Chip detection and sorting equipment and sorting method

Abstract

The present invention discloses a chip detection and sorting device and a sorting method, belonging to the field of chip detection and sorting. A chip detection and sorting device comprises an electrical cabinet, a manipulator, a vacuum suction cup installed at the free end of the manipulator and an industrial camera, and also comprises: a conveying frame fixedly connected to the electrical cabinet, a conveying frame being slidably connected to the conveying frame, and a placement frame being rotatably connected inside the conveying frame. The present invention, through the expansion and contraction of the connecting hose, can, on the one hand, enable the jet pipe to start to spray gas when the chip reaches the flipping groove, and increase the jet pressure of the jet pipe, so that the high-pressure gas blown out by the jet pipe acts under the chip, which can enable the chip to automatically flip over and take an image of the back of the chip, thereby realizing the appearance inspection of the front and back sides of the chip. On the other hand, the expansion and contraction of the connecting hose can be used to move the position of the industrial camera, expand the shooting range of the industrial camera, and improve the appearance inspection accuracy of the chip.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection and sorting, and in particular to a chip detection and sorting device and a sorting method. Background Art

[0002] Chip inspection and sorting is an important part of the semiconductor manufacturing process, which involves quality inspection and performance classification of chips. In this process, a series of automated equipment and technologies are used to ensure that the quality and performance of chips meet the design standards. The following are the basic steps and some key technical points of chip inspection and sorting: Inspection: Electrical performance inspection: Evaluate the performance of the chip by testing its electrical parameters such as current, voltage, and resistance. Functional testing: Program the chip to test whether it can perform functions according to design requirements. Appearance inspection: Use optical inspection technology to check the appearance defects of the chip. Structural integrity inspection: Check the structural integrity of the chip through X-ray or other non-destructive inspection methods. Sorting: Automatic sorting machine: Use high-speed robotic arms and precise control systems to classify the chips according to the test results. Optical sorting machine: Use optical principles to scan the chips at high speed and classify them according to their appearance characteristics. Sorting algorithm: Use advanced algorithms to optimize the sorting process and improve sorting efficiency and accuracy. Data processing: Test data acquisition: Automatically collect data during chip testing. Data analysis: Analyze the collected data to determine whether the chip meets the quality standards. Traceability system: Establish traceability between chip production batches and test data so that problems can be tracked when necessary.

[0003] At present, in the process of chip inspection, it is necessary to inspect the appearance of the chip to determine whether the quality of the chip after manufacturing is completed. In the process of inspection, it is necessary to inspect the front and back of the chip to detect whether there are defects in the circuit pattern and lead frame on the front of the chip, and whether the circuit or specific structure on the back of the chip meets the requirements. The current method is generally to turn the chip over by a robot or to uniformly inspect the front and back of the chip first, resulting in low efficiency in chip appearance inspection, thereby affecting the production efficiency of the chip. Based on this, a chip inspection and sorting device and a sorting method are proposed. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the method adopted in the prior art is generally to turn over the chip by a robot or to uniformly inspect the front side of the chip and then the back side of the chip, resulting in low efficiency of chip appearance inspection, thereby affecting the production efficiency of the chip, and to propose a chip inspection and sorting equipment and sorting method.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A chip detection and sorting device comprises an electrical cabinet, a manipulator, a vacuum suction cup installed at the free end of the manipulator and an industrial camera, and also comprises: a conveying rack fixedly connected to the electrical cabinet, a conveying frame slidably connected to the conveying rack, a placement frame rotatably connected in the conveying frame, positioning mechanisms fixedly connected to both ends of the placement frame, and a turnover groove provided on the conveying rack; an air injection pipe fixedly connected to the conveying rack, an air injection pipe fixedly connected to the air injection pipe, and an air injection end of the air injection pipe is arranged in the turnover groove, wherein the chip is placed in the placement frame and the size of the placement frame is adapted to the size of the chip.

[0007] In order to clean the front and back sides of the chip, remove dust and other impurities on the chip, ensure the clarity of image capture, and improve the detection quality, preferably, it also includes an upper vacuum hood fixedly connected to the top of the conveyor frame, the top of the upper vacuum hood is fixedly connected to an upper vacuum pipe, the upper vacuum pipe is fixedly connected to a connecting pipe, the upper vacuum pipe is fixedly connected to a fixing frame, a motor is installed on the fixing frame, the output end of the motor is fixedly connected to a rotating shaft, the rotating shaft is fixedly connected to a fan blade, the end of the rotating shaft away from the motor is fixedly connected to a cleaning rod, the end of the cleaning rod away from the rotating shaft is fixedly connected to a cleaning brush, the cleaning brush is in contact with the chip, and the cleaning rod is rotatably connected in the upper vacuum hood.

[0008] Furthermore, a lower exhaust hood is fixedly connected to the interior of the conveying rack, a lower exhaust pipe is fixedly connected to the bottom of the lower exhaust hood, the lower exhaust pipe is communicated with the connecting pipe, the fixed rack, motor, rotating shaft and fan blades are also installed in the lower exhaust pipe, and a cleaning rod and a cleaning brush are also installed in the lower exhaust hood.

[0009] In order to enable the airflow generated by cleaning to blow toward the chip so that the chip can be turned over, it further includes an air supply pipe fixedly connected to the connecting pipe, the end of the air supply pipe is fixedly connected to a cleaning pipe, the end of the cleaning pipe away from the air supply pipe is fixedly connected to a connecting hose, the end of the connecting hose away from the cleaning pipe is fixedly connected to a slide, the top of the slide is fixedly connected to a slide, wherein both sides of the conveying frame are fixedly connected to a limit frame, the slide is slidably connected to the limit frame, the industrial camera is installed on the inner top of the slide, the slide is slidably connected to the air injection pipe, the top of the electrical cabinet is fixedly connected to a slide seat, and the slide is slidably connected to the slide seat.

[0010] In order to clean the filter, improve the gas circulation efficiency, and ensure the flipping stability of the chip, it further includes a filter slidably connected in the cleaning tube, one side of the filter is fixedly connected with a first magnetic rod, and the first magnetic rod is sleeved with a shaking spring, wherein a limiting sleeve is fixedly connected in the cleaning tube, the first magnetic rod is slidably connected to the limiting sleeve, the two ends of the shaking spring are respectively fixedly connected to the filter and the cleaning tube, and the shaking spring is sleeved on the limiting sleeve.

[0011] In order to increase the jet pressure of the jet pipe so that the chip can be turned over, it further includes a push rod fixedly connected to the slide, and an elastic connecting rope is fixedly connected inside the push rod, wherein the end of the gas injection pipe is fixedly connected to a second magnetic sleeve, and the second magnetic sleeve is fixedly connected to a connecting spring, and the connecting spring is fixedly connected to the slide, and a third magnetic rod is attached to the end of the push rod, one end of the third magnetic rod is fixedly connected to the elastic connecting rope, and the other end of the third magnetic rod is fixedly connected to a connecting frame, and the side of the connecting frame away from the third magnetic rod is fixedly connected to the second magnetic rod, and the end of the cleaning tube is fixedly connected to the first magnetic sleeve, and the push rod is slidably connected to the second magnetic sleeve, and the third magnetic rod and the second magnetic sleeve are attracted to each other, and the second magnetic rod and the first magnetic sleeve are slidably connected and the two are attracted to each other.

[0012] Furthermore, it also includes a return spring fixedly connected in the gas injection pipe, the end of the return spring is fixedly connected to a magnetic plate, and the side of the magnetic plate close to the return spring is fixedly connected to a limiting rod, wherein the limiting rod is slidably connected to the gas injection pipe, and the magnetic plate is attracted to the connecting frame.

[0013] In order to ensure the temperature of the chip when the placement frame is transporting the chip, preferably, the positioning mechanism includes a slide groove opened in the placement frame, a positioning head is slidably connected in the slide groove, and one end of the positioning head is fixedly connected to a positioning spring, wherein a positioning hole is opened in the conveying frame, one end of the positioning head away from the positioning spring is adapted to the positioning hole, and one end of the positioning spring away from the positioning head is fixedly connected to the slide groove.

[0014] Furthermore, a display screen is installed on the top of the electrical cabinet, a control panel is installed on the top of the electrical cabinet, and the manipulator is installed on the top of the electrical cabinet.

[0015] A chip detection and sorting method comprises the following steps:

[0016] Step 1: Place the chip in the placement frame;

[0017] Step 2: conveying the chips through the conveying rack, conveying frame and placement frame;

[0018] Step 3: During the conveying process, start the motor to make the cleaning brush clean the front and back of the chip, and start the industrial camera to take pictures at the same time;

[0019] Step 4: When the chip is transported to the flipping groove, it is automatically flipped over, and the industrial camera takes a picture of the back of the chip;

[0020] Step 5: Qualified chips are mechanically transported to the next station by the conveying frame and the placement frame. Unqualified chips are removed by the robot and vacuum suction cup, placed in the defective collection frame, and displayed on the display screen.

[0021] Compared with the prior art, the present invention provides a chip detection and sorting device and a sorting method, which have the following beneficial effects:

[0022] 1. The chip detection and sorting equipment, through the expansion and contraction of the connecting hose, can, on the one hand, make the jet pipe start to spray gas when the chip reaches the flipping groove, and increase the jet pressure of the jet pipe, so that the high-pressure gas blown out by the jet pipe acts under the chip, which can automatically turn the chip over and take an image of the back of the chip, thereby realizing the appearance inspection of the front and back of the chip. On the other hand, the expansion and contraction of the connecting hose can be used to move the position of the industrial camera, expand the shooting range of the industrial camera, and improve the appearance inspection accuracy of the chip.

[0023] 2. The chip detection and sorting equipment can clean the front and back of the chip by rotating the cleaning brush, so as to prevent the front and back of the chip from being affected by dust and other impurities, thereby ensuring the accuracy of chip appearance detection. When the cleaning brush rotates, the rotation of the fan blades can extract the dust and other impurities generated by cleaning into the cleaning tube, thereby preventing dust and other impurities from falling everywhere and affecting the cleanliness of the work surface, thereby ensuring the quality of chip appearance detection.

[0024] 3. The chip detection and sorting equipment, through the reciprocating sliding of the connecting frame, can, on the one hand, enable the gas injection pipe to realize automatic opening and closing according to the position of the chip, so that the gas pressure is relatively high when the gas injection pipe releases gas, and on the other hand, can cause the filter to vibrate, so that the filter can realize self-cleaning, and prevent dust and other impurities from clogging the holes of the filter, affecting the transmission efficiency of the airflow, so that the chip cannot be automatically turned over, thereby ensuring the automatic turning of the chip, realizing all-round detection of the front and back of the chip, improving the detection efficiency, and preventing the gas blown to the chip from containing dust and other impurities, causing the chip to be contaminated and affecting the detection accuracy.

[0025] 4. The chip detection and sorting equipment, through the setting of the positioning mechanism, ensures that the chip can always be in a horizontal position during the process of transmitting the chip on the front or back side, thereby preventing the chip and the conveyor frame from being squeezed, worn and deformed, and providing good protection for the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the three-dimensional structure of a chip detection and sorting device proposed by the present invention;

[0027] Figure 2 This is a schematic diagram of the middle section structure of a chip detection and sorting device proposed by the present invention;

[0028] Figure 3 A chip detection and sorting device proposed by the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0029] Figure 4 This is a schematic diagram of the side section structure of a chip detection and sorting device proposed by the present invention;

[0030] Figure 5 A chip detection and sorting device proposed by the present invention Figure 4 The enlarged structural diagram at B in the middle;

[0031] Figure 6 A schematic diagram of a partial three-dimensional structure of a chip detection and sorting device proposed by the present invention;

[0032] Figure 7 A schematic diagram of the three-dimensional structure of a cleaning brush for chip detection and sorting equipment proposed by the present invention;

[0033] Figure 8 This is a schematic diagram of a three-dimensional partially cutaway structure of a through-and-closed tube of a chip detection and sorting device proposed by the present invention.

[0034] In the figure: 1. electrical cabinet; 2. conveyor frame; 3. placement frame; 4. manipulator; 5. vacuum suction cup; 6. display screen; 7. control panel; 8. limit frame; 9. slide frame; 10. industrial camera; 11. flip slot; 12. upper exhaust hood; 13. lower exhaust hood; 14. upper exhaust pipe; 15. lower exhaust pipe; 16. fixed frame; 17. motor; 18. rotating shaft; 19. fan blade; 20. cleaning rod; 21. cleaning brush; 22. connecting pipe; 23. air pipe; 24. cleaning pipe; 25. connecting hose; 26. Slide plate; 27. Air injection pipe; 28. Air injection pipe; 29. ​​Filter; 30. First magnetic rod; 31. Limit sleeve; 32. Shake spring; 33. First magnetic sleeve; 34. Second magnetic rod; 35. Connecting frame; 36. Third magnetic rod; 37. Push rod; 38. Elastic connecting rope; 39. Second magnetic sleeve; 40. Magnetic plate; 41. Limit rod; 42. Reset spring; 43. Connecting spring; 44. Conveying frame; 45. Positioning hole; 46. Slide groove; 47. Positioning head; 48. Positioning spring; 49. Slide seat. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0036] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0037] Example:

[0038] Reference Figure 1-Figure 4 , Figure 6 , a chip detection and sorting equipment, including an electrical cabinet 1, a manipulator 4, a vacuum suction cup 5 installed at the free end of the manipulator 4 and an industrial camera 10, and also includes: a conveying frame 2 fixedly connected to the electrical cabinet 1, a conveying frame 44 is slidably connected to the conveying frame 2, a placement frame 3 is rotatably connected in the conveying frame 44, and both ends of the placement frame 3 are fixedly connected with a positioning mechanism, the positioning mechanism includes a slide 46 opened in the placement frame 3, a positioning head 47 is slidably connected in the slide 46, and one end of the positioning head 47 is fixedly connected with a positioning spring 48, wherein a positioning hole 45 is opened in the conveying frame 44, and one end of the positioning head 47 away from the positioning spring 48 is adapted to the positioning hole 45, and one end of the positioning spring 48 away from the positioning head 47 is fixedly connected to the slide 46, a display screen 6 is installed on the top of the electrical cabinet 1, a control panel 7 is installed on the top of the electrical cabinet 1, the manipulator 4 is installed on the top of the electrical cabinet 1, and a flip groove 11 is opened on the conveying frame 2.

[0039] During detection and analysis, the chip is placed in the placement frame 3, and then transported through the conveyor rack 2, the conveyor frame 44 and the placement frame 3. During the transportation process, since the positioning head 47 is in the positioning hole 45 under the action of the positioning spring 48, the chip will be transported in parallel, and when the chip transportation starts, the industrial camera 10 is started to capture the appearance image of the chip. When defects are found in the chip from the captured image, the robot 4 is actuated to remove the unqualified chip from the placement frame 3 through the vacuum suction cup 5 and place it in the defective product collection frame.

[0040] Reference Figure 1 , Figure 3 , Figure 6 , Figure 7, also includes an upper exhaust hood 12 fixedly connected to the top of the conveying frame 2, the top of the upper exhaust hood 12 is fixedly connected to an upper exhaust pipe 14, the upper exhaust pipe 14 is fixedly connected to a connecting pipe 22, the upper exhaust pipe 14 is fixedly connected to a fixing frame 16, a motor 17 is installed on the fixing frame 16, the output end of the motor 17 is fixedly connected to a rotating shaft 18, the rotating shaft 18 is fixedly connected to a fan blade 19, the rotating shaft 18 is fixedly connected to a cleaning rod 20 at one end away from the motor 17, and the cleaning rod 20 is far away from the motor 17. A cleaning brush 21 is fixedly connected to one end of the rotating shaft 18, and the cleaning brush 21 is in contact with the chip. The cleaning rod 20 is rotatably connected to the upper exhaust hood 12. The interior of the conveying frame 2 is fixedly connected to the lower exhaust hood 13, and the bottom of the lower exhaust hood 13 is fixedly connected to the lower exhaust pipe 15. The lower exhaust pipe 15 is connected to the connecting pipe 22. The fixed frame 16, the motor 17, the rotating shaft 18 and the fan blades 19 are also installed in the lower exhaust pipe 15, and the cleaning rod 20 and the cleaning brush 21 are also installed in the lower exhaust hood 13.

[0041] When the chip conveying inspection starts, the motor 17 is started, so that the rotating shaft 18 drives the fan blades 19 and the cleaning rod 20 to rotate, and then the cleaning brush 21 rotates. When the chip passes through the cleaning brush 21, the cleaning brush 21 cleans the front and back of the chip, and the cleaned dust and air flow are drawn into the upper exhaust pipe 14 and the lower exhaust pipe 15 under the action of the fan blades 19, and enter the connecting pipe 22;

[0042] The clarity of the image captured by the industrial camera 10 is prevented from being affected by the presence of dust and other impurities on the front and back of the chip, thereby ensuring the accuracy of the chip appearance inspection. When the cleaning brush 21 rotates, the rotation of the fan blades 19 can extract the dust and other impurities generated by cleaning into the cleaning tube 24, thereby preventing dust and other impurities from falling everywhere and affecting the cleanliness of the work surface, thereby ensuring the quality of the chip appearance inspection.

[0043] Reference Figure 1 , Figure 2 , Figure 4-Figure 6 , Figure 8, further comprising: an air injection pipe 27 fixedly connected to the conveying rack 2, an air injection pipe 28 fixedly connected to the air injection pipe 27, an air injection end of the air injection pipe 28 being arranged in the flip groove 11, wherein the chip is placed in the placement frame 3 and the size of the placement frame 3 matches the size of the chip, and further comprising an air supply pipe 23 fixedly connected to the connecting pipe 22, an end of the air supply pipe 23 fixedly connected to a cleaning pipe 24, an end of the cleaning pipe 24 away from the air supply pipe 23 fixedly connected to a connecting hose 25, an end of the connecting hose 25 away from the cleaning pipe 24 fixedly connected to a slide 26, a top of the slide 26 fixedly connected to a slide 9, wherein the Both sides of the conveying frame 2 are fixedly connected to the limit frame 8, the slide 9 is slidably connected to the limit frame 8, the industrial camera 10 is installed on the inner top of the slide 9, the slide 26 is slidably connected to the gas injection pipe 27, the top of the electrical cabinet 1 is fixedly connected to the slide 49, the slide 26 is slidably connected to the slide 49, and also includes a filter 29 slidably connected in the cleaning pipe 24, one side of the filter 29 is fixedly connected to the first magnetic rod 30, the first magnetic rod 30 is sleeved with a shaking spring 32, wherein the cleaning pipe 24 is fixedly connected to the limit sleeve 31, the first magnetic rod 30 is slidably connected to the limit sleeve 31, and the two ends of the shaking spring 32 The ends are fixedly connected to the filter screen 29 and the cleaning tube 24 respectively, the shaking spring 32 is sleeved on the limiting sleeve 31, and also includes a push rod 37 fixedly connected to the slide plate 26, and an elastic connecting rope 38 is fixedly connected inside the push rod 37, wherein the end of the gas injection tube 27 is fixedly connected to a second magnetic sleeve 39, and a connecting spring 43 is fixedly connected to the second magnetic sleeve 39, and the connecting spring 43 is fixedly connected to the slide plate 26, and the end of the push rod 37 is fitted with a third magnetic rod 36, one end of the third magnetic rod 36 is fixedly connected to the elastic connecting rope 38, and the other end of the third magnetic rod 36 is fixedly connected to a connecting frame 35, and the connecting frame 35 is away from A second magnetic rod 34 is fixedly connected to one side of the third magnetic rod 36, a first magnetic sleeve 33 is fixedly connected to the end of the cleaning tube 24, the push rod 37 is slidably connected to the second magnetic sleeve 39, the third magnetic rod 36 is attracted to the second magnetic sleeve 39, the second magnetic rod 34 is slidably connected to the first magnetic sleeve 33 and the two are attracted to each other, and also includes a reset spring 42 fixedly connected to the gas injection tube 27, a magnetic plate 40 is fixedly connected to the end of the reset spring 42, and a limiting rod 41 is fixedly connected to the side of the magnetic plate 40 close to the reset spring 42, wherein the limiting rod 41 is slidably connected to the gas injection tube 27, and the magnetic plate 40 is attracted to the connecting frame 35.

[0044] The airflow and dust entering the connecting pipe 22 will be transmitted to the cleaning pipe 24 under the action of the air supply pipe 23, and the dust in the airflow will be filtered and cleaned by the filter 29 in the cleaning pipe 24. The clean airflow after passing through the filter 29 will enter the connecting hose 25. Since the magnetic plate 40 blocks the gas injection pipe 27 at this time, the connecting hose 25 will expand and push the slide plate 26 to slide to the right along the slide seat 49, and then drive the industrial camera 10 to slide to the right through the slide 9. In the process of sliding the slide plate 26, the push rod 37 will slide to the right, so that the elastic connecting rope 38 will gradually tighten. When the elastic connecting rope 38 is tightened, it will pull the third magnetic rod 36 to move to the right, so that the third magnetic rod 36 enters the second magnetic sleeve 39, and in this process, the rightward movement of the third magnetic rod 36 will cause the connecting frame 35 to move to the right, so that the second magnetic rod 3 When the first magnetic sleeve 33 is pulled out under the action of the connecting frame 35 and the second magnetic rod 34 is completely pulled out of the first magnetic sleeve 33, the third magnetic rod 36 will completely enter the second magnetic sleeve 39, and the connecting spring 43 will be stretched at the same time. At this time, the connecting frame 35 will attract the magnetic plate 40 to slide to the left under the action of the magnetic force, so that the gas injection pipe 27 is opened and starts to exhaust. The slide plate 26 and the connecting hose 25 will slide to the left under the action of the connecting spring 43, increasing the exhaust pressure of the gas injection pipe 27, so that the gas pressure ejected from the gas injection pipe 28 increases. When the gas injection pipe 27 is exhausted, the placement frame 3 of the transmission chip is just located in the flip groove 11. At this time, the jet action of the jet pipe 28 will cause the positioning head 47 installed on the forward end of the placement frame 3 to be separated from the positioning hole 45, so that the chip is turned over, and the positioning head 47 at the other end re-enters the positioning hole 45;

[0045] On the one hand, when the chip reaches the flip groove 11, the jet pipe 28 starts to spray gas, and the jet pressure of the jet pipe 28 is increased, so that the high-pressure gas blown by the jet pipe 28 acts on the chip, which can automatically flip the chip to take an image of the back of the chip, thereby realizing the appearance inspection of the front and back of the chip. On the other hand, the expansion and contraction of the connecting hose 25 can move the position of the industrial camera 10, expand the shooting range of the industrial camera 10, and improve the appearance inspection accuracy of the chip. At the same time, the gas injection pipe 27 can be automatically opened and closed according to the position of the chip, so that the gas pressure of the gas injection pipe 27 is relatively high when releasing gas;

[0046] In the process of the second magnetic rod 34 being pulled out of the first magnetic sleeve 33, the second magnetic rod 34 will pull the first magnetic rod 30 to slide to the right under the action of magnetic force until the filter 29 fits with the limit sleeve 31, so that the shaking spring 32 is compressed. When the second magnetic rod 34 is completely pulled out of the first magnetic sleeve 33, the second magnetic rod 34 cannot adsorb the first magnetic rod 30, so that the filter 29 is shaken under the action of the shaking spring 32, and the dust attached to the outer surface is shaken off.

[0047] The filter 29 is made to be self-cleaning, and dust and other impurities are prevented from clogging the holes of the filter 29, which affects the transmission efficiency of the airflow, thereby causing the chip to be unable to turn over automatically, thereby ensuring the automatic turning over of the chip, realizing all-round detection of the front and back sides of the chip, improving the detection efficiency, and preventing dust and other impurities from being present in the gas blowing toward the chip, causing the chip to be contaminated and affecting the detection accuracy;

[0048] When the flipping is completed, the air flow in the connecting hose 25 gradually decreases, and the retraction effect of the connecting spring 43 will cause the push rod 37 to push the third magnetic rod 36 out of the second magnetic sleeve 39, so that the second magnetic rod 34 enters the first magnetic sleeve 33, and the second magnetic rod 34 is re-adsorbed on the first magnetic rod 30. When the second magnetic rod 34 completely enters the first magnetic sleeve 33, the rebound force of the reset spring 42 is greater than the adsorption force of the magnetic plate 40 and the connecting frame 35, so that the magnetic plate 40 re-blocks the gas injection pipe 27, and the industrial camera 10 moves to the leftmost side of the limit frame 8.

[0049] Reference Figure 1-Figure 8 , a chip detection and sorting method, comprising the following steps:

[0050] Step 1: Place the chip in the placement frame 3;

[0051] Step 2: conveying the chip through the conveying rack 2, the conveying frame 44 and the placement frame 3;

[0052] Step 3: During the conveying process, the motor 17 is started to make the cleaning brush 21 clean the front and back of the chip, and the industrial camera 10 is started to take pictures at the same time;

[0053] When the chip conveying inspection starts, the motor 17 is started, so that the rotating shaft 18 drives the fan blades 19 and the cleaning rod 20 to rotate, and then the cleaning brush 21 rotates. When the chip passes through the cleaning brush 21, the cleaning brush 21 cleans the front and back of the chip, and the cleaned dust and air flow are drawn into the upper exhaust pipe 14 and the lower exhaust pipe 15 under the action of the fan blades 19, and enter the connecting pipe 22;

[0054] When the chip starts to be transported, the industrial camera 10 is started to capture the appearance image of the chip;

[0055] Step 4: When the chip is transported to the position where the flipping groove 11 is located, it is automatically flipped over, and the industrial camera 10 takes a picture of the back of the chip;

[0056] The airflow and dust entering the connecting pipe 22 will be transmitted to the cleaning pipe 24 under the action of the air supply pipe 23, and the dust in the airflow will be filtered and cleaned by the filter 29 in the cleaning pipe 24. The clean airflow after passing through the filter 29 will enter the connecting hose 25. Since the magnetic plate 40 blocks the gas injection pipe 27 at this time, the connecting hose 25 will expand and push the slide plate 26 to slide to the right along the slide seat 49, and then drive the industrial camera 10 to slide to the right through the slide 9. In the process of sliding the slide plate 26, the push rod 37 will slide to the right, so that the elastic connecting rope 38 will gradually tighten. When the elastic connecting rope 38 is tightened, it will pull the third magnetic rod 36 to move to the right, so that the third magnetic rod 36 enters the second magnetic sleeve 39, and in this process, the rightward movement of the third magnetic rod 36 will cause the connecting frame 35 to move to the right, so that the second magnetic rod 3 When the first magnetic sleeve 33 is pulled out under the action of the connecting frame 35 and the second magnetic rod 34 is completely pulled out of the first magnetic sleeve 33, the third magnetic rod 36 will completely enter the second magnetic sleeve 39, and the connecting spring 43 will be stretched at the same time. At this time, the connecting frame 35 will attract the magnetic plate 40 to slide to the left under the action of the magnetic force, so that the gas injection pipe 27 is opened and starts to exhaust. The slide plate 26 and the connecting hose 25 will slide to the left under the action of the connecting spring 43, increasing the exhaust pressure of the gas injection pipe 27, so that the gas pressure ejected from the gas injection pipe 28 increases. When the gas injection pipe 27 is exhausted, the placement frame 3 of the transmission chip is just located in the flip groove 11. At this time, the jet action of the jet pipe 28 will cause the positioning head 47 installed on the forward end of the placement frame 3 to be separated from the positioning hole 45, so that the chip is turned over, and the positioning head 47 at the other end re-enters the positioning hole 45;

[0057] In the process of the second magnetic rod 34 being pulled out of the first magnetic sleeve 33, the second magnetic rod 34 will pull the first magnetic rod 30 to slide to the right under the action of magnetic force until the filter 29 fits with the limit sleeve 31, so that the shaking spring 32 is compressed. When the second magnetic rod 34 is completely pulled out of the first magnetic sleeve 33, the second magnetic rod 34 cannot adsorb the first magnetic rod 30, so that the filter 29 is shaken under the action of the shaking spring 32, and the dust attached to the outer surface is shaken off.

[0058] When the turning over is completed, the air flow in the connecting hose 25 gradually decreases, and the retraction of the connecting spring 43 will cause the push rod 37 to push the third magnetic rod 36 away from the second magnetic sleeve 39, so that the second magnetic rod 34 enters the first magnetic sleeve 33, and the second magnetic rod 34 is adsorbed to the first magnetic rod 30 again. When the second magnetic rod 34 completely enters the first magnetic sleeve 33, the rebound force of the reset spring 42 is greater than the adsorption force of the magnetic plate 40 and the connecting frame 35, so that the magnetic plate 40 blocks the gas injection pipe 27 again, and the industrial camera 10 moves to the leftmost side of the limit frame 8.

[0059] Step 5: The qualified chips are mechanically transported to the next station by the conveying frame 44 and the placement frame 3, and the unqualified chips are removed by the robot 4 and the vacuum suction cup 5, placed in the defective collection frame, and displayed on the display screen 6.

[0060] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A chip detection and sorting device, comprising an electrical cabinet (1), a manipulator (4), a vacuum suction cup (5) mounted on the free end of the manipulator (4), and an industrial camera (10), characterized in that: Also includes: A conveying frame (2) is fixedly connected to the electrical cabinet (1), a conveying frame (44) is slidably connected to the conveying frame (2), a placement frame (3) is rotatably connected inside the conveying frame (44), both ends of the placement frame (3) are fixedly connected to positioning mechanisms, and a turning groove (11) is provided on the conveying frame (2); An air injection pipe (27) is fixedly connected to the conveying frame (2), an air injection pipe (28) is fixedly connected to the air injection pipe (27), and an air injection end of the air injection pipe (28) is arranged in the turning groove (11). The chip is placed in a placement frame (3) and the size of the placement frame (3) is adapted to the size of the chip; An upper exhaust hood (12) is fixedly connected to the top of the conveying frame (2), the top of the upper exhaust hood (12) is fixedly connected to an upper exhaust pipe (14), the upper exhaust pipe (14) is fixedly connected to a connecting pipe (22), the upper exhaust pipe (14) is fixedly connected to a fixing frame (16), a motor (17) is installed on the fixing frame (16), the output end of the motor (17) is fixedly connected to a rotating shaft (18), a fan blade (19) is fixedly connected to the rotating shaft (18), an end of the rotating shaft (18) away from the motor (17) is fixedly connected to a cleaning rod (20), an end of the cleaning rod (20) away from the rotating shaft (18) is fixedly connected to a cleaning brush (21), the cleaning brush (21) is in contact with the chip, and the cleaning rod (20) is rotatably connected to the upper exhaust hood (12); The interior of the conveying frame (2) is fixedly connected to a lower exhaust hood (13); the bottom of the lower exhaust hood (13) is fixedly connected to a lower exhaust pipe (15); the lower exhaust pipe (15) is connected to a connecting pipe (22); the fixed frame (16), the motor (17), the rotating shaft (18) and the fan blade (19) are also installed in the lower exhaust pipe (15); and a cleaning rod (20) and a cleaning brush (21) are also installed in the lower exhaust hood (13); An air delivery pipe (23) is fixedly connected to the connecting pipe (22), the end of the air delivery pipe (23) is fixedly connected to a cleaning pipe (24), one end of the cleaning pipe (24) away from the air delivery pipe (23) is fixedly connected to a connecting hose (25), one end of the connecting hose (25) away from the cleaning pipe (24) is fixedly connected to a slide plate (26), and the top of the slide plate (26) is fixedly connected to a slide frame (9). Wherein, both sides of the conveying frame (2) are fixedly connected to the limit frame (8), the slide frame (9) is slidably connected to the limit frame (8), the industrial camera (10) is installed on the inner top of the slide frame (9), the slide plate (26) is slidably connected to the gas injection pipe (27), and the top of the electrical cabinet (1) is fixedly connected to a slide seat (49), and the slide plate (26) is slidably connected to the slide seat (49); A display screen (6) is installed on the top of the electrical cabinet (1), a control panel (7) is installed on the top of the electrical cabinet (1), and the manipulator (4) is installed on the top of the electrical cabinet (1).

2. A chip detection and sorting device according to claim 1, characterized in that: It also includes a filter screen (29) slidably connected to the cleaning tube (24), a first magnetic rod (30) being fixedly connected to one side of the filter screen (29), and a shaking spring (32) being sleeved on the first magnetic rod (30). The cleaning tube (24) is fixedly connected to a limiting sleeve (31), the first magnetic rod (30) is slidably connected to the limiting sleeve (31), the two ends of the shaking spring (32) are respectively fixedly connected to the filter screen (29) and the cleaning tube (24), and the shaking spring (32) is sleeved on the limiting sleeve (31).

3. A chip detection and sorting device according to claim 2, characterized in that: It also includes a push rod (37) fixedly connected to the slide plate (26), wherein an elastic connecting rope (38) is fixedly connected inside the push rod (37). The end of the gas injection pipe (27) is fixedly connected to a second magnetic sleeve (39), the second magnetic sleeve (39) is fixedly connected to a connecting spring (43), the connecting spring (43) is fixedly connected to the slide plate (26), the end of the push rod (37) is fitted with a third magnetic rod (36), one end of the third magnetic rod (36) is fixedly connected to an elastic connecting rope (38), the other end of the third magnetic rod (36) is fixedly connected to a connecting frame (35), the side of the connecting frame (35) away from the third magnetic rod (36) is fixedly connected to a second magnetic rod (34), the end of the cleaning pipe (24) is fixedly connected to a first magnetic sleeve (33), the push rod (37) is slidably connected to the second magnetic sleeve (39), the third magnetic rod (36) and the second magnetic sleeve (39) are attracted to each other, the second magnetic rod (34) and the first magnetic sleeve (33) are slidably connected and the two are attracted to each other.

4. A chip detection and sorting device according to claim 3, characterized in that: It also includes a return spring (42) fixedly connected to the gas injection pipe (27), the end of the return spring (42) being fixedly connected to a magnetic plate (40), and a side of the magnetic plate (40) close to the return spring (42) being fixedly connected to a limit rod (41). The limiting rod (41) is slidably connected to the gas injection pipe (27), and the magnetic plate (40) is attracted to the connecting frame (35).

5. The chip detection and sorting equipment according to claim 1, characterized in that: The positioning mechanism comprises a slide groove (46) provided in the placement frame (3), a positioning head (47) being slidably connected in the slide groove (46), and a positioning spring (48) being fixedly connected at one end of the positioning head (47). A positioning hole (45) is provided in the conveying frame (44), one end of the positioning head (47) away from the positioning spring (48) is matched with the positioning hole (45), and one end of the positioning spring (48) away from the positioning head (47) is fixedly connected to the slide groove (46).

6. A chip detection and sorting method, using a chip detection and sorting device according to any one of claims 1 to 5, characterized in that: The steps include: Step 1: Place the chip in the placement frame (3); Step 2: transporting the chip via the transport rack (2), the transport frame (44) and the placement frame (3); Step 3: During the conveying process, the motor (17) is started to allow the cleaning brush (21) to clean the front and back sides of the chip, and the industrial camera (10) is started to take pictures at the same time; Step 4: When the chip is transported to the location of the flipping groove (11), it is automatically flipped over, and the industrial camera (10) takes a picture of the back of the chip; Step 5: The qualified chips are mechanically transported to the next station by the transport frame (44) and the placement frame (3), and the unqualified chips are removed by the robot (4) and the vacuum suction cup (5), placed in the defective collection frame, and displayed on the display screen (6).

Images