A piezoelectric driving-based active isolation flange and a control method

Abstract

The application discloses a kind of active vibration isolation flanges based on piezoelectric drive and control method, active vibration isolation flanges include inner ring, outer ring, first web, second web, piezoelectric actuator module, sensing module and control module;First web, second web are arranged between inner ring, outer ring;Piezoelectric actuator module includes M piezoelectric actuator units being evenly arranged between inner ring, outer ring in circumference;Piezoelectric actuator unit includes first bolt, second bolt, first nut, second nut, connecting piece and piezoelectric actuator;Sensing module includes first to fourth acceleration sensors;Control module controls the piezoelectric actuator of M piezoelectric actuator units according to the sensing data of first to fourth acceleration sensors respectively.The application can be realized in low frequency mode to the microvibration generated by system active control, reliability is high, withstand torque is big, precision is high, structure is simple, support stiffness is high, can be widely applied in aerospace navigation and precision driving etc.

Description

Technical Field

[0001] This invention relates to the field of micro-vibration isolation technology, and in particular to a radial micro-vibration active isolation flange and control method based on piezoelectric drive. Background Technology

[0002] Vibration interference is a significant factor affecting the pointing accuracy, stable operation, and precision strike capabilities of missiles, aircraft, and other similar devices. These devices operate in unique environments with limited internal space and high overall structural rigidity requirements. The vibrations generated by motors during operation are minimal, and the vibration control frequency band is low, making control extremely challenging. Therefore, the vibration control system faces specific and stringent requirements regarding complexity, reliability, and stability.

[0003] Numerous measures, including various active and passive vibration isolation schemes, have been proposed both domestically and internationally to address vibration interference issues. Currently, active vibration isolation is mostly studied and applied in the design of vibration isolation platforms in aerospace fields such as satellites, and is deployed between platforms and at truss connections. These devices generate low-frequency micro-vibrations during operation, making active vibration isolation more effective for vibration control. For ring-shaped structures such as torpedoes, rolling mill rollers, and air bearings, passive vibration isolation is generally used. While this method is more suitable for high-frequency vibration control, its efficiency is lower at lower operating frequencies, affecting the reliability and stability of equipment operation and intelligent control. Therefore, this paper designs a hybrid active-passive vibration isolation system and its control method for ring structures, employing a combined active and passive vibration isolation approach to achieve more reliable vibration control across the entire frequency range for such equipment.

[0004] Currently, active vibration isolation systems generally employ electromagnetic, hydraulic, and piezoelectric methods. Electromagnetic drives are susceptible to magnetic field interference, while hydraulic mechanisms require significant space. Piezoelectric actuators, based on the inverse piezoelectric effect, offer advantages such as small size, fast response, self-locking upon power failure, and high electromechanical conversion efficiency. Therefore, the trend towards miniaturization, micro-miniaturization, and integration of equipment is increasingly evident, leading to widespread attention and research on active, semi-active, and passive vibration control technologies based on piezoelectric materials. Among these, piezoelectric active vibration isolation, although complex to implement, offers superior isolation performance. Utilizing piezoelectric materials for vibration control of annular flange structures holds significant research importance and broad application prospects in today's rapidly developing scientific and technological landscape both domestically and internationally. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to address the deficiencies mentioned in the background art by providing an active vibration isolation flange and control method based on piezoelectric drive.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] The application discloses a piezoelectric driving-based active isolation flange, which comprises an inner ring, an outer ring, a first web, a second web, a piezoelectric driving module, a sensing module and a control module.

[0008] The first web and the second web are of the same structure and are in the shape of a circular ring.

[0009] The inner ring and the outer ring are both hollow cylinders with open ends; the first web and the second web are arranged in parallel between the inner ring and the outer ring, and the inner walls thereof are coaxially fixed to the outer wall of the inner ring, and the outer walls thereof are coaxially fixed to the inner wall of the outer ring.

[0010] M first countersunk through holes are uniformly arranged on the inner wall of the inner ring in the circumferential direction, M second countersunk through holes are uniformly arranged on the outer wall of the outer ring in the circumferential direction, the piezoelectric driving module comprises M piezoelectric driving units, the first countersunk through hole, the piezoelectric driving unit and the second countersunk through hole are in one-to-one correspondence, and M is a natural number greater than or equal to 3.

[0011] The piezoelectric driving unit comprises a first bolt, a second bolt, a first nut, a second nut, a connecting piece and a piezoelectric actuator.

[0012] The tail end of the piezoelectric actuator is provided with a threaded blind hole matched with the second bolt.

[0013] The connecting piece is in the shape of a cylinder, one end center thereof is provided with a threaded blind hole used for fixing the contact foot of the piezoelectric actuator, and the other end center thereof is provided with a flat-bottomed blind hole used for matching with the stud of the first bolt.

[0014] The stud of the first bolt is sequentially inserted into the flat-bottomed blind hole of the connecting piece through the corresponding first countersunk through hole and the first nut of the piezoelectric driving unit, the first bolt and the first nut are threadedly connected, and the nut of the first bolt is fixed in the corresponding first countersunk through hole of the piezoelectric driving unit; the stud of the second bolt is threadedly connected with the threaded blind hole at the tail end of the piezoelectric actuator after passing through the corresponding second countersunk through hole of the piezoelectric driving unit, so that the piezoelectric actuator is fixed on the inner wall of the outer ring.

[0015] The connecting piece is coaxially fixed with the piezoelectric actuator through the threaded blind hole thereof.

[0016] The second nut is arranged between the first nut and the connecting piece, is threadedly connected with the first bolt, and one side of the second nut abuts against one end of the connecting piece away from the piezoelectric actuator, so as to adjust the pre-pressure of the piezoelectric actuator.

[0017] The first bolt, the connecting piece, the piezoelectric actuator and the second bolt are coaxial and the axis line thereof passes through the center of the inner ring; the M piezoelectric driving units are coplanar.

[0018] The sensing module includes a first to a fourth acceleration sensor, wherein the first and second acceleration sensors are disposed on the inner ring, and the third and fourth acceleration sensors are disposed on the outer ring. Let the line where the first and third acceleration sensors are located be a, and the line where the second and fourth acceleration sensors are located be b. Then, lines a and b both pass through the center of the inner ring, and lines a and b are perpendicular to each other.

[0019] The control module is connected to the first to fourth acceleration sensors and the piezoelectric actuators of the M piezoelectric actuation units, respectively, and is used to control the piezoelectric actuators of the M piezoelectric actuation units to work based on the sensing data of the first to fourth acceleration sensors.

[0020] As a further optimization of the active vibration isolation flange based on piezoelectric drive of the present invention, both the first web plate and the second web plate are provided with several through holes evenly distributed in the circumference to reduce weight.

[0021] As a further optimization of the active vibration isolation flange based on piezoelectric drive of the present invention, both the first nut and the second nut are anti-loosening nuts to prevent loosening and slippage during operation.

[0022] As a further optimization of the active vibration isolation flange based on piezoelectric drive of the present invention, let the plane where the M piezoelectric actuation units are located be plane L. Then the inner ring and the outer ring are symmetrical about plane L, and the first web plate is symmetrical about plane L and the second web plate.

[0023] As a further optimization of the active vibration isolation flange based on piezoelectric drive of the present invention, M is set to 8.

[0024] The piezoelectric actuator comprises a disc spring, a drive foot, a piezoelectric stack, and a housing. The piezoelectric stack is composed of piezoelectric ceramic sheets. The size of the piezoelectric stack is related to the length of the selected piezoelectric actuator. The wider the cross-section of the ceramic sheets in the piezoelectric stack, the greater the output thrust. The longer the piezoelectric actuator, the more layers and the greater the thickness of the piezoelectric stack. The polarization directions of adjacent piezoelectric ceramic sheets in each layer are opposite. When the piezoelectric actuator is working, the silver layer end faces of two spaced ceramic sheets are respectively grounded and connected to a voltage signal of a certain amplitude and frequency.

[0025] This invention also discloses a control method for the active vibration isolation flange based on piezoelectric drive, comprising the following steps:

[0026] Step 1) Let the eight piezoelectric actuators be arranged in a clockwise direction as the first to the eighth piezoelectric actuators. Establish a polar coordinate system with the center of the inner ring as the origin, the axis of the first piezoelectric actuator as the y-direction, and the axis of the third piezoelectric actuator as the x-direction.

[0027] Step 2): The control module calculates the vibration interference frequency Freq based on the sensing signals from the first to fourth accelerometers.in Amplitude r and angle θ;

[0028] Step 3): The control module calculates the displacements ΔL1, ΔL2, ΔL3, ΔL4, ΔL5, ΔL6, ΔL7, and ΔL8 of the inner and outer rings on the axes of the first to eighth piezoelectric actuators based on r and θ.

[0029]

[0030] but In the formula, ΔL'1, ΔL'2, ΔL'3, ΔL'4, ΔL'5, ΔL'6, ΔL'7, and ΔL'8 are the vibration response displacements that the first to eighth piezoelectric actuation units need to generate, respectively.

[0031]

[0032] Step 4) The control module controls the piezoelectric actuators of the first to eighth piezoelectric actuation units to work, generating vibration response displacements ΔL'1, ΔL'2, ΔL'3, ΔL'4, ΔL'5, ΔL'6, ΔL'7, and ΔL'8 respectively.

[0033] Compared with the prior art, the present invention, employing the above technical solution, has the following technical effects:

[0034] 1. This invention designs and optimizes the structure of traditional support flanges used in general aircraft or missile propulsion systems. By precisely designing and arranging piezoelectric actuators in the flange space, it adopts an active vibration isolation method to control and attenuate the vibration interference generated during the operation of the propulsion device. It is suitable for fields such as industrial production, underwater propulsion, and aerospace that require vibration isolation of ring flange structures.

[0035] 2. This invention uses piezoelectric actuators as the excitation source for piezoelectric actuation devices in an active vibration isolation system. This results in fast response speed and high precision. Multiple piezoelectric actuation devices arranged circumferentially work together, allowing for timely changes in input frequency, voltage, and drive mode to control vibration and adjust performance in the face of multi-source, multi-directional vibration interference. Furthermore, piezoelectric actuators are small in size, have high thrust, and are unaffected by electromagnetic interference, making them suitable for confined spaces and complex environments where electromagnetic motors and hydraulic mechanisms are unsuitable.

[0036] 3. Based on the principle of vibration isolation, this invention designs a closed-loop control system suitable for the integrated vibration-damping flange. By constructing the closed-loop controller, it is expected to improve the vibration control effect within the operating frequency band of the integrated vibration-damping flange and achieve closed-loop control of vibration, thereby realizing more comprehensive vibration control performance. This will further enhance the system's performance and application potential, providing strong support for vibration control research and practical applications in related fields. Attached Figure Description

[0037] Figure 1 This is a top view of the present invention after the first web plate has been removed;

[0038] Figure 2 This is a partial cross-sectional view of the present invention after the first web plate has been removed;

[0039] Figure 3 This is a schematic diagram illustrating the working principle of the piezoelectric actuator in the piezoelectric actuation device of the present invention;

[0040] Figure 4 This is a schematic diagram of the deformation and control modeling analysis of the present invention under vibration disturbance;

[0041] Figure 5 This is a schematic diagram of the vibration control simulation results of the present invention.

[0042] In the figure, 1-outer ring, 2-piezoelectric actuation unit, 3-inner ring, 4-second web plate, 5-first bolt, 6-second bolt, 7-first nut, 8-second nut, 9-connector, 10-piezoelectric actuator. Detailed Implementation

[0043] To enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention will be further described in detail below with reference to the accompanying drawings:

[0044] This invention can be implemented in many different forms and should not be considered limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully express the scope of the invention to those skilled in the art. In the drawings, components are enlarged for clarity.

[0045] like Figure 1 As shown, the present invention discloses an active vibration isolation flange based on piezoelectric drive, comprising an inner ring, an outer ring, a first web, a second web, a piezoelectric actuation module, a sensing module, and a control module;

[0046] The first and second webs have the same structure, both being annular;

[0047] like Figure 2 As shown, both the inner ring and the outer ring are hollow cylinders with openings at both ends; the first web and the second web are arranged in parallel between the inner ring and the outer ring, and the inner walls of both are coaxially fixed to the outer wall of the inner ring, and the outer walls of both are coaxially fixed to the inner wall of the outer ring.

[0048] The inner ring has M first countersunk through holes evenly distributed circumferentially on its inner wall, and the outer ring has M second countersunk through holes evenly distributed circumferentially on its outer wall. The piezoelectric actuation module includes M piezoelectric actuation units. The first countersunk through holes, piezoelectric actuation units, and second countersunk through holes correspond one-to-one, and M is a natural number greater than or equal to 3.

[0049] The piezoelectric actuation unit includes a first bolt, a second bolt, a first nut, a second nut, a connector, and a piezoelectric actuator;

[0050] The tail end of the piezoelectric actuator is provided with a threaded blind hole that matches the second bolt;

[0051] The connector is cylindrical, with a threaded blind hole at the center of one end for fixing to the actuating foot of the piezoelectric actuator, and a flat-bottomed blind hole at the center of the other end for engaging with the stud of the first bolt.

[0052] The stud of the first bolt passes through the first countersunk through hole and the first nut corresponding to the piezoelectric actuator in sequence and then extends into the flat-bottomed blind hole of the connector. The first bolt and the first nut are threadedly connected, so that the nut of the first bolt is fixed in the first countersunk through hole corresponding to the piezoelectric actuator. The stud of the second bolt passes through the second countersunk through hole corresponding to the piezoelectric actuator and is threadedly connected to the threaded blind hole at the tail end of the piezoelectric actuator, thereby fixing the piezoelectric actuator on the inner wall of the outer ring.

[0053] The connector is coaxially fixed to the piezoelectric actuator via its threaded blind hole;

[0054] The second nut is disposed between the first nut and the connector, and is threadedly connected to the first bolt. One side of the second nut abuts against the end of the connector away from the piezoelectric actuator, and is used to adjust the preload of the piezoelectric actuator.

[0055] The first bolt, connector, piezoelectric actuator, and second bolt are all coaxial, and their axes pass through the center of the inner ring; the M piezoelectric actuation units are coplanar.

[0056] The sensing module includes a first to a fourth acceleration sensor, wherein the first and second acceleration sensors are disposed on the inner ring, and the third and fourth acceleration sensors are disposed on the outer ring. Let the line where the first and third acceleration sensors are located be a, and the line where the second and fourth acceleration sensors are located be b. Then, lines a and b both pass through the center of the inner ring, and lines a and b are perpendicular to each other.

[0057] The control module is connected to the first to fourth acceleration sensors and the piezoelectric actuators of the M piezoelectric actuation units, respectively, and is used to control the piezoelectric actuators of the M piezoelectric actuation units to work based on the sensing data of the first to fourth acceleration sensors.

[0058] Both the first and second webs are provided with several through holes evenly distributed around their circumference to reduce weight.

[0059] Both the first nut and the second nut are anti-loosening nuts to prevent loosening and slippage during operation.

[0060] Let plane L be the plane containing the M piezoelectric actuators. Then, the inner and outer rings are symmetrical about plane L, and the first web is symmetrical about plane L and the second web. M is preferably taken as 8.

[0061] The piezoelectric actuator includes a piezoelectric stack, an actuating foot, a disc spring, and a housing. The size of the piezoelectric stack is related to the length of the selected piezoelectric actuator; the wider the cross-sectional ceramic sheet of the piezoelectric stack, the greater the output thrust. The longer the piezoelectric actuator, the more layers and the greater the thickness of the piezoelectric stack. The shape of the actuating foot is related to the connection method of the connecting device. The connection method used in the experimental case in this paper is a threaded connection, so the end of the actuating foot is machined with a corresponding thread. The shape and size of the disc spring and the housing are selected and matched according to the size of the piezoelectric actuator and the application.

[0062] The piezoelectric stack is composed of stacked piezoelectric ceramic sheets, with adjacent piezoelectric ceramic sheets in each layer having opposite polarization directions. The silver layer ends of two spaced-apart ceramic sheets are respectively grounded and connected to a voltage signal of a certain amplitude and frequency. For example... Figure 3 As shown, in operation, when a piezoelectric signal u1 is input to the piezoelectric actuator, the actuator's actuating foot extends or retracts accordingly, with an extension value of x1. After power is cut off, the actuating foot returns to its initial position. By adjusting the signal amplitude and frequency input to the piezoelectric actuator, the extension or retraction state of the actuator can be changed, thereby altering the elongation of the actuating foot and thus suppressing the vibration propagating from the inner ring to the outer ring of the flange during motor operation.

[0063] This invention also discloses a control method for the active vibration isolation flange based on piezoelectric drive. The method employs vibration control amplitude isolation; when the inner ring of the flange is disturbed in a certain direction due to motor operation, the piezoelectric actuator at the position indicated by that direction contracts, while the piezoelectric actuator in the opposite direction extends. For example, when the inner ring of the flange is disturbed vertically upwards, the upper piezoelectric actuator contracts, and the lower piezoelectric actuator extends; when the inner ring of the flange is disturbed vertically downwards, the upper piezoelectric actuator extends, and the lower piezoelectric actuator contracts, thereby reducing the interference vibration transmitted to the outer ring.

[0064] The specific steps are as follows:

[0065] Step 1) Let the eight piezoelectric actuators be arranged in a clockwise direction as the first to the eighth piezoelectric actuators. Establish a polar coordinate system with the center of the inner ring as the origin, the axis of the first piezoelectric actuator as the y-direction, and the axis of the third piezoelectric actuator as the x-direction.

[0066] Step 2): The control module calculates the vibration interference frequency Freq based on the sensing signals from the first to fourth accelerometers. in Amplitude r and angle θ, such asFigure 4 As shown;

[0067] Step 3): The control module calculates the displacements ΔL1, ΔL2, ΔL3, ΔL4, ΔL5, ΔL6, ΔL7, and ΔL8 of the inner and outer rings on the axes of the first to eighth piezoelectric actuators based on r and θ.

[0068]

[0069] but In the formula, ΔL'1, ΔL'2, ΔL'3, ΔL'4, ΔL'5, ΔL'6, ΔL'7, and ΔL'8 are the vibration response displacements that the first to eighth piezoelectric actuation units need to generate, respectively.

[0070]

[0071] Step 4) The control module controls the piezoelectric actuators of the first to eighth piezoelectric actuation units to work, generating vibration response displacements ΔL'1, ΔL'2, ΔL'3, ΔL'4, ΔL'5, ΔL'6, ΔL'7, and ΔL'8 respectively.

[0072] Vibration response displacement ΔL' of piezoelectric actuator i The output performance of the piezoelectric stack used in the piezoelectric actuator and the frequency and voltage of the external input driving signal determine the vibration response displacement of the piezoelectric actuator. Under a pulse input signal, the vibration response displacement of the piezoelectric actuator is approximately linearly related to the voltage of the input driving signal, and this linear relationship corresponds to the proportionality value k. i Determined by the output performance of the piezoelectric stack, its expression is:

[0073] ΔL' i =k i u i

[0074] In the formula, ΔL' i k represents the vibration response displacement of the i-th piezoelectric actuator. i The proportionality coefficient, u, represents the linear relationship between the vibration response displacement of the corresponding piezoelectric actuator and the voltage of the input drive signal. i This indicates the voltage value of the input drive electrical signal.

[0075] The frequency of the vibration control signal is related to the external vibration interference. An external source (similar to the vibration generated by a motor) provides vibration interference to the inner ring of the flange. The signal collected by the accelerometer is analyzed to obtain the frequency, amplitude, and direction of the main vibration interference signal. The frequency of the vibration control signal is consistent with the frequency of the main vibration interference signal, and its expression is:

[0076] Freq 输入 =Freq in

[0077] Under a simple harmonic input signal, the vibration response displacement of the piezoelectric actuator is related to the frequency of the input driving signal. Under the same driving voltage, the vibration response displacement of the piezoelectric actuator will decrease as the frequency increases, and its expression is as follows:

[0078] ΔL' i =k Freq k i u i

[0079] In the formula, k Freq This represents the proportionality coefficient between the vibration response displacement of the piezoelectric actuator at the frequency of the input harmonic drive electrical signal and the vibration response displacement of the piezoelectric actuator at the frequency of the input pulse drive electrical signal.

[0080] Vibration control simulation of a piezoelectric-driven active vibration isolation flange structure in free state was performed using simulation software. In the simulation, simple harmonic vibration disturbance was applied to the inner ring of the flange. The piezoelectric actuators in the first to eighth piezoelectric actuators were respectively connected to corresponding bias DC signals. The input voltage frequency and phase were the same as the frequency and phase of the disturbance vibration, thus damping the disturbance excitation on the inner ring of the flange. The voltage amplitude in the experimental embodiment was 0–150 Vpp; the adjusted voltage frequency could meet the requirements from low to high frequencies. In the experimental embodiment, the voltage frequency was 0–2000 Hz, thereby attenuating the vibration disturbance transmission from the inner ring to the outer ring of the flange when the motor rotates and the inner ring of the flange structure generates vibration disturbance. Figure 5 As shown.

[0081] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.

[0082] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A piezoelectric drive-based active vibration isolation flange, characterized by, The application relates to a piezoelectric actuator, which comprises an inner ring, an outer ring, a first web, a second web, a piezoelectric actuating module, a sensing module and a control module. The first web and the second web are of the same structure and are in the shape of a circular ring. The inner ring and the outer ring are both hollow cylinders with open ends; the first web and the second web are arranged in parallel between the inner ring and the outer ring, and the inner walls are coaxially fixed to the outer wall of the inner ring, and the outer walls are coaxially fixed to the inner wall of the outer ring. M first countersunk holes are evenly arranged on the inner wall of the inner ring in the circumferential direction, and M second countersunk holes are evenly arranged on the outer wall of the outer ring in the circumferential direction; the piezoelectric actuating module comprises M piezoelectric actuating units, and the first countersunk hole, the piezoelectric actuating unit and the second countersunk hole are one-to-one corresponding; M is a natural number greater than or equal to 3. The piezoelectric actuating unit comprises a first bolt, a second bolt, a first nut, a second nut, a connecting piece and a piezoelectric actuator. The tail end of the piezoelectric actuator is provided with a threaded blind hole matched with the second bolt. The connecting piece is in the shape of a cylinder, one end of which is provided with a threaded blind hole for fixing the contact foot of the piezoelectric actuator, and the other end is provided with a flat-bottomed blind hole for matching the stud of the first bolt. The stud of the first bolt passes through the corresponding first countersunk hole of the piezoelectric actuating unit and the first nut in sequence and then extends into the flat-bottomed blind hole of the connecting piece, and the first bolt and the first nut are threadedly connected, so that the nut of the first bolt is fixed in the corresponding first countersunk hole of the piezoelectric actuating unit; the stud of the second bolt passes through the corresponding second countersunk hole of the piezoelectric actuating unit and is threadedly connected with the threaded blind hole at the tail end of the piezoelectric actuator, so as to fix the piezoelectric actuator on the inner wall of the outer ring. The connecting piece is coaxially fixed to the piezoelectric actuator through the threaded blind hole. The second nut is arranged between the first nut and the connecting piece, is threadedly connected with the first bolt, and one side of the second nut abuts against one end of the connecting piece away from the piezoelectric actuator, so as to adjust the pre-pressure of the piezoelectric actuator. The first bolt, the connecting piece, the piezoelectric actuator and the second bolt are coaxial and the axis line passes through the center of the inner ring; the M piezoelectric actuating units are coplanar. The sensing module comprises first to fourth acceleration sensors, wherein the first and second acceleration sensors are arranged on the inner ring, the third and fourth acceleration sensors are arranged on the outer ring, the straight line where the first and third acceleration sensors are located is a, and the straight line where the second and fourth acceleration sensors are located is b; the straight lines a and b both pass through the center of the inner ring, and the straight lines a and b are perpendicular to each other. The control module is electrically connected with the first to fourth acceleration sensors and the piezoelectric actuators of the M piezoelectric actuating units respectively, and is used for controlling the piezoelectric actuators of the M piezoelectric actuating units to work according to the sensing data of the first to fourth acceleration sensors.

2. The piezoelectric drive-based active isolation flange according to claim 1, characterized by A plurality of through holes are evenly arranged on the first web and the second web in the circumferential direction, so as to reduce the weight.

3. The piezoelectric drive-based active isolation flange according to claim 1, characterized by, The first nut and the second nut are all lock nuts, so as to avoid loosening and sliding during work.

4. The piezoelectric drive-based active isolation flange according to claim 1, characterized by, Let the plane where the M piezoelectric actuating units are located be plane L; the inner ring and the outer ring are symmetrical about the plane L, and the first web is symmetrical about the plane L with the second web.

5. The piezoelectric drive-based active isolation flange according to claim 1, characterized by, M is 8.

6. The control method of the piezoelectric drive-based active isolation flange according to claim 5, characterized by, Comprising the following steps: Step 1), let 8 piezoelectric actuator units be in turn first to first eight piezoelectric actuator units in clockwise direction, with the center of the inner ring as the origin, the axis of the first piezoelectric actuator unit as the y direction, and the axis of the third piezoelectric actuator unit as the x direction to establish a polar coordinate system; Step 2), the control module calculates the frequency Freq, the amplitude r and the angle Θ of the vibration disturbance according to the sensing signals of the first to fourth acceleration sensors in ​ Step 3), the control module calculates the displacement ΔL1, ΔL2, ΔL3, ΔL4, ΔL5, ΔL6, ΔL7, ΔL8 of the inner ring and the outer ring on the axis of the first to eighth piezoelectric actuator units according to r and θ: Then In the formula, AL'1, AL'2, AL'3, AL'4, AL'5, AL'6, AL'7, and AL'8 are the vibration response displacements required to be generated by the first to eighth piezoelectric actuating units, respectively. Step 4), the control module controls the piezoelectric actuators of the first to eighth piezoelectric actuator units to work, respectively generating vibration response displacements ΔL'1, ΔL'2, ΔL'3, ΔL'4, ΔL'5, ΔL'6, ΔL'7, ΔL'8.

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