealed to one end of the second air passage of the suction cup rotating head support. The other end of the second air passage is provided with a second air nozzle connected to one end of a rubber air tube. The top of the suction cup rotating head support is hinged to the suction cup base through a ball joint. The ball part of the ball joint is sealed inside the suction cup base by a pressure cap. The suction cup is fixed on the top of the suction cup base by a pressing and positioning block. The side of the suction cup base is provided with a third air nozzle communicating with the third air passage inside it. The third air nozzle is connected to the other end of the rubber air tube. The suction cup is provided with a fourth air passage communicating with the third air passage. The pressing and positioning block is provided with a fifth air passage communicating with the fourth air passage.

[0013] Preferably, the suction cup is provided with an annular protrusion structure consisting of at least four fan-shaped remora bionic suction cup structures, and a first vacuum groove is provided between two adjacent fan-shaped remora bionic suction cup structures. The fan-shaped remora bionic suction cup structure includes a central spine, and five bionic fish fins are evenly arranged on both sides of the central spine. A second vacuum groove is directly provided on each of the five bionic fish fins, and the bionic fish fins are arc-shaped with a curvature of 0.5.

[0014] Preferably, the device also includes multiple temperature sensors, which are respectively arranged at the heat source location. The heat source location includes: an X-axis motor, a Y-axis motor, a Z-axis motor, the inner ends of the Y-axis slide base, the inner ends of the X-axis slide base, multiple X-axis slides, multiple Y-axis slides, multiple lifting columns, the two ends of multiple guide keys, ball screw nuts, and the surrounding environment of the tooling. The multiple Y-axis motors, multiple X-axis motors, and multiple Z-axis motors are all electrically connected to a programmable logic controller (PLC). The PLC, the second measuring head, the first measuring head, the PMAC motion control card of the measuring device, the laser displacement sensor, and the pressure sensor are electrically connected to a computer.

[0015] According to a second aspect of the present disclosure, a method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture is provided, applied to the vacuum adsorption multi-point flexible support fixture described in the first aspect, comprising:

[0016] The computer executes a pre-control preparation program to obtain a comprehensive error prediction model;

[0017] The computer uses 3D modeling software to obtain the height information of key support points of the workpiece based on the curved workpiece model, and obtains the temperature data of key temperature measuring points of the flexible support fixture sent by multiple temperature sensors in real time. Based on the temperature data of the key temperature measuring points of the flexible support fixture in real time, the computer obtains the errors of the three axes of the linear guide rail (x, y, and z) through a comprehensive error prediction model. Based on the height information of the key support points of the workpiece and the errors of the three axes of the linear guide rail (x, y, and z), the computer obtains the X-axis motor travel data, Y-axis motor travel data, and Z-axis motor travel data and sends them to the programmable logic controller.

[0018] The programmable logic controller acquires the X-axis motor travel data, Y-axis motor travel data, and Z-axis motor travel data respectively to obtain the final X-axis motor travel command, the final Y-axis motor travel command, and the final Z-axis motor travel command, and then sends them to the X-axis motor, Y-axis motor, and Z-axis motor respectively.

[0019] The X-axis motor, Y-axis motor, and Z-axis motor respectively receive the final X-axis motor movement command, the final Y-axis motor movement command, and the final Z-axis motor movement command and execute the corresponding operations.

[0020] Preferably, the computer executes a pre-control preparation procedure to obtain a comprehensive error prediction model, including:

[0021] The computer sends the motor test data to the programmable logic controller and sends corresponding error test commands to the second measuring head, the first measuring head, the PMAC motion control card of the measuring device, the laser displacement sensor and multiple temperature sensors.

[0022] The programmable logic controller (PLC) acquires test data, obtains test instructions, and sends them to the X-axis motor, Y-axis motor, and Z-axis motor respectively. The X-axis motor, Y-axis motor, and Z-axis motor each receive corresponding test travel instructions and execute corresponding operations. The second measuring head and the first measuring head each receive corresponding error test instructions and execute corresponding operations. The first measuring head acquires first measuring head travel data and sends it to the computer. The second measuring head acquires second measuring head travel data and sends it to the computer. The PMAC motion control card of the measuring device acquires corresponding error test instructions and drives the laser displacement sensor to move to the corresponding position. The laser displacement sensor acquires multiple suction cup heights and sends them to the computer. The multiple temperature sensors acquire multiple real-time temperature data from each temperature measuring point and send them to the computer.

[0023] The computer acquires the travel data of the first measuring head, the travel data of the second measuring head, and compares the heights of multiple suction cups with the motor test data to obtain the errors of the X, Y, and Z axes. The computer acquires multiple real-time temperature data, establishes a correlation coefficient matrix between each temperature measuring point using the Pearson correlation coefficient method, and clusters the multiple real-time temperature data into m groups using factor analysis. Based on the correlation coefficient matrix between each temperature measuring point and the m groups of real-time temperature data, the real-time temperature data with the highest correlation coefficient is obtained.

[0024] The computer establishes an initial BP neural network model and performs an elastic perturbation optimization algorithm on it to obtain an optimized BP neural network model. The real-time temperature data with the largest correlation coefficient and the slope of the thermal error curve are then substituted into the optimized BP neural network to obtain a thermal error BP neural network model.

[0025] Based on the BP neural network model of the errors and thermal errors of the X, Y, and Z axes, a comprehensive error prediction model is derived, as shown in formula (1):

[0026] δ(p,t)=α0+(α1+β0+β1T1+β2T2+…+β m T m +ε)·p+α2·p 2 +…+α n ·p n (1)

[0027] δ(p,t) represents the overall error, α0 is a constant term, and α i = (i = 1, 2, ..., n) are the coefficients of geometric error; p is the nominal position of the linear axis, β0 is the correlation coefficient constant, β i (i = 1, 2, ..., m are the correlation coefficients for the corresponding temperatures, ε is the thermal error constant, T) i = (i = 1, 2, ..., m) represents the corresponding temperature.

[0028] This invention discloses a vacuum adsorption multi-point flexible support fixture and its positioning accuracy control method, which have the following advantages over existing methods:

[0029] (1) The height of the support unit is controlled by the Z-axis motor, and the horizontal position is controlled by the Y-axis guide rail assembly and the X-axis guide rail assembly, which can adapt to the processing of curved parts of different shapes and sizes;

[0030] (2) The proposed elastic perturbation optimization algorithm introduces an adaptive perturbation mechanism based on performance feedback, which improves the defect of BP neural network being prone to getting trapped in local extrema. At the same time, the elastic back-off method ensures that the algorithm can stably return to a more promising search path after trying inferior solutions. The adaptive perturbation adjustment is used to ensure that the algorithm can dynamically change its exploration behavior at different stages of the training process. The algorithm realizes the closed-loop control of the positioning accuracy of flexible support tooling.

[0031] (3) The fan-shaped remora bionic suction cup structure effectively increases the contact area between the suction cup and the workpiece, increases the anti-deformation ability and adsorption efficiency of the suction cup during the adsorption process, and improves the stability and reliability of the tooling for supporting curved workpieces.

[0032] (4) It can avoid workpiece deformation caused by repeated clamping of the workpiece in different fixtures during the machining and measurement of curved workpieces, and greatly improve the machining and measurement efficiency of the workpiece. Attached Figure Description

[0033] Figure 1 This is an isometric side view of a vacuum adsorption multi-point flexible support tooling according to the present invention.

[0034] Figure 2 This is an isometric side view of the measuring device in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0035] Figure 3 This is an isometric side view of the tooling frame in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0036] Figure 4 This is a partial isometric side view of a vacuum adsorption multi-point flexible support tooling according to the present invention.

[0037] Figure 5 This is an isometric side view of the Y-axis guide rail assembly in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0038] Figure 6 This is an isometric side view of a portion of the Y-axis guide rail assembly in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0039] Figure 7This is an enlarged view of point A in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0040] Figure 8 This is an isometric side view of the support unit frame in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0041] Figure 9 This is an enlarged view of point B in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0042] Figure 10 This is an isometric side view of the X-axis guide rail assembly in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0043] Figure 11 This is an isometric side view of part of the X-axis guide rail assembly in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0044] Figure 12 This is an enlarged view of point C in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0045] Figure 13 This is an isometric side view of the support unit in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0046] Figure 14 This is an isometric side view of the support unit in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0047] Figure 15 This is an enlarged view of point C in a vacuum adsorption multi-point flexible support tooling of the present invention.

[0048] Figure 16 This is an isometric side view of a portion of the support unit in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0049] Figure 17 This is an isometric side view of a portion of the support unit in a vacuum adsorption multi-point flexible support fixture of the present invention.

[0050] Figure 18 This is an electrical connection diagram of a vacuum adsorption multi-point flexible support tooling according to the present invention.

[0051] Among them: 100-tooling frame, 200-Y-axis dust cover, 300-Y-axis dust cover, 400-measuring device, 500-support unit, 600-support unit frame, 700-X-axis guide rail assembly, 800-Y-axis guide rail assembly, 900-grating ruler, 101-grating ruler, 102-profile, 103-tooling upper slide rail, 104-base plate, 105-base material rod, 106-worktable plate, 107-profile, 108-second side plate, 401 - Laser displacement sensor, 501-Z-axis motor, 502-Motor housing, 503-Coupling, 504-Coupling, 505-Ball screw nut, 506-Support guide sleeve, 507-Guide key, 508-Lifting column, 509-Ball screw, 510-Fixing ring, 511-Fixing plate, 512-Pressure cap, 513-Rubber air hose, 514-Suction cup rotary head support, 515-Suction cup, 516-Clamping positioning block, 517-Suction cup base, 518 - Bionic fish fin, 519- Bionic fish fin, 520- Ball joint column, 521- Fourth air passage, 522- First air passage, 523- First air nozzle, 524- First vacuum chamber, 525- Positioning hole, 601- Upper baffle slider, 602- Supporting upper slider, 603- Supporting upper slide rail, 604- Upper cover plate, 605- Crossbeam base plate, 606- Support rod, 701- X-axis slide base, 702- X-axis motor, 703- X-axis dovetail column, 704- Fixed Position block, 705-X-axis slide, 706-X-axis drive rack, 707-X-axis drive gear, 708-X-axis dovetail groove, 801-Y-axis slide base, 802-Y-axis slide base, 803-Y-axis slide base, 804-Y-axis slide base, 805-Y-axis slide base, 806-Y-axis drive gear, 807-Y-axis dovetail groove, 901-first measuring head, 902-first measuring scale, 903-second measuring scale, 904-second measuring head. Detailed Implementation

[0052] The following is based on the appendix Figure 1-18 The present invention will be further described as follows:

[0053] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0054] In the description of this invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0055] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0056] like Figure 1-4 As shown, the first embodiment of the present invention provides a vacuum adsorption multi-point flexible support fixture based on the prior art, including a fixture frame 100 with a top opening. A Y-axis guide rail assembly 800 is symmetrically mounted on the bottom of the fixture frame 100. Multiple sets of support unit racks 600 are respectively mounted on multiple Y-axis slides 803 of the Y-axis guide rail assembly 800 at both ends. An X-axis guide rail assembly 700 is respectively mounted on the bottom inner side of each set of support unit racks 600. Support units 500 that can slide along the inner side of the support unit racks 600 are respectively mounted on multiple X-axis slides 705 of the X-axis guide rail assembly 700. A measuring device 400 mounted on the upper part of the multiple support units 500 is arranged on the upper part of the fixture frame 100. A laser displacement sensor 401 is mounted on the execution end of the measuring device 400. A grating ruler 900 is respectively provided on one side of the Y-axis guide rail assembly 800 and the X-axis guide rail assembly 700. The specific structure of each component and the connection relationship between them will be described in detail below.

[0057] First, let me introduce the tooling frame 100, such as... Figure 3 As shown, the device includes two first side plates 101, two second side plates 108, and a base plate 104 that are detachably connected by a base plate rod 105. A worktable 106 is mounted on the top of the two first side plates 101 and the two second side plates 108. Two upper baffles 102 and two tooling upper slide rails 103 are respectively installed on the worktable 106 at positions corresponding to the two first side plates 101 and the two second side plates 108. The two tooling upper slide rails 103 have profiles 107 fixed to the worktable 106 on the back side for supporting the measuring device 400. The measuring device 400 adopts the KNK gantry moving module, so it will not be described in detail.

[0058] like Figure 5-7 As shown, the Y-axis guide rail assembly 800 includes a Y-axis slide base 801 mounted on the upper side of the base plate 104 near the inner side of the two second side plates 108. Y-axis dovetail columns 805 are symmetrically arranged on the Y-axis slide base 801. Y-axis dovetail grooves 807 that can slide along the Y-axis dovetail columns 805 are installed at the bottom of multiple Y-axis slides 803. Y-axis motors 802 are mounted on the Y-axis slides 803. Y-axis drive gears 806 are sleeved on the part of the main shaft of the Y-axis motor 802 that extends out of the Y-axis slides 803. Y-axis drive racks 804 that are fixed on the Y-axis slide base 801 and cooperate with multiple Y-axis drive gears 806 are arranged between the two Y-axis dovetail columns 805. The grating ruler 900 includes a first measuring ruler 902 mounted on one side of the Y-axis slide 803. A first measuring head 901 corresponding to multiple sets of support unit frames 600 is mounted on the side of the Y-axis slide 803 above the first measuring ruler 902.

[0059] like Figure 8 and 9 As shown, the support unit frame 600 includes a crossbeam base plate 605 with its bottom ends mounted on a Y-axis slide table 803. The four corners of the crossbeam base plate 605 are connected to the four corners of the upper cover plate 604 via support rods 606. The upper cover plate 604 has upper baffle sliders 601 installed at both ends, which can move along the slide grooves inside the tooling upper slide rail 103. The upper cover plate 604 has support upper slide rails 603 symmetrically installed on the top of both sides. The two support upper slide rails 603 are equipped with multiple support upper sliders 602 that can slide along their slide grooves and are sleeved on multiple support units 500. The two adjacent support upper slide rails 603 and the support upper slide rails 603 and the profile 107 are connected by an X-axis dust cover 300. The two adjacent support upper sliders 602 and the support upper sliders 602 and the tooling upper slide rail 103 are connected by a Y-axis dust cover 300.

[0060] like Figure 10-12 As shown, the X-axis guide rail assembly 700 includes an X-axis slide base 701 mounted on a crossbeam base plate 605. X-axis dovetail columns 703 are symmetrically arranged on the X-axis slide base 701. Multiple X-axis slides 705 have X-axis dovetail grooves 708 installed at their bottoms, allowing them to slide along the X-axis dovetail columns 703. An X-axis motor 702 is mounted on the X-axis slide 705. An X-axis drive gear 707 is fitted onto the portion of the X-axis motor 702's spindle that extends out of the X-axis slide 705. Two X-axis dovetail columns 703... An X-axis drive rack 706 is arranged between the X-axis slide base 701 and engages with multiple X-axis drive gears 707. Positioning blocks 704 for positioning multiple X-axis slides 705 are installed on multiple X-axis slides 705. The grating ruler 900 also includes a second measuring ruler 903 installed on one side of the X-axis slide 705. A second measuring head 904 corresponding to multiple sets of support unit frames 600 is installed on one side of the X-axis slide 705 above the second measuring ruler 903.

[0061] like Figure 13-17 As shown, the support unit 500 includes a support guide sleeve 506 passing through the support upper slider 602. A fixing plate 511 for connecting and fixing to the support upper slider 602 is fitted onto the support guide sleeve 506. A lifting column 508 is inserted into the support guide sleeve 506. A guide key 507 is provided between the inner side of the support guide sleeve 506 and the lifting column 508. A ball screw 509 is inserted into the bottom end of the lifting column 508, and a ball screw threaded onto the ball screw 509 is connected to the bottom end of the lifting column 508. The ball screw 505 is fitted with a retaining ring 510 on the inner side of the bottom end of the support guide sleeve 506. A connector 504, which cooperates with the retaining ring 510, encloses the ball screw 505 within the support guide sleeve 506 on the ball screw 509. The bottom end of the support guide sleeve 506 is connected to the top end of the motor housing 502. A Z-axis motor 501, whose main shaft is connected to one end of the ball screw 509 via a coupling 503, is installed inside the motor housing 502. The bottom end of the motor housing 502 is connected to the positioning block 704 via a positioning hole 525. In conjunction with this, a suction cup rotating head support 514 is installed at the top of the lifting column 508. The lifting column 508 has a first air passage 522 on its wall. A first air nozzle 523, connected to an external air pump, is installed at one end of the first air passage 522. The other end of the first air passage 522 is sealed to one end of a second air passage of the suction cup rotating head support 514. A second air nozzle, connected to one end of a rubber air hose 513, is installed at the other end of the second air passage. The top of the suction cup rotating head support 514 is hinged to the suction cup base 517 via a ball joint 520. The spherical part of the hinge column 520 is sealed and installed in the suction cup base 517 by the pressure cap 512. The suction cup 515 is fixed on the top of the suction cup base 517 by the clamping positioning block 516. A third air nozzle is installed on the side of the suction cup base 517 and communicates with the third air passage inside it. The third air nozzle is connected to the other end of the rubber air tube 513. The suction cup 515 is provided with a fourth air passage 521 that communicates with the third air passage. The clamping positioning block 516 is provided with a fifth air passage that communicates with the fourth air passage 521, forming a vacuum channel.

[0062] The aforementioned suction cup 515 is provided with an annular protrusion structure composed of at least four fan-shaped remora bionic suction cup structures. This structure effectively increases the deformation resistance of the suction cup 515 and improves the friction between the suction cup 515 and the surface being adsorbed, thereby enhancing the deformation resistance and adsorption efficiency of the suction cup 515 during the adsorption process. To maximize the contact area between the bionic fin 518 and the surface being adsorbed during adsorption, a first vacuum groove 524 is provided between two adjacent fan-shaped remora bionic suction cup structures. The fan-shaped remora bionic suction cup structure includes a central spine 519, with uniformly spaced fins on both sides of the central spine 519. Five biomimetic fish fins 518 are arranged, and each of the five biomimetic fish fins 518 is directly equipped with a second vacuum groove. The second vacuum groove can maintain a certain vacuum environment during the adsorption process. The suction cup has a total of four sets of skeleton structures, each of which is not connected to each other, ensuring its flexibility and adaptability. The first vacuum groove 524 further enhances the adsorption capacity of the suction cup and can adjust and distribute the pressure during the adsorption process to ensure the vacuum degree during the adsorption process, so as to achieve complete contact between the suction cup skeleton structure and the adsorbed surface, ensuring the adsorption stability and reliability of the suction cup under any curved parts and environmental conditions.

[0063] The ring-shaped protrusion structure, consisting of suction cup 515 and four fan-shaped remora bionic suction cup structures, is made of wear-resistant, high-temperature resistant, high-strength, and lightweight materials to effectively support and protect the suction cups, while adapting to the adsorption needs of various workpieces.

[0064] During the adsorption process, the suction cup 515 measures the contact pressure between the suction cup 515 and the workpiece in real time through a pressure sensor to control the adsorption stability and release state of the suction cup 515. The bionic fish fin 518 has an arc shape with a curvature of 0.5, which allows the bionic fish fin 518 to disperse the pressure when it comes into contact with the adsorbed surface, reducing single-point pressure and thus reducing stress concentration that could cause the suction cup to fall off.

[0065] This application also includes multiple temperature sensors, which are respectively arranged at the heat source locations, including: X-axis motor 702, Y-axis motor 802, Z-axis motor 501, both ends of the inner side of Y-axis slide base 801, both ends of the inner side of X-axis slide base 701, multiple X-axis slides 705, multiple Y-axis slides 803, multiple lifting columns 508, both ends of multiple guide keys 507, ball screw nut 505, and the surrounding environment of the tooling. The arrangement of the temperature sensors is shown in Table 1.

[0066] Table 1 Sensor Locations

[0067] sensor Location sensor Location <![CDATA[T1]]> X-axis motor <![CDATA[T8]]> X-axis slider <![CDATA[T2]]> Y-axis motor <![CDATA[T9]]> Y-axis slider <![CDATA[T3]]> Z-axis motor <![CDATA[T 10 ]]> Z-axis guide slider <![CDATA[T4]]> X-axis guide rail front end <![CDATA[T 11 ]]> Z-axis guide key upper end <![CDATA[T5]]> X-axis guide rail rear end <![CDATA[T 12 ]]> lower end of Z-axis guide key <![CDATA[T6]]> Y-axis guide rail front end <![CDATA[T 13 ]]> surrounding environment of work clothes <![CDATA[T7]]> Y-axis guide rail rear end

[0068] like Figure 18As shown, multiple Y-axis motors 802, multiple X-axis motors 702, and multiple Z-axis motors 501 are all electrically connected to a programmable logic controller (PLC). The PLC, the second measuring head 904, the first measuring head 901, the PMAC motion control card of the measuring device 4, the laser displacement sensor 401, and the pressure sensor are electrically connected to a computer.

[0069] The second embodiment of the present invention provides a method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture based on the first embodiment, comprising:

[0070] Step S10: The computer executes the pre-control preparation program to obtain the comprehensive error prediction model, the specific content of which is as follows:

[0071] The computer sends the motor test data to the programmable logic controller and sends corresponding error test commands to the second measuring head 904, the first measuring head 901, the PMAC motion control card of the measuring device 400, the laser displacement sensor 401, and multiple temperature sensors. The programmable logic controller (PLC) acquires test data and obtains test instructions, which are then sent to the X-axis motor 702, Y-axis motor 802, and Z-axis motor 501, respectively. The X-axis motor 702, Y-axis motor 802, and Z-axis motor 501 receive the corresponding test movement instructions and execute the corresponding operations. The second measuring head 904 and the first measuring head 901 receive the corresponding error test instructions and execute the corresponding operations. The first measuring head 901 acquires the first measuring head movement data and sends it to the computer. The second measuring head 904 acquires the second measuring head movement data and sends it to the computer. The PMAC motion control card of the measuring device 400 acquires the corresponding error test instructions and drives the laser displacement sensor 401 to move to the corresponding position. The laser displacement sensor 401 acquires the height of multiple suction cups 515 and sends it to the computer. Multiple temperature sensors acquire multiple real-time temperature data of each temperature measuring point and send them to the computer.

[0072] The computer acquires the travel data of the first measuring head, the travel data of the second measuring head, and compares the heights of multiple suction cups 515 with the motor test data to obtain the errors of the X, Y, and Z axes. The errors obtained in this application are separated into geometric errors and thermal errors.

[0073] δ(p,t)=δ G (p)+δ T (t) (1)

[0074] Where: δ(p,t) represents the comprehensive error of the P-axis of the flexible tooling, P=x,y,z; δG(p) is the geometric error, and δT(t) is the thermal error.

[0075] The geometric error is linear, and a polynomial is used for fitting to obtain the geometric error model:

[0076] δG (p)=α0+α1·p+α2·p 2 +...+α n ·p n (2)

[0077] Where: α0 is a constant term, α i = (i = 1, 2, ..., n) is the coefficient of geometric error; p is the nominal position of the linear axis.

[0078] Thermal error is a non-linear error, which is fitted using a neural network:

[0079] δ T (t)=(k i -k0)·p (3)

[0080] Where k0 is the slope of the geometric positioning error curve; k i This is the slope of the thermal error curve. The slope of the error curve is obtained through first-order polynomial fitting in least-squares fitting.

[0081] Therefore, the computer acquires multiple real-time temperature data points. However, during the establishment of the thermal error model, it is necessary to screen the temperature measurement points, remove interference terms, and retain the temperature measurement points with the highest correlation to the error. The specific steps are as follows:

[0082] The correlation coefficient matrix between various temperature measurement points was established using the Pearson correlation coefficient method.

[0083] The real-time temperature data was clustered into m groups using factor analysis, as follows:

[0084] The data samples are standardized and the correlation matrix is ​​calculated. The eigenvalues ​​and eigenvectors of the correlation matrix R are then determined. The number of principal factors is determined based on the cumulative contribution rate required by the system. Assuming m common factors are extracted, the original data is divided into m groups, where m is the smallest integer satisfying a cumulative contribution rate ≥ 0.85. The factor loading matrix is ​​calculated, and the original data is grouped to obtain m groups of real-time temperature data.

[0085] The real-time temperature data with the highest correlation coefficient is obtained based on the correlation coefficient matrix between each temperature measuring point and the real-time temperature data of m groups.

[0086] The computer establishes an initial BP neural network model and applies an elastic perturbation optimization algorithm to it to obtain an optimized BP neural network model, as detailed below:

[0087] (1) Randomly initialize the weights and thresholds of the network and set the basic parameters: learning rate lr, top perturbation limit pl, backoff factor rf, maximum perturbation frequency pf, and set the probability of perturbation pp, etc.

[0088] (2) Apply forward propagation to the input data and calculate the network output; apply backward propagation to the output error and calculate the gradient.

[0089] (3) Before the gradient-based weight update, a portion of the weights and thresholds are randomly selected and a small percentage perturbation is applied, the size of which depends on the top-level perturbation limit.

[0090] (4) Update the weights and thresholds, taking into account both gradient information and perturbation information.

[0091] (5) Evaluate network performance. If it has deteriorated due to the previous disturbance, apply a rollback factor to bring it back to the previous state and reduce the impact of the disturbance.

[0092] (6) Adaptive disturbance adjustment: Based on historical performance, the disturbance amplitude is adaptively adjusted by increasing or decreasing the top-level disturbance limit and the disturbance frequency.

[0093] (7) Once the convergence condition or the maximum number of training iterations is reached, training ends, thus obtaining the optimized BP neural network model.

[0094] The real-time temperature data with the highest correlation coefficient and the slope of the thermal error curve are fed into the optimized BP neural network to model the thermal error and fit the relationship between the temperature variable and the slope k. i The relationship between them yields the thermal error BP neural network model:

[0095] k i =β0+β1T1+β2T2+…+β m T m +ε (4)

[0096] β0 is the correlation coefficient constant, β i (i = 1, 2, ..., m) represents the correlation coefficient for the corresponding temperature, T i (i = 1, 2, ..., m) represents the corresponding temperature, and ε is the thermal error constant.

[0097] Based on the BP neural network model of the errors and thermal errors of the X, Y, and Z axes, a comprehensive error prediction model is derived, as shown in formula (5):

[0098] δ(p,t)=α0+(α1+β0+β1T1+β2T2+…+β m T m +ε)·p+α2·p 2 +…+α n ·p n (5)

[0099] In step S20, the computer uses 3D modeling software to obtain the height information of the key support points of the workpiece based on the curved workpiece model, and obtains the temperature data of the key temperature measuring points of the flexible support fixture sent by multiple temperature sensors in real time. Based on the temperature data of the key temperature measuring points of the flexible support fixture in real time, the computer obtains the errors of the three axes of the linear guide rail (x, y, and z) through a comprehensive error prediction model. Based on the height information of the key support points of the workpiece and the errors of the three axes of the linear guide rail (x, y, and z), the computer obtains the travel data of the X-axis motor 702, the travel data of the Y-axis motor 802, and the travel data of the Z-axis motor 501 and sends them to the programmable logic controller.

[0100] In step S30, the programmable logic controller obtains the travel data of the X-axis motor 702, the Y-axis motor 802, and the Z-axis motor 501 respectively to obtain the final travel command of the X-axis motor 702, the final travel command of the Y-axis motor 802, and the final travel command of the Z-axis motor 501, and sends them to the X-axis motor 702, the Y-axis motor 802, and the Z-axis motor 501 respectively.

[0101] In step S40, the X-axis motor 702, Y-axis motor 802 and Z-axis motor 501 receive the final X-axis motor 702 travel command, the final Y-axis motor 802 travel command and the final Z-axis motor 501 travel command respectively and execute the corresponding operations.

[0102] In another embodiment, after step S40 is completed, the laser displacement sensor 401 acquires the height of multiple suction cups 515. Based on the Z-axis height information of each measuring point on the curved surface read by the laser displacement sensor 401, the point cloud information of the curved surface component is acquired. The curved surface is reconstructed through reverse engineering, and compared with the curved surface workpiece model using relevant software. The thermal error BP neural network model in the comprehensive error prediction model is obtained by machine learning, and it is continuously adjusted and improved to obtain the best positioning accuracy.

[0103] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. It can be applied to various fields suitable for the present invention. Other modifications can be readily made by those skilled in the art. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and examples shown and described herein.

Claims

1. A method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture, characterized in that, include: The computer executes a pre-control preparation program to obtain a comprehensive error prediction model; The computer uses 3D modeling software to obtain the height information of the key support points of the workpiece based on the curved workpiece model, and obtains the temperature data of the key temperature measuring points of the flexible support fixture sent by multiple temperature sensors in real time. Based on the temperature data of the key temperature measuring points of the flexible support fixture in real time, the computer obtains the errors of the three axes of the linear guide rail x, y and z through a comprehensive error prediction model. Based on the height information of the key support points of the workpiece and the errors of the three axes of the linear guide rail x, y and z, the computer obtains the travel data of the X-axis motor (702), the travel data of the Y-axis motor (802) and the travel data of the Z-axis motor (501) and sends them to the programmable logic controller. The programmable logic controller acquires the travel data of the X-axis motor (702), the Y-axis motor (802), and the Z-axis motor (501) respectively to obtain the final travel command of the X-axis motor (702), the final travel command of the Y-axis motor (802), and the final travel command of the Z-axis motor (501), and sends them to the X-axis motor (702), the Y-axis motor (802), and the Z-axis motor (501) respectively. The X-axis motor (702), Y-axis motor (802) and Z-axis motor (501) respectively receive the final X-axis motor (702) travel command, the final Y-axis motor (802) travel command and the final Z-axis motor (501) travel command and execute the corresponding operations; The computer executes a pre-control preparation procedure to obtain a comprehensive error prediction model, including: The computer sends the motor test data to the programmable logic controller and sends corresponding error test commands to the second measuring head (904), the first measuring head (901), the PMAC motion control card of the measuring device (400), the laser displacement sensor (401), and multiple temperature sensors; The programmable logic controller (PLC) acquires test data, obtains test instructions, and sends them to the X-axis motor (702), Y-axis motor (802), and Z-axis motor (501), respectively. The X-axis motor (702), Y-axis motor (802), and Z-axis motor (501) receive corresponding test travel instructions and execute corresponding operations. The second measuring head (904) and the first measuring head (901) receive corresponding error test instructions and execute corresponding operations. The first measuring head (901) acquires the first measuring head travel data and sends it to the computer. The second measuring head (904) acquires the second measuring head travel data and sends it to the computer. The PMAC motion control card of the measuring device (400) acquires the corresponding error test instructions and drives the laser displacement sensor (401) to move to the corresponding position. The laser displacement sensor (401) acquires the height of multiple suction cups (515) and sends it to the computer. The multiple temperature sensors acquire multiple real-time temperature data of each temperature measuring point and send them to the computer. The computer acquires the travel data of the first measuring head, the travel data of the second measuring head, and compares the heights of multiple suction cups (515) with the motor test data to obtain the errors of the X, Y, and Z axes; the computer acquires multiple real-time temperature data, establishes the correlation coefficient matrix between each temperature measuring point using the Pearson correlation coefficient method, and clusters the multiple real-time temperature data into m groups using factor analysis to obtain real-time temperature data. Based on the correlation coefficient matrix between each temperature measuring point and the m groups of real-time temperature data, the real-time temperature data with the largest correlation coefficient is obtained. The computer establishes an initial BP neural network model and performs an elastic perturbation optimization algorithm on it to obtain an optimized BP neural network model. The real-time temperature data with the largest correlation coefficient and the slope of the thermal error curve are then substituted into the optimized BP neural network to obtain a thermal error BP neural network model. Based on the BP neural network model of the errors and thermal errors of the X, Y, and Z axes, a comprehensive error prediction model is derived, as shown in formula (1): （1） δ(p,t) represents the overall error, α0 is a constant term, αi = (i = 1, 2,…, n) is the coefficient of geometric error; p is the nominal position of the linear axis, β0 is the correlation coefficient constant, βi (i = 1, 2,…, m) is the correlation coefficient of the corresponding temperature, ε is the thermal error constant, and Ti = (i = 1, 2,…, m) is the corresponding temperature.

2. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 1, characterized in that, The vacuum adsorption multi-point flexible support fixture includes a fixture frame (100) with a top opening. A Y-axis guide rail assembly (800) is symmetrically arranged at the bottom of the fixture frame (100). Multiple sets of support unit frames (600) are mounted on multiple Y-axis slides (803) of the Y-axis guide rail assembly (800) at both ends. An X-axis guide rail assembly (700) is arranged on the inner bottom of each set of support unit frames (600). Multiple X-axis slides (803) of the X-axis guide rail assembly (700) are mounted on multiple X-axis slides (803). The axis slide (705) is provided with support units (500) that can slide along the inner side of the support unit frame (600). The upper part of the multiple support units (500) is provided with measuring devices (400) mounted on the upper part of the tooling frame (100). The measuring device (400) is provided with a laser displacement sensor (401) on the execution end. The Y-axis guide rail assembly (800) and the X-axis guide rail assembly (700) are respectively provided with grating rulers (900) on one side.

3. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 2, characterized in that, The tooling frame (100) includes two first side plates (101), two second side plates (108), and a base plate (104) that are detachably connected by a base plate rod (105). The top of the two first side plates (101) and the two second side plates (108) is provided with a worktable (106). The worktable (106) is provided with two upper baffles (102) and two tooling upper slide rails (103) at positions corresponding to the two first side plates (101) and the two second side plates (108). The two tooling upper slide rails (103) have profiles (107) fixed on the worktable (106) on the back side for supporting the measuring device (400).

4. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 3, characterized in that, The Y-axis guide rail assembly (800) includes a Y-axis slide base (801) disposed on the upper side of the base plate (104) near the inner side of the two second side plates (108). Y-axis dovetail columns (805) are symmetrically arranged on the Y-axis slide base (801). The bottom of the plurality of Y-axis slides (803) is provided with Y-axis dovetail grooves (807) that can slide along the Y-axis dovetail columns (805). A Y-axis motor (802) is disposed on the Y-axis slide (803), and the main shaft of the Y-axis motor (802) extends out of the Y-axis slide (803). The part is fitted with a Y-axis drive gear (806), and a Y-axis drive rack (804) is arranged between the two Y-axis dovetail columns (805) and fixed on the Y-axis slide base (801) and cooperating with multiple Y-axis drive gears (806). The grating ruler (900) includes a first measuring ruler (902) set on one side of the Y-axis slide (803). The first measuring ruler (902) is provided on one side of the Y-axis slide (803) on the upper part of the Y-axis slide (803) with a first measuring head (901) corresponding to multiple sets of support unit frames (600).

5. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 4, characterized in that, The support unit frame (600) includes a crossbeam base plate (605) with its bottom ends set on a Y-axis slide table (803). The four corners of the crossbeam base plate (605) are connected to the four corners of the upper cover plate (604) via support rods (606). The upper cover plate (604) has upper baffle sliders (601) at both ends that can move along the grooves inside the upper slide rail (103) of the tooling. The top of both sides of the upper cover plate (604) are symmetrically provided with supporting upper slide rails (603). The upper support slide rail (603) is provided with a plurality of upper support slide blocks (602) that can slide along its slide groove and are sleeved on a plurality of support units (500). The two adjacent upper support slide rails (603) and the upper support slide rail (603) and the profile (107) are connected by an X-axis dust cover (300). The two adjacent upper support slide blocks (602) and the upper support slide block (602) and the tooling upper slide rail (103) are connected by a Y-axis dust cover (200).

6. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 5, characterized in that, The X-axis guide rail assembly (700) includes an X-axis slide base (701) mounted on a crossbeam base plate (605). X-axis dovetail columns (703) are symmetrically arranged on the X-axis slide base (701). Multiple X-axis slides (705) have X-axis dovetail grooves (708) at their bottoms that can slide along the X-axis dovetail columns (703). An X-axis motor (702) is mounted on each X-axis slide (705). An X-axis drive gear (707) is fitted onto the portion of the X-axis motor (702) that extends beyond the X-axis slide (705). Two X-axis dovetail columns (703)... 03) An X-axis drive rack (706) is arranged between the X-axis slide base (701) and cooperates with multiple X-axis drive gears (707). The multiple X-axis slides (705) are provided with positioning blocks (704) for positioning the multiple X-axis slides (705). The grating ruler (900) also includes a second measuring ruler (903) provided on one side of the X-axis slide (705). The upper part of the second measuring ruler (903) is provided on one side of the X-axis slide (705) with a second measuring head (904) corresponding to the multiple sets of support unit frames (600).

7. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 6, characterized in that, The support unit (500) includes a support guide sleeve (506) passing through the upper support slider (602). A fixing plate (511) for connecting and fixing to the upper support slider (602) is fitted onto the support guide sleeve (506). A lifting column (508) is inserted into the support guide sleeve (506). A guide key (507) is provided between the inner side of the support guide sleeve (506) and the lifting column (508). A ball screw (509) is inserted into the bottom end of the lifting column (508), and a threaded roller connected to the bottom end of the lifting column (508) is fitted onto the ball screw (509). A ball screw nut (505) is provided with a retaining ring (510) on the inner side of the bottom end of the support guide sleeve (506). A connector (504) is fitted on the ball screw (509) to cooperate with the retaining ring (510) and enclose the ball screw nut (505) in the support guide sleeve (506). The bottom end of the support guide sleeve (506) is connected to the top end of the motor housing (502). A Z-axis motor (501) is provided in the motor housing (502) with its main shaft connected to one end of the ball screw (509) through a coupling (503). The bottom end of the motor housing (502) is provided with a positioning hole (525). In conjunction with the positioning block (704), the top of the lifting column (508) is provided with a suction cup rotating head support (514). The pipe wall of the lifting column (508) is provided with a first air passage (522). One end of the first air passage (522) is provided with a first air nozzle (523) connected to an external air pump. The other end of the first air passage (522) is sealed to one end of the second air passage of the suction cup rotating head support (514). The other end of the second air passage is provided with a second air nozzle connected to one end of a rubber air tube (513). The top of the suction cup rotating head support (514) is connected to the suction cup base (514) through a ball joint column (520). 7) The ball joint is hinged. The ball part of the ball joint column (520) is closed and set in the suction cup base (517) by the pressure cap (512). The suction cup (515) is fixed on the top of the suction cup base (517) by the pressing positioning block (516). The suction cup base (517) is provided with a third air nozzle that communicates with the third air passage inside. The third air nozzle is connected to the other end of the rubber air tube (513). The suction cup (515) is provided with a fourth air passage (521) that communicates with the third air passage. The pressing positioning block (516) is provided with a fifth air passage that communicates with the fourth air passage (521).

8. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 7, characterized in that, The suction cup (515) is provided with an annular protrusion structure composed of at least four fan-shaped remora bionic suction cup structures. A first vacuum groove (524) is provided between two adjacent fan-shaped remora bionic suction cup structures. The fan-shaped remora bionic suction cup structure includes a central spine (519). Five bionic fish fins (518) are evenly arranged on both sides of the central spine (519). A second vacuum groove is directly provided on the five bionic fish fins (518). The bionic fish fins (518) are arc-shaped with a curvature of 0.

5.

9. The method for controlling the positioning accuracy of a vacuum adsorption multi-point flexible support fixture according to claim 8, characterized in that, It also includes multiple temperature sensors, which are respectively arranged at the heat source location. The heat source location includes: X-axis motor (702), Y-axis motor (802), Z-axis motor (501), both ends of the inner side of the Y-axis slide base (801), both ends of the inner side of the X-axis slide base (701), multiple X-axis slides (705), multiple Y-axis slides (803), multiple lifting columns (508), both ends of multiple guide keys (507), ball screw nuts (505) and the surrounding environment of the tooling. The multiple Y-axis motors (802), multiple X-axis motors (702) and multiple Z-axis motors (501) are all electrically connected to the programmable logic controller. The programmable logic controller, the second measuring head (904), the first measuring head (901), the PMAC motion control card of the measuring device (400), the laser displacement sensor (401), and the pressure sensor are electrically connected to the computer.

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